CN108364894A - A kind of wafer cassette convenient for wafer cassette closing lid stores transport device - Google Patents
A kind of wafer cassette convenient for wafer cassette closing lid stores transport device Download PDFInfo
- Publication number
- CN108364894A CN108364894A CN201810127858.2A CN201810127858A CN108364894A CN 108364894 A CN108364894 A CN 108364894A CN 201810127858 A CN201810127858 A CN 201810127858A CN 108364894 A CN108364894 A CN 108364894A
- Authority
- CN
- China
- Prior art keywords
- wafer cassette
- wafer
- horizontal plane
- convenient
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of wafer cassettes convenient for wafer cassette closing lid to store transport device, and device is plate-like, and bottom surface steel plate is with horizontal plane at an inclination angle；Wafer cassette is placed on device, wafer cassette and internal wafer can tilt in one direction, wafer cassette is withstood by backboard, the side plate of the right and left can guarantee that wafer cassette will not slide out device, there are 4 an equal amount of fixed cylinders at the bottom surface steel plate back side, it is inserted into the cylinder hole of 4 column positions of correspondence on levels operation platform, you can fixed entire pallet apparatus.This pallet apparatus ensure that on the interior wafer box cover disposable cover for having fixing groove, and all facilitate people's operation regardless of the wafer cassette of size, and ensure the safety of fixed storage.This pallet apparatus is safety when ensure that shipping wafers box, and can be as the operating position of convenient cap wafer cassette lid.
Description
Technical field
The present invention relates to a kind of shop equipment, more particularly to a kind of wafer cassette storage transport dress convenient for wafer cassette closing lid
It sets.
Background technology
Wafer：Silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle.Wafer cassette：For putting
The box of wafer is set, 25 wafers can be at most placed.
Integrated circuit is in wafer state, in addition to during test, wafer is all placed in wafer cassette.Each wafer cassette has
One lid, have in lid with fixed wafer elastic rubber slot, be used for a piece of wafer that fixed the inside fills, having in wafer cassette
Slot segmentation is separately stored convenient for wafer by slot, and the gap between slot segmentation is much larger than the thickness of wafer, so not using
When wafer box cover is fixed, although wafer is placed in slot segmentation, but can shake, cause wafer discharge not advised
Then, but when needing to cover wafer lid, the interval between wafer must be fixed, and otherwise can not will be stuck in wafer lid per wafer
On slot position in, wafer lid can not be covered by eventually leading to, by force cover if may cause damage wafer.
When being put in the horizontal plane due to wafer cassette, the gap of slot segmentation can allow wafer to be possible to tilt towards different directions, lead
The gap between wafer is caused to differ, so the way in production is by being artificially tilted a certain angle wafer cassette, making crystalline substance now
Circle is unified to be tilted in one direction, could cover wafer box cover, and wafer size has reached 12 cun now, a people behaviour
Make to get up very inconvenient, there are risks.
Operating personnel can at will look for the place of a relative level, generally can be on the ground, to support on the ground, lift on one side on one side
It rises, then wafer box cover in operation lid, it is more that People are hurrying to and fro in workshop, and putting ground, there are certain security risks, especially to big
The wafer cassette of size, it is quite inconvenient to be operated for operative employee, and operating correctness and operating time cannot ensure.
Invention content
It is inconvenient the present invention be directed to produce lid wafer cassette lid, and there are problems that certain security risk in operating,
A kind of wafer cassette storage transport device convenient for wafer cassette closing lid is proposed, so that wafer cassette is placed on this device, as device inclines
Oblique inertia makes every wafer tilt in one direction, arranges a piece of wafer naturally, facilitates wafer cassette lid on disposable cover.
The technical scheme is that：A kind of wafer cassette convenient for wafer cassette closing lid stores transport device, and device is rectangular
Shape pallet, pallet have a upward vertical tray bottom surface flange in three sides, and two flange of left and right symmetrically constitute both side plate, among both side plate to
Upper vertical flange constitutes backboard, and tray bottom surface flange, this flange constitute foreboard, device are placed on water downward vertically on pallet the 4th side
In plane, preceding edges of boards are placed on horizontal plane so that entire tray bottom surface steel plate is with horizontal plane at an inclination angle；In tray bottom surface steel plate
There are 4 an equal amount of fixed cylinders at the back side, is inserted into the cylinder hole of 4 column positions of correspondence on levels operation platform, you can
Fixed entire pallet apparatus.
Entire pallet apparatus fixed placement in the horizontal plane, 10 ° is tilted with horizontal plane.
The beneficial effects of the present invention are：A kind of wafer cassette convenient for wafer cassette closing lid of the present invention stores transport device, this
Pallet apparatus ensure that on the interior wafer box cover disposable cover for having fixing groove, and all facilitate one regardless of the wafer cassette of size
Individual's operation, and ensure the safety of fixed storage.This pallet apparatus is safety when ensure that shipping wafers box, and can be made
For convenience of the operating position of lid wafer cassette lid.
Description of the drawings
Fig. 1 is that the present invention stores transport device structural schematic diagram convenient for the wafer cassette of wafer cassette closing lid；
Fig. 2 is that the present invention stores transport device fixation schematic diagram in the horizontal plane convenient for the wafer cassette of wafer cassette closing lid；
Fig. 3 is that the present invention puts the schematic diagram after wafer cassette convenient for the wafer cassette storage transport device of wafer cassette closing lid.
Specific implementation mode
Transport device structural schematic diagram is stored convenient for the wafer cassette of wafer cassette closing lid as shown in Fig. 1, device is rectangle support
Disk, pallet have the upward vertical tray bottom surface flange in three sides, and two flange of left and right symmetrically constitute both side plate, such as Fig. 1 latus inframediums 1 and side plate
2, the upward vertical flange among both side plate constitutes backboard, and tray bottom surface flange, this flange are constituted downward vertically on pallet the 4th side
Foreboard is put device in the horizontal plane, and preceding edges of boards are placed on horizontal plane so that entire tray bottom surface steel plate inclines with horizontal plane at one
Angle；If Fig. 2 fixes schematic diagram in the horizontal plane for ease of the wafer cassette storage transport device of wafer cassette closing lid, in tray bottom surface steel
Back has 4 an equal amount of fixed cylinders, and the circle of 4 correspondences, 4 column positions is bored on any one levels operation platform
Fixed cylinder is inserted into the cylinder hole on levels operation platform by column hole, you can fixed entire pallet apparatus.
As shown in Figure 3 the schematic diagram after wafer cassette, wafer are put convenient for the wafer cassette of wafer cassette closing lid storage transport device
Box is put into device, because device is inclined, preceding edges of boards are high, and backboard side is low, so wafer cassette is put, will slide to the back of the body naturally
Plate, but can be withstood by backboard, the side plate of the right and left also can guarantee wafer cassette will not slide out device, the wafer in wafer cassette can
It is enough to be tilted towards a backboard direction, but because having slot segmentation in wafer cassette, the inside wafer tilt direction is consistent, and wafer
Between compartment be also fixed, it is ensured that inside have on the wafer box cover disposable cover of fixing groove, and facilitate people operation.
The size of wafer cassette is fixed, the pallet that a bottom surface steel plate is about 37cm, width about 30cm is made, by itself and level
Face tilts about 10 °, the high about 9cm of foreboard, installs 4 raised cylinders additional below inclined steel plate, is needing fixing device for installing
4 an equal amount of holes are made a call in place, and fixing device is fixed on above levels operation platform, can be withdrawn at any time when not needing, water
Flat operation console can be the implementation trolley that shelf, desk or general test workshop can all use, that is, ensure that shipping wafers box
When safety, and can be as the operating position of convenient cap wafer cassette lid.
Claims (2)
1. a kind of wafer cassette convenient for wafer cassette closing lid stores transport device, which is characterized in that device is rectangle pallet, pallet
There are the upward vertical tray bottom surface flange in three sides, two flange of left and right symmetrically to constitute both side plate, the upward vertical flange among both side plate
Backboard is constituted, tray bottom surface flange, this flange composition foreboard are put device in the horizontal plane downward vertically on pallet the 4th side, preceding
Edges of boards are placed on horizontal plane so that entire tray bottom surface steel plate is with horizontal plane at an inclination angle；There are 4 at the tray bottom surface steel plate back side
An equal amount of fixed cylinder is inserted into the cylinder hole of 4 column positions of correspondence on levels operation platform, you can fixed entire support
Disk device.
2. the wafer cassette of wafer cassette closing lid is convenient for store transport device according to claim 1, which is characterized in that whole device
Fixed placement tilts 10 ° in the horizontal plane, with horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810127858.2A CN108364894A (en) | 2018-02-08 | 2018-02-08 | A kind of wafer cassette convenient for wafer cassette closing lid stores transport device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810127858.2A CN108364894A (en) | 2018-02-08 | 2018-02-08 | A kind of wafer cassette convenient for wafer cassette closing lid stores transport device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108364894A true CN108364894A (en) | 2018-08-03 |
Family
ID=63004774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810127858.2A Pending CN108364894A (en) | 2018-02-08 | 2018-02-08 | A kind of wafer cassette convenient for wafer cassette closing lid stores transport device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108364894A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111370359A (en) * | 2020-03-04 | 2020-07-03 | 杭州中为光电技术有限公司 | Jig for open wafer box |
| CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
| CN112820663A (en) * | 2019-11-15 | 2021-05-18 | 上海至纯洁净***科技股份有限公司 | Automatic reset split wafer box bracket |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5887721A (en) * | 1997-05-07 | 1999-03-30 | Shin-Etsu Polymer Co., Ltd. | Wafer carrier box |
| CN202217698U (en) * | 2011-09-13 | 2012-05-09 | 宁波尤利卡太阳能科技发展有限公司 | Bearing box for unloading plasma enhanced chemical vapor deposition (PECVD) wafer |
| CN103069558A (en) * | 2010-09-17 | 2013-04-24 | 富士电机株式会社 | Wafer storing device, and wafer cassette storage case |
| CN206116363U (en) * | 2016-11-03 | 2017-04-19 | 中芯国际集成电路制造（天津）有限公司 | Wafer boat |
| CN206532762U (en) * | 2017-03-27 | 2017-09-29 | 徐州中辉光伏科技有限公司 | Solar battery sheet magazine and sintering furnace blanking device |
-
2018
- 2018-02-08 CN CN201810127858.2A patent/CN108364894A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5887721A (en) * | 1997-05-07 | 1999-03-30 | Shin-Etsu Polymer Co., Ltd. | Wafer carrier box |
| CN103069558A (en) * | 2010-09-17 | 2013-04-24 | 富士电机株式会社 | Wafer storing device, and wafer cassette storage case |
| CN202217698U (en) * | 2011-09-13 | 2012-05-09 | 宁波尤利卡太阳能科技发展有限公司 | Bearing box for unloading plasma enhanced chemical vapor deposition (PECVD) wafer |
| CN206116363U (en) * | 2016-11-03 | 2017-04-19 | 中芯国际集成电路制造（天津）有限公司 | Wafer boat |
| CN206532762U (en) * | 2017-03-27 | 2017-09-29 | 徐州中辉光伏科技有限公司 | Solar battery sheet magazine and sintering furnace blanking device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820663A (en) * | 2019-11-15 | 2021-05-18 | 上海至纯洁净***科技股份有限公司 | Automatic reset split wafer box bracket |
| CN112820663B (en) * | 2019-11-15 | 2022-11-04 | 上海至纯洁净***科技股份有限公司 | Automatic reset split wafer box bracket |
| CN111370359A (en) * | 2020-03-04 | 2020-07-03 | 杭州中为光电技术有限公司 | Jig for open wafer box |
| CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
| CN111554599B (en) * | 2020-04-27 | 2022-07-26 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180803 |
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| WD01 | Invention patent application deemed withdrawn after publication |