CN108584868A - Nanostructures closed loop control method and operating platform design scheme under a kind of SEM - Google Patents
Nanostructures closed loop control method and operating platform design scheme under a kind of SEM Download PDFInfo
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- CN108584868A CN108584868A CN201810258030.0A CN201810258030A CN108584868A CN 108584868 A CN108584868 A CN 108584868A CN 201810258030 A CN201810258030 A CN 201810258030A CN 108584868 A CN108584868 A CN 108584868A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0061—Methods for manipulating nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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Abstract
Nanostructures closed loop control method and operating platform design scheme under a kind of SEM.The research of nanostructures closed loop control method and operating platform will provide fundamental basis and practical approach to receive the stable operation of scale component under SEM, to promoting the further development of the fields correlative study such as China NEMS, bioengineering, photoelectric project, nano science to have important theory and realistic meaning.The work category basic research that project is carried out, it is main to focus on mechanism, method aspect, the real-time, efficiently and three-dimensional visualization operation provides relevant theoretical, method and control strategy of scale component is seen to receive, the development and functionization of nano-manipulator technology can fundamentally be promoted, with important theory significance and practical value, platform is provided to the industrialization in the fields such as bioengineering, photoelectric project, information storage for system.
Description
Technical field
The invention belongs to micro-nano operations, and in particular to nanostructures closed loop control method and operating platform are set under a kind of SEM
Meter scheme.
Background technology
Nano-manipulation be receive see so that micro-nano device is moved according to the wish of people by applying external field energy on scale,
Positioning, pickup/release, shaping etc. manipulate and the operations such as assembly and encapsulation, realizes effective control to entire microcosmos, is
It is micro-/to receive one of manufacturing science and the important content of technical research, it is that international robotics and nanosecond science and technology field are closed extensively
The hot research field of note.Nanometer operating system is explored in micro-/ nano scale function element and is played increasingly in manufacturing process
Important role, using nano-manipulator technology manufacture good reliability, adaptable, technical value added is high, market reward rate is more than
Conventional industries it is micro-/receive product, in electromechanical engineering, photoelectricity, information storage, medical treatment, bioengineering, material engineering, nano bionic
And the fields such as military affairs have broad application prospects.
It is continuous by size in operation since the size of nano-manipulation object extends to nanoscale by micro-meter scale
Scale effect, surface/interface effect and the quantum effect for reducing and generating play a leading role；In addition, machinery, electromagnetism, heat, fluid
Coupling etc. more make it is micro-/receive operation in show many phenomenons and feature different from macrotechnique, to it is micro-/receive
Operating technology brings huge challenge and many matter of science and technology.Due to the particularity on operation object scale, realize automatic
Change, there is also many theoretical and practical problems for batched operation.Therefore, based on molecule power theory to receive scale object behaviour
The control method that nanostructures are studied on the basis of being simulated has important theory significance and practical value.In addition, by
In receiving the unstructured feature for seeing operating environment and the scale effect of operation received, the dynamic sensing interexchanging during nano-manipulation is made to seem
It is particularly important.For nano-manipulation, compared to position sensor, micro- force sensor is better solution；But it is used for
Micro-nano operates, and the force snesor making of especially nanoscale operation is extremely difficult, cost of manufacture is high and easily damages.Cause
This, in non-structured nano-manipulation environment, if can know or simulate the micro/nano-scale (as utilized AR or VR technologies)
The power of component feels information, and these information datas are transmitted to by suitable pantograph ratio in the sensing range of operator, realizes
Power feels that feedback, operator can reasonably adjust the work angle and operating force of micro-nano component, keep operation/assembly more smart
Really and stablize.Therefore by teleoperation introduce micro-nano operation, widened operator micro-nano field operation sensing capability and
Operational capacity.In addition, guiding nano-manipulation by virtual 3D visions and virtual dynamic sensing interexchanging, nanometer operating system can be improved
Interactive capability and nano-manipulation real-time, accuracy and precision.
Invention content
The present invention manipulates the closed loop of nanostructures under SEM environment using the new method for studying nanostructures operation as target
The visualization expansion research of the real-time three-dimensional of method and SEM two-dimensional nano operating environments：Specific research contents is as follows.
Nanostructures closed loop control method and operating platform under the SEM, use molecular dynamics simulation nanostructures
Operating process, establish the optimum matching relation of work angle, operating point and single step displacement, theoretically solve receive component shifting
The efficiency and success rate problem of dynamic, positioning and pickup, and propose the three-dimensional closed loop nano-manipulation controlling party based on SEM two dimensional images
The modeling method of method and virtual nano-manipulation environment.
The extracting method of the three-dimensional feature information based on two-dimentional SEM image, utilizes the region of interest of two-dimentional SEM image
The ambiguity evaluation function in domain obtains target depth information, establishes the fuzzy control of end effector mechanism based on Simulink
Simulation is emulated, and finally using acquired information realization, the three-dimensional closed loop nano-manipulation based on fuzzy controls；It will be only
There is two dimensional image to be converted into three-dimensional visualization nano-manipulation environment, improves the sensing capability of operator.
The three-dimensional visualization nano-manipulation environment, only operator does not provide real-time image information, can also be real
After now satisfied to the virtual prognostication preview of new control method and algorithm, control actual platform carries out nano-manipulation automatically,
Research cycle is substantially reduced while saving numerous studies funds, to realize that base has been established in the full-automation of nano-manipulation
Plinth.
The control of the three-dimensional closed loop nano-manipulation based on two-dimentional SEM image, is being greatly reduced operating platform cost
While so that manipulation process is more stablized, is reliable, be conducive to the control accuracy and reliability that improve nano-manipulation.
The modeling method of the virtual nano-manipulation environment, establishes the model of nanostructures in Lammps；According to institute
The three-dimensional feature information extracted, with VS 2008 for main development environment, is combined by VR technologies using 3dsMax and OpenGL
Modeling, quickly establishes the dynamic skeleton model of probe and component.
Finally utilize the principal and subordinate based on SEM built is distant to receive operating platform, by virtual nano-manipulation model to being ground
The method studied carefully is verified.
Advantageous effect of the present invention.
From the point of view of application trend, existing nano-particle operating technology by operation object due to being limited, operating cost
It is high, application range is narrow, using nanostructures operating technology manufacture good reliability, adaptable, technical value added it is high it is micro-/receive production
Product have broad application prospects in fields such as photoelectricity, information storage, medical treatment, biotechnology, nano bionic and military affairs, have
Hope the key technology that development of relying is provided for fields such as information, biologies.
Study nanostructures operating process in adhesion strength changing rule, analysis realize receive scale component transfer, positioning and
The adhesion condition of pickup.
Three-dimensional feature information extracting method of the research based on two-dimentional SEM image and the nanostructures based on acquired information are closed
Ring control method realizes efficient, reliable nano-manipulation.
Build the nano-manipulation platform for taking into account operating efficiency, real-time, human-computer interaction and operating environment three-dimensional visualization.
Description of the drawings
Fig. 1 is general technical route map.
Fig. 2 Molecular Dynamics Models.
Fig. 3 is the directed force F of point and sample room distance Z and needle point and sample room(Z)Between relation schematic diagram.
Fig. 4 is nanostructures schematic diagram.
The specific implementation mode of the present invention.
Embodiment 1.
Nanostructures closed loop control method and operating platform under the SEM, use molecular dynamics simulation nanostructures
Operating process, establish the optimum matching relation of work angle, operating point and single step displacement, theoretically solve receive component shifting
The efficiency and success rate problem of dynamic, positioning and pickup.
The physical characteristic and experiment parameter of component are searched in analysis, and the model of nanostructures is established in Lammps；By right
The elasticity, plasticity, fracture characteristics of nanostructures are analyzed in the setting of mechanics parameter, from different work angle and operating point to receiving
Rice component model is operated, it influences the performance of component to observation analysis, is the behaviour such as movement, positioning, the pickup of nanostructures
Adhesion strength during work influences research and offers theoretical foundation.
Carbon nanocoils and zinc oxide nanowire are chosen as controlled device, is seen by micro force detection, the dynamic of operating process
Examine and analysis on Molecular Dynamics carry out model verification.
Embodiment 2.
The extracting method of the three-dimensional feature information based on two-dimentional SEM image, utilizes the region of interest of two-dimentional SEM image
The ambiguity evaluation function in domain obtains target depth information, establishes the fuzzy control of end effector mechanism based on Simulink
Simulation is emulated, and finally using acquired information realization, the three-dimensional closed loop nano-manipulation based on fuzzy controls；It will be only
There is two dimensional image to be converted into three-dimensional visualization nano-manipulation environment, improves the sensing capability of operator.
The accurate location information for obtaining operation instrument (probe) is either to the directly operation from end sample still to virtual
It is very crucial for the reconstruction of environment.It is real due to being fitted without additional measuring device or sensor out of end SEM sample chamber
When two-dimentional SEM image then become distant and receive most important servo source in operating system, it is operation instrument and operation object three
The foundation of the extraction of dimension coordinate information.
The characteristics of according to the SEM image of nanostructures operation, will apply edge detection algorithm and corrosion expansion completion probe
'sX-YPlane positioning；To probeZAcquisition to coordinate (depth), distinctive receive sees power variation (as schemed during nano-manipulation
Shown in 3) caused by operation image change start with, analysis receive component operation " non-contact-transition-contact " two-dimentional SEM figure
As feature, proposes the ambiguity evaluation function for constructing SEM image using gray value of image variance in interest region, pass through calculating
The numerical characteristic of Local Structure of Image, Biao Laida global informations, i.e. image fog-level, in the feelings for not increasing other hardware devices
Under condition, using small number of SEM image, reach preferable detection result.
The fuzzy-adaptation PID control model that Simulink based on Matlab establishes end effector mechanism is emulated, and is being verified
On the basis of controller algorithm and parameter setting are rational, according to acquired three-dimensional feature information, using fuzzy to system into
Row closed-loop control.
Embodiment 3.
The modeling method of the virtual nano-manipulation environment, establishes the model of nanostructures in Lammps；According to institute
The three-dimensional feature information extracted, with VS 2008 for main development environment, is combined by VR technologies using 3dsMax and OpenGL
Modeling, quickly establishes the dynamic skeleton model of probe and component.
Using the contacting mechanism model of nanostructures operation as foundation, the contact-impact of virtual nano-manipulation and non-contact is studied
Collision detection algorithm is classified as three parts point between probe and operation substrate, nano wire and operation substrate and probe and nano wire
It is not studied, is then integrated.
Force rendering algorithm is further studied, is used under the premise of rational with Matlab verification force rendering algorithms
Chia3d force rendering engines are rendered.
For building for operating platform, modeled first using modern control theory operating system of receiving distant to principal and subordinate, point
The stability of analysis system；The master that feedback device Omega3 and nanopositioning stage Attocube are felt based on power is studied on this basis
From the distant structure for receiving operating platform.
The technique study being combined using theoretical and experiment stablizes that principal and subordinate is distant to receive the realization for operate big pantograph ratio, establishes virtually
The mapping of operating environment and practical nano-manipulation platform.
By principal and subordinate it is distant receive operating system and three-dimensional visualization virtual operating environment fusion, complete have fictitious force feel feedback
Three-dimensional visualization principal and subordinate is distant to receive the building of operating platform.
It is a large amount of to carry out under different temperatures based on the platform built, the operation substrate of different surface roughness and different rulers
The experimental study of movement, positioning and the pickup of the typical samples such as very little carbon nanocoils, zinc oxide nanowire is counted with analysis and emulation
The result of calculation compares, further revised theory model, so that it is guaranteed that the feasibility of control method.
Claims (4)
1. nanostructures closed loop control method and operating platform design scheme under a kind of SEM, which is characterized in that use molecular dynamics
The operating process for simulating nanostructures, establishes the optimum matching relation of work angle, operating point and single step displacement, theoretically
The component that solves the problems, such as to receive is mobile, efficiency and success rate of positioning and pickup.
2. nanostructures closed loop control method and operating platform design scheme under a kind of SEM, which is characterized in that propose based on two
The ambiguity evaluation function in the interest region of SEM image is tieed up the method that obtains target depth information, based on acquired information,
It is proposed the three-dimensional closed loop nano-manipulation control method based on SEM two dimensional images；By the SEM nano-manipulations of only two-dimentional feedback image
Surrounding three-dimensional visualizes, and improves the sensing capability of operator；
The three-dimensional visualization nano-manipulation environment is not only that operator provides real-time image information, can also be realized right
After the virtual prognostication preview satisfaction of new control method and algorithm, control actual platform carries out nano-manipulation automatically, is saving
Research cycle is substantially reduced while numerous studies funds, to realize that the full-automation of nano-manipulation is laid a good foundation.
3. nanostructures closed loop control method and operating platform design scheme under a kind of SEM, which is characterized in that research is based on two dimension
The control method of the closed loop nano-manipulation of SEM image, makes manipulation process more steady while operating platform cost is greatly reduced
It is fixed, reliable, be conducive to the control accuracy and reliability that improve nano-manipulation.
4. nanostructures closed loop control method and operating platform design scheme under a kind of SEM, which is characterized in that there is power to feel for research
The principal and subordinate of telepresenc and prediction preview function is distant, which to receive operating platform, can greatly improve the Man machine interaction, successfully of nano-manipulation
Rate and efficiency save a large amount of development time and funds, and lay the foundation for the automation of nano-manipulation；It may advantageously facilitate and receive behaviour
The combination of work and remote operating, the new paragon of developing nano-manipulation control.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1757591A (en) * | 2004-10-10 | 2006-04-12 | 中国科学院沈阳自动化研究所 | Real-time force sense and visual image man-machine interaction method and system based on nanometer operation |
| US20100115671A1 (en) * | 2008-11-04 | 2010-05-06 | Dr. Sergiy Pryadkin | inertial positioner and an optical instrument for precise positioning |
| US20100126297A1 (en) * | 2008-10-06 | 2010-05-27 | Board Of Regents, The University Of Texas System | Microrobots with large actuation volumes, and controllers, systems, and methods |
| CN103900504A (en) * | 2014-04-10 | 2014-07-02 | 华中科技大学 | Nano-scale real-time three-dimensional visual information feedback method |
| CN108002344A (en) * | 2017-10-31 | 2018-05-08 | 哈尔滨理工大学 | Nanostructures closed loop control method and operating platform under SEM |
-
2018
- 2018-03-27 CN CN201810258030.0A patent/CN108584868A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1757591A (en) * | 2004-10-10 | 2006-04-12 | 中国科学院沈阳自动化研究所 | Real-time force sense and visual image man-machine interaction method and system based on nanometer operation |
| US20100126297A1 (en) * | 2008-10-06 | 2010-05-27 | Board Of Regents, The University Of Texas System | Microrobots with large actuation volumes, and controllers, systems, and methods |
| US20100115671A1 (en) * | 2008-11-04 | 2010-05-06 | Dr. Sergiy Pryadkin | inertial positioner and an optical instrument for precise positioning |
| CN103900504A (en) * | 2014-04-10 | 2014-07-02 | 华中科技大学 | Nano-scale real-time three-dimensional visual information feedback method |
| CN108002344A (en) * | 2017-10-31 | 2018-05-08 | 哈尔滨理工大学 | Nanostructures closed loop control method and operating platform under SEM |
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