CN108267930A - A kind of curing nano imprinting apparatus - Google Patents
A kind of curing nano imprinting apparatus Download PDFInfo
- Publication number
- CN108267930A CN108267930A CN201810046199.XA CN201810046199A CN108267930A CN 108267930 A CN108267930 A CN 108267930A CN 201810046199 A CN201810046199 A CN 201810046199A CN 108267930 A CN108267930 A CN 108267930A
- Authority
- CN
- China
- Prior art keywords
- coining
- light
- imprinting apparatus
- nano imprinting
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000007711 solidification Methods 0.000 abstract description 2
- 230000008023 solidification Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Extensible Doors And Revolving Doors (AREA)
Abstract
A kind of curing nano imprinting apparatus, including roller platen, pedestal erecting bed and coining manipulation room, the rotation axis of the roller platen is rotatablely connected with telescopic device, the telescopic device is connect with the top of the coining manipulation room, the pedestal erecting bed is set to below the roller platen, the delivery track for conveying base plate to the pedestal erecting bed is provided in the coining manipulation room, the uitraviolet intensity only in the coining manipulation room is provided on the coining manipulation room and is less than the automatically-controlled door just opened during 50W/ ㎡, described one inlet port of automatically-controlled door is only set on the coining manipulation room.The advantages of present invention is uniform by possessing curing, and solidification effect is good, and processing safety is high.
Description
Technical field
The present invention relates to nano-imprinting device technical fields, and in particular to a kind of curing nano imprinting apparatus.
Background technology
Curing process is very crucial step in nanometer embossing, and existing curing mode is the side only with heating
Formula heats the substrate, and then so that nano impression adhesive curing, the efficiency of this mode is very low, safety is poor.
Invention content
The object of the present invention is to provide a kind of curing nano imprinting apparatus, and the present invention is by using the mode of ultraviolet light to base
Plate carries out coining adhesive curing, so as to promote safety and curing efficiency.
The present invention above-mentioned technical purpose technical scheme is that：A kind of curing nano coining dress
It puts, including roller platen, pedestal erecting bed and coining manipulation room, rotation axis and the telescopic device rotation of the roller platen connect
It connecing, the telescopic device is connect with the top of the coining manipulation room, and the pedestal erecting bed is set to below the roller platen,
The delivery track for conveying base plate to the pedestal erecting bed, the coining manipulation room are provided in the coining manipulation room
On be provided with when only in coining manipulation room uitraviolet intensity is less than 50W/ ㎡ the just automatically-controlled door of unlatching, the coining manipulation
Described one inlet port of automatically-controlled door is only set on room.
As a preference of the present invention, the roller platen includes the interior roller core affixed with the rotation axis, the interior roller core
Outside transparent coining cover body is rotatably connected to by angular adjustment ring, towards on the interior roller core side in the coining cover
There is light distribution structure, ultraviolet light LED is provided on the outside of the interior roller core.
As a preference of the present invention, the light distribution structure includes collecting light distribution bowl and wide-angle light-distribution bowl, it is described
The light distribution bowl that collects be arranged at intervals with the wide-angle light-distribution bowl.
As a preference of the present invention, the area of the light output end for collecting light distribution bowl is less than the wide-angle light-distribution bowl
The half of the area of light output end.
As a preference of the present invention, the light-emitting angle for collecting light distribution bowl is 20 °~30 °；The wide-angle light-distribution bowl
Light-emitting angle be 100 °~150 °.
As a preference of the present invention, the transparent coining cover body is made of quartz material, surface is provided with to imprint
Coining lines.
As a preference of the present invention, the angular adjustment ring includes the swivel becket for being set to the interior roller core both ends, institute
Outside and the transparent coining cover body for stating swivel becket are affixed, and gear ring portion, the gear are provided on the inside of the swivel becket
The turning end of servo motor of the ring portion with being set on the interior roller core engages.
As a preference of the present invention, the automatically-controlled door includes door body, mobile device, controller and uitraviolet intensity inspection
Instrument is surveyed, the controller is used to receive the detection parameters of the ultraviolet photometric detector, and the controller is only when detection is joined
Number controls the moving device action to open the door body when being less than 50W/ ㎡.
As a preference of the present invention, being provided with electromagnetic door lock on the coining manipulation room, received when the controller
When detection parameters are more than 50W/ ㎡, the electromagnetic door lock locks the door body.
As a preference of the present invention, the mobile device is air-leg, the door body is led to the coining manipulation room
Cross sliding rail connection, the air-leg is fixed on the coining manipulation room, the telescopic end of the air-leg with it is described
Door body connects.
In conclusion the present invention has the advantages that：
The advantages of present invention is uniform by possessing curing, and solidification effect is good, and processing safety is high.
Description of the drawings
Fig. 1 is the structure diagram of the embodiment of the present invention；
In figure：
1- coining manipulations room；2- pedestal erecting beds；3- roller platens；4- telescopic devices；5- automatically-controlled doors；3- rotation axis；3-1-
Interior roller core；3-3- angular adjustment rings；7- light distribution structures；8- ultraviolet lights LED；7-1- collects light distribution bowl；7-2- wide-angle light-distribution bowls；3-
3-1- swivel beckets；3-3-2- gear ring portions；3-3-3- servo motors；5-1- door body；5-2- mobile devices；5-3- controllers；5-
4- ultraviolet photometric detectors；9- electromagnetic door locks；10- sliding rails.
Specific embodiment
The present invention is described in further detail below in conjunction with attached drawing.
As shown in Figure 1, the embodiment of the present invention includes roller platen 3, pedestal erecting bed 2 and coining manipulation room 1, roller platen 3
Rotation axis 6 be rotatablely connected with telescopic device 4, telescopic device 4 is connect with the top of coining manipulation room 1, and pedestal erecting bed 2 is set
In 3 lower section of roller platen, the delivery track 11 for conveying base plate to pedestal erecting bed 2, coining are provided in coining manipulation room 1
The uitraviolet intensity only in coining manipulation room 1 is provided on operating room 1 and is less than the automatically-controlled door 5 just opened during 50W/ ㎡, coining behaviour
Make only to set 5 one inlet ports of automatically-controlled door on room 1.
Roller platen 3 includes the interior roller core 3-1 affixed with rotation axis 6, and the outside of interior roller core 3-1 passes through angular adjustment ring 3-3
It is rotatably connected to transparent coining cover body 3-2, towards having light distribution structure 7 on interior roller core 3-1 sides in coining cover, interior roller core 3-1's
Outside is provided with ultraviolet light LED8.Light distribution structure 7 includes collecting light distribution bowl 7-1 and wide-angle light-distribution bowl 7-2, collects light distribution bowl 7-1
It is arranged at intervals with wide-angle light-distribution bowl 7-2.The area for collecting the light output end of light distribution bowl 7-1 is less than the light extraction of wide-angle light-distribution bowl 7-2
The half of the area of end face.The light-emitting angle for collecting light distribution bowl 7-1 is 20 °~30 °；The beam angle of wide-angle light-distribution bowl 7-2
Spend is 100 °~150 °.Transparent coining cover body 3-2 is made of quartz material, and surface is provided with the coining lines for coining.Angle
Degree regulation ring 3-3 includes the swivel becket 3-3-1 for being set to interior roller core 3-1 both ends, and the outside of swivel becket 3-3-1 is covered with transparent coining
Body 3-2 is affixed, and gear ring portion 3-3-2, gear ring portion 3-3-2 are provided on the inside of swivel becket 3-3-1 and is set to interior roller core 3-1
On servo motor 3-3-3 turning end engagement.
Automatically-controlled door 5 includes door body 5-1, mobile device 5-2, controller 5-3 and ultraviolet photometric detector 5-4, control
Device 5-3 is used to receive the detection parameters of ultraviolet photometric detector 5-4, and controller 5-3 is only when detection parameters are less than 50W/ ㎡
Moving device action is controlled to open door body 5-1.Electromagnetic door lock 9 is provided on coining manipulation room 1, when the inspection that controller 5-3 is received
When surveying parameter more than 50W/ ㎡, electromagnetic door lock 9 locks door body 5-1.Mobile device 5-2 is air-leg, and door body 5-1 is grasped with coining
Make room 1 to connect by sliding rail 10, air-leg is fixed on coining manipulation room 1, telescopic end and the door body 5-1 of air-leg
Connection.
This specific embodiment is only explanation of the invention, is not limitation of the present invention, people in the art
Member can as needed make the present embodiment the modification of no creative contribution after this specification is read, but as long as at this
It is all protected in the right of invention by Patent Law.
Claims (10)
1. a kind of curing nano imprinting apparatus, it is characterised in that：Including roller platen (3), pedestal erecting bed (2) and coining manipulation
Room (1), rotation axis (6) and the telescopic device (4) of the roller platen (3) are rotatablely connected, the telescopic device (4) and the pressure
The top connection of operating room (1) is printed, the pedestal erecting bed (2) is set to below the roller platen (3), the coining manipulation room
(1) delivery track (11) for conveying base plate to the pedestal erecting bed (2), the coining manipulation room (1) are provided in
On be provided with only the interior uitraviolet intensity of the coining manipulation room (1) be less than 50W/ ㎡ when just unlatching automatically-controlled door (5), the pressure
Described (5) inlet ports of automatically-controlled door are only set on print operating room (1).
2. a kind of curing nano imprinting apparatus according to claim 1, it is characterised in that：The roller platen (3) includes
The interior roller core (3-1) affixed with the rotation axis (6), the outside of the interior roller core (3-1) are rotated by angular adjustment ring (3-3)
Transparent coining cover body (3-2) is connected with, towards having light distribution structure (7) on interior roller core (3-1) side in the coining cover,
Ultraviolet light LED (8) is provided on the outside of the interior roller core (3-1).
3. a kind of curing nano imprinting apparatus according to claim 2, it is characterised in that：The light distribution structure
(7) including collecting light distribution bowl (7-1) and wide-angle light-distribution bowl (7-2), described collects light distribution bowl (7-1) and the wide-angle light-distribution
Bowl (7-2) is arranged at intervals.
4. a kind of curing nano imprinting apparatus according to claim 3, it is characterised in that：Described collects light distribution bowl (7-
1) area of light output end is less than the half of the area of the light output end of the wide-angle light-distribution bowl (7-2).
5. a kind of curing nano imprinting apparatus according to claim 4, it is characterised in that：Described collects light distribution bowl (7-
1) light-emitting angle is 20 °~30 °；The light-emitting angle of the wide-angle light-distribution bowl (7-2) is 100 °~150 °.
6. a kind of curing nano imprinting apparatus according to claim 2, it is characterised in that：The transparent coining cover body
(3-2) is made of quartz material, and surface is provided with the coining lines for coining.
7. a kind of curing nano imprinting apparatus according to claim 2, it is characterised in that：Angular adjustment ring (the 3-
3) including being set to the swivel becket (3-3-1) at interior roller core (3-1) both ends, the outside of the swivel becket (3-3-1) with it is described
Transparent coining cover body (3-2) is affixed, and gear ring portion (3-3-2), the gear ring are provided on the inside of the swivel becket (3-3-1)
The turning end of servo motor (3-3-3) of the portion (3-3-2) with being set on the interior roller core (3-1) engages.
8. a kind of curing nano imprinting apparatus according to claim 1, it is characterised in that：The automatically-controlled door (5) includes
Door body (5-1), mobile device (5-2), controller (5-3) and ultraviolet photometric detector (5-4), the controller (5-
3) for receiving the detection parameters of the ultraviolet photometric detector (5-4), the controller (5-3) is only when detection parameters are less than
The moving device action is controlled to open the door body (5-1) during 50W/ ㎡.
9. a kind of curing nano imprinting apparatus according to claim 8, it is characterised in that：On the coining manipulation room (1)
Electromagnetic door lock (9) is provided with, when the detection parameters that the controller (5-3) receives are more than 50W/ ㎡, the electromagnetic door lock
(9) door body (5-1) is locked.
10. a kind of curing nano imprinting apparatus according to claim 8, it is characterised in that：The mobile device (5-2)
For air-leg, the door body (5-1) is connect with the coining manipulation room (1) by sliding rail (10), the air-leg
It is fixed on the coining manipulation room (1), the telescopic end of the air-leg is connect with the door body (5-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810046199.XA CN108267930B (en) | 2018-01-17 | 2018-01-17 | Solidified nano-imprinting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810046199.XA CN108267930B (en) | 2018-01-17 | 2018-01-17 | Solidified nano-imprinting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108267930A true CN108267930A (en) | 2018-07-10 |
| CN108267930B CN108267930B (en) | 2020-08-18 |
Family
ID=62775934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810046199.XA Expired - Fee Related CN108267930B (en) | 2018-01-17 | 2018-01-17 | Solidified nano-imprinting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108267930B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024052217A1 (en) * | 2022-09-07 | 2024-03-14 | Jfl-Materials Gmbh | Method and apparatus for curing uv varnish |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101852388A (en) * | 2010-06-23 | 2010-10-06 | 深圳市九洲光电科技有限公司 | Wide-angle light-distribution lens for LEDs and application thereof |
| CN102687239A (en) * | 2009-10-28 | 2012-09-19 | 韩国机械研究院 | Roll imprinting apparatus |
| CN103400534A (en) * | 2013-08-16 | 2013-11-20 | 青岛博纳光电装备有限公司 | Idler wheel die for rolling type nanometer imprinting |
| CN203498273U (en) * | 2013-10-15 | 2014-03-26 | 吕方明 | High-efficiency organic fertilizer fermentation machine |
| CN204925614U (en) * | 2015-10-10 | 2015-12-30 | 兰红波 | Graphical device is received a little to large tracts of land |
| CN205427216U (en) * | 2015-12-17 | 2016-08-03 | 宁波惠之星新材料科技有限公司 | A roller platen and coating equipment for preparing ultra -violet curing coating |
| CN206057790U (en) * | 2016-08-25 | 2017-03-29 | 苏州光舵微纳科技股份有限公司 | A kind of soft imprinting apparatus of roller ultraviolet |
| CN106914392A (en) * | 2017-05-09 | 2017-07-04 | 宁波视睿迪光电有限公司 | A kind of UV curing and 3D display solidification equipments |
| CN206497075U (en) * | 2017-01-17 | 2017-09-15 | 湖南机电职业技术学院 | A kind of multiple tube ultrasonic examination lathe |
-
2018
- 2018-01-17 CN CN201810046199.XA patent/CN108267930B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102687239A (en) * | 2009-10-28 | 2012-09-19 | 韩国机械研究院 | Roll imprinting apparatus |
| CN101852388A (en) * | 2010-06-23 | 2010-10-06 | 深圳市九洲光电科技有限公司 | Wide-angle light-distribution lens for LEDs and application thereof |
| CN103400534A (en) * | 2013-08-16 | 2013-11-20 | 青岛博纳光电装备有限公司 | Idler wheel die for rolling type nanometer imprinting |
| CN203498273U (en) * | 2013-10-15 | 2014-03-26 | 吕方明 | High-efficiency organic fertilizer fermentation machine |
| CN204925614U (en) * | 2015-10-10 | 2015-12-30 | 兰红波 | Graphical device is received a little to large tracts of land |
| CN205427216U (en) * | 2015-12-17 | 2016-08-03 | 宁波惠之星新材料科技有限公司 | A roller platen and coating equipment for preparing ultra -violet curing coating |
| CN206057790U (en) * | 2016-08-25 | 2017-03-29 | 苏州光舵微纳科技股份有限公司 | A kind of soft imprinting apparatus of roller ultraviolet |
| CN206497075U (en) * | 2017-01-17 | 2017-09-15 | 湖南机电职业技术学院 | A kind of multiple tube ultrasonic examination lathe |
| CN106914392A (en) * | 2017-05-09 | 2017-07-04 | 宁波视睿迪光电有限公司 | A kind of UV curing and 3D display solidification equipments |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024052217A1 (en) * | 2022-09-07 | 2024-03-14 | Jfl-Materials Gmbh | Method and apparatus for curing uv varnish |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108267930B (en) | 2020-08-18 |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200818 |