CN108145179B - Micro-nano structure machining tool and micro-nano structure processing method - Google Patents
Micro-nano structure machining tool and micro-nano structure processing method Download PDFInfo
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- CN108145179B CN108145179B CN201711203204.5A CN201711203204A CN108145179B CN 108145179 B CN108145179 B CN 108145179B CN 201711203204 A CN201711203204 A CN 201711203204A CN 108145179 B CN108145179 B CN 108145179B
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- 239000002086 nanomaterial Substances 0.000 title claims abstract description 143
- 238000003754 machining Methods 0.000 title claims abstract description 37
- 238000003672 processing method Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 239000013013 elastic material Substances 0.000 claims description 3
- 241001416181 Axis axis Species 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000005484 gravity Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 241000222712 Kinetoplastida Species 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 2
- 210000003361 heart septum Anatomy 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 208000003618 Intervertebral Disc Displacement Diseases 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- Mechanical Engineering (AREA)
- Turning (AREA)
Abstract
The present invention provides a kind of micro-nano structure machining tool, comprising: can be equipped with the rotation axis of the vertical lathe X-direction of axis along the tool apron that lathe X-direction moves, tool apron, rotation axis end is installed with cutter；It is oppositely arranged with tool apron and can be along the work rest that machine Z-axis direction is moved；The vibration device being fixed on work rest, vibration device includes base station, first flexible vibration body, second flexible vibration body, the vibration section of work piece platform and the first flexible vibration body of driving and the vibration of the second flexible vibration body, first flexible vibration body connects base station and work piece platform and vibrating sensing direction is lathe X-direction, second flexible vibration body connects base station and work piece platform and vibrating sensing direction is machine Z-axis direction, first flexible vibration body and the second flexible vibration body are located at the adjacent two sides of work piece platform, work piece platform is not connected to have the first flexible vibration body and the side of the second flexible vibration body to be oppositely arranged with cutter.The present invention also provides two kinds of micro-nano structure processing methods.
Description
Technical field
The present invention relates to micro-nano structure manufacture field, in particular to a kind of micro-nano structure machining tool and micro-nano structure processing
Method.
Background technique
In current field of engineering technology, more and more staff realized using micro-nano structure surface it is antifouling,
The engineering challenges such as drag reduction, fungi-proofing.But due to the complexity of micro-nano structure surface itself and processing and manufacturing process high-precision,
High efficiency requirement, so that the application extension of micro-nano structure surface receives many limitations.
Currently, people mostly use Ultraprecision Machining to process micro-nano structure surface greatly, mainly watched by sharp knife
The cooperation of technology and principal cutting movement is taken to realize.But there is during workpiece radial feed in the process of this method
Opposite turning linear velocity persistently changes, servo vibration cutting system dynamic response capability is insufficient, micro-nano structure surface cutting is flexible
A series of problems, such as micro-nano structure pattern deviates under the influence of difference and factors, seriously restrict multi-level micro-nano structure surface
Highly-efficient processing manufacture.
Summary of the invention
The purpose of the present invention is to provide a kind of micro-nano structure machining tools to realize multi-level for processing micro-nano structure
The highly-efficient processing of micro-nano structure surface manufactures.
The present invention also provides a kind of micro-nano structure processing methods.
Micro-nano structure machining tool of the present invention, for processing micro-nano structure, comprising:
Tool apron, the tool apron can be moved along lathe X-direction, and the tool apron is equipped with the vertical lathe X-direction of axis
Rotation axis, the rotation axis end are installed with knife rest and the cutter on knife rest, and the cutter deviates in the rotation axis
Heart setting；
Work rest, the work rest are oppositely arranged with the tool apron, and can be moved along machine Z-axis direction；
Vibration device, the vibration device are fixed on the work rest, and the vibration device includes base station, the first flexibility
The vibration of vibrating body, the second flexible vibration body, work piece platform and the first flexible vibration body of driving and the vibration of the second flexible vibration body
Portion, it is machine that the first flexible vibration body, which connects the base station and work piece platform and the vibrating sensing direction of the first flexible vibration body,
Bed X-direction, the second flexible vibration body connect the vibrating sensing of the base station and work piece platform and the second flexible vibration body
Direction is machine Z-axis direction, and it is adjacent that the first flexible vibration body and the second flexible vibration body are located at the work piece platform
Two sides, the work piece platform is not connected to have the side of the first flexible vibration body and the second flexible vibration body is opposite with the cutter to set
It sets.
Wherein, the vibration section includes the first vibrator and the second vibrator；First vibrator connects the base station
With the first flexible vibration body, first vibrator drives the work piece platform to vibrate along lathe X-direction；Described second
Vibrator connects the base station and the second flexible vibration body, and second vibrator drives the work piece platform along lathe Z
Axis direction vibration.
Wherein, the first flexible vibration body and the second flexible vibration body are the flexible hinge structure of parallelogram.
Wherein, the base station is equipped with rectangular notch and two through slots being connected to the notch, the work piece platform are located at
It is arranged in the notch and with notch inner wall interval, the vibrator is connected in through slot, the first flexible vibration body
The two adjacent sides of work piece platform are separately connected with the second flexible vibration body.
Wherein, first vibrator and the second vibrator are piezoelectric ceramic actuator.
Wherein, the knife rest includes chassis and cutter fixed part, and the fixed part is removably loaded on chassis, the bottom
Disk is loaded on the end of the rotation axis, and the cutter is set to the work surface on fixed part towards workpiece.
Wherein, the base station, the first flexible vibration body, the second flexible vibration body and work piece platform are using elastic material one
Molding.
Micro-nano structure processing method of the present invention, for cutting multi-level micro-nano structure, which comprises
First step sets the vibration parameters of the first flexible vibration body and the second flexible vibration body；
Second step aligns cutter with the workpiece being fixed in work piece platform, wherein the workpiece table to be processed
Facing towards the surface of knife rest installing cutter；
The cutter after contraposition is moved to initial manufacture position by third step；
Four steps moves the work rest along machine Z-axis direction to realize the feed of the cutter opposite piece, together
When, starting the tool apron moves cutter while rotation along the lathe X-direction, at the same time along the machine Z-axis side
To the movement work rest and drive the first flexible vibration body along the vibration of lathe X-direction, the second flexible vibration body along machine Z-axis
Direction vibration, makes the cutter work to form the multi-level micro-nano of extending direction lathe Y direction on the surface of the workpiece
Structure forms first row micro-nano structure；
5th step moves the work rest along the machine Z-axis direction to realize the knife out of the cutter, and along described
Lathe X-direction makes the mobile pre-determined distance of the knife rest, repeats the four steps, forms the formed with the four steps
The adjacent another column first row micro-nano structure of one column micro-nano structure, the distance between adjacent two described first row micro-nano structures with
The pre-determined distance is identical；
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
Wherein, the cutter is made to work to form extending direction lathe on the surface of the workpiece described in four steps
The multi-level grooving of Y direction, including cutter rotate while along the lathe X-direction move and the work rest along described in
The mobile lathe Y direction basis of formation face shape in the workpiece in machine Z-axis direction, while the first flexible vibration body and second soft
Property vibrating body vibration make cutter be superimposed in base surface shape while the shape of basis of formation face micro-nano structure formed it is multi-level micro-
Micro-nano structure.
Wherein, the vibration parameters of the flexible vibration of setting first described in first step body and the second flexible vibration body, root
According to the vibration parameters of dimensional parameters setting the first flexible vibration body and the second flexible vibration body of micro-nano structure.
The present invention also provides a kind of micro-nano structure processing methods, for cutting multi-level micro-nano structure, which comprises
First step sets the vibration parameters of the first flexible vibration body and the second flexible vibration body；
Second step aligns cutter with the workpiece being fixed in work piece platform, wherein work pieces process is facing towards X
Axis extending direction, the rotation axis and the work stage misplace, and point of a knife extending direction is vertical with rotation axis；
The cutter after contraposition is moved to initial manufacture position by third step；
Four steps moves the tool apron along lathe X-direction to realize the feed of the cutter opposite piece, together
When, starting the tool apron moves cutter while rotation along the lathe X-direction, drives the first flexible vibration at the same time
Body is vibrated along lathe X-direction, the second flexible vibration body is vibrated along machine Z-axis direction, makes the cutter in the table of the workpiece
Face work to be formed extending direction be lathe Y direction multi-level micro-nano structure, formed first row micro-nano structure；
5th step moves the tool apron along the lathe X-direction to realize the knife out of the cutter, and along the machine
Bed Z-direction makes the mobile pre-determined distance of the work rest, repeats the four steps, forms the formed with the four steps
The adjacent another column first row micro-nano structure of one column micro-nano structure, the distance between adjacent two described first row micro-nano structures with
The pre-determined distance is identical；
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
The micro-nano structure machining tool provided by the invention and micro-nano structure processing method, by first by the work rest
On add a two-freedom vibration device, the workpiece is installed on the vibration device, and the tool offset is installed
In in the rotation axis for the tool apron being oppositely arranged with the work rest.By while controlling cutter rotation, described in control
Tool apron is moved along the lathe X-direction, to realize the compensation for rotating the arc-shaped track to be formed to the cutter, while along institute
The mobile work rest of lathe Z-direction is stated in the lathe Y direction basis of formation face shape of the workpiece surface.And in basis of formation
While the shape of face, the vibration of driving the first flexible vibration body and the second flexible vibration body makes the cutter in the workpiece surface shape
Multi-level micro-nano structure is formed at micro-nano structure is superimposed while base surface shape in base surface shape.I.e. in the present invention, pass through shifting
The processing of moving knife seat and work rest cooperation cutter optimized integration face shape on the workpiece, and pass through two-freedom vibration dress simultaneously
It sets and is superimposed micro-nano structure in the base surface shape with cutter cooperative movement, so as to disposably process multi-level micro-nano knot
Structure realizes the highly-efficient processing manufacture of multi-level micro-nano structure.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the micro-nano structure machining tool of the embodiment of the present invention.
Fig. 2 is the structural schematic diagram of vibration device overlook direction in micro-nano structure machining tool described in Fig. 1.
Fig. 3 is the structural schematic diagram of the first embodiment of micro-nano structure machining tool intermediate slide described in Fig. 1.
Fig. 4 is the structural schematic diagram of second of embodiment of micro-nano structure machining tool intermediate slide described in Fig. 1.
Fig. 5 is the structural schematic diagram of another embodiment of micro-nano structure machining tool of the present invention.
Fig. 6 is the structural schematic diagram of micro-nano structure machining tool intermediate slide described in Fig. 5.
Fig. 7 is the flow diagram of micro-nano structure processing method of the present invention, wherein this method is suitable for shown in Fig. 1
Lathe.
Fig. 8 is compensation schematic diagram in track when cutter processes the workpiece surface in method on Fig. 7.
Fig. 9 is the flow diagram of another micro-nano structure processing method of the present invention, wherein this method is suitable for shown in Fig. 5
Lathe.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1 and Fig. 2 are please referred to, the present invention provides a kind of micro-nano structure machining tool 100, and micro-nano structure machining tool is used for
In the micro-nano structure of the surface of workpiece processing array arrangement.The micro-nano structure is size in the micron-scale or nanoscale has
The micro-structure of certain geometrical shape.In the present embodiment, the micro-nano structure is superimposed upon more in base surface shape for micro-nano structure
Level micro-nano structure.The micro-nano structure machining tool 100 includes tool apron 10, work rest 20 and vibration device 30.Tool apron 10 can
It is moved along lathe X-direction, tool apron 10 is equipped with the rotation axis 11 of the vertical lathe X-direction rotation of axis, the end of rotation axis 11
Portion is installed with knife rest 12 and the cutter 13 on knife rest 12, and cutter 13 deviates the center setting of rotation axis 11.Work rest 20 with
Tool apron 10 is oppositely arranged, and work rest 20 can be moved along machine Z-axis direction.Vibration device 30 is fixed on work rest 20, vibration dress
Setting 30 includes base station 31, the first flexible vibration body 32, the first flexible vibration of the second flexible vibration body 33, work piece platform 34 and driving
The vibration section 35 of body 32 and the vibration of the second flexible vibration body 33；First flexible vibration body 32 connect base station 31 and work piece platform 34 and
The vibrating sensing direction of first flexible vibration body 32 is lathe X-direction, and the second flexible vibration body 33 connects base station 31 and workpiece
The vibrating sensing direction of platform 34 and the second flexible vibration body 33 is machine Z-axis direction, and the first flexible vibration body 32 and second is soft
Property vibrating body 33 is located at the adjacent two sides of work piece platform 34；Work piece platform 34 is not connected the first flexible vibration body 32 and second
The side of flexible vibration body 33 is oppositely arranged with cutter 13, forms multi-level micro-nano knot in the workpiece surface by cutter 13
Structure.
100 pairs of micro-nano structure machining tool traditional micro-nano structure machining tools of the invention are reequiped and are additionally arranged two certainly
By the vibration device 30 spent, when micro-nano structure machining tool 100 works, tool apron 10 and the cutter of movement cooperation simultaneously of work rest 20
13 on the workpiece process base surface shape while, the first flexible vibration body 32 and the second flexible vibration body 33 are in vibrator
The lower vibration for realizing high frequency of driving cooperates cutter 13 to being superimposed high-precision micro-nano structure in the base surface shape of the workpiece, thus
Realize that primary property processes multi-level micro-nano structure on the surface of the workpiece.
As shown in Fig. 2, vibration device 30 includes base station 31, the first flexible vibration body 32, the second flexible vibration body 33, workpiece
The vibration section 35 of platform 34 and the first flexible vibration body 32 of driving and the vibration of the second flexible vibration body 33.In the present embodiment, base station
31, the first flexible vibration body 32, the second flexible vibration body 33 and work piece platform 34 are integrally formed using elastic material, and this reality
It applies in example, the first flexible vibration body 32 and the second flexible vibration body 33 are the flexible hinge structure of parallelogram.It is understood that
, the first flexible vibration body 32 and the second flexible vibration body 33 or flexible elastic slice etc. act on similar with flexible hinge
Structure.
Specifically, vibration section 35 includes the first vibrator 351 and the second vibrator 352.First vibrator 351 connects base station
31 and the first flexible vibration body 32, the second vibrator 352 connect base station 31 and the second flexible vibration body 33.Base station 31 is equipped with rectangle
Notch 311 and two through slots 312 and 313 being connected to notch 311.Work piece platform 34 be located in notch 311 and with notch 311
The setting of inner wall interval, the first vibrator 351 connect base station 31 and the first flexible vibration body 32 in through slot 312, the first vibrator
351 make the first flexible vibration body 32 along lathe X-direction vibrating sensing, and it is soft that the second vibrator 352 connects base station 31 and second
For property vibrating body 33 in through slot 313, the second vibrator 352 makes the second flexible vibration body 33 along machine Z-axis direction vibrating sensing.
First flexible vibration body 32 and the second flexible vibration body 33 are separately connected the two adjacent sides of work piece platform 34.First flexible vibration
The vibrating sensing of first vibrator 351 to work piece platform 34 vibrates work piece platform 34 along lathe X-direction by kinetoplast 32, the
The vibrating sensing of second vibrator 352 to work piece platform is made work piece platform 34 shake along machine Z-axis direction by two flexible vibration bodies 33
It is dynamic.
Ginseng Fig. 1 is it is found that work piece platform 34 is oppositely arranged with tool apron 10 again.Tool apron 10 is led including first driving device, first
Rail 14, the first platform 15 connecting with the first guide rail 14, the carrying rotation axis knife rest 16 on the first platform 15 and second drive
Dynamic device.The first driving device drives the first guide rail 14 mobile and then drives the first platform 15 and be set to the first platform 15
On carrying rotation axis knife rest 16 moved along lathe X-direction, the lathe X-direction includes X-axis positive direction and X-axis losing side
To.In the present embodiment, first driving device is linear motor driver, and first driving device passes through linear motor driving first
Guide rail 14 is mobile and then drives the first platform 15 and the carrying rotation axis knife rest 16 on the first platform 15 along lathe X-axis side
To movement, X-axis positive direction is direction facing forward shown in FIG. 1 in the lathe X-direction, and the X-axis negative direction is shown in Fig. 1
Direction backwards.Certainly, in other embodiments of the invention, the first driving device can be motor or other drives
Dynamic device.Rotation axis 11, i.e. the rotation axis axis of rotation axis 11 are installed along the machine Z-axis direction on carrying rotation axis knife rest 16
Line direction extends along the machine Z-axis direction.Rotation axis 11 is connect with the second driving device, and the second driving device driving turns
Moving axis 11 is rotated with certain angular speed, and the angular speed of rotation axis 11 is adjusted by second driving device.This reality
It applies in example, the rotation axis 11 is cylinder, and columned rotation axis 11 can be realized better dynamic balancing when rotating, so that rotation
Being rotated by second driving device of axis 11 it is more steady.
Cutter 13 is installed in the end of rotation axis 11 by knife rest 12, and is arranged relative to the axis bias of rotation axis 11.
In other words, the rotation center of the position of cutter 13 and rotation axis 11 has a certain distance, so that the rotation of rotation axis 11 is to drive
When cutter 13 rotates, cutter 13 around rotation axis 12 the rotation of axis rounded track, the radius size of the circular trace with
The cutter 13 is identical as the distance between the rotation center of the rotation axis 11.In the present embodiment, cutter 13 is diamond tool
Tool, the diamond cutter have high hardness and wearability, it is higher to process fineness on the surface of the workpiece
The micro-nano structure.Also, in the present embodiment, cutter 13 is sharp knife, and the sharp knife includes two angled blades, two knives
Sword intersects a wedge angle, and cutter 13 is after knife rest 12 is installed on the end of rotation axis 11, and the wedge angle of cutter 13 is towards work rest
20。
The knife rest 12 includes chassis 121 and cutter fixed part, and the cutter fixed part is removably loaded on chassis 121
On, chassis 121 is loaded on the end of rotation axis 11.In the present embodiment, cutter fixed part includes and is not limited to flying disc, vacuum chuck
Or cutter carrier.
As shown in figure 3, cutter 13 is installed on flying disc 122 in a kind of embodiment of the present embodiment, and and flying disc
There is certain spacing between 122 middle heart septum, i.e. cutter 13 and the center of flying disc 122.Flying disc 122 and chassis 121
Center is overlapped with the rotation center of rotation axis 11, and flying disc 122 is installed in the end of rotation axis 11 by chassis 121, to make
The axis bias that cutter 13 is obtained relative to rotation axis 11 is arranged.In present embodiment, chassis 121 and flying disc 122 are size shape
Shape is identical discoid, so that rotation axis 11 drives flying disc 122 to realize better dynamic balancing when rotating, so that flying disc 122
It is rotationally more steady.It is understood that the structures such as chassis 121 and flying disc 122 or square plate, polygon disk.
In present embodiment, 122 plane of flying disc is divided into the identical fan-shaped surface of four areas, in each fan-shaped surface
Heart angle is 90 °.Identical with the fan-shaped surface shape size raised 1221 are formed on any two opposite fan-shaped surfaces.Protrusion
1221 side is the second plane 1222b, and the face parallel with flying disc 122 is the first plane 1222a.By by two protrusions
1221 are symmetrical arranged, and guarantee the dynamic balancing of flying disc 122 during rotation.It is understood that protrusion 1221 can also be
Other structures, such as can be for using the axle center of rotation axis 11 as multiple concentric loops in the center of circle, the side of the concentric loop
For the second plane 1222b or using the axle center of rotation axis 11 as the disc in center of circle protrusion, the side of the disc protrusion is
The second plane 1222b.Second plane 1222b of two protrusions 1221 includes angle in 90 ° of the first side plane and the
Multiple installation tune of identical quantity are uniformly equipped at intervals on two side planes, first side plane and second side plane
Save slot 1223.In the present embodiment, cutter 13 is one, and cutter 13 is installed on the first side plane or second of any one protrusion 1221
On any one installation and adjustment slot 1223 of side plane.Flying disc 122 is equipped with counterweight 1224 identical with 13 weight of cutter, matches
Heavy mail 1224 is installed on cutter 13 in axle center symmetrically the installation and adjustment slot 1223 of the second side, to guarantee to install knife
After tool 13 is installed on flying disc 122, the center of gravity of flying disc 122 is still overlapped with the rotation center of rotation axis 11, guarantees fly cutter
The dynamic balancing of disk 122, and then guarantee that the cutter 13 processes the higher micro-nano knot of fineness on the surface of the workpiece
Structure.It is understood that cutter 13 is two, and two cutters 13 are respectively arranged on two in some other embodiment of the invention
On a raised 1221 the second plane 1222b, and two cutters 13 are symmetrical relative to the rotation center of flying disc 122.
In present embodiment, flying disc 122 is connected with the one side that cutter 13 deviates from chassis 121, on the side wall on chassis 121
Equipped with evenly spaced multiple adjustment parts 1211, by being adjusted to multiple adjustment parts 1211, to guarantee fly cutter
The dynamic balancing of disk 122 during rotation, so that the cutter 13 being set on flying disc 122 keeps stable rotation, in institute
Scribing is stated on workpiece to obtain the higher micro-nano structure of fineness.In the present embodiment, the adjustment part 1211 is flat
Weigh screw, the depth for being bolted in the side wall on the chassis 1211 by adjusting the mass screw adjusts the mass screw
Head to chassis 121 side wall distance, to be finely adjusted to the center of gravity on chassis 121, to guarantee the center of gravity on chassis 121
It is overlapped with the center of rotation axis 11, and then guarantees the dynamic balancing of flying disc 122 during rotation.
As shown in figure 4, place different from the embodiment described above is in second of embodiment of the present embodiment, cutter 13
It is first installed on fixing body 1231, fixing body 1231 is adsorbed on vacuum chuck 123 by pull of vacuum again, cutter 13 and vacuum
There is certain interval between the middle heart septum of sucker 123, i.e. cutter 13 and the center of vacuum chuck 123.Vacuum chuck 123 and bottom
The center of disk 121 is overlapped with the rotation center of rotation axis 11, and vacuum chuck 123 is installed in the end of rotation axis 11 by chassis 121
Portion, so that cutter 13 is arranged relative to the axis bias of rotation axis 11.In present embodiment, chassis 121 and vacuum chuck
123 is identical discoid for size shape, so that rotation axis 11 drives vacuum chuck 123 to realize better dynamic balancing when rotating,
So that vacuum chuck 123 is rotationally more steady, and fixing body 1231 is blocky workpiece.It is understood that chassis 121 and true
The structures such as suction disk 123 or square plate, polygon disk, fixing body 1231 may be other etc. can be by vacuum chuck
123 shapes sucked by pull of vacuum.
In present embodiment, the plane of vacuum chuck 123 is equipped with binding domain 1232 and the week around binding domain 1232
Border region 1233.Adsorbent 1231 is adsorbed in binding domain 1232 by pull of vacuum, around the periphery of binding domain 1232
Be equipped with multiple screw slots 1234 in region 1233, vacuum chuck 123 by multiple screw slots 1234 mounting screw be fixed on
On chassis 121.It is evenly spaced on the side wall on chassis 121 to be equipped with multiple adjustment parts 1211, by multiple adjustings
Balance element 1211 is adjusted, to guarantee that chassis 121 and vacuum chuck 123 guarantee dynamic balancing during rotation, so that absorption
Stable rotation is kept in the cutter 13 on the fixing body body 1231 of vacuum chuck 123, with scribing on the workpiece to obtain essence
The higher micro-nano structure of fineness.In the present embodiment, the adjustment part 1211 is mass screw, described flat by adjusting
Weighing apparatus screw is bolted in the depth of the side wall on the chassis 121, that is, adjusts the side wall on head to the chassis 121 of the mass screw
Distance, so that the center of gravity on chassis 121 is finely adjusted, thus guarantee that the center of gravity on chassis 121 is overlapped with the center of rotation axis 11, into
And guarantee the dynamic balancing of vacuum chuck 123 during rotation.
As shown in Figure 5 and Figure 6, in another embodiment of micro-nano structure machining tool of the present invention, the micro-nano structure processing
The place unlike the embodiments above of lathe 200 is that cutter 13 is first installed on knife handle 1241, and knife handle 1241 passes through fly cutter axis again
1242 connect with chassis 121.Specifically, fly cutter axis 1242 can be fixed by screw or the modes such as pull of vacuum are fixed on chassis
On 121.In the present embodiment, fly cutter axis 1242 includes fixing axle 1242a and installation axle 1242b.Fixing axle 1242a is fixed on chassis
On 121, installation axle 1242b is fixed on fixing axle 1242a or is integrally formed with fixing axle 1242a.Fixing axle 1242a and institute
It is cylindric for stating installation axle 1242b, and the diameter of the installation axle 1242b is less than the diameter of the installation axle, the installation
When axis 1242b is fixed on the fixing axle 1242a, the installation axle 1242b is overlapped with the axle center of the fixing axle 1242a.
Installation axle 1242b is equipped with groove 1243 away from one end of fixing axle 1242a.In the present embodiment, knife handle 1241 is strip, knife handle
1241 are fastened in groove 1243, and knife handle 1241 extends along the X-direction of the lathe at this time and the both ends of knife handle 1241 are stretched
For groove 1243.Specifically, cutter 13 is mounted on one end of knife handle 1241, at this time the point of a knife direction of cutter 13 towards with
The extending direction of knife handle 1241 is identical, the face to be processed of workpiece described in the wedge angle face of cutter 13, the face to be processed of the workpiece
Towards the extending direction of lathe X-axis, rotation axis 11 is shifted to install with work stage 30.It is understood that in the present embodiment, installation
Axis 1242b, fixing axle 1242a and knife handle 1241 or other shapes.
Join Fig. 1 again, cutter 13 is installed in the end of rotation axis 11 by knife rest 12, and the wedge angle of cutter 13 is towards work rest
20.Work rest 20 includes third driving device, the second guide rail 21, the second platform 22 connecting with the second guide rail 21 and set on second
Work stage 23 on platform 22.The third driving device drives the second guide rail 21 mobile and then drives the second platform 22 and be set to
Work stage 23 on second platform 22 is moved along machine Z-axis direction, and the machine Z-axis direction includes machine Z-axis positive direction and machine
Bed Z axis negative direction.In the present embodiment, third driving device is linear motor driver, is led by linear motor driving second
Rail 21 is mobile and then the second platform 22 and the work stage 23 on the second platform 22 is driven to move along machine Z-axis direction；Institute
Stating machine Z-axis positive direction is shown in FIG. 1 towards right direction, and the machine Z-axis negative direction is shown in FIG. 1 towards left direction.
Certainly, in other embodiments of the invention, the third driving device can be motor or other driving devices.
In the present embodiment, micro-nano structure machining tool 100 further includes a controller, by carrying out journey in the controller
Sequence setting, so that the angular speed of movement speed and moving direction and the rotation axis 11 to tool apron 10, work rest 20 carries out
Process control, and then cooperated to obtain institute by the knife rest 10, the movement of work rest 20 and the rotation of the rotation axis 11
The multi-level micro-nano structure needed.
As shown in fig. 7, being processed the present invention also provides a kind of micro-nano structure processing method using micro-nano structure shown in FIG. 1
Lathe completes the cutting to the multi-level micro-nano structure of workpiece, which comprises
First step sets the vibration parameters of the first flexible vibration body 32 and the second flexible vibration body 33.
Specifically, flexible according to the first flexible vibration body of the dimensional parameters of the preset micro-nano structure of workpiece setting 32 and second
The vibration parameters of vibrating body 33, the vibration parameters include frequency and amplitude of vibration of vibration etc..
Second step aligns cutter 13 with the workpiece being fixed in work piece platform 34, wherein the workpiece is to be added
The surface of cutter 13 is installed towards the knife rest 12 in work surface.
Specifically, when workpiece is fixed in work piece platform 34, workpiece is stretched out in the face to be processed of the workpiece in the present embodiment
Platform 34 is oppositely arranged with cutter 13.Tool apron 10 is moved along the lathe X-direction, so that cutter 13 and the workpiece are along institute
On the straight line for stating the extension of machine Z-axis direction.Surface is carried out to the workpiece being fixed in work piece platform 34 by cutter 13 to add
It is aligned before work, so that cutter 13 is formed in a plurality of parallel adjacent linear array in the workpiece surface, adjacent two straight
The distance between linear array is identical.
The cutter 13 after contraposition is moved to initial manufacture position by third step.
Wherein, the initial manufacture position be the workpiece start processing position, the edge of the generally described workpiece,
So that realizing the complete machining to the workpiece whole surface after processing is completed.
Four steps, move the work rest 20 along machine Z-axis direction with realize 13 opposite piece of cutter into
Knife, starting the tool apron 10 moves cutter 13 while rotation along the lathe X-direction, at the same time along the lathe Z
The mobile work rest 20 of axis direction simultaneously drives the first flexible vibration body 32 along the vibration of lathe X-direction, the second flexible vibration body
33 vibrate along machine Z-axis direction, and the cutter 13 is made to work to form extending direction lathe Y direction on the surface of the workpiece
Multi-level micro-nano structure, formed first row micro-nano structure
Specifically, after the cutter 13 after contraposition is moved to initial manufacture position, along the machine Z-axis direction travelling workpiece frame
20, to realize feed of the cutter 13 to workpiece, can also by control work rest 20 along the machine Z-axis direction movement away from
From, the depth of cut of control cutter 13, and then control cutting depth of the point of a knife in the workpiece surface of cutter 13.The present embodiment
In, it is rotated by control cutter 13 with constant angular speed, the machining locus that cutter 13 is formed on the surface of the workpiece at this time
For arc-shaped track.While cutter 13 rotates, moved by driving tool apron 10 along the lathe X-direction, to script
Arc-shaped track compensates, so as to form the machining locus of straight line or other shapes in the Y direction of the workpiece surface.
Referring to Fig. 8, when the cutter 13 progress is rotated counterclockwise with constant linear velocity ω, the cutter 13 from horizontal position
During rotating in-θ Angle Position to horizontal position, the tool apron 10 is moved along the X-axis positive direction, realizes the knife
Tool 13 carries out straight line to the arc-shaped track of the cutter 13 from rotation process of the horizontal direction in the angular horizontal direction of-θ
Compensation.During rotation of the cutter 13 from horizontal position to the position angle o with horizontal position, the tool apron 10 is along institute
X-axis positive direction is stated to be moved, realize the cutter 13 from horizontal direction it is angle o to horizontal direction rotation during, it is right
The arc-shaped track of the cutter 13 carries out straight line compensation.Also, tool apron 10 is along the lathe X-axis while cutter 13 rotates
Direction is mobile and work rest 20 moves to form base in the lathe Y direction of the workpiece surface along the machine Z-axis direction
When the shape of plinth face, while the first flexible vibration body 32 and the second flexible vibration body 33 being made to vibrate to make cutter 13 in the work respectively
Be superimposed in the base surface shape while lathe Y direction basis of formation face shape on part surface micro-nano structure formed it is multi-level micro-
Micro-nano structure.Wherein, tool apron 10 is moved along the lathe X-direction and work rest 20 along the lathe Y direction instantaneous
Speed and the direction of motion constantly change according to the position on the workpiece of cutter 13, with basis of formation face shape；First is flexible
Vibrating body 32 is along the side that the lathe X-direction and the second flexible vibration body 33 are vibrated respectively along the machine Z-axis direction
It constantly changes to according to the position on the workpiece of cutter 13, to be superimposed micro-nano structure shape in the base surface shape
At multi-level micro-nano structure.
5th step moves the work rest 20 along the machine Z-axis direction to realize the knife that goes out of the cutter 13, and edge
The lathe X-direction makes the mobile pre-determined distance of the knife rest 10, repeats the four steps, is formed and the four steps shape
At the adjacent another column first row micro-nano structure of first row micro-nano structure, between the adjacent two column first row micro-nano structure
Distance is identical as the pre-determined distance.
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
Finally, completing after the processing that the workpiece surface carries out the micro-nano structure, moved along the machine Z-axis direction
Work rest 20, that realizes cutter 13 goes out knife to leave the surface of the workpiece, terminates the processing to the workpiece.
Referring to Fig. 9, being processed the present invention also provides a kind of micro-nano structure processing method using micro-nano structure shown in fig. 5
Lathe carries out multi-level micro-nano structure processing to workpiece, which comprises
First step sets the vibration parameters of the first flexible vibration body 32 and the second flexible vibration body 33.
Specifically, flexible according to the first flexible vibration body of the dimensional parameters of the preset micro-nano structure of workpiece setting 32 and second
The vibration parameters of vibrating body 33, the vibration parameters include frequency and amplitude of vibration of vibration etc..
Second step aligns cutter 13 with the workpiece being fixed in work piece platform 34, wherein work pieces process faces
To lathe X-axis extending direction, the rotation axis 11 misplaces with the work stage 20, the point of a knife extending direction and rotation axis of cutter 13
11 is vertical.
Specifically, when workpiece is fixed in work piece platform 34, workpiece is stretched out in the face to be processed of the workpiece in the present embodiment
Platform 34 is oppositely arranged with cutter 13.Move tool apron 10 along the lathe X-direction so that cutter 13 and the workpiece with institute
It states on the parallel straight line of X-axis.It is aligned before carrying out surface processing to the workpiece being fixed in work piece platform 34 by cutter 13,
So that cutter 13 is formed in a plurality of parallel adjacent linear array in the workpiece surface, between adjacent two linear arrays away from
From identical.
The cutter 13 after contraposition is moved to initial manufacture position by third step.
Wherein, the initial manufacture position be the workpiece start processing position, the edge of the generally described workpiece,
So that realizing the complete machining to the workpiece whole surface after processing is completed.
Four steps, moves the tool apron 10 along lathe X-direction to realize the feed of 13 opposite piece of cutter,
Starting the tool apron 10 moves cutter 13 while rotation along the lathe X-direction, drives the first flexible vibration at the same time
Kinetoplast 32 is vibrated along lathe X-direction, the second flexible vibration body 33 is vibrated along machine Z-axis direction, makes the cutter 13 described
The surface of workpiece work to be formed extending direction be lathe Y direction multi-level micro-nano structure, formed first row micro-nano structure.
In the present embodiment, after the cutter 13 of contraposition is moved to initial manufacture position, tool apron 10 is moved along lathe X-direction,
It not only realizes feed of the cutter 13 to workpiece, the depth of cut of cutter 13 can also be controlled, and then the point of a knife for controlling cutter 13 exists
The cutting depth of the workpiece surface.Specifically, being rotated by control cutter 13 with constant angular speed, cutter 13 is in institute at this time
The machining locus for stating the surface formation of workpiece is the straight-line groove inconsistent along lathe Y direction cutting depth.It is rotated in cutter 13
While, moved by driving tool apron 10 along the lathe X-direction, to the different straight path of the cutting depth of script into
Row compensation, so as to form the consistent straight-line groove of cutting depth in the lathe Y direction of the workpiece surface.Also, in cutter
Tool apron 10 is moved along the lathe X-direction while 13 rotation and work rest 20 is in the lathe Y-axis of the workpiece surface
Direction basis of formation face shape, while making the vibration of the first flexible vibration body 32 and the second flexible vibration body 33 respectively to make cutter
13 are superimposed micro-nano structure shape while the lathe Y direction basis of formation face shape of the workpiece surface in the base surface shape
At multi-level micro-nano structure.Wherein, tool apron 10 is moved along the lathe X-direction instantaneous velocity and the direction of motion according to
The position on the workpiece of cutter 13 and constantly change, with basis of formation face shape；First flexible vibration body 32 is along the lathe X
The direction that axis direction and the second flexible vibration body 33 are vibrated respectively along the machine Z-axis direction is according to cutter 13 in the work
Position on part and constantly change, form multi-level micro-nano structure to be superimposed micro-nano structure in the base surface shape.
5th step moves the work rest 20 along the lathe X-direction to realize the knife that goes out of the cutter 13, and edge
The machine Z-axis direction makes the mobile pre-determined distance of the knife rest 12, repeats the four steps, is formed and the four steps shape
At the adjacent another column first row micro-nano structure of first row micro-nano structure, between the adjacent two column first row micro-nano structure
Distance is identical as the pre-determined distance；
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
Finally, completing after the processing that the workpiece surface carries out the micro-nano structure, moved along the lathe X-direction
Tool apron 10, that realizes cutter 13 goes out knife to leave the surface of the workpiece, terminates the processing to the workpiece.
The micro-nano structure machining tool provided by the invention and micro-nano structure processing method, by the way that the cutter 13 is inclined
It sets and is installed in the rotation axis 11 for the tool apron 10 being oppositely arranged with the work rest 20, work piece is in two-freedom vibration device
On, while controlling the cutter 13 rotation, control the tool apron 10 moving and controlling described along the lathe X-direction
Work rest 20 is moved along the machine Z-axis direction, in the lathe Y direction basis of formation face shape of the workpiece surface, and
While processing the base surface shape, the vibration of driving the first flexible vibration body 32 and the second flexible vibration body 33 makes the cutter
13 are superimposed micro-nano structure while forming the base surface shape in base surface shape forms multi-level micro-nano structure.It is i.e. of the invention
In, the processing of the optimized integration face shape on the workpiece of cutter 13 is cooperated by mobile tool apron 10 and work rest 20, and lead to simultaneously
It crosses two-freedom vibration device and is superimposed micro-nano structure in the base surface shape with 13 cooperative movement of cutter, so as to disposably add
Work goes out multi-level micro-nano structure, improves the processing and manufacturing efficiency of multi-level micro-nano structure.
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, those skilled in the art can understand all or part of the processes for realizing the above embodiment, and wants according to right of the present invention
Made equivalent variations is sought, is still belonged to the scope covered by the invention.
Claims (10)
1. a kind of micro-nano structure machining tool, for processing micro-nano structure, which is characterized in that the micro-nano structure machining tool packet
It includes:
Tool apron, the tool apron can be moved along lathe X-direction, and the tool apron is equipped with the rotation of the vertical lathe X-direction of axis
Axis, the rotation axis end are installed with knife rest and the cutter on knife rest, and the center that the cutter deviates the rotation axis is set
It sets, the knife rest includes chassis and cutter fixed part, and the cutter is fixed on the cutter fixed part, the side wall on the chassis
It is equipped with evenly spaced multiple adjustment parts；
Work rest, the work rest are oppositely arranged with the tool apron, and can be moved along machine Z-axis direction；
Vibration device, the vibration device are fixed on the work rest, and the vibration device includes base station, the first flexible vibration
The vibration section of body, the second flexible vibration body, work piece platform and the first flexible vibration body of driving and the vibration of the second flexible vibration body, institute
Stating the first flexible vibration body and connecting the base station and work piece platform and the vibrating sensing direction of the first flexible vibration body is lathe X-axis
Direction, the second flexible vibration body connects the base station and work piece platform and the vibrating sensing direction of the second flexible vibration body is
Machine Z-axis direction, the base station are equipped with rectangular notch, and the work piece platform is located in the notch and between the notch inner wall
Every setting, the first flexible vibration body and the second flexible vibration body are located at the adjacent two sides of the work piece platform, the work
Part platform is not connected to have the side of the first flexible vibration body and the second flexible vibration body to be oppositely arranged with the cutter.
2. micro-nano structure machining tool as described in claim 1, which is characterized in that the vibration section include the first vibrator and
Second vibrator；First vibrator connects the base station and the first flexible vibration body, the first vibrator driving
The work piece platform is vibrated along lathe X-direction；Second vibrator connects the base station and the second flexible vibration body,
Second vibrator drives the work piece platform to vibrate along machine Z-axis direction.
3. micro-nano structure machining tool as claimed in claim 1 or 2, which is characterized in that the first flexible vibration body and
Two flexible vibration bodies are the flexible hinge structure of parallelogram.
4. micro-nano structure machining tool as claimed in claim 2, which is characterized in that the base station set there are two with the notch
The through slot of connection, first vibrator and second vibrator are connected in through slot, the first flexible vibration body and
Two flexible vibration bodies are separately connected the two adjacent sides of work piece platform.
5. micro-nano structure machining tool as claimed in claim 2, which is characterized in that first vibrator and the second vibrator
For piezoelectric ceramic actuator.
6. micro-nano structure machining tool as described in claim 1, which is characterized in that the base station, the first flexible vibration body,
Two flexible vibration bodies and work piece platform are integrally formed using elastic material.
7. a kind of micro-nano structure processing method is cut more using micro-nano structure machining tool described in any one of claims 1-6
Level micro-nano structure, which is characterized in that the described method includes:
First step sets the vibration parameters of the first flexible vibration body and the second flexible vibration body；
Second step aligns cutter with the workpiece being fixed in work piece platform, wherein workpiece work surface court
To the surface of knife rest installing cutter；
The cutter after contraposition is moved to initial manufacture position by third step；
Four steps moves the work rest along machine Z-axis direction to realize the feed of the cutter opposite piece, meanwhile,
Starting the tool apron moves cutter while rotation along the lathe X-direction, moves at the same time along the machine Z-axis direction
It moves the work rest and drives the first flexible vibration body along the vibration of lathe X-direction, the second flexible vibration body along machine Z-axis direction
Vibration, makes the cutter work to form the multi-level micro-nano structure of extending direction lathe Y direction on the surface of the workpiece,
Form first row micro-nano structure；
5th step moves the work rest along the machine Z-axis direction to realize the knife out of the cutter, and along the lathe
X-direction makes the mobile pre-determined distance of the knife rest, repeats the four steps, forms the first row formed with the four steps
The adjacent another column first row micro-nano structure of micro-nano structure, the distance between described first row micro-nano structure of adjacent two column with it is described
Pre-determined distance is identical；
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
8. micro-nano structure processing method as claimed in claim 7, which is characterized in that make the cutter described in four steps
It works to form the multi-level micro-nano structure that extending direction is lathe Y direction on the surface of the workpiece, including cutter rotation
It is moved simultaneously along the lathe X-direction and the work rest moves lathe Y-axis in the workpiece along the machine Z-axis direction
Direction basis of formation face shape, while the vibration of the first flexible vibration body and the second flexible vibration body makes cutter in basis of formation face shape
While in base surface shape be superimposed micro-nano structure form multi-level micro-nano structure.
9. micro-nano structure processing method as claimed in claim 7, which is characterized in that setting first described in first step is soft
Property vibrating body and the second flexible vibration body vibration parameters, according to the dimensional parameters of micro-nano structure set the first flexible vibration body and
The vibration parameters of second flexible vibration body.
10. a kind of micro-nano structure processing method is cut more using micro-nano structure machining tool described in any one of claims 1-6
Level micro-nano structure, which is characterized in that the described method includes:
First step sets the vibration parameters of the first flexible vibration body and the second flexible vibration body；
Second step aligns cutter with the workpiece being fixed in work piece platform, wherein work pieces process is facing towards lathe X
Axis extending direction, the rotation axis and the work piece platform misplace, and the point of a knife extending direction of cutter is vertical with rotation axis；
The cutter after contraposition is moved to initial manufacture position by third step；
Four steps moves the tool apron along lathe X-direction to realize the feed of the cutter opposite piece, meanwhile, it opens
Moving the tool apron moves cutter while rotation along the lathe X-direction, drives the first flexible vibration body edge at the same time
The vibration of lathe X-direction, the second flexible vibration body are vibrated along machine Z-axis direction, make the cutter in the surface work of the workpiece
The multi-level micro-nano structure that extending direction is lathe Y direction is formed, first row micro-nano structure is formed；
5th step moves the tool apron along the lathe X-direction to realize the knife out of the cutter, and along the lathe Z
Axis direction makes the mobile pre-determined distance of the work rest, repeats the four steps, forms first formed with the four steps
The adjacent another column first row micro-nano structure of column micro-nano structure, the distance between adjacent two described first row micro-nano structures and institute
It is identical to state pre-determined distance；
6th step repeats the four steps and the 5th step, until forming multi-level micro-nano structure.
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| CN109940341B (en) * | 2019-04-11 | 2020-09-15 | 北京理工大学 | Method for machining structural color patterns by low-frequency vibration assisted fly-cutting |
| CN109849079B (en) * | 2019-04-11 | 2020-09-15 | 北京理工大学 | Ultra-precision machining device for machining microstructure array |
| CN109877545B (en) * | 2019-04-11 | 2020-09-15 | 北京理工大学 | Method for machining two-stage structure array through low-frequency vibration coupling axial feeding fly-cutting |
| CN110262309B (en) * | 2019-05-05 | 2020-11-17 | 哈尔滨工业大学 | Control system and method suitable for micro-nano dual-mode detection processing module |
| CN110733141A (en) * | 2019-11-13 | 2020-01-31 | 中国工程物理研究院机械制造工艺研究所 | miniature ultra-precise single-point diamond fly-cutting machine tool |
| CN111299703B (en) * | 2019-11-21 | 2022-02-08 | 深圳大学 | Machining device and precision machining machine tool |
| CN112317784B (en) * | 2020-10-21 | 2023-03-14 | 长春理工大学 | Method for servo turning functional surface of laser-assisted frequency doubling fast tool |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1854585A1 (en) * | 2006-05-12 | 2007-11-14 | Satisloh GmbH | Apparatus and method for generating an optical surface on a workpiece, for example an ophthalmic lens |
| CN102114587A (en) * | 2009-12-31 | 2011-07-06 | 比亚迪股份有限公司 | Micromachining method of textures on metal surface |
| CN107052462A (en) * | 2017-05-19 | 2017-08-18 | 天津大学 | The complex-curved fast response servo ultraprecise fly cutter cutting working method of fragile material |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
-
2017
- 2017-11-27 CN CN201711203204.5A patent/CN108145179B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1854585A1 (en) * | 2006-05-12 | 2007-11-14 | Satisloh GmbH | Apparatus and method for generating an optical surface on a workpiece, for example an ophthalmic lens |
| CN102114587A (en) * | 2009-12-31 | 2011-07-06 | 比亚迪股份有限公司 | Micromachining method of textures on metal surface |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
| CN107052462A (en) * | 2017-05-19 | 2017-08-18 | 天津大学 | The complex-curved fast response servo ultraprecise fly cutter cutting working method of fragile material |
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