CN108215490B - A kind of drying device and ink jet printing device of oled substrate - Google Patents
A kind of drying device and ink jet printing device of oled substrate Download PDFInfo
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- CN108215490B CN108215490B CN201711497897.3A CN201711497897A CN108215490B CN 108215490 B CN108215490 B CN 108215490B CN 201711497897 A CN201711497897 A CN 201711497897A CN 108215490 B CN108215490 B CN 108215490B
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- 238000001035 drying Methods 0.000 title claims abstract description 100
- 239000000758 substrate Substances 0.000 title claims abstract description 83
- 238000007641 inkjet printing Methods 0.000 title claims abstract description 12
- 238000000605 extraction Methods 0.000 claims abstract description 16
- 238000005086 pumping Methods 0.000 claims description 10
- 230000000903 blocking effect Effects 0.000 claims description 8
- 239000004047 hole gas Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 10
- 238000010586 diagram Methods 0.000 description 21
- 238000000034 method Methods 0.000 description 9
- 239000003086 colorant Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004513 sizing Methods 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses a kind of drying device of oled substrate and ink jet printing devices.The substrate is divided into multiple first areas, which includes: cabinet, is provided with drying chamber, and substrate is placed in drying chamber;Evacuating plate is set in drying chamber, and is located at the side of substrate;Evacuating plate is provided with multiple aspirating holes, and each first area corresponds at least one aspirating hole;Controller is electrically connected with extraction sector, for controlling the pumpdown time of aspirating hole corresponding with first area.In this way, it can be improved the dry uniformity of oled substrate, and then improve the display effect of OLED.
Description
Technical field
The present invention relates to OLED technology fields, set more particularly to the drying device and inkjet printing of a kind of oled substrate
It is standby.
Background technique
In the manufacture craft of Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED), in order to
Obtain preferable buffer function, it will usually luminescent layer and buffer layer be formed using the method for inkjet printing, wherein in order to make ink-jet
Region carry out solidifying and setting, can predominantly realize that pixel is formed region using dry and baking process, drying process, Roaster
Skill is mainly to realize the drying of solvent.
The present inventor has found in long-term research and development, in currently available technology, because pixel sizing region
Angle and width have stringent control, and the parameters such as drying time and pumping speed are more difficult in drying process is precisely controlled, therefore,
It is poor to will lead to each pixel sizing region uniform drying, to reduce OLED display panel illumination effect.
Summary of the invention
The invention mainly solves the technical problem of providing the drying device of oled substrate and ink jet printing devices, to improve
The dry uniformity of oled substrate, and then improve the display effect of OLED.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of drying of oled substrate is provided
Device, the substrate are divided into multiple first areas, which includes: cabinet, are provided with drying chamber, and substrate is placed in drying chamber
It is interior;Extraction sector, including evacuating plate, evacuating plate are set in drying chamber, and evacuating plate is located at the side of substrate;Evacuating plate is provided with
Multiple aspirating holes, each first area correspond at least one aspirating hole;Controller is electrically connected with extraction sector, and controller is used for
The pumpdown time of aspirating hole corresponding with first area is controlled, to improve the uniform drying of multiple first areas.
In order to solve the above technical problems, another technical solution used in the present invention is: a kind of ink jet printing device is provided,
The equipment includes the drying device of above-mentioned oled substrate.
The beneficial effect of the embodiment of the present invention is: being different from the prior art, the dry dress of oled substrate of the embodiment of the present invention
It sets, which is divided into multiple first areas, which includes: cabinet, is provided with drying chamber, and substrate is placed in drying chamber
It is interior;Extraction sector, including evacuating plate, evacuating plate are set in drying chamber, and evacuating plate is located at the side of substrate;Evacuating plate is provided with
Multiple aspirating holes, each first area correspond at least one aspirating hole;Controller is electrically connected with extraction sector, and controller is used for
The pumpdown time of aspirating hole corresponding with first area is controlled, to improve the uniform drying of multiple first areas.The present invention is real
Example is applied by the way that aspirating hole is arranged for each first area of oled substrate, and individually controls the pumpdown time of each aspirating hole, energy
The dry otherness in multiple first areas is enough reduced, therefore, can be improved the dry uniformity of oled substrate, and then improve OLED
Display effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one embodiment of drying device of oled substrate of the present invention;
Fig. 2 is the structural schematic diagram of oled substrate first embodiment of the present invention;
Fig. 3 is the structural schematic diagram of the evacuating plate of the drying device of Fig. 1 embodiment oled substrate;
Fig. 4 is the structural schematic diagram of oled substrate second embodiment of the present invention;
Fig. 5 is the structural schematic diagram of invention oled substrate 3rd embodiment;
Fig. 6 is the structural schematic diagram of invention oled substrate fourth embodiment;
Fig. 7 is the structural schematic diagram of one embodiment of OLED display panel;
Fig. 8 is the structural schematic diagram of one embodiment of color filter of the present invention;
Fig. 9 is the structural schematic diagram in some processes of Fig. 8 embodiment color filter;
Figure 10 is the structural schematic diagram of another embodiment of evacuating plate of the drying device of oled substrate of the present invention;
Figure 11 is the structural schematic diagram of one embodiment of ink jet printing device of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, those of ordinary skill in the art are obtained every other under the premise of not making creative labor
Embodiment shall fall within the protection scope of the present invention.
The present invention proposes a kind of drying device of oled substrate, as shown in Figure 1, Fig. 1 is the drying of oled substrate of the present invention
The structural schematic diagram of one embodiment of device.The drying device 101 of the present embodiment is for being dried oled substrate 102, such as
Shown in Fig. 2, Fig. 2 is the structural schematic diagram of oled substrate first embodiment of the present invention.Oled substrate 102 is divided into multiple firstth areas
Domain 201.The drying device 101 of the present embodiment includes: cabinet 103, extraction sector 104 and controller 105, wherein cabinet 103 is set
It is equipped with drying chamber 106, oled substrate 102 is placed in drying chamber 106;Extraction sector 104 includes evacuating plate 107, and evacuating plate 107 is set
It is placed in drying chamber 106, evacuating plate 107 is located at the side of oled substrate 102;Evacuating plate 107 is provided with multiple aspirating holes 301
(as shown in Figure 3), and the corresponding aspirating hole 301 in each first area 201 of oled substrate 102;Controller 105 and air exhauster
Structure 104 is electrically connected, and controller 105 is used to control the pumpdown time of aspirating hole 301 corresponding with first area 201, more to improve
The uniform drying of a first area 201.
In the present embodiment, the corresponding aspirating hole 301 in each first area 201 of oled substrate 102.In other embodiments
In, each first area 201 can correspond to two or more aspirating holes 301, and the corresponding pumping in each first area 201
The quantity of stomata 301 can be different.
The a part of the evacuating plate 107 of the present embodiment as the side wall of drying chamber 106, to close drying chamber 106, certainly,
In other embodiments, evacuating plate 107 is not as the side wall of drying chamber 106, and itself is a closing chambers for drying chamber 106.
The controller 105 of the present embodiment is set on cabinet 103, to improve the convenience that entire drying device 101 uses.
Certainly, in other embodiments, controller 105 can be provided separately with cabinet 103.
The present embodiment do not limit oled substrate 102 between evacuating plate 107 at a distance from, which can be by artificial or pass through
Controller 105 is adjusted.
It is different from the prior art, the drying device 101 of the present embodiment for each first area 201 of oled substrate by setting
Aspirating hole 301 is set, and individually controls the pumpdown time of each aspirating hole 301, the dry difference in multiple first areas 201 can be reduced
Therefore the opposite sex can be improved the dry uniformity of oled substrate 102, and then improve the display effect of OLED.
Specifically, certainly, in other embodiments, oled substrate 102 is also provided with multiple W sub-pixel units etc..
In one embodiment, as shown in figure 4, Fig. 4 is the structural schematic diagram of oled substrate second embodiment of the present invention.This
Embodiment oled substrate 401 is at least provided with multiple R sub-pixel units, multiple G sub-pixel units and multiple B sub-pixel units.
The present embodiment oled substrate 401 is provided with multiple first areas 402, wherein each first area 402 includes a R sub-pixel list
Member, a G sub-pixel unit or a B sub-pixel unit, i.e., each individually sub-pixel unit are set as a first area
402, therefore, when controller (not shown) can control the pumping of aspirating hole (not shown) corresponding with first area 402 respectively
Between, therefore when can control the drying of each R sub-pixel unit, each G sub-pixel unit and each B sub-pixel unit respectively
Between.
In another embodiment, as shown in figure 5, Fig. 5 is the structural schematic diagram of oled substrate 3rd embodiment of the present invention.
Difference with Fig. 4 embodiment is that each first area 502 of the present embodiment oled substrate 501 includes multiple R sub-pixel lists
First, multiple G sub-pixel units or multiple B sub-pixel units, i.e., the sub-pixel unit of multiple same colors are set as same
One region 502, therefore, controller (not shown) can control aspirating hole (not shown) corresponding with first area 502 respectively
Pumpdown time can control the drying time of multiple sub-pixel units of different colours respectively.
It is in some processes of production in oled substrate 501, multiple sub-pixel units of same color generally pass through one of work
Sequence is completed, and multiple sub-pixel units of another color can be completed by another procedure, can be existed between this two procedures certain
Time difference, and the pixel materials of the sub-pixel unit of different colours can also have a certain difference, the sub-pixel of different colours
Requirement of the unit to drying time also can there is some difference.Therefore, it in the drying process of oled substrate 501, needs to use
The sub-pixel of different colours is dried in different drying times, in this way, can be improved oled substrate 501
The drying effect of the pixel subelement of multiple color is close, is capable of the uniformity of its drying.
Although should be noted that the first area 502 with same color sub-pixel unit of the present embodiment is corresponding not
Same aspirating hole, however, it is possible to control these aspirating holes with identical pumpdown time, so that the son of same color by controller
Pixel unit drying time having the same.
In yet another embodiment, as shown in fig. 6, Fig. 6 is the structural schematic diagram of oled substrate fourth embodiment of the present invention.
Difference with Fig. 4, Fig. 5 embodiment is that each first area 602 of the present embodiment oled substrate 601 includes a R sub-pixel list
Member, a G sub-pixel unit and be pixel unit (figure is not marked) with B sub-pixel unit, each first area 602 includes a picture
Plain unit (figure is not marked);Therefore, controller (not shown) can control aspirating hole corresponding with first area 602 respectively and (scheme not
Show) pumpdown time, the drying time of each pixel unit can be controlled respectively.
Certainly, in other embodiments, there are also other corresponding relationships, such as the firstth area for first area and pixel subelement
Domain includes R sub-pixel unit, the G sub-pixel unit of quantity b and the B sub-pixel unit of quantity c of quantity a, wherein quantity a, number
Amount b and quantity c may be the same or different, and can also be 0.
As shown in fig. 7, Fig. 7 is a structural schematic diagram of OLED display panel.OLED display panel 701 have self-luminous,
Wide viewing angle, almost infinite high contrast, compared with low power consumption, high reaction speed the advantages that.OLED display panel 701 is widely transported
For mobile phone, DV, DVD player, personal digital assistant (PDA), laptop, automobile audio and TV.OLED is aobvious
Show panel 701 basic structure be by one it is thin and transparent tool characteristic of semiconductor indium tin oxide (ITO) layer 702, with electric power it
Anode 703 is connected, and adds another metallic cathode 704, is bundled into the structure such as sandwich.ITO layer 702 includes: hole transport
Layer 705, luminescent layer 706 and electron transfer layer 707.When supplying power to appropriate voltage, 704 electricity of positive 703 holes and cathode
Lotus will combine in luminescent layer, generate light, be formulated different generation red, green and blue RGB three primary colors according to it, constitute Essential colour
It is color.
Oled substrate described in above-described embodiment can be OLED display panel or OLED display panel colorized optical filtering
Plate, i.e., above-mentioned ITO layer, glass substrate or other film layers etc., specifically without limitation.
Below by taking the color filter of OLED display panel as an example, structure to the drying device of oled substrate of the present invention and
Working principle is further detailed.
As seen in figs. 8-10, Fig. 8 is the structural schematic diagram of one embodiment of color filter of the present invention, and Fig. 9 is the filter of Fig. 8 colour
Structural schematic diagram in some processes of tabula rasa, Figure 10 are another embodiments of evacuating plate of the drying device of oled substrate of the present invention
Structural schematic diagram.The color filter 801 of the present embodiment divides for multiple first areas 802, and evacuating plate 1001 is provided with multiple
Aspirating hole 1002, and the corresponding aspirating hole 1002 in each first area 802.Each first area 802 is provided with a color blocking
803.In the manufacture craft of color filter 801, preferable buffer function in order to obtain, it will usually using the side of inkjet printing
Method forms color blocking 803 and buffer layer (not shown).
After forming black matrix" 805 on the substrate 804 of color filter 801, using above-mentioned drying device to color blocking 803
Carry out solidifying and setting.To promote drying effect, aspirating hole 1002 is correspondingly arranged with color blocking 803.Certainly, in other embodiments,
Two or more color blockings 803 can be set in each first area 802, i.e., an aspirating hole is simultaneously two or more color blockings
803 are evacuated.
It, can be with by above-mentioned analysis it is found that carrying out different divisions by the first area 802 to color filter 801
The control respectively for realizing the drying time to each colour cell 803 of color filter 801, can also realize the color to different colours
Control etc. respectively of the drying time of group 803, does not repeat here.
Please continue to refer to Fig. 1, optionally, the extraction sector 104 of the present embodiment further comprises multiple switch 108, switch
108 are set in aspirating hole (not shown), and controller 105 is unlatched and closed by control switch 108, to control aspirating hole
Pumpdown time.
One switch 108 can be set for each aspirating hole (not shown), or multiple aspirating hole settings are same
Switch 108, specifically without limitation.
The embodiment of the present invention does not limit the specific set-up mode of switch 108 Yu aspirating hole.For example, can be straight by switch 108
It connects and side of the aspirating hole far from oled substrate 102 is set, or exhaust tube (not shown) is arranged in each aspirating hole, then
Switch 108 is arranged on exhaust tube, switch 108 controls the pumping of aspirating hole by controlling turning on and off for exhaust tube.
Optionally, the controller 105 of the present embodiment control multiple aspirating holes the speed of exhaust it is identical.Only pass through control pumping
The pumpdown time in hole, the i.e. drying time of oled substrate 102 control the drying effect of each first area (not shown), this
Mode is simply easily realized.
Certainly, in other embodiments, the speed of exhaust of aspirating hole can also be controlled by controller to control each the
One region drying effect.
Optionally, the drying device 101 of the present embodiment further comprises heater 109, is placed in drying chamber 106, with control
Device 105 processed is electrically connected, for being used to heat oled substrate 102 under the control of controller 105, to accelerate oled substrate 102
Rate of drying.
The embodiment of the present invention does not limit heater 109 set-up mode and position in drying chamber 106.
Present invention further propose that a kind of ink jet printing device, as shown in figure 11, Figure 11 are ink jet printing devices of the present invention
The structural schematic diagram of one embodiment.The equipment 1101 of the present embodiment includes the drying device (figure is not marked) of oled substrate, this implementation
The drying device of example is for being dried oled substrate 1102, and oled substrate 1102 is divided into multiple first areas, and (figure is not
Mark).The drying device of the present embodiment includes: cabinet 1103, extraction sector 1104 and controller 1105, wherein cabinet 1103 is set
It is equipped with drying chamber 1106, oled substrate 1102 is placed in drying chamber 1106;Extraction sector 1104 includes evacuating plate 1107, evacuating plate
1107 are set in drying chamber 1106, and evacuating plate 1107 is located at the side of oled substrate 1102;Evacuating plate 1107 is provided with multiple
Aspirating hole (figure is not marked), and each first area of oled substrate 1102 corresponds at least one aspirating hole;Controller 1105 and pumping
Mechanism of qi structure 1104 is electrically connected, and controller 1105 is used to control the pumpdown time of aspirating hole corresponding with first area, more to improve
The uniform drying of a first area.
Optionally, extraction sector 1104 further comprises multiple switch 1108 and heater 109, and switch 1108 is set to pumping
On stomata, controller 1105 is unlatched and closed by control switch 1108, to control the pumpdown time of aspirating hole;Heater
1109 are placed in drying chamber 1106, are electrically connected with controller 1105, for being used under the control of controller 1105 to OLED base
Plate 1102 heats, to accelerate the rate of drying of oled substrate 1102.
Optionally, the equipment 1101 of the present embodiment further comprises: printing equipment 1110, transmission mechanism 1111 and workbench
1112.Wherein, drying device and printing equipment 1110 are connect with transmission mechanism 1111, transmission mechanism 1111 and controller 1105
Connection, transmission mechanism 1111 carry out ink-jet to oled substrate 1102 in the control underdrive printing equipment 1110 of controller 1105 and beat
Then print controls drying device and oled substrate 1102 is dried, when controller 1105 further controls the pumping of aspirating hole
Between, to improve the uniform drying of multiple first areas.
Certainly, in other embodiments, printing equipment includes the spray head of array manner.
The drying device of the present embodiment has carried out detailed narration in the above-described embodiments, does not repeat here.
It is different from the prior art, the drying device of oled substrate of the embodiment of the present invention, oled substrate is divided into multiple first
Region, the drying device include: cabinet, are provided with drying chamber, and substrate is placed in drying chamber;Extraction sector, including evacuating plate are taken out
Gas plate is set in drying chamber, and evacuating plate is located at the side of substrate;Evacuating plate is provided with multiple aspirating holes, each first area pair
Answer at least one aspirating hole;Controller is electrically connected with extraction sector, and controller is for controlling aspirating hole corresponding with first area
Pumpdown time, to improve the uniform drying of multiple first areas.The embodiment of the present invention is by for each of oled substrate
Aspirating hole is arranged in one region, and individually controls the pumpdown time of each aspirating hole, can reduce the dry difference in multiple first areas
Therefore the opposite sex can be improved the dry uniformity of oled substrate, and then improve the display effect of OLED.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field is included within the scope of the present invention.
Claims (10)
1. a kind of drying device of oled substrate, which is characterized in that the substrate is divided into multiple first areas, the dry dress
It sets and includes:
Cabinet, is provided with drying chamber, and the substrate is placed in the drying chamber;
Extraction sector, including evacuating plate, the evacuating plate are set in the drying chamber, and the evacuating plate is located at the substrate
Side;The evacuating plate is provided with multiple aspirating holes, and each first area corresponds at least one described aspirating hole;
Controller is electrically connected with the extraction sector, and the controller is for controlling the pumping corresponding with the first area
The pumpdown time of stomata, to improve the uniform drying of the multiple first area;
Wherein, the drying chamber is closing chamber, and the side wall of the evacuating plate and the cabinet forms the closing chamber.
2. drying device according to claim 1, which is characterized in that the substrate is at least provided with multiple R sub-pixel lists
First, multiple G sub-pixel units and multiple B sub-pixel units, each first area include the R sub-pixel unit, the G
Sub-pixel unit or the B sub-pixel unit;
The controller for controlling each R sub-pixel unit, each G sub-pixel unit and each B respectively
The drying time of sub-pixel unit.
3. drying device according to claim 1, which is characterized in that the substrate is at least provided with multiple R sub-pixel lists
First, multiple G sub-pixel units and multiple B sub-pixel units, each first area include the multiple R sub-pixel unit,
The multiple G sub-pixel unit or the multiple B sub-pixel unit;
The controller for controlling the multiple R sub-pixel unit, the multiple G sub-pixel unit and the multiple B respectively
The drying time of sub-pixel unit.
4. drying device according to claim 1, which is characterized in that the substrate includes multiple pixel units, the picture
Plain unit includes at least R sub-pixel unit, G sub-pixel unit and B sub-pixel unit, and each first area includes described in one
Pixel unit;
The controller is used to control the drying time of each pixel unit respectively.
5. drying device according to claim 1, which is characterized in that the substrate is color filter, firstth area
Domain is provided at least one color blocking, and the aspirating hole is correspondingly arranged with the color blocking.
6. drying device according to claim 1, which is characterized in that the extraction sector further comprises multiple switch,
The switch is arranged on the aspirating hole;
The switch unlatches and closes under the control of the controller, for controlling the pumpdown time of the aspirating hole.
7. drying device according to claim 1, which is characterized in that the controller controls the pumping of the multiple aspirating hole
Gas velocity rate is identical.
8. drying device according to claim 1, which is characterized in that the controller control is corresponding with the first area
The aspirating hole the speed of exhaust.
9. drying device according to claim 1, which is characterized in that described device further comprises heater, is placed in institute
It states in drying chamber, is electrically connected with the controller, for being used to heat the substrate under the control of the controller.
10. a kind of ink jet printing device, which is characterized in that the equipment includes the described in any item OLED bases of claim 1-9
The drying device of plate.
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CN109166966A (en) * | 2018-08-10 | 2019-01-08 | 深圳市华星光电半导体显示技术有限公司 | A kind of preparation method and organic light emitting display of display device |
CN110064276B (en) * | 2019-04-08 | 2022-04-01 | Tcl华星光电技术有限公司 | Ink jet printing apparatus |
CN110227636A (en) * | 2019-05-16 | 2019-09-13 | 深圳市华星光电半导体显示技术有限公司 | Heating and drying device for Organic Light Emitting Diode |
CN110920271B (en) * | 2019-11-14 | 2021-04-02 | Tcl华星光电技术有限公司 | Ink-jet printing equipment and use method thereof |
CN112838180A (en) * | 2021-01-07 | 2021-05-25 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
CN114571879B (en) * | 2022-02-23 | 2024-03-08 | 深圳市华星光电半导体显示技术有限公司 | Ink-jet printing vacuum drying device and ink-jet printing drying method |
CN114834165B (en) * | 2022-05-13 | 2024-03-26 | 昆山国显光电有限公司 | Ink jet printing drying device and ink jet printing equipment |
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Address after: No.9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: No.9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |