CN108017881A - A kind of atomic force microscope probe and preparation method thereof - Google Patents
A kind of atomic force microscope probe and preparation method thereof Download PDFInfo
- Publication number
- CN108017881A CN108017881A CN201711171640.9A CN201711171640A CN108017881A CN 108017881 A CN108017881 A CN 108017881A CN 201711171640 A CN201711171640 A CN 201711171640A CN 108017881 A CN108017881 A CN 108017881A
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- Prior art keywords
- probe
- parts
- atomic force
- force microscope
- composite material
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F116/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical
- C08F116/12—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical by an ether radical
- C08F116/14—Monomers containing only one unsaturated aliphatic radical
- C08F116/16—Monomers containing no hetero atoms other than the ether oxygen
- C08F116/18—Acyclic compounds
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F120/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F120/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F120/10—Esters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
- C08K2003/0831—Gold
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
- C08K2003/0862—Nickel
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/003—Additives being defined by their diameter
Abstract
The invention discloses a kind of atomic force microscope probe and preparation method thereof, the probe is conical structure, and the probe is made by composite material, and the raw material components of the composite material and the mass parts of each component are as follows：To the polymer of ultraviolet-sensitive：80 parts ~ 90 parts；Gold grain：5 parts ~ 10 parts；Nickel particle：5 parts ~ 10 parts.A kind of atomic force microscope probe provided by the invention and preparation method thereof, can not only increase probe toughness, but also can ensure its hardness, so as to extend the probe service life.The probe has high-aspect-ratio at the same time, can detect corresponding high aspect ratio trench quite.
Description
Technical field
A kind of atomic force microscope probe of the present invention and preparation method thereof, belongs in micro-nano representational field.
Background technology
Traditional atomic force microscope probe is process by micro-electronic mechanical skill, its material composition is silicon or nitrogen
SiClx, the drawback is that lacking toughness, easily damaged.Present invention introduces polymer by ultra-violet curing and to introduce gold, nickel nanometer
Grain so that the existing certain degree of hardness of probe, also there is certain toughness.
The content of the invention
Purpose：The defects of in order to overcome the prior art, the present invention provide a kind of atomic force microscope probe and its preparation side
Method, can not only increase probe toughness, but also can ensure its hardness, so as to extend the probe service life.
A kind of atomic force microscope probe, probe is conical structure, and the probe is made by composite material, described multiple
The raw material components of condensation material and the mass parts of each component are as follows：
To the polymer of ultraviolet-sensitive：80 parts ~ 90 parts；
Gold grain：5 parts ~ 10 parts；
Nickel particle：5 parts ~ 10 parts, above-mentioned three kinds of raw material components are mixed evenly by mass parts.
Preferably, the basal diameter of the probe is 2 ~ 7 microns, and the tip radius of the probe is 20 ~ 300 nanometers, institute
The height for stating probe is 3 ~ 10 microns.
Preferably, the polymer to ultraviolet-sensitive is epoxy resin or vinyl ethers or acrylate.
Preferably, the gold grain size radius is 10-200 nanometers.
A kind of preparation method of atomic force microscope probe, it is characterised in that：Comprise the following steps that：
a）Quartz is performed etching by focused ion beam on a quartz substrate first to obtain concave taper die；
b）By step（a）Gained taper die is pressed on composite material, and makes its curing, wherein ultraviolet light by ultraviolet light irradiation
Wave-length coverage is 193nm-365nm, exposure time 0.1s-120s；
c）The demoulding obtains initial probe after the completion of curing, is then carved the radius at initial probe tip using focused-ion-beam lithography
Erosion is adjusted to 20 ~ 300 nanometers, obtains final probe.
Beneficial effect：A kind of atomic force microscope probe provided by the invention and preparation method thereof, can both increase probe
Toughness, and can ensure its hardness, so as to extend the probe service life.The probe has high-aspect-ratio at the same time, can detect corresponding
High aspect ratio trench quite, probe have certain flexibility, can extend the access times of probe.
Brief description of the drawings
Fig. 1 is the probe structure schematic diagram of the present invention.
Embodiment
It is in order to make those skilled in the art better understand the technical solutions in the application, real below in conjunction with the application
The attached drawing in example is applied, the technical solution in the embodiment of the present application is clearly and completely described, it is clear that described implementation
Example is merely a part but not all of the embodiments of the present application.It is common based on the embodiment in the application, this area
Technical staff's all other embodiments obtained without making creative work, should all belong to the application protection
Scope.
A kind of atomic force microscope probe, probe is conical structure, and the probe is made by composite material, described multiple
The raw material components of condensation material and the mass parts of each component are as follows：
To the polymer of ultraviolet-sensitive：80 parts ~ 90 parts；
Gold grain：5 parts ~ 10 parts；
Nickel particle：5 parts ~ 10 parts, above-mentioned three kinds of raw material components are mixed evenly by mass parts.
Preferably, the basal diameter of the probe is 2 ~ 7 microns, and the tip radius of the probe is 20 ~ 300 nanometers, institute
The height for stating probe is 3 ~ 10 microns.
Preferably, the polymer to ultraviolet-sensitive is epoxy resin or vinyl ethers or acrylate.
Preferably, the gold grain size radius is 10-200 nanometers.
A kind of preparation method of atomic force microscope probe, it is characterised in that：Comprise the following steps that：
a）Quartz is performed etching by focused ion beam on a quartz substrate first to obtain concave taper die；
b）By step（a）Gained taper die is pressed on composite material, and makes its curing, wherein ultraviolet light by ultraviolet light irradiation
Wave-length coverage is 193nm-365nm, exposure time 0.1s-120s；
c）The demoulding obtains initial probe after the completion of curing, is then carved the radius at initial probe tip using focused-ion-beam lithography
Erosion is adjusted to 20 ~ 300 nanometers, obtains final probe.
Embodiment one：
A kind of atomic force microscope probe, is made by composite material, and the material component of the composite material and each component quality
Part is as follows：
Acrylate：80 parts
Gold grain：10 parts；And gold grain size radius is 20 nanometers；
Nickel particle：10 parts；And nickel particle size radius is 30 nanometers；
Above-mentioned three kinds of raw material components are mixed evenly by mass parts.
The step of preparation method of above-mentioned atomic force microscope probe, is as follows：
a）Concave taper die is obtained to quartz etching by focused ion beam on a quartz substrate first, and taper die is opened
A diameter of 3 microns at mouthful, base diameter is 100 nanometers, and depth is 4 microns；
b）By step（a）Gained taper die is pressed on equal by the polymer, gold grain, nickel particle of ultraviolet-sensitive are mixed
On even obtained composite material, and its curing is made by the ultraviolet light irradiation 60s that wavelength is 365nm；
c）The demoulding obtains initial probe after the completion of curing, is then carved the radius at initial probe tip using focused-ion-beam lithography
Erosion is adjusted to 30 nanometers, obtains final probe, and final 4 microns of probe height；3 microns of basal diameter；30 nanometers of tip radius.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use the present invention.
Two kinds of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one
The most wide scope caused.
Claims (5)
1. a kind of atomic force microscope probe, it is characterised in that probe is conical structure, and the probe is by composite material system
, the raw material components of the composite material and the mass parts of each component are as follows：
To the polymer of ultraviolet-sensitive：80 parts ~ 90 parts；
Gold grain：5 parts ~ 10 parts；
Nickel particle：5 parts ~ 10 parts, above-mentioned three kinds of raw material components are mixed evenly by mass parts.
A kind of 2. atomic force microscope probe according to claim 1, it is characterised in that：The basal diameter of the probe is
2 ~ 7 microns, the tip radius of the probe is 20 ~ 300 nanometers, and the height of the probe is 3 ~ 10 microns.
A kind of 3. atomic force microscope probe according to claim 1, it is characterised in that：It is described that ultraviolet-sensitive is gathered
Compound is epoxy resin or vinyl ethers or acrylate.
A kind of 4. atomic force microscope probe according to claim 1, it is characterised in that：The gold grain size radius
For 10-200 nanometers.
A kind of 5. preparation method of atomic force microscope probe as any one of claim 1 ~ 5, it is characterised in that：Tool
Body step is as follows：
a）Quartz is performed etching by focused ion beam on a quartz substrate first to obtain concave taper die；
b）By step（a）Gained taper die is pressed on composite material, and makes its curing, wherein ultraviolet light by ultraviolet light irradiation
Wave-length coverage is 193nm-365nm, exposure time 0.1s-120s；
c）The demoulding obtains initial probe after the completion of curing, is then carved the radius at initial probe tip using focused-ion-beam lithography
Erosion is adjusted to 20 ~ 300 nanometers, obtains final probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711171640.9A CN108017881B (en) | 2017-11-22 | 2017-11-22 | Atomic force microscope probe and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711171640.9A CN108017881B (en) | 2017-11-22 | 2017-11-22 | Atomic force microscope probe and preparation method thereof |
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| Publication Number | Publication Date |
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| CN108017881A true CN108017881A (en) | 2018-05-11 |
| CN108017881B CN108017881B (en) | 2020-06-16 |
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| CN201711171640.9A Active CN108017881B (en) | 2017-11-22 | 2017-11-22 | Atomic force microscope probe and preparation method thereof |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101311217A (en) * | 2008-04-28 | 2008-11-26 | 上海思麦电子有限公司 | Process for synthesizing high molecular nanometer composite material with pressure-sensitive performance and use |
| CN102109535A (en) * | 2009-12-24 | 2011-06-29 | 北京五泽坤科技有限公司 | Controllable method for preparing atomic force microscope needlepoint with carbon nano tube |
| CN102353817A (en) * | 2011-06-30 | 2012-02-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Probe of conducting atomic force microscope and measuring methods employing probe |
| US20130172491A1 (en) * | 2008-04-15 | 2013-07-04 | Florida State University Reseach Foundation | Method for Functionalization of Nanoscale Fibers and Nanoscale Fiber Films |
| CN105527463A (en) * | 2016-03-01 | 2016-04-27 | 江南大学 | RF atomic power microscope scanning probe and preparation method thereof |
-
2017
- 2017-11-22 CN CN201711171640.9A patent/CN108017881B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130172491A1 (en) * | 2008-04-15 | 2013-07-04 | Florida State University Reseach Foundation | Method for Functionalization of Nanoscale Fibers and Nanoscale Fiber Films |
| CN101311217A (en) * | 2008-04-28 | 2008-11-26 | 上海思麦电子有限公司 | Process for synthesizing high molecular nanometer composite material with pressure-sensitive performance and use |
| CN102109535A (en) * | 2009-12-24 | 2011-06-29 | 北京五泽坤科技有限公司 | Controllable method for preparing atomic force microscope needlepoint with carbon nano tube |
| CN102353817A (en) * | 2011-06-30 | 2012-02-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Probe of conducting atomic force microscope and measuring methods employing probe |
| CN105527463A (en) * | 2016-03-01 | 2016-04-27 | 江南大学 | RF atomic power microscope scanning probe and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 《化学化工大辞典》编委会、化学工业出版社辞书编辑部: "《化学化工大辞典》", 31 January 2003, 化学工业出版社 * |
| 杨继全等: "《3D打印技术导论》", 31 May 2016, 南京师范大学出版社 * |
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| Publication number | Publication date |
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| CN108017881B (en) | 2020-06-16 |
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Application publication date: 20180511 Assignee: Changzhou Xinsheng Semiconductor Technology Co.,Ltd. Assignor: CHANGZHOU CAMPUS OF HOHAI University Contract record no.: X2023980034321 Denomination of invention: A probe of atomic force microscope and its preparation method Granted publication date: 20200616 License type: Common License Record date: 20230404 |