CN108363233A - Colored filter substrate and preparation method thereof - Google Patents
Colored filter substrate and preparation method thereof Download PDFInfo
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- CN108363233A CN108363233A CN201810118130.3A CN201810118130A CN108363233A CN 108363233 A CN108363233 A CN 108363233A CN 201810118130 A CN201810118130 A CN 201810118130A CN 108363233 A CN108363233 A CN 108363233A
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- color blocking
- black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- Optical Filters (AREA)
Abstract
A kind of colored filter substrate of present invention offer and preparation method thereof.The production method of the colored filter substrate of the present invention is exposed by using the first color blocking layer of halftone mask pair,Development,The first color blocking unit in color light resistance layer and the first shading color blocking layer in shading color blocking lamination are made simultaneously,And the thickness of the first shading color blocking layer is made to be less than the thickness of the first color blocking unit,Protruded from the first shading color blocking layer the part of first black matrix" and the second black matrix" upper surface thickness it is smaller in the case of,The photoresist for being coated on the first shading color blocking layer upper surface is not easy to flow to other regions,It is lifted at the thickness of the second shading color blocking layer formed in the first shading color blocking layer,To promote the shaded effect of the shading color blocking lamination,The interval region of first black matrix" and the second black matrix" is effectively avoided to generate light leakage,Promote display effect and the taste of liquid crystal display panel.
Description
Technical field
The present invention relates to display technology fields more particularly to a kind of colored filter substrate and preparation method thereof.
Background technology
With the development of display technology, the planes such as liquid crystal display (Liquid Crystal Display, LCD) display dress
It sets because having many advantages, such as that high image quality, power saving, fuselage are thin, radiationless, and is widely used in mobile phone, TV, individual digital and helps
The various consumer electrical products such as reason, digital camera, laptop, desktop computer, become the mainstream in display device.
Liquid crystal display on existing market is largely backlight liquid crystal display comprising shell is set in shell
Liquid crystal display panel and the backlight module (Backlight module) in shell.
Traditional liquid crystal display panel is by one sheet of film transistor (TFT) array substrate (Thin Film Transistor
Array Substrate, TFT Array Substrate) and a piece of colored filter substrate (Color Filter
Substrate, CF Substrate) it is bonded, and liquid crystal is poured between TFT substrate and CF substrates, operation principle is
By applying driving voltage between pixel electrode and public electrode, the electric field formed between pixel electrode and public electrode is utilized
The rotation of the liquid crystal molecule in liquid crystal layer is controlled, the light refraction of backlight module is out generated into picture.
As shown in Figure 1, being typically provided with the first black matrix" 210 in existing colored filter substrate and around described the
The periphery of one black matrix" 210 and with first black matrix", 210 spaced second black matrix" 220, described first
Black matrix" 210 and the second black matrix" 220 in the viewing area of panel for crossing multiple sub-pixel areas and to multiple sub- pictures
The periphery in plain area carries out shading, and the non-display area for panel carries out shading, by by first black matrix" 210
It is spaced and is arranged with the second black matrix" 220, can effectively avoid extraneous static from importeding into influence panel in the viewing area of panel aobvious
Show.
As shown in Fig. 2, to avoid first black matrix" 210 and the interval region of the second black matrix" 220 from leaking
Light is to influence Display panel and taste, usually in interval region setting shading color blocking lamination 240, the shading color blocking lamination
240 include the red photoresist layer 2410 being stacked and blue light resistance layer 2420.However, when making shading color blocking lamination 240,
Due to protruding from the portion of 210 and second black matrix" of the first black matrix", 220 upper surface in the red photoresist layer 2410
The thickness divided is larger, therefore when the coating of 2410 upper surface of the red photoresist layer has the blue light resistance material of mobility, institute
Blue light resistance material is stated to be easy to flow to the first black matrix" 210 and the second black matrix" along the side of red photoresist layer 2410
On 220, cause the thickness of the blue light resistance layer 2420 formed above red photoresist layer 2410 smaller, and then lead to shading color blocking
The shading performance of lamination 240 declines.Since first black matrix" 210 and the interval region of the second black matrix" 220 are usual
It is arranged corresponding to GOA circuits, therefore the electric field between GOA circuits can cause the liquid crystal molecule of the interval region to rotate, Jin Erzao
Feux rouges is leaked at the interval region of first black matrix", 210 and second black matrix" 220, influences Display panel and taste.
Invention content
The purpose of the present invention is to provide a kind of production methods of colored filter substrate, can promote shading color blocking lamination
Shaded effect, effectively avoid the interval region of first black matrix" and the second black matrix" generate light leakage, promoted liquid crystal
The display effect of display panel and taste.
The present invention also aims to provide a kind of colored filter substrate, the shaded effect of shading color blocking lamination compared with
It is good, it can effectively avoid the interval region of first black matrix" and the second black matrix" from generating light leakage, promote liquid crystal display
The display effect of panel and taste.
To achieve the above object, the present invention provides a kind of production method of colored filter substrate, includes the following steps：
Step 1 provides underlay substrate, the first black matrix" is formed on the underlay substrate and around described first black
The periphery of colour moment battle array and with spaced second black matrix" of first black matrix", first black matrix" includes frame
Shape light shield layer, the region that the frame shape light shield layer crosses on the underlay substrate are viewing area, and the underlay substrate is located at institute
The region for stating non-display area is non-display area；
Step 2 forms color light resistance layer on the underlay substrate, is formed simultaneously in the processing procedure of the color light resistance layer
Shading color blocking lamination, the shading color blocking lamination be located on first black matrix", the second black matrix" and underlay substrate and
Cover the interval region of first black matrix" and the second black matrix"；
The shading color blocking lamination includes the be located on first black matrix", the second black matrix" and underlay substrate
One shading color blocking layer and the second shading color blocking layer in the first shading color blocking layer, the first shading color blocking layer with
The color of second shading color blocking layer is different；The color light resistance layer includes identical with the color of the first shading color blocking layer
One color blocking unit；The thickness of the first shading color blocking layer is less than the thickness of the first color blocking unit.
First black matrix" further include be located in the region that crosses of frame shape light shield layer and with the frame shape light shield layer
The connected latticed light shield layer in inside；The frame shape light shield layer crosses multiple sub-pixels with latticed light shield layer in viewing area
Area, the multiple sub-pixel area include the first sub-pixel area with different colours, the second sub-pixel area, third sub-pixel area；
The color light resistance layer includes the first color blocking unit positioned at the first sub-pixel area, the positioned at the second sub-pixel area
Two color blocking units, the third color blocking unit positioned at third sub-pixel area；
The first shading color blocking layer is made with the first color blocking unit by carrying out lithographic process to same color blocking layer；
The second shading color blocking layer is with the second color blocking unit or third color blocking unit by carrying out optical graving to same color blocking layer
Journey is made.
The first shading color blocking layer protrudes from the part of first black matrix" and the second black matrix" upper surface
Thickness is less than 2 μm；Alternatively, the upper surface of the first shading color blocking layer and first black matrix" and the second black matrix"
Upper surface flush.
The step 2 includes：
Step 21 is coated with the first color blocking material, shape on the underlay substrate, the first black matrix", the second black matrix"
At the first color blocking layer, after being exposed first color blocking layer using halftone mask, developing, obtain being located at the first sub-pixel
The first color blocking unit in area is located on first black matrix", the second black matrix" and underlay substrate and covering described the
First shading color blocking layer of the interval region of one black matrix" and the second black matrix"；
Step 22 is respectively formed the second color blocking unit and third color in second sub-pixel area and third sub-pixel area
Unit is hindered, the second shading color blocking layer is formed simultaneously in the processing procedure of the second color blocking unit or third color blocking unit.
The halftone mask is equipped with the first area corresponding to the first sub-pixel area, corresponds to the first black square
Second area of the battle array with the interval region of the second black matrix", the third region in addition to the first area and second area,
Wherein, the width of the second area is more than the width of the interval region of first black matrix" and the second black matrix"；
When the first color blocking material be positivity photoresist when, the first area, second area, third region light transmittance
It is sequentially increased；When the first color blocking material is negativity photoresist, the light transmission of the first area, second area, third region
Rate is sequentially reduced.
The material of first black matrix" and the second black matrix" is black resin or ferrous material；Described
The color of one shading color blocking layer and a color blocking layer in the second shading color blocking layer is red, and the color of another color blocking layer is indigo plant
Color or green.
The present invention also provides a kind of colored filter substrates, including：Underlay substrate, first on the underlay substrate
Black matrix" and around first black matrix" periphery and with spaced second black of first black matrix"
Matrix, is set to first black matrix", the second black matrix" and substrate base at the color light resistance layer on the underlay substrate
On plate and the shading color blocking lamination of the interval region of covering first black matrix" and the second black matrix"；
First black matrix" includes frame shape light shield layer, the area that the frame shape light shield layer crosses on the underlay substrate
Domain is viewing area, and the region that the underlay substrate is located at the non-display area is non-display area；
The shading color blocking lamination includes the be located on first black matrix", the second black matrix" and underlay substrate
One shading color blocking layer and the second shading color blocking layer in the first shading color blocking layer, the first shading color blocking layer with
The color of second shading color blocking layer is different；The color light resistance layer includes identical with the color of the first shading color blocking layer
One color blocking unit；The thickness of the first shading color blocking layer is less than the thickness of the first color blocking unit.
First black matrix" further include be located in the region that crosses of frame shape light shield layer and with the frame shape light shield layer
The connected latticed light shield layer in inside；The frame shape light shield layer crosses multiple sub-pixels with latticed light shield layer in viewing area
Area, the multiple sub-pixel area include the first sub-pixel area with different colours, the second sub-pixel area, third sub-pixel area；
The color light resistance layer includes the first color blocking unit positioned at the first sub-pixel area, the positioned at the second sub-pixel area
Two color blocking units, the third color blocking unit positioned at third sub-pixel area, the first color blocking unit, the second color blocking unit, third
The color of color blocking unit is different；
The first shading color blocking layer is made with the first color blocking unit by carrying out lithographic process to same color blocking layer；
The second shading color blocking layer is with the second color blocking unit or third color blocking unit by carrying out optical graving to same color blocking layer
Journey is made.
The first shading color blocking layer protrudes from the part of first black matrix" and the second black matrix" upper surface
Thickness is less than 2 μm；Alternatively, the upper surface of the first shading color blocking layer and first black matrix" and the second black matrix"
Upper surface flush.
The material of first black matrix" and the second black matrix" is black resin or ferrous material；Described
The color of one shading color blocking layer and a color blocking layer in the second shading color blocking layer is red, and the color of another color blocking layer is indigo plant
Color or green.
Beneficial effects of the present invention：The production method of the colored filter substrate of the present invention is by using halftone mask pair
First color blocking layer is exposed, develops, while in the first color blocking unit and shading color blocking lamination being made in color light resistance layer
First shading color blocking layer, and the thickness of the first shading color blocking layer is made to be less than the thickness of the first color blocking unit, it is hidden described first
Protruded from photochromic resistance layer the part of first black matrix" and the second black matrix" upper surface thickness it is smaller in the case of,
The photoresist for being coated on the first shading color blocking layer upper surface is not easy to flow to other regions, is lifted in the first shading color blocking layer
The thickness of the second shading color blocking layer formed effectively avoids described the to promote the shaded effect of the shading color blocking lamination
The interval region of one black matrix" and the second black matrix" generates light leakage, promotes display effect and the taste of liquid crystal display panel.
The colored filter substrate of the present invention is folded less than shading color blocking by the thickness that the first color blocking unit in color light resistance layer is arranged
The thickness of the first shading color blocking layer in layer, can be lifted at the thickness of the second shading color blocking layer formed in the first shading color blocking layer
Degree, to promote the shaded effect of the shading color blocking lamination, effectively avoids first black matrix" and the second black matrix"
Interval region generate light leakage, promote display effect and the taste of liquid crystal display panel.
Description of the drawings
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with the detailed of the present invention
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is the schematic top plan view of the first black matrix" and the second black matrix" in existing colored filter substrate；
Fig. 2 is after shading color blocking lamination is arranged in the first black matrix" of Fig. 1 and the interval region of the second black matrix"
Schematic cross-sectional view；
Fig. 3 is the flow chart of the production method of the colored filter substrate of the present invention；
Fig. 4 is the schematic cross-sectional view of the step 1 of the production method of the colored filter substrate of the present invention；
Fig. 5 is the schematic top plan view of the step 1 of the production method of the colored filter substrate of the present invention；
Fig. 6 to Fig. 7 is the schematic cross-sectional view of the step 21 of the production method of the colored filter substrate of the present invention；
Fig. 8 is the schematic top plan view of the step 21 of the production method of the colored filter substrate of the present invention；
Fig. 9 is the schematic cross-sectional view of the step 22 of the production method of the colored filter substrate of the present invention；
Figure 10 is the schematic top plan view of the step 22 of the production method of the colored filter substrate of the present invention；
Figure 11 is the schematic cross-sectional view and the present invention of the step 3 of the production method of the colored filter substrate of the present invention
The schematic cross-sectional view of colored filter substrate；
Figure 12 is the schematic top plan view and the present invention of the step 3 of the production method of the colored filter substrate of the present invention
The schematic top plan view of colored filter substrate.
Specific implementation mode
Further to illustrate the technological means and its effect of the invention taken, below in conjunction with the preferred implementation of the present invention
Example and its attached drawing are described in detail.
Referring to Fig. 3, present invention firstly provides a kind of production method of colored filter substrate, include the following steps：
Step 1, as shown in figs. 4 and 5, provides underlay substrate 10, forms the first black square on the underlay substrate 10
Battle array 21 and around the periphery of first black matrix" 21 and with first black matrix", 21 spaced second black
Matrix 22, first black matrix" 21 include frame shape light shield layer 212 and in the region that frame shape light shield layer 212 crosses and
The latticed light shield layer 211 being connected with the inside of the frame shape light shield layer 212, the frame shape light shield layer 212 is in the substrate base
The region crossed on plate 10 is viewing area 101, and the region that the underlay substrate 10 is located at 101 periphery of the viewing area is non-display
Area 102, the frame shape light shield layer 212 crosses multiple sub-pixel areas 30 with latticed light shield layer 211 in viewing area 101, described
Multiple sub-pixel areas 30 include the first sub-pixel area 31 with different colours, the second sub-pixel area 32, third sub-pixel area 33.
Specifically, first black matrix" 21 and the second black matrix" 22 are act as：In the aobvious of liquid crystal display panel
Show the non-display area that multiple sub-pixel areas 30 and periphery and liquid crystal display panel to multiple sub-pixel areas 30 are crossed in area 101
102 carry out shading；It is arranged by the way that first black matrix", 21 and second black matrix" 22 to be spaced, can effectively avoids the external world
Electrostatic, which is imported into the viewing area 101 of liquid crystal display panel, influences Display panel；For first black matrix" 21 and second
The problem of interval region of black matrix" 22 by GOA circuit signals is influenced that liquid crystal rotation may be caused to lead to light leakage, the present invention
The interval region is covered to solve leakage problem using shading color blocking lamination 50.
Specifically, the material of first black matrix", 21 and second black matrix" 22 can be black resin or black
Metal material.First black matrix", 21 and second black matrix" 22 is made via lithographic process.
Step 2, as shown in Fig. 6 to Figure 10, on the underlay substrate 10 formed color light resistance layer 40, in the colourama
Shading color blocking lamination 50 is formed simultaneously in the processing procedure of resistance layer 40, the shading color blocking lamination 50 is located at first black matrix"
21, on the second black matrix" 22 and underlay substrate 10 and interval of covering 21 and second black matrix" 22 of the first black matrix"
Region；
The color light resistance layer 40 includes positioned at the first color blocking unit 41 of the first sub-pixel area 31, positioned at the second sub-pixel
The second color blocking unit 42 in area 32, the third color blocking unit 43 positioned at third sub-pixel area 33；
The shading color blocking lamination 50 includes being located at first black matrix" 21, the second black matrix" 22 and underlay substrate
The first shading color blocking layer 51 on 10 and the second shading color blocking layer 52 in the first shading color blocking layer 51, described
One shading color blocking layer 51 is made with the first color blocking unit 41 by carrying out lithographic process to same color blocking layer, also, described
The thickness of first shading color blocking layer 51 be less than the first color blocking unit 41 thickness, the second shading color blocking layer 52 with it is described
Second color blocking unit 42 or third color blocking unit 43 are made by carrying out lithographic process to same color blocking layer.
Preferably, the first shading color blocking layer 51 protrudes from first black matrix", 21 and second black matrix" 22
The thickness of the part on surface is less than 2 μm；Alternatively, the upper surface of the first shading color blocking layer 51 and first black matrix" 21
With the upper surface flush of the second black matrix" 22.
Specifically, the step 2 includes：
Step 21, as shown in Figure 6 to 8, in the underlay substrate 10, the first black matrix" 21, the second black matrix" 22
The first color blocking material of upper coating is formed the first color blocking layer 81, is exposed to first color blocking layer 81 using halftone mask 60
After light, development, obtains the first color blocking unit 41 being located in the first sub-pixel area 31, is located at first black matrix" 21, the
On two black matrix"s 22 and underlay substrate 10 and the interval region of covering 21 and second black matrix" 22 of the first black matrix"
The first shading color blocking layer 51.
Specifically, as shown in fig. 6, the halftone mask 60 is equipped with the first area corresponding to the first sub-pixel area 31
61, corresponding to the second area 62 of the interval region of first black matrix", 21 and second black matrix" 22, except described first
Region 61 and the third region 63 other than second area 62, wherein the width of the second area 62 is more than first black
The width of the interval region of matrix 21 and the second black matrix" 22；
When the first color blocking material is positivity photoresist, the first area 61, second area 62, third region 63
Light transmittance is sequentially increased (as shown in Figure 6)；When the first color blocking material is negativity photoresist, the first area 61, second
Region 62, third region 63 light transmittance be sequentially reduced (not shown).
Step 22, as shown in Fig. 9 to Figure 10, be respectively formed with third sub-pixel area 33 in second sub-pixel area 32
Second color blocking unit 42 and third color blocking unit 43, it is same in the processing procedure of the second color blocking unit 42 or third color blocking unit 43
When form the second shading color blocking layer 52.
Specifically, the processing procedure of the second color blocking unit 42 and third color blocking unit 43 includes coating photoresist, exposure, development
Processing procedure, the second color blocking unit 42 are common light shield, institute with the light shield used in the exposure manufacture process of third color blocking unit 43
It includes transmission region and non-transparent region to state common light shield only.
Specifically, the thickness of the second shading color blocking layer 52 and the second color blocking unit 42 or third color blocking unit 43
Thickness it is equal.
Specifically, the color of the first shading color blocking layer 51 and a color blocking layer in the second shading color blocking layer 52 is red
The color of color, another color blocking layer is blue or green.Theoretically, light passes through red photoresist layer and blue or green photoresist layer
Afterwards, light penetration zero.
Step 3, as shown in Figure 11 to Figure 12, in the color light resistance layer 40, the first black matrix" 21, the second black matrix"
22, flatness layer 70 is formed on shading color blocking lamination 50.
The production method of above-mentioned colored filter substrate exposes the first color blocking layer 81 by using halftone mask 60
Light, development, while the first color blocking unit 41 being made in color light resistance layer 40 and the first shading color in shading color blocking lamination 50
Resistance layer 51, and make the thickness of the first shading color blocking layer 51 less than the thickness of the first color blocking unit 41, in the first shading color
The smaller situation of the thickness of the part of 21 and second black matrix" of the first black matrix", 22 upper surface is protruded from resistance layer 51
Under, the photoresist for being coated on 51 upper surface of the first shading color blocking layer is not easy to flow to other regions, is lifted at the first shading color
The thickness of the second shading color blocking layer 52 formed in resistance layer 51 has to promote the shaded effect of the shading color blocking lamination 50
Effect avoids the interval region of first black matrix", 21 and second black matrix" 22 from generating light leakage, promotes liquid crystal display panel
Display effect and taste.
1 and Figure 12 are please referred to Fig.1, while refering to fig. 10, based on the production method of above-mentioned colored filter substrate, the present invention
A kind of colored filter substrate is also provided, including：Underlay substrate 10, the first black matrix" 21 on the underlay substrate 10
And around the periphery of first black matrix" 21 and with first black matrix", 21 spaced second black matrix"
22, the color light resistance layer 40 on the underlay substrate 10, be set to first black matrix" 21, the second black matrix" 22 and
On underlay substrate 10 and the shading color blocking lamination of the interval region of covering 21 and second black matrix" 22 of the first black matrix"
50；
First black matrix" 21 is including frame shape light shield layer 212 and in the region that frame shape light shield layer 212 crosses
And the latticed light shield layer 211 being connected with the inside of the frame shape light shield layer 212, the frame shape light shield layer 212 is in the substrate
The region crossed on substrate 10 is viewing area 101, and the region that the underlay substrate 10 is located at 101 periphery of the viewing area is non-aobvious
Show that area 102, the frame shape light shield layer 212 cross multiple sub-pixel areas 30, institute with latticed light shield layer 211 in viewing area 101
It includes the first sub-pixel area 31 with different colours, the second sub-pixel area 32, third sub-pixel area to state multiple sub-pixel areas 30
33；
The color light resistance layer 40 includes positioned at the first color blocking unit 41 of the first sub-pixel area 31, positioned at the second sub-pixel
The second color blocking unit 42 in area 32, the third color blocking unit 43 positioned at third sub-pixel area 33；
The shading color blocking lamination 50 includes being located at first black matrix" 21, the second black matrix" 22 and underlay substrate
The first shading color blocking layer 51 on 10 and the second shading color blocking layer 52 in the first shading color blocking layer 51, described
One shading color blocking layer 51 is made with the first color blocking unit 41 by carrying out lithographic process to same color blocking layer, also, described
The thickness of first shading color blocking layer 51 be less than the first color blocking unit 41 thickness, the second shading color blocking layer 52 with it is described
Second color blocking unit 42 or third color blocking unit 43 are made by carrying out lithographic process to same color blocking layer.
Specifically, the colored filter substrate further includes set on the color light resistance layer 40, the first black matrix" 21, the
Flatness layer 70 on two black matrix"s 22, shading color blocking lamination 50.
Preferably, the first shading color blocking layer 51 protrudes from first black matrix", 21 and second black matrix" 22
The thickness of the part on surface is less than 2 μm；Alternatively, the upper surface of the first shading color blocking layer 51 and first black matrix" 21
With the upper surface flush of the second black matrix" 22.
Specifically, the material of first black matrix", 21 and second black matrix" 22 can be black resin or black
Metal material.
Specifically, the color of the first shading color blocking layer 51 and a color blocking layer in the second shading color blocking layer 52 is red
The color of color, another color blocking layer is blue or green.Theoretically, light passes through red photoresist layer and blue or green photoresist layer
Afterwards, light penetration zero.
Specifically, the thickness of the second shading color blocking layer 52 and the second color blocking unit 42 or third color blocking unit 43
Thickness it is equal.
Above-mentioned colored filter substrate is less than screening by the way that the thickness of the first color blocking unit 41 in color light resistance layer 40 is arranged
The thickness of the first shading color blocking layer 51 in photochromic resistance lamination 50, can be lifted at second formed in the first shading color blocking layer 51
The thickness of shading color blocking layer 52 effectively avoids first black to promote the shaded effect of the shading color blocking lamination 50
The interval region of matrix 21 and the second black matrix" 22 generates light leakage, promotes display effect and the taste of liquid crystal display panel.
In conclusion the production method of the colored filter substrate of the present invention is by using the first color blocking of halftone mask pair
Layer is exposed, develops, while the first color blocking unit being made in color light resistance layer and the first shading in shading color blocking lamination
Color blocking layer, and make the thickness of the first shading color blocking layer less than the thickness of the first color blocking unit, in the first shading color blocking layer
In protrude from first black matrix" and the second black matrix" upper surface part thickness it is smaller in the case of, be coated on
The photoresist of one shading color blocking layer upper surface is not easy to flow to other regions, is lifted at formed in the first shading color blocking layer
The thickness of two shading color blocking layers effectively avoids the first black square to promote the shaded effect of the shading color blocking lamination
Battle array and the interval region of the second black matrix" generate light leakage, promote display effect and the taste of liquid crystal display panel.The present invention's
Colored filter substrate be less than in shading color blocking lamination by the way that the thickness of the first color blocking unit in color light resistance layer is arranged the
The thickness of one shading color blocking layer can be lifted at the thickness of the second shading color blocking layer formed in the first shading color blocking layer, to
The shaded effect for promoting the shading color blocking lamination effectively avoids the spacer region of first black matrix" and the second black matrix"
Domain generates light leakage, promotes display effect and the taste of liquid crystal display panel.
The above for those of ordinary skill in the art can according to the technique and scheme of the present invention and technology
Other various corresponding change and deformations are made in design, and all these change and distortions should all belong to the appended right of the present invention
It is required that protection domain.
Claims (10)
1. a kind of production method of colored filter substrate, which is characterized in that include the following steps：
Step 1 provides underlay substrate (10), the first black matrix" (21) is formed on the underlay substrate (10) and around institute
State the periphery of the first black matrix" (21) and with spaced second black matrix" (22) of first black matrix" (21), institute
It includes frame shape light shield layer (212) to state the first black matrix" (21), and the frame shape light shield layer (212) is on the underlay substrate (10)
The region crossed is viewing area (101), and the region that the underlay substrate (10) is located at the viewing area (101) periphery is non-display
Area (102)；
Step 2 forms color light resistance layer (40) on the underlay substrate (10), in the processing procedure of the color light resistance layer (40)
It is formed simultaneously shading color blocking lamination (50), the shading color blocking lamination (50) is located at first black matrix" (21), second black
In colour moment battle array (22) and underlay substrate (10) and the interval of covering first black matrix" (21) and the second black matrix" (22)
Region；
The shading color blocking lamination (50) includes being located at first black matrix" (21), the second black matrix" (22) and substrate base
The first shading color blocking layer (51) on plate (10) and the second shading color blocking layer on the first shading color blocking layer (51)
(52), the first shading color blocking layer (51) is different from the color of the second shading color blocking layer (52)；The color light resistance layer (40)
It include the first color blocking unit (41) identical with the color of the first shading color blocking layer (51)；The first shading color blocking layer
(51) thickness is less than the thickness of the first color blocking unit (41).
2. the production method of colored filter substrate as described in claim 1, which is characterized in that first black matrix"
(21) further include being located in the region that frame shape light shield layer (212) crosses and being connected with the inside of the frame shape light shield layer (212)
Latticed light shield layer (211)；The frame shape light shield layer (212) and latticed light shield layer (211) cross more in viewing area (101)
A sub-pixel area (30), the multiple sub-pixel area (30) include the first sub-pixel area (31) with different colours, the second son
Pixel region (32), third sub-pixel area (33)；
The color light resistance layer (40) includes positioned at the first color blocking unit (41) of the first sub-pixel area (31), positioned at the second sub- picture
Second color blocking unit (42) of plain area (32), the third color blocking unit (43) for being located at third sub-pixel area (33)；
The first shading color blocking layer (51) is with the first color blocking unit (41) by carrying out lithographic process to same color blocking layer
It is made；The second shading color blocking layer (52) is with the second color blocking unit (42) or third color blocking unit (43) by same
Color blocking layer carries out lithographic process and is made.
3. the production method of colored filter substrate as described in claim 1, which is characterized in that the first shading color blocking layer
(51) it protrudes from first black matrix" (21) and the thickness of the part of the second black matrix" (22) upper surface is less than 2 μm；Or
Person, the upper surface of the first shading color blocking layer (51) and first black matrix" (21) and the second black matrix" (22) it is upper
Surface flushes.
4. the production method of colored filter substrate as claimed in claim 2, which is characterized in that the step 2 includes：
Step 21 is coated with the first color blocking in the underlay substrate (10), the first black matrix" (21), the second black matrix" on (22)
Material is formed the first color blocking layer (81), is exposed, is developed to first color blocking layer (81) using halftone mask (60)
Afterwards, it obtains the first color blocking unit (41) being located in the first sub-pixel area (31), be located at first black matrix" (21), second
On black matrix" (22) and underlay substrate (10) and between covering first black matrix" (21) and the second black matrix" (22)
The first shading color blocking layer (51) in septal area domain；
Step 22 is respectively formed the second color blocking unit (42) in second sub-pixel area (32) and third sub-pixel area (33)
With third color blocking unit (43), is formed simultaneously in the processing procedure of the second color blocking unit (42) or third color blocking unit (43)
Two shading color blocking layers (52).
5. the production method of colored filter substrate as claimed in claim 4, which is characterized in that the halftone mask (60)
It is equipped with the first area (61) corresponding to the first sub-pixel area (31), corresponds to first black matrix" (21) and second black
The second area (62) of the interval region of colour moment battle array (22), the third in addition to the first area (61) and second area (62)
Region (63), wherein the width of the second area (62) is more than first black matrix" (21) and the second black matrix"
(22) width of interval region；
When the first color blocking material is positivity photoresist, the first area (61), second area (62), third region (63)
Light transmittance be sequentially increased；When the first color blocking material is negativity photoresist, the first area (61), second area
(62), the light transmittance of third region (63) is sequentially reduced.
6. the production method of colored filter substrate as described in claim 1, which is characterized in that first black matrix"
(21) it is black resin or ferrous material with the material of the second black matrix" (22)；The first shading color blocking layer (51)
Color with a color blocking layer in the second shading color blocking layer (52) is red, and the color of another color blocking layer is blue or green
Color.
7. a kind of colored filter substrate, which is characterized in that including：Underlay substrate (10) is set on the underlay substrate (10)
The first black matrix" (21) and around first black matrix" (21) periphery and with first black matrix" (21)
Spaced second black matrix" (22), is set to described the at the color light resistance layer (40) being set on the underlay substrate (10)
On one black matrix" (21), the second black matrix" (22) and underlay substrate (10) and covering first black matrix" (21) and the
The shading color blocking lamination (50) of the interval region of two black matrix"s (22)；
First black matrix" (21) includes frame shape light shield layer (212), and the frame shape light shield layer (212) is in the underlay substrate
(10) region crossed on is viewing area (101), and the region that the underlay substrate (10) is located at the viewing area (101) periphery is
Non-display area (102)；
The shading color blocking lamination (50) includes being located at first black matrix" (21), the second black matrix" (22) and substrate base
The first shading color blocking layer (51) on plate (10) and the second shading color blocking layer on the first shading color blocking layer (51)
(52), the first shading color blocking layer (51) is different from the color of the second shading color blocking layer (52)；The color light resistance layer (40)
It include the first color blocking unit (41) identical with the color of the first shading color blocking layer (51)；The first shading color blocking layer
(51) thickness is less than the thickness of the first color blocking unit (41).
8. colored filter substrate as claimed in claim 7, which is characterized in that first black matrix" (21) further includes position
In the latticed light shield layer being connected in the region that frame shape light shield layer (212) crosses and with the inside of the frame shape light shield layer (212)
(211)；The frame shape light shield layer (212) crosses multiple sub-pixel areas with latticed light shield layer (211) in viewing area (101)
(30), the multiple sub-pixel area (30) include the first sub-pixel area (31) with different colours, the second sub-pixel area (32),
Third sub-pixel area (33)；
The color light resistance layer (40) includes positioned at the first color blocking unit (41) of the first sub-pixel area (31), positioned at the second sub- picture
Second color blocking unit (42) of plain area (32), the third color blocking unit (43) for being located at third sub-pixel area (33)；
The first shading color blocking layer (51) is with the first color blocking unit (41) by carrying out lithographic process to same color blocking layer
It is made；The second shading color blocking layer (52) is with the second color blocking unit (42) or third color blocking unit (43) by same
Color blocking layer carries out lithographic process and is made.
9. colored filter substrate as claimed in claim 7, which is characterized in that the first shading color blocking layer (51) protrudes from
First black matrix" (21) and the thickness of the part of the second black matrix" (22) upper surface are less than 2 μm；Alternatively, described first
The upper surface flush of the upper surface of shading color blocking layer (51) and first black matrix" (21) and the second black matrix" (22).
10. colored filter substrate as claimed in claim 7, which is characterized in that first black matrix" (21) and second
The material of black matrix" (22) is black resin or ferrous material；The first shading color blocking layer (51) and the second shading
The color of a color blocking layer in color blocking layer (52) is red, and the color of another color blocking layer is blue or green.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810118130.3A CN108363233A (en) | 2018-02-06 | 2018-02-06 | Colored filter substrate and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810118130.3A CN108363233A (en) | 2018-02-06 | 2018-02-06 | Colored filter substrate and preparation method thereof |
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| CN108363233A true CN108363233A (en) | 2018-08-03 |
Family
ID=63004566
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810118130.3A Pending CN108363233A (en) | 2018-02-06 | 2018-02-06 | Colored filter substrate and preparation method thereof |
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| Country | Link |
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| CN (1) | CN108363233A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020107588A1 (en) * | 2018-11-26 | 2020-06-04 | 惠科股份有限公司 | Display panel and display device |
| CN112230465A (en) * | 2020-10-29 | 2021-01-15 | 福州京东方光电科技有限公司 | Color film substrate, preparation method thereof and display panel |
| WO2021128518A1 (en) * | 2019-12-25 | 2021-07-01 | Tcl华星光电技术有限公司 | Method for manufacturing pattern of thin film transistor, thin film transistor and photomask |
| CN113219699A (en) * | 2021-04-21 | 2021-08-06 | 惠科股份有限公司 | Color film substrate, display panel and display device |
| CN113568079A (en) * | 2021-07-06 | 2021-10-29 | 深圳市华星光电半导体显示技术有限公司 | Color film substrate, display panel and manufacturing method of color film substrate |
| CN115202093A (en) * | 2021-04-13 | 2022-10-18 | 合肥京东方显示技术有限公司 | Display panel, manufacturing method thereof and display device |
| WO2023004872A1 (en) * | 2021-07-29 | 2023-02-02 | 武汉华星光电半导体显示技术有限公司 | Display panel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080058908A (en) * | 2006-12-22 | 2008-06-26 | 엘지디스플레이 주식회사 | Liquid crystal display device and fabricating method thereof |
| CN103926739A (en) * | 2013-12-31 | 2014-07-16 | 上海天马微电子有限公司 | Display panel and display device |
| CN107608119A (en) * | 2017-09-29 | 2018-01-19 | 武汉华星光电技术有限公司 | A kind of color membrane substrates and its manufacture method, display panel and display device |
-
2018
- 2018-02-06 CN CN201810118130.3A patent/CN108363233A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080058908A (en) * | 2006-12-22 | 2008-06-26 | 엘지디스플레이 주식회사 | Liquid crystal display device and fabricating method thereof |
| CN103926739A (en) * | 2013-12-31 | 2014-07-16 | 上海天马微电子有限公司 | Display panel and display device |
| CN107608119A (en) * | 2017-09-29 | 2018-01-19 | 武汉华星光电技术有限公司 | A kind of color membrane substrates and its manufacture method, display panel and display device |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020107588A1 (en) * | 2018-11-26 | 2020-06-04 | 惠科股份有限公司 | Display panel and display device |
| WO2021128518A1 (en) * | 2019-12-25 | 2021-07-01 | Tcl华星光电技术有限公司 | Method for manufacturing pattern of thin film transistor, thin film transistor and photomask |
| CN112230465A (en) * | 2020-10-29 | 2021-01-15 | 福州京东方光电科技有限公司 | Color film substrate, preparation method thereof and display panel |
| CN112230465B (en) * | 2020-10-29 | 2022-11-04 | 福州京东方光电科技有限公司 | Color film substrate, preparation method thereof and display panel |
| US11567358B2 (en) * | 2020-10-29 | 2023-01-31 | Fuzhou Boe Optoelectronics Technology Co., Ltd. | Color film substrate and manufacturing method thereof, and display panel |
| CN115202093A (en) * | 2021-04-13 | 2022-10-18 | 合肥京东方显示技术有限公司 | Display panel, manufacturing method thereof and display device |
| CN115202093B (en) * | 2021-04-13 | 2024-03-22 | 合肥京东方显示技术有限公司 | Display panel, manufacturing method thereof and display device |
| CN113219699A (en) * | 2021-04-21 | 2021-08-06 | 惠科股份有限公司 | Color film substrate, display panel and display device |
| CN113568079A (en) * | 2021-07-06 | 2021-10-29 | 深圳市华星光电半导体显示技术有限公司 | Color film substrate, display panel and manufacturing method of color film substrate |
| CN113568079B (en) * | 2021-07-06 | 2023-10-17 | 深圳市华星光电半导体显示技术有限公司 | Color film substrate, display panel and manufacturing method of color film substrate |
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Application publication date: 20180803 |