CN108106999B - Light path transmission reversing device and optical performance parameter detection system - Google Patents
Light path transmission reversing device and optical performance parameter detection system Download PDFInfo
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- CN108106999B CN108106999B CN201810053988.6A CN201810053988A CN108106999B CN 108106999 B CN108106999 B CN 108106999B CN 201810053988 A CN201810053988 A CN 201810053988A CN 108106999 B CN108106999 B CN 108106999B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 123
- 230000005540 biological transmission Effects 0.000 title claims abstract description 38
- 238000001514 detection method Methods 0.000 title claims abstract description 14
- 238000007789 sealing Methods 0.000 claims description 11
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 15
- 235000017491 Bambusa tulda Nutrition 0.000 claims 15
- 241001330002 Bambuseae Species 0.000 claims 15
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 15
- 239000011425 bamboo Substances 0.000 claims 15
- 238000010586 diagram Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/015—Apparatus with interchangeable optical heads or interchangeable block of optics and detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/066—Modifiable path; multiple paths in one sample
- G01N2201/0666—Selectable paths; insertable multiple sources
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention provides an optical path transmission reversing device which comprises an input optical cylinder, a reversing cylinder, an optical bracket, a first output optical cylinder, a second output optical cylinder, a top plate and a bottom plate, wherein the reversing cylinder is a partially hollow cylinder body, the reversing cylinder is fixedly arranged on the bottom plate, the optical bracket is arranged in the reversing cylinder, a reflecting mirror is fixedly arranged on the optical bracket, a plurality of side plates respectively connected with the input optical cylinder, the first output optical cylinder and the second output optical cylinder are arranged around the reversing cylinder, the top plate is arranged at the top of the reversing cylinder, a rotary table capable of enabling the reversing cylinder to rotate is arranged on the top plate, a limiting mechanism is further arranged on the top plate, and the limiting mechanism can limit the optical bracket to a first state or a second state different from the first state. The invention also provides an optical performance parameter detection system comprising the optical path transmission reversing device.
Description
Technical Field
The invention relates to the technical field of laser, in particular to an optical path transmission reversing device and an optical performance parameter detection system.
Background
The photoetching machine mainly comprises a projection objective, an illumination system, a mask table, a workpiece table, a light source and other main components, the wavelength of the light source of the projection photoetching machine is wide in coverage, the light source comprises ultraviolet g rays, i rays, far ultraviolet rays, deep ultraviolet rays, extreme ultraviolet rays and the like, and the most widely applied projection optical photoetching machine in the market at present is 193nm (ArF). The light source module is usually separated from the whole machine independently and can be independently formed into a system, and the light source is usually communicated with the main machine of the photoetching machine through a transmission light path with a certain path. In order to avoid the reaction of the laser and the air in the transmission process, the whole transmission path is usually subjected to sealing treatment, nitrogen is introduced, and micro-positive pressure is kept in the sealing path, so that the air cannot enter the light path part, and the effect of isolating the laser from the air is achieved. The light path transmission device mainly comprises a refraction point and a pipeline, wherein the refraction point is usually provided with a 45-degree reflector, the light transmission direction can be turned by 90 degrees, and the pipeline mainly seals a laser propagation path. Sealing elements are arranged at the joints of the refraction elements and the pipelines to prevent nitrogen leakage and simultaneously maintain micro-positive pressure in the closed light path.
In the same way, in the fields of conventional detection of optical performance parameters, detection of performance parameters of a light source and the like, the light source of the laser is an indispensable component, and at present, the laser is formed into an independent product, and in many cases, the laser is not integrated with a whole machine, but is separately installed, so that an optical path transmission device is inevitably used. In general, the transmission light path from the laser to the lithography machine or the optical detection device is made into a fixed special light path, i.e. one laser is used by one lithography or detection device, but when one laser needs to be used by two devices alternately, the devices are inconvenient to carry due to the large volume and mass, and at the moment, a light path reversing device is needed to switch the laser to different devices according to the use requirement. Such applications typically do not occur on semiconductor factory lines, but are found in equipment development and optical inspection, where establishing a dedicated optical path for one laser to one lithographic or experimental apparatus would use one more laser, thereby also increasing costs by using more space and resources such as gas sources, energy sources, etc.
Disclosure of Invention
The present invention aims to solve at least one of the above-mentioned drawbacks and disadvantages, and this object is achieved by the following technical solutions.
The invention provides an optical path transmission reversing device which comprises an input optical cylinder, a reversing cylinder, an optical bracket, a first output optical cylinder, a second output optical cylinder, a top plate and a bottom plate, wherein the reversing cylinder is a partially hollow cylinder body, the reversing cylinder is fixedly arranged on the bottom plate, the optical bracket is arranged in the reversing cylinder, a reflecting mirror is fixedly arranged on the optical bracket, a plurality of side plates respectively connected with the input optical cylinder, the first output optical cylinder and the second output optical cylinder are arranged around the reversing cylinder, the top plate is arranged at the top of the reversing cylinder, a rotary table capable of enabling the reversing cylinder to rotate is arranged on the top plate, a limiting mechanism is further arranged on the top plate, the limiting mechanism can limit the optical bracket to a first state or a second state different from the first state, in the first state of the optical bracket, light is output through the first output optical cylinder, and in the second state of the optical bracket, light is output through the second output optical cylinder.
Further, the central axis of the first output light barrel and the central axis of the second output light barrel coincide, and the central axis of the input light barrel is perpendicular to the central axis of the first output light barrel and the central axis of the second output light barrel.
Further, the plurality of side plates comprise an input side plate connected with the input light tube, a first side plate connected with the first output light tube and a second side plate connected with the second output light tube, the first side plate and the second side plate are symmetrically arranged on two sides of the input side plate, and the reversing tube is enclosed and sealed by the plurality of side plates.
Further, the optical support is perpendicular to the bottom plate, and the reflecting mirror is fixed on the optical support through a compression ring.
Further, the optical bracket is fixedly connected with the reversing cylinder through a tension spring.
Further, an adjusting screw is arranged on the optical bracket and used for adjusting the optical bracket.
Further, the limiting mechanism comprises a first spring pin and a second spring pin, the first spring pin limits the optical bracket to the first state when entering the pin hole of the reversing cylinder, and the second spring pin limits the optical bracket to the second state when entering the pin hole of the reversing cylinder.
Further, the turntable is fixedly connected with the reversing cylinder through bolts.
Further, a sealing strip is arranged at the edge of the reversing cylinder.
The invention also provides an optical performance parameter detection system which comprises a laser light source and the optical path transmission reversing device, wherein the optical path transmission reversing device can switch the light of the laser light source input from the input light cylinder to different optical detection equipment through the first output light cylinder or the second output light cylinder.
The invention has the following advantages:
(1) The invention can rapidly switch between the light paths of two devices alternately using the laser without replacing and disassembling parts, thereby realizing the multiple purposes of one light source.
(2) According to the invention, external air and impurities are not introduced in the switching process, so that the pressure of the protective gas in the closed light path can be always kept, and the pressure maintaining performance is good.
(3) The invention can save energy, air source, space and other consumption and improve the utilization rate of equipment.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to designate like parts throughout the figures.
Fig. 1 is a schematic structural diagram of an optical path transmission reversing device according to an embodiment of the present invention.
Fig. 2 is an internal schematic diagram of an optical path transmission reversing device according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of the optical path transmission reversing device according to the embodiment of the present invention after removing part of the components.
Fig. 4 is a schematic diagram of another direction structure of the optical path transmission reversing device according to the embodiment of the present invention.
Fig. 5 is a schematic diagram of another direction structure of the optical path transmission reversing device according to the embodiment of the present invention.
Fig. 6 is a cross-sectional view of an optical path transmission reversing device according to an embodiment of the present invention.
Reference numerals in the drawings are as follows:
1-reversing cylinder 2-optical bracket
3-reflector 4-input light tube
5-first output light tube 6-first output light tube
7-roof 8-floor
10-tension spring 11-sealing strip
12-tension spring hole 21-adjusting screw
22-tension spring hole 71-turntable
72-bolt 731-first spring pin
732-second spring pin 741-first spring button
742-second spring button 81-mounting hole
91-input side plate 92-first output side plate
93-second output side plate
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Fig. 1 to 6 are schematic structural views showing an optical path transmission reversing device provided according to an embodiment of the present invention. As shown in fig. 1 to 6, the device comprises an input light cylinder 4, a reversing cylinder 1, an optical bracket 2, a first output light cylinder 5, a second output light cylinder 6, a top plate 7 and a bottom plate 8, wherein an optical path transmission channel in the device is closed, and inert gas or dry air is filled.
The reversing cylinder 1 is of a cylindrical rotatable hollow structure, is fixedly arranged on a bottom plate 8, is internally provided with an optical bracket 2, the optical bracket 2 is vertically arranged on the bottom plate 8, the optical bracket 2 is fixedly provided with a reflecting mirror 3, and the reflecting mirror 3 is fixed on the optical bracket 2 through a compression ring. The mirror 3 is a plane mirror or a curved mirror.
The optical bracket 2 is provided with three extension spring holes 22, the reversing cylinder 1 is provided with three corresponding extension spring holes 12, and the optical bracket 2 is pressed and fixed with the inner surface of the reversing cylinder 1 through 3 tension springs 10. As shown in fig. 6, the optical bracket 2 is closely attached to the flat surface of the inner surface of the reversing cylinder 1 and is spaced from the inner surface, and the optical bracket and the reversing cylinder are connected by a tension spring 10.
As shown in fig. 3 and 5, the optical bracket 2 is further provided with an adjusting screw 21 for adjusting the pitch, swing and distance of the optical bracket 2, so as to fine tune the reflected light path, and the adjusting screw 21 is connected with the optical bracket 2 through a hole on the reversing cylinder 1. In this embodiment, the number of the adjusting screws 21 provided on the optical mount 2 is 3.
In practice, the number of the tension springs 10 and the number of the adjusting screws 21 may be set according to practical situations, and the present invention is not particularly limited.
The laser beam is incident into the input light tube 4, and the incident light is reflected by the reflecting mirror 3 and then emitted by the first output light tube 5 or the second output light tube 6. The first output light tube 5 and the second output light tube 6 are arranged in mirror symmetry relative to the input light tube 4, the central axis of the first output light tube 5 and the central axis of the second output light tube 6 are overlapped, the central axis of the input light tube 4 is perpendicular to the central axes of the first output light tube 5 and the second output light tube 6, and the input light tube 4 and the first output light tube 5 and the second output light tube 6 form a T shape. The main structure of the device is symmetrically arranged, so that the convenience of processing is improved, the symmetrical components are identical in structure, and the interchangeability of the components is improved to a certain extent.
As shown in fig. 1 and 4, a plurality of side plates respectively connected with the input light tube 4, the first output light tube 5 and the second output light tube 6 are arranged around the reversing tube 1, the side plates comprise an input side plate 91 connected with the input light tube 4, a first side plate 92 connected with the first output light tube 5 and a second side plate 93 connected with the second output light tube 6, the first side plate 92 and the second side plate 93 are symmetrically arranged on two sides of the input side plate 91, a circle of sealing strips 11 are stuck on the edge of a hollow structure inside the reversing tube 1 to form a closed seal with the peripheral side plates, so that the input light tube 4, the first output light tube 5 and the second output light tube 6 are connected with the reversing tube 1 in a sealing way, external air and impurities are not introduced due to light path conversion, and micro-positive pressure in a closed light path is always kept.
The upper portion of the reversing cylinder 1 is provided with a top plate 7, the top plate 7 is provided with a rotary table 71, the rotary table 71 is connected with the reversing cylinder 1 through a bolt 72, the rotary table 71 drives the reversing cylinder 1 to rotate when rotating, and meanwhile drives the optical bracket 2 to rotate, so that the light path reversing is realized.
The top plate 7 is also provided with a limiting mechanism, in this embodiment, the limiting mechanism is a spring pin, the spring pin is connected with a spring button, the spring button can pull up to control the height of the spring pin and is used for determining the rotation position and angle of the optical bracket 2, and meanwhile, the upper surface of the reversing cylinder 1 is provided with a pin hole matched with the spring pin. There are 2 spring pins, a first spring pin 731 and a second spring pin 732, respectively, so that the optical bracket 2 is just in the first state or the second state. Accordingly, the first spring pin 731 and the first spring button 741 are engaged, and the second spring pin 732 and the second spring button 742 are engaged.
When the optical bracket 2 is in the first state, the first spring pin 731 just falls into a pin hole on the upper surface of the reversing cylinder 1, at this time, the reflecting mirror 3 faces the first output light cylinder 5, the mirror surface direction of the reflecting mirror 3 forms an included angle of 45 degrees or 135 degrees relative to the central axis of the first output light cylinder 5, and light is output through the first output light cylinder 5; when the optical bracket 2 is in the second state, the second spring pin 732 just falls into the pin hole on the upper surface of the reversing cylinder 1, at this time, the mirror surface faces the second output light cylinder 6, the mirror surface direction of the mirror 3 forms an included angle of 45 ° or 135 ° with respect to the central axis of the second output light cylinder 6, and the light is output through the second output light cylinder 6.
The optical bracket 2 can be positioned and locked through the spring pin, so that the stability of the optical bracket 2 can be enhanced, the structure is simple and stable, the installation is simple and convenient, and the direction switching precision is ensured.
Further, bolt holes are provided around the top plate 7, and the top plate 7 is fixedly connected to the input side plate 91, the first side plate 92, and the second side plate 93 by bolts, thereby closing the reversing cylinder 1.
The bottom plate 8 is a rectangular plate, and four corners are provided with mounting holes 81 for fixing the device. In other embodiments, the bottom plate 8 may be circular, triangular, etc.
The sealing elements are designed at the positions where the above contact pieces relate to air leakage, so that the laser and the air are effectively isolated, and the pressure of the protective gas in the closed light path is always kept, so that the airtight performance is ensured.
The working process of the optical path transmission reversing device is as follows:
the laser beam is incident into the input light cylinder 4, and the light can be output along the first output light path or the second output light path. When the mirror 3 faces in the direction of the first output light barrel 5 and the mirror surface direction of the mirror 3 is at an angle of 45 ° or 135 ° with respect to the central axis of the first output light barrel 5, the first spring pin 731 just falls into the pin hole of the upper surface of the reversing barrel 1, at which time the light is output along the first output light path, as indicated by the arrow in fig. 1. When the optical path is required to be switched from the first output optical path to the second output optical path, the first spring button 741 is pulled up, the first spring pin 731 is driven to move upwards, no blocking structure exists between the top plate 7 and the reversing cylinder 1, the reversing cylinder 1 can be rotated through rotating the rotary table 71, and the reflecting mirror 3 installed on the optical bracket 2 can also rotate along with the reversing cylinder 1 until the second spring pin 732 falls into a pin hole on the upper surface of the reversing cylinder 1, at this time, the reflecting mirror 3 faces the direction of the second output optical cylinder 6, the output optical path is reversed to the second output optical path, and the second spring pin 732 is automatically pressed in the pin hole of the reversing cylinder 1 due to elastic force. To ensure accurate switching angle, the adjusting screw 21 can be turned to fine tune the optical bracket 2.
Similarly, the optical path is switched from the second output optical barrel 6 to the first output optical barrel 5, and only the second spring button 742 is pulled up and the rotary disc 71 is rotated by reverse operation, which is not described herein.
The device adjusts the internal reflection lens through pulling up the spring pin and rotating the rotary table 71, switches the direction of emergent light, does not need to replace and disassemble parts, does not need to recombine the light path, and solves the problem of convenient and rapid direction change of the light beam in light path transmission. All tangential or connected parts are designed with sealing elements, so that external air and impurities are not introduced in the whole switching process due to the fact that a closed light path is detached, leakage of gas is avoided, micro positive pressure in a transmission light path is kept, laser and air can be effectively isolated, pressure maintaining performance is good, and consumption of a cleaning air source is low.
The light path transmission reversing device provided by the invention can be used for rapidly switching between light paths of two devices alternately using the lasers, so that the situation that one laser is only used by one device is changed, and one light source can be used for multiple purposes through light path switching. The device is particularly suitable for the application occasions in which two devices do not need to use light sources at the same time, and one laser light source is reduced, so that the consumption of energy sources, air sources and the like caused by the consumption is also saved, the space is correspondingly saved, and the utilization rate of the device is improved.
The invention also provides an optical performance parameter detection system which comprises a laser light source and the optical path transmission reversing device, wherein the optical path transmission reversing device can switch the light of the laser light source input from the input light cylinder to different optical detection equipment through the first output light cylinder or the second output light cylinder.
It is noted that in the description of the present invention, the terms "first," "second," and the like, are merely used to distinguish one entity or operation from another entity or operation and do not necessarily require or imply any such actual relationship or order between such entities or operations.
It should be noted that, in the description of the present invention, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, mechanical or electrical, or may be a communication between two elements, or may be a direct connection or may be an indirect connection via an intermediary, and the specific meaning of the terms may be understood by those skilled in the art according to the specific circumstances.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides a light path transmission reversing device which is characterized in that, including input light section of thick bamboo, a reversing section of thick bamboo, optical support, speculum, first output light section of thick bamboo, second output light section of thick bamboo, roof and bottom plate, reversing section of thick bamboo is the partly hollow barrel, reversing section of thick bamboo fixed mounting is on the bottom plate, optical support installs in the inside of reversing section of thick bamboo, speculum fixed mounting is on optical support, reversing section of thick bamboo's circumference is equipped with respectively with a plurality of curb plates that are connected with input light section of thick bamboo, first output light section of thick bamboo and second output light section of thick bamboo, the roof is installed in the top of reversing section of thick bamboo, be equipped with on the roof and make the carousel that the reversing section of thick bamboo rotated, still be equipped with stop gear on the roof, and, stop gear can limit optical support in first state or the second state different from first state, in optical support's first state, light is exported through first output light section of thick bamboo, in optical support's second state through second output light section of thick bamboo;
the plurality of side plates comprise an input side plate connected with the input light cylinder, a first side plate connected with the first output light cylinder and a second side plate connected with the second output light cylinder, the first side plate and the second side plate are symmetrically arranged on two sides of the input side plate, and the reversing cylinder is surrounded and sealed by the plurality of side plates;
the limiting mechanism comprises a first spring pin and a second spring pin, the first spring pin limits the optical bracket to the first state when entering the pin hole of the reversing cylinder, and the second spring pin limits the optical bracket to the second state when entering the pin hole of the reversing cylinder;
the optical path transmission reversing device also comprises a sealing element, wherein the sealing element is used for keeping micro-positive pressure in the transmission optical path;
and the optical bracket is also provided with an adjusting screw rod which is used for adjusting the pitching, swinging and distance of the optical bracket so as to finely adjust the reflection light path.
2. The optical path transmission switching apparatus according to claim 1, wherein a central axis of the first output optical barrel and a central axis of the second output optical barrel coincide, and a central axis of the input optical barrel is perpendicular to the central axis of the first output optical barrel and the central axis of the second output optical barrel.
3. The optical path transmission reversing device according to claim 1, wherein the optical bracket is perpendicular to the bottom plate, and the reflecting mirror is fixed on the optical bracket through a pressing ring.
4. The optical path transmission reversing device according to claim 1, wherein the optical bracket is fixedly connected with the reversing cylinder through a tension spring.
5. A light path transfer switching apparatus as claimed in claim 3, wherein the optical bracket is provided with an adjusting screw for adjusting the optical bracket.
6. The optical path transmission switching apparatus according to any one of claims 1 to 5, wherein the rotary disk is fixedly connected to the switching cylinder by a bolt.
7. The optical path transmission switching apparatus according to any one of claims 1 to 5, wherein an edge of the switching cylinder is provided with a seal strip.
8. An optical performance parameter detection system, characterized in that it comprises a laser light source and an optical path transmission reversing device according to any one of claims 1 to 7, which is capable of switching the light of the laser light source input from the input light cartridge to a different optical detection apparatus via the first output light cartridge or the second output light cartridge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810053988.6A CN108106999B (en) | 2018-01-19 | 2018-01-19 | Light path transmission reversing device and optical performance parameter detection system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810053988.6A CN108106999B (en) | 2018-01-19 | 2018-01-19 | Light path transmission reversing device and optical performance parameter detection system |
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| CN108106999A CN108106999A (en) | 2018-06-01 |
| CN108106999B true CN108106999B (en) | 2023-11-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077108B (en) * | 2019-12-31 | 2020-08-25 | 中国科学院地质与地球物理研究所 | Laser sample room suitable for deep space detection |
| CN113008798A (en) * | 2021-03-15 | 2021-06-22 | 上海华力微电子有限公司 | Illumination light path, defect detection device and light intensity measurement method |
| CN114709701B (en) * | 2022-04-11 | 2022-12-02 | 苏州新镭激光科技有限公司 | High-power optical fiber laser |
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