The two-sided super slow wave plane microwave delay line of uniconductor phasmon
Technical field
The present invention relates to a kind of microwave delay line, especially a kind of super slow wave plane microwave of two-sided uniconductor phasmon prolongs
Slow line.
Background technique
Delay line is a kind of common microwave passive components, is used for phased array and pulse compression system.Delay line can prolong
The time that slow signal passes through itself.Due to electromagnetic transmission speed quickly, usually require that the size of delay line is small, so as to small
Size provides time delay as long as possible.If signal just needs 300 with light velocity propagation in air, the time delay of 1 microsecond
The long delay line of rice.In order to reduce the size of delay line, it usually needs reduce signal in the spread speed of delay line, and postpone
Line wants folding up for a section.For microwave signal delay common delay line have lumped parameter inductance capacitance delay line,
Supersonic delay line, microwave transmission line delay line and fibre delay line etc..The inductance capacitance delay line working frequency of lumped parameter
It is low.The transducer architecture of supersonic delay line is complicated, with system device is easy of integration, working frequency is not high.Fibre delay line tool
Have the advantages that with wide, low, the anti-interference, good confidentiality of loss, but the structure of fibre delay line is not considerably complicated easy of integration, cost
It is higher.Common microwave transmission line delay line has microstrip line delay line, co-planar waveguide delay line and strip line delay line etc., but
In these delay lines, the main mould of electromagnetic wave is TEM mould or quasi- TEM mould, and the spread speed of signal is still higher, so that delay line
Size or bigger.And due to being two conductor transmission line, the lateral dimension of transmission line is larger, the mutual coupling of adjacent transmission lines
It is relatively strong.When these factors fold delay line, the distance of adjacent delay line cannot be too close.
Summary of the invention
Technical problem: the purpose of the present invention is to propose to a kind of two-sided super slow wave plane microwave delays of uniconductor phasmon
Line, the delay line are uniconductor structures, and signal is propagated with slow wave, and the mutual coupling of the adjacent delay line of folding is small, can be bent, be convenient for
It is integrated, low manufacture cost.
Technical solution: a kind of two-sided super slow wave plane microwave delay line of uniconductor phasmon of the invention includes medium base
Plate, the surface phasmon transmission line being arranged on medium substrate and co-planar waveguide are to surface phasmon transmission line transition;It is situated between
Matter substrate is topside metal layer on one side, and the another side of medium substrate is bottom-side metal layer, topside metal layer and bottom-side metal layer
It is symmetrically distributed in the two sides of medium substrate, topside metal layer is as the shapes and sizes of bottom-side metal layer;Topside metal layer and
Bottom-side metal layer constitutes surface phasmon transmission line and co-planar waveguide to surface phasmon transmission line transition;Surface etc. is from sharp
The both ends of first transmission line are connected with two co-planar waveguides to surface phasmon transmission line transition respectively, surface phasmon transmission
Line be located at topside metal layer top surface conduction band and positioned at bottom-side metal layer bottom surface conduction band by pass through medium substrate metallization
Hole array connection;Inside groove array, top surface conduction band and bottom are arranged along the center line of top surface conduction band and the center line of bottom surface conduction band
The two sides of face conduction band are the groove arrays of rectangle;One end of co-planar waveguide to surface phasmon transmission line transition is delay line
Port, co-planar waveguide is located at the end face center conduction band of topside metal layer and bottom center's conduction band shape positioned at bottom-side metal layer
As size, end face center conduction band is connect with bottom center's conduction band by the metallization VIA array for passing through medium substrate;It is coplanar
Waveguide is with being located at the topside metal of topside metal layer with the bottom-side metal contoured positioned at bottom-side metal layer as size, top surface
With bottom-side metal connected by the metallization VIA array for passing through medium substrate to metal;End face center conduction band and bottom center lead
Flare is gradually opened to topside metal with two sides with bottom-side metal, and is led far from end face center conduction band and bottom center
Band;In co-planar waveguide to the other end of surface phasmon transmission line transition, the end face center conduction band of co-planar waveguide and surface etc.
Top surface conduction band from excimer transmission line is connected, and bottom center's conduction band is connected with the bottom surface conduction band of surface phasmon transmission line;Altogether
Surface wave leads the transition of surface phasmon transmission line close to the part of surface phasmon transmission line, end face center conduction band and bottom surface
There are multiple transition grooves of different depth in the two sides of center conduction band, along the center of end face center conduction band and bottom center's conduction band
Line has multiple transition inside grooves of different sizes;Surface phasmon transmission line is the transmission line of the periodic structure of binary cycle, interior
Slot, transition inside groove, groove and transition groove are equidistant arrangement, groove center in the spacing and adjacent transition at adjacent internal grooves center
Spacing it is the same, the spacing at adjacent grooves center is as the spacing of adjacent transition groove center;Two-sided uniconductor phasmon
Higher cutoff frequency of the working frequency range of super slow wave plane microwave delay line close to surface phasmon transmission line.
As the shape of groove, the depth of transition groove is arrived from shallow to deep with reducing co-planar waveguide the shape of transition groove
The reflection of surface phasmon transmission line transition, the depth close to the transition groove of surface phasmon transmission line are most deep and close
The depth of groove;For the shape of transition inside groove as the shape of inside groove, the size of transition inside groove is ascending to reduce coplanar wave
Lead the reflection of surface phasmon transmission line transition, it is maximum close to the size of the transition inside groove of surface phasmon transmission line and
Close to the size of inside groove.
The length for changing surface phasmon transmission line can change the super slow wave plane microwave of two-sided uniconductor phasmon
The time delay of delay line;Change spacing, the depth of groove, adjacent internal grooves center at surface phasmon transmission line adjacent grooves center
Spacing, the size of inside groove can change the working frequency of the super slow wave plane microwave delay line of two-sided uniconductor phasmon.
The length of co-planar waveguide to surface phasmon transmission line transition is greater than five operation wavelengths, the quantity of transition groove
Greater than 20, the quantity of transition inside groove is greater than ten, to reduce reflection.
It adjusts the size of inside groove, adjust the ratio of the spacing at adjacent internal grooves center and the spacing at two adjacent grooves centers,
So that time delay of the two-sided super slow wave plane microwave delay line of uniconductor phasmon in working band is as equal as possible.
The spacing of adjacent metal via hole is not more than 1/8th wavelength, to guarantee topside metal layer and bottom-side metal layer
Effectively connection.
Surface phasmon transmission line is a kind of periodic slow wave transmission line, and is band-pass transmissions line.Electromagnetism wave frequency
For rate closer to the higher cutoff frequency of surface phasmon transmission line, the speed propagated is slower, the delay time of unit length
It is longer.The working frequency range of the two-sided super slow wave plane microwave delay line of uniconductor phasmon is close to surface phasmon transmission line
Higher cutoff frequency, the size of delay line can be allowed to be substantially reduced in this way.
Surface phasmon transmission line is a kind of slow wave transmission line of binary cycle, and the length in one of them period is exactly adjacent
The spacing of interior groove center, the length in another period are exactly the spacing at adjacent grooves center.Periodic inside groove array can be adjusted
The shape of surface phasmon dispersion on transmission lines curve is saved, inside groove is bigger, and the degree of adjusting is bigger, therefore adjustable inside groove
Size and adjust two periods relative size can adjust surface phasmon transmission line dispersion curve shape,
So that the time delay of delay line is as consistent as possible in working frequency range.
Surface phasmon transmission line is a kind of uniconductor surface wave transmission line, and the electromagnetic wave of transmission is by constraint tightly
In the neighbour of surface phasmon transmission line, therefore even if close proximity, between two adjacent surface phasmon transmission lines
Mutual coupling very little.In this way surface phasmon transmission line can transmission lines more other than microstrip line etc. it is closer bending arrangement, with
Reduce the volume of the super slow wave plane microwave delay line of two-sided uniconductor phasmon.
Surface phasmon transmission line is a kind of uniconductor surface wave transmission line, and the thickness of impedance and medium substrate is basic
It is unrelated, therefore very thin medium substrate can be used, it not only can reduce the volume, weight and cost of delay line, but also make
Strong flexibility.
The two-sided super slow wave plane microwave delay line of uniconductor phasmon is planar structure, is easy to and the other components of system
It is integrated, realize miniaturization.
The utility model has the advantages that the beneficial effect of the super slow wave plane microwave delay line of two-sided uniconductor phasmon of the invention is,
The delay line is the surface phasmon transmission line structure of uniconductor, and signal is not only tightly constrained in conductor neighbour, so that folding
The mutual coupling of folded adjacent delay line is small, delay line can fold tightlier to reduce the size of delay line.And delay line works
In the frequency close to upper cut-off region of surface phasmon transmission line, electromagnetic wave propagation speed is very low, further reduces and prolongs
The size of slow line;Delay line is double periodic structure, and the time delay in working band is uniform;And the delay line is planar junction
Structure, can be integrated with components other in system, can be made of planar printed circuit board technique, at low cost.
Detailed description of the invention
Fig. 1 is the super slow wave plane microwave delay line top surface structure schematic diagram of two-sided uniconductor phasmon;
Fig. 2 is the super slow wave plane microwave delay line bottom surface structure schematic diagram of two-sided uniconductor phasmon;
Fig. 3 is the super slow wave plane microwave delay line schematic diagram of two-sided uniconductor phasmon of bending arrangement;
Have in figure: medium substrate 1, surface phasmon transmission line 2, co-planar waveguide to surface phasmon transmission line transition
3, topside metal layer 10, bottom-side metal layer 11, metallization VIA 12, inside groove 20, groove 21, port 31, transition groove 34, transition
Inside groove 35, top surface conduction band 200, bottom surface conduction band 201, end face center conduction band 300, bottom center's conduction band 301, topside metal 302
With bottom-side metal 303.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment of the present invention is: a kind of two-sided super slow wave plane microwave delay line packet of uniconductor phasmon
Include medium substrate 1, the surface phasmon transmission line 2 that is arranged on medium substrate 1 and co-planar waveguide are passed to surface phasmon
Defeated line transition 3;Medium substrate 1 is topside metal layer 10 on one side, and the another side of medium substrate 1 is bottom-side metal layer 11, top surface
Metal layer 10 and bottom-side metal layer 11 are symmetrically distributed in the two sides of medium substrate 1, topside metal layer 10 and bottom-side metal layer 11
Shapes and sizes are the same;Topside metal layer 10 and bottom-side metal layer 11 constitute surface phasmon transmission line 2 and co-planar waveguide arrives
Surface phasmon transmission line transition 3;The both ends of surface phasmon transmission line 2 respectively with two co-planar waveguides to surface etc. from
Excimer transmission line transition 3 is connected, and surface phasmon transmission line 2 is located at the top surface conduction band 200 of topside metal layer 10 and is located at bottom
The bottom surface conduction band 201 of face metal layer 11 is connected by 12 array of metallization VIA for passing through medium substrate 1;Along top surface conduction band 200
Center line and the center line of bottom surface conduction band 201 arrange 20 array of inside groove, the two sides of top surface conduction band 200 and bottom surface conduction band 201
While being 21 array of groove of rectangle;One end of co-planar waveguide to surface phasmon transmission line transition 3 is the port 31 of delay line,
Co-planar waveguide is located at the end face center conduction band 300 of topside metal layer 10 and bottom center's conduction band 301 positioned at bottom-side metal layer 11
Shapes and sizes are the same, and end face center conduction band 300 and bottom center's conduction band 301 are by the metallization VIA 12 across medium substrate 1
Array connection;Co-planar waveguide with being located at the topside metal of topside metal layer 10 302 and positioned at bottom-side metal layer 11 bottom-side metal
303 shapes and sizes of ground are the same, topside metal 302 and bottom-side metal 303 by pass through medium substrate 1 metallization VIA 12
Array connection;The topside metal of 301 two sides of end face center conduction band 300 and bottom center's conduction band 302 and bottom-side metal 303 by
Flare is gradually opened, and far from end face center conduction band 300 and bottom center's conduction band 301;In co-planar waveguide to surface etc. from sharp
The other end of first transmission line transition 3, the end face center conduction band 300 of co-planar waveguide and the top surface of surface phasmon transmission line 2 are led
Band 200 is connected, and bottom center's conduction band 301 is connected with the bottom surface conduction band 201 of surface phasmon transmission line 2;Co-planar waveguide is to table
Face phasmon transmission line transition 3 is close to the part of surface phasmon transmission line 2, end face center conduction band 300 and bottom center
There are multiple transition grooves 34 of different depth in the two sides of conduction band 301, along end face center conduction band 300 and bottom center's conduction band
301 center line has multiple transition inside grooves 35 of different sizes;Surface phasmon transmission line 2 is the periodic structure of binary cycle
Transmission line, inside groove 20, transition inside groove 35, groove 21 and transition groove 34 are equidistant arrangement, 20 center of adjacent internal grooves
Spacing is as the spacing at 35 center of adjacent transition inside groove, spacing and 34 center of adjacent transition groove at 21 center of adjacent grooves
Spacing is the same;The working frequency range of the two-sided super slow wave plane microwave delay line of uniconductor phasmon is transmitted close to surface phasmon
The higher cutoff frequency of line 2.
For the shape of transition groove 34 as the shape of groove 21, the depth of transition groove 34 is coplanar to reduce from shallow to deep
Reflection of the waveguide to surface phasmon transmission line transition 3, the depth of the transition groove 34 of close surface phasmon transmission line 2
Depth most deep and close to groove 21;The shape of transition inside groove 35 as the shape of inside groove 20, the size of transition inside groove 35 by
It is small to greatly to reduce the reflection of co-planar waveguide to surface phasmon transmission line transition 3, close to surface phasmon transmission line 2
The size of transition inside groove 35 is maximum and close to the size of inside groove 20.
The length for changing surface phasmon transmission line 2 can change the super slow wave plane microwave of two-sided uniconductor phasmon
The time delay of delay line;Change the spacing at 2 adjacent grooves of surface phasmon transmission line, 21 center, the depth of groove 21, it is adjacent in
The spacing at 20 center of slot, the size of inside groove 20 can change the work of the super slow wave plane microwave delay line of two-sided uniconductor phasmon
Working frequency.
The length of co-planar waveguide to surface phasmon transmission line transition 3 is greater than five operation wavelengths, transition groove 34
Quantity is greater than 20, and the quantity of transition inside groove 35 is greater than ten, to reduce reflection.
Adjust the spacing of the size of inside groove 20, the spacing at adjusting 20 center of adjacent internal grooves and two 21 centers of adjacent grooves
Ratio, so that time delay of the super slow wave plane microwave delay line of two-sided uniconductor phasmon in working band is as equal as possible.
The spacing of adjacent metal via hole 12 is not more than 1/8th wavelength, to guarantee topside metal layer 10 and bottom-side metal
Effective connection of layer 11.
Surface phasmon transmission line 2 is a kind of periodic slow wave transmission line, and is band-pass transmissions line.Electromagnetism wave frequency
For rate closer to the higher cutoff frequency of surface phasmon transmission line 2, the speed propagated is slower, the delay time of unit length
It is longer.The working frequency range of the two-sided super slow wave plane microwave delay line of uniconductor phasmon is close to surface phasmon transmission line
2 higher cutoff frequency can allow the size of delay line to be substantially reduced in this way.
Surface phasmon transmission line 2 is a kind of slow wave transmission line of binary cycle, and the length in one of them period is exactly phase
The spacing at adjacent 20 center of inside groove, the length in another period are exactly the spacing at 21 center of adjacent grooves.Periodic 20 gusts of inside groove
The shape of adjustable 2 dispersion curve of surface phasmon transmission line is arranged, inside groove 20 is bigger, and the degree of adjusting is bigger, therefore
The size of adjustable inside groove 20 and the relative size for adjusting two periods can adjust surface phasmon transmission line 2
The shape of dispersion curve, so that the time delay of delay line is as consistent as possible in working frequency range.
Fig. 3 is the super slow wave plane microwave delay line schematic diagram of two-sided uniconductor phasmon of bending arrangement.Surface etc. from
Excimer transmission line 2 is a kind of uniconductor surface wave transmission line, transmission electromagnetic wave by tightly constrain in surface phasmon
The neighbour of transmission line 2, therefore the mutual coupling very little even if close proximity, between two adjacent surface phasmon transmission lines 2.This
Sample surface phasmon transmission line 2 can the closer bending arrangement of transmission lines more other than microstrip line etc., two-sided singly led with reducing
The volume of the super slow wave plane microwave delay line of body phasmon.
Surface phasmon transmission line 2 is a kind of uniconductor surface wave transmission line, the thickness base of impedance and medium substrate 1
This is unrelated, therefore can use very thin medium substrate 1, not only can reduce the volume, weight and cost of delay line, but also
The strong flexibility used.
The two-sided super slow wave plane microwave delay line of uniconductor phasmon is planar structure, is easy to and the other components of system
It is integrated, realize miniaturization.
In technique, the two-sided super slow wave plane microwave delay line of uniconductor phasmon can be realized using kinds of processes,
Both common printed circuit board (PCB) technique can be used, can also using low-temperature co-fired ceramics (LTCC) technique or CMOS,
The integrated circuit technologies such as Si substrate are realized.
According to the above, the present invention can be realized.