CN108216697A - Cylindrical shape splashproof is shot at the target - Google Patents

Cylindrical shape splashproof is shot at the target Download PDF

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Publication number
CN108216697A
CN108216697A CN201810031016.7A CN201810031016A CN108216697A CN 108216697 A CN108216697 A CN 108216697A CN 201810031016 A CN201810031016 A CN 201810031016A CN 108216697 A CN108216697 A CN 108216697A
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CN
China
Prior art keywords
pipe
cylindrical shape
target
fin
cooling tube
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Pending
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CN201810031016.7A
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Chinese (zh)
Inventor
凌桂龙
李晶华
夏勇
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Beihang University
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Beihang University
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Priority to CN201810031016.7A priority Critical patent/CN108216697A/en
Publication of CN108216697A publication Critical patent/CN108216697A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B64AIRCRAFT; AVIATION; COSMONAUTICS
    • B64GCOSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G7/00Simulating cosmonautic conditions, e.g. for conditioning crews
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B64AIRCRAFT; AVIATION; COSMONAUTICS
    • B64GCOSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G7/00Simulating cosmonautic conditions, e.g. for conditioning crews
    • B64G2007/005Space simulation vacuum chambers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0028Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
    • F28D2021/0031Radiators for recooling a coolant of cooling systems

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  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention relates to the Anti-splash systems technology fields in a kind of experiment plasma space environment simulation equipment for ground electric propulsion more particularly to a kind of cylindrical shape splashproof to shoot at the target.Cylindrical shape splashproof is shot at the target shoots at the target skeleton main body and cylindrical shape splashproof is shot at the target fins set including cylindrical shape splashproof;Cylindrical shape splashproof shoot at the target skeleton main body include first pipe, second pipe and the first cooling tube;In a ring, the first cooling tube has multiple first cooling tube;Multiple first cooling tubes are fixedly connected by the first pipe with the second pipe, form cylindrical shape, and connected between the first pipe, the second pipe and multiple first cooling tubes;The first inlet is connected on first pipe, the first liquid outlet is connected on the second pipe;Cylindrical shape splashproof fins set of shooting at the target is connect with the first cooling tube, forms columnar side wall.The invention reside in providing a kind of cylindrical shape splashproof to shoot at the target, shot at the target the technical issues of bad to the reducing effect of sputtering product and the pollutant that backflows with solving splashproof in the prior art.

Description

Cylindrical shape splashproof is shot at the target
Technical field
The present invention relates to the Anti-splash systems in a kind of experiment plasma space environment simulation equipment for ground electric propulsion Technical field is shot at the target more particularly, to a kind of cylindrical shape splashproof.
Background technology
Electric propulsion plume is mainly made of the plasma that gas ionization is formed, and includes line plasma and charge-exchange Plasma can generate spacecraft sputtering polluting effect, not only be polluted including the deposition of charged particle and neutral particle, but also have height Speed belt charged particle sputters pollution caused by the sputter etching of spacecraft surface.
In ground electric propulsion experiment, when high energy beam current ion and charge-exchange ion collision are in vacuum chamber bulkhead material table During face, as long as ion energy is more than will generate sputtering pollution by the sputtering threshold value of collision material, so as to influence grain in vacuum chamber Sub- distribution situation, seriously affects experimental result.Therefore, it is necessary to Anti-splash molsink is rationally designed.
Mainly have suitable for the design structure of the Anti-splash molecule sink structure in the large-scale vacuum cabin of electric propulsion more in the world It is flat, special-shaped two kinds of formula.But the structure that the splashproof of existing Anti-splash molecule sink structure is shot at the target is simple, and is being grown When time ground electric propulsion experiment and contaminant deposition ingredient, quality analysis, the spatial distribution of product is sputtered and pollution of backflowing Object can all impact experimental result.
Therefore, the application provides a kind of new cylindrical shape splashproof and shoots at the target regarding to the issue above.
Invention content
The purpose of the present invention is to provide a kind of cylindrical shape splashproofs to shoot at the target, and is shot at the target with solving splashproof in the prior art The technical issues of bad to the reducing effect of sputtering product and the pollutant that backflows.
Based on above-mentioned purpose, the present invention provides a kind of cylindrical shape splashproof and shoots at the target, and shoots at the target skeleton main body including cylindrical shape splashproof It shoots at the target fins set with cylindrical shape splashproof;
The cylindrical shape splashproof shoot at the target skeleton main body include first pipe, second pipe and the first cooling tube;
In a ring, and first cooling tube has multiple, the axis of multiple first cooling tubes to first cooling tube Direction overlaps;
Multiple first cooling tubes are fixedly connected by the described first pipe with second pipe, form cylindrical shape, and institute It states and is connected between the first pipe, second pipe and multiple first cooling tubes;
The first inlet is connected on first pipe, the first liquid outlet is connected on second pipe;
Cylindrical shape splashproof fins set of shooting at the target is connect with first cooling tube, forms the columnar side wall.
In any of the above-described technical solution, further, the axis direction of the first pipe of the present invention and second pipe It is parallel;
First pipe and second pipe are connected to the both ends of first cooling tube radially.
In any of the above-described technical solution, further, cylindrical shape splashproof of the present invention is shot at the target as horizontal type structure;
First pipe is positioned at the bottom end of second pipe.
In any of the above-described technical solution, further, multiple first cooling tubes of the present invention are along first pipe Axis direction is uniformly arranged.
In any of the above-described technical solution, further, cylindrical shape splashproof of the present invention is shot at the target, and it is total to further include feed liquor Pipe;
The feed liquor house steward is set to the side of first pipe far from second pipe, and the axis of the feed liquor house steward Direction is parallel with the axis direction of first pipe;
Along the columnar axis direction, the cylindrical shape has corresponding first end and second end;
The first cooling tube of the close first end is the first end pipe in multiple first cooling tubes, close to described second First cooling tube at end is the second end pipe;
First pipe is connected close to the position of first end pipe with the feed liquor house steward, and first pipe is close to institute The position for stating the second end pipe is connected with the feed liquor house steward;
First inlet is connected in the feed liquor house steward.
In any of the above-described technical solution, further, feed liquor house steward of the present invention by the first hose be communicated with into Liquid pipe;
Second pipe is communicated with outlet tube by the second hose;
First inlet is provided on the inlet tube;The first liquid outlet is provided on the outlet tube.
In any of the above-described technical solution, further, cylindrical shape splashproof of the present invention shoot at the target fins set include first Fin and the second fin;
Along the length direction of first fin, the first fin head and the tail, which mutually enclose, to be connect to form ring body;Along second wing The length direction of piece, the second fin head and the tail, which mutually enclose, to be connect to form ring body;
Along the axis direction of first cooling tube, one end of first cooling tube is connected with first fin, separately One end is connected with second fin, and the axis direction and first cooling tube of first fin and second fin Axis direction overlap;
Along the columnar axis direction, first fin and second fin are arranged at intervals successively;
It is matched between first fin and second fin between adjacent first cooling tube, with described in order Cylindrical shape splashproof shoot at the target fins set formation the columnar side wall be close side wall.
In any of the above-described technical solution, further, the first fin of the present invention is connected to first cooling tube Side far from axis;
Second fin is connected to the side that first cooling tube leans on axial ray.
In any of the above-described technical solution, further, axis direction of the present invention along first fin, described first Fin includes corresponding first connecting pin and second connection end, and first connecting pin is connect with first cooling tube, institute It is arc-shaped to state the first connecting pin, and corresponding with first cooling tube;And/or the axis direction along second fin, institute It states the second fin and includes corresponding third connecting pin and the 4th connecting pin, the third connecting pin connects with first cooling tube It connects, the third connecting pin is arc-shaped, and corresponding with first cooling tube;
The second connection end is bent to the direction of the axis close to first fin, and the 4th connecting pin is to separate The direction bending of the axis of second fin, and the second connection end is corresponding with the 4th connecting pin.
In any of the above-described technical solution, further, cylindrical shape splashproof of the present invention is shot at the target, and further includes cylindrical shape Splashproof is shot at the target clad;
Cylindrical shape splashproof clad of shooting at the target is set to the cylindrical shape splashproof and shoots at the target the outside of fins set;
The cylindrical shape splashproof shoot at the target clad material be carbon fiber felt.
Using above-mentioned technical proposal, the present invention has the advantages that:
In use, by connecting coolant circulating system between the first inlet and the first liquid outlet, to enable cooling agent Enter the first pipe from the first inlet, due to being connected between the first pipe, the second pipe and the first cooling tube, cooling agent is then by the One cooling tube discharges from the first liquid outlet of the second pipe, completes the one cycle process of cooling agent.Cooling agent is in cyclic process In, the cylindrical shape splashproof being connect with the first cooling tube shoots at the target fins set also by heat transfer cooling.In ground electric propulsion experiment, by circle Tubular splashproof, which is shot at the target, to be put into vacuum chamber, and the particle with higher-energy is sputtered onto cylindrical shape splashproof and shoots at the target fins set in vacuum chamber On, cylindrical shape splashproof shoots at the target fins set to particle progress cooling down effect, to reduce the energy of particle, so as to reduce particle Sputtering rate, to reduce the destruction to vacuum chamber;On the other hand, cylindrical shape splashproof with a lower temperature shoot at the target fins set can Fight each other to a certain extent cylindrical shape splashproof shoot at the target fins set surface particle carry out cryogenic absorption, effectively reduce sputtering product Content and distribution.
In conclusion cylindrical shape splashproof is shot at the target, fins set reduces sputtering of the ion beam to bulkhead cylindrical section, reduces sputtering production Iron content in object.Cryogenic absorption can be carried out to the pollutant that backflows simultaneously, reduce the pollutant load that backflows, guarantee test effect Fruit.It solves splashproof in the prior art and shoots at the target and the bad technology of reducing effect of sputtering product and the pollutant that backflows is asked Topic.
The additional aspect and advantage of the present invention will become practice apparent or by the present invention in following description section Recognize.
Description of the drawings
It in order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair The restriction of range, for those of ordinary skill in the art, without creative efforts, can also be according to this A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structure diagram that cylindrical shape splashproof provided in an embodiment of the present invention is shot at the target;
Fig. 2 is the partial enlarged view of part A that cylindrical shape splashproof shown in FIG. 1 is shot at the target;
Fig. 3 is the sectional view that cylindrical shape splashproof provided in an embodiment of the present invention is shot at the target;
Fig. 4 is the partial enlarged view of part B that cylindrical shape splashproof shown in Fig. 3 is shot at the target;
Fig. 5 is that the shoot at the target structure of skeleton main body of the cylindrical shape splashproof shot at the target of cylindrical shape splashproof provided in an embodiment of the present invention is shown It is intended to;
Fig. 6 is the part of the second fin that cylindrical shape splashproof provided in an embodiment of the present invention is shot at the target and the connection of the first cooling tube Structure diagram.
Icon:101- first is managed;102- second is managed;The first cooling tubes of 103-;111- feed liquor house stewards;112- elbows;113- Straight tube;The first hoses of 121-;The second hoses of 122-;131- inlet tubes;132- outlet tubes;The first fins of 140-;The second wings of 150- Piece;1501- thirds connecting pin;The 4th connecting pins of 1502-.
Specific embodiment
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill Personnel's all other embodiments obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", "left", "right", " vertical ", The orientation or position relationship of the instructions such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to Convenient for the description present invention and simplify description rather than instruction or imply signified device or element must have specific orientation, With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ", " third " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected;It can To be mechanical connection or be electrically connected;It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in invention.
Embodiment one
It to shoot at the target referring to shown in Fig. 1-Fig. 6, the present embodiment provides a kind of cylindrical shape splashproofs, shoot at the target skeleton including cylindrical shape splashproof Main body and cylindrical shape splashproof are shot at the target fins set;
The cylindrical shape splashproof shoot at the target skeleton main body include the first pipe 101, the second pipe 102 and the first cooling tube 103;
Shown in Figure 5, in a ring, and first cooling tube 103 has multiple, Duo Gesuo to first cooling tube 103 The axis direction for stating the first cooling tube 103 overlaps;
Multiple first cooling tubes are fixedly connected by first pipe 101 with second pipe 102, form cylinder Shape, and be connected between first pipe 101, second pipe 102 and multiple first cooling tubes 103;
The first inlet is connected on first pipe, the first liquid outlet is connected on second pipe;
Cylindrical shape splashproof fins set of shooting at the target is connect with first cooling tube, forms the columnar side wall.
It should be noted that the axis direction of the first cooling tube 103, that is, columnar axis direction.
Optionally, by being welded to connect between the first cooling tube and the first pipe, the first cooling tube and the second pipe;The cylinder Shape splashproof shoot at the target fins set with first cooling tube by being welded to connect.
In use, by connecting coolant circulating system between the first inlet and the first liquid outlet, to enable cooling agent Enter the first pipe from the first inlet, due to being connected between the first pipe, the second pipe and the first cooling tube, cooling agent is then by the One cooling tube discharges from the first liquid outlet of the second pipe, completes the one cycle process of cooling agent.Cooling agent is in cyclic process In, the cylindrical shape splashproof being connect with the first cooling tube shoots at the target fins set also by heat transfer cooling.
In ground electric propulsion experiment, cylindrical shape splashproof is shot at the target and is put into vacuum chamber, there is higher-energy in vacuum chamber Particle be sputtered onto cylindrical shape splashproof and shoot at the target in fins set, cylindrical shape splashproof fins set of shooting at the target carries out cooling down work to particle With to reduce the energy of particle, so as to reduce the sputtering rate of particle, to reduce the destruction to vacuum chamber;On the other hand, have The cylindrical shape splashproof of lower temperature fins set of shooting at the target can fight each other and shoots at the target fins set surface in cylindrical shape splashproof to a certain extent Particle carry out cryogenic absorption, effectively reduce sputtering product content and distribution.
In conclusion cylindrical shape splashproof is shot at the target, fins set reduces sputtering of the ion beam to bulkhead cylindrical section, reduces sputtering production Iron content in object.Cryogenic absorption can be carried out to the pollutant that backflows simultaneously, reduce the pollutant load that backflows, guarantee test effect Fruit.It solves splashproof in the prior art and shoots at the target and the bad technology of reducing effect of sputtering product and the pollutant that backflows is asked Topic.
Preferably, shown in Figure 5, first pipe 101 is parallel with the axis direction of second pipe 102;
First pipe and second pipe are connected to the both ends of first cooling tube radially.
It could enter the second pipe so as to enable to pass through after entire first cooling tube from the cooling agent that the first pipe enters, from And discharge, it, can be to grain in ground electric propulsion experiment with increase to extend flow path of the cooling agent in the first cooling tube The film-cooled heat of son, so as to enhance the Anti-splash ability to particle.
Preferably, the cylindrical shape splashproof is shot at the target as horizontal type structure;
First pipe is positioned at the bottom end of second pipe.
The cylindrical shape splashproof is shot at the target as horizontal type structure, i.e.,:In use, columnar axis direction is horizontal.
Cooling agent enters from the first inlet, is discharged from the first liquid outlet, that is, cooling agent is bottom in and top out, cooling agent When cylindrical shape splashproof shoots at the target the main body-internal-circulation of skeleton, enter the first cooling tube from the first pipe, cooling agent under the effect of gravity, only There is the bottom end for filling up the first cooling tube just can gradually go up, until the first cooling tube is completely filled out, can just be arranged from the second pipe Go out, cooling to particle, adsorption area are further increased, enhances the Anti-splash ability to particle.
Preferably, multiple first cooling tubes are uniformly arranged along the axis direction of first pipe.
It is shot at the target the uniformity of temperature with improving entire cylindrical shape splashproof.
Preferably, the cylindrical shape splashproof described in the present embodiment is shot at the target, and further includes feed liquor house steward 111;
The feed liquor house steward 111 is set to side of first pipe 101 far from second pipe 102, and the feed liquor The axis direction of manifold 111 is parallel with the axis direction of first pipe 101;
Along the columnar axis direction, the cylindrical shape has corresponding first end and second end;
The first cooling tube of the close first end is the first end pipe in multiple first cooling tubes, close to described second First cooling tube at end is the second end pipe;
First pipe is connected close to the position of first end pipe with the feed liquor house steward, and first pipe is close to institute The position for stating the second end pipe is connected with the feed liquor house steward;
First inlet is connected in the feed liquor house steward.
That is, the cooling agent being discharged into from the first inlet is flowed along feed liquor house steward, and respectively from the first pipe close to first end Position, the first pipe be discharged into the first pipe, and then be discharged into the first end pipe and the second end pipe close to the position of second end, enable cooling agent edge The both ends of cylindrical shape in the axial direction enable the both ends temperature that cylindrical shape splashproof is shot at the target uniform to intermediate flow, and improve multiple the Speed is filled up in filling up rate and improving for the cooling agent of one cooling tube, realizes fast cooling, reduces the shadow that cryogen boil-off is brought It rings.
In addition, the axis direction due to multiple first cooling tubes overlaps, the first pipe, the axis direction of the second pipe are equal It is parallel with the axis direction of cylinder, due to columnar axis direction level, realize the axis direction of the first pipe and the second pipe Level, coolant level, which enters cylindrical shape splashproof, shoots at the target and skeleton main body and horizontal shoots at the target skeleton main body row from cylindrical shape splashproof Go out, further improve the both ends temperature uniformity that cylindrical shape splashproof is shot at the target.
Optionally, along the axis direction of feed liquor house steward, feed liquor house steward 111 includes corresponding third end and the 4th end, the Four ends are connected with first inlet, and third end passes through elbow 112 with the described first pipe close to the position of first end pipe Connection, feed liquor house steward are managed by straight tube 113 and first close to the position of second end pipe between third end and the 4th end Connection.
It should be noted that it in use, needs to seal the extra hole in the first pipe, the second pipe and feed liquor house steward It is stifled, it is normally carried out with guarantee test.
Preferably, the feed liquor house steward 111 is communicated with inlet tube 131 by the first hose 121;
Second pipe 102 is communicated with outlet tube 132 by the second hose 122;
First inlet is provided on the inlet tube;The first liquid outlet is provided on the outlet tube.
In use, the cooling agent cycle is connected between the first inlet of inlet tube and the first liquid outlet of outlet tube System.
Preferably, the first hose 121 and the second hose 122 are metal hose.
First hose and the second hose are shot at the target axial direction of the skeleton main body because of generation of expanding with heat and contract with cold for compensating cylinder type splashproof It is mobile.
Preferably, ginseng is seen figure 1 and figure 2, the cylindrical shape splashproof shoot at the target fins set include the first fin 140 and second Fin 150;
Along the length direction of first fin, the first fin head and the tail, which mutually enclose, to be connect to form ring body;Along second wing The length direction of piece, the second fin head and the tail, which mutually enclose, to be connect to form ring body;
Along the axis direction of first cooling tube, one end of first cooling tube is connected with first fin, separately One end is connected with second fin, and the axis direction and first cooling tube of first fin and second fin Axis direction overlap;
Along the columnar axis direction, first fin and second fin are arranged at intervals successively;
It is matched between first fin and second fin between adjacent first cooling tube, with described in order Cylindrical shape splashproof shoot at the target fins set formation the columnar side wall be close side wall.
Optionally, for the first fin with the first cooling tube by being welded to connect, the second fin and the first cooling tube pass through welding Connection.
The cylindrical shape splashproof shoot at the target fins set include the first fin and the second fin, so as to enable the first fin, the second wing Connection between piece and the first cooling tube more seals, and passes through and cannot adsorb to avoid particle incoming, cools down.Adjacent described first It is matched between first fin and second fin between cooling tube, the cylindrical shape splashproof to be enabled to shoot at the target fins set The columnar side wall formed is the side wall of closing, to further ensure incoming particle without direct export.
Preferably, referring to shown in Fig. 3 and Fig. 4, first fin is connected to one of first cooling tube far from axis Side;
Second fin is connected to the side that first cooling tube leans on axial ray.
In a first aspect, convenient for the connection of the first fin, the second fin and the first cooling tube, cylindrical shape Anti-splash can be facilitated The assembling of target;
Second aspect can be further ensured that the leakproofness connected between the first fin, the second fin and the first cooling tube, Incoming particle is enabled without direct export.
Preferably, shown in Figure 6, along the axis direction of first fin, first fin includes corresponding First connecting pin and second connection end, first connecting pin are connect with first cooling tube, and first connecting pin is in arc Shape, and it is corresponding with first cooling tube;And/or the axis direction along second fin 150, the second fin packet Include corresponding 1501 and the 4th connecting pin 1502 of third connecting pin, the third connecting pin 1501 and first cooling tube 103 connections, the third connecting pin is arc-shaped, and corresponding with first cooling tube;
The second connection end is bent to the direction of the axis close to first fin, and the 4th connecting pin is to separate The direction bending of the axis of second fin, and the second connection end is corresponding with the 4th connecting pin.
Specifically, along the axis direction of first fin, first fin includes corresponding first connecting pin And second connection end, first connecting pin are connect with first cooling tube, first connecting pin is arc-shaped, and with it is described First cooling tube is corresponding;
Alternatively, along the axis direction of second fin, second fin includes corresponding third connecting pin and the Four connecting pins, the third connecting pin are connect with first cooling tube, and the third connecting pin is arc-shaped, and with described first Cooling tube is corresponding;
Alternatively, along the axis direction of first fin, first fin includes corresponding first connecting pin and the Two connecting pins, first connecting pin are connect with first cooling tube, and first connecting pin is arc-shaped, and with described first Cooling tube is corresponding;And along the axis direction of second fin, second fin include corresponding third connecting pin and 4th connecting pin, the third connecting pin are connect with first cooling tube, and the third connecting pin is arc-shaped, and with described One cooling tube is corresponding;
Preferably, along the axis direction of first fin, first fin include corresponding first connecting pin and Second connection end, first connecting pin are connect with first cooling tube, and first connecting pin is arc-shaped, and with described One cooling tube is corresponding;And along the axis direction of second fin, second fin includes corresponding third connecting pin With the 4th connecting pin, the third connecting pin is connect with first cooling tube, and the third connecting pin is arc-shaped, and with it is described First cooling tube is corresponding.
First connecting pin is arc-shaped, and corresponding with first cooling tube, to enable the first connecting pin and the first cooling tube Between connection more securely, it is reliable;
The third connecting pin is arc-shaped, and corresponding with first cooling tube, to enable third connecting pin and first cold But the connection between pipe is more secured, reliable.
The second connection end is bent to the direction of the axis close to first fin, and the 4th connecting pin is to separate The direction bending of the axis of second fin, and the second connection end is corresponding with the 4th connecting pin, to improve the Leakproofness between one fin and the second fin.
Preferably, the cylindrical shape splashproof described in the present embodiment is shot at the target, and is further included cylindrical shape splashproof and is shot at the target clad;
Cylindrical shape splashproof clad of shooting at the target is set to the cylindrical shape splashproof and shoots at the target the outside of fins set;
The cylindrical shape splashproof shoot at the target clad material be carbon fiber felt.
Specifically, the cylindrical shape splashproof is shot at the target, clad is set to one of the first fin and the second fin far from axis Face.
Carbon fiber felt has highly developed microcellular structure, and the particle in access aperture can be adsorbed effectively.Meanwhile By investigation, the sputtering raste of carbon is relatively low, the result of ground electric propulsion experiment is influenced smaller.
In conclusion cylindrical shape splashproof is enabled to shoot at the target with relatively low sputtering raste, compared to light cabin without cladding situation sputtering product It is few.Meanwhile carbon felt has porous structure, and it is strong to the adsorption capacity of incoming particle, it can effectively reduce bulkhead reflection and secondary splash It penetrates.
Preferably, the cylindrical shape splashproof shoot at the target fins set material be T2 red coppers;Specifically, the first fin and second The material of fin is T2 red coppers.T2 red coppers have good conductive and heat-conductive anti-corrosion and processing performance, can weld and be brazed. Less containing the impurity for reducing electrical and thermal conductivity, micro oxygen influences the performances such as conductive and heat-conductive and processing little.
Preferably, the first pipe, the second pipe, the first cooling tube, feed liquor house steward, elbow, straight tube material be stainless steel.
Finally it should be noted that:The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that:Its according to Can so modify to the technical solution recorded in foregoing embodiments either to which part or all technical features into Row equivalent replacement;And these modifications or replacement, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution The range of scheme.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments In included certain features rather than other feature, but the combination of the feature of different embodiments means in of the invention Within the scope of and form different embodiments.For example, in claims above, embodiment claimed is appointed One of meaning mode can use in any combination.The information for being disclosed in the background technology part is merely intended to deepen to this The understanding of the general background technology of utility model, and be not construed as recognizing or imply that information composition has been in any form The prior art known in those skilled in the art.

Claims (10)

1. a kind of cylindrical shape splashproof is shot at the target, which is characterized in that is shot at the target skeleton main body and cylindrical shape Anti-splash including cylindrical shape splashproof Target fins set;
The cylindrical shape splashproof shoot at the target skeleton main body include first pipe, second pipe and the first cooling tube;
In a ring, and first cooling tube has multiple, the axis direction of multiple first cooling tubes to first cooling tube It overlaps;
Multiple first cooling tubes are fixedly connected by the described first pipe with second pipe, formation cylindrical shape, and described the It is connected between one pipe, second pipe and multiple first cooling tubes;
The first inlet is connected on first pipe, the first liquid outlet is connected on second pipe;
Cylindrical shape splashproof fins set of shooting at the target is connect with first cooling tube, forms the columnar side wall.
2. cylindrical shape splashproof according to claim 1 is shot at the target, which is characterized in that the axis of first pipe and second pipe Line direction is parallel;
First pipe and second pipe are connected to the both ends of first cooling tube radially.
3. cylindrical shape splashproof according to claim 2 is shot at the target, which is characterized in that the cylindrical shape splashproof is shot at the target as horizontal knot Structure;
First pipe is positioned at the bottom end of second pipe.
4. cylindrical shape splashproof according to claim 3 is shot at the target, which is characterized in that multiple first cooling tubes are along described The axis direction of one pipe is uniformly arranged.
5. cylindrical shape splashproof according to claim 3 is shot at the target, which is characterized in that further includes feed liquor house steward;
The feed liquor house steward is set to the side of first pipe far from second pipe, and the axis direction of the feed liquor house steward It is parallel with the axis direction of first pipe;
Along the columnar axis direction, the cylindrical shape has corresponding first end and second end;
The first cooling tube of the close first end is the first end pipe in multiple first cooling tubes, close to the second end First cooling tube is the second end pipe;
First pipe connect close to the position of first end pipe with the feed liquor house steward, and described first manages close described the The position of two end pipes is connected with the feed liquor house steward;
First inlet is connected in the feed liquor house steward.
6. cylindrical shape splashproof according to claim 5 is shot at the target, which is characterized in that the feed liquor house steward is connected by the first hose It is connected with inlet tube;
Second pipe is communicated with outlet tube by the second hose;
First inlet is provided on the inlet tube;The first liquid outlet is provided on the outlet tube.
7. cylindrical shape splashproof according to claim 1 is shot at the target, which is characterized in that the cylindrical shape splashproof is shot at the target fins set packet Include the first fin and the second fin;
Along the length direction of first fin, the first fin head and the tail, which mutually enclose, to be connect to form ring body;Along second fin Length direction, the second fin head and the tail, which mutually enclose, to be connect to form ring body;
Along the axis direction of first cooling tube, one end of first cooling tube is connected with first fin, the other end It is connected with second fin, and the axis of the axis direction and first cooling tube of first fin and second fin Line direction overlaps;
Along the columnar axis direction, first fin and second fin are arranged at intervals successively;
It is matched between first fin and second fin between adjacent first cooling tube, to enable the cylinder Shape splashproof shoot at the target fins set formation the columnar side wall be close side wall.
8. cylindrical shape splashproof according to claim 7 is shot at the target, which is characterized in that first fin is connected to described first Side of the cooling tube far from axis;
Second fin is connected to the side that first cooling tube leans on axial ray.
9. cylindrical shape splashproof according to claim 8 is shot at the target, which is characterized in that along the axis direction of first fin, First fin includes corresponding first connecting pin and second connection end, first connecting pin and first cooling tube Connection, first connecting pin is arc-shaped, and corresponding with first cooling tube;And/or the axis along second fin Direction, second fin include corresponding third connecting pin and the 4th connecting pin, the third connecting pin and described first Cooling tube connects, and the third connecting pin is arc-shaped, and corresponding with first cooling tube;
The second connection end is bent to the direction of the axis close to first fin, and the 4th connecting pin is to far from described The direction bending of the axis of second fin, and the second connection end is corresponding with the 4th connecting pin.
10. shot at the target according to claim 1-9 any one of them cylindrical shape splashproofs, which is characterized in that further include cylindrical shape splashproof It shoots at the target clad;
Cylindrical shape splashproof clad of shooting at the target is set to the cylindrical shape splashproof and shoots at the target the outside of fins set;
The cylindrical shape splashproof shoot at the target clad material be carbon fiber felt.
CN201810031016.7A 2018-01-12 2018-01-12 Cylindrical shape splashproof is shot at the target Pending CN108216697A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108801030A (en) * 2018-07-12 2018-11-13 兰州真空设备有限责任公司 Aluminium section bar is heat sink
CN109677645A (en) * 2019-01-24 2019-04-26 哈尔滨工业大学 Simulate the computer simulated plasma device and its implementation of three-dimensional asymmetric magnetic reconnection

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1091387A2 (en) * 1999-10-08 2001-04-11 Applied Materials, Inc. Coil for sputter deposition
JP2010071103A (en) * 2008-09-16 2010-04-02 Mitsubishi Electric Corp Ion engine testing device
CN202345923U (en) * 2011-10-28 2012-07-25 杭州杭氧环保成套设备有限公司 Large-sized heat sink structure for environment with low temperature and high vacuum
CN103388948A (en) * 2013-07-02 2013-11-13 上海交通大学 Liquid nitrogen and cold helium double media coupling heat sink for space environment simulation
CN103993474A (en) * 2014-04-23 2014-08-20 大连理工高邮研究院有限公司 Preparation method of silicon carbide coating on surface of hard carbon fiber felt
CN105000202A (en) * 2015-07-16 2015-10-28 兰州空间技术物理研究所 Vacuum pumping system of test equipment of ion thrusters
CN106269626A (en) * 2015-05-13 2017-01-04 盛美半导体设备(上海)有限公司 Anti-splash guard shield
US20170140906A1 (en) * 2009-09-24 2017-05-18 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Cooling water jet pack for high power rotary cathodes
CN107287882A (en) * 2017-05-05 2017-10-24 航天材料及工艺研究所 Lightening fire resistant thermally protective materials and preparation method thereof
CN107340139A (en) * 2017-06-21 2017-11-10 北京卫星环境工程研究所 The fire trial of electric propulsion Space Vehicle System level sputters target assembly

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1091387A2 (en) * 1999-10-08 2001-04-11 Applied Materials, Inc. Coil for sputter deposition
JP2010071103A (en) * 2008-09-16 2010-04-02 Mitsubishi Electric Corp Ion engine testing device
US20170140906A1 (en) * 2009-09-24 2017-05-18 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Cooling water jet pack for high power rotary cathodes
CN202345923U (en) * 2011-10-28 2012-07-25 杭州杭氧环保成套设备有限公司 Large-sized heat sink structure for environment with low temperature and high vacuum
CN103388948A (en) * 2013-07-02 2013-11-13 上海交通大学 Liquid nitrogen and cold helium double media coupling heat sink for space environment simulation
CN103993474A (en) * 2014-04-23 2014-08-20 大连理工高邮研究院有限公司 Preparation method of silicon carbide coating on surface of hard carbon fiber felt
CN106269626A (en) * 2015-05-13 2017-01-04 盛美半导体设备(上海)有限公司 Anti-splash guard shield
CN105000202A (en) * 2015-07-16 2015-10-28 兰州空间技术物理研究所 Vacuum pumping system of test equipment of ion thrusters
CN107287882A (en) * 2017-05-05 2017-10-24 航天材料及工艺研究所 Lightening fire resistant thermally protective materials and preparation method thereof
CN107340139A (en) * 2017-06-21 2017-11-10 北京卫星环境工程研究所 The fire trial of electric propulsion Space Vehicle System level sputters target assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108801030A (en) * 2018-07-12 2018-11-13 兰州真空设备有限责任公司 Aluminium section bar is heat sink
CN109677645A (en) * 2019-01-24 2019-04-26 哈尔滨工业大学 Simulate the computer simulated plasma device and its implementation of three-dimensional asymmetric magnetic reconnection
CN109677645B (en) * 2019-01-24 2021-10-22 哈尔滨工业大学 Plasma simulation device for simulating three-dimensional asymmetric magnetic reconnection and implementation method thereof

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