CN108153118A - A kind of Full-automatic exposure machine - Google Patents
A kind of Full-automatic exposure machine Download PDFInfo
- Publication number
- CN108153118A CN108153118A CN201810115225.XA CN201810115225A CN108153118A CN 108153118 A CN108153118 A CN 108153118A CN 201810115225 A CN201810115225 A CN 201810115225A CN 108153118 A CN108153118 A CN 108153118A
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- CN
- China
- Prior art keywords
- placing frame
- contraposition
- full
- truss
- exposure machine
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of Full-automatic exposure machines, belong to PCB exposure techniques field, solving exposure machine of the prior art needs manual operation, the degree of automation is low, the problem of leading to low production efficiency, the present invention includes truss and body, the body is located at the lower section of truss, X axis guide rail and Y-axis guide rail are installed on the truss, feeding manipulator and blanking mechanical hand are connected separately on truss, crossbeam is provided with above the body, conveying robot and contraposition camera system are separately installed on the crossbeam, the lower left of the body is equipped with to bit platform, placing frame of winding the film is installed below the conveying robot (5), contraposition placing frame is installed below the placing frame of winding the film, the body at the contraposition placing frame rear is equipped with exposure room.Workflow of the present invention realizes fully automated unattended operation, greatly improves work efficiency.
Description
Technical field
The invention belongs to PCB exposure techniques fields, and in particular to a kind of Full-automatic exposure machine.
Background technology
PCB (Printed Circuit Board), Chinese is printed circuit board, also known as printed wiring board, is important
Electronic unit, be electronic component supporter, be electronic component electrical connection carrier.Since it is using electronic seal
What brush art made, therefore be referred to as " printing " circuit board.
In pcb board manufacturing process, one of process of most critical is exactly that egative film image is transferred on base material：First on substrate
One layer of photosensitive material is applied, then light radiation is carried out to coating photosensitive material on base material, its dissolubility is made to change, and not
Polymerisation does not occur for the resin of photosensitive part, will be dissolved under the action of developer solution, the photosensitive material hair of photosensitive part
Raw polymerisation, which is solidificated on base material, forms image, this technical process exposes.
Exposure machine is one of key equipment for completing pattern transfer, in the manufacturing process of PCB, has very important work
With existing manual exposure machine needs manually to carry out egative film and needs the contraposition work between exposed part, and a manual exposure machine needs
Want an operating personnel, the underworker of 2-3 contraposition；In recent years, occur carrying out automatic aligning using video camera in the market
Exposure machine, every equipment is also required to an operating personnel, due to being limited by equipment and technology condition, in most of situation
Under, single side automatic aligning can only be carried out, thus production efficiency is more much lower than manual exposure machine.
Invention content
It is an object of the invention to：
It needs manual operation, the degree of automation low to solve exposure machine of the prior art, leads to asking for low production efficiency
Topic, and a kind of Full-automatic exposure machine is provided.
The technical solution adopted by the present invention is as follows：
A kind of Full-automatic exposure machine, which is characterized in that including truss and body, the body is located at the lower section of truss, institute
It states and X axis guide rail and Y-axis guide rail is installed on truss, feeding manipulator and blanking mechanical hand, institute are connected separately on truss
It states and crossbeam is provided with above body, conveying robot and contraposition camera system, the body are separately installed on the crossbeam
Lower left be equipped with to bit platform, placing frame of winding the film, the placing frame of winding the film are installed below the conveying robot
Lower section contraposition placing frame is installed, the body at the contraposition placing frame rear is equipped with exposure room.
Further, be equipped with upper and lower two groups of light sources in the exposure room, upper and lower light source can by the exposure parameter of setting, into
The pcb board for entering the region is exposed, and the light source height of upper and lower light source, inertia can adjust automaticallies.
Further, the left to bit platform is equipped with charging tote cart, is equipped with above the charging tote cart and waits to expose
Light pcb board, the right of the placing frame of winding the film are equipped with discharging tote cart, and the discharging tote cart, which is equipped with, has exposed pcb board.
Further, the charging tote cart and discharging tote cart are connected with AGV floor trucks, the AGV floor trucks
Be it is a kind of can automatic charging electric drive trolley, can be run automatically along programme path, can be by the access of calling system, automatically
It calls to specified station.
Further, the feeding manipulator, conveying robot and blanking mechanical are equipped with sucker on hand, the sucker
Lower face is flat shape, it is possible to increase the forced area of pcb board protects light-sensitive surface.Feeding manipulator is connected with blanking mechanical hand
On the truss installed at the top of body, the truss is the support beam structure being connected with, and truss has X, Y
Axis rail and its driving device are equipped with Z-direction guide rail, rotating mechanism on the loading and unloading manipulator under truss.
Have different since pcb board placement location need to be exposed, for adapt to such case, ensure subsequent exposure precision with
And the high efficiency of contraposition, feeding manipulator has pcb board position automatic identification function, and adjustable sucker draws angle, automatic right
Pcb board is captured behind position；The pcb board for aligning completion can be carried to exposure and prepare region, the exposure area in preparation by conveying robot
Domain is located at below conveying robot, and exposure prepares to be equipped with hack in region, and conveying robot completes lower master film and PCB on hack
The overlapping of plate, and pass through and align camera system and checked, if position is wrong, then repeatedly contraposition process.
Further, described that PCB locating modules are equipped with to bit platform, the PCB locating modules include stepper motor, institute
It states stepper motor and is connected with driver, the driver is connected with screw guide rail, and the driver is electrically connected with contraposition camera system
It connects；The pcb board that positioning device is equipped with to bit platform can make to keep flat above will not be moved with mutual alignment occurs to bit platform, together
When play a supportive role, when capturing conveying robot, pcb board has certain support force without being bent.
Further, it is described contraposition camera system include CCD camera and visual-alignment system, the CCD camera with
Visual-alignment system is electrically connected.
PCB is positioned over is moved to this region to the CCD camera for after bit platform, aligning camera system, and system is imaged by CCD
System feedback op, by visual-alignment system correction PCB positions, the principle for stating visual-alignment system is that will be schemed by CCD camera
As collecting image alignment processing system, deviation post and angle are calculated, then communicate information to moving component, carry out position and entangle
Just, precision can reach ± 0.005mm.
Further, the lower surface of the placing frame of winding the film is wound the film for placing, and transports pcb board in conveying robot
To before contraposition placing frame, placing frame of winding the film first is moved to contraposition placing frame right transition, and pcb board is put to contraposition placing frame
Afterwards, placing frame of winding the film playbacks to above contraposition placing frame, and it is overlapping with winding the film to complete pcb board.
Further, moveable lead screw guide rails platform is installed below the contraposition placing frame, lead screw guide rails platform can
It will complete the pcb board after being overlapped and egative film be transported in the exposure room at rear and be exposed, before sending body back to again after the completion of exposure
Side, by blanking mechanical hand blanking.
The course of work of the present invention includes the following steps：
A, it feeds：Charging tote cart fortune has the pcb board that need to be exposed from exposure machine previous process, is parked in exposure machine
Left.
B, feeding：The pcb board fed on tote cart is sequentially grabbed and bit platform is carried out pair by feeding manipulator
Position.
C, automatic aligning：By aligning the CCD camera of camera system and visual-alignment system, completion winds the film and goes to the bottom
The automatic aligning of piece automatic aligning, egative film and pcb board.
D, exposure prepares：The hack for exposing and preparing in region is grabbed by the pcb board completed is aligned by conveying robot
On, completion pcb board is overlapping with upper lower master film, and can be checked by CCD camera systems.
E, it exposes：Contraposition is completed and by the pcb board of inspection, is sent into exposure room and exposed by lead screw guide rails platform, exposed
After the completion of light, then send exposure back to and prepare on the hack in region.
F, blanking：Blanking mechanical hand will send pcb board after the completion of exposure prepares having exposed of region back to, grab discharging week
On changing trains or buses.
G, it discharges：Pcb board after the completion of exposure is put on discharging tote cart, is sent to next procedure.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows：
1. the Full-automatic exposure machine of the present invention can be from charging tote cart, automatic crawl need to expose pcb board, carry out bottom automatically
Piece is aligned with egative film, egative film and pcb board, is exposed automatically, is automatically put into pcb board after the completion of exposure and is transported to next procedure
It discharges on tote cart, whole operation process is real from exposure previous process, exposure, next procedure automatic butt without manual intervention
Existing full-automatic unmannedization processing, saves a large amount of manpowers, substantially increases the efficiency of exposure machine work.
2. being equipped with upper and lower two groups of light sources in the exposure room of the present invention, it two-sided to pcb board progress can simultaneously expose, solve existing
There is the problem of single side difference exposure efficiency is low in technology, shorten process time, significantly improve exposure efficiency.
3. the left to bit platform of the present invention is equipped with charging tote cart, it is equipped with above the charging tote cart to be exposed
Pcb board, the right of the placing frame of winding the film are equipped with discharging tote cart, and the discharging tote cart, which is equipped with, has exposed pcb board, week
It changes trains or buses that PCB can be carried out concentration carrying, and connect with AGV floor trucks, can positioning carrying directly be carried out to production station so that
Carrying is quick, stablizes, precisely, efficiently, largely saves the manpower of carrying, improves the working efficiency of exposure machine.
4. the charging tote cart and discharging tote cart of the present invention are connected with AGV floor trucks, can be transported automatically along programme path
Row, and can be automatic to call to specified station by connecting calling system, improve the degree of automation of flow so that process stream
Journey is more standardized.
5. the contraposition camera system of the present invention includes CCD camera and visual-alignment system, the CCD camera and vision
Alignment system is electrically connected, and visual-alignment system can calculate partially by CCD camera by Image Acquisition to image alignment processing system
Pan position and angle, then moving component is communicated information to, position correction is carried out, solves pcb board in the prior art and egative film
The problem of needing manually to be aligned, avoids error easy to operate during manual alignment, the problem of error is larger, substantially increases
The accuracy of contraposition and precision.
6. feeding manipulator, conveying robot and the blanking mechanical of the present invention are equipped with sucker on hand, manipulator can be followed
Angle during pcb board is drawn in adjustment, and pcb board is made to be easier to adsorb on sucker, improves the working efficiency of exposure machine, sucker bottom
Portion is flat shape, it is possible to increase the forced area of pcb board reduces pressure, protects light-sensitive surface, and the flaw occurs in PCB after reducing exposure
The probability of defect improves the quality of product.
7. the present invention's is equipped with bit platform PCB locating modules, the PCB locating modules include stepper motor, described
Stepper motor is connected with driver, and the driver is connected with screw guide rail, and the driver is electrically connected with contraposition camera system,
This structure enables locating module horizontal plane direction is mobile, rotation carries out automatic aligning, manual alignment compared with the prior art,
Precision higher, to bit rate faster, reaction are sensitiveer, and locating module can be supported pcb board, prevent conveying robot from grabbing
When taking, pcb board is bent due to stress is excessive, damage, improves product quality.
Description of the drawings
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein：
Fig. 1 is the front view of the present invention；
Fig. 2 is the left view of Fig. 1；
Fig. 3 is the vertical view of Fig. 1；
Fig. 4 is to the front view of bit platform in Fig. 1；
Fig. 5 is the vertical view of Fig. 4；
The front view of feeding manipulator and blanking mechanical hand in Fig. 6 Fig. 1；
Fig. 7 is the vertical view of Fig. 6；
Fig. 8 is the sucker structure figure in Fig. 6.
Reference sign：
1- feeds tote cart, and 2- pcb boards to be exposed, 3- feeding manipulators, 4- is to bit platform, 5- conveying robots, 6- pairs
Position camera system, 7- contraposition placing frames, 8- wind the film placing frame, 9- exposure rooms, 10- blanking mechanical hands, and 11- has exposed pcb board,
12- discharging tote carts, 13- truss, 14- screw guide rails, 15- stepper motors.
Specific embodiment
All features or disclosed all methods disclosed in this specification or in the process the step of, in addition to mutually exclusive
Feature and/or step other than, can combine in any way.
It elaborates with reference to Fig. 1-Fig. 8 to the present invention.
Embodiment 1
A kind of Full-automatic exposure machine, which is characterized in that including truss 13 and body, the body is located under truss 13
It is square, X axis guide rail and Y-axis guide rail are installed on the truss 13, feeding manipulator 3 and blanking are connected separately on truss 13
Manipulator 10 is provided with crossbeam above the body, and conveying robot 5 and contraposition camera shooting system are separately installed on the crossbeam
System 6, the lower left of the body are equipped with to bit platform 4, and the lower section of the conveying robot 5 is equipped with placing frame 8 of winding the film, institute
The lower section for stating placing frame 8 of winding the film is equipped with contraposition placing frame 7, and the body at 7 rear of the contraposition placing frame is equipped with exposure room
9。
The Full-automatic exposure machine of the present embodiment can be from charging tote cart 1, and automatic crawl need to expose pcb board, automatic to carry out
Egative film is aligned with egative film, egative film and pcb board, is exposed automatically, is automatically put into pcb board after the completion of exposure and is transported to next procedure
Discharging tote cart 12 on, whole operation process is automatically right from exposure previous process, exposure, next procedure without manual intervention
It connects, realizes full-automatic unmannedization processing, save a large amount of manpowers, substantially increase the efficiency of exposure machine work.
Embodiment 2
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
In example, upper and lower two groups of light sources are equipped in the exposure room 9, upper and lower light source can be by the exposure parameter of setting, to entering the region
Pcb board is exposed, the light source height of upper and lower light source, inertia can adjust automatically, solve single side in the prior art and expose respectively
The problem of light efficiency is low shortens process time, significantly improves exposure efficiency.
Embodiment 3
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
In example, the left to bit platform 4 is equipped with charging tote cart 1, and 1 top of charging tote cart is equipped with pcb board 2 to be exposed,
The right of the placing frame 8 of winding the film is equipped with discharging tote cart 12, and the discharging tote cart 12, which is equipped with, has exposed pcb board 11,
Concentration carrying can be carried out to PCB, and is connected with AGV floor trucks, can positioning carrying directly be carried out to production station so that carry
Quickly, stablize, precisely, efficiently, largely save the manpower of carrying, improve the working efficiency of exposure machine.
Embodiment 4
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
In example, the charging tote cart 1 and discharging tote cart 12 are connected with AGV floor trucks, and the AGV floor trucks are that one kind can be certainly
The electric drive trolley of dynamic charging, can run along programme path automatically, can be automatic to call to specified by the access of calling system
Station improves the degree of automation of flow so that process flow more standardizes.
Embodiment 5
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
In example, contraposition camera system 6 includes CCD camera and visual-alignment system, and the CCD camera is electrically connected with visual-alignment system
It connects, visual-alignment system can calculate deviation post and angle by CCD camera by Image Acquisition to image alignment processing system
Degree, then communicates information to moving component, carries out position correction, solve pcb board in the prior art and egative film need manually into
The problem of row contraposition, avoids error easy to operate during manual alignment, the problem of error is larger, substantially increases the accurate of contraposition
Degree and precision.
Embodiment 6
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
In example, sucker is equipped on feeding manipulator 3, conveying robot 5 and blanking mechanical hand 10, manipulator adjustment can be followed to draw
Angle during pcb board makes pcb board be easier to adsorb on sucker, improves the working efficiency of exposure machine, and sucker bottom is plane
Shape, it is possible to increase the forced area of pcb board reduces pressure, protects light-sensitive surface, and the probability of flaw occurs in PCB after reducing exposure,
Improve the quality of product.
Embodiment 7
The present embodiment emphasis illustrates the improvements compared with above-described embodiment, and something in common repeats no more, in this implementation
Described that PCB locating modules are equipped with to bit platform 4 in example, the PCB locating modules include stepper motor 15, the stepping electricity
Machine 15 is connected with driver, and the driver is connected with screw guide rail 14, and the driver is electrically connected with contraposition camera system 6,
This structure enables locating module horizontal plane direction is mobile, rotation carries out automatic aligning, manual alignment compared with the prior art,
Precision higher, to bit rate faster, reaction are sensitiveer, and locating module can be supported pcb board, prevent conveying robot 5
During crawl, pcb board is bent due to stress is excessive, damage, improves product quality.
Claims (7)
1. a kind of Full-automatic exposure machine, including truss (13) and body, the body is located at the lower section of truss (13), and feature exists
In being equipped with X axis guide rail and Y-axis guide rail on the truss (13), feeding manipulator (3) be connected separately on truss (13)
With blanking mechanical hand (10), be provided with crossbeam above the body, be separately installed on the crossbeam conveying robot (5) and
Align camera system (6), the lower left of the body is equipped with to bit platform (4), is equipped with below the conveying robot (5)
It winds the film placing frame (8), contraposition placing frame (7), the contraposition placing frame is installed below the placing frame of winding the film (8)
(7) body at rear is equipped with exposure room (9).
2. a kind of Full-automatic exposure machine according to claim 1, which is characterized in that be equipped with up and down in the exposure room (9)
Two groups of light sources.
3. a kind of Full-automatic exposure machine according to claim 1, which is characterized in that the left to bit platform (4) is set
It is useful for placing the charging tote cart (1) of pcb board to be exposed (2), the right of the placing frame of winding the film (8) is equipped with to place
The discharging tote cart (12) of pcb board (11) is exposed.
4. a kind of Full-automatic exposure machine according to claim 3, which is characterized in that the charging tote cart (1) and discharging
Tote cart (12) is connected with AGV floor trucks.
5. a kind of Full-automatic exposure machine according to claim 1, which is characterized in that the contraposition camera system (6) includes
CCD camera and visual-alignment system, the CCD camera are electrically connected with visual-alignment system.
6. a kind of Full-automatic exposure machine according to claim 1, which is characterized in that the feeding manipulator (3), carrying implement
Sucker is equipped on tool hand (5) and blanking mechanical hand (10), the lower face of the sucker is flat shape.
7. a kind of Full-automatic exposure machine according to claim 1, which is characterized in that described that PCB is equipped with to bit platform (4)
Locating module, the locating module include stepper motor (15), and the stepper motor (15) is connected with driver, the driver
Screw guide rail (14) is connected with, the driver is electrically connected with contraposition camera system (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810115225.XA CN108153118A (en) | 2018-02-06 | 2018-02-06 | A kind of Full-automatic exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810115225.XA CN108153118A (en) | 2018-02-06 | 2018-02-06 | A kind of Full-automatic exposure machine |
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| Publication Number | Publication Date |
|---|---|
| CN108153118A true CN108153118A (en) | 2018-06-12 |
Family
ID=62459543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810115225.XA Pending CN108153118A (en) | 2018-02-06 | 2018-02-06 | A kind of Full-automatic exposure machine |
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| CN (1) | CN108153118A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709773A (en) * | 2019-02-28 | 2019-05-03 | 东莞市威力固电路板设备有限公司 | Dual stage face PCB exposure sources |
| CN110376853A (en) * | 2019-08-27 | 2019-10-25 | 爱司凯科技股份有限公司 | High-precision full-automatic sided exposure machine |
| CN110972402A (en) * | 2019-11-19 | 2020-04-07 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN115167301A (en) * | 2022-07-02 | 2022-10-11 | 珠海市鸿瑞信息技术股份有限公司 | Remote equipment management and control system and method based on network security protocol |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010166008A (en) * | 2009-01-19 | 2010-07-29 | Canon Inc | Substrate conveying system, exposure apparatus and device manufacturing method |
| CN205644016U (en) * | 2016-04-14 | 2016-10-12 | 东莞市安石金属科技有限公司 | Full -automatic LED exposure machine |
| CN106547174A (en) * | 2016-12-19 | 2017-03-29 | 浙江欧视达科技有限公司 | Full-automatic double-side exposure machine |
| CN206074992U (en) * | 2016-06-24 | 2017-04-05 | 广东华恒智能科技有限公司 | A kind of full-automatic integral exposes production line |
| CN106773547A (en) * | 2017-01-13 | 2017-05-31 | 西安电子科技大学 | A kind of full-automatic maskless lithography method based on automatic calibration |
| CN206282076U (en) * | 2016-10-24 | 2017-06-27 | 东莞市友辉光电科技有限公司 | 3D cover plate multistation exposure machines |
| CN208013667U (en) * | 2018-02-06 | 2018-10-26 | 成都凯景智能设备有限公司 | A kind of Full-automatic exposure machine |
-
2018
- 2018-02-06 CN CN201810115225.XA patent/CN108153118A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010166008A (en) * | 2009-01-19 | 2010-07-29 | Canon Inc | Substrate conveying system, exposure apparatus and device manufacturing method |
| CN205644016U (en) * | 2016-04-14 | 2016-10-12 | 东莞市安石金属科技有限公司 | Full -automatic LED exposure machine |
| CN206074992U (en) * | 2016-06-24 | 2017-04-05 | 广东华恒智能科技有限公司 | A kind of full-automatic integral exposes production line |
| CN206282076U (en) * | 2016-10-24 | 2017-06-27 | 东莞市友辉光电科技有限公司 | 3D cover plate multistation exposure machines |
| CN106547174A (en) * | 2016-12-19 | 2017-03-29 | 浙江欧视达科技有限公司 | Full-automatic double-side exposure machine |
| CN106773547A (en) * | 2017-01-13 | 2017-05-31 | 西安电子科技大学 | A kind of full-automatic maskless lithography method based on automatic calibration |
| CN208013667U (en) * | 2018-02-06 | 2018-10-26 | 成都凯景智能设备有限公司 | A kind of Full-automatic exposure machine |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709773A (en) * | 2019-02-28 | 2019-05-03 | 东莞市威力固电路板设备有限公司 | Dual stage face PCB exposure sources |
| CN110376853A (en) * | 2019-08-27 | 2019-10-25 | 爱司凯科技股份有限公司 | High-precision full-automatic sided exposure machine |
| CN110972402A (en) * | 2019-11-19 | 2020-04-07 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN110972402B (en) * | 2019-11-19 | 2020-11-06 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN115167301A (en) * | 2022-07-02 | 2022-10-11 | 珠海市鸿瑞信息技术股份有限公司 | Remote equipment management and control system and method based on network security protocol |
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