CN108521778A - The judgment method of substrate force-bearing situation and transportation system - Google Patents

The judgment method of substrate force-bearing situation and transportation system Download PDF

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Publication number
CN108521778A
CN108521778A CN201780004624.2A CN201780004624A CN108521778A CN 108521778 A CN108521778 A CN 108521778A CN 201780004624 A CN201780004624 A CN 201780004624A CN 108521778 A CN108521778 A CN 108521778A
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China
Prior art keywords
substrate
force
bearing situation
transportation system
module
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Granted
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CN201780004624.2A
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CN108521778B (en
Inventor
罗卫
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Shenzhen Royole Display Technology Co ltd
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Shenzhen Royole Technologies Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

A kind of judgment method of substrate (60) force-bearing situation, for transportation system (100), transportation system (100) includes transport device (10) and detection substrate (20), detection substrate (20) is used to transported on transport device (10) with the force-bearing situation of analog baseplate (60) instead of substrate (60), and detection substrate (20) includes pressure detecting module (22).Judgment method includes step:(S2) the first force-bearing situation of the detection substrate (20) that pressure detecting module (22) detects is obtained when being transported on transport device (10) in detection substrate (20);(S4) judges the second force-bearing situation of substrate (60) according to the first force-bearing situation.Further relate to a kind of transportation system (100).

Description

The judgment method of substrate force-bearing situation and transportation system
Technical field
The present invention relates to substrate detection field, more particularly to the judgment method of a kind of substrate force-bearing situation and transportation system.
Background technology
In the related art, glass substrate is generally transmitted and is exchanged by transmission device, in transmission and exchange process Middle glass substrate is easy to damage because unbalance stress or stress are excessive, but the prior art can not quickly and accurately judge Go out the concrete reason of glass substrate damage.
Invention content
The embodiment of the present invention provides judgment method and the transportation system of a kind of substrate force-bearing situation.
The present invention provides a kind of judgment method of substrate force-bearing situation, is used for transportation system, and the transportation system includes fortune Defeated device and detection substrate, the detection substrate are used to be transported to simulate on the transport device instead of the substrate The force-bearing situation of substrate is stated, the detection substrate includes pressure detecting module, and the judgment method includes the following steps:
Obtain what the pressure detecting module detected when being transported on the transport device in the detection substrate First force-bearing situation of the detection substrate;With
The second force-bearing situation of the substrate is judged according to first force-bearing situation.
The present invention provides a kind of transportation system, the force-bearing situation for judging substrate, and the transportation system includes:
Transport device;
Substrate is detected, the detection substrate is used to be transported to simulate on the transport device instead of the substrate The force-bearing situation of substrate is stated, the detection substrate includes pressure detecting module;
Processing module, the processing module in the detection substrate when being transported on the transport device for obtaining First force-bearing situation of the detection substrate that the pressure detecting module detects and according to first force-bearing situation judge Second force-bearing situation of the substrate.
The judgment method of the substrate force-bearing situation of embodiment of the present invention and transportation system, which utilize, has pressure detecting module Force-bearing situation of the detection substrate analog baseplate in transportational process, to quickly and accurately judge that substrate may be damaged Abnormal point.
The additional aspect and advantage of embodiments of the present invention will be set forth in part in the description, partly will be from following Description in become apparent, or the practice of embodiment through the invention is recognized.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention is from combining in description of the following accompanying drawings to embodiment by change It obtains obviously and is readily appreciated that, wherein:
Fig. 1 is the flow diagram of the judgment method of the substrate force-bearing situation of embodiment of the present invention;
Fig. 2 is the module diagram of the transportation system of embodiment of the present invention;
Fig. 3 is another flow diagram of the judgment method of the substrate force-bearing situation of embodiment of the present invention;
Fig. 4 is the module diagram of the detection substrate of embodiment of the present invention;
Fig. 5 is another flow diagram of the judgment method of the substrate force-bearing situation of embodiment of the present invention;
Fig. 6 is another module diagram of the transportation system of embodiment of the present invention;
Fig. 7 is another flow diagram of the judgment method of the substrate force-bearing situation of embodiment of the present invention.
Main element symbol illustrates:
Transportation system 100, transport device 10, detection substrate 20, pressure detecting module 22, processor 24, wireless transmission mould Block 26, processing module 30, processing unit 40, substrate 60.
Specific implementation mode
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, and is only used for explaining the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " first ", " second " are used for description purposes only, and cannot It is interpreted as indicating or implies relative importance or implicitly indicate the quantity of indicated technical characteristic.Define as a result, " the One ", the feature of " second " can explicitly or implicitly include one or more feature.In description of the invention In, the meaning of " plurality " is two or more, unless otherwise specifically defined.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can Can also be to be electrically connected or can be in communication with each other to be mechanical connection;It can be directly connected, it can also be by between intermediary It connects connected, can be the interaction relationship of the connection or two elements inside two elements.For the ordinary skill of this field For personnel, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
Following disclosure provides many different embodiments or example is used for realizing the different structure of the present invention.In order to Simplify disclosure of the invention, hereinafter the component of specific examples and setting are described.Certainly, they are merely examples, and And it is not intended to limit the present invention.In addition, the present invention can in different examples repeat reference numerals and/or reference letter, This repetition is for purposes of simplicity and clarity, itself not indicate between discussed various embodiments and/or setting Relationship.In addition, the present invention provides various specific techniques and material example, but those of ordinary skill in the art can be with Recognize the application of other techniques and/or the use of other materials.
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, and is only used for explaining the present invention, and is not considered as limiting the invention.
Also referring to Fig. 1 and Fig. 2, the judgment method of 60 force-bearing situation of substrate of embodiment of the present invention can be used for transporting Defeated system 100.Transportation system 100 includes transport device 10 and detection substrate 20.Detection substrate 20 instead of substrate 60 for transporting It is transported on defeated device 10 with the force-bearing situation of analog baseplate 60.It includes pressure detecting module 22 to detect substrate 20.Judgement side Method includes the following steps:
S2:The detection that pressure detecting module 22 detects is obtained when being transported on transport device 10 in detection substrate 20 First force-bearing situation of substrate 20;With
S4:The second force-bearing situation of substrate 60 is judged according to the first force-bearing situation.
Referring to Fig. 2, the transportation system 100 of embodiment of the present invention can be used for judging the stress shape of substrate 60 Condition.Transportation system 100 includes transport device 10, detection substrate 20 and processing module 30.Substrate 20 is detected to be used to replace substrate 60 It is transported on transport device 10 with the force-bearing situation of analog baseplate 60, detection substrate 20 includes pressure detecting module 22.Place Reason module 30 is used to obtain the inspection that pressure detecting module 22 detects when being transported on transport device 10 in detection substrate 20 It surveys the first force-bearing situation of substrate 20 and judges the second force-bearing situation of substrate 60 according to the first force-bearing situation.
In other words, the judgment method of embodiment of the present invention can be real by the transportation system 100 of embodiment of the present invention It is existing, wherein step S2 and S4 can be realized by processing module 30.
The judgment method of 60 force-bearing situation of substrate of embodiment of the present invention and transportation system 100, which utilize, has pressure detecting Force-bearing situation of detection 20 analog baseplate 60 of substrate of module 22 in transportational process, to quickly and accurately judge substrate 60 abnormal points that may be damaged.
Specifically, for cost-effective and quickening working efficiency, substrate 60 is generally by transport device 10, for example transports Robot, transport vehicle, conveyer belt etc., are transported.Substrate 60 is easy in transportational process due to unbalance stress or stress are excessive Cause to damage, but can not quickly determine that be which transport device 10 go wrong either transport device 10 which position It sets and there is a problem.Therefore, the detection substrate 20 with pressure detecting module 22 can be utilized to replace substrate 60 in transport device It is transported on 10, first force-bearing situation of the detection substrate 20 in transportational process is obtained by pressure detecting module 22, to The second force-bearing situation of substrate 60 is judged according to the first force-bearing situation, and then can determine that substrate 60 exists according to the second force-bearing situation The position of damage is likely to occur in transportational process.In one example, substrate 60 is glass substrate.
It should be noted that transport device 10 includes the grabbing device etc. in 60 moving process of substrate, do not do herein any Limitation.In addition, transport device 10 can be one or more.
In one embodiment, the detection shape of substrate 20, size and weight respectively with the shape of substrate 60, size and Weight is identical.
In this way, the second force-bearing situation for detecting the first force-bearing situation and substrate 60 of substrate 20 can be made essentially identical, To reduce the workload for judging the second force-bearing situation.
It is appreciated that the shapes and sizes of detection substrate 20 are identical as the shapes and sizes of substrate 60 to may insure detection base Second force-bearing situation of the first force-bearing situation and substrate 60 that the pressure detecting module 22 on plate 20 detects is one-to-one Relationship, that is, the force-bearing situation of substrate 60 can accordingly be obtained by detecting substrate 20.In addition, detection substrate 20 shapes and sizes with The shapes and sizes of substrate 60 are identical can so that detecting substrate 20 can adapt to environment of the substrate 60 in transportational process, such as The placement region that transport device 10 is used to transport substrate 60 is coincide with substrate 60.
In some embodiments, substrate 60 can be completely covered in detection substrate 20, in this way, detection substrate 20 can be with Accordingly obtain the force-bearing situation of substrate 60.On the other hand, when the size and shape of substrate 60 changes, it could be used that same inspection Substrate 20 is surveyed to be detected.
It can to detect the of substrate 20 it should be noted that the weight of detection substrate 20 is identical with the weight of substrate 60 Second force-bearing situation of one force-bearing situation and substrate 60 is even more like.In some embodiments, the weight of substrate 20 is detected Can be the weight different from substrate 60, in this way, can be converted into the first force-bearing situation by the transformational relation between gravity Second force-bearing situation.
Referring to Fig. 3, in one embodiment, pressure detecting module 22 includes pressure sensor.Step S2 include with Lower step:
S22:According to the output signal of pressure sensor to obtain the first force-bearing situation.
Referring to Fig. 2, in one embodiment, pressure detecting module 22 includes pressure sensor.Processing module 30 are used for the output signal according to pressure sensor to obtain the first force-bearing situation.
In other words, step S22 can be realized by processing module 30.
In this way, the first force-bearing situation of detection substrate 20 can be directly acquired by pressure sensor.
Specifically, pressure sensor may include the piezo column in matrix array, the pressure detected according to each piezo column Power may determine that pressure anomaly point, according to the coordinate position of pressure anomaly point in pressure sensor, it can be determined that go out substrate 60 there may be the positions of damage in transportational process, to judge 10 corresponding position of corresponding transport device 10 and transport device Set the problem of being likely to occur.
Referring to Fig. 4, in one embodiment, detection substrate 20 includes processor 24, processor 24 includes processing mould Block 30.
In this way, the processor 24 of detection substrate 20 directly can handle and analyze the first force-bearing situation to judge the second stress Situation.
It is appreciated that in transportation system 100, the pressure detecting module 22 of detection substrate 20 is to directly acquire detection substrate The component of 20 first pressure situation, since pressure detecting module 22 and processor 24 are all the components detected inside substrate 20, Therefore by detect substrate 20 24 direct processing pressure detection module 22 of processor detect detection substrate 20 first by Power situation can quickly and efficiently realize the processing to the first force-bearing situation and analysis to directly acquire the second stress of substrate 60 Situation.
Also referring to Fig. 5 and Fig. 6, in one embodiment, transportation system 100 includes processing unit 40.Detect base Plate 20 includes wireless transport module 26, and wireless transport module 26 with processing unit 40 for communicating.Step S4 includes the following steps:
S42:First force-bearing situation is sent to processing unit 40 by wireless transport module 26.
Referring to Fig. 6, in one embodiment, transportation system 100 includes processing unit 40.Processing unit 40 is wrapped Processing module 30 is included, detection substrate 20 includes wireless transport module 26.Wireless transport module 26 is used to send out the first force-bearing situation Give processing module 30.
In other words, step S44 can be realized by wireless transport module 26, and step S46 can be realized by processing unit 40.
In this way, processing unit 40 can be utilized to handle and analyze the first force-bearing situation to judge the second force-bearing situation.
In some embodiments, detection substrate 20 does not have data-handling capacity or data-handling capacity is too weak, leads It causes that the first force-bearing situation that pressure detecting module 22 obtains can not be rapidly processed, therefore can be by detecting outside substrate 20 Processing unit 40 is handled and is analyzed to the first force-bearing situation, to obtain the second force-bearing situation.Due to processing unit 40 with Detection substrate 20 may not have connection relation, therefore detect substrate 20 and can be filled with processing by the realization of wireless transport module 26 Set 40 communication.
In one embodiment, wireless transport module 26 includes bluetooth module, and processing unit 40 includes computer.
In this way, detection substrate 20 can connect computer by bluetooth module, the quick data transmissions of bluetooth module are utilized First force-bearing situation is transferred to computer by power, recycle the quick data-handling capacity of computer handle the first force-bearing situation with Obtain the second force-bearing situation.
In some embodiments, wireless transport module 26 includes WLAN (WLAN) module, and processing unit 40 is wrapped Including mobile phone, tablet computer etc. has the device of data-handling capacity.
Referring to Fig. 7, in one embodiment, after step S4, judgment method includes the following steps:
S6:Judge whether the second force-bearing situation conforms to a predetermined condition;With
S8:Prompt message is sent out when the second force-bearing situation does not meet predetermined condition.
Referring to Fig. 2, in one embodiment, processing module 30 is for judging whether the second force-bearing situation meets Predetermined condition and send out prompt message when the second force-bearing situation does not meet predetermined condition.
In other words, step S6 and S8 can be realized by processing module 30.
In this way, prompt message can be sent out when judging that substrate 60 is likely to occur problem.
Specifically, predetermined condition can be field of load of the substrate 60 during normal transmission and can pass through many experiments It obtains.When the second force-bearing situation does not meet predetermined condition, illustrate substrate 60 in corresponding transportational process there may be problem, So processing module 30 can send out prompt message with real-time prompting be likely to occur problem transport device 10 and transport device 10 it is right The position answered.
It is appreciated that prompt message can be at least one of text information, image information and voice messaging, for example, When the second force-bearing situation does not meet predetermined condition, processing module 30 can control the electroacoustic component of transportation system 100 and send out prompt Sound.It should be noted that it refers to prompt that prompt message, which can be at least one of text information, image information and voice messaging, Information can be text information, image information, voice messaging, text information and image information, text information and voice messaging, figure Any one as information and voice messaging, in text information, image information and voice messaging.Any restrictions are not done herein.
In one embodiment, the judgment method of embodiment of the present invention is executed according to predetermined period, in other words, this hair The transportation system 100 of bright embodiment judges the second force-bearing situation according to predetermined period.
In this way, can periodically judge whether the second force-bearing situation conforms to a predetermined condition.
It is appreciated that transport device 10 when transporting substrate 60, may break down because of transport device 10 or substrate 60 There is deviation and substrate 60 is caused unbalance stress or the excessive situation of stress occur in placement location, therefore is held according to predetermined period The judgment method of row embodiment of the present invention can more judge the second force-bearing situation of substrate 60 in real time, to which judge can The position for the transport device 10 that can be gone wrong and can the corresponding solution problem, and then ensure that transport device 10 can be just Often transport substrate 60.
In some embodiments, the length of predetermined period can be determined by operating personnel.In this way, operating personnel can basis Judge to demand cycle the second force-bearing situation of substrate 60.It should be noted that when predetermined period is shorter, transport device 10 The problem of being likely to occur is easier to find, but the workload of transportation system 100 is bigger;When predetermined period is long, fortune The workload of defeated system 100 is smaller, but transport device 10 there may be the problem of more difficult discovery.
In some embodiments, the judgment method of embodiment of the present invention can be executed when staff needs, This does not do any restrictions.In this way, can quickly and accurately judge the concrete reason that substrate 60 damages when substrate 60 damages.
In the description of this specification, reference term " embodiment ", " some embodiments ", " schematically implementation What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the present invention.In this specification In, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
Any process described otherwise above or method description are construed as in flow chart or herein, and expression includes Module, segment or the portion of the code of one or more executable instructions for the step of executing specific logical function or process Point, and the range of the preferred embodiment of the present invention includes other execution, wherein can not press shown or discuss suitable Sequence, include according to involved function by it is basic simultaneously in the way of or in the opposite order, to execute function, this should be of the invention Embodiment person of ordinary skill in the field understood.
Expression or logic and/or step described otherwise above herein in flow charts, for example, being considered use In the order list for the executable instruction for executing logic function, can specifically execute in any computer-readable medium, for Instruction execution system, device or equipment (system of such as computer based system including processor or other can be held from instruction The instruction fetch of row system, device or equipment and the system executed instruction) it uses, or combine these instruction execution systems, device or set It is standby and use.For the purpose of this specification, " computer-readable medium " can any can be included, store, communicating, propagating or passing Defeated program is for instruction execution system, device or equipment or the dress used in conjunction with these instruction execution systems, device or equipment It sets.The more specific example (non-exhaustive list) of computer-readable medium includes following:Electricity with one or more wiring Interconnecting piece (electronic device), portable computer diskette box (magnetic device), random access memory (RAM), read-only memory (ROM), erasable edit read-only storage (EPROM or flash memory), fiber device and portable optic disk is read-only deposits Reservoir (CDROM).In addition, computer-readable medium can even is that the paper that can print described program on it or other are suitable Medium, because can be for example by carrying out optical scanner to paper or other media, then into edlin, interpretation or when necessary with it His suitable method is handled electronically to obtain described program, is then stored in computer storage.
It should be appreciated that each section of the present invention can be executed with hardware, software, firmware or combination thereof.Above-mentioned In embodiment, software that multiple steps or method can in memory and by suitable instruction execution system be executed with storage Or firmware executes.It, and in another embodiment, can be under well known in the art for example, if executed with hardware Any one of row technology or their combination execute:With the logic gates for executing logic function to data-signal Discrete logic, with suitable combinational logic gate circuit application-specific integrated circuit, programmable gate array (PGA), scene Programmable gate array (FPGA) etc..
Those skilled in the art are appreciated that execute all or part of step that above-mentioned implementation carries It is that relevant hardware can be instructed to complete by program, the program can be stored in a kind of computer readable storage medium In, which includes the steps that one or a combination set of embodiment of the method when being executed.
In addition, each functional unit in each embodiment of the present invention can be integrated in a processing module, it can also That each unit physically exists alone, can also two or more units be integrated in a module.Above-mentioned integrated mould The form that hardware had both may be used in block executes, and can also be executed in the form of software function module.The integrated module is such as Fruit is executed in the form of software function module and when sold or used as an independent product, can also be stored in a computer In read/write memory medium.
Storage medium mentioned above can be read-only memory, disk or CD etc..Although having been shown and retouching above The embodiment of the present invention is stated, it is to be understood that above-described embodiment is exemplary, and should not be understood as the limit to the present invention System, those skilled in the art can be changed above-described embodiment, change, replace and become within the scope of the invention Type.

Claims (16)

1. a kind of judgment method of substrate force-bearing situation is used for transportation system, which is characterized in that the transportation system includes transport Device and detection substrate, the detection substrate are used to be transported with described in simulation on the transport device instead of the substrate The force-bearing situation of substrate, the detection substrate includes pressure detecting module, and the judgment method includes the following steps:
It is obtained when being transported on the transport device described in the pressure detecting module detects in the detection substrate Detect the first force-bearing situation of substrate;With
The second force-bearing situation of the substrate is judged according to first force-bearing situation.
2. judgment method as described in claim 1, which is characterized in that shape, the size and weight difference of the detection substrate It is identical with the shape of the substrate, size and weight.
3. judgment method as described in claim 1, which is characterized in that the pressure detecting module includes pressure sensor, institute It states and obtains the inspection that the pressure detecting module detects when being transported on the transport device in the detection substrate The step of the first force-bearing situation for surveying substrate, includes the following steps:
According to the output signal of the pressure sensor to obtain first force-bearing situation.
4. judgment method as described in claim 1, which is characterized in that the detection substrate includes processor, the processor Including the processing module.
5. judgment method as described in claim 1, which is characterized in that the transportation system includes processing unit, the detection Substrate includes wireless transport module, and the wireless transport module is described according to described first for being communicated with the processing unit Force-bearing situation judges that the step of the second force-bearing situation of the substrate includes the following steps:
First force-bearing situation is sent to the processing unit by the wireless transport module.
6. judgment method as claimed in claim 5, which is characterized in that the wireless transport module includes bluetooth module, described Processing unit includes computer.
7. judgment method as described in claim 1, which is characterized in that described according to described in first force-bearing situation judgement After the step of second force-bearing situation of substrate, the judgment method includes the following steps:
Judge whether second force-bearing situation conforms to a predetermined condition;With
Prompt message is sent out when second force-bearing situation does not meet the predetermined condition.
8. judgment method as described in claim 1, which is characterized in that the judgment method is executed according to predetermined period.
9. a kind of transportation system, the force-bearing situation for judging substrate, which is characterized in that the transportation system includes:
Transport device;
Substrate is detected, the detection substrate is used to transported on the transport device to simulate the base instead of the substrate The force-bearing situation of plate, the detection substrate includes pressure detecting module;
Processing module, the processing module in the detection substrate when being transported on the transport device for described in obtaining First force-bearing situation of the detection substrate that pressure detecting module detects and according to first force-bearing situation judge described in Second force-bearing situation of substrate.
10. transportation system as claimed in claim 9, which is characterized in that shape, the size and weight difference of the detection substrate It is identical with the shape of the substrate, size and weight.
11. transportation system as claimed in claim 9, which is characterized in that the pressure detecting module includes pressure sensor, institute Processing module is stated for the output signal according to the pressure sensor to obtain first force-bearing situation.
12. transportation system as claimed in claim 9, which is characterized in that the detection substrate includes processor, the processor Including the processing module.
13. transportation system as claimed in claim 9, which is characterized in that the transportation system includes processing unit, the processing Device includes the processing module, and the detection substrate includes wireless transport module, and the wireless transport module is used for will be described First force-bearing situation is sent to the processing module.
14. transportation system as claimed in claim 13, which is characterized in that the wireless transport module includes bluetooth module, institute It includes computer to state processing unit.
15. transportation system as claimed in claim 9, which is characterized in that the processing module is for judging second stress Whether situation conforms to a predetermined condition and sends out prompt message when second force-bearing situation does not meet the predetermined condition.
16. transportation system as claimed in claim 9, which is characterized in that described in the transportation system judges according to predetermined period Second force-bearing situation.
CN201780004624.2A 2017-05-17 2017-05-17 Method for judging stress condition of substrate and transportation system Expired - Fee Related CN108521778B (en)

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PCT/CN2017/084767 WO2018209613A1 (en) 2017-05-17 2017-05-17 Stress distribution determination method for substrate, and transport system

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CN108521778B CN108521778B (en) 2020-10-02

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