CN108521778A - The judgment method of substrate force-bearing situation and transportation system - Google Patents
The judgment method of substrate force-bearing situation and transportation system Download PDFInfo
- Publication number
- CN108521778A CN108521778A CN201780004624.2A CN201780004624A CN108521778A CN 108521778 A CN108521778 A CN 108521778A CN 201780004624 A CN201780004624 A CN 201780004624A CN 108521778 A CN108521778 A CN 108521778A
- Authority
- CN
- China
- Prior art keywords
- substrate
- force
- bearing situation
- transportation system
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 156
- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000001514 detection method Methods 0.000 claims abstract description 61
- 238000007689 inspection Methods 0.000 claims description 3
- 238000004088 simulation Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 41
- 230000008569 process Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 210000003733 optic disk Anatomy 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/084767 WO2018209613A1 (en) | 2017-05-17 | 2017-05-17 | Stress distribution determination method for substrate, and transport system |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108521778A true CN108521778A (en) | 2018-09-11 |
CN108521778B CN108521778B (en) | 2020-10-02 |
Family
ID=63433119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201780004624.2A Expired - Fee Related CN108521778B (en) | 2017-05-17 | 2017-05-17 | Method for judging stress condition of substrate and transportation system |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN108521778B (en) |
WO (1) | WO2018209613A1 (en) |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101256943A (en) * | 2007-03-02 | 2008-09-03 | 株式会社Orc制作所 | Conveying device |
CN101858873A (en) * | 2009-04-08 | 2010-10-13 | 日商鹰野株式会社 | Appearance inspecting system |
CN103035552A (en) * | 2011-10-06 | 2013-04-10 | 株式会社东芝 | Foreign matter detecting device and semiconductor manufacturing device |
CN203465489U (en) * | 2013-08-21 | 2014-03-05 | 合肥京东方光电科技有限公司 | Substrate carrying mechanism |
CN103848564A (en) * | 2012-12-05 | 2014-06-11 | 三星钻石工业股份有限公司 | Substrate transfer apparatus |
JP5534719B2 (en) * | 2009-06-08 | 2014-07-02 | リンテック株式会社 | Position recognition apparatus and position recognition method |
CN104238202A (en) * | 2014-09-30 | 2014-12-24 | 合肥京东方光电科技有限公司 | Coating device, coating system and coating method for frame sealing glue |
CN104609137A (en) * | 2015-01-04 | 2015-05-13 | 京东方科技集团股份有限公司 | Glass substrate conveying device |
CN104979256A (en) * | 2015-07-31 | 2015-10-14 | 京东方科技集团股份有限公司 | Substrate conveying device |
CN205248294U (en) * | 2015-12-31 | 2016-05-18 | 常州亿晶光电科技有限公司 | Cracked detection mechanism of pressure type solar cell panel |
CN106660709A (en) * | 2014-09-04 | 2017-05-10 | 富士机械制造株式会社 | Substrate conveyance device and method for inspecting conveyor belt |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1135153A (en) * | 1997-07-22 | 1999-02-09 | Dainippon Screen Mfg Co Ltd | Base board taking-out device from base board housing cassette |
CN104849882A (en) * | 2015-05-05 | 2015-08-19 | 深圳市华星光电技术有限公司 | Detection device for liquid crystal display panel |
-
2017
- 2017-05-17 WO PCT/CN2017/084767 patent/WO2018209613A1/en active Application Filing
- 2017-05-17 CN CN201780004624.2A patent/CN108521778B/en not_active Expired - Fee Related
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101256943A (en) * | 2007-03-02 | 2008-09-03 | 株式会社Orc制作所 | Conveying device |
CN101858873A (en) * | 2009-04-08 | 2010-10-13 | 日商鹰野株式会社 | Appearance inspecting system |
JP5534719B2 (en) * | 2009-06-08 | 2014-07-02 | リンテック株式会社 | Position recognition apparatus and position recognition method |
CN103035552A (en) * | 2011-10-06 | 2013-04-10 | 株式会社东芝 | Foreign matter detecting device and semiconductor manufacturing device |
CN103848564A (en) * | 2012-12-05 | 2014-06-11 | 三星钻石工业股份有限公司 | Substrate transfer apparatus |
CN203465489U (en) * | 2013-08-21 | 2014-03-05 | 合肥京东方光电科技有限公司 | Substrate carrying mechanism |
CN106660709A (en) * | 2014-09-04 | 2017-05-10 | 富士机械制造株式会社 | Substrate conveyance device and method for inspecting conveyor belt |
CN104238202A (en) * | 2014-09-30 | 2014-12-24 | 合肥京东方光电科技有限公司 | Coating device, coating system and coating method for frame sealing glue |
CN104609137A (en) * | 2015-01-04 | 2015-05-13 | 京东方科技集团股份有限公司 | Glass substrate conveying device |
CN104979256A (en) * | 2015-07-31 | 2015-10-14 | 京东方科技集团股份有限公司 | Substrate conveying device |
CN205248294U (en) * | 2015-12-31 | 2016-05-18 | 常州亿晶光电科技有限公司 | Cracked detection mechanism of pressure type solar cell panel |
Also Published As
Publication number | Publication date |
---|---|
CN108521778B (en) | 2020-10-02 |
WO2018209613A1 (en) | 2018-11-22 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Ruoyu Technology Co.,Ltd. Address before: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN ROYOLE TECHNOLOGIES Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210816 Address after: 518100 Rouyu international flexible display base, No. 18 dingshanhe Road, Pingdi street, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN ROYOLE DISPLAY TECHNOLOGY Co.,Ltd. Address before: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Ruoyu Technology Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201002 |
|
CF01 | Termination of patent right due to non-payment of annual fee |