CN108151648A - Double guide rail measuring tables and its method for measuring coordinates of targets - Google Patents
Double guide rail measuring tables and its method for measuring coordinates of targets Download PDFInfo
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- CN108151648A CN108151648A CN201711447974.4A CN201711447974A CN108151648A CN 108151648 A CN108151648 A CN 108151648A CN 201711447974 A CN201711447974 A CN 201711447974A CN 108151648 A CN108151648 A CN 108151648A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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Abstract
The present invention relates to a kind of double guide rail measuring tables, including：Two X-axis guide rails, the side of two X-axis guide rails are respectively fixed with the main grating scale of X-axis and X-axis pair grating scale；X-direction mobile platform, equipped with the first main reading head for reading the main grating scale of X-axis when moving and the first secondary reading head for reading X-axis pair grating scale；Two Y-axis guide rails drive the Y-axis guide rail to advance with respect to X-axis guide rail by X-direction mobile platform, and the side of two Y-axis guide rails is respectively fixed with the main grating scale of Y-axis and Y-axis pair grating scale；Y-direction mobile platform, equipped with the first main reading head for reading the main grating scale of Y-axis when moving and the first secondary reading head for reading Y-axis pair grating scale.The coordinate of target is adjusted using secondary grating scale, obtains the coordinate of the more accurately target of closing to reality, so as to eliminate XY platforms since the accuracy of detection that the twisted straps in traveling process are come declines.In addition it also proposed a kind of method of the measurement coordinates of targets based on above-mentioned platform.
Description
Technical field
The present invention relates to Precision measurement field, the method for more particularly to a kind of double guide rail measuring tables and its measuring coordinate.
Background technology
Current high-precision measuring table is typically all small stroke, and for the measuring table that stroke is larger, platform needs
Using the platform of double guide rails, if driven using double, of high cost, debugging is difficult, if driven using single, platform is during traveling
There can be twisting, measurement accuracy is caused to decline.
Invention content
Based on this, it is necessary to for there is twisting in double guide rail platform traveling process, providing a kind of double guide rails and surveying
Measure platform.
A kind of double guide rail measuring tables, including：
Spaced two X-axis guide rails, the side of two X-axis guide rails are respectively fixed with the main grating scale of X-axis and X-axis pair light
Grid ruler；
X-direction mobile platform is matched with two X-axis guide rails, equipped with reading the of the main grating scale of the X-axis when moving
One main reading head and the first secondary reading head for reading the X-axis pair grating scale；
Spaced two Y-axis guide rails drive opposite X-axis guide rail to advance, two Y-axis by the X-direction mobile platform
The side of guide rail is respectively fixed with the main grating scale of Y-axis and Y-axis pair grating scale；
Y-direction mobile platform is matched with two Y-axis guide rails, equipped with reading the of the main grating scale of the Y-axis when moving
Two main reading heads and the second secondary reading head for reading the Y-axis pair grating scale.
Main grating scale and secondary grating scale are provided in above-mentioned double guide rail measuring tables, X and Y-direction, secondary light can be utilized
Grid ruler adjusts the coordinate of target A, obtains the more coordinate of the accurately target A of closing to reality, so as to eliminate XY platforms due to
The accuracy of detection that twisted straps in traveling process are come declines.
Further include control system in one of the embodiments, the control system is receiving the described first main reading
Head, the first secondary reading head, the second main reading head and the second secondary reading head data information.
The display device being connect with the control system is further included in one of the embodiments, to show the number
It is believed that breath.
Further include X-direction driving mechanism in one of the embodiments, including be located at two X-axis guide rail middles to
The ball-screw that X-direction mobile platform is driven to advance；Y-direction driving mechanism is further included, including being located at two Y-axis guide rail middles
To the ball-screw that Y-direction mobile platform is driven to advance.
The X-direction driving mechanism further includes the servo motor for driving the ball-screw in one of the embodiments,
The Y-direction driving mechanism further includes the servo motor for driving the ball-screw.
Board, the main grating scale of described two X-axis guide rails, X-axis and X-axis pair grating are further included in one of the embodiments,
Ruler is each attached on board, and the main grating scale of the Y-axis guide rail, Y-axis and Y-axis pair grating scale are each attached to the X-direction movement and put down
On platform.
The main grating scale of X-axis and the first main reading head more than under type or left and right mode are set in one of the embodiments,
X-axis pair grating scale and the first secondary reading head more than under type or left and right mode are set, the main grating scale of Y-axis and the second main reading head with
Upper and lower mode or left and right mode are set, and Y-axis pair grating scale and the second secondary reading head more than under type or left and right mode are set.
A kind of method for measuring coordinates of targets using double guide rail measuring tables is also proposed, including step：
Obtain the reading x1 of the main grating scale of X-axis and the reading x2 of the secondary main grating scale of X-axis and the reading for obtaining the main grating scale of Y-axis
The reading y2 of number y1 and the secondary main grating scale of Y-axis；
The X-coordinate and Y coordinate of target are iteratively solved by the following formula：
Spacing of the wherein XD between the main grating scale of Y-axis and Y-axis pair grating scale, YD is between the main grating scale of X-axis and X-axis pair grating scale
Spacing, the initial value of X is x1, and the initial value of Y is y1.
Using the measurement data of above-mentioned measuring table, the coordinate of target can be accurately solved by iterative algorithm, so as to eliminate
XY platforms decline due to the accuracy of detection that the twisted straps in traveling process are come.
Iteration n times in one of the embodiments, will be calculated X and Y X-coordinate and Y coordinate as target, and N is certainly
So number, the N are not more than 3.
Step is further included in one of the embodiments,：When the X-coordinate value that iterative solution obtains and the seat with X before substitution
The difference of scale value within a predetermined range when, stop iterative solution.
Description of the drawings
Fig. 1 is the schematic diagram of double guide rail measuring tables of one embodiment of the invention；
Fig. 2 and Fig. 3 is respectively the structure diagram of X-direction mobile platform and Y-direction mobile platform；
Fig. 4 is the schematic diagram using measuring table measuring target point coordinate shown in FIG. 1.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.Many details are elaborated in the following description in order to fully understand this hair
It is bright.But the invention can be embodied in many other ways as described herein, those skilled in the art can be not
Similar improvement is done in the case of violating intension of the present invention, therefore the present invention is not limited by following public specific embodiment.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The normally understood meaning of technical staff is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein " and/or " including one or more phases
The arbitrary and all combination of the Listed Items of pass.
Below in conjunction with the accompanying drawings, illustrate the better embodiment of double guide rail measuring tables of the invention.
Referring to figs. 1 to Fig. 3, double guide rail measuring tables 100 of one embodiment of the invention, including：Spaced two X
Axis rail 110, with two 110 matched X-direction mobile platforms 120 of X-axis guide rail, spaced two Y-axis guide rails 130 and
With the matched Y-direction mobile platform 140 of two Y-axis guide rails.Wherein, Y-direction mobile platform 140 exists relative to Y-axis guide rail 130
It is moved in Y-direction.X-direction mobile platform 120 moves in the X direction relative to X-axis guide rail 110, and X-direction mobile platform 120 moves
Y-axis guide rail 130 and Y-direction mobile platform 140 can be driven to move in the X direction together while dynamic, so as to form XY movements
Platform.
Double guide rail measuring tables 100 further include the main grating scale 150 of X-axis and X-axis pair grating scale 160, along the guiding of X-axis guide rail
Direction is respectively arranged at 110 side of X-axis guide rail；And the main grating scale 170 of Y-axis and Y-axis pair grating scale 180, along Y-axis guide rail
130 guide direction is respectively arranged at 130 side of Y-axis guide rail.In other words, the side of one of X-axis guide rail 110 is equipped with
The main grating scale 150 of X-axis, the side of another X-axis guide rail 110 are equipped with X-axis pair grating scale 160.One of Y-axis guide rail 130
Side is equipped with the main grating scale 170 of Y-axis, and the side of another Y-axis guide rail 130 is equipped with Y-axis pair grating scale 180.
Correspondingly, X-direction mobile platform 120 is equipped with the first main reading head 121 to read the main grating scale 150 of X-axis
With the first secondary reading head 122 for reading X-axis pair grating scale 160.When X-direction mobile platform 120 is relative to the main grating scale 150 of X-axis
When being moved with X-axis pair grating scale 160, the first main reading head 121 obtains the reading of the main grating scale 150 of X-axis, the first secondary reading head
122 readings for obtaining X-axis pair grating scale 160.
Y-direction mobile platform 140 is equipped with the second main reading head 141 to read the main grating scale 170 of Y-axis and reads Y
The secondary reading head 142 of the second of axis pair grating scale 180.When Y-direction mobile platform 140 is relative to the main grating scale 170 of Y-axis and Y-axis pair
When grating scale 180 moves, the second main reading head 141 obtains the reading of the main grating scale 170 of Y-axis, and the second secondary reading head 142 then obtains
The reading of Y-axis pair grating scale 180.
Double guide rail measuring tables 100 coordinate NI Vision Builder for Automated Inspection to use in piece test.In use, by detected part
It places in the Y direction on mobile platform 140, the image for being detected part is acquired using industrial camera, then image is transmitted to upper
Machine, host computer recycle Survey Software analysis to measure.Machine vision has the good characteristic that many traditional measurement methods cannot compare.
Measuring system based on machine vision generally comprises lighting device, industrial camera, camera lens, host computer and Survey Software composition.It
Principle be that the profile of part to be detected is highlighted by the light that lighting system is sent out, camera lens by light-ray condensing CMOS faces battle array on,
Collected optical signal is converted into charge signal by CMOS again, and is transferred to calculating meter, and corresponding Survey Software measures point
Analyse parameters size to be detected.When needing to adjust the position of part to be detected, then by making X-direction mobile platform 120
The position to adjust part to be detected is moved with Y-direction mobile platform 140.Such as Fig. 1, X-direction mobile platform 120 and Y-direction are moved
Mobile any position that the target A being placed on Y-direction mobile platform 140 can be made to be in X/Y plane coordinate system of moving platform 140.
With reference to Fig. 4, it is described in detail and how above-mentioned double guide rail measuring tables 100 is utilized accurately to obtain target A in XY
Coordinate in plane coordinate system.
Such as Fig. 4, under the position being presently in target A, setting：The main grating scale 150 of X-axis and 160 spacing of X-axis pair grating scale
From for YD, distance is XD between the main grating scale 170 of Y-axis and Y-axis pair grating scale 180, the current main 150 reading x1 of grating scale of X-axis, X-axis
Secondary 160 reading x2 of grating scale, the main 170 reading y1 of grating scale of Y-axis, 180 reading y2, A point of Y-axis pair grating scale leave X-axis key light grid
150 distance xa, A point of ruler leaves the main 170 distance ya of grating scale of Y-axis.
Then the X-coordinate of practical A and Y coordinate are obtained using following formula iterative calculation：
Wherein, if initial value=x1 of initial value=y1 of X, Y, X-coordinate, Y coordinate are calculated.Then the X that will be calculated
The X and Y on the right side of formula are substituted into Y, regains X, Y, iteration n times can restrain.
It can be seen from figure 4 that xa leaves main 150 distance of grating scale of X-axis for A points, ya leaves the main grating scale of Y-axis for A points
170 distances.Therefore, xa corresponds to the Y coordinate of target A, and ya then corresponds to the X-coordinate of target A.Here for convenient for X-coordinate and Y
Coordinate is distinguished, and is represented respectively with xa and ya.
By taking XY platforms are in X-direction movement as an example, since X-direction mobile platform 120 is moved through along two X-axis guide rails 110
Cheng Zhong, X-direction mobile platform 120 may lead to that there are torques at two X-axis guide rails 110 because of discontinuity so that X-axis master
150 reading x1 of grating scale is different with the reading x2 of X-axis pair grating scale 160, at this time using x1 or x2 as the reality of target A
Y coordinate is inaccurate, influences the subsequent precision for measuring work.Similar, reading y1 and y2 cannot be directly as mesh
Mark the X-coordinate of A.
Based on this situation, in the present embodiment, more accurately X-coordinate and Y coordinate are obtained using iterative algorithm.Specifically,
By taking the solution formula for setting Y coordinate as an example, when XY platforms move in the Y direction, A points leave the actual bit of the main grating scale 150 of X-axis
It is between the position corresponding to reading x1 and the position corresponding to reading x2 to put xa.Therefore, it is corresponded to using similar triangles
This proportional principle of side, the formula that can design to obtain calculating Y coordinate areFor X-coordinate
For solution formula design, principle is similar.
Thus X-coordinate and Y coordinate can be iteratively solved by the following formula respectively： Spacing of the wherein XD between the main grating scale of Y-axis and Y-axis pair grating scale, YD are the main grating scale of X-axis
Spacing between X-axis pair grating scale, the initial value of X is x1, and the initial value of Y is Y1.In this way, by iterative solution, can obtain
To relatively accurately X and Y.
The times N of iteration is natural number, depending on precision as needed, is generally set to 3 times.In addition, the number of iteration is not
Make specific restriction, but set stopping criterion, stop iteration when reaching the accuracy standard.
For example, the stopping criterion can be X and substitute into before X coordinate value difference within a predetermined range when between difference
Limit.Difference as set therebetween is not more than 2 millimeters, then when program performs, is iterated to calculate always until meeting above-mentioned item
Part.
Main grating scale and secondary grating scale are provided in above-mentioned double guide rail measuring tables 100, X and Y-direction, pair can be utilized
Grating scale adjusts the coordinate of target A, obtains the more coordinate of the accurately target A of closing to reality, so as to eliminate XY platforms by
The accuracy of detection that twisted straps in traveling process are come declines.
In one embodiment, double guide rail measuring tables 100 further include control system, and wherein control system is to receive
State the data information of first main the 121, first pair of reading head reading head 122, the second main secondary reading head 142 of reading head 141 and second.
After control system receives above-mentioned data information, the X-coordinate and Y coordinate of target A can be calculated according to pre-set programs.Control system
In may include host computer, calculate the X-coordinate of target A and Y coordinate using the host computer.
Further, the display device being connect with control system is further included, to show the data information.Display device
CRT monitor, LCD display etc. may be used.
In one embodiment, double guide rail measuring tables 100 further include X-direction driving mechanism, are led including being located at two X-axis
110 middle of rail to drive X-direction mobile platform 120 advance ball-screw；Y-direction driving mechanism is further included, including position
Ball-screw in two 130 middles of Y-axis guide rail Y-direction mobile platform 140 to be driven to advance.
In this embodiment, double guide rail measuring tables 100 in the X direction with drive pattern, and be driven using single in Y-direction
Mechanism is ball-screw.Ball-screw has higher transmission accuracy, helps to improve the precision of measurement.It may be noted that ball
The position of leading screw is not necessarily required to middle, can be tilted to side.In addition, transmission mechanism can also be other existing sides
Formula, such as rack-and-pinion, slider-crank mechanism, cylinder system.
Further, the X-direction driving mechanism further includes the servo motor for driving the ball-screw, the Y-direction
Driving mechanism further includes the servo motor for driving the ball-screw.In addition, servo motor can also be other power outputs
Device, such as hydraulic motor, gasoline engine, diesel engine.
In one embodiment, double guide rail measuring tables 100 further include board 190, described two X-axis guide rails 110, X-axis
Main grating scale 150 and X-axis pair grating scale 160 are each attached on board 190, the main grating scale 170 of the Y-axis guide rail 130, Y-axis and Y
Axis pair grating scale 190 is each attached to 120 on the X-direction mobile platform.
Board 190 is supporting entire XY platforms.The structure type of board 190 is unlimited, such as can be rack, can also
It is platform-type.The main grating scale 150 of X-axis and X-axis pair grating scale 160 are fixed on board 190.Specific fixed mode is not made especially
It is required that.When X-direction moves, target A is moved XY platforms relative to the main grating scale 150 of X-axis and X-axis pair grating scale 160；XY platforms
When moving in the Y direction, target A is moved relative to the main grating scale 170 of Y-axis and Y-axis pair grating scale 180.
Further, the main 150 and first main reading head 121 of grating scale of X-axis preferably Yi Shang under type setting, X-axis pair grating
Secondary reading head more than the 122 under type setting of ruler 160 and first；The main 170 and second main reading head 141 of grating scale of Y-axis is with upper and lower
Formula is set, secondary reading head more than the 142 under type setting of Y-axis pair grating scale 180 and second.
For example, the main grating scale 150 of X-axis is attached on board, and the first main reading head 121 is arranged on X-direction mobile platform
120 bottom；The secondary reading head 122 of X-axis pair grating scale 160 and first is set in a similar manner.The main grating scale 170 of Y-axis is attached to X
The top of direction mobile platform 120 and the second main reading head 141 set the bottom of mobile platform 140 in the Y direction；Y-axis pair grating
The secondary reading head 142 of ruler 180 and second is set in a similar manner.
In addition, by taking the main 150 and first main reading head 121 of grating scale of X-axis as an example, the two can also left and right mode set side by side
It puts.
The present invention also provides a kind of method for measuring coordinates of targets using above-mentioned double guide rail measuring tables 100, including step：
S100, the reading x1 for obtaining the main grating scale of X-axis and the reading x2 of the secondary main grating scale of X-axis and the acquisition main grating scale of Y-axis
Reading y1 and the secondary main grating scale of Y-axis reading y2.
In this step, the reading x1 of the main grating scale 150 of X-axis is read by the first main reading head 121.Pass through the first secondary reading
Read the reading x2 of X-axis pair grating scale 160 for several 122.The main grating scale 170 of Y-axis is read by the second main reading head 141
Reading y1.The reading y2 of Y-axis pair grating scale 180 is read by the second secondary reading head 142.
S200, the X-coordinate and Y coordinate that target is iteratively solved by the following formula： Spacing of the wherein XD between the main grating scale of Y-axis and Y-axis pair grating scale, YD are the main grating scale of X-axis
Spacing between X-axis pair grating scale, the initial value of X is x1, and the initial value of Y is Y1.
It has chatted above, by multiple iterative solution, the X and Y of different accuracy can be obtained.Utilize above-mentioned measuring table
100 measurement data by using above-mentioned method, can obtain more accurately X and Y, reduce the measurement essence that twisted straps are come
Spend error.
In one embodiment, X and Y X-coordinate and Y coordinate as target will be calculated in iteration n times, and N is nature
Number, the N are not more than 3.
In general, 3 times iterate to calculate, it can reach the accuracy of reading of grating scale substantially.
In one embodiment, step is further included：The coordinate value of X before the X-coordinate value and substitution that iterative calculation obtains
Difference within a predetermined range when, stop iterative calculation.
For example, it may be the difference limit of setting X and the coordinate value of X before substitution, to determine when stop iteration.As assumed
Measuring table required precision is 10 micron levels, and the difference limit before setting X and substituting between the coordinate value of X is not more than 1 micron.
When then program performs, iterated to calculate always until meeting above-mentioned condition.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of double guide rail measuring tables, which is characterized in that including：
Spaced two X-axis guide rails, the side of two X-axis guide rails are respectively fixed with the main grating scale of X-axis and X-axis pair grating
Ruler；
X-direction mobile platform is matched with two X-axis guide rails, equipped with the first master for reading the main grating scale of the X-axis when moving
Reading head and the first secondary reading head for reading the X-axis pair grating scale；
Spaced two Y-axis guide rails drive the Y-axis guide rail to advance with respect to X-axis guide rail by the X-direction mobile platform,
The side of two Y-axis guide rails is respectively fixed with the main grating scale of Y-axis and Y-axis pair grating scale；
Y-direction mobile platform is matched with two Y-axis guide rails, equipped with the second master for reading the main grating scale of the Y-axis when moving
Reading head and the second secondary reading head for reading the Y-axis pair grating scale.
2. double guide rail measuring tables according to claim 1, which is characterized in that further include control system, the control system
It unites to receive the described first main reading head, the first secondary reading head, the second main reading head and the data information of the second secondary reading head.
3. double guide rail measuring tables according to claim 2, which is characterized in that further include what is connect with the control system
Display device, to show the data information.
4. double guide rail measuring tables according to claim 1, which is characterized in that X-direction driving mechanism is further included, including position
Ball-screw in two X-axis guide rail middles X-direction mobile platform to be driven to advance；Y-direction driving mechanism is further included, is wrapped
Include the ball-screw Y-direction mobile platform to be driven to advance positioned at two Y-axis guide rail middles.
5. double guide rail measuring tables according to claim 4, which is characterized in that the X-direction driving mechanism further includes drive
The servo motor of the ball-screw is moved, the Y-direction driving mechanism further includes the servo motor for driving the ball-screw.
6. double guide rail measuring tables according to claim 1, which is characterized in that further include board, described two X-axis are led
The main grating scale of rail, X-axis and X-axis pair grating scale are each attached on board, the main grating scale of the Y-axis guide rail, Y-axis and Y-axis pair grating
Ruler is each attached on the X-direction mobile platform.
7. double guide rail measuring tables according to claim 6, which is characterized in that the main grating scale of X-axis and the first main reading head
More than under type or left and right mode are set, and X-axis pair grating scale and the first secondary reading head more than under type or left and right mode are set, Y
The main grating scale of axis and the second main reading head more than under type or left and right mode are set, Y-axis pair grating scale and the second secondary reading head with
Upper and lower mode or left and right mode are set.
8. a kind of use the method that double guide rail measuring tables measure coordinates of targets as described in claim 1, which is characterized in that including
Step：
Obtain the reading x1 of the main grating scale of X-axis and the reading x2 of the secondary main grating scale of X-axis and the reading y1 for obtaining the main grating scale of Y-axis
With the reading y2 of the secondary main grating scale of Y-axis；
The X-coordinate and Y coordinate of target are iteratively solved by the following formula：
Spacing of the wherein XD between the main grating scale of Y-axis and Y-axis pair grating scale, YD is between the main grating scale of X-axis and X-axis pair grating scale
Spacing, the initial value of X is x1, and the initial value of Y is y1.
9. method as claimed in claim 8, which is characterized in that the X-coordinate of X and Y as target will be calculated in iteration n times
And Y coordinate, N are natural number, the N is not more than 3.
10. method as claimed in claim 8, which is characterized in that further include step：When the obtained X-coordinate value of iterative solution with
Before substitution the difference of the coordinate value of X within a predetermined range when, stop iterative solution.
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| CN105258637A (en) * | 2015-10-30 | 2016-01-20 | 东莞市嘉腾仪器仪表有限公司 | Fully-automatic cantilever type image measuring device and method |
| CN105865340A (en) * | 2016-05-24 | 2016-08-17 | 南京理工大学 | Automatic measuring device and method for precision of rolling linear guides |
| CN106842075A (en) * | 2017-04-10 | 2017-06-13 | 华中科技大学 | A kind of Measurement and Control System |
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