CN108436683A - 片状晶圆加工用的载具 - Google Patents
片状晶圆加工用的载具 Download PDFInfo
- Publication number
- CN108436683A CN108436683A CN201810298297.2A CN201810298297A CN108436683A CN 108436683 A CN108436683 A CN 108436683A CN 201810298297 A CN201810298297 A CN 201810298297A CN 108436683 A CN108436683 A CN 108436683A
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- Prior art keywords
- shell
- product
- carrier
- wafer processing
- magnetorheological fluid
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- 238000012545 processing Methods 0.000 title claims abstract description 27
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- 239000007788 liquid Substances 0.000 claims abstract description 18
- 230000005284 excitation Effects 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 10
- 238000001802 infusion Methods 0.000 claims description 9
- 239000000654 additive Substances 0.000 claims description 7
- 230000000996 additive effect Effects 0.000 claims description 7
- 238000004804 winding Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 15
- 239000000969 carrier Substances 0.000 abstract description 2
- 239000012634 fragment Substances 0.000 abstract description 2
- 238000012797 qualification Methods 0.000 abstract description 2
- 239000000047 product Substances 0.000 description 47
- 239000012535 impurity Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920006351 engineering plastic Polymers 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 239000003292 glue Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
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- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000565 sealant Substances 0.000 description 3
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- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
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- 238000010924 continuous production Methods 0.000 description 1
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- 239000012780 transparent material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810298297.2A CN108436683B (zh) | 2018-04-03 | 2018-04-03 | 片状晶圆加工用的载具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810298297.2A CN108436683B (zh) | 2018-04-03 | 2018-04-03 | 片状晶圆加工用的载具 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108436683A true CN108436683A (zh) | 2018-08-24 |
CN108436683B CN108436683B (zh) | 2019-12-06 |
Family
ID=63199396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810298297.2A Active CN108436683B (zh) | 2018-04-03 | 2018-04-03 | 片状晶圆加工用的载具 |
Country Status (1)
Country | Link |
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CN (1) | CN108436683B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110202707A (zh) * | 2019-06-19 | 2019-09-06 | 广东先导先进材料股份有限公司 | 一种多线切割装置及其切削液供液组件 |
CN112404735A (zh) * | 2020-11-09 | 2021-02-26 | 松山湖材料实验室 | 晶锭剥离方法及晶锭剥离装置 |
CN112405324A (zh) * | 2020-10-15 | 2021-02-26 | 东莞市新美洋技术有限公司 | 片状产品用研磨夹具 |
CN112828633A (zh) * | 2020-12-31 | 2021-05-25 | 上海理工大学 | 一种任意外形薄壁件的磁流变柔性夹具 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1799784A (zh) * | 2004-12-31 | 2006-07-12 | 中国科学技术大学 | 具有可变刚度的柔性表面的夹持装置 |
JP2013169620A (ja) * | 2012-02-21 | 2013-09-02 | Tok Engineering Kk | マグネットストレーナ及びそれを用いた研磨装置 |
CN106514369A (zh) * | 2016-10-31 | 2017-03-22 | 山东大学 | 一种用于复杂曲面类薄壁件铣削的柔性夹具 |
CN106783683A (zh) * | 2016-12-19 | 2017-05-31 | 安徽天裕汽车零部件制造有限公司 | 一种晶圆扫描清洗摆臂装置 |
CN106881609A (zh) * | 2017-03-01 | 2017-06-23 | 大连理工大学 | 一种薄壁平板磁流变液柔性支撑方法 |
CN106960807A (zh) * | 2016-01-12 | 2017-07-18 | 东京毅力科创株式会社 | 基板处理装置和基板处理装置的清洗方法 |
-
2018
- 2018-04-03 CN CN201810298297.2A patent/CN108436683B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1799784A (zh) * | 2004-12-31 | 2006-07-12 | 中国科学技术大学 | 具有可变刚度的柔性表面的夹持装置 |
JP2013169620A (ja) * | 2012-02-21 | 2013-09-02 | Tok Engineering Kk | マグネットストレーナ及びそれを用いた研磨装置 |
CN106960807A (zh) * | 2016-01-12 | 2017-07-18 | 东京毅力科创株式会社 | 基板处理装置和基板处理装置的清洗方法 |
CN106514369A (zh) * | 2016-10-31 | 2017-03-22 | 山东大学 | 一种用于复杂曲面类薄壁件铣削的柔性夹具 |
CN106783683A (zh) * | 2016-12-19 | 2017-05-31 | 安徽天裕汽车零部件制造有限公司 | 一种晶圆扫描清洗摆臂装置 |
CN106881609A (zh) * | 2017-03-01 | 2017-06-23 | 大连理工大学 | 一种薄壁平板磁流变液柔性支撑方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110202707A (zh) * | 2019-06-19 | 2019-09-06 | 广东先导先进材料股份有限公司 | 一种多线切割装置及其切削液供液组件 |
CN110202707B (zh) * | 2019-06-19 | 2021-04-20 | 广东先导先进材料股份有限公司 | 一种多线切割装置及其切削液供液组件 |
CN112405324A (zh) * | 2020-10-15 | 2021-02-26 | 东莞市新美洋技术有限公司 | 片状产品用研磨夹具 |
CN112404735A (zh) * | 2020-11-09 | 2021-02-26 | 松山湖材料实验室 | 晶锭剥离方法及晶锭剥离装置 |
CN112404735B (zh) * | 2020-11-09 | 2022-03-04 | 松山湖材料实验室 | 晶锭剥离方法及晶锭剥离装置 |
CN112828633A (zh) * | 2020-12-31 | 2021-05-25 | 上海理工大学 | 一种任意外形薄壁件的磁流变柔性夹具 |
Also Published As
Publication number | Publication date |
---|---|
CN108436683B (zh) | 2019-12-06 |
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Effective date of registration: 20191016 Address after: 230000 18 Floor, Block C, J2 District, Phase II Innovation Industrial Park, Hefei High-tech Zone, Anhui Province Applicant after: HEFEI LONGTUTEM INFORMATION TECHNOLOGY Co.,Ltd. Address before: 315700 36 households in lower salt Village, Shi Pu town, Xiangshan County, Ningbo, Zhejiang, 36 Applicant before: Han Sai |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20191115 Address after: 344000 Dongshan Industrial Park, economic development zone, Dongxiang District, Fuzhou City, Jiangxi Province Applicant after: Fuzhou Dongxiang Donghong Optical Technology Co.,Ltd. Address before: 230000 18 Floor, Block C, J2 District, Phase II Innovation Industrial Park, Hefei High-tech Zone, Anhui Province Applicant before: HEFEI LONGTUTEM INFORMATION TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20240314 Address after: 331800 Incubation Park B3, Dongxiang Economic Development Zone, Fuzhou City, Jiangxi Province Patentee after: Jiangxi Dongchao Optical Technology Co.,Ltd. Country or region after: China Address before: 344000 Dongshan Industrial Park, Dongxiang Economic Development Zone, Fuzhou City, Jiangxi Province Patentee before: Fuzhou Dongxiang Donghong Optical Technology Co.,Ltd. Country or region before: China |