CN108539054A - The preparation method of cathode insulated column of organic luminous display device - Google Patents
The preparation method of cathode insulated column of organic luminous display device Download PDFInfo
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- CN108539054A CN108539054A CN201810332311.6A CN201810332311A CN108539054A CN 108539054 A CN108539054 A CN 108539054A CN 201810332311 A CN201810332311 A CN 201810332311A CN 108539054 A CN108539054 A CN 108539054A
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- Prior art keywords
- insulated column
- convex shape
- curable glue
- cathode insulated
- display device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses a kind of preparation methods of cathode insulated column of organic luminous display device.Imprint mold is prepared first, the convex shape pattern being pre-designed on mold；One layer of uv-curable glue is uniformly coated on ITO substrates, waits for its free flow flat shape at an embossed layer；Mold is pressed into embossed layer, and uv-curable glue is made to be full of the convex shape pattern of mold, so that uv-curable glue is reacted hardened forming by exposure；It releases stress mould separating ITO substrates；Reactive ion etching is carried out to ITO substrates and removes remaining uv-curable glue, obtains the convex shape with mold equal proportion；ITO substrates are inverted, uv-curable glue is stained at the top of convex shape by micro- contact method, stands molding；It is irradiated and is cured using UV light sources, obtain cathode insulated column.Using ultraviolet stamping technology, cathode insulated column is prepared at room temperature and atmospheric pressure, it is simple for process, step is few and will not introduce steam, the OLED device service life is greatly improved, pixel resolution significantly improves.
Description
Technical field
It is cloudy that the present invention relates to a kind of cathode insulated column of organic luminous display device technology, especially organic light emitting displays
The preparation method of pole insulated column.
Background technology
OLED (Organic Light Emitting Display), organic light emitting display is due to its high brightness, width
Visual angle and it is flexible light-duty the features such as and by extensive concern and further investigate.Organic luminescent device is usually by first electrode (transparent sun
Pole), deposition luminescence medium on the first electrode, the second electrode (cathode) that is deposited on luminescence medium constitute.In order to realize
The high-resolution and colorization of passive matrix OLED, preferably solve that cathode template resolution ratio is low low with device yield etc. to ask
Topic, people introduce the striated structure with inverted trapezoidal or T section as cathode insulated column, by luminescence display under study for action
The different pixels of device separate, and avoid the short circuit problem between adjacent pixel.
Prior art generally prepares cathode insulated column, such as the spin coating first layer light on transparent substrate by the way of exposure
Quick organic insulating material, generally Photosensitive PI, front baking post-exposure, exposure figure be reticular structure or strip structure, lines
Width is determined by being spaced between display resolution, that is, pixel, is dried after then carrying out.Then it is revolved on the organic insulating material exposed
Second layer Photosensitive organic insulating material is applied, generally lines cross section can form the light of up big and down small reverse trapezoid shape after photoetching
One kind in photoresist, generally negative photoresist are exposed second layer organic insulator material after front baking, and exposure figure is
Vertical element.Above-mentioned preparation method is made by re-expose technique, always has water vapour to leave in cathode insulated column after etching,
Or cathode insulated column total surface has water vapor diffusion, evaporation up, luminous organic material can leave water vapour due to these
Influence, along cathode insulated column move towards generate pixel shrinkage, influence light-emitting device life period.
Invention content
The purpose of the present invention is to provide a kind of preparation method of cathode insulated column of organic luminous display device, the preparations
Method and process is simple, step is few and will not introduce steam so that and light-emitting device life period greatly improves, and uv-curable glue is transparent,
OLED device entire area can be made transparent.
The present invention solves its technical problem using technical solution below to realize.
The present invention provides a kind of preparation method of cathode insulated column of organic luminous display device, including：
S1 imprint mold) is prepared, the convex shape pattern being pre-designed on mold；
S2 one layer of uv-curable glue) is uniformly coated on ITO substrates, waits for its free flow flat shape at an embossed layer；
S3) mold is pressed into embossed layer, and uv-curable glue is made to be full of the convex shape pattern of mold, is made by exposure ultraviolet solid
Change glue to react hardened forming；
S4 it) releases stress mould separating ITO substrates；
S5 reactive ion etching) is carried out to ITO substrates and removes remaining uv-curable glue, is obtained convex with mold equal proportion
Type structure；
S6) ITO substrates are inverted, uv-curable glue is stained at the top of convex shape by micro- contact method, stands molding；
S7 the irradiation solidification of UV light sources) is used, cathode insulated column is obtained.
Further, the mold is constituted for opaque metal material, in step S7) in, carry out UV in the one side of substrates ITO
Irradiation.
Further, the material of the mold is transparent quartz, dimethyl silicone polymer or polymethyl methacrylate
In one kind.
Further, in step S5) in use reactive ion etching using uv-curable glue as mask, removal remain it is ultraviolet solid
Required convex shape is obtained on ITO substrates after changing glue.
Further, in step S5) in after reactive ion etching removes remaining uv-curable glue, reactive ion and ITO
Substrate acts on, and increases the carrier content of ITO substrates.
Further, in step S6) in when being glued by micro- contact method, ITO substrates and the uv-curable glue contacted are flat
Face is parallel.
Further, after ITO substrates are inverted, after being stained with uv-curable glue at the top of convex shape, ITO substrates rise quiet
It sets, the glue on convex shape is condensed into circular glue drop under the action of hydrodynamics.
Further, irradiated using UV light sources so that the round glue of convex shape adhesion drips curing molding, obtain cathode every
From column.
Further, the cathode insulated column by section in convex shape first part and in spherical second part structure
At being set to the top of convex shape in spherical second part, the cathode insulated column is transparent.
Further, the mold with convex shape can pass through electron beam lithography, plasma etching, laser hologram
It is prepared by the technical method of interference.
The preparation method of cathode insulated column of organic luminous display device provided by the invention, using ultraviolet stamping technology,
Cathode insulated column is prepared under room temperature and normal pressure, stamped method is simple for process, step is few and will not introduce steam, with prior art phase
Than greatly improving the OLED device service life, pixel resolution significantly improves, and UV glue-lines are transparent, and OLED device can be made region-wide thoroughly
It is bright.
Description of the drawings
Fig. 1 is a kind of preparation method flow diagram of cathode insulated column of organic luminous display device of the present invention.
Fig. 2 is the structural schematic diagram of cathode insulated column provided in an embodiment of the present invention.
Fig. 3 a to Fig. 3 f are the flow chart of the preparation method of cathode insulated column of organic luminous display device of the present invention.
Specific implementation mode
It is of the invention to reach the technical approach and effect that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Specific implementation mode, structure, feature and its effect of the present invention is described in detail as after in accompanying drawings and embodiments.
The present invention provides a kind of preparation method of cathode insulated column of organic luminous display device.Referring to shown in Fig. 1 to Fig. 3 f,
The preparation method includes the following steps：
S1) as shown in Figure 3a, imprint mold 11 is prepared, the convex shape pattern being pre-designed on mold 11.Tool
Body, in this step, the imprint mold 11 is to pass through electron beam lithography using quartz transparent, that ultraviolet light can be made to penetrate
It is prepared.In other embodiments, the imprint mold 11 can also use the technologies such as plasma etching, laser holographic interferometry
It is prepared by method.
S2) as shown in Figure 3b, one layer of uv-curable glue is uniformly coated on ITO substrates 10, waits for its free flow flat shape at one
Embossed layer 12.Specifically, the spin coating uv-curable glue on ITO substrates 10 requires in this step uv-curable glue to have good
Mobility.Wherein, ITO substrates 10 are damaged in order to prevent, transparent soft mold, example can also be used in the imprint mold 11
Such as dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA) can also use opaque metal material, example
Such as metallic nickel, silicon, chromium.UV irradiations need to be carried out in 10 side of ITO substrates at this time.
S3) as shown in Figure 3b, mold 11 is pressed into embossed layer 12, and uv-curable glue is made to be full of the convex shape pattern of mold 11
It is interior, make uv-curable glue that chemical reaction hardened forming occur by exposure.Specifically, using ultraviolet light so that embossed layer
12 uv-curable glue becomes solid-state from liquid, obtains identical with the convex shape of mold 11 embossed layer of shape 121.
S4) as shown in Figure 3c, release stress and mold 11 is detached from ITO substrates 10.
S5) as shown in Figure 3d, reactive ion etching is carried out to ITO substrates 10 and removes remaining uv-curable glue, obtain with
The convex shape of 11 equal proportion of mold.Specifically, the oxygen reactive ion etching is used to be with the solid-state UV solidification glue of embossed layer 121
Pattern etching is transferred on ITO substrates 10 by mask, is obtained after extra uv-curable glue on removal ITO substrates 10 required
Convex shape 122.It should be noted that after oxygen reactive ion etching removes remaining uv-curable glue, oxygen reactive ion continues
The carrier content of ITO substrates can be increased by being acted on ITO substrates 10, improve the electric conductivity of ITO substrates 10.
S6) as shown in Figure 3 e, ITO substrates 10 are inverted, are stained at the top of convex shape 122 by micro- contact method ultraviolet
Solidification glue stands molding.
In this step, when being glued by micro- contact method, since contact position is more demanding, generally use is accurately mechanical
Control, and the needs of ITO substrates 10 are parallel with the glue surface of the uv-curable glue 14 contacted, while the glue-line of uv-curable glue 14
Surface wants smooth, cannot shake.Wherein, after ITO substrates 10 are inverted, after the top of convex shape 122 is stained with uv-curable glue,
ITO substrates 10, which rise, to be stood, and the glue on convex shape 122 is condensed into circular glue drop 141 under the action of hydrodynamics, such as
Shown in Fig. 3 f.Specifically can be by the viscosity of control uv-curable glue, according to hydrodynamics, glue drops in surface energy when being spherical
It is minimum, most stable.
S7) as illustrated in figure 3f, irradiated and cured using UV light sources, obtain cathode insulated column 16.Specifically, it is shone using UV light sources
It penetrates so that the round glue of 122 adhesion of convex shape drips 141 curing moldings, obtains cathode insulated column 16.
In the present embodiment, the cathode insulated column 16 is by section in the first part of convex shape and in spherical second
Divide and constitute, the top of convex shape is set in spherical second part, the cathode insulated column 16 is transparent.
The preparation method of cathode insulated column of organic luminous display device provided by the invention, using ultraviolet stamping technology,
Cathode insulated column is prepared under room temperature and normal pressure, stamped method is simple for process, step is few and will not introduce steam, with prior art phase
Than greatly improving the OLED device service life, pixel resolution significantly improves, and UV glue-lines are transparent, and OLED device can be made region-wide thoroughly
It is bright.
Herein, the terms "include", "comprise" or any other variant thereof is intended to cover non-exclusive inclusion, are removed
Comprising those of listed element, but also it may include other elements that are not explicitly listed.
Herein, the nouns of locality such as involved front, rear, top, and bottom are to be located in figure with parts in attached drawing and zero
Part mutual position defines, only for the purpose of expressing the technical solution clearly and conveniently.It should be appreciated that the noun of locality
Use should not limit the claimed range of the application.
In the absence of conflict, the feature in embodiment and embodiment herein-above set forth can be combined with each other.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of preparation method of cathode insulated column of organic luminous display device, which is characterized in that including：
S1 imprint mold) is prepared, the convex shape pattern being pre-designed on mold；
S2 one layer of uv-curable glue) is uniformly coated on ITO substrates, waits for its free flow flat shape at an embossed layer；
S3) mold is pressed into embossed layer, and uv-curable glue is made to be full of the convex shape pattern of mold, makes uv-curable glue by exposure
React hardened forming；
S4 it) releases stress mould separating ITO substrates；
S5 reactive ion etching) is carried out to ITO substrates and removes remaining uv-curable glue, obtains the convex knot with mold equal proportion
Structure；
S6) ITO substrates are inverted, uv-curable glue is stained at the top of convex shape by micro- contact method, stands molding；
S7 the irradiation solidification of UV light sources) is used, cathode insulated column is obtained.
2. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that the mould
Tool is that opaque metal material is constituted, in step S7) in, carry out UV irradiations in the one side of substrates ITO.
3. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that the mould
The material of tool is one kind in transparent quartz, dimethyl silicone polymer or polymethyl methacrylate.
4. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that in step
S5 it uses reactive ion etching using uv-curable glue as mask in), institute is obtained on ITO substrates after removal residual uv-curable glue
The convex shape needed.
5. the preparation method of cathode insulated column of organic luminous display device as claimed in claim 4, which is characterized in that in step
S5 after reactive ion etching removes remaining uv-curable glue in), reactive ion is acted on ITO substrates, increases the load of ITO substrates
Flow sub- content.
6. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that in step
When being glued by micro- contact method in S6), ITO substrates are parallel with the uv-curable glue plane contacted.
7. the preparation method of cathode insulated column of organic luminous display device as claimed in claim 6, which is characterized in that ITO is served as a contrast
After bottom is inverted, after being stained with uv-curable glue at the top of convex shape, ITO substrates, which rise, to be stood, and the glue on convex shape is flowing
Circular glue drop is condensed under the action of mechanics.
8. the preparation method of cathode insulated column of organic luminous display device as claimed in claim 7, which is characterized in that use UV
Light source irradiates so that the round glue of convex shape adhesion drips curing molding, obtains cathode insulated column.
9. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that described the moon
Pole insulated column is constituted by section in the first part of convex shape and in spherical second part, is arranged in spherical second part
In the top of convex shape, the cathode insulated column is transparent.
10. the preparation method of cathode insulated column of organic luminous display device as described in claim 1, which is characterized in that described
Mold with convex shape can be prepared by the technical method of electron beam lithography, plasma etching, laser holographic interferometry.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810332311.6A CN108539054B (en) | 2018-04-13 | 2018-04-13 | Method for preparing cathode isolation column of organic light-emitting display device |
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|---|---|---|---|
| CN201810332311.6A CN108539054B (en) | 2018-04-13 | 2018-04-13 | Method for preparing cathode isolation column of organic light-emitting display device |
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| CN109285764A (en) * | 2018-09-28 | 2019-01-29 | 京东方科技集团股份有限公司 | A kind of method of film pattern, the preparation method of Organic Light Emitting Diode |
| WO2020135107A1 (en) * | 2018-12-29 | 2020-07-02 | Oppo广东移动通信有限公司 | Oled pixel structure, oled display screen and electronic device |
| CN111384269A (en) * | 2018-12-29 | 2020-07-07 | Tcl集团股份有限公司 | Quantum dot light-emitting diode and preparation method thereof |
| CN112162464A (en) * | 2020-10-15 | 2021-01-01 | 苏州印象镭射科技有限公司 | Metallization-free rapid laser plate making method |
| CN112349869A (en) * | 2021-01-06 | 2021-02-09 | 浙江宏禧科技有限公司 | Method for preparing OLED anode by nanoimprint lithography |
| CN112750968A (en) * | 2021-01-22 | 2021-05-04 | 深圳市峻鸿设备有限公司 | Manufacturing process of cathode isolation column of OLED display panel |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112162464A (en) * | 2020-10-15 | 2021-01-01 | 苏州印象镭射科技有限公司 | Metallization-free rapid laser plate making method |
| CN112349869A (en) * | 2021-01-06 | 2021-02-09 | 浙江宏禧科技有限公司 | Method for preparing OLED anode by nanoimprint lithography |
| CN112750968A (en) * | 2021-01-22 | 2021-05-04 | 深圳市峻鸿设备有限公司 | Manufacturing process of cathode isolation column of OLED display panel |
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| CN108539054B (en) | 2020-04-24 |
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Effective date of registration: 20220629 Address after: No.478 Zhongnan street, Suzhou Industrial Park, Jiangsu Province 215026 Patentee after: IVTOUCH Co.,Ltd. Patentee after: SOOCHOW University Patentee after: Weiyeda Technology (Jiangsu) Co.,Ltd. Address before: No.68 Xinchang Road, Suzhou Industrial Park, Suzhou, Jiangsu Province Patentee before: IVTOUCH Co.,Ltd. Patentee before: Soochow University |
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Address after: No.478 Zhongnan street, Suzhou Industrial Park, Jiangsu Province 215026 Patentee after: Suzhou Weiyeda Technology Co.,Ltd. Patentee after: SOOCHOW University Patentee after: Weiyeda Technology (Jiangsu) Co.,Ltd. Address before: No.478 Zhongnan street, Suzhou Industrial Park, Jiangsu Province 215026 Patentee before: IVTOUCH Co.,Ltd. Patentee before: SOOCHOW University Patentee before: Weiyeda Technology (Jiangsu) Co.,Ltd. |