CN108062968B - Long-stroke high-precision piezoelectric displacement table and driving method thereof - Google Patents

Long-stroke high-precision piezoelectric displacement table and driving method thereof Download PDF

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CN108062968B
CN108062968B CN201810030486.1A CN201810030486A CN108062968B CN 108062968 B CN108062968 B CN 108062968B CN 201810030486 A CN201810030486 A CN 201810030486A CN 108062968 B CN108062968 B CN 108062968B
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straight
hinge
rigid
circular
stator
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CN108062968A (en
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程廷海
赵宏伟
卢晓晖
李恒禹
李义康
陈茜炎
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Changchun University of Technology
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Changchun University of Technology
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    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B9/00—Housing or supporting of instruments or other apparatus
    • G12B9/08—Supports; Devices for carrying
    • G12B9/10—Instruments boards; Panels; Desks; Racks
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract

The invention discloses a long-stroke high-precision piezoelectric displacement platform and a driving method thereof, and solves the technical problems of limited stroke, unstable motion, weak bearing capacity and the like of the conventional piezoelectric stick-slip displacement platform. The invention relates to a micro-displacement platform which comprises a fixed base, a driving stator, a bearing slide block, a top cover, a guide rail, a thread pair, a stator mounting screw, a top cover mounting screw and a guide rail mounting screw. The driving stator utilizes the stack type piezoelectric ceramics to slowly extend to drive the flexible hinge to deform, and the continuous feeding of the bearing slide block is realized by supplying sawtooth wave electric signals to the stack type piezoelectric ceramics. The micro-nano driving and positioning device has the characteristics of simple structure, high stability, large stroke, strong load capacity and the like, and has good application prospect in the micro-nano driving and positioning fields of optical precision instruments, semiconductor processing and the like.

Description

Long-stroke high-precision piezoelectric displacement table and driving method thereof
Technical Field
The invention relates to a long-stroke high-precision piezoelectric displacement platform and a driving method thereof, belonging to the field of micro-nano driving and positioning.
Background
The piezoelectric driving technology is a novel driving mode for converting electric energy into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material, and compared with the traditional electromagnetic driving mode, the piezoelectric driving technology has the advantages of low speed and large torque (thrust), high torque density, flexible design, compact structure, high positioning precision, high response speed, power failure self-locking, no electromagnetic interference, no bearing and lubrication, and the like, has wide application prospects in the fields of robot joint driving, precise instruments and meters, ultra-precision machining, aerospace, life science and the like, and is one of the hotspots of research in the technical field of precise special driving in recent years.
The precision driving platform is widely applied to the high-end technical fields of space mechanisms, life sciences, optical precision instruments, super-finishing and the like. The precision driving platform can be mainly divided into a precision driving platform driven by an electromagnetic motor and a precision driving platform driven by piezoelectricity according to a driving mode. At present, most of the driving modes of electromagnetic motors are adopted, and although a larger stroke can be realized, the problems of lower positioning precision, strict requirements on working environment and the like generally exist; in order to meet the requirements of the high-end technical field on high-precision driving devices, the piezoelectric driving technology is rapidly developed. The current precision platform based on piezoelectric driving mainly comprises a direct-acting piezoelectric driving platform, an inchworm type piezoelectric driving platform, a stick-slip type piezoelectric driving platform and the like, wherein the direct-acting piezoelectric driving platform influences the application of the direct-acting piezoelectric driving platform in the technical field of micro-nano precision driving due to the defect of small movement stroke, the inchworm type piezoelectric driving platform has the problems of complex control, serious abrasion between a rotor and a stator and the like, and the piezoelectric stick-slip driving platform has the advantages of simple and compact structure, high positioning precision, large stroke, convenience in control and the like, and is widely applied to the technical field of precision driving and positioning. Therefore, in order to overcome the technical problems of the direct-acting piezoelectric driving platform and the inchworm type piezoelectric driving platform, a precise driving platform which can realize large stroke, high precision, easy miniaturization and long service life and is designed based on the stick-slip driving principle is urgent and needs.
Disclosure of Invention
The invention discloses a long-stroke high-precision piezoelectric displacement platform, which aims to solve the technical problems of limited stroke, unstable motion, weak bearing capacity and the like of the conventional piezoelectric stick-slip displacement platform.
The technical scheme adopted by the invention is as follows:
the long-stroke high-precision piezoelectric displacement platform comprises a fixed base, a driving stator, a bearing slide block, a top cover, a guide rail, a thread pair, a stator mounting screw, a top cover mounting screw and a guide rail mounting screw; the guide rail is installed on the fixed base through guide rail mounting screws, the bearing sliding block is installed on the guide rail in a sliding contact mode, the driving stator is installed on the bearing sliding block through stator mounting screws, the top cover is installed on the bearing sliding block through top cover mounting screws, and the thread pair is installed and fixed on the bearing sliding block through gluing.
The guide rail fixing device comprises a fixing base and a fixing base, wherein the fixing base is of an L-shaped structure and comprises a friction plane, a guide rail thread mounting hole and a fixing base mounting hole, the end face of the friction plane is coated with ceramic and glass fiber friction materials, the guide rail thread mounting hole is used for mounting a guide rail on the fixing base through a guide rail mounting screw, and the fixing base mounting hole can be fixed with other peripheral devices.
The guide rail is a miniature linear guide rail and comprises a counter bore, a supporting surface and a track; the counter sink is fixed with the fixed base through a guide rail mounting screw, the bearing slide block is placed on the supporting surface, and the track is used for guiding the motion of the bearing slide block.
The bearing slide block is a miniature guide rail slide block and comprises a bearing surface, a stator threaded hole, a thread pair fixing hole, a top cover threaded hole, an oil scraping sheet, an end cover and a rail connecting surface; the bearing surface and the stator threaded hole are used for fixing the driving stator through a stator mounting screw, the bearing surface and the top cover threaded hole are used for fixing the top cover, the thread pair mounting hole is used for fixing the thread pair through gluing, and the track connecting surface is used for contacting with a track.
The driving stator comprises a flexible hinge mechanism, stacked piezoelectric ceramics, an adjusting gasket and a base meter screw, the stacked piezoelectric ceramics are fixed in the flexible hinge mechanism through the adjusting gasket and the base meter screw, the flexible hinge mechanism is provided with a driving foot, a stator mounting hole, a base meter screw mounting hole, a straight round hinge II, a straight round hinge III, a straight round hinge VI, an improved inclined ladder beam, an asymmetric cross beam, a rigid straight beam VII and a rigid straight beam VIII, the straight round hinge III and the straight round hinge II are rigidly connected through the rigid straight beam VIII, the straight round hinge VI is rigidly connected with the bottom end of the rigid straight beam VII, the straight round hinge III and the improved inclined ladder beam are rigidly connected through the asymmetric cross beam, the driving foot and a friction plane are in a linear contact mode, the stator mounting hole is matched with a stator threaded hole through a top cover mounting screw, the base meter screw mounting hole is in threaded connection with the base meter screw, the threaded pair is a precise threaded pair, the threaded pair comprises a nut base body, a locking nut and a bolt, the nut body is fixed on a threaded pair fixing hole, the locking nut is placed at the tail end of the stator, the inclined edge of the stator is arranged at the length of the long edge, the stator is equal to the length of the long edge, the stator, the short edge of the stator, theθThe ratio of the long side L to the short side M is K = L/M, wherein the value of K is 1-7, and the straight-circular hinge III, the straight-circular hinge VI and the straight-circular hinge II of the driving stator have the same fillet radiusValue R1，R1The value range of (A) is 0.1-1.2 mm.
The top cover is made of aluminum alloy, and comprises a top cover upper surface, a through hole and a top cover mounting hole; the top cover mounting hole is connected with the top cover threaded hole through a top cover mounting screw. The flexible hinge mechanism of the driving stator can be made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy; the adjusting shim is made of tungsten steel; the guide rail is made of stainless steel materials. The friction plane is of thicknesseHeight ofhThe stainless steel material (2) is made of stainless steel,handeratio S =h/eWherein the value of S is less than 20; the thickness of the bearing slide block isc，cThe value range of (A) is 3-6 mm.
Or a long-stroke high-precision piezoelectric displacement table realized by a double-stack single-drive foot stator component, wherein the stack type piezoelectric ceramics are fixed in a flexible hinge mechanism through an adjusting gasket and a base meter screw; the flexible hinge mechanism is provided with a driving foot, a cross beam, a stator mounting hole, a base screw mounting hole, a rigid straight beam, a straight circular hinge I, a rigid cross beam, a straight circular hinge II, a straight circular hinge III, a straight circular hinge IV, a straight circular hinge V and a straight circular hinge VI; the driving foot is located in the middle of the cross beam and is in line contact with the friction plane, the surface of the driving foot is coated with friction materials, the straight-circular hinge I and the straight-circular hinge IV are in rigid connection through the rigid cross beam, the straight-circular hinge II and the straight-circular hinge III are in rigid connection through the rigid straight beam, and the straight-circular hinge V and the straight-circular hinge VI are in rigid connection through the rigid straight beam.
Or a long-stroke high-precision piezoelectric displacement platform of a double-stack arch stator assembly realization mode, wherein the flexible hinge mechanism is provided with a driving foot, a cross beam, a stator mounting hole, a base-meter screw mounting hole, an elliptical hinge II, an elliptical hinge I, a rigid cross beam II, a rigid curved beam I, a rigid curved beam II, a rigid curved beam III and a rigid curved beam IV. The driving foot is positioned in the middle of the cross beam, the end part of the driving foot is coated with friction materials, the driving foot is in line contact with a friction plane, the stator mounting hole is used for fixing the flexible hinge mechanism, and the base meter screw mounting hole is in threaded connection with the base meter screw to fix the stacked piezoelectric ceramics; the rigid cross beam II is located at the center of the flexible hinge mechanism, the rigid curved beam I is rigidly connected with the rigid curved beam II through the elliptical hinge I, the rigid curved beam III is rigidly connected with the rigid curved beam IV through the elliptical hinge II, the frame structure formed by the rigid curved beam I, the rigid curved beam II, the elliptical hinge I and the rigid cross beam II can realize the lateral movement of the driving foot, and the frame structure formed by the rigid cross beam II, the elliptical hinge II, the rigid curved beam III and the rigid curved beam IV can realize the lateral movement of the driving foot.
Or a long-stroke high-precision piezoelectric displacement platform which is a double-stack double-drive-foot stator assembly realization mode, wherein the flexible hinge mechanism is provided with an end cross beam, a stator mounting hole, a base-meter screw mounting hole, a straight circular hinge I, a straight circular hinge II, a straight circular hinge III, a straight circular hinge IV, a straight circular hinge V, a straight circular hinge VI, double drive feet, a straight circular groove, a rigid straight beam IX, a rigid cross beam III and a rigid straight beam X; the base rice screw mounting hole is in threaded connection with a base rice screw to pre-tighten the stacked piezoelectric ceramic, the straight circular hinge I is in rigid connection with the straight circular hinge IV through a rigid cross beam III, the straight circular hinge V is in rigid connection with the straight circular hinge VI through a rigid straight beam IX, the straight circular hinge II is in rigid connection with the straight circular hinge III through a rigid straight beam X, the double driving feet are located on the central axis of the end cross beam, and friction materials are coated on the end portions of the driving feet.
Or be the long stroke high accuracy piezoelectricity displacement platform of asymmetric structure stator module implementation, flexible the hinge mechanism adopts 5052, 6061 or 7075 aluminum alloy material, and flexible the hinge mechanism adopts asymmetric frame type structure hinge, flexible the hinge mechanism is provided with the stator mounting hole, can fix flexible the hinge mechanism on bearing slide block through the stator mounting hole, flexible the hinge mechanism is provided with straight round hinge I, straight round hinge IV, straight round hinge V, straight round hinge VI, rigidity straight roof beam I and rigidity straight roof beam II, straight round hinge I and straight round roof beam IIThe round hinge IV is rigidly connected through a rigid straight beam II, the straight round hinge V and the straight round hinge VI are rigidly connected through a rigid straight beam I, the flexible hinge mechanism is provided with a driving foot and an end cross beam, the driving foot is positioned in the middle of the end cross beam, and the end face of the driving foot is correspondingly coated with ceramic or glass fiber friction materials. The straight circular type hinge I and the straight circular type hinge IV have the same fillet radius value R5The right-circular type hinge V and the right-circular type hinge VI have the same fillet radius value R6By adjusting the radius of the fillet R6And R5Can change the axial stiffness distribution of the driving stator, wherein R6And R5The ratio of (A) to (B) is in the range of 0.1 to 1.
Or the flexible hinge mechanism is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy materials, adopts a chute type frame structure hinge, is provided with a stator mounting hole, and is fixed with a stator mounting threaded hole of the bearing slide block through a stator mounting screw, is provided with a rigid straight beam VII and a rigid straight beam VIII, is provided with a straight circular hinge II, a straight circular hinge III, a straight circular hinge V and a straight circular hinge VI, is rigidly connected through a rigid straight beam VIII, is rigidly connected with the straight circular hinge V through the rigid straight beam VII, is provided with a driving foot and a thickening cross beam, the end face of the driving foot is correspondingly coated with ceramic or glass fiber friction materials, and the distance between the rigid straight beam VIII and the rigid straight beam is L1The widths of the rigid straight beams VII and VIII are L2Thickness B, wherein L2/L1The value range is 1/6-1/2, B/L1The value range is 0.5~1 can guarantee that flexible hinge mechanism has displacement magnifying ability, L in this embodiment1=13mm, L2 =2.5mm, B =7mm, the right-circular hinge ii, the right-circular hinge iii, the right-circular hinge v and the right-circular hinge vi have the same radius of the rounded cornerValue R7Wherein R is7/L1The value range is 1/60~1/12, the flexible hinge mechanism is provided with chutes, the number of which is X, the height is L3The width is C1, the included angle with the vertical direction is α, wherein X is more than or equal to 1, L3/C1The value range is 1-8, C1/L1The range of the included angle α is 10-80 degrees, and the range of the included angle α is 0.01-0.1.
The driving method is realized by adopting a composite excitation electric signal, the composite excitation electric signal comprises a friction regulation wave and a driving wave, the friction regulation wave is compositely superposed on a rapid electrifying stage of the driving wave, the driving stator is excited to be in a micro-pair high-frequency resonance state in a rapid deformation stage, and the friction resistance between the driving stator and the double-row crossed roller guide rail in the rapid deformation stage is reduced based on an ultrasonic antifriction effect. The driving wave is a sawtooth wave, and the friction regulation wave is a sine wave. Wherein the period of the sawtooth wave is T1Excitation voltage amplitude of V1Symmetry is S and sine wave period is T2Excitation voltage amplitude of V2The periodic ratio of sawtooth wave to sine wave is T1/T2= 100-20000, and the ratio of the excitation voltage amplitudes is V1/V2=2~6。
The invention has the beneficial effects that: the invention utilizes the relation of the reaction force between the objects, through the friction action between the stator and the friction plane, and through fixing the friction plane, the reaction force of the friction force drives the stator and the bearing platform to move, so that the guide rail and the bearing slide block are stressed uniformly, and the stress area of the guide rail is increased, thereby being capable of bearing larger load. The invention can place different types of driving stators, is suitable for the platform to be used under different conditions, adopts a stator structure with a friction force regulation function and adopts sawtooth wave driving, and obviously improves the mechanical output characteristic of the platform.
Drawings
Fig. 1 is a schematic structural diagram of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of an improved inclined-ladder-type stator assembly provided by the invention;
fig. 2 is a schematic structural view of a fixed base of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of an improved inclined-ladder-type stator assembly provided by the invention;
fig. 3 is a schematic structural diagram of a driving stator of a long-stroke high-precision piezoelectric displacement table according to an implementation mode of an improved inclined-ladder-type stator assembly provided by the invention;
FIG. 4 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement table according to an implementation of the present invention with an improved ramp-type stator assembly;
FIG. 5 is a schematic view of a structure of a bearing slider of a long-stroke high-precision piezoelectric displacement table according to an implementation of an improved inclined-ladder-type stator assembly of the present invention;
FIG. 6 is a schematic diagram of a top cover structure of a long-stroke high-precision piezoelectric displacement table according to an implementation of the present invention;
fig. 7 is a schematic structural view of a guide rail of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of an improved inclined-ladder-type stator assembly provided by the invention;
fig. 8 is a schematic structural view of a thread pair of a long-stroke high-precision piezoelectric displacement table according to an implementation mode of an improved inclined-ladder-type stator assembly provided by the invention;
fig. 9 is a schematic view of an inclined ladder beam structure of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of an improved inclined ladder type stator assembly of the present invention;
fig. 10 is a schematic structural diagram of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of a dual-stack single-drive-foot stator assembly provided by the invention;
fig. 11 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of a double-stack single-drive-foot stator assembly provided by the invention;
fig. 12 is a schematic structural view of a long-stroke high-precision piezoelectric displacement stage according to an implementation of a double-stack arcuate stator assembly according to the present invention;
fig. 13 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement stage according to an implementation of a double-stack arched stator assembly according to the present invention;
fig. 14 is a schematic structural diagram of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of a dual-stack dual-drive-foot stator assembly provided by the invention;
fig. 15 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of a dual-stack dual-drive foot stator assembly provided by the invention.
Fig. 16 is a schematic structural diagram of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of the asymmetric-structure stator assembly provided by the present invention;
fig. 17 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement table according to an implementation manner of a stator assembly with an asymmetric structure provided in the present invention;
fig. 18 is a schematic structural diagram of a long-stroke high-precision piezoelectric displacement stage according to an implementation of the sloted stator assembly of the present invention;
FIG. 19 is a schematic structural view of a flexible hinge mechanism of a long-stroke high-precision piezoelectric displacement stage according to an implementation of the sloted stator assembly of the present invention;
fig. 20 is a schematic signal waveform diagram of a driving method for a long-stroke high-precision piezoelectric displacement stage according to the present invention.
Detailed Description
The first embodiment is as follows: the present embodiment will be described with reference to fig. 1 to 9. The present embodiments provide specific implementations of long-stroke high-precision piezoelectric displacement stages. The long-stroke high-precision piezoelectric displacement platform is composed of a fixed base 1, a driving stator 2, a bearing slide block 3, a top cover 4, a guide rail 5, a thread pair 6, a stator mounting screw 7, a top cover mounting screw 8 and a guide rail mounting screw 9.
The fixing base 1 is in a L-shaped structure, the fixing base 1 comprises a friction plane 1-1, a guide rail thread mounting hole 1-2 and a fixing base mounting hole 1-3, the end face of the friction plane 1-1 is coated with ceramic and glass fiber friction materials, and the friction plane 1-1 is made of materials with the thickness ofeHeight ofhIs made of the stainless steel material of (1),hthe ratio of e to S =h/eWherein S is a valueShould be less than 20; the guide rail 2 is arranged on the fixed base 1 through the guide rail thread mounting holes 1-2 through guide rail mounting screws 9, and the fixed base mounting holes 1-3 can be fixed with other peripheral devices and used for fixing the whole platform.
The guide rail 5 is a miniature linear guide rail, the guide rail 5 is made of stainless steel materials, and the guide rail 5 comprises a counter sink 5-1, a supporting surface 5-2 and a track 5-3; the counter sink 5-1 is fixed with the fixed base 1 through a guide rail mounting screw 9, the supporting surface plays a role in supporting and limiting the bearing slide block 3, and the track 5-3 is in contact with the bearing slide block 3 to guide the movement of the bearing slide block 3.
The bearing slide block 3 is a micro guide rail slide block, and the bearing slide block 3 comprises a bearing surface 3-1, a stator threaded hole 3-2, a threaded pair fixing hole 3-3, a top cover threaded hole 3-4, an oil scraping sheet 3-5, an end cover 3-6 and a rail connecting surface 3-7; the bearing surface 3-1 and the stator threaded hole 3-2 are used for fixing the driving stator 2 through a stator mounting screw 7, the bearing surface 3-1 and the top cover threaded hole 3-4 are used for fixing the top cover 4, the thread pair mounting hole 3-3 is used for fixing the thread pair 6 through gluing, the track connecting surface 3-7 is used for contacting with the track 5-3, and the width of the bearing slide block 3 is thataThe distance between the stator threaded hole 3-2 and the edge is b, and the widthaDistance tobIs gamma =a/bThe value of gamma is less than 3, and the thickness of the bearing slide block 3 isc，cThe value range of (A) is 3-6 mm.
The driving stator 2 comprises a flexible hinge mechanism 2-1, stacked piezoelectric ceramics 2-2, an adjusting gasket 2-3 and a base meter screw 2-4; the stacked piezoelectric ceramic 2-2 is fixed in the flexible hinge mechanism 2-1 through an adjusting gasket 2-3 and a base meter screw 2-4; the flexible hinge mechanism 2-1 of the driving stator 2 can be made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material; the adjusting gasket 2-3 is made of a tungsten steel sheet material, the flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1, a stator mounting hole 2-1-4, a base meter screw mounting hole 2-1-6, a straight round hinge II 2-1-13, a straight round hinge III 2-1-14, a straight round hinge VI 2-1-17, an improved inclined ladder beam 2-1-23, an asymmetric cross beam 2-1-24, a rigid straight beam VII 2-1-42 and a rigid straight beam VIIThe improved oblique ladder beam structure comprises a linear straight beam VIII 2-1-43, a linear circular hinge III 2-1-14 and a linear circular hinge II 2-1-13, wherein the linear circular hinge III 2-1-14 and the linear circular hinge II 2-1-13 are rigidly connected through a rigid straight beam VIII 2-1-43, the linear circular hinge VI 2-1-17 and the rigid straight beam VII 2-1-42 are rigidly connected through a rigid straight circular hinge III 2-1-14, a linear circular hinge VI 2-1-17 and a linear circular hinge II 2-1-13, the elongation of a stator in the stacking elongation direction can be promoted, the main movement perpendicular to the stacking direction can be increased, the linear circular hinge III 2-1-14 and the improved oblique ladder beam 2-1-23 are rigidly connected through an asymmetric cross beam 2-1-24, the improved oblique ladder beam 2-1-23 can be stably output, the drive foot 2-1-1 is located at the top end of the improved ladder beam III-1-23, the improved oblique ladder beam III 2-1-23 is rigidly connected through an asymmetric cross beam 2-24, the improved oblique ladder beam 2-1-23 can be stably output, the improved oblique ladder beam structure has a long edge drive foot 2-1-13, the long edge mounting length of a linear hinge III-3-long edge hinge V-2-3 linear hinge, the long edge of a long edge hinge III-3 linear hinge, the linear hinge III-13 linear hinge III-3 linear hinge, the linear hinge is a long edge of the linear hinge III-13-3 linear hinge, the long edge of the linear hinge, the linear hinge III-III1，R1The value range of (A) is 0.1-1.2 mm; the radius of the driving foot 2-1-1 of the driving stator 2 is R2, the thickness is d, and the radius R2And a thickness d ofj= R2/d，jThe value range of (A) is 0.2-0.5.
The thread pair 6 is a precise thread pair, and the thread pair 6 comprises a nut base body 6-1, a locking nut 6-2 and a bolt 6-3; the nut base body 6-1 is fixedly adhered to the thread pair fixing hole 3-3 to provide support for the whole, the locking nut 6-2 is placed at the tail end of the bolt 6-3, the bolt 6-3 can be pre-tightened by screwing the locking nut 6-2, the pre-tightening force between the driving stator 2 and the friction plane can be changed by adjusting the bolt 6-3, and therefore the speed and the load capacity of the platform are adjusted.
The top cover 4 is made of aluminum alloy, and the top cover 4 comprises a top cover upper surface 4-1, a through hole 4-2 and a top cover mounting hole 4-3; the top cover mounting hole 4-3 is connected with a top cover threaded hole 3-4 through a top cover mounting screw 8, the upper surface 4-1 of the top cover can protect the driving stator 2 and can also be used for placing a load, and the through hole 4-2 is reserved for a connecting wire between the stacked piezoelectric ceramic 2-2 and a power supply to pass through.
The second embodiment is as follows: the present embodiment will be described with reference to fig. 10 to 11. The embodiment provides a long-stroke high-precision piezoelectric displacement table in a double-stack single-drive foot stator assembly implementation mode. The structure composition and the connection mode are the same as those of the first embodiment, and the difference is that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.
The stacked piezoelectric ceramic 2-2 is fixed in the flexible hinge mechanism 2-1 through an adjusting gasket 2-3 and a base meter screw 2-4; the flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1, a cross beam 2-1-2, a stator mounting hole 2-1-4, a base meter screw mounting hole 2-1-6, a rigid straight beam 2-1-8, a straight round hinge I2-1-9, a rigid cross beam 2-1-10, a straight round hinge II 2-1-13, a straight round hinge III 2-1-14, a straight round hinge IV 2-1-15, a straight round hinge V2-1-16 and a straight round hinge VI 2-1-17; the driving foot 2-1-1 is located in the middle of the cross beam 2-1-2, the driving foot 2-1-1 is in line contact with a friction plane 1-1, the surface of the driving foot 2-1-1 is coated with friction materials, the straight-circular type hinge I2-1-9 and the straight-circular type hinge IV 2-1-15 are rigidly connected through a rigid cross beam 2-1-10, the straight-circular type hinge II 2-1-13 and the straight-circular type hinge III 2-1-14 are rigidly connected through a rigid straight beam 2-1-8, and the straight-circular type hinge V2-1-16 and the straight-circular type hinge VI 2-1-17 are rigidly connected through a rigid straight beam 2-1-8.
The third concrete implementation mode: the present embodiment will be described with reference to fig. 12 to 13. This embodiment provides a long stroke high accuracy piezoelectric displacement platform of two pile arch stator module implementation modes. The structure composition and the connection mode are the same as those of the first embodiment, and the difference is that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.
The flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1, a cross beam 2-1-2, a stator mounting hole 2-1-4, a Kimi screw mounting hole 2-1-6, an elliptical hinge II 2-1-5, an elliptical hinge I2-1-11, a rigid cross beam II 2-1-20, a rigid curved beam I2-1-60, a rigid curved beam II 2-1-61, a rigid curved beam III 2-1-62 and a rigid curved beam IV 2-1-63. The driving foot 2-1-1 is located in the middle of the cross beam 2-1-2, the end of the driving foot 2-1-1 is coated with a friction material, the driving foot 2-1-1 is in line contact with a friction plane 1-1, the stator mounting hole 2-1-4 is used for fixing the flexible hinge mechanism 2-1, and the base meter screw mounting hole 2-1-6 is in threaded connection with the base meter screw 2-4 to fix the stack type piezoelectric ceramic 2-2. The rigid cross beam II 2-1-20 is located at the center of the flexible hinge mechanism 2-1, the rigid curved beam I2-1-60 and the rigid curved beam II 2-1-61 are rigidly connected through an elliptical hinge I2-1-11, the rigid curved beam III 2-1-62 and the rigid curved beam IV 2-1-63 are rigidly connected through an elliptical hinge II 2-1-5, a frame structure consisting of the rigid curved beam I2-1-60, the rigid curved beam II 2-1-61, the elliptical hinge I2-1-11 and the rigid cross beam II 2-1-20 can realize the lateral movement of the driving foot 2-1-1, and the rigid cross beam II 2-1-20, The frame-shaped structure consisting of the elliptical hinge II 2-1-5, the rigid curved beam III 2-1-62 and the rigid curved beam IV 5-1-63 can realize the lateral movement of the driving foot 2-1-1.
The fourth concrete implementation mode: the present embodiment will be described with reference to fig. 14 to 15. The embodiment provides a long-stroke high-precision piezoelectric displacement table for realizing a double-stack double-drive foot stator assembly. The structure composition and the connection mode are the same as those of the first embodiment, and the difference is that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.
The flexible hinge mechanism 2-1 is provided with an end cross beam 2-1-3, a stator mounting hole 2-1-4, a base screw mounting hole 2-1-6, a straight round hinge I2-1-9, a straight round hinge II 2-1-13, a straight round hinge III 2-1-14, a straight round hinge IV 2-1-15, a straight round hinge V2-1-16, a straight round hinge VI 2-1-17, a double driving foot 2-1-70, a straight round groove 2-1-71, a rigid straight beam IX 2-1-72, a rigid cross beam III 2-1-73 and a rigid straight beam X2-1-74. The end cross beam 2-1-3 is used for transmitting acting force of the stacked piezoelectric ceramic 2-2, and the stator mounting hole 2-1-4 is used for fixing the flexible hinge mechanism 2-1. The base meter screw mounting holes 2-1-6 and the base meter screws 2-4 are in threaded connection with the pre-tightening stacking type piezoelectric ceramics 2-2. The straight-circular hinges I2-1-9 and the straight-circular hinges IV 2-1-15 are rigidly connected through rigid cross beams III 2-1-73, the straight-circular hinges V2-1-16 and the straight-circular hinges VI 2-1-17 are rigidly connected through rigid straight beams IX 2-1-72, the straight-circular hinges II 2-1-13 and the straight-circular hinges III 2-1-14 are rigidly connected through rigid straight beams X2-1-74, and the straight-circular hinges I2-1-9, the straight-circular hinges IV 2-1-15, the rigid cross beams III 2-1-73, the straight-circular hinges I2-1-9, the rigid straight beams IX 2-1-72 and the straight-circular hinges VI 2-1-17 form a frame structure which can realize the driving of the foot 2 1-1, and the right side of the driving foot 2-1-1 can move in the left side direction, wherein the frame-shaped structure consisting of the straight circular type hinge I2-1-9, the straight circular type hinge IV 2-1-15, the rigid cross beam III 2-1-73, the straight circular type hinge II 2-1-13, the straight circular type hinge III 2-1-14 and the rigid straight beam X2-1-74 can realize the left side direction movement of the driving foot 2-1-1. The double driving feet 2-1-70 are positioned on the central axis of the end cross beam 2-1-3, and friction materials are coated at the ends of the driving feet.
The fifth concrete implementation mode: the present embodiment will be described with reference to fig. 16 to 17. The embodiment provides a long-stroke high-precision piezoelectric displacement table for realizing an asymmetric-structure stator assembly. The structure composition and the connection mode are the same as those of the first embodiment, and the difference is that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.
The flexible hinge mechanism 2-1 is made of 5052, 6061 or 7075 aluminum alloy materials, the flexible hinge mechanism 2-1 is made of an asymmetric frame structure hinge, the flexible hinge mechanism 2-1 is provided with stator mounting holes 2-1-4, the flexible hinge mechanism 2-1 can be fixed on the bearing sliding block 3 through the stator mounting holes 2-1-4, the flexible hinge mechanism 2-1 is provided with a straight-circular hinge I2-1-9, a straight-circular hinge IV 2-1-15, a straight-circular hinge V2-1-16, a straight-circular hinge VI 2-1-17, a rigid straight beam I2-1-30 and a rigid straight beam II 2-1-31, and the straight-circular hinge I2-1-9 and the straight-circular hinge IV 2-1-15 are rigidly connected through the rigid straight beam II 2-1-31 The straight-circular type hinges V2-1-16 and the straight-circular type hinges VI 2-1-17 are rigidly connected through rigid straight beams I2-1-30. The straight-round type hinge I2-1-9 and the straight-round type hingeThe hinges IV 2-1-15 have the same fillet radius value R5The straight-circular type hinges V2-1-16 and the straight-circular type hinges VI 2-1-17 have the same fillet radius value R6By adjusting the radius of the fillet R6And R5Can change the axial stiffness distribution of the drive stator 2, where R6And R5The ratio of (A) to (B) is in the range of 0.1 to 1. The flexible hinge mechanism 2-1 adopts an asymmetric frame structure, so that the rigidity of the flexible hinge mechanism is unevenly distributed along the axial direction to generate lateral displacement. The friction driving force in the slow deformation driving stage is increased, the friction resistance in the fast deformation driving stage is reduced, and the comprehensive regulation and control of the friction force can be realized. The flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1 and an end cross beam 2-1-3, the driving foot 2-1-1 is positioned in the middle of the end cross beam 2-1-3, and the end face of the driving foot 2-1-1 is correspondingly coated with a ceramic or glass fiber friction material.
The sixth specific implementation mode: the present embodiment will be described with reference to fig. 18 to 19. This embodiment provides a long stroke high accuracy piezoelectric displacement platform of chute formula stator module implementation. The structure composition and the connection mode are the same as those of the first embodiment, and the difference is that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.
The flexible hinge mechanism 2-1 is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy, the flexible hinge mechanism 2-1 is hinged by adopting an inclined groove type frame structure, the flexible hinge mechanism 2-1 is provided with stator mounting holes 2-1-4, the flexible hinge mechanism 2-1 is fixed with stator mounting threaded holes 3-2 of the bearing sliding block 3 through stator mounting screws 7, the flexible hinge mechanism 2-1 is provided with rigid straight beams VII 2-1-42 and rigid straight beams VIII 2-1-43, the flexible hinge mechanism 2-1 is provided with straight circular hinges II 2-1-13, straight circular hinges III 2-1-14, straight circular hinges V2-1-16 and straight circular hinges VI 2-1-17, the straight circular hinges II 2-1-13 and straight circular hinges III 2-1-14 are rigidly connected through rigid straight beams II 2-1-43, the straight circular hinges 2-1-16 and straight circular hinges III 2-1-14 are rigidly connected through rigid straight circular beams 35VIII 2-1-43, and the straight circular hinges 2-1-16 and the straight circular hinges III 2-1-43 are rigidly connected through rigid straight circular beams 3542-III hinges 2-43, and the rigid straight circular hinges are rigidly connected through straight circular hinges 2-III-1Rigid straight beam VII 2The widths of the-1-42 and the rigid straight beams VIII 2-1-43 are L2Thickness B, wherein L2/L1The value range is 1/6-1/2, B/L1The value range is 0.5-1, the flexible hinge mechanism 2-1 can be ensured to have displacement amplification capacity, and L is adopted in the embodiment1=13mm，L2=2.5mm, B =7 mm. The straight-circular type hinges II 2-1-13, the straight-circular type hinges III 2-1-14, the straight-circular type hinges V2-1-16 and the straight-circular type hinges VI 2-1-17 have the same fillet radius value R7Wherein R is7/L1The value range is 1/60-1/12. the flexible hinge mechanism 2-1 is provided with inclined grooves 2-1-40, the number of the inclined grooves 2-1-40 is X, and the height is L3Width of C1An included angle with the vertical direction of α, wherein X is more than or equal to 1, L3/C1The value range is 1-8, C1/L1The included angle α in the embodiment is 15 degrees, the number X of the inclined grooves 2-1-40 is 5, the flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1 and a thickening cross beam 2-1-41, the driving foot 2-1-1 is located in the middle of the thickening cross beam 2-1-41, a sawtooth wave electrical signal excites the stacked piezoelectric ceramic 2-2 to generate output force, the output force is transmitted to the driving foot 2-1-1 through the inclined grooves 2-1-40, the inclined grooves 2-1-40 and the driving foot 2-1-1 are unevenly distributed along axial rigidity to generate lateral displacement, the friction driving force in the slow deformation driving stage is increased, the friction resistance in the fast deformation driving stage is reduced, comprehensive regulation and control on the friction force can be achieved, and ceramic or glass fiber friction materials are correspondingly coated on the end face of the driving foot 2-1-1.
The seventh embodiment: the present embodiment will be described with reference to fig. 20, and provides a specific embodiment of a method for driving a long-stroke high-precision piezoelectric displacement stage, which is as follows.
The driving method is realized by adopting a composite excitation electric signal, the composite excitation electric signal comprises a friction regulation wave and a driving wave, the friction regulation wave is compositely superposed on a rapid electrifying stage of the driving wave, the driving stator is excited to be in a micro-pair high-frequency resonance state in a rapid deformation stage, and the friction reduction effect is reduced based on ultrasoundThe frictional resistance between the driving stator and the double-row crossed roller guide rail in the rapid deformation stage should be reduced. The driving wave is a sawtooth wave, and the friction regulation wave is a sine wave. Wherein the period of the sawtooth wave is T1Excitation voltage amplitude of V1Symmetry is S and sine wave period is T2Excitation voltage amplitude of V2The periodic ratio of sawtooth wave to sine wave is T1/T2= 100-20000, and the ratio of the excitation voltage amplitudes is V1/V2=2~6。
The working principle is as follows: stack-shaped piezoelectric ceramics arranged in the long-stroke high-precision piezoelectric displacement platform drive the stator flexible hinge mechanism to deform under the excitation of sawtooth wave electric signals. When the flexible hinge is deformed slowly, the friction plane between the stator driving foot and the fixed base is static friction force and does not move relatively, the flexible hinge mechanism drives the bearing slide block to move for a short distance under the reaction force of the friction plane, when the flexible hinge is deformed rapidly, the friction plane between the stator driving foot and the fixed base is dynamic friction force, and at the moment, the bearing slide block continues to keep the original state due to the inertia effect. After the flexible hinge is slowly deformed and quickly deformed, the bearing slide block moves forwards for a certain distance, the bearing slide block can move quickly and in a large stroke by accumulating the steps, the movement direction of the bearing slide block can be changed by changing the symmetry of the sawtooth waves, and the bidirectional movement is realized.
In summary, the invention provides a long-stroke high-precision piezoelectric displacement table, which utilizes the relationship between the inertial stick-slip principle and the reaction force between objects to self-drive a bearing slide block provided with a stator; the structural method can effectively solve the technical problems of unstable motion output, weak bearing capacity and the like caused by uneven stress of the rotor, and obviously improves the mechanical output performance of the piezoelectric displacement platform. The self-driven large-stroke precise piezoelectric displacement platform has the characteristics of simple and compact structure, easiness in adjustment, high positioning precision, large stroke, high load and good stability, and is suitable for being applied to the fields of micro-nano operation, semiconductor processing, precise optical instruments, biological micro-operation and the like with high positioning precision and harsh environmental requirements.

Claims (6)

1. A long-stroke high-precision piezoelectric displacement platform is an improved inclined ladder type stator assembly implementation mode and comprises a fixed base (1), a driving stator (2), a bearing slide block (3), a top cover (4), a guide rail (5), a thread pair (6), a stator mounting screw (7), a top cover mounting screw (8) and a guide rail mounting screw (9), wherein the guide rail (5) is mounted on the fixed base (1) through the guide rail mounting screw (9), the bearing slide block (3) is mounted on the guide rail (5) in a sliding contact mode, the driving stator (2) is mounted on the bearing slide block (3) through the stator mounting screw (7), the top cover (4) is mounted on the bearing slide block (3) through the top cover mounting screw (8), the thread pair (6) is mounted and fixed on the bearing slide block (3) through gluing, the fixed base (1) adopts a structure in a shape of a L', the fixed base (1) comprises a friction plane (1-1), a guide rail mounting hole (1-2) and a guide rail mounting screw hole (3), the guide rail mounting screw hole (3) is used for mounting the guide rail (3), the guide rail mounting screw hole (3) and the guide rail mounting screw hole (3) is used for mounting, the guide rail mounting screw hole (3) is used for mounting the guide rail mounting screw hole (3), the guide rail mounting screw mounting the guide rail mounting screw mounting hole (3), the guide rail mounting screw mounting hole (3) is used for mounting 3), the guide rail mounting hole (3), the guide rail mounting hole mounting screw mounting 3), the guide rail mounting screw mounting hole mounting 3) is used for mounting 3), the guide rail mounting screw mounting holes (3) and the guide rail mounting screw mounting holes, the guide rail mounting screw mounting holes (3), the guide rail mounting screw mounting 3), the guide rail mounting holes (3) and the guide rail mounting screw mounting holes (3) and the guide rail mountingThe rail connecting surface (3-7) is contacted with the rail (5-3); the driving stator (2) comprises a flexible hinge mechanism (2-1), stacked piezoelectric ceramics (2-2), an adjusting gasket (2-3) and a base meter screw (2-4); the stacked piezoelectric ceramics (2-2) are fixed in the flexible hinge mechanism (2-1) through an adjusting gasket (2-3) and a base meter screw (2-4); the flexible hinge mechanism (2-1) is provided with a driving foot (2-1-1), a stator mounting hole (2-1-4), a base meter screw mounting hole (2-1-6), a straight round type hinge II (2-1-13), a straight round type hinge III (2-1-14), a straight round type hinge VI (2-1-17), an improved inclined ladder beam (2-1-23), an asymmetric cross beam (2-1-24), a rigid straight beam VII (2-1-42) and a rigid straight beam VIII (2-1-43); the straight-circular type hinge III (2-1-14) and the straight-circular type hinge II (2-1-13) are rigidly connected through a rigid straight beam VIII (2-1-43), the straight-circular type hinge VI (2-1-17) is rigidly connected with the bottom end of the rigid straight beam VII (2-1-42), and the straight-circular type hinge III (2-1-14) and the improved inclined ladder beam (2-1-23) are rigidly connected through an asymmetric cross beam (2-1-24); the driving foot (2-1-1) and the friction plane (1-1) are in line contact, the stator mounting hole (2-1-4) is in threaded connection with the stator threaded hole (3-2) through a stator mounting screw (7), and the base meter screw mounting hole (2-1-6) is matched with the base meter screw (2-4) in a threaded manner; the thread pair (6) is a precise thread pair, and the thread pair (6) comprises a nut base body (6-1), a locking nut (6-2) and a bolt (6-3); the nut base body (6-1) is fixed on the thread pair fixing hole (3-3), and the locking nut (6-2) is placed at the tail end of the bolt (6-3); the processing material of the top cover (4) is aluminum alloy, and the top cover (4) comprises a top cover upper surface (4-1), a through hole (4-2) and a top cover mounting hole (4-3); the top cover mounting hole (4-3) is in threaded connection with the top cover threaded hole (3-4) through a top cover mounting screw (8); the flexible hinge mechanism (2-1) of the driving stator (2) is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material; the adjusting shim (2-3) is made of a tungsten steel sheet material; the guide rail (5) is made of stainless steel material; improved inclined ladder beam (2) of the driving stator (2) ((2-1-23) is provided with a long side, a short side and a bevel side, wherein the length of the long side is L, the length of the short side is M, the length of the bevel side is N, and the included angle between the bevel side and the short side isθThe driving stator is characterized in that the ratio of a long side L to a short side M is K = L/M, wherein the value range of K is 1-7, and a right-circular hinge III (2-1-14), a right-circular hinge VI (2-1-17) and a right-circular hinge II (2-1-13) of the driving stator (2) have the same fillet radius value R1，R1The value range of (A) is 0.1-1.2 mm; the thickness of the friction plane (1-1) iseHeight ofh，The material is stainless steel and is characterized by the thickness ofhAndeis S =h/eWherein the value of S is less than 20; the thickness of the bearing slide block (3) isc，cThe value range of (A) is 3-6 mm; the stacked piezoelectric ceramics (2-2) are fixed in the flexible hinge mechanism (2-1) through an adjusting gasket (2-3) and a base meter screw (2-4); the flexible hinge mechanism (2-1) is provided with a driving foot (2-1-1), a cross beam (2-1-2), a stator mounting hole (2-1-4), a base meter screw mounting hole (2-1-6), a rigid straight beam (2-1-8), a straight-circular hinge I (2-1-9), a rigid cross beam (2-1-10), a straight-circular hinge II (2-1-13), a straight-circular hinge III (2-1-14), a straight-circular hinge IV (2-1-15), a straight-circular hinge V (2-1-16) and a straight-circular hinge VI (2-1-17); the driving foot (2-1-1) is positioned in the middle of the cross beam (2-1-2), the driving foot (2-1-1) is in line contact with the friction plane (1-1), the surface of the driving foot (2-1-1) is coated with friction materials, the straight round type hinge I (2-1-9) and the straight round type hinge IV (2-1-15) are rigidly connected through a rigid cross beam (2-1-10), the straight-circular type hinges II (2-1-13) and the straight-circular type hinges III (2-1-14) are rigidly connected through rigid straight beams (2-1-8), the straight-circular type hinge V (2-1-16) and the straight-circular type hinge VI (2-1-17) are rigidly connected through a rigid straight beam (2-1-8).
2. A long stroke high precision piezoelectric displacement stage according to claim 1, wherein: the long-stroke high-precision piezoelectric displacement platform is realized by a double-stack arch stator assembly, wherein a flexible hinge mechanism (2-1) is provided with a driving foot (2-1-1), a cross beam (2-1-2), a stator mounting hole (2-1-4), a base meter screw mounting hole (2-1-6), an elliptical hinge II (2-1-5), an elliptical hinge I (2-1-11), a rigid cross beam II (2-1-20), a rigid curved beam I (2-1-60), a rigid curved beam II (2-1-61), a rigid curved beam III (2-1-62) and a rigid curved beam IV (2-1-63); the driving foot (2-1-1) is located in the middle of the cross beam (2-1-2), the end of the driving foot (2-1-1) is coated with a friction material, the driving foot (2-1-1) is in line contact with a friction plane (1-1), the stator mounting hole (2-1-4) is used for fixing the flexible hinge mechanism (2-1), and the base meter screw mounting hole (2-1-6) is in threaded connection with the base meter screw (2-4) to fix the stacked piezoelectric ceramic (2-2); the rigid cross beam II (2-1-20) is positioned at the center of the flexible hinge mechanism (2-1), the rigid curved beam I (2-1-60) and the rigid curved beam II (2-1-61) are rigidly connected through the elliptical hinge I (2-1-11), the rigid curved beam III (2-1-62) and the rigid curved beam IV (2-1-63) are rigidly connected through the elliptical hinge II (2-1-5), and the frame structure formed by the rigid curved beam I (2-1-60), the rigid curved beam II (2-1-61), the elliptical hinge I (2-1-11) and the rigid cross beam II (2-1-20) can realize the lateral movement of the driving foot (2-1-1), the lateral movement of the driving foot (2-1-1) can be realized by a frame structure consisting of the rigid cross beam II (2-1-20), the elliptical hinge II (2-1-5), the rigid curved beam III (2-1-62) and the rigid curved beam IV (2-1-63).
3. A long stroke high precision piezoelectric displacement stage according to claim 1, wherein: the flexible hinge mechanism (2-1) is provided with an end cross beam (2-1-3), a stator mounting hole (2-1-4), a base screw mounting hole (2-1-6), a straight-circular hinge I (2-1-9), a straight-circular hinge II (2-1-13), a straight-circular hinge III (2-1-14), a straight-circular hinge IV (2-1-15), a straight-circular hinge V (2-1-16), a straight-circular hinge VI (2-1-17), a double-drive foot (2-1-70), a straight-circular groove (2-1-71), a rigid straight beam IX (2-1-72), Rigid cross beams III (2-1-73) and rigid straight beams X (2-1-74); the base-meter screw mounting holes (2-1-6) and the base-meter screws (2-4) are in threaded connection to pre-tighten the stacked piezoelectric ceramics (2-2), the straight-circular hinges I (2-1-9) and the straight-circular hinges IV (2-1-15) are in rigid connection through rigid cross beams III (2-1-73), the straight-circular hinges V (2-1-16) and the straight-circular hinges VI (2-1-17) are in rigid connection through rigid straight beams IX (2-1-72), the straight-circular hinges II (2-1-13) and the straight-circular hinges III (2-1-14) are in rigid connection through rigid straight beams X (2-1-74), and the double driving feet (2-1-70) are located on the central axis of the end cross beams (2-1-3), the end of the driving foot is coated with a friction material.
4. A long stroke high precision piezoelectric displacement stage according to claim 1, wherein: the long-stroke high-precision piezoelectric displacement platform adopts an asymmetrical structure stator assembly realization mode, a flexible hinge mechanism (2-1) adopts 5052, 6061 or 7075 aluminum alloy materials, the flexible hinge mechanism (2-1) adopts an asymmetrical frame structure hinge, the flexible hinge mechanism (2-1) is provided with a stator mounting hole (2-1-4), the flexible hinge mechanism (2-1) can be fixed on a bearing slide block (3) through the stator mounting hole (2-1-4), the flexible hinge mechanism (2-1) is provided with a straight circular hinge I (2-1-9), a straight circular hinge IV (2-1-15), a straight circular hinge V (2-1-16), a straight circular hinge VI (2-1-17), a rigid straight beam I (2-1-30) and a rigid straight beam II (2-1-31), the straight-circular type hinge I (2-1-9) and the straight-circular type hinge IV (2-1-15) are rigidly connected through a rigid straight beam II (2-1-31), the straight-circular type hinge V (2-1-16) and the straight-circular type hinge VI (2-1-17) are rigidly connected through a rigid straight beam I (2-1-30), the flexible hinge mechanism (2-1) is provided with a driving foot (2-1-1) and an end cross beam (2-1-3), the driving foot (2-1-1) is located in the middle of the end cross beam (2-1-3), and the end face of the driving foot (2-1-1) is correspondingly coated with ceramic or glass fiber friction materials; the straight round type hinge I (2-1-9) and the straight round type hinge IV (2-1-15) are provided withWith the same fillet radius value R5The right-circular type hinge V (2-1-16) and the right-circular type hinge VI (2-1-17) have the same fillet radius value R6By adjusting the radius of the fillet R6And R5Can change the axial stiffness distribution of the driving stator (2), wherein R6And R5The ratio of (A) to (B) is in the range of 0.1 to 1.
5. The long-stroke high-precision piezoelectric displacement platform as claimed in claim 1, which is a long-stroke high-precision piezoelectric displacement platform implemented by an inclined groove type stator assembly, the flexible hinge mechanism (2-1) is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35AA titanium alloy or Ti-13 titanium alloy, the flexible hinge mechanism (2-1) is hinged by an inclined groove type frame structure, the flexible hinge mechanism (2-1) is provided with a stator mounting hole (2-1-4), the flexible hinge mechanism (2-1) and a stator mounting threaded hole (3-2) of a bearing sliding block (3) are fixed through a stator mounting screw (7), the flexible hinge mechanism (2-1) is provided with a rigid straight beam VII (2-1-42) and a rigid straight beam VIII (2-1-43), the flexible hinge mechanism (2-1-1) is provided with a straight circular hinge II (2-1-13), a straight hinge (2-1-14), a straight hinge V (2-1-16) and a straight circular hinge III (2-1-13), the rigid straight beam III-1-13) and the rigid straight beam III-13-6-V-2 are connected through a rigid straight beam II, a rigid straight beam II-1-13 hinge (2-13-III) and a rigid straight hinge (2-13-III) or V-13-III hinge (1-III) and a rigid straight hinge (1-13-V-13) and a rigid straight hinge (1-13) and a rigid hinge, the rigid straight hinge II, the rigid straight hinge 2-13-2-III hinge (1-2 hinge, the rigid straight hinge, a rigid straight hinge, the rigid hinge, 2-6) is connected through a rigid straight hinge, the rigid straight1The widths of the rigid straight beams VII (2-1-42) and VIII (2-1-43) are L2Thickness B, wherein L2/L1The value range is 1/6-1/2, B/L1The value range is 0.5-1; the straight-circular type hinge II (2-1-13), the straight-circular type hinge III (2-1-14) and the straight-circular type hinge V (2)-1-16) and the right and circular hinges VI (2-1-17) have the same value of the radius R of the rounded corner7Wherein R is7/L1The value range is 1/60-1/12, the flexible hinge mechanism (2-1) is provided with inclined grooves (2-1-40), the number of the inclined grooves (2-1-40) is X, and the height is L3Width of C1An included angle with the vertical direction of α, wherein X is more than or equal to 1, L3/C1The value range is 1-8, C1/L1The range of the included angle α is 10-80 degrees, and the range of the included angle α is 0.01-0.1.
6. A driving method of a long-stroke high-precision piezoelectric displacement platform is realized based on the long-stroke high-precision piezoelectric displacement platform as claimed in claim 1; the driving method is realized by adopting a composite excitation electric signal, wherein the composite excitation electric signal comprises a friction regulation wave and a driving wave, the friction regulation wave is compositely superposed on a rapid electrifying stage of the driving wave, the driving stator is excited to be in a micro-pair high-frequency resonance state in a rapid deformation stage, and the friction resistance between the driving stator and the double-row crossed roller guide rail in the rapid deformation stage is reduced based on an ultrasonic antifriction effect; the driving wave is a sawtooth wave, and the friction regulation wave is a sine wave; wherein the period of the sawtooth wave is T1Excitation voltage amplitude of V1Symmetry is S and sine wave period is T2Excitation voltage amplitude of V2The periodic ratio of sawtooth wave to sine wave is T1/T2= 100-20000, and the ratio of the excitation voltage amplitudes is V1/V2=2~6。
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