CN101860256B - High-precision adjustable-speed linear micro-displacement work table - Google Patents
High-precision adjustable-speed linear micro-displacement work table Download PDFInfo
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- CN101860256B CN101860256B CN2010101413272A CN201010141327A CN101860256B CN 101860256 B CN101860256 B CN 101860256B CN 2010101413272 A CN2010101413272 A CN 2010101413272A CN 201010141327 A CN201010141327 A CN 201010141327A CN 101860256 B CN101860256 B CN 101860256B
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Abstract
The invention discloses a high-precision adjustable-speed linear micro-displacement work table, belonging to the technical field of ultra-precise manufacture and detection, and in particular relating to a micro-displacement work table which realizes the high precision and the speed adjustment through the inverse piezoelectric effect and the friction micro-drive technology. The work table is provided with a micro-drive unit, a bearing plate, a guiding device and a basal body. The micro-drive unit is formed by combining a first piezoelectric ceramic drive, a second piezoelectric ceramic drive, a third piezoelectric ceramic drive, a first adjusting sheet, a second adjusting sheet, a third adjusting sheet, a plane triple flexible structure and a friction contact angle, wherein the first piezoelectric ceramic drive, the second piezoelectric ceramic drive and the third piezoelectric ceramic drive are parallel to each other and are coplanarly arranged; and a left ellipse flexible structure, a right ellipse flexible structure and a single-steady state flexible structure in the plane triple flexible structure and a four-footed flexible support beam are centrally and symmetrically arranged. Through the composite motion of the piezoelectric drive and the plane triple flexible structure, the invention realizes the micro-displacement technology with high precision, large stroke (theoretically maximum stroke without limitation), large load, adjustable step pitch and response frequency, and high electro-mechanical transformation efficiency, and can meet different use requirements in fields of precise manufacture, detection and micro-operation.
Description
Technical field
The invention belongs to super hot investment casting and detection technique field, particularly inverse piezoelectric effect and the little Driving technique of friction realize the micro-displacement work table of high accuracy, adjustable speed.
Background technology
Adopt piezoceramic material to realize that micrometric displacement drives more employing PZT piezoelectric ceramic both at home and abroad much more more and more.With the bonding driver of processing of piezoceramic material sheet lamination, have response frequency height, advantage that degree of regulation is high, technical comparatively ripe, be applied to little driving occasion of high-frequency dynamic adjustments, effect is fine; But its stroke is very little, and no self-locking usually can not be to the adjustment of fine motion step pitch, and industrial Precision Machining range of application is restricted.Existing micro displacement workbench is mainly with double-decker, and promptly thickness is two-layer, and thin workbench is by Piezoelectric Ceramic, and thick workbench is by motor-driven, and each two cover control system of this thickness make that itself is too complicated, cost is too high.The model that Germany PI company released in 2006 is to have realized the big stroke rectilinear motion of quick response high accuracy in the M674 piezoelectric ceramic ultrasonic linear electric motors, but its execution velocity of displacement is very fast, and it is less to drive load, and maximum load is 7N only.Be difficult in industry practice is produced, using in the required big at a slow speed load.The big stroke bidirectional micro displacement workbench of studying at home of double-feet, patent No. ZL98243475.8 coordinated movement of various economic factors control is still complicated, and the load that can bear is limited.The stroke quantitative change of novel big displacement precision micro-worktable is big, patent No. ZL02245100.5, but scope still is confined in the little stroke.Based on the linear type ultrasound motor of rectangular piezoelectric ceramic thin plate in plane vibration, patent No. ZL01127038.1 has solved the restriction of travel range, but is limited by drive principle, and load is little.Therefore, in the face of existing situation, still a kind of high accuracy of demand, travel range are big, surpass 100mm, and can adjust translational speed, Jogging technology that load is big.
Summary of the invention
The technical barrier that the present invention will solve is: guaranteeing that piezoceramic material drives under the advantage of high accuracy, fast-response; Weak point to existing micro-displacement work table; The high fine motion system of, advantages of small volume simple through plane three compliant mechanism implementation structures, electromechanical conversion efficiency is to produce big stroke (range is unrestricted in theory), adjustable speed and response fast; And can carry the micrometric displacement of big load, reduce the control complexity simultaneously as far as possible.
The technical scheme that the present invention adopts is: a kind of high-precision adjustable-speed linear micro-displacement work table has little driver element 3, loading plate 2,4, guider 6,7 and matrix 9; Little driver element 3 is by being parallel to each other and first, second, third piezoelectric ceramic actuator, 11,14,16, first, second, third trimmers 12,13,15 of co-planar arrangement, and plane three compliant structures 10 combine with friction feeler 17; Wherein: first piezoelectric ceramic actuator 11 and first trimmer 12, the 3rd piezoelectric ceramic actuator 16 and the 3rd trimmer 15 be corresponding respectively to be installed among the left and right oval compliant structure c, f of plane three compliant structures 10, and second piezoelectric ceramic actuator 14 and second trimmer 13 are placed among the monostable compliant structure d; Friction feeler 17 is cemented in the end on three compliant structures, 10 central shafts of plane; Oval compliant structure c in three compliant structures 10 of plane, f and monostable compliant structure d, the four-footed flexible support beam e distribution that is centrosymmetric.Last loading plate 2 is connected to down loading plate 4 with little driver element 3 through tight fixed bolt 1, and following loading plate 4 is connected on the guider slide block 7 through holding screw 5, and guider guide rail 6 usefulness adjustment screw 8 will be connected on the L mold base loading end a; Through the adjustment of adjustment screw 8, make friction feeler 17 vertically opposite and keep 5 μ m spacings with L mold base rubbing surface b.
The present invention has following remarkable result: according to above technical scheme; Utilize friction-driven and plane three compliant mechanisms to realize big stroke, high-precision micrometric displacement well; It is vertical with actuating force direction antarafacial to carry direction; Reduced the effect of load size to actuating force, bearing capacity is further enhanced.Simultaneously, change the piezoelectric actuator controlling schemes, can realize the micrometric displacement action that big or small step pitch is different, frequency is different.The range of application of above effect explanation micro-displacement work table further enlarges, and the workbench of the two platform compound modes of instead thickness reduces equipment cost under a stable condition.
Description of drawings
Fig. 1 is a high-precision adjustable-speed linear micro-displacement work table assembling sketch map, and Fig. 2 is the vertical view of micro-displacement work table, and Fig. 3 is the A-A sectional view of micro-displacement work table, and Fig. 4 is plane three a compliant mechanism layer sketch map.Wherein: 1-tight fixed bolt, the last loading plate of 2-, the little driver element of 3-, loading plate under the 4-, 5-holding screw; The 6-guide rail, the 7-slide block, 8-adjusts screw, 9-L mold base, 10-plane three compliant structures; 11-first piezoelectric ceramic actuator, 12-first trimmer, 13-second piezoelectric ceramic actuator, 14-second trimmer; 15-the 3rd piezoelectric ceramic actuator, 16-the 3rd trimmer, the 17-feeler that rubs, a-L mold base loading end; B-L mold base rubbing surface, the oval compliant structure in a c-left side, d-monostable compliant structure, the right oval compliant structure of f-; U1-first piezoelectric actuator applies voltage, and U2-second piezoelectric actuator applies voltage, and U3-the 3rd piezoelectric actuator applies voltage, XY-plane coordinates axle.
Embodiment
Specify embodiment of the present invention according to technical scheme of the present invention and accompanying drawing:
As shown in Figure 4; The two groups of piezoelectric ceramic actuators 11,16 and first trimmer 12, corresponding respectively left and right oval compliant structure c, the f that puts into plane three compliant structures 10 of the 3rd trimmer 15; Another group piezoelectric ceramic actuator 14 and second trimmer 13 are placed on the symmetry axis position together, the pretightning force that the submissive hinge arrangement d generation of oval flexible structure c, f and monostable that makes plane compliant structure 10 through trimmer 12,13,15 respectively is suitable to piezoelectric ceramic actuator 11,14,16.The fixed friction feeler 17 of a side position on three compliant structures, 10 central shafts of plane, friction feeler 17 is processed by high-abrasive material.Friction feeler 17 is arranged in the directly monostable compliant structure d of many groups sheet type symmetrical distribution of driving of second piezoelectric ceramic actuator; The feeler 17 that can guarantee to rub only has the straight-line degree of freedom of Y direction; Avoid producing torsional shear power, and after 17 effects of friction feeler, the reduction with good effect is arranged piezoelectric actuator 14.Guider guide rail 6 usefulness adjustment screw 8 will be connected on the L mold base loading end a; Through 8 adjustment of adjustment screw, make friction feeler 17 vertically opposite, and keep 5 μ m spacings with L mold base rubbing surface b.
Oval compliant structure c, f are the central shaft symmetric design, and the pretension distortion of X, Y direction not only can be provided, and have also solved the piezoelectric actuator distortion conflict that produces in the action.The first and the 3rd piezoelectric ceramic actuator is installed on the major diameter of oval compliant mechanism; Changed the driver action direction, reduced to take up room, made Working table structure compacter; Also strengthen the stationarity of action, improved the displacement accuracy on the micro displacement workbench directions X.As shown in Figure 1; With adjustment screw 8 guider guide rail 6 is connected on the L mold base loading end a; Again guider slide block 7 is cooperated installation with guide rail 6; To descend loading plate 4 to be connected on the slide block 7 of accurate guider with holding screw 5 fixing hole shown in the figure positions; To go up loading plate 2 with tight fixed bolt 1 again and be connected with following loading plate 4, and make friction feeler 17 vertically opposite and keep 1～10 μ m gap through adjustment screw 8, and then form micro-displacement work table with L mold base rubbing surface b with little driver element 3.Micro-displacement work table loads positive half period sinusoidal voltage U1=U on first piezoelectric ceramic actuator 11 when work
m| sin ω t| loads square-wave voltage simultaneously on second piezoelectric ceramic actuator 14
N=0,1,2,3.Drive elongation when first Piezoelectric Driving and cause left oval flexible structure c distortion; The submissive hinge arrangement d of monostable produces maximum micrometric displacement in the X negative direction, and the feeler 17 that rubs this moment is producing displacement on the Y positive direction under the effect of second piezoelectric actuator, and friction feeler 17 acts on L mold base rubbing surface b and produces normal pressure; As shown in Figure 2; When treating that the piezoelectric ceramic actuator driving voltage is zero, whole flat produces step-wise displacement on the X negative direction, and second piezoelectric ceramic actuator, 14 driving voltages are zero afterwards; The friction feeler resets, and periodically moves the X negative direction micrometric displacement of having realized workbench with this.In like manner on the 3rd piezoelectric ceramic, act on positive half period sinusoidal voltage U3=U
m| sin ω t|, the same square-wave voltage of effect can produce along the displacement of X positive direction on piezoelectric ceramic actuator 2 simultaneously.Voltage U in the experiment
mCan between 100～1000Hz, adjust variation at 50～200V and ω, then produce the micrometric displacement of different frequency and precision.The actuating force maximum that produces because of piezoelectric ceramic actuator simultaneously can reach 800N, and the maximum side friction resistance of generation can reach 100N, can bear maximum longitudinal loading and reach 10kN.The table stroke scope can be set according to service condition.
The present invention can design the micro-displacement work table of realizing different accuracy and bearing capacity according to the difference of service condition, is applied to the occasion of different demands.Can realize the multidimensional action through one-dimensional micro-displacement workbench combination of the present invention more than two.Both can be in precise machining equipment cooperate the processing axle to realize accurately location, Compound Machining, also can measure, realize multiple degrees of freedom control in the scanner uni micomanipulator as displacement work table.
Claims (1)
1. high-precision adjustable-speed linear micro-displacement work table; Have little driver element (3), loading plate (2,4), guider (6,7) and matrix (9); It is characterized in that little driver element (3) is by being parallel to each other and first, second, third piezoelectric ceramic actuator (11,14,16) of co-planar arrangement, first, second, third trimmer (12,13,15), plane three compliant structures (10) and friction feeler (17) combine; Wherein: first piezoelectric ceramic actuator (11) and first trimmer (12), the 3rd piezoelectric ceramic actuator (16) and the 3rd trimmer (15) correspondence respectively are installed in the left and right oval compliant structure (c, f) of plane three compliant structures (10), and second piezoelectric ceramic actuator (14) and second trimmer (13) are placed in the monostable compliant structure (d); Friction feeler (17) is cemented in the end of plane three compliant structures (10) central shaft; The distribution that is centrosymmetric of left and right oval compliant structure in plane three compliant structures (10) (c, f) and monostable compliant structure (d), four-footed flexible support beam (e); Last loading plate (2) and little driver element (3) are connected to down on the loading plate (4) through tight fixed bolt (1); Following loading plate (4) is connected on the guider slide block (7) through holding screw (5), with adjustment screw (8) guider guide rail (6) is connected on the L mold base loading end (a); Through adjustment screw (8) adjustment, make friction feeler (17) and L mold base rubbing surface (b) vertically opposite, and keep 5 μ m spacings.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101413272A CN101860256B (en) | 2010-04-02 | 2010-04-02 | High-precision adjustable-speed linear micro-displacement work table |
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| CN2010101413272A CN101860256B (en) | 2010-04-02 | 2010-04-02 | High-precision adjustable-speed linear micro-displacement work table |
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| CN101860256B true CN101860256B (en) | 2012-07-04 |
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| CN107622786B (en) * | 2017-11-08 | 2020-10-27 | 杭州电子科技大学 | Two-stage piezoelectric driving micro-nano positioning platform |
| CN108062968B (en) * | 2018-01-12 | 2020-07-24 | 长春工业大学 | Long-stroke high-precision piezoelectric displacement table and driving method thereof |
| CN109347253B (en) * | 2018-12-13 | 2023-08-11 | 南京邮电大学 | Total stroke and stepping precision adjustable micro-displacement reducer based on single chip microcomputer control |
| CN109586611B (en) * | 2019-01-23 | 2023-09-08 | 吉林大学 | Alternate stepping piezoelectric stick-slip driver with anisotropic friction surface |
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| DE10126848B4 (en) * | 2001-06-01 | 2006-02-02 | Siemens Ag | production machine |
| CN100376361C (en) * | 2005-01-11 | 2008-03-26 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN100566116C (en) * | 2006-03-15 | 2009-12-02 | 哈尔滨工业大学 | Piezoelectric vibrator array and adopt the micromotion platform of the planar three freedom of this array |
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