CN108020434B - Bottom end splashproof is shot at the target - Google Patents
Bottom end splashproof is shot at the target Download PDFInfo
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- CN108020434B CN108020434B CN201810030583.0A CN201810030583A CN108020434B CN 108020434 B CN108020434 B CN 108020434B CN 201810030583 A CN201810030583 A CN 201810030583A CN 108020434 B CN108020434 B CN 108020434B
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- pipe
- target
- bottom end
- cooling
- splashproof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0021—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for aircrafts or cosmonautics
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- Engineering & Computer Science (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of Anti-splash systems technology fields in ground electric propulsion test plasma space environment simulation equipment, shoot at the target more particularly, to a kind of bottom end splashproof.Bottom end splashproof, which is shot at the target, shoots at the target skeleton main body including bottom end splashproof and bottom end splashproof is shot at the target fins set；Bottom end splashproof shoot at the target skeleton main body include third pipe, the 4th pipe and the second cooling tube；It is connected with the second inlet on third pipe, is connected with the second liquid outlet on the 4th pipe；Second cooling tube has multiple, and multiple second cooling tubes are arranged along perpendicular to length direction interval；Multiple second cooling tubes are fixedly connected by third pipe and the 4th pipe, are connected between third pipe, the 4th pipe and multiple second cooling tubes；Splashproof fins set of shooting at the target in bottom end is connect with the second cooling tube, to block the gap between adjacent second cooling tube.The invention reside in providing a kind of bottom end splashproof to shoot at the target, solves splashproof existing in the prior art and shoot at the target the technical problem bad to the reducing effect of sputtering product and the pollutant that backflows.
Description
Technical field
The present invention relates to a kind of Anti-splash systems in ground electric propulsion test plasma space environment simulation equipment
Technical field is shot at the target more particularly, to a kind of bottom end splashproof.
Background technique
Electric propulsion plume is mainly made of the plasma that gas ionization is formed, and includes line plasma and charge-exchange
Plasma can generate sputtering polluting effect to spacecraft, not only include the deposition pollution of charged particle and neutral particle, but also have height
Speed belt charged particle sputters pollution caused by the ise of spacecraft surface.
In ground electric propulsion test, when high energy beam current ion and charge-exchange ion collision are in vacuum chamber bulkhead material table
When face, as long as ion energy, which is greater than, will generate sputtering pollution by the sputtering threshold value of collision material, to influence grain in vacuum chamber
Sub- distribution situation, seriously affects experimental result.Therefore, it is necessary to rationally design to Anti-splash molsink.
The design structure suitable for the Anti-splash molecule sink structure in the large-scale vacuum cabin of electric propulsion mainly has more in the world
It is flat, two kinds of special-shaped formula.But the structure that the splashproof of existing Anti-splash molecule sink structure is shot at the target is simple, and is being grown
When time ground electric propulsion experiment and contaminant deposition ingredient, quality analysis, the spatial distribution of product is sputtered and pollution of backflowing
Object can all impact experimental result.
Therefore, the application provides the new bottom end splashproof of one kind regarding to the issue above and shoots at the target.
Summary of the invention
The purpose of the present invention is to provide a kind of bottom end splashproofs to shoot at the target, and is shot at the target pair with solving splashproof existing in the prior art
The bad technical problem of the reducing effect of sputtering product and the pollutant that backflows.
Based on above-mentioned purpose, the present invention provides a kind of bottom end splashproof and shoots at the target, including bottom end splashproof is shot at the target skeleton main body and bottom
End splashproof is shot at the target fins set；
The bottom end splashproof shoot at the target skeleton main body include third pipe, the 4th pipe and the second cooling tube；
It is connected with the second inlet on the third pipe, is connected with the second liquid outlet on the 4th pipe；
Second cooling tube has multiple, and multiple second cooling tubes are arranged along perpendicular to length direction interval；
Multiple second cooling tubes are fixedly connected by the third pipe with the 4th pipe, and the third pipe, institute
It states and is connected between the 4th pipe and multiple second cooling tubes；
Bottom end splashproof fins set of shooting at the target is connect with second cooling tube, with block adjacent second cooling tube it
Between gap.
In any of the above-described technical solution, further, the center line of third pipe of the present invention and the 4th pipe
Center line is in arc-shaped；
The center line of the center line of the third pipe and the 4th pipe is concyclic, and the third pipe and the 4th pipe pair
Claim to be set to concyclic round both ends radially；
Second cooling tube is respectively communicated with the third pipe and the 4th pipe along the both ends of extending direction.
In any of the above-described technical solution, further, the second cooling tube of the present invention includes cooling straight tube；
The one end of the cooling straight tube in the axial direction is connected to the third pipe by the first bridge piece, and the other end passes through
Second bridge piece connection the 4th pipe；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the third pipe.
In any of the above-described technical solution, further, bottom end splashproof of the present invention is shot at the target as vertical structure；
The third pipe is located at the bottom end of the 4th pipe；
Second inlet is located at the third pipe along the middle position of extending direction；And/or second liquid outlet
Positioned at the 4th pipe along the middle position of extending direction.
In any of the above-described technical solution, further, separator tube is additionally provided on third pipe of the present invention；
The separator tube is even connected to second inlet.
In any of the above-described technical solution, further, bottom end splashproof of the present invention fins set of shooting at the target includes third wing
Piece and the 4th fin；
The one end of the cooling straight tube radially is connected with the third fin, and the other end is connected with the 4th wing
Piece；
Along the extending direction of the third pipe, the third fin and the 4th fin are successively spaced setting；
It is matched between the third fin and the 4th fin between the adjacent cooling straight tube, to enable the bottom
End splashproof shoot at the target fins set closing.
In any of the above-described technical solution, further, the present invention circular axis where the center line of the third pipe
Line direction, one end of the cooling straight tube are connected with the third fin, and the other end is connected with the 4th fin.
In any of the above-described technical solution, further, width direction of the present invention along the third fin, the third
Fin includes corresponding 5th connecting pin and the 6th connecting pin, and the 5th connecting pin is connect with the cooling straight tube, described
5th connecting pin is arc-shaped, and corresponding with the cooling straight tube；
And/or the width direction along the 4th fin, the 4th fin include corresponding 7th connecting pin and
Eight connecting pins, the 7th connecting pin are connect with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
It manages corresponding.
In any of the above-described technical solution, further, the present invention circular axis where the center line of the third pipe
Line direction, the 6th connecting pin and the 8th connecting pin are bent to two sides respectively, and the 6th connecting pin and described the
Eight connecting pins are corresponding.
In any of the above-described technical solution, it further includes bottom end splashproof that further, bottom end splashproof of the present invention, which is shot at the target,
It shoots at the target clad；
Bottom end splashproof clad of shooting at the target is set to bottom end splashproof and shoots at the target the outside of fins set；
The bottom end splashproof shoot at the target clad material be carbon fiber felt.
By adopting the above technical scheme, the invention has the following beneficial effects:
In use, by connecting coolant circulating system between the second inlet and the second liquid outlet, to enable coolant
Enter third pipe from the second inlet, due to being connected between third pipe, the 4th pipe and the second cooling tube, coolant then passes through the
Two cooling tubes are discharged from the second liquid outlet of the 4th pipe, complete the one cycle process of coolant.Coolant is in cyclic process
In, the bottom end splashproof connecting with the second cooling tube shoots at the target fins set also by heat transfer cooling.In ground electric propulsion test, by bottom end
Splashproof, which is shot at the target, to be put into vacuum chamber, and it is corresponding with the bilge to enable bottom end splashproof shoot at the target, with the particle of higher-energy in vacuum chamber
It is sputtered onto bottom end splashproof to shoot at the target in fins set, bottom end splashproof shoots at the target fins set to particle progress cooling down effect, to reduce grain
The energy of son, so that the sputtering rate of particle is reduced, to reduce the destruction to vacuum chamber；On the other hand, with a lower temperature
Bottom end splashproof shoot at the target fins set can fight each other to a certain extent bottom end splashproof shoot at the target fins set surface particle carry out low temperature
The content and distribution of sputtering product is effectively reduced in absorption.
In conclusion bottom end splashproof is shot at the target, fins set reduces sputtering of the ion beam to the bilge, reduces iron member in sputtering product
Cellulose content.Cryogenic absorption can be carried out to the pollutant that backflows simultaneously, reduce the pollutant load that backflows, guarantee test effect.It solves
Splashproof existing in the prior art is shot at the target the technical problem bad to the reducing effect of sputtering product and the pollutant that backflows.
Additional aspect and advantage of the invention will become obviously in following description section, or practice through the invention
Recognize.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is that the bottom end splashproof shot at the target of bottom end splashproof provided in an embodiment of the present invention is shot at the target the main view of skeleton main body；
Fig. 2 is that the bottom end splashproof shot at the target of bottom end splashproof provided in an embodiment of the present invention is shot at the target the side view of skeleton main body；
Fig. 3 is that the bottom end splashproof shot at the target of bottom end splashproof provided in an embodiment of the present invention is shot at the target the top view of skeleton main body；
Fig. 4 is the top view that bottom end splashproof provided in an embodiment of the present invention is shot at the target；
Fig. 5 is the connection structure signal of the 4th fin that bottom end splashproof provided in an embodiment of the present invention is shot at the target and cooling straight tube
Figure.
Icon: 201- third pipe；202- the 4th is managed；The second cooling tube of 203-；2031- cools down straight tube；2032- first connects
Connect bend pipe；The second bridge piece of 2033-；The second inlet of 211-；The second liquid outlet of 212-；221- separator tube；231- third wing
Piece；The 4th fin of 232-；The 5th fin of 233-；The 7th connecting pin 2321-；The 8th connecting pin 2322-.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Embodiment one
Referring to shown in Fig. 1-Fig. 5, the present embodiment provides a kind of bottom end splashproofs to shoot at the target, including bottom end splashproof is shot at the target skeleton main body
It shoots at the target fins set with bottom end splashproof；
Bottom end splashproof skeleton main body of shooting at the target includes third pipe 201, the 4th pipe 202 and the second cooling tube 203；
It is connected with the second inlet 211 on the third pipe 201, is connected with the second liquid outlet 212 on the 4th pipe；
Second cooling tube 203 has multiple, and multiple second cooling tubes 203 are set along perpendicular to length direction interval
It sets；
Multiple second cooling tubes are fixedly connected by the third pipe 201 with the 4th pipe 202, and the third
It is connected between pipe, the 4th pipe and multiple second cooling tubes；
Bottom end splashproof fins set of shooting at the target is connect with second cooling tube 203, cooling to block adjacent described second
Gap between pipe.
Optionally, pass through welded connecting between the second cooling tube and third pipe, the second cooling tube and the 4th pipe；The bottom end
Splashproof shoots at the target fins set and second cooling tube passes through welded connecting.
In use, by connecting coolant circulating system between the second inlet and the second liquid outlet, to enable coolant
Enter third pipe from the second inlet, due to being connected between third pipe, the 4th pipe and the second cooling tube, coolant then passes through the
Two cooling tubes are discharged from the second liquid outlet of the 4th pipe, complete the one cycle process of coolant.Coolant is in cyclic process
In, the bottom end splashproof connecting with the second cooling tube shoots at the target fins set also by heat transfer cooling.
In ground electric propulsion test, bottom end splashproof is shot at the target and is put into vacuum chamber, and bottom end splashproof is enabled to shoot at the target and the bilge
Corresponding, the particle in vacuum chamber with higher-energy is sputtered onto bottom end splashproof and shoots at the target in fins set, and bottom end splashproof is shot at the target fin
Group carries out cooling down effect to particle, to reduce the energy of particle, so that the sputtering rate of particle is reduced, to reduce to vacuum
The destruction in cabin；On the other hand, bottom end splashproof with a lower temperature fins set of shooting at the target can fight each other to a certain extent in bottom end
Splashproof shoot at the target fins set surface particle carry out cryogenic absorption, be effectively reduced sputtering product content and distribution.
In conclusion bottom end splashproof is shot at the target, fins set reduces sputtering of the ion beam to the bilge, reduces iron member in sputtering product
Cellulose content.Cryogenic absorption can be carried out to the pollutant that backflows simultaneously, reduce the pollutant load that backflows, guarantee test effect.It solves
Splashproof existing in the prior art is shot at the target the technical problem bad to the reducing effect of sputtering product and the pollutant that backflows.
Preferably, shown in Figure 1, the center line of the center line of the third pipe 201 and the 4th pipe 202 is in
Arc-shaped；
The center line of the center line of the third pipe and the 4th pipe is concyclic, and the third pipe and the 4th pipe pair
Claim to be set to concyclic round both ends radially；
Second cooling tube is respectively communicated with the third pipe and the 4th pipe along the both ends of extending direction.
To increase the face area that bottom end splashproof is shot at the target, and then increase absorption to particle incoming flow, cooling area, to prolong
The flow path of long coolant, can be to the film-cooled heat of particle, so that enhancing is to grain in ground electric propulsion test to increase
The Anti-splash ability of son.
Preferably, shown in Figure 2, second cooling tube 203 includes cooling straight tube 2031；
The one end of the cooling straight tube 2031 in the axial direction is connected to the third pipe by the first bridge piece 2032
201, the other end is connected to the 4th pipe 202 by the second bridge piece 2033；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the third pipe.
It is shot at the target the uniformity of temperature with improving entire bottom end splashproof.
It should be noted that the length of multiple cooling straight tubes is different, to adapt to the distance between third pipe and the 4th pipe.
Preferably, the bottom end splashproof is shot at the target as vertical structure；
The third pipe is located at the bottom end of the 4th pipe；
Second inlet 211 is located at the third pipe along the middle position of extending direction；And/or described second go out
Liquid mouth 212 is located at the 4th pipe along the middle position of extending direction.
Specifically, second inlet is located at the third pipe along the middle position of extending direction；
Alternatively, second liquid outlet is located at the 4th pipe along the middle position of extending direction；
Alternatively, second inlet is located at the third pipe along the middle position of extending direction；And described second goes out liquid
Mouth is located at the 4th pipe along the middle position of extending direction.
Preferably, second inlet is located at the third pipe along the middle position of extending direction；
And second liquid outlet is located at the 4th pipe along the middle position of extending direction.
The bilge for guard vacuum cabin that is, bottom end splashproof is shot at the target.
The bottom end splashproof is shot at the target as vertical structure, it may be assumed that in use, the axis direction of cooling straight tube is vertical.
Coolant enters from the second inlet, is discharged from the second liquid outlet, that is, coolant is bottom in and top out, coolant
In bottom end splashproof shoot at the target skeleton main body-internal-circulation when, enter the second cooling tube from third pipe, coolant under the effect of gravity, only
The bottom end for filling up the second cooling tube just can gradually go up, until the second cooling tube is completely filled out, the discharge of the 4th pipe of Cai Huicong；Institute
It states the second liquid outlet and is located at the 4th pipe and completely fill out cooling along the middle position of extending direction, only the second cooling tube
Agent, coolant can just be discharged from the second liquid outlet.Cooling to particle, adsorption area are further increased, is enhanced to particle
Anti-splash ability.
Preferably, shown in Figure 1, separator tube 221 is additionally provided on the third pipe 201；
The separator tube 221 is even connected to second inlet 211.
In use, the coolant entered from the second inlet may be vapour-liquid mixed state, gaseous coolant enters bottom end
Splashproof skeleton main body of shooting at the target will affect cooling temperature and cooling uniformity, therefore, when coolant is inputted from the second inlet, gas
State coolant can directly be discharged from separator tube, with exclusive PCR.
It should be noted that in use, needing to block the extra hole in third pipe and the 4th pipe, to guarantee to try
It tests and is normally carried out.
Preferably, shown in Figure 4, bottom end splashproof fins set of shooting at the target includes third fin 231 and the 4th fin
232；
The one end of the cooling straight tube 2031 radially is connected with the third fin 231, and the other end connects
State the 4th fin 232；
Along the extending direction of the third pipe, the third fin and the 4th fin are successively spaced setting；
It is matched between the third fin and the 4th fin between the adjacent cooling straight tube, to enable the bottom
End splashproof shoot at the target fins set closing.
Optionally, by being welded to connect, the 4th fin and cooling straight tube pass through welded connecting for third fin and cooling straight tube.
Bottom end splashproof fins set of shooting at the target includes third fin and the 4th fin, to enable third fin, the 4th fin
Connection between cooling straight tube more seals, and passes through and cannot adsorb to avoid particle incoming flow, cools down.The adjacent cooling straight tube
Between the third fin and the 4th fin between match, with enable the bottom end splashproof shoot at the target fins set closing, with
Incoming flow particle is further ensured without direct export.
Preferably, shown in Figure 4, circular axis direction, the cooling are straight where the center line of the third pipe
One end of pipe is connected with the third fin, and the other end is connected with the 4th fin.
In a first aspect, the dress of bottom end Anti-splash can be facilitated convenient for the connection of third fin, the 4th fin and cooling straight tube
Match；
Second aspect can be further ensured that the leakproofness connected between third fin, the 4th fin and cooling straight tube, enable
Incoming flow particle is without direct export.
Optionally, shown in Figure 4, bottom end splashproof fins set of shooting at the target further includes the 5th fin 233；5th fin
233 are connected to the cooling straight tube in multiple cooling straight tubes 2031 close to edge, and the cooling straight tube being located at close to edge is remote
Side from other cooling straight tubes guarantees incoming flow particle without direct export to further increase the leakproofness that bottom end splashproof is shot at the target.
Preferably, shown in Figure 5, along the width direction of the third fin, the third fin includes corresponding
5th connecting pin and the 6th connecting pin, the 5th connecting pin are connect with the cooling straight tube, and the 5th connecting pin is arc-shaped,
And it is corresponding with the cooling straight tube；
And/or the width direction along the 4th fin, the 4th fin 232 include corresponding 7th connecting pin
2321 and the 8th connecting pin 2322, the 7th connecting pin 2321 connect with the cooling straight tube 2031, the 7th connecting pin
2321 is arc-shaped, and corresponding with the cooling straight tube.
Specifically, the third fin includes corresponding 5th connecting pin along the width direction of the third fin
With the 6th connecting pin, the 5th connecting pin is connect with the cooling straight tube, and the 5th connecting pin is arc-shaped, and with it is described cold
But straight tube is corresponding；
Alternatively, the 4th fin includes corresponding 7th connecting pin and along the width direction of the 4th fin
Eight connecting pins, the 7th connecting pin are connect with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
It manages corresponding.
Alternatively, the third fin includes corresponding 5th connecting pin and along the width direction of the third fin
Six connecting pins, the 5th connecting pin are connect with the cooling straight tube, and the 5th connecting pin is arc-shaped, and straight with the cooling
It manages corresponding；And along the width direction of the 4th fin, the 4th fin includes corresponding 7th connecting pin and the 8th
Connecting pin, the 7th connecting pin are connect with the cooling straight tube, and the 7th connecting pin is arc-shaped, and with the cooling straight tube
It is corresponding.
Preferably, along the width direction of the third fin, the third fin include corresponding 5th connecting pin and
6th connecting pin, the 5th connecting pin are connect with the cooling straight tube, and the 5th connecting pin is arc-shaped, and with the cooling
Straight tube is corresponding；And along the width direction of the 4th fin, the 4th fin includes corresponding 7th connecting pin and
Eight connecting pins, the 7th connecting pin are connect with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
It manages corresponding.
5th connecting pin is arc-shaped, and corresponding with the cooling straight tube, to enable between the 5th connecting pin and cooling straight tube
Connection it is stronger, reliable；
7th connecting pin is arc-shaped, and corresponding with the cooling straight tube, to enable the 7th connecting pin and cooling straight tube
Between connection it is stronger, reliable.
Preferably, along circular axis direction where the center line of the third pipe, the 6th connecting pin and described the
Eight connecting pins 2322 are bent to two sides respectively, and the 6th connecting pin is corresponding with the 8th connecting pin.To improve third
Leakproofness between fin and the 4th fin.
Preferably, bottom end splashproof described in the present embodiment is shot at the target, and further includes that bottom end splashproof is shot at the target clad；
Bottom end splashproof clad of shooting at the target is set to bottom end splashproof and shoots at the target the outside of fins set；
The bottom end splashproof shoot at the target clad material be carbon fiber felt.
Specifically, the bottom end splashproof is shot at the target, clad is set on third fin and the 4th fin.
Carbon fiber felt has highly developed microcellular structure, is able to carry out effective absorption to the particle in access aperture.Meanwhile
By investigation, the sputtering raste of carbon is relatively low, the result of ground electric propulsion test is influenced smaller.
In conclusion bottom end splashproof is enabled to shoot at the target with lower sputtering raste, it is few without cladding situation sputtering product compared to light cabin.
Meanwhile carbon felt has porous structure, and it is strong to the adsorption capacity of incoming flow particle, it can be effectively reduced bulkhead reflection and secondary sputtering.
Preferably, the bottom end splashproof shoot at the target fins set material be T2 red copper；Specifically, third fin and the 4th wing
The material of piece is T2 red copper.T2 red copper has good conductive and heat-conductive anti-corrosion and processing performance, can weld and be brazed.Containing reduction
The impurity of electrical and thermal conductivity is less, and micro oxygen influences the performances such as conductive and heat-conductive and processing little.
Preferably, the material of third pipe, the 4th pipe, cooling straight tube, the first bridge piece, the second bridge piece and separator tube
It is stainless steel.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments
In included certain features rather than other feature, but the combination of the feature of different embodiments means in the present invention
Within the scope of and form different embodiments.For example, in claims above, embodiment claimed
It is one of any can in any combination mode come using.The information disclosed in the background technology section is intended only to deepen pair
The understanding of the general background technology of the utility model, and be not construed as recognizing or implying in any form that the information is constituted
The prior art known to those skilled in the art.
Claims (10)
1. a kind of bottom end splashproof is shot at the target, which is characterized in that shoot at the target skeleton main body including bottom end splashproof and bottom end splashproof is shot at the target fin
Group；
The bottom end splashproof shoot at the target skeleton main body include third pipe, the 4th pipe and the second cooling tube；
It is connected with the second inlet on the third pipe, is connected with the second liquid outlet on the 4th pipe；
Second cooling tube has multiple, and multiple second cooling tubes are along the length direction perpendicular to second cooling tube
Interval setting；
Multiple second cooling tubes are fixedly connected by the third pipe with the 4th pipe, and the third pipe, described
It is connected between four pipes and multiple second cooling tubes；
Bottom end splashproof fins set of shooting at the target is connect with second cooling tube, to block between adjacent second cooling tube
Gap.
2. bottom end splashproof according to claim 1 is shot at the target, which is characterized in that the center line of the third pipe and the described 4th
The center line of pipe is in arc-shaped；
The center line of the center line of the third pipe and the 4th pipe is concyclic, and the third pipe and the 4th pipe are symmetrically set
It is placed in concyclic round both ends radially；
Second cooling tube is respectively communicated with the third pipe and the 4th pipe along the both ends of extending direction.
3. bottom end splashproof according to claim 2 is shot at the target, which is characterized in that second cooling tube includes cooling straight tube；
The one end of the cooling straight tube in the axial direction is connected to the third pipe by the first bridge piece, and the other end passes through second
Bridge piece connection the 4th pipe；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the third pipe.
4. bottom end splashproof according to claim 2 is shot at the target, which is characterized in that the bottom end splashproof is shot at the target as vertical structure；
The third pipe is located at the bottom end of the 4th pipe；
Second inlet is located at the third pipe along the middle position of extending direction；And/or second liquid outlet is located at
4th pipe is along the middle position of extending direction.
5. bottom end splashproof according to claim 1 is shot at the target, which is characterized in that be additionally provided with separator tube on the third pipe；
The separator tube is even connected to second inlet.
6. bottom end splashproof according to claim 2 is shot at the target, which is characterized in that bottom end splashproof fins set of shooting at the target includes the
Three fins and the 4th fin；
The one end of the cooling straight tube radially is connected with the third fin, and the other end is connected with the 4th fin；
Along the extending direction of the third pipe, the third fin and the 4th fin are successively spaced setting；
It is matched between the third fin and the 4th fin between the adjacent cooling straight tube, to enable the bottom end anti-
The closing of sputtering target fins set.
7. bottom end splashproof according to claim 6 is shot at the target, which is characterized in that round where the center line of the third pipe
Axis direction, one end of the cooling straight tube is connected with the third fin, and the other end is connected with the 4th fin.
8. bottom end splashproof according to claim 7 is shot at the target, which is characterized in that along the width direction of the third fin, institute
Stating third fin includes corresponding 5th connecting pin and the 6th connecting pin, and the 5th connecting pin and the cooling straight tube connect
It connects, the 5th connecting pin is arc-shaped, and corresponding with the cooling straight tube；
And/or the width direction along the 4th fin, the 4th fin include that corresponding 7th connecting pin and the 8th connect
Connect end, the 7th connecting pin is connect with the cooling straight tube, and the 7th connecting pin is arc-shaped, and with the cooling straight tube phase
It is corresponding.
9. bottom end splashproof according to claim 8 is shot at the target, which is characterized in that round where the center line of the third pipe
Axis direction, the 6th connecting pin and the 8th connecting pin are bent to two sides respectively, and the 6th connecting pin and institute
It is corresponding to state the 8th connecting pin.
10. -9 described in any item bottom end splashproofs are shot at the target according to claim 1, which is characterized in that further include that bottom end splashproof is shot at the target
Clad；
Bottom end splashproof clad of shooting at the target is set to bottom end splashproof and shoots at the target the outside of fins set；
The bottom end splashproof shoot at the target clad material be carbon fiber felt.
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| CN108020434B true CN108020434B (en) | 2019-03-08 |
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| CN101718626B (en) * | 2009-11-10 | 2011-11-16 | 北京航空航天大学 | Heat sink wall panel structure arrangement for increasing absorption of plume gas |
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| CN102175456B (en) * | 2011-01-28 | 2012-11-07 | 北京航空航天大学 | Straight cylindrical liquid-nitrogen liquid-helium double-medium compatible heat sink device and refrigeration method thereof |
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