CN108107612A - A kind of high-accuracy panel measuring instrument of ultra-large type - Google Patents
A kind of high-accuracy panel measuring instrument of ultra-large type Download PDFInfo
- Publication number
- CN108107612A CN108107612A CN201711415814.1A CN201711415814A CN108107612A CN 108107612 A CN108107612 A CN 108107612A CN 201711415814 A CN201711415814 A CN 201711415814A CN 108107612 A CN108107612 A CN 108107612A
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- China
- Prior art keywords
- axis
- workbench
- frame
- gear frame
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005304 optical glass Substances 0.000 claims abstract description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 239000003292 glue Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000005299 abrasion Methods 0.000 abstract description 2
- 230000002146 bilateral effect Effects 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract 1
- 238000005088 metallography Methods 0.000 abstract 1
- 238000012913 prioritisation Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of ultra-large type high-precision panel measuring instruments, have workbench；It is characterized in that：The workbench is arranged on pedestal, the workbench has optical glass, the optical glass is mounted below point light source, the horizontal X-axis gear frame for having gantry structure in the vertical direction of the workbench, the workbench is radially provided with Y-axis gear frame, metallographic microscope is vertically arranged in by fixed plate on X-axis gear frame, the end of the X-axis gear frame and Y-axis gear frame connects respective servomotor respectively, the camera lens face of the metallographic microscope has point light source, technical scheme uses movable gantry structure, bilateral support, crossbeam is light-weight, it is small using error after metallography microscope mirror case horizon glass head, it reduces simultaneously to screw, the abrasion of guide rail, stablized for a long time using measurement accuracy.
Description
Technical field
The present invention relates to a kind of precision instrument, more particularly, to a kind of high-accuracy panel measuring instrument of ultra-large type.
Background technology
The observation of existing liquid crystal larger panel conductive ion and measurement accuracy data be all by small-sized measuring instrument into
Row, while the degree of automation is low, and precision and structure cannot meet the measurement demand of larger panel.
The content of the invention
The purpose of the present invention is overcoming defect existing in the prior art, a kind of structure conveniently moving is provided, can be measured big
Type panel, and a kind of ultra-large type high-precision panel measuring instrument that measurement accuracy is stablized.
Realizing the technical solution of the object of the invention is：A kind of ultra-large type high-precision panel measuring instrument has workbench；Its
It is characterized in that：The workbench is arranged on pedestal, and the workbench has optical glass, and the optical glass is mounted below
Point light source, the horizontal X-axis gear frame for having gantry structure in the vertical direction of the workbench, the workbench are radially provided with Y
Axis gear frame, metallographic microscope are vertically arranged in by fixed plate on X-axis gear frame, the X-axis gear frame and Y-axis gear frame
End connects respective servomotor respectively, and the camera lens face of the metallographic microscope has point light source.
Further prioritization scheme is a kind of ultra-large type high-precision panel measuring instrument, is driven in the X-axis
It is slided on frame and is provided with Z-axis transmission frame, the metallographic microscope is moved up and down in the Z-axis transmission frame, the Z-axis transmission frame
Top electrical connection Z axis motor.
Further prioritization scheme is a kind of ultra-large type high-precision panel measuring instrument, the X-axis gear frame
Including X-axis synchronous belt, X-axis limited block and lower lamp line wheel, the X-axis synchronous belt is socketed on lower lamp line wheel and drives Z-axis transmission
Frame moves in the X-direction of workbench.
Further prioritization scheme is a kind of ultra-large type high-precision panel measuring instrument, the X-axis gear frame
On be additionally provided with ink indicia, the ink indicia is close to metallographic microscope.
Further prioritization scheme is a kind of ultra-large type high-precision panel measuring instrument, the X-axis gear frame
Both sides be equipped with crossbeam three-dimensional bracket, the bottom of the crossbeam three-dimensional bracket is arranged on Y-axis gear frame and in the workbench
Y-axis on slide, the crossbeam three-dimensional bracket be equipped with /V glue fixed block.
Further prioritization scheme is a kind of ultra-large type high-precision panel measuring instrument, the Z-axis transmission frame
Horizontal camera lens is equipped with, the horizontal camera lens is for two lateral sections of observation.
After adopting the above technical scheme, the present invention has following positive effect：
(1) technical scheme uses movable gantry structure, and bilateral support, crossbeam is light-weight, is shown using metallographic
Error is small after the horizontal camera lens of micro mirror box, while reduces the abrasion to screw, guide rail, is stablized for a long time using measurement accuracy.
Description of the drawings
In order that the present invention can be more clearly and readily understood, it is right below according to specific embodiment and with reference to attached drawing
The present invention is described in further detail, wherein
Fig. 1 is the structural diagram of the present invention.
Specific embodiment
(embodiment 1)
As shown in Figure 1, the present invention has a kind of ultra-large type high-precision panel measuring instrument, has workbench 1；The work
Platform 1 is arranged on pedestal 2, and the workbench 1 has optical glass 3, and the optical glass 3 is mounted below point light source 4, described
The horizontal X-axis gear frame 5 for having gantry structure, the workbench 1 are radially provided with Y-axis gear frame in the vertical direction of workbench 1
6, metallographic microscope 7 is vertically arranged in by fixed plate on X-axis gear frame 5, the end of the X-axis gear frame 5 and Y-axis gear frame 6
Portion connects respective servomotor respectively, and 10 face of camera lens of the metallographic microscope 7 has point light source 4.It is passed in the X-axis
It is slided in moving frame 5 and is provided with Z-axis transmission frame 8, the metallographic microscope 7 is moved up and down in the Z-axis transmission frame 8, the Z axis
The top electrical connection Z axis motor 9 of gear frame 8.
The X-axis gear frame 5 includes X-axis synchronous belt 51, X-axis limited block 52 and lower lamp line wheel 53, the X-axis synchronous belt 51
It is socketed on lower lamp line wheel 53 and Z-axis transmission frame 8 is driven to be moved in the X-direction of workbench 1.
Ink indicia 14 is additionally provided on the X-axis gear frame 5, the ink indicia 14 is close to metallographic microscope 7.
The both sides of the X-axis gear frame 5 are equipped with crossbeam three-dimensional bracket 12, and the bottom of the crossbeam three-dimensional bracket 12 is arranged on
It is slided on Y-axis gear frame 6 and in the Y-axis of the workbench 1, the crossbeam three-dimensional bracket 13 is equipped with /V glue fixed block
11.The Z-axis transmission frame 8 is equipped with horizontal camera lens 12, and the horizontal camera lens 12 is for two lateral sections of observation.
The present invention operation principle be：The technical solution installs metallographic microscope and horizontal camera lens on gantry structure additional again,
By the servomotor of tri- shaft ends of XYZ, using servo-control system, three axis have the pattern of quick movement and low speed movement,
That is installed under objective table has point light source to ensure that and the synchronization-moving requirement of micro objective optical axis.
Particular embodiments described above has carried out the purpose of the present invention, technical solution and advantageous effect further in detail
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the present invention
Within the scope of shield.
Claims (6)
1. a kind of ultra-large type high-precision panel measuring instrument has workbench (1)；It is characterized in that：The workbench (1) is set
On pedestal (2), the workbench (1) has optical glass (3), and the optical glass (3) is mounted below point light source (4),
The horizontal X-axis gear frame (5) for having gantry structure in the vertical direction of the workbench (1), workbench (1) is radially provided with
Y-axis gear frame (6), metallographic microscope (7) are vertically arranged in by fixed plate on X-axis gear frame (5), the X-axis gear frame (5)
Respective servomotor is connected respectively with the end of Y-axis gear frame (6), and the camera lens (10) of the metallographic microscope (7) are just
To there is point light source (4).
2. a kind of ultra-large type high-precision panel measuring instrument according to claim 1, it is characterised in that：It is passed in the X-axis
It is slided in moving frame (5) and is provided with Z-axis transmission frame (8), the metallographic microscope (7) is done in the Z-axis transmission frame (8) and moved down
It is dynamic, the top electrical connection Z axis motor (9) of the Z-axis transmission frame (8).
3. a kind of ultra-large type high-precision panel measuring instrument according to claim 1, it is characterised in that：The X-axis transmission
Frame (5) includes X-axis synchronous belt (51), X-axis limited block (52) and lower lamp line wheel (53), and the X-axis synchronous belt (51) is socketed in down
On lamp line wheel (53) and Z-axis transmission frame (8) is driven to be moved in the X-direction of workbench (1).
4. a kind of ultra-large type high-precision panel measuring instrument according to claim 1, it is characterised in that：The X-axis transmission
Ink indicia (14) is additionally provided on frame (5), the ink indicia (14) is close to metallographic microscope (7).
5. a kind of ultra-large type high-precision panel measuring instrument according to claim 1, it is characterised in that：The X-axis transmission
The both sides of frame (5) are equipped with crossbeam three-dimensional bracket (12), and the bottom of the crossbeam three-dimensional bracket (12) is arranged on Y-axis gear frame (6)
It slides above and in the Y-axis of the workbench (1), the crossbeam three-dimensional bracket (13) is equipped with /V glue fixed block (11).
6. a kind of ultra-large type high-precision panel measuring instrument according to claim 2, it is characterised in that：The Z-axis transmission
Frame (8) is equipped with horizontal camera lens (12), and the horizontal camera lens (12) is for two lateral sections of observation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711415814.1A CN108107612A (en) | 2017-12-25 | 2017-12-25 | A kind of high-accuracy panel measuring instrument of ultra-large type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711415814.1A CN108107612A (en) | 2017-12-25 | 2017-12-25 | A kind of high-accuracy panel measuring instrument of ultra-large type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108107612A true CN108107612A (en) | 2018-06-01 |
Family
ID=62212714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711415814.1A Pending CN108107612A (en) | 2017-12-25 | 2017-12-25 | A kind of high-accuracy panel measuring instrument of ultra-large type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108107612A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113406785A (en) * | 2021-06-29 | 2021-09-17 | 昕昱科技发展(深圳)有限公司 | Three-axis automatic objective table capable of adapting to multiple microscopes |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204314539U (en) * | 2014-11-26 | 2015-05-06 | 东莞市亿辉光电科技有限公司 | Be with Eikonometric compound metaloscope |
| CN105235222A (en) * | 2015-11-13 | 2016-01-13 | 芜湖市爱三迪电子科技有限公司 | High-speed high-precision 3D printer |
| CN206588910U (en) * | 2017-01-12 | 2017-10-27 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument portal frame |
| CN206593607U (en) * | 2017-01-12 | 2017-10-27 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument |
| CN206671214U (en) * | 2017-03-30 | 2017-11-24 | 江苏才道精密仪器有限公司 | Improved movable gantry optics automatic detection system |
| CN206670668U (en) * | 2017-03-30 | 2017-11-24 | 江苏才道精密仪器有限公司 | Movable gantry optics automatic detection system |
| CN207851457U (en) * | 2017-12-25 | 2018-09-11 | 江苏才道精密仪器有限公司 | A kind of high-accuracy panel measuring instrument of ultra-large type |
-
2017
- 2017-12-25 CN CN201711415814.1A patent/CN108107612A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204314539U (en) * | 2014-11-26 | 2015-05-06 | 东莞市亿辉光电科技有限公司 | Be with Eikonometric compound metaloscope |
| CN105235222A (en) * | 2015-11-13 | 2016-01-13 | 芜湖市爱三迪电子科技有限公司 | High-speed high-precision 3D printer |
| CN206588910U (en) * | 2017-01-12 | 2017-10-27 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument portal frame |
| CN206593607U (en) * | 2017-01-12 | 2017-10-27 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument |
| CN206671214U (en) * | 2017-03-30 | 2017-11-24 | 江苏才道精密仪器有限公司 | Improved movable gantry optics automatic detection system |
| CN206670668U (en) * | 2017-03-30 | 2017-11-24 | 江苏才道精密仪器有限公司 | Movable gantry optics automatic detection system |
| CN207851457U (en) * | 2017-12-25 | 2018-09-11 | 江苏才道精密仪器有限公司 | A kind of high-accuracy panel measuring instrument of ultra-large type |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113406785A (en) * | 2021-06-29 | 2021-09-17 | 昕昱科技发展(深圳)有限公司 | Three-axis automatic objective table capable of adapting to multiple microscopes |
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