CN108048795A - 一种机械零件表面镀膜工艺 - Google Patents

一种机械零件表面镀膜工艺 Download PDF

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CN108048795A
CN108048795A CN201711438318.8A CN201711438318A CN108048795A CN 108048795 A CN108048795 A CN 108048795A CN 201711438318 A CN201711438318 A CN 201711438318A CN 108048795 A CN108048795 A CN 108048795A
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coating process
machinery part
surface coating
magnetic body
body structure
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余历军
董忍娥
刘明霞
叶芳霞
王超奇
徐东东
孟子龙
窦浩
陈钊
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Xian University
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Xian University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0652Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明公开了一种机械零件表面镀膜工艺,包括底层膜、中间膜和表面膜,采用具备设计图案的磁性体结构,将磁性体结构贴覆于钢质机械零件表面进行遮蔽;零件置于真空室内采用离子源进行表面清洁;在零件表面用电子束蒸发镀膜方式进行底层膜镀膜;在底层膜表面沉积中间膜;在中间膜表面沉积表面膜;将零件取出,去除磁性体结构,再重复上述工艺即可完成镀膜工艺。与现有技术相比,通过本发明的工艺对机械零件进行三层的镀膜工艺处理,由于采用磁性的图形结构进行遮蔽,不但能够在工件表面形成图案,无需再进行切割或雕刻形成图案,且表面镀膜能够提高钢制机械零件的耐磨性、韧性、抗氧化性,提高机械零件的使用寿命,具有推广应用的价值。

Description

一种机械零件表面镀膜工艺
技术领域
本发明涉及镀膜加工工艺,尤其涉及一种机械零件表面镀膜工艺。
背景技术
机械是指机器与机构的总称。机械就是能帮人们降低工作难度或省力的工具装置,像筷子、扫帚以及镊子一类的物品都可以被称为机械,他们是简单机械。而复杂机械就是由两种或两种以上的简单机械构成。通常把这些比较复杂的机械叫做机器。从结构和运动的观点来看,机构和机器并无区别,泛称为机械。在机械零件中,钢制的机械零件在机械设备中需要不断的运动,而且钢制的机械零件容易生锈,导致使用寿命低,且钢制的机械零件虽然硬度高,但韧性低,而且耐磨性低,存在改进空间。
发明内容
本发明的目的就在于为了解决上述问题而提供一种机械零件表面镀膜工艺。
本发明通过以下技术方案来实现上述目的:
本发明机械零件表面镀膜工艺包括底层膜、中间膜和表面膜,具体工艺包括以下步骤:
(1)提供一个待加工钢质机械零件;
(2)提供一个具备设计图案的磁性体结构;
(3)将磁性体结构贴覆于钢质机械零件表面进行遮蔽;
(4)将零件置于真空室内采用离子源进行表面清洁;
(5)在零件表面用电子束蒸发镀膜方式进行底层膜镀膜;
(6)在底层膜表面沉积中间膜;
(7)在中间膜表面沉积表面膜;
(8)将零件取出,去除磁性体结构,再重复步骤(5)至步骤(7)即可完成镀膜工艺。
进一步,所述底层膜的厚度为0.3-0.5微米。所述中间膜的厚度为0.25-0.5微米。所述表面膜的厚度为1-1.5微米。
具体地,所述底层膜由铝和铬组成,所述铝与所述铬的比例为1:0.6。所述中间膜为不锈钢材料。所述表面膜为氮化硅材料。
本发明的有益效果在于:
本发明是一种机械零件表面镀膜工艺,与现有技术相比,通过本发明的工艺对机械零件进行三层的镀膜工艺处理,由于采用磁性的图形结构进行遮蔽,不但能够在工件表面形成图案,无需再进行切割或雕刻形成图案,且表面镀膜能够提高钢制机械零件的耐磨性、韧性、抗氧化性,提高机械零件的使用寿命,具有推广应用的价值。
具体实施方式
下面对本发明作进一步说明:
本发明机械零件表面镀膜工艺包括底层膜、中间膜和表面膜,具体工艺包括以下步骤:
(1)提供一个待加工钢质机械零件;
(2)提供一个具备设计图案的磁性体结构;
(3)将磁性体结构贴覆于钢质机械零件表面进行遮蔽;
(4)将零件置于真空室内采用离子源进行表面清洁;
(5)在零件表面用电子束蒸发镀膜方式进行底层膜镀膜;
(6)在底层膜表面沉积中间膜;
(7)在中间膜表面沉积表面膜;
(8)将零件取出,去除磁性体结构,再重复步骤(5)至步骤(7)即可完成镀膜工艺。
进一步,所述底层膜的厚度为0.3-0.5微米。所述中间膜的厚度为0.25-0.5微米。所述表面膜的厚度为1-1.5微米。
具体地,所述底层膜由铝和铬组成,所述铝与所述铬的比例为1:0.6。所述中间膜为不锈钢材料。所述表面膜为氮化硅材料。
以上显示和描述了本发明的基本原理和主要特征及本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定 。

Claims (7)

1.一种机械零件表面镀膜工艺,其特征在于:包括底层膜、中间膜和表面膜,具体工艺包括以下步骤:
(1)提供一个待加工钢质机械零件;
(2)提供一个具备设计图案的磁性体结构;
(3)将磁性体结构贴覆于钢质机械零件表面进行遮蔽;
(4)将零件置于真空室内采用离子源进行表面清洁;
(5)在零件表面用电子束蒸发镀膜方式进行底层膜镀膜;
(6)在底层膜表面沉积中间膜;
(7)在中间膜表面沉积表面膜;
(8)将零件取出,去除磁性体结构,再重复步骤(5)至步骤(7)即可完成镀膜工艺。
2.根据权利要求1所述的机械零件表面镀膜工艺,其特征在于:所述底层膜的厚度为0.3-0.5微米。
3.根据权利要求1所述的机械零件表面镀膜工艺,其特征在于:所述中间膜的厚度为0.25-0.5微米。
4.根据权利要求1所述的机械零件表面镀膜工艺,其特征在于:所述表面膜的厚度为1-1.5微米。
5.根据权利要求1或2所述的机械零件表面镀膜工艺,其特征在于:所述底层膜由铝和铬组成,所述铝与所述铬的比例为1:0.6。
6.根据权利要求1或3所述的机械零件表面镀膜工艺,其特征在于:所述中间膜为不锈钢材料。
7.根据权利要求1或4所述的机械零件表面镀膜工艺,其特征在于:所述表面膜为氮化硅材料。
CN201711438318.8A 2017-12-27 2017-12-27 一种机械零件表面镀膜工艺 Pending CN108048795A (zh)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108677149A (zh) * 2018-06-23 2018-10-19 西安文理学院 一种高耐磨防腐pvd涂层工艺
CN110442009A (zh) * 2019-09-02 2019-11-12 深圳天成真空技术有限公司 一种用于手表表面的镀膜工艺及其镀膜设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1794376A (zh) * 2006-01-06 2006-06-28 浙江大学 带有溅射膜电极的电感骨架及其生产方法
CN102373407A (zh) * 2010-08-20 2012-03-14 鸿富锦精密工业(深圳)有限公司 镀膜加工方法
CN102373408A (zh) * 2010-08-25 2012-03-14 鸿富锦精密工业(深圳)有限公司 镀膜加工方法
CN104789933A (zh) * 2015-04-28 2015-07-22 重庆文理学院 一种纳米复合涂层及其沉积方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1794376A (zh) * 2006-01-06 2006-06-28 浙江大学 带有溅射膜电极的电感骨架及其生产方法
CN102373407A (zh) * 2010-08-20 2012-03-14 鸿富锦精密工业(深圳)有限公司 镀膜加工方法
CN102373408A (zh) * 2010-08-25 2012-03-14 鸿富锦精密工业(深圳)有限公司 镀膜加工方法
CN104789933A (zh) * 2015-04-28 2015-07-22 重庆文理学院 一种纳米复合涂层及其沉积方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108677149A (zh) * 2018-06-23 2018-10-19 西安文理学院 一种高耐磨防腐pvd涂层工艺
CN110442009A (zh) * 2019-09-02 2019-11-12 深圳天成真空技术有限公司 一种用于手表表面的镀膜工艺及其镀膜设备

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