CN108046210A - A kind of bionical micro-nano robot preparation method of magnetism - Google Patents

A kind of bionical micro-nano robot preparation method of magnetism Download PDF

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Publication number
CN108046210A
CN108046210A CN201711287245.7A CN201711287245A CN108046210A CN 108046210 A CN108046210 A CN 108046210A CN 201711287245 A CN201711287245 A CN 201711287245A CN 108046210 A CN108046210 A CN 108046210A
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cobalt
substrate
ptfe
copper sheet
preparation
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CN108046210B (en
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邹强
苏奇
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Tianjin University
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Tianjin University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Abstract

The present invention relates to a kind of bionical micro-nano robot preparation method of magnetism, step is as follows：Prepare polytetrafluoroethylene (PTFE) substrate, copper sheet and porous polycarbonate template；The preparation of working electrode；Prepare acidic electrolysis bath；The hole wetting of porous polycarbonate template；Cobalt nanowire and the preparation at cobalt-based bottom；Nano wire and the transfer at cobalt-based bottom；It removes copper sheet and removes porous polycarbonate template；It is combined with polytetrafluoroethylene (PTFE) substrate：After the ptfe substrate of one side and cobalt nanowire array is formed, the preparation method of opposite side is identical, forms the two-sided cobalt nanowire array based on ptfe substrate；By cutting, magnetic micro-nano robot is obtained.

Description

A kind of bionical micro-nano robot preparation method of magnetism
Technical field
The invention is related to micro-nano robot field more particularly to the magnetic micrometer robot field of field drives.
Background technology
Micro-nano robot refers to small scale robot of the scale in micro-nano rank (several nanometers to hundreds of microns), in life There is a very important potential application in the fields such as object medicine and environmental protection, such as available for micro-wound surgical operation, targeted therapy, thin Born of the same parents' operation, heavy metal analysis, contaminant degradation etc., therefore it is subject to the extensive concern of domestic and international researcher, it quickly grows in recent years.
Compared to traditional heavy-duty machines people, the working environment of micro-nano robot is located at the very low environment of Reynolds number In, object can be regarded as to be moved in a very viscous, small and slow environment, and viscous force accounts for leading role, inertia force Then it can be neglected.Under these conditions, if wanting to drive micro-nano robot, it is necessary to continuously provide power for it.But Due to its small size, power source such as battery, engine are difficult to be loaded in micro-nano robot, therefore, various Micro-nano robotically-driven mode be suggested, including from driving (from electrophoresis driving, self-diffusion swimming driving, from thermophoresis driving, gas The modes such as bubble driving) and outfield driving (magnetic field, sound field and optical drive).Since field drives mode magnetic field intensity is relatively low, and Low frequency magnetic field can penetrate biological tissue and harmless to organism, become the most promising driving of micro-nano robot field One of mode.Therefore, how to prepare under relatively low Reynolds number environment, be easy to the micro-nano machine for being driven and being controlled by external magnetic field The emphasis for becoming researchers' research of device people.
The content of the invention
It can be easy to be driven and controlled by external magnetic field under low Reynolds number environment the object of the present invention is to provide one kind Micro-nano robot, and provide the preparation method of such robot.The solution of the present invention thinking source is to unicellular organism The research of paramecium motion principle.Technical solution is as follows：
A kind of bionical micro-nano robot preparation method of magnetism, step are as follows：
(1) polytetrafluoroethylene (PTFE) substrate, copper sheet and porous polycarbonate template are prepared；
(2) preparation of working electrode：After the heating fusing of suitable martial virtue alloy, coated uniformly, then on copper sheet Porous polycarbonate template is overlying on martial virtue alloy upper surface；The copper sheet back side and side are coated using epoxide-resin glue, is ensured Cobalt ions can only deposit in porous polycarbonate form plate hole；A conducting wire, one end connection copper sheet back side are taken, the other end connects Receiving electrode presss from both sides；
(3) acidic electrolysis bath is prepared：The component of electrolyte includes：CoSO4 7H2O and H3BO3, molar concentration scope difference For 0.60-0.66M/L and 0.62-0.68M/L, and pH value is adjusted to 2.5-3.5；
(4) the hole wetting of porous polycarbonate template：Working electrode is placed in electrolyte, is made in the electrolyte Cobalt ions enters among porous polycarbonate form plate hole；
(5) preparation at cobalt nanowire and cobalt-based bottom：Platinized platinum is placed in electrolyte electrode and working electrode, two electrodes connect Power supply is connected to, the deposition of cobalt nanowire is learnt by the situation of change for monitoring deposition current, when cobalt nanowire has overflowed After porous polycarbonate form plate hole starts to deposit, and connection forms the cobalt-based bottom between each other, continue deposition until cobalt-based Base thickness degree stops deposition after reaching 5 microns；
(6) transfer at nano wire and cobalt-based bottom：Cobalt nanowire after the completion of deposition and cobalt-based bottom are taken out from electrolyte, After low temperature drying, cobalt-based bottom one side is coated into a small amount of conductive silver paste, the ptfe substrate is placed in above conductive silver paste, Placing at normal temperatures causes cobalt-based bottom to be connected firmly with ptfe substrate, obtains intermediate combination structure；
(7) remove copper sheet and remove porous polycarbonate template：70 DEG C of water-bath is carried out to above-mentioned intermediate combination structure to add Heat until the copper sheet for being covered with martial virtue alloy comes off, obtains final combining structure, the final combining structure is placed in dichloromethane In alkane solution, porous polycarbonate template is removed, obtains the cobalt nanowire, the cobalt-based bottom, the conductive silver paste and described The integral structure that ptfe substrate is linked as, so as to form the ptfe substrate of one side and cobalt nanowire array；
(8) combined with polytetrafluoroethylene (PTFE) substrate：After the ptfe substrate of one side and cobalt nanowire array is formed, separately The preparation method of one side is identical, forms the two-sided cobalt nanowire array based on ptfe substrate；
(9) by cutting, magnetic micro-nano robot is obtained.
Compared with prior art, the micro-nano robot be easy under low Reynolds number environment by external electromagnetic field driving and Control has expanded micro-nano robot in biomedical and field of environment protection application range.
Description of the drawings
In order to make the content of the present invention more clearly understood, below according to specific embodiments of the present invention and combine Attached drawing, the present invention is described in further detail, wherein：
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is unicellular organism paramecium cilium schematic diagram.
Reference numeral：101- cobalt-baseds bottom；102- conductive silver pastes；103- polytetrafluoroethylene (PTFE) substrates；104- cobalt nanowires；201- Paramecium cilium；202- paramecium bodies.
Specific embodiment
The present invention provides one kind and can be easy to be driven and controlled micro-nano by external magnetic field under low Reynolds number environment Robot and preparation method thereof, including step：
(1) cleaning of polytetrafluoroethylene (PTFE) substrate and copper sheet substrate：It needs to use 200mL deionizations successively before use Water, 100mL acetone, 100mL absolute ethyl alcohols and 200mL deionized waters are to polytetrafluoroethylene (PTFE) substrate (length of side 20mm) and red copper chip base (length of side 20mm) is cleaned at bottom, spare in 30 DEG C of low temperature dryings afterwards.
(2) preparation of working electrode：Suitable martial virtue alloy (70 DEG C of fusing point) is placed on copper sheet, is put into baking oven jointly In be heated to its fusing point (70 DEG C), continue under this temperature environment, it is using quartz glass edge that martial virtue alloy-coated is uniform, so Porous polycarbonate template (circular, aperture 200nm, diameter 19mm) is overlying on martial virtue alloy upper surface afterwards, while described in guarantee Porous polycarbonate template and the martial virtue alloy have it is good contact, the lower surface of porous polycarbonate template can be by the martial virtue Alloy all covers.Take a fine copper wire (diameter 0.8mm), one end connection copper sheet back side, other end connection electrode folder.It utilizes Epoxide-resin glue coats the copper sheet back side and side, ensures that cobalt ions can only deposit in porous polycarbonate form plate hole.
(3) the hole wetting of porous polycarbonate template：Working electrode is placed in the electrolyte of the quartzy electrolytic cell, 3min is stirred to electrolyte using magnetic agitation instrument, the cobalt ions in the electrolyte is made to enter porous polycarbonate template Among hole.
(4) preparation at cobalt nanowire 104 and cobalt-based bottom 101：The composition of electrolyte is：The CoSO of 0.63M/L4 7H2O with The H of 0.65M/L3BO3, while adjust pH value of solution=3 using H2SO4.Two electrode systems are to put platinized platinum to electrode and working electrode In quartzy cell bath, two electrodes are connected to power supply, and power supply can provide " simple alternating current+constant voltage DC biasing ", " perseverance The output modes such as straightening stream " and " pulse direct current ".Using digital multimeter to monitor the situation of change of deposition current, when cobalt nanometer After the completion of line deposits in hole, it may proceed to deposit in the porous polycarbonate template upper surface, deposition current can go out at this time Now rise to.Therefore the deposition of nano wire can be learnt from the situation of change of deposition current.When cobalt nanowire 104 has overflowed After the porous polycarbonate form plate hole starts to deposit, and connection forms the cobalt-based bottom 101 between each other, it is straight to continue deposition Stop deposition after reaching 5 microns to 101 thickness of cobalt-based bottom.
(5) transfer at nano wire 104 and cobalt-based bottom 101：By the cobalt nanowire 104 after the completion of deposition and cobalt-based bottom 101 from It is taken out in electrolyte, after low temperature drying, 101 one side of cobalt-based bottom is coated into a small amount of conductive silver paste, by the ptfe substrate Be placed in above conductive silver paste, place at normal temperatures 12 it is small when after cobalt-based bottom 101 be connected firmly with ptfe substrate, in acquisition Between combining structure.
(6) remove copper sheet and remove porous polycarbonate template：Above-mentioned intermediate combination structure is put into equipped with 300mL water Beaker in, 70 DEG C of water-bath heating is carried out to intermediate combining structure, until the copper sheet for being covered with martial virtue alloy comes off, is obtained final Combining structure.The final combining structure is placed in 100mL dichloromethane, washout porous polycarbonate template, described in acquisition The integral structure that cobalt nanowire, the cobalt-based bottom, the conductive silver paste and the ptfe substrate are linked as, forms one side Ptfe substrate and cobalt nanowire array.
(7) combined with polytetrafluoroethylene (PTFE) substrate 103：Forming the ptfe substrate of one side and cobalt nanowire array Afterwards, the preparation method of opposite side is identical, forms the two-sided cobalt nanowire array based on ptfe substrate.
(8) by laser cutting, two-sided cobalt nanowire array is cut into the rectangle of 800um × 200um, it is final to obtain Multiple micro-nano robots of magnetism.

Claims (1)

1. a kind of bionical micro-nano robot preparation method of magnetism, step are as follows：
(1) polytetrafluoroethylene (PTFE) substrate, copper sheet and porous polycarbonate template are prepared；
(2) preparation of working electrode：After the heating fusing of suitable martial virtue alloy, coated uniformly on copper sheet, then will be more Hole polycarbonate template is overlying on martial virtue alloy upper surface；Coat the copper sheet back side and side using epoxide-resin glue, ensure cobalt from Son can only deposit in porous polycarbonate form plate hole；Take a conducting wire, one end connection copper sheet back side, other end connection electricity Pole presss from both sides；
(3) acidic electrolysis bath is prepared：The component of electrolyte includes：CoSO4 7H2O and H3BO3, molar concentration scope is respectively 0.60-0.66M/L and 0.62-0.68M/L, and pH value is adjusted to 2.5-3.5；
(4) the hole wetting of porous polycarbonate template：Working electrode is placed in electrolyte, make cobalt in the electrolyte from Son enters among porous polycarbonate form plate hole；
(5) preparation at cobalt nanowire and cobalt-based bottom：Platinized platinum is placed in electrolyte electrode and working electrode, two electrodes are connected to Power supply learns the deposition of cobalt nanowire by the situation of change for monitoring deposition current, when cobalt nanowire overflowed it is porous After polycarbonate template hole starts to deposit, and connection forms the cobalt-based bottom between each other, continue deposition until cobalt-based base thickness Degree stops deposition after reaching 5 microns；
(6) transfer at nano wire and cobalt-based bottom：Cobalt nanowire after the completion of deposition and cobalt-based bottom are taken out from electrolyte, low temperature After drying, cobalt-based bottom one side is coated into a small amount of conductive silver paste, the ptfe substrate is placed in above conductive silver paste, normal Lower place of temperature causes cobalt-based bottom to be connected firmly with ptfe substrate, obtains intermediate combination structure；
(7) remove copper sheet and remove porous polycarbonate template：70 DEG C of heating of water-bath are carried out to above-mentioned intermediate combination structure, directly It comes off to the copper sheet for being covered with martial virtue alloy, obtains final combining structure, it is molten that the final combining structure is placed in dichloromethane In liquid, porous polycarbonate template is removed, obtains the cobalt nanowire, the cobalt-based bottom, the conductive silver paste and described poly- four The integral structure that vinyl fluoride substrate is linked as, so as to form the ptfe substrate of one side and cobalt nanowire array；
(8) combined with polytetrafluoroethylene (PTFE) substrate：After the ptfe substrate of one side and cobalt nanowire array is formed, opposite side Preparation method it is identical, form the two-sided cobalt nanowire array based on ptfe substrate；
(9) by cutting, magnetic micro-nano robot is obtained.
CN201711287245.7A 2017-12-07 2017-12-07 Preparation method of bionic magnetic micro-nano robot Active CN108046210B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111705299A (en) * 2019-03-01 2020-09-25 湖南早晨纳米机器人有限公司 Preparation method of nano robot and nano robot
CN112706170A (en) * 2019-10-25 2021-04-27 湖南早晨纳米机器人有限公司 Shell type nano robot and preparation method thereof

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KR20170108505A (en) * 2016-03-18 2017-09-27 연세대학교 산학협력단 Complex permanent magnet and method for manufacturing the same
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US20090311166A1 (en) * 2006-05-19 2009-12-17 Massachusetts Institute Of Technology Continuous Process for the Production of Nanostructures Including Nanotubes
CN103332649A (en) * 2013-06-20 2013-10-02 西安理工大学 Preparation method of polyvinylidene fluoride with one-dimensional nanowire array structure
US20170336272A1 (en) * 2014-10-31 2017-11-23 King Abdullah University Of Science And Technology Magnetic nanocomposite sensor
CN105632843A (en) * 2014-11-26 2016-06-01 中国科学院宁波材料技术与工程研究所 Three-dimensional micro/nano electromechanical switch and preparation method thereof
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Publication number Priority date Publication date Assignee Title
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CN112706170A (en) * 2019-10-25 2021-04-27 湖南早晨纳米机器人有限公司 Shell type nano robot and preparation method thereof

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