CN1084648A - 1: 1 refractive and reflective optical system of polarized light imaging - Google Patents
1: 1 refractive and reflective optical system of polarized light imaging Download PDFInfo
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- CN1084648A CN1084648A CN 92108564 CN92108564A CN1084648A CN 1084648 A CN1084648 A CN 1084648A CN 92108564 CN92108564 CN 92108564 CN 92108564 A CN92108564 A CN 92108564A CN 1084648 A CN1084648 A CN 1084648A
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- polarized light
- reflective optical
- light imaging
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Abstract
The present invention is 1: 1 refractive and reflective optical system of a kind of polarized light imaging.Be mainly used in the photocopying of meticulous or hyperfine figure.Contain the image discrete device, disappearing image difference refracting set and the principal reflection mirror three parts that constitute by the polarizing prism group, wherein the polarizing prism group is with inclined-plane cube glued together by two 45 ° right-angle prism, cube contains the polarizer and analyzer, is equipped with λ/4 wave plate films on the reflecting surface of principal reflection mirror.The optical system of this invention has the large-area usable working field of view, and having does not again have the veiling glare influence, resembles the high advantage of face contrast.
Description
The present invention is a kind of 1: 1 refractive and reflective optical system that utilizes the polarized light imaging, is mainly used in meticulous or hyperfine figure photocopying, as is used to make the litho machine of large scale integrated chip.
Prior art:
1. 1: 1 refractive and reflective optical system that aberration correction is arranged of the inventor king of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences Zhijiang River invention, number of patent application 91107489.9, this system is by constituting as the triangular prism group of image discrete device 1, disappearing image difference refracting set 2 and the principal reflection mirror 3 that has meniscus lens group, aberration correction plate and plano-convex lens to constitute.The triangular prism group is glued on first plane of plano-convex lens of disappearing image difference refracting set 2, and for two triangular prisms, each triangular prism respectively accounts for half of the first plane bore, is used for making image to separate, structure as shown in Figure 1, O represents object plane among the figure, I represents the face of resembling.The visual field of this partition method utilizes situation as shown in Figure 2, though the utilization ratio of visual field of this system made moderate progress than in the past, as can be seen from Figure 2, also has quite a few working field of view not to be utilized.
2. inventor Zhang Yudong " research of broadband excimer laser projection lithography " (the Shanghai ray machine institute PhD dissertation) shown.Narrated a kind of system in the paper chapter 3, this system is by a semi-transparent semi-reflecting Amici prism 4, and disappearing image difference refracting set 2 and principal reflection mirror 3 constitute.Semi-transparent semi-reflecting Amici prism 4 is glued at first plane of the plano-convex lens of disappearing image difference refracting set 2, and it is unified to account for first plane, is used for making image to separate.Working field of view can be fully used like this, visual field operating position such as Fig. 4.System diagram as shown in Figure 3, O represents object plane among the figure, I represents the face of resembling.There is following shortcoming in this system: parasitic light is serious, reflecting surface a, and b, c residual reflection meeting produces the serious veiling glare that returns, and arrives the face of elephant by prism 4, makes that to resemble the face parasitic light serious, and contrast is not fallen, thereby makes the reduction of imaging resolution, makes this system impracticable.
Purpose of the present invention:
In order to overcome the deficiency of said system, the invention provides a kind of new optical system, as the image discrete device, make this system both have big utilized visual field with the polarizing prism group, parasitic light is little again, improves its image planes contrast.
Optical system of the present invention contains the image discrete device 1 that is made of polarizing prism group 5, examines disappearing image difference refracting set 2, λ/4 wave plate films 6 and the principal reflection mirror 3 that positive plate and plano-convex lens constitute by meniscus lens group, aberration.Said polarizing prism group 5 is to form a cube with two 45 ° right-angle prism A, B with the inclined-plane gummed of two right angle trigonometry prisms, be equipped with deielectric-coating on the cemented surface on its inclined-plane as the polarizer 7, right-angle prism B is over against the right angle of the face of resembling and B ' is equipped with the analyzer 8 that becomes vertical direction with above-mentioned polarizer polarization direction.This polarizing prism group 5 is glued in the disappearing image difference refracting set 2 on plano-convex lens first plane with right-angle plane D, and occupies first unified, and in order to separate image, the working field of view of this system can be fully used, and the visual field utilizes situation with as Fig. 4.λ/4 wave plate films 6 are plated on the reflecting surface of principal reflection mirror 3, and the optical axis of λ/4 wave plate films is arranged to and polarizer optical axis angle at 45.All optical systems as shown in Figure 5, O still represents object plane among the figure, I still represents the face of resembling.After thing light is by polarizing prism group 5, rise and be biased into linear polarization light,, also just passed through λ/4 wave plate films 5 again through principal reflection mirror 3 reflex times.Since in this optical system in disappearing image difference refracting set 2 optical element the correction plate be the same center of curvature, and object plane O is arranged at this center of curvature place, so imaging light equates at the incident angle and the reflection angle of primary mirror reflects face, both made depart from a little also very little, belong to the normal incidence situation, so after light passes through λ/4 wave plate films twice, change of polarized direction 90 °, when light by polarizing prism group 5 reflex times, the polarization direction of imaging light is consistent with the polarization direction of analyzer 8, resembles the face imaging so could arrive.Because after the light that object plane O takes place rises partially, except that the folded light beam that arrives the primary mirror reflects face is used for the imaging, also has the sub-fraction light beam by e, f, the reflection of h face, and the formation veiling glare, but,, can not arrive and resemble face I so these polarisation of light directions are vertical with the polarization direction of analyzer 8 because these veiling glares do not pass through λ/4 wave plate films 6, thereby reach the elimination veiling glare, improve the requirement of the contrast that resembles face I.
Advantage of the present invention:
Compare with prior art 1, under the identical situation of same spline structure, size, when satisfying same resolution delineation and requiring, the visual field utilizes 6 times of enlarged areas.Compare with prior art 2, the present invention adopts the structure of λ/4 wave plate films and polarizer analyzer, and optical system has been eliminated the influence of veiling glare, has improved the contrast of the face that resembles.
Description of drawings:
Fig. 1 is 1: 1 refractive and reflective optical system synoptic diagram that aberration correction is arranged;
Fig. 2 has the visual field of 1: 1 refractive and reflective optical system of aberration correction to utilize the situation synoptic diagram, the whole visual field of expression in the circle among the figure, and dash area is represented the visual field that is utilized;
Fig. 3 is 1: 1 refractive and reflective optical system synoptic diagram with prismatic decomposition;
Fig. 4 utilizes the situation synoptic diagram for optical system of the present invention with the working field of view of 1: 1 refractive and reflective optical system of prismatic decomposition, and circle represents that whole visual field, dash area represent the visual field that is utilized inner the branch among the figure;
Fig. 5 is an optical system synoptic diagram of the present invention.
Embodiment:
According to aberration theory, utilize the area of computer aided optical design procedure to calculate, change the radius and the spacing of part optical element, provide following three embodiment.
Embodiment 1:
Sequence number radius spacing material
1 object plane, 2.00 air
2 planes, 44.00 CaF
2
3 planes, 21.00 CaF
2
4-55.00 10.00 fused quartzs
5-161.33 2.00 air
6-140.00 98.50 fused quartzs
7-165.00 546.70 air
8-730.00-546.70 air
9-165.00-98.50 fused quartzs
10-140.00-2.00 air
11-161.33-10.00 fused quartzs
12 -55.00 -21.00 CaF
2
13 planes-44.00 CaF
2
14 planes-1.98 air
15 resemble face
This embodiment operation wavelength is 308nm, and numerical aperture is 0.4, is used for litho machine, and line width is 0.8 μ m, and the working field of view of utilization is 60 * 60mm
2Sequence number is pressed the order of light by system and is decided in the table.
Embodiment 2:
Sequence number radius spacing material
1 object plane, 2.00 air
2 planes, 44.00 CaF
2
3 planes, 21.00 CaF
2
4-54.00 10.00 fused quartzs
5-161.33 1.80 air
6-140.20 98.50 fused quartzs
7-165.00 539.70 air
8-690.00-539.70 air
9-165.00-98.50 fused quartzs
10-140.20-1.80 air
11-161.33-10.00 fused quartzs
12 -54.00 -21.00 CaF
2
13 planes-44.00 CaF
2
14 planes-2.04 air
15 resemble face
This embodiment operation wavelength is 248nm, and numerical aperture is 0.4, is used for litho machine, and line width is 0.8 μ m, and the working field of view of utilization is 65 * 65mm
2Sequence number is pressed the order of light by system and is decided in the table.
Embodiment 3:
Sequence number radius spacing material
1 object plane, 2.00 air
2 planes, 44.00 CaF
2
3 planes, 21.00 CaF
2
4-55.00 10.00 fused quartzs
5-162.00 2.20 air
6-140.00 98.50 fused quartzs
7-165.00 547.80 air
8-728.00-547.80 air
9-165.00-98.50 fused quartzs
10-140.00-2.20 air
11-162.00-10.00 fused quartzs
12 -55.00 -21.00 CaF
2
13 planes-44.00 CaF
2
14 planes-2.10 air
15 resemble face
This embodiment operation wavelength is 308nm, and numerical aperture is 0.4, is used for litho machine, and line width is 0.8 μ m, and the working field of view of utilization is 60 * 60mm
2Sequence number in wherein showing is pressed light and is decided by the order of system.
Claims (4)
1,1: 1 refractive and reflective optical system of a kind of polarized light imaging, contain image discrete device 1, by the meniscus lens group, disappearing image difference refracting set 2 and principal reflection mirror 3 that aberration correction plate and plano-convex lens constitute, it is characterized in that image discrete device 1 is a polarizing prism group 5, it is by two 45 ° right-angle prism A, B forms a cube with the inclined-plane gummed of two right angle trigonometry prisms, the polarizer 7 is arranged on the cemented surface on its inclined-plane, one right-angle prism B is equipped with the analyzer 8 that becomes vertical direction with the above-mentioned polarizer 7 directions on the right angle face B ' of the face of resembling, λ/4 wave film are arranged on the reflecting surface of principal reflection mirror 3.
2,1: 1 refractive and reflective optical system of a kind of polarized light imaging according to claim 1 is characterized in that polarizing prism group 5 is glued on first plane of plano-convex lens in the disappearing image difference refracting set 2 with a right-angle plane D, and occupies first unified.
3,1: 1 refractive and reflective optical system of a kind of polarized light imaging according to claim 1 is characterized in that the polarizer 7 and analyzer 8 constitute by deielectric-coating in the polarizing prism group 5.
4,1: 1 refractive and reflective optical system of a kind of polarized light imaging according to claim 1 is characterized in that placing the optical axis angle at 45 of the optical axis and the polarizer 7 of the λ/4 wave plate films on principal reflection mirror 3 reflectings surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92108564 CN1029533C (en) | 1992-09-23 | 1992-09-23 | Refracting reflecting optical system with polarized light imaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92108564 CN1029533C (en) | 1992-09-23 | 1992-09-23 | Refracting reflecting optical system with polarized light imaging |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1084648A true CN1084648A (en) | 1994-03-30 |
| CN1029533C CN1029533C (en) | 1995-08-16 |
Family
ID=4943659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92108564 Expired - Fee Related CN1029533C (en) | 1992-09-23 | 1992-09-23 | Refracting reflecting optical system with polarized light imaging |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1029533C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161688A (en) * | 2018-02-12 | 2019-08-23 | 杭州太若科技有限公司 | Correction of refractive errors AR display device and wearable AR equipment |
| US11798313B2 (en) | 2019-09-20 | 2023-10-24 | Vivo Mobile Communication Co., Ltd | Fingerprint identification module and electronic device |
| CN117666094A (en) * | 2024-01-30 | 2024-03-08 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber large-view-field telescope optical structure |
-
1992
- 1992-09-23 CN CN 92108564 patent/CN1029533C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161688A (en) * | 2018-02-12 | 2019-08-23 | 杭州太若科技有限公司 | Correction of refractive errors AR display device and wearable AR equipment |
| US11798313B2 (en) | 2019-09-20 | 2023-10-24 | Vivo Mobile Communication Co., Ltd | Fingerprint identification module and electronic device |
| CN117666094A (en) * | 2024-01-30 | 2024-03-08 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber large-view-field telescope optical structure |
| CN117666094B (en) * | 2024-01-30 | 2024-04-16 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber large-view-field telescope optical structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1029533C (en) | 1995-08-16 |
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