CN108279470B - High-precision focusing device for direct-writing photoetching packaging machine type - Google Patents
High-precision focusing device for direct-writing photoetching packaging machine type Download PDFInfo
- Publication number
- CN108279470B CN108279470B CN201810226366.9A CN201810226366A CN108279470B CN 108279470 B CN108279470 B CN 108279470B CN 201810226366 A CN201810226366 A CN 201810226366A CN 108279470 B CN108279470 B CN 108279470B
- Authority
- CN
- China
- Prior art keywords
- prism
- base
- fixedly connected
- lead screw
- direct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 14
- 238000001259 photo etching Methods 0.000 title abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 230000007246 mechanism Effects 0.000 claims abstract description 7
- 238000005538 encapsulation Methods 0.000 claims abstract description 3
- 238000001459 lithography Methods 0.000 claims description 6
- 230000001174 ascending effect Effects 0.000 claims description 3
- 230000002457 bidirectional effect Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention relates to a high-precision focusing device used in a direct-writing photoetching packaging machine type, which comprises a base, a prism device and a transmission mechanism, wherein the prism device comprises an upper prism and a lower prism which are in sliding fit with each other, a gap is reserved between the upper prism and the lower prism, a first mounting groove matched with the lower prism is formed in the base, the transmission device comprises a lead screw and a motor, the upper prism is in transmission connection with the lead screw through a connecting bracket, two ends of the lead screw are respectively and fixedly connected with the base through a first support and a second support, the end part of the lead screw is fixedly connected with a rotating shaft of the motor through a coupler, the motor is fixedly connected with the base through the mounting bracket, and a displacement sensor is arranged at the end part of the base. The invention measures the feedback focal plane distance in real time through the laser displacement sensor, and combines the movement of the wedge prism with a small wedge angle to achieve the purpose of precise focusing, thereby solving the technical defect of small focal depth of the direct-writing photoetching encapsulation machine.
Description
Technical Field
The invention relates to the technical field of lithography, in particular to a high-precision focusing device for a direct-writing lithography packaging machine type.
Background
The packaging machine type is one of direct-writing photoetching equipment and can be applied to an IC packaging carrier plate. The method is characterized by high resolution and high alignment precision, and the minimum exposure linewidth can reach 8um. The problem brought by the high resolution of the exposure lens is the reduction of focal depth, and in the PCB plate making industry, the focal depth is one of important indexes for evaluating the excellent performance of exposure equipment.
The wedge prism is a common focusing structure in optics, and the principle is that the center distance of the wedge prism is correspondingly changed through the relative movement of the two wedge prisms, which is equivalent to a parallel flat plate with different thickness, so that the focal plane position of the exposure lens is correspondingly changed. And a wedge prism is added in the optical design of the package type exposure lens, so that the imaging quality of the wedge prism in the focusing process is ensured.
At present, a focusing device of direct-writing photoetching equipment mostly adopts a bidirectional focusing structure, and the upper wedge prism block and the lower wedge prism block of the structure are movable, so that the focusing stroke of the device is larger, but the precision is low and the stability is poor. The direct-writing photoetching packaging machine type has low requirements on focusing stroke, but has extremely severe requirements on precision and stability, so that a focusing device with high precision and high stability is needed.
Disclosure of Invention
The invention aims to provide a high-precision focusing device for a direct-writing photoetching packaging machine type, which is used for measuring the feedback focal plane distance in real time through a laser displacement sensor and improving the focusing precision of the direct-writing photoetching packaging machine type by matching with the movement of a wedge prism with a small wedge angle.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The utility model provides a high accuracy focusing device for in direct-writing photoetching encapsulation model, includes base, prism device and drive mechanism, the prism device includes mutual sliding fit's last prism and lower prism, have the clearance between last prism and the lower prism, be equipped with on the base with lower prism assorted first mounting groove, drive mechanism include the lead screw and be used for to the lead screw provides the motor of power, go up the prism pass through the linking bridge with lead screw transmission is connected, the both ends of lead screw are respectively through first support, second support and base fixed connection, the pivot fixed connection of shaft coupling and motor is passed through to the tip of lead screw, the motor passes through installing support and base fixed connection, the tip of base is equipped with displacement sensor.
As a further improvement of the above technical scheme:
the connecting bracket comprises a prism mounting frame and a connecting frame, wherein the lower end of the prism mounting frame is provided with a second mounting groove matched with the upper prism in size, the upper prism is pressed in the second mounting groove through a gasket, one end of the connecting frame is fixedly connected with the prism mounting frame, the other end of the connecting frame is provided with a threaded hole matched with the screw rod, and the connecting frame is driven to move back and forth along the direction of the screw rod through the rotation of the screw rod.
The upper prism and the prism mounting frame are in ascending wedge shapes, the lower prism and the base are in descending wedge shapes, two sides of the base are respectively provided with a roller guide rail, the guide rails are fixedly connected with the base, and the prism mounting frame is in sliding connection with the guide rails.
The displacement sensor is a laser sensor and is fixedly connected with the base through the mounting plate.
The two sides of the base are respectively provided with a fixing piece with an L-shaped cross section, and the guide rail is arranged on the fixing piece.
The lower prism is pressed in the first mounting groove through a second gasket.
According to the technical scheme, the high-precision focusing device for the direct-writing photoetching packaging machine type disclosed by the invention has the advantages that the feedback focal plane distance is measured in real time through the laser displacement sensor, and the purpose of precise focusing is achieved by matching with the movement of the wedge prism with a small wedge angle, so that the technical defect that the focal depth of the direct-writing photoetching packaging machine type is small is overcome.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is an exploded schematic view of the present invention;
FIG. 3 is a top view of the present invention;
FIG. 4 is a cross-sectional view of R-R of FIG. 3;
FIG. 5 is a cross-sectional view of F-F of FIG. 3;
FIG. 6 is an enlarged view of a portion of B in FIG. 4;
fig. 7 is a focusing schematic of the present invention.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
As shown in fig. 1 to 6, the high-precision focusing device for use in the direct-writing lithography packaging machine type of the present embodiment includes a base 1, a prism device and a transmission mechanism, wherein the prism device includes an upper prism 21 and a lower prism 22 that are slidably matched with each other, and a gap is formed between the upper prism 21 and the lower prism 22, as shown in fig. 6, the size of the gap is 0.4mm; the base 1 is provided with a first mounting groove matched with the lower prism 22, and the lower prism 22 is pressed in the first mounting groove through a mounting plate 25 and a second gasket 24. The transmission device comprises a screw rod 31 and a motor 32 for providing power for the screw rod 31, the upper prism 21 is in transmission connection with the screw rod 31 through a connecting bracket 4, two ends of the screw rod 31 are fixedly connected with the base 1 through a first support 33 and a second support 34 respectively, the end part of the screw rod 31 is fixedly connected with a rotating shaft of the motor 32 through a coupler 35, the motor 32 is fixedly connected with the base 1 through a mounting bracket 36, and the end part of the base 1 is provided with a displacement sensor 5. The displacement sensor 5 is a laser sensor, and the displacement sensor 5 is fixedly connected with the base 1 through a mounting plate 7.
The connecting bracket 4 comprises a prism mounting frame 41 and a connecting frame 42, wherein the lower end of the prism mounting frame 41 is provided with a second mounting groove matched with the upper prism 21 in size, the upper prism 21 is pressed in the second mounting groove through a first gasket 23 and a pressing plate 26, one end of the connecting frame 42 is fixedly connected with the prism mounting frame 41, the other end of the connecting frame 42 is provided with a mounting seat, the mounting seat is provided with a threaded hole matched with a screw rod 31, and the connecting frame 42 is driven to move back and forth along the direction of the screw rod 31 through the rotation of the screw rod 31.
In this embodiment, the upper prism 21 and the prism mounting frame 41 are both in an ascending wedge shape, the lower prism 22 and the base 1 are both in a descending wedge shape, a roller guide rail 6 is respectively arranged at two sides of the base 1, the guide rail 6 is fixedly connected with the base 1, and the prism mounting frame 41 is slidably connected with the guide rail 6. Two sides of the base 1 are respectively provided with a fixing piece 9 with an L-shaped cross section, and the guide rail 6 is arranged at the bending part of the fixing piece 9 and used for fixing the guide rail 6.
Working principle: the initial working positions of the upper prism 21 and the lower prism 22 are center-to-center. When in operation, the stepper motor 32 drives the screw rod 31 through the coupler 35, so that the prism mounting frame 5 and the upper prism 21 start from the central initial position and slide up and down in a bidirectional manner along the direction of the inclined plane, and the air gap interval between the upper prism and the lower prism is kept unchanged during sliding. At this time, the total thickness of the upper prism 21 and the lower prism 22 is continuously changed, corresponding to parallel plates of different thicknesses, thereby realizing a focusing range of plus or minus 0.8 mm.
As shown in fig. 7, θ is the wedge angle of the single wedge prism, h is the center thickness of the single wedge prism, Δh is the amount of change in the center thickness of the wedge prism, and n is the glass refractive index of the wedge prism. When the wedge prism moves along the inclined plane, the image plane is shifted by an axial (here paraxial) amount Δf of about:
Δf＝Δh(1-1/n)
by the formula, when the minimum stepping of the precision mechanical transmission mechanism is 12.5um, the focusing amount of the wedge prism can reach 1um.
The above examples are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solution of the present invention should fall within the scope of protection defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (3)
1. A high accuracy focusing device for in direct-write lithography encapsulation model, its characterized in that: the novel optical fiber lens comprises a base (1), a prism device and a transmission mechanism, wherein the prism device comprises an upper prism (21) and a lower prism (22) which are in sliding fit with each other, a gap is reserved between the upper prism (21) and the lower prism (22), a first mounting groove matched with the lower prism (22) is formed in the base (1), the transmission mechanism comprises a lead screw (31) and a motor (32) used for providing power for the lead screw (31), the upper prism (21) is in transmission connection with the lead screw (31) through a connecting bracket (4), two ends of the lead screw (31) are fixedly connected with the base (1) through a first support (33) and a second support (34), the end part of the lead screw (31) is fixedly connected with a rotating shaft of the motor (32) through a coupler (35), the motor (32) is fixedly connected with the base (1) through a mounting bracket (36), and the end part of the base (1) is provided with a displacement sensor (5);
The connecting support (4) comprises a prism mounting frame (41) and a connecting frame (42), a second mounting groove matched with the upper prism (21) in size is formed in the lower end of the prism mounting frame (41), the upper prism (21) is pressed in the second mounting groove through a first gasket (23), one end of the connecting frame (42) is fixedly connected with the prism mounting frame (41), a threaded hole matched with the screw rod (31) is formed in the other end of the connecting frame (42), and the connecting frame (42) is driven to move back and forth along the direction of the screw rod (31) through rotation of the screw rod (31);
The upper prism (21) and the prism mounting frame (41) are in an ascending wedge shape, the lower prism (22) and the base (1) are in a descending wedge shape, two sides of the base (1) are respectively provided with a roller guide rail (6), the guide rails (6) are fixedly connected with the base (1), and the prism mounting frame (41) is in sliding connection with the guide rails (6);
The displacement sensor (5) is a laser sensor, and the displacement sensor (5) is fixedly connected with the base (1) through the mounting plate (7); the stepping motor drives the screw rod through the coupler, so that the prism mounting frame and the upper prism start from the central initial position and slide up and down in a bidirectional manner along the direction of the inclined plane, and the air gap interval between the upper prism and the lower prism is kept unchanged during sliding.
2. The high precision focusing apparatus for use in a direct write lithography packaging machine as claimed in claim 1, wherein: the two sides of the base (1) are respectively provided with a fixing piece (9) with an L-shaped cross section, and the guide rail (6) is arranged on the fixing piece (9).
3. The high precision focusing apparatus for use in a direct write lithography packaging machine as claimed in claim 1, wherein: the lower prism (22) is pressed in the first mounting groove through a second gasket (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810226366.9A CN108279470B (en) | 2018-03-19 | 2018-03-19 | High-precision focusing device for direct-writing photoetching packaging machine type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810226366.9A CN108279470B (en) | 2018-03-19 | 2018-03-19 | High-precision focusing device for direct-writing photoetching packaging machine type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108279470A CN108279470A (en) | 2018-07-13 |
| CN108279470B true CN108279470B (en) | 2024-06-14 |
Family
ID=62810003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810226366.9A Active CN108279470B (en) | 2018-03-19 | 2018-03-19 | High-precision focusing device for direct-writing photoetching packaging machine type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108279470B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103488062A (en) * | 2013-10-14 | 2014-01-01 | 天津芯硕精密机械有限公司 | Wedge-shaped prism focusing device capable of bidirectionally sliding |
| CN204989751U (en) * | 2015-09-09 | 2016-01-20 | 合肥芯碁微电子装备有限公司 | A focusing device for having system is directly write to mask lithography |
| CN208172348U (en) * | 2018-03-19 | 2018-11-30 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device in direct-write photoetching encapsulation type |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1482076A (en) * | 1974-10-15 | 1977-08-03 | Secr Defence | Focusing of optical systems |
| JP2007047561A (en) * | 2005-08-11 | 2007-02-22 | Fujifilm Corp | Exposure apparatus |
| CN202975473U (en) * | 2012-11-08 | 2013-06-05 | 中国电子科技集团公司第十一研究所 | Optical focal plane compensating device based on three wedge prisms |
| CN104570624A (en) * | 2014-09-28 | 2015-04-29 | 江苏影速光电技术有限公司 | Focusing system for laser direct writing type lithography machine and control method thereof |
-
2018
- 2018-03-19 CN CN201810226366.9A patent/CN108279470B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103488062A (en) * | 2013-10-14 | 2014-01-01 | 天津芯硕精密机械有限公司 | Wedge-shaped prism focusing device capable of bidirectionally sliding |
| CN204989751U (en) * | 2015-09-09 | 2016-01-20 | 合肥芯碁微电子装备有限公司 | A focusing device for having system is directly write to mask lithography |
| CN208172348U (en) * | 2018-03-19 | 2018-11-30 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device in direct-write photoetching encapsulation type |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108279470A (en) | 2018-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105203304A (en) | Optical bench for measuring focus length through magnification method | |
| CN108663197A (en) | A kind of small-sized lens detecting device and its detection method | |
| CN104964626A (en) | CCD vision-based grating type three-class metal linear scale standard measuring device | |
| CN205067059U (en) | Optical bench of focus is surveyed to magnifying power method | |
| CN108279470B (en) | High-precision focusing device for direct-writing photoetching packaging machine type | |
| CN102878933B (en) | Comparator based on white light interference positioning principle and detection method thereof | |
| CN105841617A (en) | Confocal common-imaging alignment micro assembling system and calibration method | |
| CN208172348U (en) | A kind of high-precision focusing device in direct-write photoetching encapsulation type | |
| CN114636362A (en) | Calibration device for three-equal-standard metal line ruler | |
| CN108534621A (en) | A kind of glass linear scale self-checking device based on machine vision | |
| CN212364686U (en) | High-precision focusing lens group | |
| CN109985825A (en) | A kind of LED wafer automatic fraction collector silicon wafer workbench | |
| CN210318185U (en) | Novel precision rolling linear guide device | |
| CN208282704U (en) | A kind of glass linear scale self-checking device based on machine vision | |
| CN104236485B (en) | Straightness measuring device | |
| JP6941695B2 (en) | Optical path correction device | |
| CN217445439U (en) | double-CCD electric focusing device | |
| CN205720830U (en) | A kind of lens centering machine | |
| CN114608454A (en) | High-precision AOI (automatic optical inspection) online detection overall equipment | |
| CN114719788B (en) | Guide rail angle error measurement method based on standard flat crystal and self-alignment value instrument | |
| CN215491538U (en) | Continuous zooming butt-joint type measuring mechanism | |
| RU2377615C1 (en) | Device for optical recording diffraction structures | |
| CN217222168U (en) | Pre-dispensing mechanism for optical filter surface mounting | |
| CN218120906U (en) | Full-automatic image measuring instrument for detecting tooth profile of synchronous wheel | |
| CN214641009U (en) | Z-axis adjusting device of 3D dynamic laser marking machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: Two, H2 building, No. 2800, Wangjiang Industrial Park, 230088 Wangjiang West Road, hi tech Zone, Anhui, Hefei, 533 Applicant after: Hefei Xinqi microelectronics equipment Co.,Ltd. Address before: Two, H2 building, No. 2800, Wangjiang Industrial Park, 230088 Wangjiang West Road, hi tech Zone, Anhui, Hefei, 533 Applicant before: HEFEI XINQI MICROELECTRONIC EQUIPMENT Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |