CN108091631A - The compound bonding wire of billon and its manufacturing method with golden clad - Google Patents

The compound bonding wire of billon and its manufacturing method with golden clad Download PDF

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Publication number
CN108091631A
CN108091631A CN201711332193.0A CN201711332193A CN108091631A CN 108091631 A CN108091631 A CN 108091631A CN 201711332193 A CN201711332193 A CN 201711332193A CN 108091631 A CN108091631 A CN 108091631A
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wire
bonding wire
gold
billon
cored wire
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周振基
周博轩
于锋波
彭政展
麦宏全
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Shantou Junma Kaisa Coltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/49Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions wire-like arrangements or pins or rods
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • C22C5/02Alloys based on gold
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/14Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/48Electroplating: Baths therefor from solutions of gold
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4885Wire-like parts or pins
    • H01L21/4889Connection or disconnection of other leads to or from wire-like parts, e.g. wires

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  • Laminated Bodies (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

A kind of compound bonding wire of billon with golden clad, it is characterised in that including cored wire and the golden clad being coated on outside cored wire;For the cored wire by weight containing Ag 25 49%, Pd 0.2 5%, In 0.5 2%, 2 200 ppm of trace additives, surplus is gold;The trace additives are the combinations of one or both of Ca and Be;The thickness of the gold clad is 20 200nm.The present invention also provides a kind of manufacturing methods of the above-mentioned compound bonding wire of billon with golden clad.The compound bonding wire of billon of the present invention can effectively improve the anti-oxidant and sulfuration resistant performance of wire rod, two weldering pulling force and a weldering pulling force can be increased, can effectively promote the bonding wire workability of billon, the adhesion property of wire rod and chip and substrate can be enhanced, it is promoted and trusts performance, and cost can be reduced.

Description

The compound bonding wire of billon and its manufacturing method with golden clad
Technical field
The present invention relates to the bonding wires of IC, LED encapsulation, and in particular to a kind of billon compound keys with golden clad Plying and its manufacturing method.
Background technology
Bonding wire(Bonding wire, also known as bonding line)It is connection chip and outer enclosure substrate(substrate)With/ Or multilayer circuit board(PCB)Main connection mode.
Traditional gold bonding silk made of proof gold material possesses excellent chemical stability and electrical and thermal conductivity performance, Thus it is widely used as IC leads.But with rising steadily for international price of gold, the price also rising all the way of gold bonding silk is led The cost for causing end product is excessively high, is unfavorable for enterprise and improves competitiveness.In addition, the tensile strength of gold bonding silk is relatively low(Example Such as 20 microns of gold bonding silk of diameter, after welding, maximum pulling strength is less than 5 gram forces), elongation percentage is not easily controlled.With Upper two aspects factor, which becomes, hinders gold bonding silk using the bottleneck with development.To solve disadvantages described above, new bonding need to be developed Silk.
The content of the invention
The technical problems to be solved by the invention be to provide a kind of compound bonding wire of billon with golden clad and The manufacturing method of this compound bonding wire of billon, this compound bonding wire of billon can effectively improve the anti-oxidant of wire rod and Sulfuration resistant performance can increase by two weldering pulling force and a weldering pulling force, can effectively promote the bonding wire workability of billon, can enhance wire rod with The adhesion property of chip and substrate is promoted and trusts performance, and can reduce cost.The technical solution of use is as follows:
A kind of compound bonding wire of billon with golden clad, it is characterised in that including cored wire and the gold being coated on outside cored wire Clad;The cored wire contains Ag 25-49%, Pd 0.2-5%, In 0.5-2%, trace additives 2-200 by weight Ppm, surplus are gold;The trace additives are the combinations of one or both of Ca and Be;The thickness of the gold clad For 20-200nm.
The present invention promotes the tensile strength of wire rod by the control of element of cored wire;Proof gold is coated on the surface of cored wire simultaneously, The problem of billon solder joint associativity can be improved, also promotes the oxidation resistance of wire rod and sulfuration resistant ability, so as to obtain solder joint The compound bonding wire of billon that zygosity is good, anti-oxidant sulfuration resistant ability is strong, tensile strength is high.Compared with proof gold bonding wire Speech during the compound bonding wire of billon of the invention encapsulates for IC, LED, can reduce cost and improve gold line tensile strength not The problem of sufficient, and other performances can reach the performance requirement of proof gold bonding wire.
In the compound bonding wire of billon of the present invention, in cored wire except for gold, the also silver containing 25-49%, silver and gold It can fully be dissolved, play the role of solution strengthening, improve the tensile strength of wire rod, but since silver itself is easily aoxidized and vulcanized, Can cause wire rod in terms of the workability and reliability in terms of all Shortcomings, therefore add in Ca and/or Be on this basis, can have Effect ground improves the anti-oxidant and sulfuration resistant performance of wire rod.In has wettability effect, can increase by two weldering pulling force and a weldering pulling force, energy The bonding wire workability of billon is effectively promoted, the adhesion property of wire rod and chip and substrate can be enhanced, promoted and trust performance.In core Line surface sets golden clad, can effectively play the characteristic of gold, further functions as the effect of anti-oxidant and sulfuration resistant;Moreover, because Wire surface is coated with layer gold, can effectively promote wire rod and chip and the joint capacity of substrate, effectively promote reliability.
It is preferred that it is 99% that above-mentioned gold cladding composition of layer, which is purity,(2N)-99.99%(4N)Gold.
The present invention also provides a kind of manufacturing method of the above-mentioned compound bonding wire of billon with golden clad, feature exists In comprising the following steps:
(1)Founding:Ag, Pd, In and trace additives are added in golden raw material in proportion, connected by vacuum melting and orientation It is continuous to draw casting process, obtain core wires 6-8 millimeters a diameter of;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 50-280um;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 150-500nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 15-40 um The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 20-200nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 600-1000mm, and annealing temperature is 300-600 DEG C, annealing rate For 60-120m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 20-30 DEG C, obtains required there is Jin Bao The compound bonding wire of billon of coating.
In above-mentioned manufacturing method, gold plate is formed when wire drawing is to line footpath 50-280um, afterwards again wire drawing to line footpath 15-40 Um can effectively control the uniformity of golden coating thickness on the compound bonding wire of finished product billon;In addition, in line footpath 50-280um Para-linkage silk cored wire is electroplated, and efficiency is higher, and cost is relatively low, wire surface in order, therefore prepared finished product gold close The golden clad uniformity of the compound bonding wire of gold is good, and bonding wire workability and reliability are all more preferably.
It is preferred that above-mentioned steps(2)In drawing process, intermediate annealing several times is carried out to wire rod, is used in annealing process N2As annealing atmosphere, annealing furnace effective length is 600-2000mm, and annealing temperature is 500-800 DEG C, annealing rate 30- 100m/min。
It is preferred that above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition immerses the acetone ethanol that temperature is 70-150 DEG C In mixed liquor, it is 1.4-8 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Third in the acetone ethanol mixed liquor The weight ratio of ketone and ethyl alcohol is 1:5-10;
(3-2)Remove oxide process:It it is 70-150 DEG C, again by the bonding wire cored wire immersion temperature by removing organic matter processing It measures in the nitric acid that percent concentration is 30-50%, it is 1.4-8 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 70-150 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing oxide process Percent concentration is in the sulfuric acid of 10-30%, and it is 1.4-8 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 2-4g/L, electroplated Electric current is gold-plated under conditions of being 0.2-0.8A, and the gold plate that thickness is 150-500nm is formed on the surface of bonding wire cored wire, should Gold plate coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:The water being attached on gold plate surface is blown away using air knife;
When being electroplated, with the continuous release steps of the speed of 5-30m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire according to It is secondary to be handled, after removing oxide process, surface activation process, gold-plated, cleaning and drying by above-mentioned removing organic matter, it is wrapped It is covered with the bonding wire cored wire of gold plate and take-up.
It is preferred that above-mentioned steps(3-4)In, the gold plating liquid of use is potassium auricyanide solution.
It is preferred that above-mentioned steps(3-5)In, using pure water as cleaning solution, two are carried out to the bonding wire cored wire for being coated with gold plate Road ultrasonic cleaning.
It is preferred that above-mentioned steps(3-6)In, air knife air-flow is N2, flow velocity 5-20L/min.
The compound bonding wire of billon of the present invention compared with prior art, has the advantages that:
(1)By gold plate cladding possess special elements combine billon cored wire, can effectively improve the anti-oxidant of wire rod and Sulfuration resistant performance;
(2)By principal component institute added elements, two weldering pulling force and a weldering pulling force can be increased, can effectively promote the bonding wire operation of billon Property, the adhesion property of wire rod and chip and substrate can be enhanced, promoted and trust performance.
(3)Cost is relatively low.
Specific embodiment
Embodiment 1
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;Cored wire is by weight containing Ag 35%, and Pd 3%, In 1%, Ca 50 ppm of 50 ppm, Be, surplus is gold;Golden clad Thickness be 40nm.
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In, Ca and Be are added in golden raw material in proportion, continuously draw casting by vacuum melting and orientation Technique obtains a diameter of 8 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 100um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 950mm, and annealing temperature is 600 DEG C, annealing rate 50m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 200nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 20 um's The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 40nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 800mm, and annealing temperature is 500 DEG C, annealing rate 80m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 25 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition, which immerses the acetone ethanol that temperature is 110 DEG C, to be mixed It closes in liquid, it is 2.5 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;In the acetone ethanol mixed liquor acetone with The weight ratio of ethyl alcohol is 1:7.5;
(3-2)Remove oxide process:It is 110 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing organic matter processing Percent concentration is in 45% nitric acid, and it is 2.5 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 110 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing oxide process Divide in the sulfuric acid that specific concentration is 18%, it is 2.5 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 3g/L(The plating of use Golden liquid is potassium auricyanide solution), it is gold-plated under conditions of electroplating current is 0.5A, form thickness on the surface of bonding wire cored wire For the gold plate of 200nm, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 12L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 18m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
Embodiment 2
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;Cored wire is by weight containing Ag 25%, and 20 ppm of Pd 5%, In 0.6%, Ca, surplus is gold;The thickness of golden clad is 60nm。
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In and Ca are added in golden raw material in proportion, continuously draw foundry work by vacuum melting and orientation Skill obtains a diameter of 6 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 80um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 1200mm, and annealing temperature is 550 DEG C, annealing rate 50m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 320nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains the gold of a diameter of 15um The compound bonding wire of alloy, and the thickness of gold plate is made to be decreased to 60nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 800mm, and annealing temperature is 600 DEG C, annealing rate 100m/ min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 28 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition, which immerses the acetone ethanol that temperature is 145 DEG C, to be mixed It closes in liquid, it is 1.4 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;In the acetone ethanol mixed liquor acetone with The weight ratio of ethyl alcohol is 1:6;
(3-2)Remove oxide process:It is 145 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing organic matter processing Percent concentration is in 48% nitric acid, and it is 1.4 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 145 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing oxide process Divide in the sulfuric acid that specific concentration is 30%, it is 1.4 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 3.5g/L(It uses Gold plating liquid is potassium auricyanide solution.), it is gold-plated under conditions of electroplating current is 0.25A, it is formed on the surface of bonding wire cored wire Thickness is the gold plate of 320nm, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 15L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 30m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
Embodiment 3
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;The cored wire is by weight containing Ag 49%, and Pd 1%, In 2%, Ca 10 ppm of 100 ppm, Be, surplus is gold;Jin Bao The thickness of coating is 80nm.
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In, Ca and Be are added in golden raw material in proportion, continuously draw casting by vacuum melting and orientation Technique obtains a diameter of 8 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 250um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 1800mm, and annealing temperature is 650 DEG C, annealing rate 100m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 500nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 40 um's The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 80nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 700mm, and annealing temperature is 450 DEG C, annealing rate 70m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 20 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition immerses the acetone ethanol that temperature is 75 DEG C and mixes In liquid, it is 7 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Acetone and ethyl alcohol in the acetone ethanol mixed liquor Weight ratio be 1: 9;
(3-2)Remove oxide process:It is 75 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing organic matter processing Divide in the nitric acid that specific concentration is 35%, it is 7 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 75 DEG C, weight percent by temperature is immersed by the bonding wire cored wire of removing oxide process Specific concentration is in 12% sulfuric acid, and it is 7 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 2g/L(The plating of use Golden liquid is potassium auricyanide solution), it is gold-plated under conditions of electroplating current is 0.8A, form thickness on the surface of bonding wire cored wire For the gold plate of 500nm, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 5L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 5m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
Embodiment 4
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;Cored wire is by weight containing Ag 40%, and 80 ppm of Pd 2.5%, In 0.5%, Be, surplus is gold;The thickness of golden clad is 200nm。
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In and Be are added in golden raw material in proportion, continuously draw foundry work by vacuum melting and orientation Skill obtains a diameter of 7 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 50um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 1200mm, and annealing temperature is 600 DEG C, annealing rate 60m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 500nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 20 um's The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 200nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 1000mm, and annealing temperature is 500 DEG C, annealing rate 80m/ min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 28 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition, which immerses the acetone ethanol that temperature is 120 DEG C, to be mixed It closes in liquid, it is 4 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Acetone and second in the acetone ethanol mixed liquor The weight ratio of alcohol is 1:8;
(3-2)Remove oxide process:It is 120 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing organic matter processing Percent concentration is in 40% nitric acid, and it is 4 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 120 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing oxide process Divide in the sulfuric acid that specific concentration is 15%, it is 4 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 3g/L(The plating of use Golden liquid is potassium auricyanide solution), it is gold-plated under conditions of electroplating current is 0.5A, form thickness on the surface of bonding wire cored wire For the gold plate of 500nm, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 20L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 15m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
Embodiment 5
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;Cored wire is by weight containing Ag 35%, and Pd 3%, In 1%, Ca 60 ppm of 100 ppm, Be, surplus is gold;Gold cladding The thickness of layer is 30nm.
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In, Ca and Be are added in golden raw material in proportion, continuously draw casting by vacuum melting and orientation Technique obtains a diameter of 8 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 200um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 1200mm, and annealing temperature is 800 DEG C, annealing rate 80m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 150nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 40 um's The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 30nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 800mm, and annealing temperature is 550 DEG C, annealing rate 80m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 20 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition immerses acetone ethanol mixing at a temperature of 90 °C In liquid, it is 5.5 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Acetone and second in the acetone ethanol mixed liquor The weight ratio of alcohol is 1:6;
(3-2)Remove oxide process:It is 90 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing organic matter processing Divide in the nitric acid that specific concentration is 30%, it is 5.5 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 90 DEG C, weight percent by temperature is immersed by the bonding wire cored wire of removing oxide process Specific concentration is in 15% sulfuric acid, and it is 5.5 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 3.5g/L(It uses Gold plating liquid is potassium auricyanide solution), it is gold-plated under conditions of electroplating current is 0.6A, it is formed on the surface of bonding wire cored wire thick The gold plate for 150nm is spent, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 15L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 10m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
Embodiment 6
The present embodiment has the gold cladding that the compound bonding wire of billon of golden clad includes cored wire and is coated on outside cored wire Layer;Cored wire is by weight containing Ag 42%, and Pd 0.5%, In 0.6%, Ca 80 ppm of 20 ppm, Be, surplus is gold;Jin Bao The thickness of coating is 80nm.
In the present embodiment, the manufacturing method with the compound bonding wire of billon of golden clad comprises the following steps:
(1)Founding:Ag, Pd, In, Ca and Be are added in golden raw material in proportion, continuously draw casting by vacuum melting and orientation Technique obtains a diameter of 6 millimeters of core wires;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 200um;
This step(2)In, in drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As Annealing atmosphere, annealing furnace effective length are 800mm, and annealing temperature is 700 DEG C, annealing rate 50m/min;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 400nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 40 um's The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 80nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 900mm, and annealing temperature is 450 DEG C, annealing rate 60m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 30 DEG C, obtains required there is gold cladding The compound bonding wire of billon of layer.
Above-mentioned steps(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition, which immerses the acetone ethanol that temperature is 115 DEG C, to be mixed It closes in liquid, it is 3 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Acetone and second in the acetone ethanol mixed liquor The weight ratio of alcohol is 1:7;
(3-2)Remove oxide process:It is 115 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing organic matter processing Percent concentration is in 35% nitric acid, and it is 3 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 115 DEG C, weight hundred by temperature is immersed by the bonding wire cored wire of removing oxide process Divide in the sulfuric acid that specific concentration is 25%, it is 3 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 2g/L(The plating of use Golden liquid is potassium auricyanide solution), it is gold-plated under conditions of electroplating current is 0.8A, form thickness on the surface of bonding wire cored wire For the gold plate of 400nm, which coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:Utilize air knife(Air knife air-flow is N2, flow velocity 12L/min)It blows away and is attached on gold plate surface Water;
When being electroplated, with the continuous release steps of the speed of 25m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire is successively After the processing of above-mentioned removing organic matter, removing oxide process, surface activation process, gold-plated, cleaning and drying, coated There are the bonding wire cored wire of gold plate and take-up.
The compound bonding wire of billon with golden clad that above example 1-6 is obtained is tested for the property(Comparative example is adopted With the conventional 80%Au alloy gold wires bought in the market).
1st, the test method of HAZ length
Embodiment 1-6 and the wire rod of comparative example are subjected to the cutting of FIB (Focused Ion beam) focused ion beam, utilize SEM (scanning electron microscopy) scanning electron microscope is observed, by comparing the crystal size of different wire positions Variation, the length information of HAZ can be obtained.
2nd, ageing testing method
Obtained by embodiment 1-6 and comparative example wire rod in the difference of reliability mainly in thermal shock part.Specific degradation item Part such as table 1.Experiment packing forms be LED encapsulation in SMD2835, BSOB routings, packaging silicon rubber use DOW CORNING OE6650, For packaged sample after each thermal shock for completing 50 Xun Huans, seeing whether can also be electric bright, records the number for the dead lamp that fails.
Table 1
Test condition Duration (Hour)/bout (Cycle)
305 alloy, 8 warm area standard circumfluence welds (265 DEG C) 1
- 40 DEG C of * 30min-100 DEG C * 30min (conversion time is less than 20 seconds) 50/100/…/500
3rd, test method is vulcanized
The good sample lamp bead of embedding is positioned in closed container(Distil certain sulphur concentration), 85 DEG C of constant temperature;One timing of vulcanization Between after take out test light decay.
The performance test results are as shown in table 2.
Table 2
Note:Shape-changeable ball out of roundness number of non-compliances is the summation of the undesirable alternating compression ball of out of roundness and eccentric sphere.
Above-mentioned the performance test results show:
1st, 1-6's of the embodiment of the present invention has the HAZ that the compound bonding wire of billon of golden clad obtains well below comparative example Wire rod.
2nd, the routing performance of the compound bonding wire of billon with golden clad of 1-6 of the embodiment of the present invention(Shape-changeable ball is true Circularity)It is substantially better than comparative example.
The excellent routing performance of wire rod of the present invention, which is primarily due to the wire rod, to ensure stable burning ball performance(Including The property placed in the middle of FAB is to prevent the suitable column crystal of symmetrical and number generated in eccentric sphere and FAB).
3rd, 1-6's of the embodiment of the present invention has the compound bonding wire of billon of golden clad compared with comparative example, reliability It is greatly improved.
The compound bonding wire of billon with golden clad of 1-6 of the embodiment of the present invention passes through 450 thermal shocks cycled Afterwards, still without the dead lamp situation that fails(Wherein embodiment 4,6 is after the thermal shock of 500 Xun Huans, still without the dead lamp feelings that fail Condition);And has then there is the dead lamp that fails in comparative example(Comparative example can only be subjected to the thermal shock of 400 Xun Huans).This illustrates the present invention The reliability higher of technology wire rod.
4th, vulcanize
The compound bonding wire of billon with golden clad of 1-6 of the embodiment of the present invention is tested by vulcanization, light decay 20% with Under;And comparative example light decay is 25%.This illustrates that the sulfuration resistant ability of the technology of the present invention wire rod is stronger.

Claims (7)

1. a kind of compound bonding wire of billon with golden clad, it is characterised in that including cored wire and be coated on outside cored wire Golden clad;The cored wire contains Ag 25-49%, Pd 0.2-5%, In 0.5-2%, trace additives 2-200 by weight Ppm, surplus are gold;The trace additives are the combinations of one or both of Ca and Be;The thickness of the gold clad For 20-200nm.
2. the manufacturing method of the billon compound bonding wire described in claim 1 with golden clad, it is characterised in that including Following step:
(1)Founding:Ag, Pd, In and trace additives are added in golden raw material in proportion, connected by vacuum melting and orientation It is continuous to draw casting process, obtain core wires 6-8 millimeters a diameter of;
(2)Wire drawing:To step(1)Obtained core wires carry out wire drawing, obtain the bonding wire cored wire of a diameter of 50-280um;
(3)Using electroplating technology in step(2)Gold plate is formed on the bonding wire cored wire surface of acquisition, the thickness of gold plate is 150-500nm;
(4)To step(3)The obtained bonding wire cored wire for being coated with gold plate continues wire drawing, obtains a diameter of 15-40 um The compound bonding wire of billon, and the thickness of gold plate is made to be decreased to 20-200nm;
(5)Finally anneal:Step(4)After the completion of wire drawing, finally annealed to the compound bonding wire of billon, in annealing process Using N2Come as annealing atmosphere, annealing furnace effective length is 600-1000mm, and annealing temperature is 300-600 DEG C, annealing rate For 60-120m/min;
(6)Cooling:After finally annealing, the compound bonding wire of billon is cooled to 20-30 DEG C, obtains required there is Jin Bao The compound bonding wire of billon of coating.
3. the manufacturing method of the billon compound bonding wire according to claim 1 with golden clad, it is characterised in that: Step(2)In drawing process, intermediate annealing several times is carried out to wire rod, N is used in annealing process2As annealing atmosphere, Annealing furnace effective length is 600-2000mm, and annealing temperature is 500-800 DEG C, annealing rate 30-100m/min.
4. the manufacturing method of the billon compound bonding wire according to claim 1 with golden clad, it is characterised in that The step(3)In electroplating technology comprise the following steps:
(3-1)Remove organic matter processing:By step(2)The bonding wire cored wire of acquisition immerses the acetone ethanol that temperature is 70-150 DEG C In mixed liquor, it is 1.4-8 seconds to immerse the time, the organic matter on removing bonding wire cored wire surface;Third in the acetone ethanol mixed liquor The weight ratio of ketone and ethyl alcohol is 1:5-10;
(3-2)Remove oxide process:It it is 70-150 DEG C, again by the bonding wire cored wire immersion temperature by removing organic matter processing It measures in the nitric acid that percent concentration is 30-50%, it is 1.4-8 seconds to immerse the time, the oxide on removing bonding wire cored wire surface;
(3-3)Surface activation process:It is 70-150 DEG C, weight by temperature is immersed by the bonding wire cored wire of removing oxide process Percent concentration is in the sulfuric acid of 10-30%, and it is 1.4-8 seconds to immerse the time, and para-linkage silk cored wire carries out surface activation process;
(3-4)It is gold-plated:Bonding wire cored wire Jing Guo surface activation process is immersed in the gold plating liquid that concentration is 2-4g/L, electroplated Electric current is gold-plated under conditions of being 0.2-0.8A, and the gold plate that thickness is 150-500nm is formed on the surface of bonding wire cored wire, should Gold plate coats bonding wire cored wire;
(3-5)Cleaning:Using pure water as cleaning solution, ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate;
(3-6)Drying:The water being attached on gold plate surface is blown away using air knife;
When being electroplated, with the continuous release steps of the speed of 5-30m/min(2)The bonding wire cored wire of acquisition, bonding wire cored wire according to It is secondary to be handled, after removing oxide process, surface activation process, gold-plated, cleaning and drying by above-mentioned removing organic matter, it is wrapped It is covered with the bonding wire cored wire of gold plate and take-up.
5. the manufacturing method of the billon compound bonding wire according to claim 4 with golden clad, it is characterised in that: Step(3-4)In, the gold plating liquid of use is potassium auricyanide solution.
6. the manufacturing method of the billon compound bonding wire according to claim 4 with golden clad, it is characterised in that: Step(3-5)In, using pure water as cleaning solution, twice ultrasonic cleaning is carried out to the bonding wire cored wire for being coated with gold plate.
7. the manufacturing method of the billon compound bonding wire according to claim 4 with golden clad, it is characterised in that: Step(3-6)In, air knife air-flow is N2, flow velocity 5-20L/min.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108796269A (en) * 2018-06-30 2018-11-13 汕头市骏码凯撒有限公司 Billon bonding wire and its manufacturing method

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JPH1145899A (en) * 1997-07-25 1999-02-16 Sumitomo Metal Mining Co Ltd Bonding wire
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CN103014401A (en) * 2012-12-05 2013-04-03 昆明贵金属研究所 Novel aurum alloy and preparation method for same
CN105908002A (en) * 2016-04-22 2016-08-31 汕头市骏码凯撒有限公司 Gold alloy bonding wire and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
JPH1145899A (en) * 1997-07-25 1999-02-16 Sumitomo Metal Mining Co Ltd Bonding wire
CN102437136A (en) * 2011-11-16 2012-05-02 浙江佳博科技股份有限公司 Bonding alloy wire and production technology thereof
CN103014401A (en) * 2012-12-05 2013-04-03 昆明贵金属研究所 Novel aurum alloy and preparation method for same
CN105908002A (en) * 2016-04-22 2016-08-31 汕头市骏码凯撒有限公司 Gold alloy bonding wire and manufacturing method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108796269A (en) * 2018-06-30 2018-11-13 汕头市骏码凯撒有限公司 Billon bonding wire and its manufacturing method

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Application publication date: 20180529