CN105549133B - A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity - Google Patents
A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity Download PDFInfo
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- CN105549133B CN105549133B CN201510906521.8A CN201510906521A CN105549133B CN 105549133 B CN105549133 B CN 105549133B CN 201510906521 A CN201510906521 A CN 201510906521A CN 105549133 B CN105549133 B CN 105549133B
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- tin oxide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
Abstract
The present invention relates to a kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, the absorber includes metallic substrates, the thin silicon film and indium tin oxide films being stacked on the metallic substrate provided with the cycle, the thick silicon thin film and silicon nitride film being stacked on the superiors' indium tin oxide films provided with the cycle.Compared with prior art, the present invention forms equivalent hyperbolic metamaterials using the indium tin oxide films and thin silicon film of sub-wavelength dimensions, and Fabry Perot chamber is used as by the use of the hyperbolic metamaterials, the normal dispersion of Bragg mirror is compensated using the unusual wave vector dispersion of hyperbolic metamaterials, realize that the omnidirectional with Polarization selection characteristic of near-infrared absorbs, under the conditions of 60 ° of inclination angle incidence, absorptivity remains to reach more than 95%.Present invention can apply to chemistry and bio-sensing field.
Description
Technical field
The present invention relates to a kind of near-infrared omnidirectional absorber, more particularly, to a kind of based on the near of hyperbolic metamaterials microcavity
Infrared omnidirectional's absorber.
Background technology
In near infrared band field, people need to carry out chemistry and biological detection using near infrared absorption device, therefore closely
Infrared absorber is widely used.Its operation principle is that biomolecule or chemical molecular have stronger resonance near infrared band
Absworption peak, when Infrared irradiation of the sample by frequency consecutive variations, the molecule absorption radiation of some frequencies, so as to cause
The change of absorption spectra, therefore there are many applications in biomolecular spectroscopy and chemical spectrum, as air pollution monitoring, gas " refer to
Line " detects and analysis human breathing disease mark.In the prior art, various optics cavities are applied among absorber, wherein
Including Fabry Perot chamber, Echo Wall chamber etc..However, common near infrared absorption device is angle dependency, different angle pair
The absorption frequency answered is different.This make it that traditional biological detection angular spectrum scope is very narrow, greatly limit its application.
It is near that the sub-wavelength being made up of the array and metallic substrates of metal nano disk is published on the nanometer bulletin in the nearest U.S.
Infrared absorber.The surface plasmon mode of local in near-infrared be present in metal nano array of discs, using metallic substrates with
Fabry Perot chamber between metal nano array of discs, this phasmon effect can be strengthened, so as to realize the complete of omnidirectional
U.S. absorbs.But this absorber has one disadvantage in that to be exactly that it is three-dimensional structure, thus processed complex, it is necessary to prepare meticulously, it is right
Litho machine has at a relatively high requirement, and this absorbs application in the near-infrared omnidirectional developed increasingly very big limitation.
The content of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind is special based on hyperbolic
The near-infrared omnidirectional absorber of material microcavity, the present invention are that near-infrared omnidirectional absorber can be achieved using simple coating technique
Polarization selection.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, including metallic substrates, on the metallic substrate
The thin silicon film and indium tin oxide films being stacked provided with the cycle, cycle stacking is provided with the superiors' indium tin oxide films and is set
The thick silicon thin film and silicon nitride film put.
Described thin silicon film shares 5 cycles stackings with indium tin oxide films.Described indium tin oxide films are a kind of
Transparent conductive film, it is a kind of phasmon material near infrared band, there is metalloid characteristic, for is formed with thin silicon film
Equivalent hyperbolic metamaterials microcavity, phase compensation is realized with Bragg mirror, so as to realize the Fabry Perot of non-dispersive
Chamber, the local microcavity pattern of wide-angle can be excited.
Described thick silicon thin film shares 4 cycles stackings with silicon nitride film.
Described thick silicon thin film provides with being used as Bragg mirror after the stacking of silicon nitride film cycle near infrared band
Bragg reflection.
The refractive index of described thin silicon film is 3.48, and thickness is 25 nanometers.
Described indium tin oxide films are a kind of transparent conductive films, and thickness is 25 nanometers.
The refractive index of described thick silicon thin film is 3.48, and thickness is 112 nanometers.
The refractive index of described silicon nitride film is 2.0, and thickness is 232 nanometers.
Described metallic substrates are silver, are used as absorbed layer.
The present invention forms equivalent hyperbolic metamaterials using the indium tin oxide films and thin silicon film of sub-wavelength dimensions, and
By the use of the hyperbolic metamaterials as Fabry Perot chamber, using the unusual wave vector dispersion of hyperbolic metamaterials to Bragg mirror
Normal dispersion compensate, realize that the omnidirectional with Polarization selection characteristic of near-infrared absorbs.In 60 ° of inclination angle incidence conditions
Under, absorptivity remains to reach more than 95%.Present invention can apply to chemistry and bio-sensing field.
Compared with prior art, the present invention has following effect and advantage：
1st, because the present invention is a kind of multi-layer film structure, belong to one-dimentional structure, utilize current ripe coating technique
Realize, experiment is prepared simply, less demanding to experiment condition.
2nd, because the present invention is the unusual wave vector dispersion using hyperbolic metamaterials to the normal dispersion of Bragg mirror
Compensate, it is possible to achieve omnidirectional absorbs, and this Mechanism Primary to realize in two dimension even three-dimensional structure, one
It can not be realized in dimension structure.
3rd, due to make use of hyperbolic metamaterials in the present invention, therefore it is Polarization selection.
Brief description of the drawings
Fig. 1 is the structural side view of the present invention；
Fig. 2 is the near-infrared omnidirectional absorber absorption spectra of the present invention with the change of angle.
Embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment
As shown in figure 1, a kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, including metallic substrates 1,
Metallic substrates 1 are provided with the thin silicon film 2 and indium tin oxide films 3 being stacked in the cycle, on the superiors' indium tin oxide films 3
Provided with the thick silicon thin film 4 that the cycle is stacked and silicon nitride film 5.
Wherein, thin silicon film 2 shares 5 cycles stackings with indium tin oxide films 3.Indium tin oxide films 3 are a kind of transparent
Conductive film, thickness be 25 nanometers, be a kind of phasmon material near infrared band, there is metalloid characteristic, for it is thin
Silicon thin film 2 forms equivalent hyperbolic metamaterials microcavity, phase compensation is realized with Bragg mirror, so as to realize non-dispersive
Fabry Perot chamber, the local microcavity pattern of wide-angle can be excited.The refractive index of thin silicon film 2 is 3.48, and thickness is received for 25
Rice.Thick silicon thin film 4 shares 4 cycles stackings with silicon nitride film 5, and as Bragg mirror, cloth is provided near infrared band
Glug reflects.The refractive index of thick silicon thin film 4 is 3.48, and thickness is 112 nanometers.The refractive index of silicon nitride film 5 is 2.0, thickness
For 232 nanometers.Metallic substrates 1 are silver, are used as absorbed layer.
Equivalent hyperbolic metamaterials are formed using the indium tin oxide films and thin silicon film of sub-wavelength dimensions, and with this pair
Bent metamaterials are as Fabry Perot chamber, using the unusual wave vector dispersion of hyperbolic metamaterials to the normal of Bragg mirror
Dispersion compensates, and realizes that the omnidirectional with Polarization selection characteristic of near-infrared absorbs.Because hyperbolic metamaterials are only to TM poles
Changing ripple has response, therefore this absorber can realize the absorption of the wide-angle of Polarization selection, and near-infrared omnidirectional of the invention absorbs
With the change of angle as shown in Fig. 2 under the conditions of 60 ° of inclination angle incidence, absorptivity remains to reach more than 95% device absorption spectra.This
The near-infrared omnidirectional absorber of invention can be applied to chemistry and bio-sensing field.
The above-mentioned description to embodiment is understood that for ease of those skilled in the art and using invention.
Person skilled in the art obviously can easily make various modifications to these embodiments, and described herein general
Principle is applied in other embodiment without by performing creative labour.Therefore, the invention is not restricted to above-described embodiment, ability
Field technique personnel do not depart from improvement that scope made and modification all should be the present invention's according to the announcement of the present invention
Within protection domain.
Claims (2)
1. a kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, it is characterised in that the absorber includes metal
Substrate, the thin silicon film and indium tin oxide films being stacked on the metallic substrate provided with the cycle, in the superiors, tin indium oxide is thin
Film is provided with the thick silicon thin film and silicon nitride film being stacked in the cycle；
Described thin silicon film shares 5 cycles stackings with indium tin oxide films, and described thick silicon thin film is total to silicon nitride film
There are 4 cycle stackings, described thick silicon thin film after the stacking of silicon nitride film cycle with being used as Bragg mirror, described thin silicon
The refractive index of film is 3.48, and thickness is 25 nanometers, and described indium tin oxide films are a kind of transparent conductive films, thickness 25
Nanometer, the refractive index of described thick silicon thin film is 3.48, and thickness is 112 nanometers, and the refractive index of described silicon nitride film is
2.0, thickness is 232 nanometers.
2. a kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, its feature exist
In described metallic substrates are silver, are used as absorbed layer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510906521.8A CN105549133B (en) | 2015-12-09 | 2015-12-09 | A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity |
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| CN201510906521.8A CN105549133B (en) | 2015-12-09 | 2015-12-09 | A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity |
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| CN105549133A CN105549133A (en) | 2016-05-04 |
| CN105549133B true CN105549133B (en) | 2017-12-15 |
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| US11713503B2 (en) | 2011-12-23 | 2023-08-01 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
| CN106405972B (en) * | 2016-10-28 | 2019-02-01 | 同济大学 | A kind of magnetic control Frequency Adjustable far red light switch and its implementation |
| CN109521504B (en) * | 2017-09-20 | 2021-02-05 | 苏州大学 | Terahertz wave absorption structure |
| WO2019206188A1 (en) * | 2018-04-24 | 2019-10-31 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
Citations (4)
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|---|---|---|---|---|
| JP2010155938A (en) * | 2008-12-27 | 2010-07-15 | Mitsubishi Materials Corp | Near-infrared absorbent and dispersion thereof |
| CN103568441A (en) * | 2013-10-24 | 2014-02-12 | 复旦大学 | Thin film super absorber with low cost and large area and preparation method of film |
| CN103675961A (en) * | 2013-12-26 | 2014-03-26 | 哈尔滨工业大学 | Intermediate infrared double-frequency-band metamaterial absorber based on double-L structure |
| CN104198051A (en) * | 2014-09-18 | 2014-12-10 | 电子科技大学 | Multiband infrared metamaterial wave absorber |
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| DE102008010199A1 (en) * | 2008-02-20 | 2009-08-27 | Schott Ag | Radiation-selective absorber coating, absorber tube and method for its production |
| US9610754B2 (en) * | 2011-12-23 | 2017-04-04 | Hong Kong Baptist University | Fabrication of highly flexible near-infrared metamaterials |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010155938A (en) * | 2008-12-27 | 2010-07-15 | Mitsubishi Materials Corp | Near-infrared absorbent and dispersion thereof |
| CN103568441A (en) * | 2013-10-24 | 2014-02-12 | 复旦大学 | Thin film super absorber with low cost and large area and preparation method of film |
| CN103675961A (en) * | 2013-12-26 | 2014-03-26 | 哈尔滨工业大学 | Intermediate infrared double-frequency-band metamaterial absorber based on double-L structure |
| CN104198051A (en) * | 2014-09-18 | 2014-12-10 | 电子科技大学 | Multiband infrared metamaterial wave absorber |
Non-Patent Citations (1)
| Title |
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| Highly flexible near-infrared metamaterials;G.X.Li et.al.;《OPTICS EXPRESS》;20120102;第20卷(第1期);397-402 * |
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