CN108106816A - Detect the method and system of large-caliber space optical system wave front aberration - Google Patents
Detect the method and system of large-caliber space optical system wave front aberration Download PDFInfo
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- CN108106816A CN108106816A CN201711172723.XA CN201711172723A CN108106816A CN 108106816 A CN108106816 A CN 108106816A CN 201711172723 A CN201711172723 A CN 201711172723A CN 108106816 A CN108106816 A CN 108106816A
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Abstract
The present invention discloses a kind of method for splicing detection large-caliber space optical system wave front aberration using light pipe array, which is characterized in that includes the following steps：Step 1：Parallel light tube array is built, and adjusts parallel light tube array and be directed toward unanimously；Step 2：According to monochromatic light nozzle footpath in the clear aperture of optical system to be checked, the light pipe spacing of parallel light tube array and parallel light tube array, the scan path of the parallel light tube array is planned；Step 3：Light pipe array is placed on four-dimensional displacement platform, and is directed at the light inlet of the optical system to be checked, according to the scan path planned, carries out optical system sub-aperture wavefront slope measurement to be checked；Step 4：Based on restructing algorithm before sub-aperture wavefront slope and mode wave, kinematic error decoupling and wavefront fitting are carried out, realizes optical system wavefront error reconstruct to be checked.The present invention without using heavy caliber parallel light tube, reduces the difficulty and cost of large-caliber space optical system outfield Wave-front measurement in measurement process.
Description
Technical field
The invention belongs to technical field of optical, specifically using light pipe array splicing detection large-caliber space optical system
The method and system of wave front aberration.
Background technology
Space Optical System is the core of all kinds of Spaceborne Remote Sensing Application equipment, and image quality is earth observation from space level
Deciding factor.With the swift and violent continuous development increased with space optics technology of demand, the bore of such optical system
Constantly increase, the detection difficulty of optical system imaging quality are also increasing.Especially optical system is in field testing or field
During work, ensure that the wave front aberration of optical system reaches the requirement of its desired indicator with greater need for convenient, reliable technological means.Cause
This, the detection for large-caliber space optical system wave front aberration, there is an urgent need to a kind of simple and effective new methods.
Existing Space Optical System wave front aberration detection method is mainly parallel light tube analog imaging method, that is, utilizes bore
Infinity target imaging is simulated not less than tested optical system, the preferably at least twice parallel light tube by check system of focal length, passes through figure
The wave front aberration of system under test (SUT) is obtained as analysis is resolved with processing.However as the continuous increasing of Space Optical System bore and focal length
Greatly, it is also increasing to meet heavy caliber, the manufacture cost of long-focus collimator of this method detection demand, even if producing this
The parallel light tube of sample, the carrying and adjustment of its own are also very difficult, can not meet large-caliber space optical system in outfield item
Detection demand under part.
Changchun ray machine Yan Feng propose the optical system Wave-front Measuring Technique based on Hartmann principles, use osculum
Footpath parallel light tube Scanning Detction optical system obtains optical system by measuring system wavefront slope information and further fitting and goes out
Wavefront at pupil has simple in structure, the advantages such as testing cost is low.However, there is movement in the device for carrying parallel light tube scanning
Error by the direction deviation for causing parallel light tube and directly affects testing result, even across the prior calibration for being directed toward deviation and
Compensation, is still difficult to the testing requirements for meeting high-precision spatial optical system wave front aberration.
The content of the invention
It is contemplated that the defects of overcoming the prior art, provides a kind of using light pipe array splicing detection heavy caliber spatial light
The method and system of system wave front aberration.
To achieve the above object, the present invention uses following technical scheme：It provides a kind of big using the splicing detection of light pipe array
The method of bore Space Optical System wave front aberration, includes the following steps：
Step 1：Parallel light tube array is built, and adjusts the parallel light tube array and be directed toward unanimously；
Step 2：According to the clear aperture of optical system to be checked, the light pipe spacing of the parallel light tube array and described flat
The scan path of the parallel light tube array is planned in monochromatic light nozzle footpath in row light pipe array；
Step 3：Light pipe array is placed on four-dimensional displacement platform, and is directed at the light inlet of the optical system to be checked, is pressed
According to the scan path planned, the optical system sub-aperture wavefront slope measurement to be checked is carried out；
Step 4：Based on restructing algorithm before the sub-aperture wavefront slope and mode wave, kinematic error decoupling and wavefront are carried out
The optical system wavefront error reconstruct to be checked is realized in fitting.
In some embodiments, the step 1 comprises the following steps：
Step 11 builds 3 × 3 parallel light tube arrays and detects the nine beam directional lights for confirming 3 × 3 parallel light tube array
Wavefront error RMS value be superior to λ/50；
Step 12 places a standard parallel plate before the parallel light tube array, is put before the standard parallel plate
An autocollimator is put, the autocollimator is arranged on two-dimension translational platform；
Step 13, on the basis of the standard parallel plate, it is anti-through the standard parallel plate to adjust the autocollimator
The light penetrated images in the detector center of the autocollimator；
Step 14, the small parallel light tube posture of the adjustment parallel light tube array make the light that the small parallel light tube is sent
Image in the detector center of the autocollimator；
It is next small flat that step 15, the adjustment two-dimension translational platform make the autocollimator be directed at the parallel light tube array
Row light pipe repeats the operation of step 13, step 14；
Step 16, after the autocollimator is completed to the adjustment of all small parallel light tubes of the parallel light tube array, institute
The direction for stating all small parallel light tubes of parallel light tube array is consistent.
In some embodiments, in the step 2, according to the clear aperture of optical system to be checked, the parallel light tube array
Light pipe spacing and the parallel light tube array in monochromatic light nozzle footpath, calculate the optional sampling density of detection, it is described to plan
The scan path of parallel light tube array.
In some embodiments, step 2 comprises the following steps：
The optional sampling density l of detection meetsAnd l should can be divided exactly by L；
Wherein, L is that the spacing of the adjacent light pipe of light pipe array is, d is monochromatic light nozzle footpath.
In some embodiments, step 3 comprises the following steps：
The parallel light tube array is placed on four-dimensional displacement platform, and is directed at the optical system to be checked by step 31
Light inlet sets the initial parameter of the parallel light tube array and four-dimensional displacement platform；
Step 32, the four-dimensional displacement platform control the parallel light tube array to initial scanning position, sequential illumination and
The small parallel light tube for the parallel light tube array being located in the optical system clear aperture to be checked is closed, while described in utilization
The focal plane sensor of optical system to be checked completes the acquisition of multiple light spot images；
Step 33, the center-of-mass coordinate for calculating each light spot image and storage；
The parallel light tube array is moved to next detection dwell point by step 34 according to the scan path of planning, is repeated
Step 32,33 operation, until the clear aperture of the entire optical system to be checked of parallel light tube array traversal, final
To the wavefront slope data of all sub-apertures of optical system to be checked.
In some embodiments, in the step 4, based on restructing algorithm before the sub-aperture wavefront slope and mode wave, into
Row kinematic error decouples and wavefront fitting, realizes the optical system wavefront error reconstruct to be checked, comprises the following steps：
In mode based on wavefront reconstruction algorithm, increase under the polynomial pattern substrates of slope Zernike described parallel
The inclination item of light pipe array scanning motion each time, resolving obtain slope Zernike aberration coefficients and the parallel light tube array
Movement tilt term coefficient, the kinematic error of the parallel light tube array is separated from system wavefront to be fitted, weight
The wavefront error of structure optical system to be checked.
In some embodiments, the four-dimension displacement platform is automatically controlled four-dimensional displacement platform.
To achieve the above object, the present invention uses following technical scheme：A kind of detection large-caliber space optical system is provided
The system of wave front aberration, including：
Including：Parallel light tube array, planning parameters of scanning paths module, four-dimensional displacement platform, data processing module and light to be checked
System；
The planning parameters of scanning paths module, for clear aperture, the parallel light tube array according to optical system to be checked
Light pipe spacing and the parallel light tube array in monochromatic light nozzle footpath, plan the scan path of the parallel light tube array, institute
Parallel light tube array is stated to be arranged on the four-dimensional displacement platform；
Parameter setting module, for setting the initial parameter of the parallel light tube array and the four-dimensional displacement platform；
The parallel light tube array carries out the light inlet of the optical system to be checked for the scan path according to planning
Scanning carries out the optical system sub-aperture wavefront slope measurement to be checked；
The optical system to be checked, for gathering the light spot image during the parallel light tube array scanning；
The data processing module for calculating the center-of-mass coordinate of each light spot image, and stores；It is additionally operable to be based on
Restructing algorithm before the sub-aperture wavefront slope and mode wave carries out kinematic error decoupling and wavefront fitting, realizes described to be checked
Optical system wavefront error reconstructs.
In some embodiments, the planning parameters of scanning paths module is according to the clear aperture of optical system to be checked, described parallel
Monochromatic light nozzle footpath in the light pipe spacing of light pipe array and the parallel light tube array calculates the optional sampling density of detection, comes
Plan the scan path of the parallel light tube array；
The optional sampling density l of the detection meetsAnd l should can be divided exactly by L；
Wherein, L is that the spacing of the adjacent light pipe of light pipe array is, d is monochromatic light nozzle footpath.
The beneficial effects of the present invention are：
1) present invention proposes the method using light pipe array scanning detection large-caliber space optical system wave front aberration, utilizes
Overlapping area splicing Accurate Reconstruction in scanning process obtains the wave front aberration of optical system.Without using big in measurement process
Bore parallel light tube reduces the difficulty and cost of large-caliber space optical system outfield Wave-front measurement.
2) method proposed by the present invention using light pipe array scanning detection large-caliber space optical system wave front aberration, nothing
The kinematic error of scanning means need to be demarcated, can directly decouple to obtain light pipe battle array using the overlapping area during light pipe array scanning
The direction departure of row can effectively improve the accuracy of detection of heavy-caliber optical system wave front aberration.
Description of the drawings
Fig. 1 is one reality of method of the present invention using light pipe array splicing detection large-caliber space optical system wave front aberration
Apply the schematic diagram of parallel light tube array calibrating apparatus in example.
Fig. 2 is one reality of method of the present invention using light pipe array splicing detection large-caliber space optical system wave front aberration
Apply a sub-aperture arrangement schematic diagram.
Fig. 3 is the constructional device schematic diagram for splicing detection heavy-caliber optical system method using light pipe array.
In figure, 1, parallel light tube array, 2, standard parallel plate, 3, autocollimator, 4, two-dimentional electronic control translation stage, 5, to be checked
The clear aperture of optical system, 6, the sub-aperture of splicing detection, 7, automatically controlled four-dimensional displacement platform, 8, optical system to be checked, 9, light
Imaging sensor on system focal plane.
Specific embodiment
The technical problem to be solved by the present invention is in large-caliber space optical system Wave-front measurement due to light pipe scanning process
In the problem of causing system Wave-front measurement precision low there are error in pointing, it is proposed that big mouth is detected using the splicing of 3 × 3 light pipe arrays
The wave front aberration of footpath Space Optical System demarcates without scanning means kinematic error, can directly utilize light pipe array scanning process
In overlapping area decoupling light pipe array be directed toward departure, error decoupling precision can be effectively improved.It can be in outfield using this method
Under the conditions of to large-caliber space optical system carry out Wave-front measurement, without using large-aperture long-focus parallel light tube, can answer extensively
For the Wave-front measurement of various Space Optical Systems, versatility is good.
As shown in Figure 1, the parallel light tube array of the present invention is built and is directed toward method of adjustment and includes：Parallel light tube array 1, mark
Quasi-parallel tablet 2, autocollimator 3, two-dimension translational platform 4.
As shown in Fig. 2, the parallel light tube array scanning trajectory planning of the present invention, including：The light admission port of optical system to be checked
The sub-aperture 6 of detection is spliced in footpath 5.
As shown in figure 3, the method for the light pipe array splicing detection heavy-caliber optical system of the present invention, including：The automatically controlled four-dimension
Displacement platform 7, optical system 8 to be checked, the imaging sensor 9 on optical system focal plane.
Illustrate the specific embodiment of the present invention with reference to Fig. 1, Fig. 2 and Fig. 3, it is empty to splice detection heavy caliber using light pipe array
Between the method for optical system realized by following steps：
Perform step 1：Parallel light tube array 1 is built, and adjusts parallel light tube array 1 and be directed toward unanimously.Specifically, hold
Row step 11 builds 3 × 3 parallel light tube arrays 1 and detects the ripple for the nine beam directional lights for confirming 3 × 3 parallel light tube array 1
Preceding error RMS value is superior to λ/50.It performs step 12, a standard parallel plate 2 is placed before parallel light tube array 1, parallel
An autocollimator 3 is placed before tablet 2, autocollimator 3 is arranged on two-dimension translational platform 4.Perform step 13, with standard parallel plate
On the basis of 2, the light that adjustment autocollimator 3 is reflected through standard parallel plate 2 images in the detector center of the autocollimator 3.
Perform step 14, each small parallel light tube posture of the adjustment parallel light tube array 1 makes the light that each small parallel light tube is sent
Also the detector center of the autocollimator 3 is imaged in.Perform step 15, adjustment two-dimension translational platform 4 makes the alignment of autocollimator 3 flat
Next small parallel light tube of row light pipe array 1 repeats the operation of step 13, step 14.Perform step 16, when autocollimator 3
After completing to the adjustment of all small parallel light tubes of the parallel light tube array 1, all small parallel light tubes of parallel light tube array 1
It is directed toward consistent.
Perform step 2：According to the light pipe spacing of the clear aperture 5 of optical system 8 to be checked, the parallel light tube array 1 with
And monochromatic light nozzle footpath in the parallel light tube array 1, plan the scan path of the parallel light tube array 1.
The optional sampling density l of detection meets
Wherein, l should can be divided exactly by L, and L is the spacing of the adjacent light pipe of light pipe array, and d is monochromatic light nozzle footpath.The present invention one
In a embodiment：The adjacent light pipe spacing of light pipe array is 102mm, and monochromatic light nozzle footpath is 50mm, then scanning step l should meet：
And meet l and should be divided exactly by 102, it is contemplated that detection efficiency, therefore select scanning step that can either ensure adjacent for 34mm
Sub-aperture 6 can reduce sampling density to the greatest extent there are certain overlapping area, improve detection efficiency.Final planning obtain as
Similar " Z " type path shown in Fig. 2.
Perform step 3：Parallel light tube array 1 is placed on four-dimensional displacement platform 7, and is directed at the optical system to be checked
Light inlet according to the scan path planned, carries out 8 sub-aperture of optical system, the 6 wavefront slope measurement to be checked.Wherein, four
Displacement platform 7 is tieed up as automatically controlled four-dimensional displacement platform.Specifically, perform step 31, the parallel light tube array 1 is placed in four-dimensional position
It moves on platform 7, and is directed at the light inlet of the optical system to be checked, parallel light tube array 1 and four-dimensional displacement platform 7 are set
Initial parameter.In the specific embodiment of the present invention, it is connected by parallel light tube array 1 with computer, the ginseng in computer
Number setting module carries out parallel light tube array 1 and the initial parameter of four-dimensional displacement platform 7 is set, the scanning road in simultaneous computer
Footpath planning module is used to carry out the planning parameters of scanning paths of parallel light tube array 1.Perform step 32, the four-dimensional displacement platform 7 is controlled
Make light admission port of the parallel light tube array 1 to initial scanning position, sequential illumination and closing positioned at the optical system 8 to be checked
The small parallel light tube of the parallel light tube array 1 in footpath 5, at the same it is complete using the focal plane sensor 9 of the optical system to be checked
Into the acquisition of multiple light spot images.Perform step 33, the center-of-mass coordinate for calculating each light spot image and storage.Perform step
34th, the parallel light tube array 1 is moved to next detection dwell point according to the scan path of planning, repeats step 32,33
Operation until the parallel light tube array 1 travels through the clear aperture 5 of the entire optical system 8 to be checked, finally obtains described treat
Examine the wavefront slope data of 8 all sub-apertures 6 of optical system.
Perform step 4：Based on restructing algorithm before sub-aperture wavefront slope and mode wave, kinematic error decoupling and wavefront are carried out
Optical system wavefront error reconstruct to be checked is realized in fitting.It is multinomial in slope Zernike in mode based on wavefront reconstruction algorithm
Increase the inclination item of 1 scanning motion each time of parallel light tube array under the pattern substrate of formula, resolving obtains slope Zernike aberrations
The movement of coefficient and the parallel light tube array 1 tilts term coefficient, is to be fitted by the kinematic error of parallel light tube array 1
It is separated in system wavefront, reconstructs the wavefront error of optical system 8 to be checked.
Specifically, using Zernike polynomial expressions unified wave aberration Φ (x, y) as shown in formula 1：
Wherein, CkFor zernike polynomial coefficient, ZkFor K zernike polynomials, ε is regression criterion.
Sub-aperture wavefront is in the G-bar S in x directionsxWith G-bar S of the sub-aperture wavefront in y directionsyEmbody
Formula is as shown in formula 2：
Wherein, A is the area of sub-aperture,For incident wavefront phase distribution function.
Formula 1 is substituted into formula 2 and obtains the formula 3 of matrix form：
Wherein, n is the item number of zernike polynomial, and N is the points of sampled point.
Formula 3 is write a Chinese character in simplified form into formula 4：
ZC=S (4)
Secondly, on the basis of slope zernike polynomial fitting mode, light pipe array tilt item is increased.S in formula 2x
And SyFor the G-bar of 3 wavefront of sub-aperture, the data actually measured not only include the slope information of 3 wavefront of sub-aperture, also
Kinematic error (i.e. the inclination in x directions and y directions) comprising light pipe array, can represent the sub-aperture that actual measurement obtains with formula 5
The G-bar of footpath wavefront：
Mx=Sx+Tx
My=Sy+Ty (5)
Correspondingly, increase on the basis of slope zernike polynomial pattern and tilt item pattern, formula 6 can be obtained：
Wherein,
N is light pipe number, and m is light pipe array scanning times of exercise, and the number of each row " 1 " of D matrix depends on light pipe battle array
Row 1 are in the quantity of the effective light pipe in each sampling location.
Again, decoupling motion error and reconstruct wave front aberration is exported.Based on least square fitting, solution formula 6 can be with
Obtain the coefficient C of zernike polynomial and the inclination term coefficient Θ of newly-increased light pipe array.Specifically expression formula is as shown in formula 7：
Wherein, C is zernike polynomial coefficient, and Θ is the inclination term coefficient of light pipe array.It can be drawn by formula 7, light pipe
The kinematic error of array 1 is separated from wave front aberration, and it is that can obtain wavefront that will calculate obtained coefficient C and substitute into formula 1
Aberration Φ (x, y).
In addition, the present invention also provides it is a kind of detect large-caliber space optical system wave front aberration system, including：Directional light
Pipe array 1, planning parameters of scanning paths module, four-dimensional displacement platform 7, data processing module and optical system to be checked.
Planning parameters of scanning paths module, for clear aperture 5, the parallel light tube array 1 according to optical system 8 to be checked
The scan path of the parallel light tube array 1, institute are planned in monochromatic light nozzle footpath in light pipe spacing and the parallel light tube array 1
Parallel light tube array 1 is stated to be arranged on the four-dimensional displacement platform 7.
Parameter setting module, for setting the initial parameter of the parallel light tube array 1 and the four-dimensional displacement platform 7.
Parallel light tube array 1 is scanned the light inlet of optical system 8 to be checked for the scan path according to planning,
Carry out 8 sub-aperture of optical system, 6 wavefront slope measurement to be checked.
Optical system 8 to be checked, for gathering the light spot image in 1 scanning process of parallel light tube array.
Data processing module for calculating the center-of-mass coordinate of each light spot image, and stores；It is additionally operable to based on sub-aperture 6
Restructing algorithm before wavefront slope and mode wave carries out kinematic error decoupling and wavefront fitting, realizes that 8 wavefront of optical system to be checked misses
Difference reconstruct.In one embodiment of the invention, parallel light tube array 1 is connected with computer, planning parameters of scanning paths module, parameter setting
Module and data processing module are realized by computer.Parameter setting module in computer carry out parallel light tube array 1 and
The initial parameter of four-dimensional displacement platform 7 is set, and the planning parameters of scanning paths module in computer is used to carry out parallel light tube array 1
Planning parameters of scanning paths, the center-of-mass coordinate that the data processing module in simultaneous computer carries out each light spot image are calculated and stored.
Specific work process is：Parallel light tube array 1 is directed at the light inlet of the optical system to be checked 8, and according to described
The path that planning parameters of scanning paths module is planned is scanned the light inlet of the optical system 8 to be checked, and measurement is described to be checked
The wavefront slope of 8 sub-aperture 6 of optical system, the optical system 8 to be checked are gathered in 1 scanning process of parallel light tube array
Light spot image, and the data processing module is sent to, the data processing module calculates the barycenter of each light spot image
Coordinate, and store；It is additionally operable to, based on restructing algorithm before 6 wavefront slope of sub-aperture and mode wave, carry out kinematic error decoupling
And wavefront fitting, realize the wavefront error reconstruct of the optical system 8 to be checked.Its specific course of work and above method phase
Together, details are not described herein again.
The beneficial effects of the invention are as follows：
1) present invention proposes the method using light pipe array scanning detection large-caliber space optical system wave front aberration, utilizes
Overlapping area splicing Accurate Reconstruction in scanning process obtains the wave front aberration of optical system.Without using big in measurement process
Bore parallel light tube reduces the difficulty and cost of large-caliber space optical system outfield Wave-front measurement.
2) method proposed by the present invention using light pipe array scanning detection large-caliber space optical system wave front aberration, nothing
The kinematic error of scanning means need to be demarcated, can directly decouple to obtain light pipe battle array using the overlapping area during light pipe array scanning
The direction departure of row can effectively improve the accuracy of detection of heavy-caliber optical system wave front aberration.
The specific embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (10)
- A kind of 1. method for splicing detection large-caliber space optical system wave front aberration using light pipe array, which is characterized in that bag Include following steps：Step 1：Parallel light tube array is built, and adjusts the parallel light tube array and be directed toward unanimously；Step 2：According to the clear aperture of optical system to be checked, the light pipe spacing of the parallel light tube array and the directional light The scan path of the parallel light tube array is planned in monochromatic light nozzle footpath in pipe array；Step 3：Light pipe array is placed on four-dimensional displacement platform, and is directed at the light inlet of the optical system to be checked, according to institute The scan path of planning carries out the optical system sub-aperture wavefront slope measurement to be checked；Step 4：Based on restructing algorithm before the sub-aperture wavefront slope and mode wave, carry out kinematic error decoupling and wavefront is intended It closes, realizes the optical system wavefront error reconstruct to be checked.
- 2. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as described in claim 1, It is characterized in that, the step 1 comprises the following steps：Step 11 builds 3 × 3 parallel light tube arrays and detects the ripple for the nine beam directional lights for confirming 3 × 3 parallel light tube array Preceding error RMS value is superior to λ/50；Step 12 places a standard parallel plate before the parallel light tube array, and an autocollimatic is placed before the parallel flat Straight instrument, the autocollimator are arranged on two-dimension translational platform；Step 13, on the basis of the standard parallel plate, adjust what the autocollimator was reflected through the standard parallel plate Light images in the detector center of the autocollimator；The light that step 14, the small parallel light tube posture of the adjustment parallel light tube array send the small parallel light tube is also imaged In the detector center of the autocollimator；Step 15, the adjustment two-dimension translational platform make the autocollimator be directed at the next small directional light of parallel light tube array Pipe repeats the operation of step 13, step 14；Step 16, after the autocollimator is completed to the adjustment of all small parallel light tubes of the parallel light tube array, it is described flat The direction of all small parallel light tubes of row light pipe array is consistent.
- 3. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as described in claim 1, It is characterized in that, in the step 2, according to the light pipe spacing of the clear aperture of optical system to be checked, the parallel light tube array And monochromatic light nozzle footpath in the parallel light tube array, the optional sampling density of detection is calculated, to plan the parallel light tube battle array The scan path of row.
- 4. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as claimed in claim 3, It is characterized in that, step 2 comprises the following steps：The optional sampling density l of detection meetsAnd l should can be divided exactly by L；Wherein, L is the spacing of the adjacent light pipe of light pipe array, and d is monochromatic light nozzle footpath.
- 5. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as described in claim 1, It is characterized in that, step 3 comprises the following steps：The parallel light tube array is placed on four-dimensional displacement platform by step 31, and be directed at the optical system to be checked enters light Mouth sets the initial parameter of the parallel light tube array and four-dimensional displacement platform；Step 32, the four-dimensional displacement platform control the parallel light tube array to initial scanning position, sequential illumination and closing The small parallel light tube of the parallel light tube array in the optical system clear aperture to be checked, while utilize described to be checked The focal plane sensor of optical system completes the acquisition of multiple light spot images；Step 33, the center-of-mass coordinate for calculating each light spot image and storage；The parallel light tube array is moved to next detection dwell point by step 34 according to the scan path of planning, repeats step 32nd, 33 operation, until the clear aperture of the entire optical system to be checked of parallel light tube array traversal, finally obtains institute State the wavefront slope data of all sub-apertures of optical system to be checked.
- 6. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as described in claim 1, It is characterized in that, in the step 4, based on restructing algorithm before the sub-aperture wavefront slope and mode wave, kinematic error is carried out Decoupling and wavefront fitting are realized the optical system wavefront error reconstruct to be checked, are comprised the following steps：In mode based on wavefront reconstruction algorithm, increase the parallel light tube under the polynomial pattern substrates of slope Zernike The inclination item of array scanning motion each time, resolving obtain slope Zernike aberration coefficients and the fortune of the parallel light tube array It is dynamic to tilt term coefficient, the kinematic error of the parallel light tube array is separated from system wavefront to be fitted, reconstruct is treated Examine the wavefront error of optical system.
- 7. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as described in claim 1, It is characterized in that, the four-dimension displacement platform is automatically controlled four-dimensional displacement platform.
- 8. a kind of system for detecting large-caliber space optical system wave front aberration, which is characterized in that including：Parallel light tube array, Planning parameters of scanning paths module, four-dimensional displacement platform, data processing module and optical system to be checked；The planning parameters of scanning paths module, for clear aperture, the light of the parallel light tube array according to optical system to be checked The scan path of the parallel light tube array is planned in monochromatic light nozzle footpath in tube spacing and the parallel light tube array, described flat Row light pipe array is arranged on the four-dimensional displacement platform；Parameter setting module, for setting the initial parameter of the parallel light tube array and the four-dimensional displacement platform；The parallel light tube array sweeps the light inlet of the optical system to be checked for the scan path according to planning It retouches, carries out the optical system sub-aperture wavefront slope measurement to be checked；The optical system to be checked, for gathering the light spot image during the parallel light tube array scanning；The data processing module for calculating the center-of-mass coordinate of each light spot image, and stores；It is additionally operable to based on described Restructing algorithm before sub-aperture wavefront slope and mode wave carries out kinematic error decoupling and wavefront fitting, realizes the optics to be checked Systematic wavefront reconstructs.
- 9. the system of detection large-caliber space optical system wave front aberration as claimed in claim 8, which is characterized in that described flat Row light pipe array is 3 × 3 parallel light tube arrays, and the wavefront error RMS of nine beam directional lights of 3 × 3 parallel light tube array Value is superior to λ/50.
- 10. the method that large-caliber space optical system wave front aberration is detected using the splicing of light pipe array as claimed in claim 8, It is characterized in that, the planning parameters of scanning paths module is according to the clear aperture of optical system to be checked, the parallel light tube array Monochromatic light nozzle footpath in light pipe spacing and the parallel light tube array calculates the optional sampling density of detection, described flat to plan The scan path of row light pipe array；The optional sampling density l of the detection meetsAnd l should can be divided exactly by L；Wherein, L is the spacing of the adjacent light pipe of light pipe array, and d is monochromatic light nozzle footpath.
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| CN110361163A (en) * | 2019-06-14 | 2019-10-22 | 中科院南京天文仪器有限公司 | The device and method of parallel light tube suspension Scanning Detction heavy-caliber optical system |
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| CN111912607A (en) * | 2020-07-22 | 2020-11-10 | 中国科学院西安光学精密机械研究所 | Large-aperture optical system MTF measuring device and method |
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| CN109613346B (en) * | 2018-12-28 | 2020-11-13 | 中国科学院新疆天文台 | Reconstruction method and system for far-field directional pattern of reflector antenna |
| CN110361163A (en) * | 2019-06-14 | 2019-10-22 | 中科院南京天文仪器有限公司 | The device and method of parallel light tube suspension Scanning Detction heavy-caliber optical system |
| CN110361163B (en) * | 2019-06-14 | 2021-06-04 | 中科院南京天文仪器有限公司 | Device and method for detecting large-caliber optical system by parallel light tube suspension scanning |
| CN111258081A (en) * | 2020-02-25 | 2020-06-09 | 中国科学院长春光学精密机械与物理研究所 | Optical system installation and adjustment method and device based on optical fiber interconnection |
| CN111649915A (en) * | 2020-05-20 | 2020-09-11 | 中国科学院西安光学精密机械研究所 | Collimator defocusing aberration calibration device |
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| CN111595559B (en) * | 2020-06-22 | 2021-05-25 | 中国科学院长春光学精密机械与物理研究所 | First-order wavefront error measuring system of non-continuous mirror telescope |
| CN111912607A (en) * | 2020-07-22 | 2020-11-10 | 中国科学院西安光学精密机械研究所 | Large-aperture optical system MTF measuring device and method |
| CN112146850A (en) * | 2020-09-22 | 2020-12-29 | 航天科工微电子***研究院有限公司 | Device and method for detecting wave aberration of large-aperture telescope system |
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