CN108475715A - 半导体发光元件 - Google Patents
半导体发光元件 Download PDFInfo
- Publication number
- CN108475715A CN108475715A CN201780005645.6A CN201780005645A CN108475715A CN 108475715 A CN108475715 A CN 108475715A CN 201780005645 A CN201780005645 A CN 201780005645A CN 108475715 A CN108475715 A CN 108475715A
- Authority
- CN
- China
- Prior art keywords
- electrode
- layer
- semiconductor
- emitting elements
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 422
- 150000001875 compounds Chemical class 0.000 claims abstract description 18
- 239000000126 substance Substances 0.000 claims description 25
- 239000004020 conductor Substances 0.000 claims description 15
- 238000003466 welding Methods 0.000 claims description 9
- 238000000576 coating method Methods 0.000 description 146
- 239000011248 coating agent Substances 0.000 description 142
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 60
- 229910052681 coesite Inorganic materials 0.000 description 35
- 229910052906 cristobalite Inorganic materials 0.000 description 35
- 239000000377 silicon dioxide Substances 0.000 description 35
- 229910052682 stishovite Inorganic materials 0.000 description 35
- 229910052905 tridymite Inorganic materials 0.000 description 35
- 239000000758 substrate Substances 0.000 description 31
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 27
- 230000005611 electricity Effects 0.000 description 25
- 230000003287 optical effect Effects 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 238000009413 insulation Methods 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 15
- 230000031700 light absorption Effects 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000004891 communication Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 229910052593 corundum Inorganic materials 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000005496 eutectics Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 229910001845 yogo sapphire Inorganic materials 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002310 reflectometry Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 238000005336 cracking Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003252 repetitive effect Effects 0.000 description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000003760 hair shine Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 208000007578 phototoxic dermatitis Diseases 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910003087 TiOx Inorganic materials 0.000 description 1
- 229910008599 TiW Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000013386 optimize process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000003405 preventing effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
- H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0025—Processes relating to coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/387—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Devices (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160000945A KR20170082175A (ko) | 2016-01-05 | 2016-01-05 | 반도체 발광소자 |
KR10-2016-0000945 | 2016-01-05 | ||
KR1020160044124A KR101762259B1 (ko) | 2016-04-11 | 2016-04-11 | 반도체 발광소자 |
KR10-2016-0044124 | 2016-04-11 | ||
KR10-2016-0069562 | 2016-06-03 | ||
KR1020160069562A KR101826206B1 (ko) | 2016-06-03 | 2016-06-03 | 반도체 발광소자 |
KR1020160115017A KR101868518B1 (ko) | 2016-09-07 | 2016-09-07 | 반도체 발광소자 |
KR10-2016-0115017 | 2016-09-07 | ||
PCT/KR2017/000152 WO2017119743A1 (ko) | 2016-01-05 | 2017-01-05 | 반도체 발광소자 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108475715A true CN108475715A (zh) | 2018-08-31 |
CN108475715B CN108475715B (zh) | 2020-11-03 |
Family
ID=59273792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201780005645.6A Active CN108475715B (zh) | 2016-01-05 | 2017-01-05 | 半导体发光元件 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11309457B2 (zh) |
CN (1) | CN108475715B (zh) |
WO (1) | WO2017119743A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110224048A (zh) * | 2019-05-15 | 2019-09-10 | 华南师范大学 | 一种紫外led外延结构 |
CN113410357A (zh) * | 2021-07-12 | 2021-09-17 | 錼创显示科技股份有限公司 | 微型发光二极管芯片 |
CN113410359A (zh) * | 2021-06-17 | 2021-09-17 | 厦门三安光电有限公司 | 一种发光二极管芯片、发光装置及显示装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018101393A1 (de) * | 2018-01-23 | 2019-07-25 | Osram Opto Semiconductors Gmbh | Optoelektronischer halbleiterchip und verfahren zur herstellung eines optoelektronischen halbleiterchips |
US11563148B2 (en) * | 2020-05-15 | 2023-01-24 | Lumileds Llc | Light-emitting device with configurable spatial distribution of emission intensity |
US11462666B2 (en) * | 2020-05-15 | 2022-10-04 | Lumileds Llc | Light-emitting device with configurable spatial distribution of emission intensity |
EP4150679A4 (en) * | 2020-05-15 | 2024-03-06 | Lumileds LLC | LIGHT-EMITTING DEVICE WITH CONFIGURABLE SPATIAL EMISSION INTENSITY DISTRIBUTION |
US20220246801A1 (en) * | 2021-02-03 | 2022-08-04 | Samsung Electronics Co., Ltd. | Light-emitting device and display apparatus including the same |
US11682752B2 (en) | 2021-03-31 | 2023-06-20 | Lumileds Llc | Light-emitting device with nano-structured light extraction layer |
TWI833091B (zh) * | 2021-07-12 | 2024-02-21 | 錼創顯示科技股份有限公司 | 微型發光二極體晶片 |
Citations (6)
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KR20100016631A (ko) * | 2007-04-26 | 2010-02-12 | 오스람 옵토 세미컨덕터스 게엠베하 | 광전 소자,및 복수 개의 광전 소자들의 제조 방법 |
JP2011071274A (ja) * | 2009-09-25 | 2011-04-07 | Toshiba Corp | 半導体装置及びその製造方法 |
KR20130128746A (ko) * | 2012-05-17 | 2013-11-27 | 서울바이오시스 주식회사 | 정전기에 대한 내성이 향상된 발광다이오드 및 그의 제조방법 |
KR20140031732A (ko) * | 2012-09-05 | 2014-03-13 | 주식회사 세미콘라이트 | 반도체 발광소자 |
KR20150141198A (ko) * | 2014-05-22 | 2015-12-18 | 주식회사 세미콘라이트 | 반도체 발광소자 |
KR20150142373A (ko) * | 2014-06-11 | 2015-12-22 | 엘지이노텍 주식회사 | 발광 소자 및 그를 포함하는 발광소자 패키지 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100981275B1 (ko) | 2008-09-25 | 2010-09-10 | 주식회사 에피밸리 | 3족 질화물 반도체 발광소자 |
JP5633477B2 (ja) * | 2010-08-27 | 2014-12-03 | 豊田合成株式会社 | 発光素子 |
WO2015053600A1 (ko) | 2013-10-11 | 2015-04-16 | 주식회사 세미콘라이트 | 반도체 발광소자 |
KR101635521B1 (ko) | 2014-10-30 | 2016-07-05 | 주식회사 씨티랩 | 반도체 발광소자 |
KR102282137B1 (ko) * | 2014-11-25 | 2021-07-28 | 삼성전자주식회사 | 반도체 발광소자 및 이를 구비한 반도체 발광장치 |
CN108369977B (zh) * | 2015-10-01 | 2021-06-15 | 克利公司 | 低光学损失倒装芯片固态照明设备 |
-
2017
- 2017-01-05 CN CN201780005645.6A patent/CN108475715B/zh active Active
- 2017-01-05 US US16/068,081 patent/US11309457B2/en active Active
- 2017-01-05 WO PCT/KR2017/000152 patent/WO2017119743A1/ko active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100016631A (ko) * | 2007-04-26 | 2010-02-12 | 오스람 옵토 세미컨덕터스 게엠베하 | 광전 소자,및 복수 개의 광전 소자들의 제조 방법 |
JP2011071274A (ja) * | 2009-09-25 | 2011-04-07 | Toshiba Corp | 半導体装置及びその製造方法 |
KR20130128746A (ko) * | 2012-05-17 | 2013-11-27 | 서울바이오시스 주식회사 | 정전기에 대한 내성이 향상된 발광다이오드 및 그의 제조방법 |
KR20140031732A (ko) * | 2012-09-05 | 2014-03-13 | 주식회사 세미콘라이트 | 반도체 발광소자 |
KR20150141198A (ko) * | 2014-05-22 | 2015-12-18 | 주식회사 세미콘라이트 | 반도체 발광소자 |
KR20150142373A (ko) * | 2014-06-11 | 2015-12-22 | 엘지이노텍 주식회사 | 발광 소자 및 그를 포함하는 발광소자 패키지 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110224048A (zh) * | 2019-05-15 | 2019-09-10 | 华南师范大学 | 一种紫外led外延结构 |
CN113410359A (zh) * | 2021-06-17 | 2021-09-17 | 厦门三安光电有限公司 | 一种发光二极管芯片、发光装置及显示装置 |
CN113410359B (zh) * | 2021-06-17 | 2022-07-26 | 厦门三安光电有限公司 | 一种发光二极管芯片、发光装置及显示装置 |
CN113410357A (zh) * | 2021-07-12 | 2021-09-17 | 錼创显示科技股份有限公司 | 微型发光二极管芯片 |
Also Published As
Publication number | Publication date |
---|---|
WO2017119743A1 (ko) | 2017-07-13 |
US20200287088A1 (en) | 2020-09-10 |
CN108475715B (zh) | 2020-11-03 |
US11309457B2 (en) | 2022-04-19 |
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