CN108097016A - A kind of exhaust gas processing device with spill cavity - Google Patents
A kind of exhaust gas processing device with spill cavity Download PDFInfo
- Publication number
- CN108097016A CN108097016A CN201611060006.3A CN201611060006A CN108097016A CN 108097016 A CN108097016 A CN 108097016A CN 201611060006 A CN201611060006 A CN 201611060006A CN 108097016 A CN108097016 A CN 108097016A
- Authority
- CN
- China
- Prior art keywords
- spill cavity
- sink
- exhaust gas
- processing device
- liquid level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/556—Organic compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Separation Of Particles Using Liquids (AREA)
- Gas Separation By Absorption (AREA)
Abstract
The present invention provides a kind of exhaust gas processing device with spill cavity, including：Sink；The sink top is equipped with air inlet and gas outlet；Spill cavity arranged on the sink one side, is isolated between the spill cavity by partition plate, and when the liquid water level in the sink is reached at the top of partition plate, the cotton-shaped silicide of liquid surface can cross partition plate and flow into the spill cavity；At least one nozzle arranged on the spill cavity top, for injection water with smash enter spill cavity cotton-shaped silicide；Floss hole arranged on the spill cavity lower part, for discharging silicide；The solenoid valve being connected with the floss hole, for being turned on and off the floss hole.The present invention in sink one side by increasing a spill cavity, cotton-shaped silicide can be flowed into directly from the water surface in spill cavity, and it effectively discharges inside exhaust gas treating device, the PM cycles can be greatly prolonged, improve the economic benefit of extension, and having many advantages, such as simple in structure, significant effect, use cost are low, easy to maintain.
Description
Technical field
The invention belongs to field of semiconductor manufacture, are related to a kind of exhaust gas processing device with spill cavity.
Background technology
Substantial amounts of HCl, trichlorosilane (TCS), B are needed in normal pressure epitaxy technique2H6, PH3, H2Wait special gas.It adopts outside
Exhaust gas treating device is the device of special design treatment extension tail gas exhaust.By the exhaust pipe of epitaxial furnace and exhaust gas treating device into
Gas port connects, and extension exhaust gas, which enters in vent gas treatment, to react, and is then discharged out free of contamination gas.
General exhaust gas processing device includes combustion-type, rinsing type etc..Rinsing type by the exhaust outlet of exhaust gas treating device and
One special Venturi tube connection, the negative pressure provided by Venturi tube so that the process gas in epitaxial furnace is drawn at tail gas
It manages in device.In exhaust gas treating device, the HCl in extension exhaust gas, TCS, B2H6, PH3By constantly washing, fully occur with water
It reacts and is removed.Remaining H2、N2By row after Dilution air into air.Exhaust gas treating device needs preventive maintenance
The maximum reason of (Preventive Maintenance, PM) is exactly the reaction generation of wherein TCS (trichlorosilane) and water
Si2H2O2For pulverulent solids, with the extension of time, these powder can be assembled, White Flocculus is generated, so as to influence negative pressure
At this moment value just needs to carry out preventive maintenance to exhaust gas treating device (scrubber).
In the prior art floccule is handled there are two types of mode：It is as shown in Figure 1 indirect overflow, can takes out of minimal amount of cotton-shaped
Object because floccule substantially swim on the water surface, overflow port discord the water surface directly communicate, be unable to reach largely remove it is cotton-shaped
Object.Also one kind is exactly to increase water tank volume, can so gather floccule more, extends the PM cycles；Shortcoming is to take up a large area,
Water consumption is big, of high cost, safeguards cumbersome.
Therefore, how a kind of new exhaust gas processing device is provided, efficiently to remove cotton-shaped silicide, extends vent gas treatment dress
The preventive maintenance cycle put, and use cost is reduced, become those skilled in the art's important technology urgently to be resolved hurrily and ask
Topic.
The content of the invention
In view of the foregoing deficiencies of prior art, at it is an object of the invention to provide a kind of tail gas with spill cavity
Device is managed, for solving the problem of that cotton-shaped silicide removal efficiency is not high in the prior art and cost is higher, it is cumbersome to safeguard.
In order to achieve the above objects and other related objects, the present invention provides a kind of exhaust gas processing device with spill cavity,
Including：
Sink；The sink top is equipped with air inlet and gas outlet；
Spill cavity arranged on the sink one side；Isolated between the sink and the spill cavity by partition plate, when described
When liquid water level in sink is reached at the top of the partition plate, the cotton-shaped silicide of liquid surface can be crossed described in the partition plate inflow
In spill cavity；
At least one nozzle arranged on the spill cavity top, for injection water to smash the wadding into the spill cavity
Shape silicide；
Floss hole arranged on the spill cavity lower part, for discharging silicide；
The solenoid valve being connected with the floss hole, for being turned on and off the floss hole.
Optionally, the spill cavity is also associated with the first liquid level sensor and the second liquid level sensor, wherein, described first
Liquid level sensor is higher than second liquid level sensor, when the water level in the spill cavity reaches the first liquid level and triggers described the
During one liquid level sensor, the solenoid valve starts, and opens the floss hole；When the water level decreasing in the spill cavity to second
Liquid level and when triggering the second sensor, the solenoid valve is closed, and closes the floss hole.
Optionally, the spill cavity is connected with a water level column, and the water level column both ends connect the spill cavity, and described
One liquid level sensor and the second liquid level sensor may be contained on the pipeline of the water level column.
Optionally, the switch area of the solenoid valve is adjustable.
Optionally, the switch area of the solenoid valve is Manual adjustable.
Optionally, it is equipped with drainage piece above the sink at the partition plate, the drainage piece is towards the spill cavity
It sets obliquely, the current of at least one nozzle injection reach the drainage piece, and form the water for flowing to the spill cavity
Stream, brings the cotton-shaped silicide for swimming in the sink liquid level into the spill cavity.
Optionally, the nozzle is wide-angle nozzle, and dispersion of flow angular range is 45 °~150 °.
Optionally, the nozzle is connected with Xun Huan water supply.
As described above, the exhaust gas processing device with spill cavity of the present invention, has the advantages that：The band of the present invention
There is the exhaust gas processing device of spill cavity by increasing a spill cavity in sink one side, allow cotton-shaped silicide can be directly from the water surface
In upper inflow spill cavity, by the function of spill cavity by inside its effective discharge exhaust gas treating device, can thus it reach big
The big preventive maintenance cycle for extending exhaust gas treating device greatly improves the economic benefit of extension.The present invention with spill cavity
The principle of exhaust gas processing device is that cotton-shaped silicide is broken up and sunk by power nozzles, is controlled by two liquid level sensors
The work of adjustable electromagnetic valve excludes silicide.Cotton-shaped silicide can effectively comprehensively be gathered in excessive by the design of multigroup nozzle
Intracavitary is flowed, and is broken up sinking, wherein there is one group to be drained on inclined-plane, will can effectively swim in the cotton-shaped silication of liquid level
Object brings spill cavity into.The exhaust gas processing device with spill cavity of the present invention has simple in structure, significant effect, use cost
The advantages that low, easy to maintain.
Description of the drawings
Fig. 1 is shown as the structure diagram of the exhaust gas processing device with indirect relief function in the prior art.
Fig. 2 is shown as the structure diagram of the exhaust gas processing device with spill cavity of the present invention.
Component label instructions
1 sink
2 air inlets
3 gas outlets
4 spill cavities
5 partition plates
6 liquid
7 cotton-shaped silicides
8 nozzles
9 floss holes
10 solenoid valves
11 first liquid level sensors
12 second liquid level sensors
13 water level columns
14 Xun Huan water supplies
15 silicides
16 drainage pieces
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Refer to Fig. 2.It should be noted that the diagram provided in the present embodiment only illustrates the present invention's in a schematic way
Basic conception, then only the display component related with the present invention rather than component count, shape during according to actual implementation in schema
And size is drawn, kenel, quantity and the ratio of each component can be a kind of random change during actual implementation, and its assembly layout
Kenel may also be increasingly complex.
The present invention provides a kind of exhaust gas processing device with spill cavity, referring to Fig. 2, being shown as the exhaust gas processing device
Structure diagram, including：
Sink 1；1 top of sink is equipped with air inlet 2 and gas outlet 3；
Spill cavity 4 arranged on 1 one side of sink；Isolated between the sink 1 and the spill cavity 4 by partition plate 5, when
When 6 water level of liquid in the sink 1 reaches 5 top of partition plate, the cotton-shaped silicide 7 on 6 surface of liquid can cross it is described every
Plate 5 is flowed into the spill cavity 4；
At least one nozzle 8 arranged on 4 top of spill cavity enters the spill cavity 4 for injection water to smash
Cotton-shaped silicide；
Floss hole 9 arranged on 4 lower part of spill cavity, for discharging silicide 15；
The solenoid valve 10 being connected with the floss hole 9, for being turned on and off the floss hole 9.
Specifically, the extension tail gas after one-stage water wash enters the sink 1, TCS (trichlorine hydrogen from the air inlet 2
Silicon) and the silicide of reaction generation of water be combined into cotton-shaped silicide and swim on the liquid level in sink, more clean tail gas
It is discharged by the gas outlet 3, leads to two level water washing device.
Specifically, the nozzle 8 is wide-angle nozzle, dispersion of flow angular range is 45 °~150 °.In the present embodiment, institute
Nozzle 8 is stated preferably using 120 degree of wide-angle power nozzles, can fully smash the cotton-shaped silicide into the spill cavity 4.
As an example, 4 top of spill cavity is equipped with four groups of sprays (using spill cavity as a left side, using sink as the right side) from left to right
Head, every group includes at least two nozzles.In other embodiments, the nozzle 8 also can be in other arrangement modes, as long as ensureing
The cotton-shaped silicide into the spill cavity 4 can be fully smashed, should not too be limited the scope of the invention herein.
As an example, the nozzle 8 is connected with Xun Huan water supply 14, the Xun Huan water supply includes being connected to
The pipeline of the spill cavity 4, can be by the water circulation use in the spill cavity 4.The pipe water end be equipped with filter screen or its
Its filter device, avoids silicide from entering pipeline.
Specifically, the solenoid valve 10 is the executive component for performing drain.In the present embodiment, the solenoid valve 10 is preferably adopted
With adjustable electromagnetic valve, i.e. the switch area of solenoid valve is adjustable.Select it is adjustable the reason is that, it is desirable to adjust the flow of drain and arranging
Internal negative pressure fluctuation is not influenced during liquid.As an example, the switch area of the solenoid valve 10 is Manual adjustable.
Specifically, the spill cavity 4 is also associated with the first liquid level sensor 11 and the second liquid level sensor 12, wherein, institute
The first liquid level sensor 11 is stated higher than second liquid level sensor 12.First liquid level sensor 11, which provides, starts the electricity
The input signal of magnet valve 10, second liquid level sensor 12 provide the input signal for closing the solenoid valve 10.It overflows when described
When water level in stream chamber 4 reaches the first liquid level and triggers first liquid level sensor 11, the solenoid valve 10 starts, and makes described
Floss hole 9 is opened；It is described when the water level decreasing in the spill cavity 4 is to the second liquid level and when triggering the second sensor 12
Solenoid valve 10 is closed, and closes the floss hole 9.
As an example, the spill cavity 4 is connected with a water level column 13,13 both ends of water level column connect the spill cavity
4,11 and second liquid level sensor 12 of the first liquid level sensor may be contained on the pipeline of the water level column 13.
In order to further improve the efficiency that cotton-shaped silicide enters the spill cavity, in the present embodiment, on the sink 1
Side is equipped with drainage piece 16 at the partition plate 5, and the drainage piece 16 is set obliquely towards the spill cavity 4, and at least one
The current that a nozzle 8 sprays reach the drainage piece 16, and form the current for flowing to the spill cavity 4, will swim in institute
The cotton-shaped silicide 7 for stating 1 liquid level of sink brings the spill cavity into.
In conclusion the exhaust gas processing device with spill cavity of the present invention in sink one side by increasing an overflow
Cotton-shaped silicide can be flowed into directly from the water surface in spill cavity for chamber, it is effectively discharged tail by the function of spill cavity
Inside treatment apparatus, it can thus reach the preventive maintenance cycle for greatly prolonging exhaust gas treating device, greatly improve extension
Economic benefit.The principle of the exhaust gas processing device with spill cavity of the present invention is to be broken up cotton-shaped silicide by power nozzles
And sink, the work of adjustable electromagnetic valve is controlled by two liquid level sensors, excludes silicide.The design of multigroup nozzle can have
Cotton-shaped silicide is comprehensively gathered in spill cavity by effect, and is broken up sinking, can be with wherein there is one group to be drained on inclined-plane
Effectively bring the cotton-shaped silicide for swimming in liquid level into spill cavity.The exhaust gas processing device with spill cavity of the present invention has
It is simple in structure, the advantages that significant effect, use cost are low, easy to maintain.So the present invention effectively overcome it is of the prior art
Various shortcoming and have high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (8)
1. a kind of exhaust gas processing device with spill cavity, which is characterized in that including：
Sink；The sink top is equipped with air inlet and gas outlet；
Spill cavity arranged on the sink one side；Isolated between the sink and the spill cavity by partition plate, when the sink
When interior liquid water level is reached at the top of the partition plate, the cotton-shaped silicide of liquid surface can cross the partition plate and flow into the overflow
Intracavitary；
At least one nozzle arranged on the spill cavity top, for injection water to smash the cotton-shaped silicon into the spill cavity
Compound；
Floss hole arranged on the spill cavity lower part, for discharging silicide；
The solenoid valve being connected with the floss hole, for being turned on and off the floss hole.
2. the exhaust gas processing device according to claim 1 with spill cavity, it is characterised in that：The spill cavity is also connected with
There are the first liquid level sensor and the second liquid level sensor, wherein, first liquid level sensor is higher than second level sensing
Device, when the water level in the spill cavity reaches the first liquid level and triggers first liquid level sensor, the solenoid valve starts,
Open the floss hole；When the water level decreasing in the spill cavity is to the second liquid level and when triggering the second sensor, institute
Solenoid valve closing is stated, closes the floss hole.
3. the exhaust gas processing device according to claim 2 with spill cavity, it is characterised in that：The spill cavity is connected with
One water level column, the water level column both ends connect the spill cavity, and first liquid level sensor and the second liquid level sensor are equal
It is arranged on the pipeline of the water level column.
4. the exhaust gas processing device according to claim 1 with spill cavity, it is characterised in that：The switch of the solenoid valve
Area is adjustable.
5. the exhaust gas processing device according to claim 4 with spill cavity, it is characterised in that：The switch of the solenoid valve
Area is Manual adjustable.
6. the exhaust gas processing device according to claim 1 with spill cavity, it is characterised in that：It is close above the sink
Drainage piece is equipped at the partition plate, the drainage piece is set obliquely towards the spill cavity, the injection of at least one nozzle
Current reach the drainage piece, and form the current for flowing to the spill cavity, will swim in the cotton-shaped of the sink liquid level
Silicide brings the spill cavity into.
7. the exhaust gas processing device according to claim 1 with spill cavity, it is characterised in that：The nozzle sprays for wide-angle
Head, dispersion of flow angular range are 45 °~150 °.
8. the exhaust gas processing device according to claim 1 with spill cavity, it is characterised in that：The nozzle and recirculated water
Feeding mechanism connects.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611060006.3A CN108097016B (en) | 2016-11-24 | 2016-11-24 | Tail gas treatment device with overflow chamber |
| TW106116182A TWI654024B (en) | 2016-11-24 | 2017-05-16 | Exhaust gas treatment device with overflow chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611060006.3A CN108097016B (en) | 2016-11-24 | 2016-11-24 | Tail gas treatment device with overflow chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108097016A true CN108097016A (en) | 2018-06-01 |
| CN108097016B CN108097016B (en) | 2020-11-10 |
Family
ID=62204564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611060006.3A Active CN108097016B (en) | 2016-11-24 | 2016-11-24 | Tail gas treatment device with overflow chamber |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108097016B (en) |
| TW (1) | TWI654024B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06254588A (en) * | 1993-03-04 | 1994-09-13 | Shinko Pantec Co Ltd | Ascending flow anaerobic sludge blanket type reaction chamber and method for preventing outflow of granule sludge in this reaction chamber |
| CN1383912A (en) * | 2002-03-05 | 2002-12-11 | 高根树 | Cyclonic mass-transferring reaction and product separation method and separator |
| KR20030084431A (en) * | 2002-04-26 | 2003-11-01 | 유니셈 주식회사 | Effluent Management System Having Improved Quenching Structure |
| CN201061753Y (en) * | 2007-06-25 | 2008-05-21 | 北京有色金属研究总院 | Device for shortening maintenance time of denotation vent gas treater |
| TW201124196A (en) * | 2011-02-18 | 2011-07-16 | Jg Environmental Tech Co Ltd | Organic waste gas purification system and method capable of preventing from surface condensation and agglomeration of the absorption material. |
| CN103007717A (en) * | 2012-12-25 | 2013-04-03 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | Organosilicone monomer tail gas absorption device and technology thereof |
-
2016
- 2016-11-24 CN CN201611060006.3A patent/CN108097016B/en active Active
-
2017
- 2017-05-16 TW TW106116182A patent/TWI654024B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06254588A (en) * | 1993-03-04 | 1994-09-13 | Shinko Pantec Co Ltd | Ascending flow anaerobic sludge blanket type reaction chamber and method for preventing outflow of granule sludge in this reaction chamber |
| CN1383912A (en) * | 2002-03-05 | 2002-12-11 | 高根树 | Cyclonic mass-transferring reaction and product separation method and separator |
| KR20030084431A (en) * | 2002-04-26 | 2003-11-01 | 유니셈 주식회사 | Effluent Management System Having Improved Quenching Structure |
| CN201061753Y (en) * | 2007-06-25 | 2008-05-21 | 北京有色金属研究总院 | Device for shortening maintenance time of denotation vent gas treater |
| TW201124196A (en) * | 2011-02-18 | 2011-07-16 | Jg Environmental Tech Co Ltd | Organic waste gas purification system and method capable of preventing from surface condensation and agglomeration of the absorption material. |
| CN103007717A (en) * | 2012-12-25 | 2013-04-03 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | Organosilicone monomer tail gas absorption device and technology thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201832820A (en) | 2018-09-16 |
| TWI654024B (en) | 2019-03-21 |
| CN108097016B (en) | 2020-11-10 |
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