CN107994459B - Export the laser array of coherent laser - Google Patents
Export the laser array of coherent laser Download PDFInfo
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- CN107994459B CN107994459B CN201711489418.3A CN201711489418A CN107994459B CN 107994459 B CN107994459 B CN 107994459B CN 201711489418 A CN201711489418 A CN 201711489418A CN 107994459 B CN107994459 B CN 107994459B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4006—Injection locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
- H01S5/423—Arrays of surface emitting lasers having a vertical cavity
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
- Optical Communication System (AREA)
Abstract
The present invention provides a kind of laser arrays for exporting coherent laser, comprising: seed laser, optical waveguide structure, optical antenna array, collimator lens array and vertical cavity surface emitting laser VCSEL array；Optical waveguide structure includes first wave guide and second waveguide group, and first wave guide is used for transmission seed light, and seed is optically coupled to each second waveguide in second waveguide group；Optical antenna includes: coupling unit, phase modulation unit and transmitting unit；Transmitting unit is used to that modulated seed light to be made to transmit along the optical axis direction of corresponding collimation lens；Collimator lens array is for collimating the seed light received to VCSEL array；VCSEL array is used to carry out the seed light after the collimation received the laser of light amplification formation.A kind of realized based on optical waveguide structure transmission technology provided by the invention uniformly divides high-power seed light the two-dimensional VCSEL array of optical injection-locked, available high power, high coherence multiple laser.
Description
Technical field
The present invention relates to laser application technique fields, more particularly, to the laser array of output coherent laser.
Background technique
Currently, high-power vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser,
VCSEL) array has many advantages, such as small, cheap, the easy of integration array of small in size, round output facula, threshold current, therefore wide
It is general to apply to laser pump (ing), laser radar, micro-material processing, 3D ranging, the fields such as laser display.
The light issued between each luminescence unit of VCSEL array is noncoherent, so entire two-dimensional VCSEL array issues
Laser be also noncoherent.But with the development of science and technology, more and more fields are to high light beam quality, narrow linewidth, Gao Xiang
The laser array demand of mass dryness fraction constantly increases, and incoherent laser array is since its output beam quality is poor, wider line width
Two-dimensional VCSEL array is affected in the use of many high-end fields, such as laser radar field or space optical communication field.Therefore
The coherence for improving two dimension Vcsel laser array is a highly important task.
Summary of the invention
In order to overcome the problems referred above or it at least is partially solved the above problem, the present invention provides a kind of output coherent lasers
Laser array.
On the one hand, the present invention provides a kind of laser arrays for exporting coherent laser, comprising: seed laser, light wave
Guide structure, optical antenna array, collimator lens array and vertical cavity surface emitting laser VCSEL array；
The seed laser is used to provide seed light for the laser array；
The optical waveguide structure includes first wave guide and second waveguide group, and the first wave guide is used for transmission seed light, and
Seed is optically coupled to each second waveguide in the second waveguide group；
Optical antenna in the optical antenna array and the collimation lens in the collimator lens array, and with it is described
The quantity of VCSEL unit in VCSEL array is equal and corresponds；
The optical antenna includes: coupling unit, phase modulation unit and transmitting unit；The coupling unit, phase tune
Unit and transmitting unit processed are sequentially connected；The coupling unit is used to obtain the seed light in a second waveguide, the phase tune
Unit processed is for being modulated the phase of the seed light got, so that the seed light in the second waveguide group is through the light
Become the seed light that phase difference is definite value after learning aerial array；The transmitting unit for changing modulated seed light transmission
Direction makes modulated seed light along the optical axis direction of corresponding collimation lens；The collimation lens is used for the kind that will be received
Sub-light is collimated to corresponding VCSEL unit；
The VCSEL unit is used to carry out light amplification to the seed light after the collimation received, and emits amplified shape
At laser.
Preferably, the laser array of coherent laser is exported further include: optical waveguide substrates；The optical waveguide structure, the standard
Collimating lens array and the VCSEL array are stacked gradually to the optical waveguide substrates.
Preferably, the optical axis of the collimation lens is conllinear with the optical axis of corresponding VCSEL unit, the hair of the optical antenna
Luminous point is on the optical axis of corresponding collimation lens.
Preferably, the collimation lens is planoconvex lens, and the lower mirror surface of the planoconvex lens is plane, the upper mirror of the planoconvex lens
Face is convex surface.
Preferably, each second waveguide is L-type structure in the second waveguide group, the first side of the L-type structure with
The first wave guide is parallel and contacts, and the second side of the L-type structure is parallel with the coupling unit in multiple optical antennas and connects
Touching, the second of the L-type structure are vertical while with described first.
Preferably, the transmitting unit is grating.
Preferably, the first side length of each L-type structure and the length of the coupling unit in the optical antenna are adjustable.
Preferably, the definite value is the integral multiple for the seed optical wavelength that the seed laser provides.
Preferably, the seed optical wavelength range that the seed laser provides is infrared band.
Preferably, the size of the optical waveguide structure and the size of the optical antenna are provided with the seed laser
Seed optical wavelength on the same order of magnitude.
A kind of realized based on optical waveguide structure transmission technology provided by the invention is uniformly divided injection to high-power seed light
The two-dimensional VCSEL array of locking, available high power, high coherence multiple laser.It is a pair of by setting one in the present invention
Optical antenna, collimation lens and the VCSEL unit answered form laser array, and it is relevant which may be implemented multi beam
The output of laser makes being more widely applied for VCSEL array.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the laser array for the output coherent laser that one embodiment of the invention provides；
Fig. 2 be another embodiment of the present invention provides output coherent laser laser array in optical waveguide structure show
It is intended to；
Fig. 3 is the side view that the laser array structures of coherent laser are exported in Fig. 1.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As depicted in figs. 1 and 2, one embodiment of the invention provides a kind of laser array for exporting coherent laser, comprising:
Seed laser 11, optical waveguide structure, optical antenna array, collimator lens array 14 and vertical cavity surface emitting laser VCSEL
Array 15；
The seed laser 11 is used to provide seed light for the laser array；
The optical waveguide structure includes first wave guide 12 and second waveguide group, and the first wave guide 12 is used for transmission seed
Light, and seed is optically coupled to each second waveguide 13 in the second waveguide group；
The collimation lens in optical antenna 16 and the collimator lens array 14 in the optical antenna array, Yi Jiyu
The quantity of VCSEL unit 150 in the VCSEL array 15 is equal and corresponds；
Each optical antenna 16 includes: coupling unit 161, phase modulation unit 162 and transmitting unit 163；The coupling
Unit 161, phase modulation unit 162 and transmitting unit 163 are sequentially connected；The coupling unit 161 is for obtaining one second wave
The seed light in 13 is led, the phase modulation unit 162 is for being modulated the phase of the seed light got, so that described
Seed light in second waveguide group becomes the seed light that phase difference is definite value after the optical antenna array；The transmitting unit
163 for changing modulated seed light transmission direction, keep the transmission direction of modulated seed light saturating along corresponding collimation
The optical axis direction of mirror；Every collimating lens 140 are for collimating the seed light received to corresponding VCSEL unit；In Fig. 1
There are 5 second waveguides 13 in second waveguide group.
Every VCSEL unit 150 is used to carry out light amplification to the seed light after the collimation received, and emits amplified
The laser of formation.
Specifically, need to meet three conditions due to realizing that multiple laser is relevant, it may be assumed that frequency is identical, constant phase difference and
Direction of vibration out of plumb.Since the laser for using same seed laser 11 to issue in the present invention is as seed light, so by
Light frequency after VCSEL array is identical, direction of vibration also out of plumb.And pass through the optical waveguide structure in the present invention, by a branch of kind
Sub-light is divided into multi beam seed light, and passes through optical antenna array, and it is definite value that the phase difference between each beam seed light, which may be implemented, most
The multi beam seed light that phase difference is definite value is collimated into the corresponding position to VCSEL array by collimator lens array afterwards, realizes light
Injection locking, obtains the laser array of output coherent laser.Each transmitting unit, corresponding collimation lens in the present invention and
Corresponding VCSEL unit, which can be regarded as, constitutes a laser element, so laser array provided by the invention can be regarded as
It is the VCSEL array that multiple laser elements are formed.To be convenient, clear convenient for subsequent descriptions, subsequent described laser array
It is the laser array for exporting coherent laser, VCSEL array is vertical cavity surface emitting laser arrays, and VCSEL unit is vertical
Vertical cavity surface emitting laser unit in straight cavity surface-emitting laser array.
The invention proposes one kind to be uniformly divided injection to high-power seed light based on the realization of optical waveguide structure transmission technology
The two-dimensional VCSEL array of locking, available high power, high coherence multiple laser.It is a pair of by setting one in the present invention
Optical antenna, collimation lens and the VCSEL unit answered form laser array, and it is relevant which may be implemented multi beam
The output of laser makes being more widely applied for VCSEL array.
On the basis of the above embodiments, the seed laser used in the present invention can be single-frequency laser, and output is single
The seed light of longitudinal mode, narrow linewidth.Preferably, it can choose single frequency optical fiber laser.It can be by the wavelength model of seed light
It encloses and is set as infrared band.Seed laser is connect with one end of first wave guide 12, make seed laser issue seed light into
Enter in first wave guide 12.
As shown in Fig. 2, optical waveguide structure includes first wave guide 12 and second waveguide group, first wave guide 12 is linear type knot
Structure, with the coplanar placement of seed laser 11.Each second waveguide 13 is L-type structure in second waveguide group, the L-type structure
The first side 131 it is parallel with the first wave guide 12 and contact, with realize the seed in first wave guide 12 is optically coupled to it is each
In second waveguide 13.Second side of the L-type structure is parallel with the coupling unit in multiple optical antennas and contacts, with realize by
Seed in second waveguide 13 is optically coupled in multiple coupling units 161.The second side 132 and described first of the L-type structure
Side 131 is vertical.First wave guide 12 and the second side 132 of each second waveguide 13 in second waveguide group are vertical.As preferred
First side 131 of scheme, L-type structure is parallel with the first wave guide 12 and fits closely, the second side 132 and multiple optical antennas
In coupling unit 161 it is parallel and fit closely so that coupling effect is more preferable.The second side in Fig. 2 in each second waveguide 13
132 is parallel with the coupling unit 161 in 5 optical antennas 16 and contact.
On the basis of the above embodiments, the laser array of output coherent laser provided by the invention further include: waveguide
Substrate 200；The optical waveguide structure, the collimator lens array 14 and the VCSEL array 15 are stacked gradually to the waveguide
On substrate 200.As shown in figure 3, illustrating the side view of the laser array of output coherent laser, wave is not embodied in side view
Conductive substrate 200 and seed laser 11.But since the optical waveguide structure in the present invention can also be quarter with optical antenna array
Erosion optical waveguide substrates are prepared, so it is also assumed that optical waveguide substrates 200 and optical waveguide structure are integrated.It is used in the present invention
Optical waveguide structure optical waveguide substrates material be silicon or silicon compound.The optical antenna array is arranged in optical waveguide substrates 200,
And the optical antenna array is coplanar with the optical waveguide structure.
On the basis of the above embodiments, the optical axis of the collimation lens is conllinear with the optical axis of corresponding VCSEL unit, institute
The luminous point of optical antenna is stated on the optical axis of corresponding collimation lens.
Specifically, the luminous point of optical antenna mentioned here refers to the luminous position of the transmitting unit of optical antenna.Through
The seed light of transmitting unit transmitting enters VCSEL unit by the rear facet of VCSEL unit, swashs through VCSEL unit is amplified
Light is projected by the front cavity surface of VCSEL unit, wherein in front cavity surface, that is, Fig. 1 of VCSEL unit VCSEL array 15 upper surface.
On the basis of the above embodiments, every collimating lens are planoconvex lens in the collimator lens array, described flat
The lower mirror surface of convex lens is plane, and the upper mirror surface of the planoconvex lens is convex surface.The upper mirror surface of every collimating lens and lower mirror surface plate
There is transmission film, the seed light convenient for emitting transmitting unit is collimated on VCSEL unit.That is, collimator lens array
For two-dimentional convex lens array, the seed light for issuing transmitting unit in optical antenna is collimated, and through VCSEL array
Rear facet is coupled into VCSEL array.
VCSEL array receives the seed light of injection in rear facet, makes the oscillation in every VCSEL unit by multiple oscillation
Frequency jump is the frequency for the seed light that seed laser issues, the phase of the laser obtained after amplification in every VCSEL unit
There are the differences of certain value between the phase of the seed light of injection, that is, there is constant phase difference, realize the note of seed light
Enter locking, two-dimensional VCSEL array forms phase-locked array.
On the basis of the above embodiments, the transmitting unit in optical antenna usually has directional radiation properties, specific table
It is now modulated to do 90 degree of direction to the modulated seed light of phase modulation unit, makes the biography of the seed light in phase modulation unit
Defeated direction becomes perpendicular to the plane where optical waveguide structure.Preferably, the transmitting unit is optical grating construction.
On the basis of the above embodiments, the coupling unit in the first side length of each L-type structure and each optical antenna
Length it is adjustable.
Specifically, the transmission loss that about 2dB/cm can be generated when transmitting in optical waveguide due to light, can pass through tune
The length of each second waveguide is saved so that the laser energy that receives of the coupling unit in optical antenna is identical.Each second waveguide
The transmission direction for changing laser by L-type structure, since multiple second waveguides arrange in a row in optical waveguide substrates, so can
To regard that multiple second waveguides form one-dimensional array in optical waveguide substrates as, and since first wave guide and multiple second waveguides are equal
Vertically, so first wave guide and multiple second waveguides, which can be regarded as, constitutes a two-dimensional surface waveguiding structure.That is,
Laser energy can be averagely coupled on each optical antenna by two-dimensional surface waveguiding structure.
On the basis of the above embodiments, the optical antenna and VCSEL unit are adjustable, both can be 2 × 2 times
Column, or n × n array can also be m n array, wherein m ≠ n.Correspondingly, finally swash through what laser array issued
The quantity of light light beam can also change, and specific number of beams is 4, n2Or m × n.
On the basis of the above embodiments, the optical waveguide structure is club shaped structure, and optical antenna is club shaped structure, spherical
One of structure or optical grating construction or various structures combination.
On the basis of the above embodiments, the definite value is the integer for the seed optical wavelength that the seed laser provides
Times.
Specifically, since the laser array in the present invention can apply a variety of different fields, if high in order to obtain
Energy, it may be necessary to the multi beam for generating laser array
On the basis of the above embodiments, the seed optical wavelength range that the seed laser provides is infrared band, can
To be near infrared band, middle infrared band or far infrared band, or entire infrared band.
On the basis of the above embodiments, the size of the optical waveguide structure and the size of each optical antenna with it is described
The seed optical wavelength that seed laser provides on the same order of magnitude, that is, is nm magnitude.
Finally, method of the invention is only preferable embodiment, it is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on should be included in protection of the invention
Within the scope of.
Claims (10)
1. a kind of laser array for exporting coherent laser characterized by comprising seed laser, optical waveguide structure, optics
Aerial array, collimator lens array and vertical cavity surface emitting laser VCSEL array；
The seed laser is used to provide seed light for the laser array；
The optical waveguide structure includes first wave guide and second waveguide group, and the first wave guide is used for transmission seed light, and will kind
Sub-light is coupled to each second waveguide in the second waveguide group；
Optical antenna in the optical antenna array and the collimation lens in the collimator lens array, and with it is described
The quantity of VCSEL unit in VCSEL array is equal and corresponds；
The optical antenna includes: coupling unit, phase modulation unit and transmitting unit；The coupling unit, phase-modulation list
Member and transmitting unit are sequentially connected；The coupling unit is used to obtain the seed light in a second waveguide, the phase-modulation list
Member is for being modulated the phase of the seed light got, so that the seed light in the second waveguide group is through the optics day
Become the seed light that phase difference is definite value after linear array；The transmitting unit for changing modulated seed light transmission side
To making the transmission direction of modulated seed light along the optical axis direction of corresponding collimation lens；The collimation lens will be for that will connect
The seed light received is collimated to corresponding VCSEL unit；
The VCSEL unit is used to carry out light amplification to the seed light after the collimation received, and emits amplified formation
Laser.
2. laser array according to claim 1, which is characterized in that further include: optical waveguide substrates；The optical waveguide knot
Structure, the collimator lens array and the VCSEL array are stacked gradually to the optical waveguide substrates.
3. laser array according to claim 2, which is characterized in that the optical axis of the collimation lens with it is corresponding
The optical axis of VCSEL unit is conllinear, and the luminous point of the optical antenna is on the optical axis of corresponding collimation lens.
4. laser array according to claim 2, which is characterized in that the collimation lens is planoconvex lens, the plano-convex
The lower mirror surface of mirror is plane, and the upper mirror surface of the planoconvex lens is convex surface.
5. laser array according to claim 1, which is characterized in that each second waveguide is equal in the second waveguide group
The first side for L-type structure, the L-type structure is parallel with the first wave guide and contacts, the second side of the L-type structure and more
Coupling unit in a optical antenna is parallel and contacts, and the second of the L-type structure is vertical while with described first.
6. laser array according to claim 5, which is characterized in that the transmitting unit is grating.
7. laser array according to claim 5, which is characterized in that the first side length of each L-type structure and the light
The length for learning the coupling unit in antenna is adjustable.
8. laser array described in any one of -7 according to claim 1, which is characterized in that the definite value swashs for the seed
The integral multiple for the seed optical wavelength that light device provides.
9. laser array according to claim 8, which is characterized in that the seed optical wavelength that the seed laser provides
Range is infrared band.
10. laser array according to claim 8, which is characterized in that the size of the optical waveguide structure and the light
Seed optical wavelength of the size of antenna with seed laser offer is learned on the same order of magnitude.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108767656A (en) * | 2018-06-01 | 2018-11-06 | 清华大学 | Coherent source component |
| CN108680929B (en) * | 2018-07-18 | 2024-05-31 | 度亘激光技术（苏州）有限公司 | Three-dimensional sensing system based on vertical cavity surface emitting laser array |
| CN109343025B (en) * | 2018-08-14 | 2023-06-27 | 清华大学 | Laser radar transmitting system, laser radar detecting system and laser radar detecting method |
| DE102018123320B4 (en) | 2018-09-21 | 2023-01-26 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Phase-locked laser assembly and method of manufacturing a phase-locked laser assembly |
| US11804695B2 (en) * | 2020-09-11 | 2023-10-31 | Lumentum Operations Llc | Integrated flood and spot illuminators |
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