CN108107609A - One kind is based on tunable IR narrow band filter in graphene - Google Patents
One kind is based on tunable IR narrow band filter in graphene Download PDFInfo
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- CN108107609A CN108107609A CN201711359505.7A CN201711359505A CN108107609A CN 108107609 A CN108107609 A CN 108107609A CN 201711359505 A CN201711359505 A CN 201711359505A CN 108107609 A CN108107609 A CN 108107609A
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- graphene
- tunable
- dielectric coated
- narrow band
- band filter
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses one kind based on tunable IR narrow band filter in graphene, include substrate, substrate is equipped with the first dielectric coated, graphene is placed in the first dielectric coated, it is equipped with the second dielectric coated again on graphene, 3rd dielectric coated in the second dielectric coated is set, the 3rd dielectric coated is etched into grating layer.The present invention devises a kind of new filter construction, utilize the characteristic of graphene, realize that graphene Fermi can change by changing static bias voltage, it is achieved thereby that transverse electric (TE) polarization optic tunable transmission, meets the demand for transmiting peak position dynamic change.
Description
Technical field
The present invention relates to micronano optical devices fields, are specifically that one kind is filtered based on tunable IR narrow-band bandpass in graphene
Ripple device.
Background technology
What middle infrared band covered atmospheric transmission window and gas molecule has fingerprint characteristic absorption band so that in it is red
External equipment is many-sided with application prospect in space optical communication, atmosphere environment supervision and medical diagnosis etc. with device.Wave filter can
Required wavelength is screened from numerous wavelength to realize, can be widely applied to wavelength selection, noise of optical amplifier inhibits and multiple
With/demultiplexing.Particularly, bandpass filter is the core devices in non-spectral infrared application, but since filter wavelength is consolidated
It is fixed, multicomponent job requirement can not be met, meet operation wavelength variation filtering demands, tunable optic filter need to be developed.
Graphene has excellent intensity, heat conduction, especially flexible, conductive, optical characteristics, graphene electrical conductivity can be by
Institute's making alive changes to be regulated and controled so as to fulfill photoelectric device, and due to being based on the automatically controlled scheme of graphene photoelectric device with easy to operate
Property so that the middle infrared bandpass filters based on graphene have great practical value, but existing based on red in graphene
Wave section narrow band filter (patent：201711139425.0) film layer needed for is up to 9 layers, if film layer needed for developing is less
The adjustable strainer acceptor in narrowband can reduce device manufacturing cost.
The content of the invention
The object of the present invention is to provide one kind based on tunable IR narrow band filter in graphene, the wave filter is only
2 film layers are needed, it is existing in the prior art to solve the problems, such as.
In order to achieve the above object, the technical solution adopted in the present invention is：
Infrared narrow-band tunable filter in one kind includes substrate, and substrate is equipped with the first dielectric coated, first
Graphene is placed in dielectric coated, is equipped with second and third dielectric coated again on graphene, the 3rd dielectric coated is carved
Grating layer is lost into, realizes that graphene Fermi can change by changing static bias voltage, it is narrow so as to fulfill transverse electric (TE) polarised light
With tunable transmission.
Preferably, the grating layer width is less than the half of cycle length.
Preferably, the grating layer thickness is 850~950nm.
Preferably, the grating layer width is 720~780nm.
Preferably, the first dielectric coated thickness is 590~610nm.
Preferably, the second dielectric coated thickness is 390~410nm.
Preferably, the base material refractive index is less than dielectric coated Refractive Index of Material；Further, the electricity is situated between
The material of matter coating and grating layer be silicon, base material calcirm-fluoride.
The advantage of the invention is that：
The present invention devises one kind based on graphene Novel Filter structure, quiet by tuning using the characteristic of graphene
State bias voltage realizes that graphene Fermi can change, and it is tunable finally to realize transverse electric (TE) polarized light transmission peak, meets
Penetrate the demand of peak position dynamic change.
Description of the drawings
Fig. 1 is the structure diagram the present invention is based on tunable IR narrow band filter in graphene, in the Y direction
On be periodic structure, electromagnetic wave is propagated along the Z direction.
Fig. 2 is that embodiment 1 uses the structure transmitted light spectrogram in the present invention during tunable IR wave filter.
Fig. 3 is that embodiment 2 uses the structure transmitted light spectrogram in the present invention during tunable IR wave filter.
Fig. 4 is that embodiment 3 uses the structure transmitted light spectrogram in the present invention during tunable IR wave filter.
Fig. 5 is that embodiment 4 uses the structure transmitted light spectrogram in the present invention during tunable IR wave filter.
Fig. 6 is that embodiment 5 uses the structure transmitted light spectrogram in the present invention during tunable IR wave filter.
Reference numeral：
1, substrate；2, the first dielectric coated；3, graphene；4, the second dielectric coated；5, grating layer.
Specific embodiment
To be best understood from the present invention, with reference to embodiment and attached drawing, the invention will be further described, following embodiment
Only it is that the present invention will be described rather than it is limited.
As shown in Figure 1, it is a kind of based on tunable IR narrow band filter in graphene, include substrate 1, substrate 1
The first dielectric coated 2 is equipped with, then graphene 3 is placed in the first dielectric coated 2, sets the second electricity again on graphene 3
Medium coating 4 plates upper dielectric layer on dielectric layer 4 and is then etched into grating layer 5, and 5 width of grating layer is less than grating
The half in cycle.The effect of grating layer 5 is to provide diffracted wave, provided that diffracted wave just plated with graphene 3 and dielectric
The patterns match that the waveguide that layer 2 and 4 is formed is supported, will cause guide mode resonance effect, to ensure that guide mode resonance effect generates, electricity
2 and 4 refractive index of medium coating should be greater than substrate refractive index, due to the contribution of guide mode resonance effect, it can be achieved that transmission peaks, adjust graphite
Alkene Fermi can change graphene refractive index, so as to change guide mode resonance peak position, realize that wave filter peak position is adjusted.
Wherein, base material refractive index is less than the first and second dielectric coated refractive index.
Wave filter shown in Fig. 1 is periodic structure in the Y direction, and electromagnetic wave is propagated along the Z direction.Plane of incidence TE is polarized
Electromagnetic wave (electric vector direction is consistent with X-axis) is incident along the basad direction in upper strata, due to top layer grating diffration effect, is situated between in electricity
Guide mode resonance is formed in matter coating, energy of electromagnetic field concentrates on the centre position of dielectric coated, changes Fermi's energy of graphene,
So as to change the refractive index of graphene, the change of guide mode resonance peak position is realized.
Embodiment 1
The parameter of wave filter a cycle structure is respectively p=3000nm, w=750nm, t1=600nm, t2=400nm, h
=900nm, environment temperature 300K, graphene relaxation time are 1ps, and dielectric membranous layer and grating layer material are silicon (refractive index
For 3.4), substrate is calcirm-fluoride (refractive index 1.4).
Using rigorous couple-wave analysis method, the transmission results being calculated as shown in Fig. 2, transmission bandwidth be less than 5.0nm,
Tuning graphene Fermi can be from 0.2eV to 1.0eV, and corresponding transmission peaks are tuned to 4546nm from 4564nm.It can be seen that the device
Part can realize tuning filtering device transmission peak position by changing graphene Fermi.
Embodiment 2
The parameter of wave filter a cycle structure is respectively p=3000nm, w=750nm, t1=600nm, t2=400nm, h
=850nm or 950nm, environment temperature 300K, graphene relaxation time are 1ps, and dielectric membranous layer and grating layer material are silicon
(refractive index 3.4), substrate are calcirm-fluoride (refractive index 1.4).
Using rigorous couple-wave analysis method, the transmission results being calculated as shown in figure 3, transmission bandwidth be less than 5.0nm,
Tuning graphene Fermi can be from 0.2eV to 1.0eV, as h=850nm, and corresponding transmission peaks are tuned to 4545nm from 4563nm,
See Fig. 3 (a)；As h=950nm, corresponding transmission peaks are tuned to 4546nm from 4564nm, see Fig. 3 (b).
Embodiment 3
The parameter of wave filter a cycle structure is respectively p=3000nm, w=750nm, t1=590nm or t1=610nm,
t2=400nm, h=900nm, environment temperature 300K, graphene relaxation time are 1ps, dielectric membranous layer and grating layer material
For silicon (refractive index 3.4), substrate is calcirm-fluoride (refractive index 1.4).
Using rigorous couple-wave analysis method, the transmission results being calculated are as shown in figure 4, transmission bandwidth is still less than
5.0nm, tuning graphene Fermi can work as t from 0.2eV to 1.0eV1During=590nm, corresponding transmission peaks are tuned to from 4557nm
4539nm is shown in Fig. 4 (a)；Work as t1During=610nm, corresponding transmission peaks are tuned to 4553nm from 4571nm, see Fig. 4 (b).
Embodiment 4
The parameter of wave filter a cycle structure is respectively p=3000nm, w=750nm, t1=600nm, t2=390nm or
t2=410nm, h=900nm, environment temperature 300K, graphene relaxation time are 1ps, dielectric membranous layer and grating layer material
For silicon (refractive index 3.4), substrate is calcirm-fluoride (refractive index 1.4).
Using rigorous couple-wave analysis method, the transmission results being calculated are as shown in figure 5, transmission bandwidth is still less than
5.0nm, tuning graphene Fermi can work as t from 0.2eV to 1.0eV2During=390nm, corresponding transmission peaks are tuned to from 4557nm
4539nm is shown in Fig. 5 (a)；Work as t2During=410nm, corresponding transmission peaks are tuned to 4553nm from 4571nm, see Fig. 5 (b).
Embodiment 5
The parameter of wave filter a cycle structure is respectively p=3000nm, t1=600nm, t2=400nm, h=900nm, w
=720nm or w=780nm, environment temperature 300K, graphene relaxation time are 1ps, and dielectric membranous layer and grating layer material are
Silicon (refractive index 3.4), substrate are calcirm-fluoride (refractive index 1.4).
Using rigorous couple-wave analysis method, the transmission results being calculated are as shown in fig. 6, transmission bandwidth is still less than
5.0nm, tuning graphene Fermi can be from 0.2eV to 1.0eV, as w=720nm, and corresponding transmission peaks are tuned to from 4564nm
4546nm is shown in Fig. 6 (a)；As w=780nm, corresponding transmission peaks are tuned to 4547nm from 4564nm, see Fig. 6 (b).
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
It encloses and is defined, on the premise of design spirit of the present invention is not departed from, those of ordinary skill in the art are to the technical side of the present invention
The various modifications and improvement that case is made should all be fallen into the protection domain that claims of the present invention determines.
Claims (8)
1. one kind is based on tunable IR narrow band filter in graphene, it is characterised in that：Include substrate, set in substrate
There is the first dielectric coated, graphene is placed in the first dielectric coated, be equipped with second and third dielectric again on graphene
3rd dielectric coated is etched into grating layer by coating.
It is 2. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The grating layer width is less than the half of screen periods.
It is 3. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The grating layer thickness is 850 ~ 950nm.
It is 4. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The grating layer width is 720 ~ 780nm.
It is 5. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The first dielectric coated thickness is 590-610nm.
It is 6. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The second dielectric coated thickness is 390-410nm.
It is 7. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The base material refractive index is less than dielectric coated Refractive Index of Material.
It is 8. according to claim 1 a kind of based on tunable IR narrow band filter in graphene, it is characterised in that：
The base material is calcirm-fluoride, and dielectric coated and grating layer material are silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201711359505.7A CN108107609A (en) | 2017-12-17 | 2017-12-17 | One kind is based on tunable IR narrow band filter in graphene |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109273805A (en) * | 2018-12-07 | 2019-01-25 | 金华伏安光电科技有限公司 | A kind of tunable filter based on graphene |
| CN110646368A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Air quality monitoring device |
| CN110646364A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Gas infrared detector |
| CN110646366A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Vehicle-mounted air quality monitoring device |
| CN110648488A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Intelligent security device based on graphene infrared detector |
| US11187653B2 (en) | 2018-06-26 | 2021-11-30 | Hangzhou Sanhua Research Institute Co., Ltd. | Infrared sensor and infrared gas detector |
Citations (2)
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| CN105572865A (en) * | 2016-01-25 | 2016-05-11 | 中国科学院上海光学精密机械研究所 | Spectrum selective absorber based on single-layer graphene and Bragg grating |
| CN107479296A (en) * | 2017-08-14 | 2017-12-15 | 安徽大学 | Infrared narrow-band absorbers during one kind is tunable |
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2017
- 2017-12-17 CN CN201711359505.7A patent/CN108107609A/en active Pending
Patent Citations (2)
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| CN105572865A (en) * | 2016-01-25 | 2016-05-11 | 中国科学院上海光学精密机械研究所 | Spectrum selective absorber based on single-layer graphene and Bragg grating |
| CN107479296A (en) * | 2017-08-14 | 2017-12-15 | 安徽大学 | Infrared narrow-band absorbers during one kind is tunable |
Non-Patent Citations (3)
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| DOMENICO DE CEGLIA 等: "Tuning Fano resonances of graphene-based gratings", 《PROC. OF SPIE》 * |
| YAN-LIN LIAO 等: "Graphene-based tunable ultra-narrowband mid-infrared TE-polarization absorber", 《OPTICS EXPRESS》 * |
| YEONG HWAN KO 等: "Flat-top bandpass filters enabled by cascaded resonant gratings", 《OPTICS LETTERS》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110646368A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Air quality monitoring device |
| CN110646364A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Gas infrared detector |
| CN110646366A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Vehicle-mounted air quality monitoring device |
| CN110648488A (en) * | 2018-06-26 | 2020-01-03 | 浙江三花智能控制股份有限公司 | Intelligent security device based on graphene infrared detector |
| US11187653B2 (en) | 2018-06-26 | 2021-11-30 | Hangzhou Sanhua Research Institute Co., Ltd. | Infrared sensor and infrared gas detector |
| CN109273805A (en) * | 2018-12-07 | 2019-01-25 | 金华伏安光电科技有限公司 | A kind of tunable filter based on graphene |
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Application publication date: 20180601 |