CN108581628A - Alcohol spraying device, production method and mechanical processing machine - Google Patents
Alcohol spraying device, production method and mechanical processing machine Download PDFInfo
- Publication number
- CN108581628A CN108581628A CN201810394390.3A CN201810394390A CN108581628A CN 108581628 A CN108581628 A CN 108581628A CN 201810394390 A CN201810394390 A CN 201810394390A CN 108581628 A CN108581628 A CN 108581628A
- Authority
- CN
- China
- Prior art keywords
- holes
- spraying device
- alcohol spraying
- way valve
- alcohol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/10—Arrangements for cooling or lubricating tools or work
- B23Q11/1076—Arrangements for cooling or lubricating tools or work with a cutting liquid nozzle specially adaptable to different kinds of machining operations
Abstract
A kind of alcohol spraying device of the embodiment of the present application offer, production method and mechanical processing machine, the alcohol spraying device include air inlet pipe, escape pipe and 3 position-5 way valve, which is connected between the air inlet pipe and an air outlet pipe of alcohol spraying device.So, it can be ensured that alcohol spraying device equably sprays alcohol, so that it is guaranteed that the surface for the sputtering target material produced has consistent processing lines.
Description
Technical field
This application involves semiconductor sputtering target fields, in particular to a kind of alcohol spraying device device, making side
Method and mechanical processing machine.
Background technology
In the mechanical processing process of sputtering target material, need to be cooled down using alcohol.However, existing alcohol spraying
The spray amount of device is unstable, and the lines for directly resulting in the surface of the sputtering target material processed is inconsistent.
Invention content
In view of this, a kind of alcohol spraying device of the embodiment of the present application offer, production method and mechanical processing machine, to change
The kind above problem.
In order to achieve the above object, the embodiment of the present application adopts the following technical scheme that：
In a first aspect, the embodiment of the present application provides a kind of alcohol spraying device, including air inlet pipe, escape pipe and 3 position-5 way
Valve, the 3 position-5 way valve are connected between the air inlet pipe and the escape pipe.
Optionally, the alcohol spraying device provided according to the embodiment of the present application first aspect, the alcohol spraying device are answered
For mechanical processing machine, the mechanical processing machine is for processing sputtering target material；The 3 position-5 way valve is set to the machine
The side of tool machining tool.
Optionally, the alcohol spraying device provided according to the embodiment of the present application first aspect, the 3 position-5 way valve packet
Include the holes B and the holes P, wherein the holes P are connected to the air inlet pipe, and the holes B are connected to the escape pipe.
Optionally, the alcohol spraying device provided according to the embodiment of the present application first aspect is provided with the at the holes P
One gas-tpe fitting, and be connected to the air inlet pipe by first gas-tpe fitting；
The second gas-tpe fitting is provided at the holes B, the holes P are connected by second gas-tpe fitting and the escape pipe
It is logical.
Optionally, the alcohol spraying device provided according to the embodiment of the present application first aspect, the 3 position-5 way valve is also
Including the holes A, the holes R and the holes S, the holes A, the holes R and the holes S are sealed.
Optionally, according to the embodiment of the present application first aspect provide alcohol spraying device, the holes A, the holes R and
Be provided with grub screw in the holes S, raw material band be tied with outside the grub screw, to realize to the holes A, the holes R and
The sealing in the holes S.
Second aspect, the embodiment of the present application also provide a kind of alcohol spraying device production method, for making the application reality
Apply the alcohol spraying device that a first aspect provides, wherein the alcohol spraying device is applied to be processed sputtering target material
Mechanical processing machine；The method includes：
3 position-5 way valve is fixed on to the side of the mechanical processing machine；
By the air inlet pipe and an air outlet pipe of the alcohol spraying device two of which hole with the 3 position-5 way valve respectively
Connection；
The other three hole of the 3 position-5 way valve is sealed, and is detected by air tightness detection equipment described another
Whether gas leakage determines that making finishes when the other three hole is air tight in outer three holes.
Optionally, the alcohol spraying device production method provided according to the embodiment of the present application second aspect, described three five
Port valve door includes the holes B and the holes P；
The air inlet pipe and an air outlet pipe of alcohol spraying device is connected to the two of which hole of the 3 position-5 way valve respectively,
Including：
First gas-tpe fitting is set at the holes P, and controls the air inlet pipe of the alcohol spraying device by described the
One gas-tpe fitting is connected to the holes P；
Second gas-tpe fitting is set at the holes B, and controls escape pipe and the holes the B company of the alcohol spraying device
It is logical.
Optionally, the alcohol spraying device production method provided according to the embodiment of the present application second aspect, described three five
Port valve door further includes the holes A, the holes R and the holes S；The other three hole of the 3 position-5 way valve is sealed, including：
Grub screw is installed in the holes A, the holes R and the holes S respectively；
It is twined on the grub screw in the holes A, the holes R and the holes S respectively and sets raw material band, to realize sealing.
The third aspect, the embodiment of the present application provides a kind of mechanical processing machine, described for being processed to sputtering target material
Mechanical processing machine includes the alcohol spraying that the embodiment of the present application first aspect provides.
In terms of existing technologies, the embodiment of the present application has the advantages that：
A kind of alcohol spraying device, production method and mechanical processing machine provided by the embodiments of the present application, alcohol spraying
Device includes air inlet pipe, escape pipe and 3 position-5 way valve, the 3 position-5 way valve be connected to the air inlet pipe and the escape pipe it
Between.So, it can be ensured that alcohol spraying device equably sprays alcohol, so that it is guaranteed that the surface tool for the sputtering target material produced
There is consistent processing lines.
Description of the drawings
It, below will be to needed in the embodiment attached in order to illustrate more clearly of the technical solution of the embodiment of the present application
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of connection block diagram of alcohol spraying device provided by the embodiments of the present application；
Fig. 2 is the dimensional structure diagram of 3 position-5 way valve provided by the embodiments of the present application；
Fig. 3 is the floor map of 3 position-5 way valve shown in Fig. 2；
Fig. 4 is the another floor map of 3 position-5 way valve shown in Fig. 2；
Fig. 5 is a kind of flow diagram of alcohol spraying device production method provided by the embodiments of the present application；
Fig. 6 is the sub-step schematic diagram of step S502 shown in Fig. 5；
Fig. 7 is the sub-step schematic diagram of step S503 shown in Fig. 5.
Icon：100- alcohol spraying devices；110- alcohol storage containers；120- air inlet pipe；130- 3 position-5 way valves；
The first gas-tpe fittings of 131-；The second gas-tpe fittings of 132-；133- handles；140- escape pipes.
Specific implementation mode
To keep the purpose, technical scheme and advantage of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application
In attached drawing, technical solutions in the embodiments of the present application is clearly and completely described, it is clear that described embodiment is
Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, below the detailed description of the embodiments herein to providing in the accompanying drawings be not intended to limit it is claimed
Scope of the present application, but be merely representative of the selected embodiment of the application.Based on the embodiment in the application, this field is common
The every other embodiment that technical staff is obtained without making creative work belongs to the model of the application protection
It encloses.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
Through inventor the study found that in the mechanical processing process of sputtering target material, need to be cooled down using alcohol.Specifically
It is the surface that alcohol is sprayed onto to target, is realized using the effect of alcohol volatilization heat absorption.However, existing alcohol spraying device
Spray amount is unstable, causes the alcohol amount that the different location of target is sprayed inconsistent, so as to cause target material surface everywhere cold
But effect differs, final so that the surface of the sputtering target material processed has inconsistent lines.
For the defect present in above scheme, be inventor being obtained after putting into practice and carefully studying as a result,
Therefore, the discovery procedure of the above problem and the solution that hereinafter the embodiment of the present application is proposed regarding to the issue above, all
It should be the contribution that inventor makes the application during invention.
In order to ensure alcohol spraying device can equably cool down to the surface of sputtering target material injection alcohol, to make
The surface of sputtering target material has consistent lines, a kind of alcohol spraying device of the embodiment of the present application proposition, production method and machinery
Machining tool controls alcohol spraying device by 3 position-5 way valve, has stable air pressure, energy in view of 3 position-5 way valve
The uniformity for the alcohol that enough control alcohol spraying device is sprayed.The content of the program will be described in detail below.
As shown in Figure 1, being a kind of connection block diagram of alcohol spraying device 100 provided by the embodiments of the present application.The alcohol
Spraying device 100 can be applied to mechanical processing machine, and the mechanical processing machine is for processing sputtering target material.The alcohol spraying
Device 100 can be set to the side of the mechanical processing machine.
In the present embodiment, the alcohol spraying device 100 includes alcohol storage container 110, air inlet pipe 120, escape pipe
140 and 3 position-5 way valve 130, wherein the 3 position-5 way valve 130 is connected to the air inlet pipe 120 and the escape pipe
Between 140.The one end of the air inlet pipe 120 far from the air inlet pipe 120 can be connected with alcohol storage container 110.
In the present embodiment, the air inlet pipe 120 can be fixedly connected with the alcohol storage container 110, can also be with
The alcohol storage container 110 is detachably connected, and the present embodiment is without limitation.
Optionally, also referring to Fig. 2-Fig. 4, wherein Fig. 2 is a kind of alcohol spraying device provided by the embodiments of the present application
100 dimensional structure diagram, Fig. 3 are the floor map of alcohol spraying device shown in Fig. 2 100, and Fig. 4 is wine shown in Fig. 2
Plan view of the smart spraying device 100 along the directions L.
In the present embodiment, the 3 position-5 way valve 130 can select the valve of the model TG2531B-10 of STNC
Door.
Optionally, the 3 position-5 way valve 130 may include the holes A, the holes B, the holes P, the holes R and the holes S.Wherein, the holes P
It for air source hole, is connected to the air inlet pipe 120, the holes B are venthole, are connected to the escape pipe 140.
In some embodiments, the holes A, the holes R and the holes S are commonly used in noise reduction.In the present embodiment, institute
It states the holes A, the holes R and the holes S to be sealed, to avoid gas leakage, stablizes air pressure to be provided in 3 position-5 way valve 130,
To which the alcohol that control enters from air inlet pipe 120 equably sprays away from escape pipe 140.
Optionally, in the present embodiment, the first gas-tpe fitting 131, the air inlet pipe 120 can be set at the holes P
It can be connected to the holes P by first gas-tpe fitting 131.Second gas-tpe fitting 132 can be set at the holes B,
The escape pipe 140 can be connected to by second gas-tpe fitting 132 with the holes B.
Wherein, first gas-tpe fitting 131 and second gas-tpe fitting 132 can be 8 gas-tpe fittings of Φ.
It may insure the joint, the holes P and the air inlet in the holes B and the escape pipe 140 by gas-tpe fitting
The air-tightness of the joint of pipe 120.
Optionally, in the present embodiment, the holes A, the holes R and the holes A can be carried out by different modes
Sealing.
As an implementation, grub screw can be respectively set in the holes A, the holes R and the holes S, often
It is tied with raw material band respectively outside a grub screw.Wherein, raw material band is a kind of assistant product in fluid pipeline installation, is used for
Pipe fitting junction, to enhance the seal of pipeline junction.
Optionally, in the present embodiment, the 3 position-5 way valve 130 can be manually-operated gate, the three position five-way valve
Door 130 can also include handle 133, and unlatching and the pass of the 3 position-5 way valve 130 can be controlled by the handle 133
It closes.
Referring to Fig. 5, the embodiment of the present application also provides a kind of alcohol spraying device production method, for making the application reality
The alcohol spraying device 100 of example offer is provided.The detailed process of the alcohol spraying device production method is done in detail with reference to Fig. 5
It illustrates.
3 position-5 way valve 130 is fixed on the side of the mechanical processing machine by step S501.
Since alcohol spraying device 100 typically uses in the process of sputtering target material, and the processing of sputtering target material
Typically realized by corresponding mechanical processing machine, it therefore, in the present embodiment can be by three in order to facilitate user's operation
Five-way valve door 130 is fixed on the side of the mechanical processing machine.
Step S502, by the air inlet pipe 120 of the alcohol spraying device 100 and escape pipe 140 respectively with described three five
The two of which hole of port valve door 130 is connected to.
Optionally, in the present embodiment, the 3 position-5 way valve 130 includes the holes A, the holes B, the holes P, the holes R and the holes S.Its
In, described two holes can be the holes B and the holes P.
When implementing, the holes P can be connected to the air inlet pipe 120, it can be by the holes B and the escape pipe
140 connections.
Optionally, as shown in fig. 6, in the present embodiment, step S502 may include step S601 and step S602 two
Sub-step.
Step S601 is arranged the first gas-tpe fitting 131 in the holes P, and controls the air inlet pipe 120 by described first
Gas-tpe fitting 131 is connected to the holes P.
Place gas-tpe fitting is arranged at the holes B, and controls the escape pipe 140 by described second by step S602
Gas-tpe fitting 132 is connected to the holes B.
Step S503 is sealed the other three hole of the 3 position-5 way valve 130, and is set by air-leakage test
Whether gas leakage determines that making finishes when the other three hole is air tight in the standby detection the other three hole.
Optionally, as shown in fig. 7, in the present embodiment, step S503 may include step S701 and step S702 two
Sub-step.
Step S701 installs grub screw in the holes A, the holes R and the holes S respectively.
Step S702 is twined on the grub screw in the holes A, the holes R and the holes S set raw material band respectively, with reality
Now seal.
The embodiment of the present application also provides a kind of mechanical processing machine, and the mechanical processing machine is for adding sputtering target material
Work, the mechanical processing machine include alcohol spraying device 100 provided by the embodiments of the present application, to pass through the alcohol spraying device
100 pairs of sputtering target materials processed cool down.
In conclusion a kind of alcohol spraying device 100, production method and machine tool apparatus provided by the embodiments of the present application
Bed, the alcohol spraying device 100 include air inlet pipe 120, escape pipe 140 and 3 position-5 way valve 130, the 3 position-5 way valve
130 are connected between the air inlet pipe 120 and the escape pipe 140.So, it can be ensured that alcohol spraying device 100 equably sprays
Go out alcohol, so that it is guaranteed that the surface for the sputtering target material produced has consistent processing lines.
In the description of the present application, it should be noted that term "center", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description the application and simplify to describe, without
It is instruction or implies that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore not
It can be interpreted as the limitation to the application.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is instruction or implies relative importance.
In the description of the present application, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, can also be electrical connection；It can be directly connected, it can also be indirect by intermediary
It is connected, can is the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in this application.
The above, the only specific implementation mode of the application, but the protection domain of the application is not limited thereto, it is any
Those familiar with the art can easily think of the change or the replacement in the technical scope that the application discloses, and should all contain
It covers within the protection domain of the application.Therefore, the protection domain of the application should be subject to the protection scope in claims.
Claims (10)
1. a kind of alcohol spraying device, which is characterized in that including air inlet pipe, escape pipe and 3 position-5 way valve, described three five
Port valve door is connected between the air inlet pipe and the escape pipe.
2. alcohol spraying device according to claim 1, which is characterized in that the alcohol spraying device is applied to machinery and adds
Work lathe, the mechanical processing machine is for processing sputtering target material；The 3 position-5 way valve is set to the mechanical processing machine
Side.
3. alcohol spraying device according to claim 1 or 2, which is characterized in that the 3 position-5 way valve include the holes B and
The holes P, wherein the holes P are connected to the air inlet pipe, and the holes B are connected to the escape pipe.
4. alcohol spraying device according to claim 3, which is characterized in that it is provided with the first gas-tpe fitting at the holes P,
And it is connected to the air inlet pipe by first gas-tpe fitting；
The second gas-tpe fitting is provided at the holes B, the holes P are connected to by second gas-tpe fitting with the escape pipe.
5. alcohol spraying device according to claim 3, which is characterized in that the 3 position-5 way valve further includes the holes A, R
Hole and the holes S, the holes A, the holes R and the holes S are sealed.
6. alcohol spraying device according to claim 5, which is characterized in that set in the holes A, the holes R and the holes S
It is equipped with grub screw, raw material band is tied with outside the grub screw, to realize to the close of the holes A, the holes R and the holes S
Envelope.
7. a kind of alcohol spraying device production method, which is characterized in that for making the wine described in any one of claim 1-6
Smart spraying device, wherein the alcohol spraying device is applied to the mechanical processing machine being processed to sputtering target material；The side
Method includes：
3 position-5 way valve is fixed on to the side of the mechanical processing machine；
The air inlet pipe and an air outlet pipe of the alcohol spraying device is connected to the two of which hole of the 3 position-5 way valve respectively；
The other three hole of the 3 position-5 way valve is sealed, and described other three are detected by air tightness detection equipment
Whether gas leakage determines that making finishes when the other three hole is air tight in a hole.
8. the method according to the description of claim 7 is characterized in that the 3 position-5 way valve includes the holes B and the holes P；
The air inlet pipe and an air outlet pipe of alcohol spraying device is connected to the two of which hole of the 3 position-5 way valve respectively, is wrapped
It includes：
First gas-tpe fitting is set at the holes P, and the air inlet pipe for controlling the alcohol spraying device passes through first gas
Pipe fitting is connected to the holes P；
Second gas-tpe fitting is set at the holes B, and the escape pipe for controlling the alcohol spraying device is connected to the holes B.
9. according to the method described in claim 8, it is characterized in that, the 3 position-5 way valve further includes the holes A, the holes R and the holes S；
The other three hole of the 3 position-5 way valve is sealed, including：
Grub screw is installed in the holes A, the holes R and the holes S respectively；
It is twined on the grub screw in the holes A, the holes R and the holes S respectively and sets raw material band, to realize sealing.
10. a kind of mechanical processing machine, for being processed to sputtering target material, which is characterized in that the mechanical processing machine packet
Include the alcohol spraying device described in any one of claim 1-6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810394390.3A CN108581628A (en) | 2018-04-27 | 2018-04-27 | Alcohol spraying device, production method and mechanical processing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810394390.3A CN108581628A (en) | 2018-04-27 | 2018-04-27 | Alcohol spraying device, production method and mechanical processing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108581628A true CN108581628A (en) | 2018-09-28 |
Family
ID=63610335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810394390.3A Pending CN108581628A (en) | 2018-04-27 | 2018-04-27 | Alcohol spraying device, production method and mechanical processing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108581628A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2049559U (en) * | 1988-08-15 | 1989-12-20 | 沈广兴 | Two-fluid diaphragm air atomization device |
| JPH10194740A (en) * | 1997-01-09 | 1998-07-28 | Agency Of Ind Science & Technol | Formation of coated film of titanium dioxide |
| KR20010100715A (en) * | 2000-05-06 | 2001-11-14 | 김형준 | Thermal resolution apparatus using the spray of static electricity |
| US6667059B2 (en) * | 1999-12-30 | 2003-12-23 | Ancile Pharmaceuticals, Inc. | Odor-masking coating for a pharmaceutical preparation |
| CN101704124A (en) * | 2009-11-17 | 2010-05-12 | 宁波江丰电子材料有限公司 | Surface processing method of large-size sputtering target material |
| CN102705306A (en) * | 2012-05-24 | 2012-10-03 | 中国石油集团西部钻探工程有限公司 | Alcohol-spraying type steam path anti-freezing device for oil drilling |
| CN205250196U (en) * | 2015-12-15 | 2016-05-25 | 郴州京鑫农业有限责任公司 | Agricultural sprayer |
| CN107753982A (en) * | 2017-11-02 | 2018-03-06 | 广州轻机机械设备有限公司 | Mobile space sprayer unit |
-
2018
- 2018-04-27 CN CN201810394390.3A patent/CN108581628A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2049559U (en) * | 1988-08-15 | 1989-12-20 | 沈广兴 | Two-fluid diaphragm air atomization device |
| JPH10194740A (en) * | 1997-01-09 | 1998-07-28 | Agency Of Ind Science & Technol | Formation of coated film of titanium dioxide |
| US6667059B2 (en) * | 1999-12-30 | 2003-12-23 | Ancile Pharmaceuticals, Inc. | Odor-masking coating for a pharmaceutical preparation |
| KR20010100715A (en) * | 2000-05-06 | 2001-11-14 | 김형준 | Thermal resolution apparatus using the spray of static electricity |
| CN101704124A (en) * | 2009-11-17 | 2010-05-12 | 宁波江丰电子材料有限公司 | Surface processing method of large-size sputtering target material |
| CN102705306A (en) * | 2012-05-24 | 2012-10-03 | 中国石油集团西部钻探工程有限公司 | Alcohol-spraying type steam path anti-freezing device for oil drilling |
| CN205250196U (en) * | 2015-12-15 | 2016-05-25 | 郴州京鑫农业有限责任公司 | Agricultural sprayer |
| CN107753982A (en) * | 2017-11-02 | 2018-03-06 | 广州轻机机械设备有限公司 | Mobile space sprayer unit |
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Application publication date: 20180928 |