CN212028633U - Special source bottle and valve for containing high-purity chemicals - Google Patents

Special source bottle and valve for containing high-purity chemicals Download PDF

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Publication number
CN212028633U
CN212028633U CN202020629583.5U CN202020629583U CN212028633U CN 212028633 U CN212028633 U CN 212028633U CN 202020629583 U CN202020629583 U CN 202020629583U CN 212028633 U CN212028633 U CN 212028633U
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valve
air inlet
source bottle
interface
air outlet
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CN202020629583.5U
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吴跃友
张娟娟
丁健
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Xuzhou Yongda Chemical Co ltd
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Xuzhou Yongda Chemical Co ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model relates to a special source bottle and valve for splendid attire high-purity chemicals belongs to photovoltaic and semiconductor trade high-purity chemicals splendid attire technical field. The valve comprises a source bottle and a valve, wherein the valve air inlet interface and the valve air outlet interface are vertical to a valve body, and the air inlet and outlet interfaces face upwards, so that accumulated liquid blocking pipes are prevented from being generated on an air inlet and outlet pipeline and all channels of the valve. The valve body and the bottle mouth are sealed and fixed for the second time through a heat-shrinkable sleeve, and chemical leakage is avoided. The inlet and outlet air of the valve can be opened or closed simultaneously only by rotating the valve handle, the differentiated design of different sizes of the external threads of the inlet and outlet air port end is adopted, the marks of the inlet and outlet air port ends of the valve and the valve are clear, the marks of the opening and closing of the valve are obvious, the safety accident of bottle explosion of a source bottle caused by misoperation of personnel can be completely eradicated, the safety accident that the liquid chemicals are pressed into a diffusion furnace pipe by mistakenly connecting the inlet and outlet air pipelines is also completely eradicated, the operation is simple, and the safety of the diffusion process is greatly improved.

Description

Special source bottle and valve for containing high-purity chemicals
Technical Field
The utility model relates to a special source bottle and valve for splendid attire high-purity chemicals belongs to the high-purity chemicals splendid attire technical field of photovoltaic and semiconductor trade.
Background
In recent years, with the rapid development of solar cell manufacturing industry and semiconductors, the dosage of high-purity chemicals is increased year by year, and meanwhile, the safety of using the high-purity chemicals is more and more emphasized.
The existing package of high-purity chemicals for diffusion processes in the semiconductor and photovoltaic industries mainly uses a quartz source bottle with an air inlet pipe and an air outlet pipe, wherein the air inlet pipe and the air outlet pipe are respectively controlled by an independent valve, the air inlet pipe and the air outlet pipe on the quartz source bottle are small (the outer diameter is 10-11 mm), the air inlet pipe and the air outlet pipe are provided with clamping grooves, the clamping grooves greatly reduce the strength of the air inlet pipe and the air outlet pipe, and the clamping grooves of the air inlet pipe and the air outlet pipe of the original quartz source bottle are very easy to break after practical use practice of nearly 20 years, so that toxic chemicals. Because the business turn over gas valve is independent separately, operating personnel forgets easily to open the gas valve, when letting in nitrogen gas tympanic bulla in toward the source bottle, the pressure in the source bottle can increase gradually to can lead to the source bottle to suppress the pressure and explode the bottle accident.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides a special source bottle and a valve for containing high-purity chemicals, which changes the original quartz source bottle with an air inlet pipe and an air outlet pipe into a source bottle with only one threaded connector, and the improved source bottle has the characteristics of thick threaded opening and thick wall, thereby completely avoiding the risk of pipe breakage of the source bottle; the improved valve has the function that the inlet and the outlet are controlled by one valve to be opened or closed at the same time, so that the accident that the source bottle is pressed and the bottle is exploded due to misoperation of personnel is completely avoided; the improved source bottle and valve greatly improve the safety of use.
The utility model discloses a realize through following technical scheme: a special source bottle and valve for splendid attire high-purity chemicals which characterized in that: comprises a source bottle and a valve, the valve comprises a valve core, a valve body, a valve handle, a valve air inlet interface, a valve air outlet interface, a valve air inlet channel and a valve air outlet channel, the valve core, the valve air inlet interface and the valve air outlet interface are arranged on the valve body, the valve handle is arranged on the valve core, the valve air inlet channel and the valve air outlet channel are arranged inside the valve body, the valve air inlet channel is connected with the valve air inlet interface and the bottom of the valve body, the valve air outlet channel is connected with the valve air outlet interface and the bottom of the valve body, the valve core divides the valve air inlet channel and the valve air outlet channel into two sections, the valve core is respectively provided with a valve core air inlet hole and a valve core air outlet hole at the positions of the valve air inlet channel and the, the bottom of the valve air inlet channel is connected with a valve air inlet pipe, the bottom of the valve body is provided with a threaded connector, and the valve is fixed on a threaded opening of the source bottle through the threaded connector.
One end of the valve core is connected with a valve handle, the valve core is controlled to rotate through the rotation of the valve handle, the tail end of the valve core extends out of the valve body, a groove is formed in the tail end of the valve core, and a valve core tail end sealing ring is arranged on the groove.
The bottom of the valve air inlet channel is provided with threads, the valve air inlet pipe is connected to the valve air inlet channel through the threads, the bottom of the valve air inlet pipe is provided with an air inlet pipe air distributor, the side wall of the air inlet pipe air distributor is provided with small holes, and the number of the small holes is 3-20.
The valve air inlet interface and the valve air outlet interface are arranged at the top end of the valve body, are perpendicular to the valve body and face upwards, are designed in a differentiation mode, and are large and small in size.
And an O-shaped ring is arranged at the joint of the source bottle and the valve and is sealed with the bottle opening surface of the source bottle for the first time.
The joint of the source bottle and the valve is sealed for the second time by a heat-shrinkable sleeve.
The source bottle is made of quartz, PTFE or PFA; the valve is made of PVDF, PTFE or PFA corrosion-resistant materials.
The utility model has the advantages that: the source bottle is connected with the valve port by threads, so that the safety accident that the gas inlet and outlet pipes of the existing quartz source bottle are easy to break is completely avoided; the joint of the source bottle and the valve is sealed for the second time by adopting a heat-shrinkable sleeve, so that the chemical leakage accident is completely avoided; the function of controlling air inlet and air outlet simultaneously is realized through one valve, and the technical defect that the air inlet valve and the air outlet valve are separated and independent is overcome; the air inlet interface and the air outlet interface of the valve are vertical to the valve body, and the interfaces are upward, so that the phenomenon that the source bottle is pressed and broken due to the generation of accumulated liquid on the air inlet and outlet pipeline is avoided; the sizes of the external threads of the air inlet interface and the air outlet interface of the valve are designed in a differentiation manner, so that the phenomenon that an operator connects an air inlet pipe and an air outlet pipe in a wrong manner is avoided; the air inlet pipe extending into the source bottle is tightly connected through threads, and is made of PTFE (polytetrafluoroethylene) or PFA (Polytetrafluoroethylene) non-glass material, so that the risk of breakage of the glass pipe is avoided; the tail end of the air inlet pipe extending into the source bottle is provided with a gas distributor, so that the carrier gas is uniformly distributed for bubbling, and chemicals needing to participate in diffusion are uniformly carried into the diffusion furnace pipe for diffusion process, and the gas distributor has great contribution to the stability of the diffusion technology.
Drawings
The invention will be further explained below with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a schematic top view of the present invention;
fig. 3 is a schematic structural view of the valve of the present invention when opened;
fig. 4 is a schematic structural view of the valve of the present invention when closed;
fig. 5 is a schematic view of the position of the valve handle when the valve of the present invention is opened;
fig. 6 is a schematic diagram of the position of the valve handle when the valve of the present invention is closed.
Detailed Description
A special source bottle and valve for holding high purity chemicals as shown in fig. 1 to 6, characterized in that: the energy-saving valve comprises a source bottle 1 and a valve 2, wherein the valve 2 comprises a valve core 3, a valve body 4, a valve handle 5, a valve air inlet interface 6, a valve air outlet interface 7, a valve air inlet channel 8 and a valve air outlet channel 9, the valve core 3, the valve air inlet interface 6 and the valve air outlet interface 7 are installed on the valve body 4, the valve handle 5 is installed on the valve core 3, the valve air inlet channel 8 and the valve air outlet channel 9 are arranged inside the valve body 4, the valve air inlet channel 8 is connected with the bottom of the valve body 6 and the bottom of the valve body 4, the valve air outlet channel 9 is connected with the bottom of the valve air outlet interface 7 and the bottom of the valve body 4, the valve core 3 divides the valve air inlet channel 8 and the valve air outlet channel 9 into two sections, the valve core 3 is respectively provided with a valve core air inlet hole 10 and a valve core air outlet hole 11 at, the bottom of the valve body 4 is provided with a threaded connector 13, and the valve 2 is fixed on the source bottle 1 through the threaded connector 13, so that the safety accident that the gas inlet and outlet pipes of the existing quartz source bottle are easy to break is completely avoided.
One end of the valve core 3 is connected with a valve handle 5, the valve core 3 is controlled to rotate through the rotation of the valve handle 5, the tail end of the valve core 3 extends out of the valve body 4, a groove is formed in the tail end of the valve core 3, and a valve core tail end sealing ring 14 is arranged on the groove.
The bottom of the valve air inlet channel 8 is provided with threads, the valve air inlet pipe 12 is connected to the valve air inlet channel 8 through the threads, the bottom of the valve air inlet pipe 12 is provided with an air inlet pipe gas distributor 15, the side wall of the air inlet pipe gas distributor 15 is provided with 3-20 small holes, the purpose is to enable carrier gas to be uniformly distributed and bubble, and chemical products needing to participate in diffusion are uniformly carried to a diffusion furnace pipe for diffusion process, and the diffusion process has great contribution to the stability of the diffusion process. The valve air inlet pipe 12 is made of PTFE or PFA non-glass material, so that the risk that the glass pipe is easy to break is completely eradicated.
Valve interface 6 and valve interface 7 of giving vent to anger install 4 top perpendicular to valve bodies of valve body 4 and interface up, avoid giving vent to anger at valve interface 6 and valve and produce the hydrops on 7 pipelines of interface, it is longer when the hydrops time, form the stifled pipe of colloidal substance in hydrops department easily, if the valve is given vent to anger interface 7 pipelines and is blocked up, then lead to source bottle 1 to suppress pressure and explode the bottle accident easily. The valve air inlet connector 6 and the valve air outlet connector 7 are designed to be vertically upward, when diffusion is stopped, liquid in the pipeline can quickly return to the source bottle 1, and the safety accident that accumulated liquid blocks the pipeline is completely avoided. Valve 2 valve inlet port 6 and valve interface 7 of giving vent to anger be the differentiation design, and valve inlet port 6 and valve give vent to anger the external screw thread of interface 7 and one big one little, and this design is mainly avoided operating personnel to give vent to anger interface 6 and valve interface 7 with valve and connects the mistake with valve inlet port 6, plays a foolproof effect, if give vent to anger the interface 7 with diffusion system's intake pipe and valve and be connected, with diffusion system's outlet duct and valve inlet port 6 connection, will certainly directly impress liquid chemical into the diffusion furnace intraductal incident that leads to.
An O-shaped ring 16 is arranged at the joint of the source bottle 1 and the valve 2 to seal with the bottle mouth surface of the source bottle 1.
The joint of the source bottle 1 and the valve 2 is sealed for the second time by a heat-shrinkable sleeve 17, so that the chemical leakage accident is completely avoided.
The source bottle 1 is made of quartz, PTFE or PFA; the valve 2 is made of PVDF, PTFE or PFA corrosion-resistant material. The corresponding position of the side wall surface of the valve 2 is provided with a mark for marking the valve opening and valve closing indication.
The two valves of business turn over gas with current source bottle realize the function of business turn over gas simultaneous control through a valve, and the valve switch only has one, and the valve is opened: when the valve handle 5 rotates to the horizontal position, the valve air inlet interface 6 and the valve air outlet interface 7 are both fully opened, namely, the valve core air inlet hole 10 and the valve core air outlet hole 11 on the valve core 3 respectively correspond to the valve air inlet channel 8 and the valve air outlet channel 9 in the valve body 4 and keep the smooth state. Closing a valve: when the valve handle 5 rotates to a vertical position, the valve air inlet interface 6 and the valve air outlet interface 7 are both closed, namely, the valve core air inlet hole 10 and the valve core air outlet hole 11 on the valve core 3 and the valve air inlet channel 8 and the valve air outlet channel 9 in the valve body 4 are kept in a cut-off state. The technical defect that the air inlet valve and the air outlet valve are separated and independent can be completely solved: when an operator only opens the air inlet valve and the air outlet valve but does not open, if nitrogen is introduced into the source bottle for bubbling, the source bottle can be suppressed to cause the safety accident of bottle explosion.
An air inlet pipeline and an air outlet pipeline of the diffusion system are respectively connected with a valve air inlet interface 6 and a valve air outlet interface 7, then a valve 2 is opened to rotate a valve handle 5 to a horizontal state, carrier gas can bubble the high-purity chemical in the source bottle 1 through an air inlet pipe gas distributor 15 at the tail end of a valve air inlet pipe 12, and the carrier gas carries the high-purity chemical into the diffusion furnace for diffusion process.
The function that the business turn over gas of having source bottle two valves realizes the business turn over gas simultaneously through a valve and opens or close simultaneously, and the valve switch only has one: when the valve is opened, the inlet and outlet air are all opened; when the valve is closed, the air inlet and outlet are closed at the same time. The technical defect that the original air inlet valve and the original air outlet valve are separated and independent is overcome: when an operator only opens the air inlet valve and the air outlet valve but does not open, if nitrogen is introduced into the source bottle for bubbling, the source bottle can be suppressed to cause the safety accident of bottle explosion.
Example (b): the air inlet and outlet interfaces are vertically arranged upwards and back and forth
Valve interface 6, valve interface 7 of giving vent to anger are perpendicular to valve body 4 and up and tandem arrangement, and the front end of the case 3 in the valve body 4 has valve handle 5, and during the operation, through valve handle 5 on the rotatory case 3, when valve handle 5 rotated horizontal position, all passageways of valve were all opened simultaneously, and when valve handle 1 rotated 90 again, all passageways of valve were all closed simultaneously, avoided the potential safety hazard that the maloperation brought completely.

Claims (7)

1. A special source bottle and valve for splendid attire high-purity chemicals which characterized in that: the energy-saving valve comprises a source bottle (1) and a valve (2), wherein the valve (2) comprises a valve core (3), a valve body (4), a valve handle (5), a valve air inlet interface (6), a valve air outlet interface (7), a valve air inlet channel (8) and a valve air outlet channel (9), the valve core (3), the valve air inlet interface (6) and the valve air outlet interface (7) are installed on the valve body (4), the valve handle (5) is installed on the valve core (3), the valve air inlet channel (8) and the valve air outlet channel (9) are arranged inside the valve body (4), the valve air inlet channel (8) is connected with the valve air inlet interface (6) and the bottom of the valve body (4), the valve air outlet channel (9) is connected with the bottom of the valve air inlet interface (7) and the bottom of the valve body (4), the valve core (3) divides the valve air inlet channel (8) and the valve air outlet channel (9) into two sections, and the valve core (3) is respectively provided with a valve core (9) at 10) And the valve core air outlet hole (11), the bottom of the valve air inlet channel (8) is connected with a valve air inlet pipe (12), the bottom of the valve body (4) is provided with a threaded connector (13), and the valve (2) is fixed on a threaded opening of the source bottle (1) through the threaded connector (13).
2. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: one end of the valve core (3) is connected with a valve handle (5) and rotates through the valve handle (5) to control the rotation of the valve core (3), the tail end of the valve core (3) extends out of the valve body (4), the tail end of the valve core (3) is provided with a groove, and a valve core tail end sealing ring (14) is arranged on the groove.
3. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: the bottom of valve inlet channel (8) be equipped with the screw thread, valve intake pipe (12) pass through threaded connection on valve inlet channel (8), valve intake pipe (12) bottom be equipped with intake pipe gas distributor (15), intake pipe gas distributor (15) lateral wall on be equipped with the aperture, aperture quantity is 3-20.
4. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: the valve air inlet interface (6) and the valve air outlet interface (7) are arranged at the top end of the valve body (4) and are perpendicular to the valve body (4) and the interfaces face upwards, the valve air inlet interface (6) and the valve air outlet interface (7) are designed in a differentiation mode, and the valve air inlet interface (6) and the valve air outlet interface (7) are large in external threads and small in external threads.
5. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: an O-shaped ring (16) is arranged at the joint of the source bottle (1) and the valve (2) to seal with the bottle mouth surface of the source bottle (1).
6. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: the joint of the source bottle (1) and the valve (2) is sealed for the second time by a heat-shrinkable sleeve (17).
7. The special source bottle and valve for holding high purity chemicals of claim 1, wherein: the source bottle (1) is made of quartz, PTFE or PFA; the valve (2) is made of PVDF, PTFE or PFA corrosion-resistant materials.
CN202020629583.5U 2020-04-24 2020-04-24 Special source bottle and valve for containing high-purity chemicals Active CN212028633U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020629583.5U CN212028633U (en) 2020-04-24 2020-04-24 Special source bottle and valve for containing high-purity chemicals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020629583.5U CN212028633U (en) 2020-04-24 2020-04-24 Special source bottle and valve for containing high-purity chemicals

Publications (1)

Publication Number Publication Date
CN212028633U true CN212028633U (en) 2020-11-27

Family

ID=73494471

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020629583.5U Active CN212028633U (en) 2020-04-24 2020-04-24 Special source bottle and valve for containing high-purity chemicals

Country Status (1)

Country Link
CN (1) CN212028633U (en)

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