CN108529235B - Conveying device - Google Patents
Conveying device Download PDFInfo
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- CN108529235B CN108529235B CN201810342983.5A CN201810342983A CN108529235B CN 108529235 B CN108529235 B CN 108529235B CN 201810342983 A CN201810342983 A CN 201810342983A CN 108529235 B CN108529235 B CN 108529235B
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- 230000007246 mechanism Effects 0.000 claims abstract description 88
- 230000009471 action Effects 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims description 52
- 239000007787 solid Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 230000005389 magnetism Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000725 suspension Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 16
- 238000006073 displacement reaction Methods 0.000 abstract description 10
- 230000005684 electric field Effects 0.000 abstract description 4
- 238000012546 transfer Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
- Control Of Position Or Direction (AREA)
Abstract
The invention discloses a carrying device which comprises a machine table, a plurality of positioning units and a clamping unit. The machine table is used for bearing a workpiece, the positioning unit comprises a positioning executing part and a telescopic mechanism, the positioning executing part is connected with the machine table, the telescopic mechanism is switched between a free state capable of freely stretching and retracting and a self-locking state limited in stretching and retracting under the action of an electric field or a magnetic field, the telescopic mechanism is rotatably connected with the positioning executing part so as to lock the positioning executing part in the self-locking state, and the clamping unit is suitable for clamping the workpiece. Therefore, the workpiece is supported and positioned through the conveying device, the positioning unit generates certain displacement along with the placement of the workpiece so as to ensure that the workpiece and the positioning unit are always attached, and then the workpiece is clamped through the clamping unit. In the process of carrying the workpiece, the workpiece is quickly and accurately positioned by the positioning unit and the clamping unit, and the workpiece is effectively prevented from shaking and being damaged in the transfer process. After the next station is reached, the positioning unit can be controlled to be unlocked quickly, and the operation is convenient and quick.
Description
Technical Field
The invention relates to the technical field of semiconductor logistics transportation, in particular to a transportation device.
Background
In the related art, a method of positioning a semiconductor workpiece on a transfer device: two cylindrical plastic blocks are respectively fixed at four corners of a machine table of the carrying device to be used as limiting devices; after the position of the semiconductor workpiece is determined, the distance between the bottom edge of the semiconductor workpiece and the limiting device is about 3 mm.
This conventional positioning of the semiconductor workpiece has the following disadvantages: 1) the positioning precision is low; 2) the semiconductor workpiece and the limiting device can move relatively; 3) the semiconductor workpiece vibrates greatly in the moving process of the carrying device; 4) when a semiconductor workpiece is taken and placed, the semiconductor workpiece is easy to rub a limiting device, and friction loss is generated; 5) the semiconductor workpiece is easy to generate larger vibration in the taking and placing process.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a conveying device which is accurate in positioning and high in safety.
The carrying device according to the embodiment of the invention comprises: the device comprises a machine table, a positioning unit and a clamping unit, wherein the machine table is used for bearing a workpiece; the positioning unit comprises a positioning executive part and a telescopic mechanism, the positioning executive part is connected with the machine platform, and the telescopic mechanism is configured to: under the action of an electric field or a magnetic field, the telescopic mechanism is switched between a free state capable of freely telescoping and a self-locking state limited in telescoping, the telescopic mechanism is rotatably connected with the positioning execution part so as to lock the positioning execution part in the self-locking state, and the clamping unit is suitable for clamping a workpiece.
According to the carrying device provided by the embodiment of the invention, the semiconductor workpiece is supported and positioned through the positioning unit, the positioning unit generates certain displacement along with the placement of the workpiece so as to ensure that the workpiece is always attached to the positioning unit, and then the workpiece is clamped through the clamping unit; when a semiconductor workpiece needs to be moved to the next station, the self-locking of the telescopic mechanism is controlled to lock the positioning unit, and the workpiece is quickly and accurately positioned by the positioning unit and the clamping unit, so that the workpiece is effectively prevented from shaking and being damaged in the transfer process. After the next station is reached, the positioning unit can be controlled to be unlocked quickly, and the operation is convenient and quick.
According to some of the embodiments of the invention, the positioning unit further comprises a flexible casing encasing the positioning actuator and the telescoping mechanism.
According to some of the embodiments of the invention, the positioning actuator comprises: the base is directly or indirectly fixedly arranged on the machine table; the footstock, telescopic machanism presss from both sides the base with between the footstock, every telescopic machanism's both ends respectively with the footstock but base pivot ground is connected, the footstock is constructed into: can be locked when the telescopic mechanism is in a self-locking state and can move at least horizontally relative to the base when the telescopic mechanism is in a free state.
According to some embodiments of the present invention, the base and the top seat are further connected by an elastic restoring member, and the elastic restoring member is adapted to drive the top seat to move in a restoring manner.
According to some embodiments of the invention, the number of the telescopic mechanisms is multiple, the plurality of telescopic mechanisms are distributed in a polygonal shape, and two ends of each telescopic mechanism are respectively matched with the spherical surfaces of the top seat and the base seat.
According to some of the embodiments of the present invention, the distance between the bottom ends of the adjacent telescopic mechanisms is larger than the distance between the top ends of the adjacent telescopic mechanisms; or the distance between the bottom ends of the adjacent telescopic mechanisms is smaller than the distance between the top ends of the adjacent telescopic mechanisms.
According to some embodiments of the present invention, a magnetorheological fluid medium is filled in the telescopic mechanism, and the telescopic mechanism is switched to a self-locking state when the magnetorheological fluid medium is converted into a solid state and is switched to a free state when the magnetorheological fluid medium is converted into a liquid state.
According to some of the embodiments of the invention, the telescoping mechanism comprises: the magnetorheological fluid device comprises a cylinder body, wherein one end of the cylinder body is provided with a first rotating part, a containing cavity for containing the magnetorheological fluid medium is defined in the cylinder body, and the other end of the cylinder body is provided with an open hole communicated with the containing cavity; the telescopic link, the telescopic link warp open the mouth inserts hold the intracavity, the telescopic link with cylinder body sliding fit, the cylinder body with at least one in the telescopic link has the confession magnetorheological suspensions medium circulation's circulation mouth.
According to some embodiments of the invention, the handling device further comprises a magnetic generator to create a magnetic field for the magnetorheological fluid medium.
According to some embodiments of the invention, the magneto-rheological fluid medium is configured to be capable of being electrically energized when a leak occurs in the magneto-rheological fluid medium.
According to some of the embodiments of the invention, the magnetic generator is formed integrally with the cylinder; or the magnetism generating member is attached to an outer wall of the cylinder.
According to some embodiments of the invention, the telescopic rod is a stepped rod, and a shoulder of the telescopic rod is adapted to abut against the accommodating cavity to prevent the telescopic rod from being pulled out.
According to some embodiments of the invention, the telescopic mechanism further comprises a leakage detecting part for detecting whether the cylinder body leaks.
According to some embodiments of the present invention, the open opening has an inner concave portion, a cavity is defined between the inner concave portion and the telescopic rod, a first conductive piece and a second conductive piece are arranged in the cavity at an interval, and the first conductive piece and the second conductive piece are configured to be conducted by the magnetorheological fluid medium when the magnetorheological fluid medium leaks into the cavity, and send a leakage signal after being conducted.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural view of a carrying device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a flexible enclosure according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a positioning unit according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a top mount according to an embodiment of the present invention;
FIG. 5 is a schematic mechanical diagram of a base according to an embodiment of the invention;
FIG. 6 is a schematic structural diagram of a telescoping mechanism according to an embodiment of the invention;
FIG. 7 is a front view of a telescoping mechanism according to an embodiment of the invention;
FIG. 8 is a cross-sectional view of a telescoping mechanism according to an embodiment of the invention;
FIG. 9 is a cross-sectional view taken along line A-A of FIG. 8;
FIG. 10 is a top view of a cylinder block according to an embodiment of the present invention;
fig. 11 is a cross-sectional view taken along line B-B of fig. 10.
Reference numerals:
a conveying device 100,
The device comprises a machine table 1, a positioning unit 2, a positioning actuator 21, a base 211, a top base 212, a telescopic mechanism 22, a cylinder body 221, an accommodating cavity 2211, a circulation port 2212, a first rotating part 2213, an inner concave part 2214, a telescopic rod 222, a shaft shoulder 2221, a second rotating part 2222, a magnetic generator 223, a leakage detection component 224, a first conductive piece 2241, a second conductive piece 2242, an elastic reset piece 23, a clamping unit 3 and a flexible shell 4.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
A carrying device 100 according to an embodiment of the present invention is described below with reference to fig. 1 to 11.
The carrying device 100 according to the embodiment of the present invention includes a machine table 1, a plurality of positioning units 2, and a clamping unit 3.
As shown in fig. 1, the machine table 1 is used for carrying a workpiece, the positioning unit 2 can be movably connected to the machine table 1, and the positioning unit 2 is configured to be self-locked under the action of an electric field or a magnetic field. When the positioning unit 2 is self-locked, the position of the positioning unit 2 is not changed, and the positioning unit 2 can position the workpiece borne by the machine table 1 in a self-locking state.
As shown in fig. 1 and 3, the positioning unit 2 includes a positioning actuator 21 and a telescopic mechanism 22. Wherein, location executor 21 is connected with board 1, and at the in-process that clamping unit 3 presss from both sides tight to the work piece, the work piece can produce certain displacement, and the work piece can drive location executor 21 motion under the frictional force effect for locating unit 2 produces certain inclination.
The telescoping mechanism 22 is configured to be switched between a free state in which it is freely telescoped and a self-locking state in which it is restricted from being telescoped under the action of an electric field or a magnetic field, and the telescoping mechanism 22 is rotatably connected to the positioning actuator 21 to lock the positioning actuator 21 in the self-locking state. It will be appreciated that when the positioning unit 2 is in the self-locking state, the telescopic mechanism 22 is in the non-telescopic state. In this way, in the self-locking state, the shape of the positioning unit 2 is fixed (i.e. the positioning actuator 21 is no longer displaced relative to the machine table 1), so that the positioning state of the positioning unit 2 is maintained.
The clamping unit 3 can clamp the workpiece. When a workpiece is placed on the machine table 1, the handling device 100 is required to clamp and position the workpiece, the workpiece is clamped through the clamping unit 3, and in the process that the clamping unit 3 clamps the workpiece, the clamping unit 3 drives the workpiece to move, so that the workpiece generates certain displacement. Because the work piece contacts with positioning unit 2, the work piece will drive positioning unit 2 to move when producing the displacement, and the location executive 21 among the positioning unit 2 will produce the displacement relative to board 1, and positioning unit 2 probably produces certain inclination promptly, and then accomplishes the location.
After the positioning is completed, the workpiece can be removed to perform another process, and when the workpiece is removed, the positioning units 2 are self-locked, and the shapes of the plurality of positioning units are fixed, so that the positions of the workpiece on the conveying device 100 can be positioned. After the workpieces are subjected to other processes, the workpieces can be placed on the conveying device 100, and the positions of the positioning units 2 are not changed after the workpieces are removed, so that the positions of the workpieces placed on the conveying device 100 are consistent with the positions of the workpieces before the workpieces are removed from the conveying device 100, the workpieces can be conveniently conveyed or processed in other processes, the arrangement effectively improves the processing precision of the workpieces on the conveying device 100, and the product quality is improved.
It can be understood that the clamping unit 3 can be a hydraulic cylinder or a motor, etc. as a power source, and the device for driving the jaws, etc. to clamp the workpiece clamps the workpiece, so that the workpiece is conveniently clamped by the clamping unit 3, and the clamping effect of the clamping unit 3 on the workpiece is good.
Further, at least two of the plurality of positioning units 2 are configured to be movable with the workpiece during clamping of the workpiece by the clamping unit 3. Wherein, only in the process that the clamping unit 3 clamps the workpiece, the positioning unit 2 can be driven by the workpiece to generate displacement. And the positioning unit 2 can be self-locked when the workpiece is taken down, so that the position of the workpiece on the conveying device 100 is positioned and memorized, the position of the workpiece when the workpiece is put back to the conveying device is consistent with the position of the workpiece before the workpiece is taken down, and the positioning accuracy is higher. It is understood that the plurality of positioning units 2 may be configured to move with the workpiece during clamping of the workpiece by the clamping unit 3, and such an arrangement may effectively improve the positioning accuracy of the plurality of positioning units 2 with respect to the workpiece.
As shown in fig. 1, four corners of the machine table 1 are respectively provided with a positioning unit 2, and two positioning units 2 on one diagonal of the machine table 1 are respectively provided with a clamping unit 3. When the conveying device 100 positions the workpiece, the clamping unit 3 can clamp the workpiece, the workpiece can drive the positioning unit 2 in contact with the workpiece to move, the position and the shape of the positioning unit 2 are not changed after the clamping unit 3 clamps the workpiece, and the positioning unit 2 is self-locked to realize the positioning of the workpiece.
Furthermore, one end of the positioning executing part 21 is connected with the machine table 1, and the other end of the positioning executing part 21 can displace along with the workpiece in the process of clamping the workpiece by the clamping unit 3, so that the position of the workpiece is conveniently positioned. When the positioning actuator 21 positions the workpiece, the length of the telescopic mechanism 22 is adjusted according to the position of the positioning actuator 21 (i.e., the telescopic mechanism 22 adjusts its length as the position of the positioning actuator 21 changes).
According to the carrying device 100 of the embodiment of the invention, the positioning unit 2 is used for supporting and positioning the workpiece, the positioning unit 2 generates certain displacement along with the placement of the workpiece so as to ensure that the workpiece is practically adhered to the positioning unit 2, and then the workpiece is clamped by the clamping unit 3; when the workpiece needs to be moved to the next station, the telescopic mechanism 22 is controlled to be self-locked to enable the positioning unit 2 to be locked, and the workpiece is quickly and accurately positioned by the positioning unit 2 and the clamping unit 3, so that the workpiece is effectively prevented from shaking and being damaged in the transfer process. After the next station is reached, the positioning unit 2 can be controlled to unlock quickly, the operation is convenient and quick, the processing precision can be effectively improved, and the product quality is improved.
In some optional embodiments of the present invention, the workpiece may be a semiconductor workpiece, when the semiconductor workpiece is transported by the transporting apparatus 100, the transporting apparatus 100 may position the semiconductor workpiece quickly after clamping the semiconductor workpiece, and during the positioning and transporting process, the transporting apparatus 100 may effectively reduce vibration of the semiconductor workpiece during the pick-and-place process, and reduce particles generated by friction between the semiconductor workpiece and the transporting apparatus 100, thereby improving product quality.
As shown in fig. 2, in some embodiments of the present invention, the positioning unit 2 further comprises a flexible housing 4, and the flexible housing 4 covers the positioning actuator 21 and the telescoping mechanism 22. The flexible housing 4 can protect the positioning actuator 21 and the telescoping mechanism 22, effectively preventing the positioning actuator 21 and the telescoping mechanism 22 from being exposed to air. When the positioning unit 2 moves along with the workpiece, the workpiece can be stopped against the flexible housing 4, so that the workpiece is effectively prevented from being in direct contact with the positioning unit 2, the service life of the positioning unit 2 can be prolonged, and the appearance of the carrying device 100 is improved.
As shown in FIG. 3, in some embodiments of the present invention, positioning actuator 21 includes a base 211 and a top 212. The base 211 is directly or indirectly fixed on the machine 1; the telescoping mechanisms 22 are sandwiched between the base 211 and the top base 212, and both ends of each telescoping mechanism 22 are pivotally connected to the top base 212 and the base 211, respectively. The top mount 212 is configured to: can be locked when the telescoping mechanism 22 is in a self-locking state and can move at least horizontally relative to the base 211 when the telescoping mechanism 22 is in a free state. When the telescopic mechanism 22 is in a free state, the top seat 212 can be driven by a workpiece driven by the clamping unit 3 to generate displacement, and the top seat 212 can position the workpiece.
Further, when the workpiece drives the positioning unit 2 to move, the top seat 212 can horizontally move relative to the base 211, two ends of the telescopic mechanism 22 can pivot relative to the top seat 212 and the base 211, the telescopic mechanism 22 extends along with the increase of the distance between the two ends, and the telescopic mechanism 22 shortens along with the decrease of the distance between the two ends, so that the top seat 212 can position the workpiece along with the movement of the workpiece, and the workpiece can be positioned after the telescopic mechanism 22 is self-locked.
As shown in fig. 3, in some embodiments of the present invention, the base 211 and the top base 212 are further connected by an elastic restoring member 23, and the elastic restoring member 23 can drive the top base 212 to move in a restoring manner. Wherein, the base 211, the top seat 212 and the elastic reset piece 23 together form the positioning executing piece 21. When the carrying device 100 no longer positions the workpiece, the positioning unit 2 releases the self-locking state, and the elastic restoring member 23 can drive the top seat 212 to restore under the action of its own elastic force. The two ends of the elastic resetting piece 23 are fixedly connected with the top seat 212 and the base seat 211 respectively, and one end of the elastic resetting piece 23 connected with the top seat 212 generates displacement when the positioning unit 2 moves along with a workpiece, so that the elastic resetting piece 23 generates elasticity.
As shown in fig. 3, in some embodiments of the present invention, the number of the telescopic mechanisms 22 is multiple, the plurality of telescopic mechanisms 22 are distributed in a polygon, and two ends of each telescopic mechanism 22 are respectively spherically engaged with the top seat 212 and the bottom seat 211. The top seat 212 and the bottom seat 211 are provided with grooves which can be matched with two ends of the telescopic mechanism 22, the inner surfaces of the grooves are spherical surfaces, and the spherical surfaces are convenient for the two ends of the telescopic mechanism 22 to be matched with the bottom seat 211 and the top seat 212 in a pivoting manner. When the top base 212 displaces relative to the base 211, the two ends of each telescopic mechanism 22 can rotate by a certain angle in cooperation with the spherical surface, so that the telescopic process of the telescopic mechanisms 22 is smoother, and the positioning accuracy of the positioning unit 2 can be improved. The number of the telescopic mechanisms 22 is at least three, so that the top seat 212 can be positioned by adjusting the telescopic mechanisms 22 to a self-locking state, and the top seat 212 is fixed relative to the base 211.
As shown in fig. 4 and 5, in some embodiments of the present invention, the bottom ends of adjacent telescoping mechanisms 22 may be spaced apart at L1 (see fig. 5) and the top ends of adjacent telescoping mechanisms 22 may be spaced apart at L2 (see fig. 4). The distance between the bottom ends of the adjacent telescopic mechanisms 22 is larger than that between the top ends of the adjacent telescopic mechanisms 22 (namely L1 is larger than L2); or the distance between the bottom ends of the adjacent telescopic mechanisms 22 is smaller than that between the top ends of the adjacent telescopic mechanisms 22 (namely L2 is larger than L1).
Further, when footstock 212 and base 211 are just right, telescopic mechanism 22 inclines certain angle setting, and such setting can reduce the distance between base 211 and the footstock 212 for positioning unit 2's structure is more reliable and more stable, makes the adjustable range of location executor 21 more reasonable moreover, is convenient for telescopic mechanism 22 and the cooperation between the location executor 21.
In the embodiment of the present invention, the telescopic mechanism 22 is filled with a magnetorheological fluid medium (not shown in the figure), and the telescopic mechanism 22 is switched to the self-locking state when the magnetorheological fluid medium is converted into a solid state and is switched to the free state when the magnetorheological fluid medium is converted into a liquid state, so that the switching of the states (the self-locking state and the free state) of the telescopic mechanism 22 can be realized by switching the magnetorheological fluid medium (between the solid state and the liquid state) in the telescopic mechanism 22, and the operation mode is simple and is easy to realize. It should be noted that, under the action of different magnetic fields, the fluidity such as viscosity of the magnetorheological fluid medium changes, and further, the magnetorheological fluid medium can be switched between a solid state and a liquid state by changing the magnetic field around the magnetorheological fluid medium.
As shown in fig. 6, 7 and 8, in a further embodiment of the present invention, the telescopic mechanism 22 comprises a cylinder 221 and a telescopic rod 222. One end of the cylinder body 221 is provided with a first rotating part 2213, an accommodating cavity 2211 for accommodating magnetorheological fluid media is defined in the cylinder body 221, and the other end of the cylinder body 221 is provided with an opening communicated with the accommodating cavity 2211; the expansion link 222 is inserted into the accommodating cavity 2211 through the opening, the expansion link 222 is in sliding fit with the cylinder body 221, and at least one of the cylinder body 221 and the expansion link 222 is provided with a flow port 2212 for flowing the magnetorheological fluid medium. The arrangement of the flow port 2212 facilitates the magnetorheological fluid medium to flow relative to the telescopic rod 222, and facilitates the telescopic rod 222 to slide in the cavity of the accommodating cavity 2211. The circulation port 2212 may be disposed on the expansion link 222, may be disposed in the cavity (see fig. 9), or may be disposed in both the expansion link 222 and the cavity, and the disposition position of the circulation port 2212 may be adjusted according to design requirements.
Specifically, one end of the telescopic rod 222 exposed outside the cylinder body 221 is provided with a second rotating portion 2222, the first rotating portion 2213 can be pivotally connected with one of the positioning actuators 21 (one of the top seat 212 and the bottom seat 211), and the second rotating portion 2222 can be pivotally connected with the other of the positioning actuators 21 (the other of the top seat 212 and the bottom seat 211). When the first rotating portion 2213 is pivotally connected to the top chassis 212, the second rotating portion 2222 is pivotally connected to the base chassis 211 (refer to fig. 3); when the second rotating portion 2222 is pivotally connected to the top chassis 212, the first rotating portion 2213 is pivotally connected to the bottom chassis 211.
As shown in fig. 8, in a further embodiment of the present invention, the extension bar 222 is a step bar, and the shoulder 2221 of the extension bar 222 can be prevented from abutting against the accommodating cavity 2211 to prevent the extension bar 222 from being removed, so that the structure is simple and easy to implement.
As shown in fig. 8, in an embodiment of the present invention, the magnetorheological fluid medium may flow through the flow port 2212 to the upper side of the shoulder 2221, so that when the magnetorheological fluid medium is converted into a solid state under the action of the magnetic field, the telescopic rod 222 may be better positioned, and the telescopic rod 222 may be effectively prevented from being removed from the solid magnetorheological fluid medium.
As shown in fig. 8 and 9, in the embodiment of the present invention, the telescoping mechanism 22 further comprises a magnetic generator 223 that constructs a magnetic field for the magnetorheological fluid medium. The magnetism generating part 223 can be arranged on the outer side of the cylinder body 221, and then the space occupied by the magnetism generating part 223 is small, so that the layout among a plurality of parts in the telescopic mechanism 22 is more reasonable, and the distance between the magnetism generating part 223 and the magnetorheological fluid medium is more reasonable, and further the switching of the state (solid state or liquid state) of the magnetorheological fluid medium is facilitated. When the magnetic generating member 223 generates a magnetic field, the magnetorheological fluid medium is in a solid state; when the magnetic generator 223 does not generate a magnetic field, the magnetorheological fluid medium is in a liquid state.
In some alternative embodiments of the present invention, the magnetic generator 223 may be formed integrally with the cylinder 221, and the magnetic generator 223 may be connected to an outer wall of the cylinder 221 (refer to fig. 8). The magnetic generating member 223 is an electromagnet, so that the magnetic generating member 223 can generate a magnetic field under the condition of electrification, and on the premise of ensuring that the magnetic generating member 223 can generate a magnetic field for converting the magnetorheological fluid medium from a liquid state to a solid state, the structure of the cylinder body 221 (i.e. the connection relationship between the cylinder body 221 and the magnetic generating member 223: integral formation or mechanical connection, etc.) can be adjusted according to design requirements.
As shown in fig. 11, in the embodiment of the present invention, the telescopic mechanism 22 further includes a leakage detecting member 224 for detecting whether the cylinder 221 leaks, thereby improving the safety of the telescopic mechanism 22.
In a further embodiment of the present invention, the magnetic generator 223 is configured to be capable of being powered when the magnetorheological fluid medium leaks, so that when the magnetorheological fluid medium leaks, the magnetic generator 223 can generate a magnetic field, and further the magnetorheological fluid medium is converted from a liquid state to a solid state, which can effectively prevent the magnetorheological fluid medium from flowing out, and improve the safety of the positioning unit 2.
As shown in fig. 8 and 11, in a further embodiment of the present invention, the opening has an inner concave portion 2214, a cavity is defined between the inner concave portion 2214 and the telescopic rod 222, a first conducting member 2241 and a second conducting member 2242 are arranged in the cavity at intervals, and the first conducting member 2241 and the second conducting member 2242 are configured to be conducted by the magnetorheological fluid medium when the magnetorheological fluid medium leaks into the cavity, and to emit a leakage signal after being conducted. It can be understood that the magnetorheological fluid medium has electrical conductivity, when the magnetorheological fluid medium is in contact with the first conductive piece 2241 and the second conductive piece 2242 simultaneously, the leakage detection device can detect leakage of the magnetorheological fluid medium, and the first conductive piece 2241 and the second conductive piece 2242 are reasonably arranged in position, so that corresponding processing is performed when the magnetorheological fluid medium leaks, and the use safety of the telescopic mechanism 22 is improved.
Specifically, when the cylinder 221 leaks, the leakage detection component 224 can detect and feed back the leakage signal to the receiving controller, and when the receiving controller receives the leakage signal, the execution controller can energize the magnetic generator 223 and generate a magnetic field, and the magnetorheological fluid medium is converted from a liquid state to a solid state, so that the magnetorheological fluid medium cannot flow, the magnetorheological fluid medium is prevented from flowing out, and the use safety of the telescopic mechanism 22 is improved.
Further, the receiving controller and the execution controller may be integrated with the carrying device 100, or may be separated from the carrying device 100, and only a signal transmission and receiving device is provided between the carrying device 100, the receiving controller, and the execution controller, which may be adjusted according to actual design requirements, so that the carrying device 100 is more convenient to use and has higher safety.
The operation of the carrying device 100 according to the embodiment of the present invention will be briefly described with reference to fig. 1:
before the workpiece is placed on the carrier device 100, the positioning unit 2 is in the self-locking state, and the clamping unit 3 is in the retracted state (i.e., no clamping action is performed). When a workpiece is placed on the conveying device 100, the bottom surface of the workpiece is in contact with the positioning unit 2, the positioning unit 2 is powered off (namely, the positioning unit 2 releases the self-locking state), the clamping unit 3 can clamp and fix the workpiece, then the positioning unit 2 is switched to the self-locking state to complete the positioning of the workpiece, the workpiece can be conveyed and the like through the conveying device 100, the clamping unit 3 releases the workpiece after the workpiece reaches a preset position, and the workpiece can be taken out to perform other processes.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the structures or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A handling device, comprising:
the machine table is used for bearing a workpiece;
a plurality of positioning units, the positioning units comprising:
the positioning executive component is connected with the machine table; and
a telescoping mechanism configured to: under the action of a magnetic field, the telescopic mechanism is switched between a free state capable of freely extending and retracting and a self-locking state limited to extending and retracting, and the telescopic mechanism is rotatably connected with the positioning executing piece so as to lock the positioning executing piece in the self-locking state;
a clamping unit adapted to clamp a workpiece.
2. The handling device according to claim 1, wherein the expansion mechanism is filled with a magnetorheological fluid medium, and the expansion mechanism is switched to a self-locking state when the magnetorheological fluid medium is converted into a solid state and is switched to a free state when the magnetorheological fluid medium is converted into a liquid state.
3. The handling device of claim 2, wherein the telescoping mechanism comprises:
the magnetorheological fluid device comprises a cylinder body, wherein one end of the cylinder body is provided with a first rotating part, a containing cavity for containing the magnetorheological fluid medium is defined in the cylinder body, and the other end of the cylinder body is provided with an open hole communicated with the containing cavity;
the telescopic link, the telescopic link warp open the mouth inserts hold the intracavity, the telescopic link with cylinder body sliding fit, the cylinder body with at least one in the telescopic link has the confession magnetorheological suspensions medium circulation's circulation mouth.
4. The handling device of claim 3, further comprising a magnetic generator to create a magnetic field for the magnetorheological fluid medium.
5. The handling device according to claim 4, further comprising a leakage detection component for detecting leakage of the cylinder, wherein the magnetism generating component is configured to be capable of being powered on when leakage of the magnetorheological fluid medium occurs.
6. The carrying device as claimed in claim 5, wherein the open opening has an inner recess, a cavity is defined between the inner recess and the telescopic rod, a first conductive member and a second conductive member are disposed in the cavity at an interval, and the first conductive member and the second conductive member are configured to be conducted by the magnetorheological fluid medium when the magnetorheological fluid medium leaks into the cavity, and to send a leakage signal after the magnetorheological fluid medium is conducted.
7. Handling device according to any of claims 1-6, where the positioning actuator comprises:
the base is directly or indirectly fixedly arranged on the machine table;
the footstock, telescopic machanism presss from both sides the base with between the footstock, every telescopic machanism's both ends respectively with the footstock the cooperation of base sphere, the footstock is constructed into: can be locked when the telescopic mechanism is in a self-locking state and can move at least horizontally relative to the base when the telescopic mechanism is in a free state.
8. The handling device of claim 7, wherein the base and the top seat are further connected by an elastic restoring member, and the elastic restoring member is adapted to drive the top seat to move in a restoring manner.
9. The carrying device as claimed in claim 7, wherein the number of the telescopic mechanisms is plural, the plurality of telescopic mechanisms are distributed in a polygon shape, and the distance between the bottom ends of the adjacent telescopic mechanisms is larger than the distance between the top ends of the adjacent telescopic mechanisms; or the distance between the bottom ends of the adjacent telescopic mechanisms is smaller than the distance between the top ends of the adjacent telescopic mechanisms.
10. The handling device according to any of claims 1 to 6, wherein the positioning unit further comprises a flexible casing encasing the positioning actuator and the telescoping mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810342983.5A CN108529235B (en) | 2018-04-17 | 2018-04-17 | Conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810342983.5A CN108529235B (en) | 2018-04-17 | 2018-04-17 | Conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108529235A CN108529235A (en) | 2018-09-14 |
| CN108529235B true CN108529235B (en) | 2020-02-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810342983.5A Expired - Fee Related CN108529235B (en) | 2018-04-17 | 2018-04-17 | Conveying device |
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| Country | Link |
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| CN (1) | CN108529235B (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29718477U1 (en) * | 1997-10-17 | 1998-11-19 | Siemens AG, 80333 München | Device for supporting printed circuit boards in a processing position |
| KR100585593B1 (en) * | 2000-02-16 | 2006-06-07 | 삼성테크윈 주식회사 | Apparatus for supporting substrate for part mounting device |
| KR100473563B1 (en) * | 2001-11-27 | 2005-03-08 | 엘지전선 주식회사 | Locking Mechanism Using Magnetro-Rheological Fluid |
| DE10355555B4 (en) * | 2003-11-21 | 2012-08-09 | Hainbuch Gmbh Spannende Technik | Clamping jaws and clamping device for clamping workpieces |
| CN2761378Y (en) * | 2004-12-31 | 2006-03-01 | 中国科学技术大学 | Clamping device having flexible surface with variable rigidity |
| CN202985340U (en) * | 2012-12-10 | 2013-06-12 | 浙江师范大学 | Clamp special for magnetorheological fluid polishing device |
| CN104084826B (en) * | 2014-07-01 | 2016-08-17 | 重庆材料研究院有限公司 | Flexible fixture based on magnetorheological clay |
| CN107322347B (en) * | 2017-09-05 | 2023-04-07 | 河北工业大学 | Novel multifunctional flexible clamp and use method thereof |
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2018
- 2018-04-17 CN CN201810342983.5A patent/CN108529235B/en not_active Expired - Fee Related
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| CN108529235A (en) | 2018-09-14 |
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