CN108101537A - A kind of nanometer of piezoelectric ceramics energy collection material and preparation method thereof - Google Patents
A kind of nanometer of piezoelectric ceramics energy collection material and preparation method thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 25
- 239000000463 material Substances 0.000 title claims abstract description 25
- 238000002360 preparation method Methods 0.000 title abstract description 7
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Inorganic materials O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000713 high-energy ball milling Methods 0.000 claims abstract description 14
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims abstract description 14
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000005245 sintering Methods 0.000 claims abstract description 12
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims abstract description 8
- XMFOQHDPRMAJNU-UHFFFAOYSA-N lead(II,IV) oxide Inorganic materials O1[Pb]O[Pb]11O[Pb]O1 XMFOQHDPRMAJNU-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000000137 annealing Methods 0.000 claims abstract description 5
- 238000005520 cutting process Methods 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 239000002994 raw material Substances 0.000 claims abstract description 4
- 239000000843 powder Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000002243 precursor Substances 0.000 claims description 6
- 238000000498 ball milling Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 239000011858 nanopowder Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 3
- 238000003801 milling Methods 0.000 claims description 3
- 239000002159 nanocrystal Substances 0.000 claims description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 239000004575 stone Substances 0.000 claims 1
- 238000001035 drying Methods 0.000 abstract description 3
- 239000011159 matrix material Substances 0.000 abstract description 2
- 238000004064 recycling Methods 0.000 abstract description 2
- 238000001238 wet grinding Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000010248 power generation Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000003245 coal Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000003837 high-temperature calcination Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 239000002707 nanocrystalline material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
- C04B2235/3255—Niobates or tantalates, e.g. silver niobate
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
- C04B2235/3267—MnO2
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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- C04B2235/781—Nanograined materials, i.e. having grain sizes below 100 nm
Abstract
A kind of nanometer of piezoelectric ceramics energy collection material and preparation method thereof, belongs to piezoceramic material field.The matrix chemical composition of the ceramic material is 0.2Pb (Zn1/3Nb2/3)O3–0.8Pb(Zr1/ 2Ti1/2)O3, and basis material quality 0.5wt.%MnO is adulterated wherein2, crystallite dimension is in nanoscale.With Pb3O4、ZnO、Nb2O5、ZrO2、TiO2And MnO2For raw material, using wet-milling, drying, high-energy ball milling, discharge plasma sintering, wire cutting, annealing.The present invention is applied to piezoelectric energy collecting device, can be while device miniaturization is realized, the recycling of mechanical energy will be discarded by effectively realizing in environment, have significant research significance.
Description
Technical field
The invention belongs to piezoceramic material fields, and in particular to a kind of miniature piezoelectric collection of energy device of can be applied to
Piezoelectric ceramics with quality factor, high mechanical quality factor and strong mechanical performance under nanocrystalline grain size, high non-resonant condition
Material and preparation method thereof.
Background technology
With the continuous development of society, the non-renewable fossil energy such as oil, coal is increasingly in short supply, how Development of Novel
Green energy resource, it has also become the important component of the energy development strategy of many countries.Mechanical vibrational energy is generally deposited in the environment
It can be used as clean energy resource.The study found that direct piezoelectric effect of the piezoelectric energy collector based on piezoelectric material,
Mechanical vibrational energy ubiquitous in environment can be converted into electric energy, realize the recycling of mechanical energy.
Simultaneously with device miniaturization, laminating development trend, it is desirable that reduce ceramic crystalline grain size, preparing has nanometer
The fine grain piezoelectric ceramics of scale.
In order to meet the requirement of piezoelectric energy collecting device, piezoelectric ceramics need to have under high non-resonant condition quality because
Number, high mechanical quality factor:
Quality factor FOM under non-resonant conditionoffIt can be represented with equation below：
d：Piezoelectric strain constant g：Piezoelectric field constant tan δ：Dielectric loss
ε0：Permittivity of vacuum εr：Relative dielectric constant
By formula as can be seen that the material with quality factor under high non-resonant condition can be answered by high piezoelectricity
Become constant d, low permittivity εrWith the acquisition of low dielectric loss tan δ.
Mechanical quality factor QmIt is a parameter for reflecting mechanical loss size.QmBigger, mechanical loss is smaller.
Secondly, during energy harvester, PZT based piezoelectric ceramic materials to be subjected to substantial amounts of mechanical oscillation and
Stress impact often shows low mechanical property, influences the use of material.So how to improve the mechanical property of PZT bases ceramics
It can be a urgent problem to be solved.In order to meet the requirement of piezoelectric energy collecting device mechanical property, piezoelectric ceramics needs to have
There are high Vickers hardness Hv and high fracture toughness KIC。
Fracture toughness KICIt can be represented with equation below：
P：Load KIC：Fracture toughness
d：Impression catercorner length l：The crack length that impression apex angle extends
In conclusion in order to meet quality factor under the micromation of piezoelectric energy collecting device, high non-resonant condition, high machinery
The requirement of quality factor and strong mechanical performance in this patent, using PZN-PZT as complex, passes through MnO2Doping, by high energy
Ball milling nano-powder technology of preparing is combined with ceramic extraordinary sintering technology, is designed and is prepared this crucial nanocrystalline material, right
It is of great significance in the micromation for promoting piezoelectric energy collecting device and related small-sized efficient power supply manufacture.
The content of the invention
It is an object of the invention to provide a kind of piezoceramic material that can be applied to miniature piezoelectric collection of energy device and
Its preparation method prepares nano ceramics reality high-energy ball milling nano-powder technology of preparing is combined with ceramic extraordinary sintering technology
While now micromation, ceramic material has quality factor, high mechanical quality factor and strong mechanical performance under high non-resonant condition,
It is the potential ceramic material for being applied to collection of energy device.
The present invention piezoelectric ceramics be characterized by having nanoscale crystallite dimension and high non-resonant condition under quality because
Number (FOMoff), high mechanical quality factor (Qm) and strong mechanical performance (HV、KIC)。
To achieve the above object, the present invention takes following technical scheme.
The present invention provides a kind of piezoceramic material applied to miniature piezoelectric collection of energy device, which is characterized in that brilliant
Particle size is in nanoscale, matrix chemical composition：0.2Pb(Zn1/3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3It adulterates wherein
Basis material quality 0-0.5wt.%MnO2, not including 0, i.e. PZN-PZT+MnO2。
The preparation method of the above-mentioned piezoelectric energy collection material with nanocrystal scale of the present invention, which is characterized in that choosing
It selects high-energy ball milling method and exempts from the PZN-PZT+MnO that calcining prepares nanoscale respectively2Precursor powder, and pass through plasma discharging burn
The piezoelectric ceramics of nanocrystal scale is prepared in knot, have quality factor under high non-resonant condition, high mechanical quality factor and
Strong mechanical performance specifically includes following steps：
(1) by Pb3O4、ZnO、Nb2O5、ZrO2、TiO2And MnO2By the chemistry mole metering in chemical formula than weighing, will claim
Measured raw material is put into ball grinder, is placed in ball milling 12h in planetary ball mill by medium of absolute ethyl alcohol, then 100 DEG C of conditions
Lower drying；
(2) dried powder is used to the tungsten carbide milling balls of a diameter of 3mm, ratio of grinding media to material 20:1, carry out high-energy ball milling
90min；
(3) binding agent need not be added, the PZN-PZT+MnO that will be obtained by high-energy ball milling method2Nano-powder is packed into circle
In column graphite jig (such as interior diameter is 10mm).By pulsed direct current by mold, while apply the single shaft for being up to 51MPa
To pressure；In addition, sample is heated to 800 DEG C with the rate of 100 DEG C/min, temperature 30s is then kept；
(4) sintered sample wire cutting is then placed in pipe into disk (the preferably a diameter of 10mm of disk and thickness be 1.2mm)
Lead to the lower 700 DEG C of annealing 2h of oxygen atmosphere in formula stove to get to PZN-PZT+MnO2Nano ceramic material.
Sintered potsherd, by carrying out the test of microstructure observation and mechanical property after polishing treatment, then by
Upper silver electrode, in 120 DEG C of silicone oil, in 30kVcm-1High direct voltage under polarize 30min.Then sample is carried out electrical
The test of energy.Finally, power generation performance test is carried out by cantilever beam structure energy harvester.
Wherein, best sample is：The nanoscale precursor powder obtained by high-energy ball milling 90min, by plasma discharging
Sintering, sintering temperature are 800 DEG C, keep the temperature the 0.5wt.%MnO obtained during 30s2Adulterate 0.2Pb (Zn1/3Nb2/3)O3–0.8Pb
(Zr1/2Ti1/2)O3Ceramics, crystallite dimension 81nm, performance can reach：FOMoff=10457 × 10-15m2/N,Qm=493, HV
=6.5GPa, KIC=1.8MPa.m1/2, the requirement of miniature piezoelectric collection of energy device can be met.
In the present invention, the powder for the nanoscale that high-energy ball milling method obtains is selected as precursor powder, with reference to electric discharge etc.
PZN-PZT and the PZN-PZT+MnO of nanoscale is prepared in ion sintering technology2Ceramics.
Compared with prior art, the present invention has the advantages that：
Method proposed by the present invention is available for structure satisfaction micromation piezoelectric energy collecting device requirement with high anharmonic
The nanocrystalline piezoelectric ceramics of quality factor, high mechanical quality factor and strong mechanical performance under state of shaking.Existing conventional techniques use
The volatilization that the precursor powder that high-temperature calcination technique is prepared is not only due to the substances such as PbO under high temperature causes material to measure than mismatch,
And synthetic product powder granule is coarse, poor activity, can not be further used for sintering and prepare nanocrystalline piezoelectric ceramics.Meanwhile it passes
Uniting, the ceramic dense that sintering process obtains is poor, particle is big, is unfavorable for preparing nanocrystalline piezoelectric ceramics.Pass through in the technology of the present invention
High-energy ball milling method exempts from calcining and nanoscale precursor powder is prepared, with reference to extraordinary sintering process-discharge plasma sintering, so as to real
Show and the crystallite dimension of ceramics is reduced to nanoscale (81nm) from micron order, met the same of collection of energy device micromation
When, it may have quality factor (FOM under high non-resonant conditionoff), high mechanical quality factor (Qm) and high mechanical property
(HV、KIC)。
Description of the drawings
Fig. 1 be section SEM photograph after ceramic polished and heat etching and grain size distribution figure (a) PZN-PZT, (b) PZN-
PZT+MnO2；
Fig. 2 is PZN-PZT+MnO2(interior illustration is circuit before power generation lighting situation (a) vibration of nano energy collector
Figure), after (b) vibration.
Specific embodiment
The present invention will be described in detail by way of examples below, these embodiments are the mesh for exemplary illustration
, it is of the invention not for limiting.
The present invention provides a kind of piezoceramic material that can be applied to miniature piezoelectric collection of energy device, which is characterized in that
The ceramic material has quality factor, high mechanical quality factor and strong mechanical performance under nanocrystalline grain size, high non-resonant condition,
Its chemical composition general formula is：①0.2Pb(Zn1/3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3.Constitutive material is：Pb3O4、ZnO、
Nb2O5、ZrO2And TiO2；2. 0.5wt.%MnO2Adulterate 0.2Pb (Zn1/3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3.Constitutive material
For：Pb3O4、ZnO、Nb2O5、ZrO2、TiO2And MnO2.Specific preparation method is first, load weighted raw material to be put into ball grinder
In, it is placed in ball milling 12h in planetary ball mill by medium of absolute ethyl alcohol.Gained slurry is dried at 100 DEG C after ball milling, then will
Dried powder uses the tungsten carbide milling balls of a diameter of 3mm, ratio of grinding media to material 20:1, high-energy ball milling 90min；By obtained powder not
It needs to add binding agent, be fitted into cylindric graphite jig (interior diameter 10mm).By pulsed direct current by mold, simultaneously
Apply the uniaxial compression for being up to 51MPa.In addition, sample is heated to 800 DEG C with the rate of 100 DEG C/min, then keeping should
Temperature 30s.By sintered sample wire cutting into the disk that a diameter of 10mm and thickness are 1.2mm, it is then placed in tube furnace and leads to oxygen
The lower 700 DEG C of annealing 2h of gas atmosphere are to get to nano ceramic material.
Sintered potsherd, by carrying out the test of microstructure observation and mechanical property after polishing treatment, printing is simultaneously
Burning infiltration silver electrode, in 120 DEG C of silicone oil, in 30kVcm-1Voltage under polarize 30min.Then electrical property is carried out to sample
Test.Finally, power generation performance test is carried out by cantilever beam structure energy harvester.
Below by embodiment the substantive distinguishing features and remarkable advantage that the present invention is furture elucidated.It is it should be appreciated that of the invention
Stated embodiment is limited only to by no means.
Comparative example 1：
By chemical formula 0.2Pb (Zn1/3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3Weigh Pb3O4、ZnO、Nb2O5、ZrO2With
TiO2, and ball milling 12h in ethanol.After drying, dried powder uses high-energy ball milling 90min to mixture, by what is obtained
Powder need not add binding agent, be fitted into cylindric graphite jig (interior diameter 10mm).Pulsed direct current is passed through into mould
Tool, while apply the uniaxial compression for being up to 51MPa.In addition, sample is heated to 800 DEG C with the rate of 100 DEG C/min, then
Temperature 30s is kept, by sintered sample wire cutting into the disk that a diameter of 10mm and thickness are 1.2mm, is then placed in tube furnace
In lead to the lower 700 DEG C of annealing 2h of oxygen atmosphere to get to ceramics.
Embodiment 1：
By chemical formula 0.5wt.%MnO2Adulterate 0.2Pb (Zn1/3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3Weigh Pb3O4、
ZnO、Nb2O5、ZrO2、TiO2And MnO2.Other same comparative examples 1.
1 above-described embodiment performance comparison table of table
Claims (5)
1. a kind of nanometer of crystal piezoelectric ceramics, which is characterized in that the chemical composition of the piezoceramic material is：0.2Pb(Zn1/ 3Nb2/3)O3–0.8Pb(Zr1/2Ti1/2)O3, and basis material quality 0.5wt.%MnO is adulterated wherein2。
2. a kind of nanometer of piezoceramic material described in accordance with the claim 1, which is characterized in that crystallite dimension 81nm.
3. prepare the method for piezoceramic material described in claim 1, which is characterized in that obtain by using high-energy ball milling method
Nanoscale precursor powder, by extraordinary sintering process-discharge plasma sintering, the piezoelectricity pottery of nanocrystal scale is prepared
Porcelain specifically includes following steps：
(1) by Pb3O4、ZnO、Nb2O5、ZrO2、TiO2And MnO2By chemistry mole metering than weighing, load weighted raw material is put into
In ball grinder, ball milling 12h in planetary ball mill is placed in by medium of absolute ethyl alcohol, is then dried under the conditions of 100 DEG C；
(2) dried powder is used to the tungsten carbide milling balls of a diameter of 3mm, ratio of grinding media to material 20:1, carry out high-energy ball milling 90min；
(3) binding agent need not be added, the PZN-PZT+MnO that will be obtained by high-energy ball milling method2Nano-powder is packed into cylindric stone
In black mold；By pulsed direct current by mold, while apply the uniaxial compression for being up to 51MPa.In addition, by sample with
The rate of 100 DEG C/min is heated to 800 DEG C, then keeps temperature 30s；
(4) by sintered sample wire cutting into disk, be then placed in tube furnace lead to the lower 700 DEG C of annealing 2h of oxygen atmosphere to get to
PZN–PZT+MnO2Nano ceramic material.
4. according to the method for claim 3, which is characterized in that the cylindric graphite jig interior diameter of step (3) is 10mm；Step
Suddenly a diameter of 10mm of (4) disk and thickness are 1.2mm.
5. the nanometer crystal piezoelectric ceramics described in claim 1 or 2 are used to that piezoelectric energy collecting device to be miniaturized.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110981498A (en) * | 2019-12-22 | 2020-04-10 | 贵州振华红云电子有限公司 | Method for improving quality of piezoelectric ceramic buzzer |
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| CN115321978B (en) * | 2022-08-01 | 2023-08-25 | 苏州思若梅克电子科技有限公司 | Multilayer lead-based piezoelectric ceramic and preparation method thereof |
| CN115894021A (en) * | 2022-12-26 | 2023-04-04 | 西安创研电子科技有限公司 | High-mechanical-quality-factor rigid piezoelectric ceramic material and preparation method thereof |
| CN115894021B (en) * | 2022-12-26 | 2024-01-16 | 西安创研电子科技有限公司 | High mechanical quality factor hard piezoelectric ceramic material and preparation method thereof |
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