CN107994459A - Export the laser array of coherent laser - Google Patents
Export the laser array of coherent laser Download PDFInfo
- Publication number
- CN107994459A CN107994459A CN201711489418.3A CN201711489418A CN107994459A CN 107994459 A CN107994459 A CN 107994459A CN 201711489418 A CN201711489418 A CN 201711489418A CN 107994459 A CN107994459 A CN 107994459A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4006—Injection locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
- H01S5/423—Arrays of surface emitting lasers having a vertical cavity
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
- Optical Communication System (AREA)
Abstract
The present invention provides a kind of laser array for exporting coherent laser, including：Seed laser, optical waveguide structure, optical antenna array, collimator lens array and vertical cavity surface emitting laser VCSEL array；Optical waveguide structure includes first wave guide and second waveguide group, and first wave guide is used for transmission seed light, and seed light is coupled to each second waveguide in second waveguide group；Optical antenna includes：Coupling unit, phase modulation unit and transmitter unit；Transmitter unit is used to make modulated seed light transmit along the optical axis direction of corresponding collimation lens；Collimator lens array is used to collimate the seed light received to VCSEL array；VCSEL array carries out the laser of light amplification formation for the seed light after docking received collimation.A kind of two-dimensional VCSEL array for uniformly dividing high-power seed light optical injection-locked based on the realization of optical waveguide structure transmission technology provided by the invention, can obtain high power, the multiple laser of high coherence.
Description
Technical field
The present invention relates to laser application technique field, more particularly, to the laser array of output coherent laser.
Background technology
At present, high-power vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser,
VCSEL) array has the advantages that small, cheap, the easy of integration array of small, circular output facula, threshold current, therefore extensively
It is general to apply to the fields such as laser pump (ing), laser radar, micro-material processing, 3D rangings, laser display.
The light sent between each luminescence unit of VCSEL array is noncoherent, so whole two-dimensional VCSEL array is sent
Laser be also noncoherent.But with the development of science and technology, more and more fields are to high light beam quality, narrow linewidth, Gao Xiang
The laser array demand of mass dryness fraction constantly increases, and incoherent laser array is since its output beam quality is poor, wider line width
It has impact on use of the two-dimensional VCSEL array in many high-end fields, such as laser radar field or space optical communication field.Therefore
The coherence for improving two dimension Vcsel laser arrays is a highly important task.
The content of the invention
Solve the above problems in order to overcome the problems referred above or at least in part, the present invention provides one kind to export coherent laser
Laser array.
On the one hand, the present invention provides a kind of laser array for exporting coherent laser, including：Seed laser, light wave
Guide structure, optical antenna array, collimator lens array and vertical cavity surface emitting laser VCSEL array；
The seed laser is used to provide seed light for the laser array；
The optical waveguide structure includes first wave guide and second waveguide group, and the first wave guide is used for transmission seed light, and
Seed light is coupled to each second waveguide in the second waveguide group；
Optical antenna in the optical antenna array and the collimation lens in the collimator lens array, and with it is described
The quantity of VCSEL units in VCSEL array is equal and corresponds；
The optical antenna includes：Coupling unit, phase modulation unit and transmitter unit；The coupling unit, phase tune
Unit and transmitter unit processed are sequentially connected；The coupling unit is used to obtain the seed light in a second waveguide, the phase tune
The phase that unit processed is used for the seed light to getting is modulated, so that the seed light in the second waveguide group is through the light
It is changed into the seed light that phase difference is definite value after learning aerial array；The transmitter unit is used for the transmission for changing modulated seed light
Direction, makes optical axis direction of the modulated seed light along corresponding collimation lens；The collimation lens is used for the kind that will be received
Sub-light is collimated to corresponding VCSEL units；
The VCSEL units are used to dock the seed light progress light amplification after received collimation, and launch amplified shape
Into laser.
Preferably, the laser array for exporting coherent laser further includes：Optical waveguide substrates；The optical waveguide structure, the standard
Collimating lens array is stacked gradually to the optical waveguide substrates with the VCSEL array.
Preferably, the optical axis of the collimation lens is conllinear with the optical axis of corresponding VCSEL units, the hair of the optical antenna
Luminous point is on the optical axis of corresponding collimation lens.
Preferably, the collimation lens is planoconvex lens, and the lower minute surface of the planoconvex lens is plane, the upper mirror of the planoconvex lens
Face is convex surface.
Preferably, each second waveguide is L-type structure in the second waveguide group, the first side of the L-type structure with
The first wave guide is parallel and contacts, and the second side of the L-type structure is parallel with the coupling unit in multiple optical antennas and connects
Touch, the second of the L-type structure is vertical while with described first.
Preferably, the transmitter unit is grating.
Preferably, first length of side of each L-type structure and the length of the coupling unit in the optical antenna are adjustable.
Preferably, the integral multiple for the seed optical wavelength that the definite value provides for the seed laser.
Preferably, the seed optical wavelength range that the seed laser provides is infrared band.
Preferably, the size of the optical waveguide structure and the size of the optical antenna are provided with the seed laser
Seed optical wavelength on the same order of magnitude.
A kind of realized based on optical waveguide structure transmission technology provided by the invention is uniformly divided injection to high-power seed light
The two-dimensional VCSEL array of locking, can obtain high power, the multiple laser of high coherence.In the present invention, by setting an a pair
Optical antenna, collimation lens and the VCSEL units answered, form laser array, which can realize that multi beam is concerned with
The output of laser, makes being more widely applied for VCSEL array.
Brief description of the drawings
Fig. 1 is the structure diagram of the laser array for the output coherent laser that one embodiment of the invention provides；
Fig. 2 is showing for the optical waveguide structure in the laser array for the output coherent laser that another embodiment of the present invention provides
It is intended to；
Fig. 3 is the side view for the laser array structures that coherent laser is exported in Fig. 1.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
As depicted in figs. 1 and 2, one embodiment of the invention provides a kind of laser array for exporting coherent laser, including：
Seed laser 11, optical waveguide structure, optical antenna array, collimator lens array 14 and vertical cavity surface emitting laser VCSEL
Array 15；
The seed laser 11 is used to provide seed light for the laser array；
The optical waveguide structure includes first wave guide 12 and second waveguide group, and the first wave guide 12 is used for transmission seed
Light, and seed light is coupled to each second waveguide 13 in the second waveguide group；
Optical antenna 16 and the collimation lens in the collimator lens array 14, Yi Jiyu in the optical antenna array
The quantity of VCSEL units 150 in the VCSEL array 15 is equal and corresponds；
Each optical antenna 16 includes：Coupling unit 161, phase modulation unit 162 and transmitter unit 163；The coupling
Unit 161, phase modulation unit 162 and transmitter unit 163 are sequentially connected；The coupling unit 161 is used to obtain one second ripple
The seed light in 13 is led, the phase that the phase modulation unit 162 is used for the seed light to getting is modulated, so that described
Seed light in second waveguide group is changed into the seed light that phase difference is definite value after the optical antenna array；The transmitter unit
163 transmission direction for changing modulated seed light, makes the transmission direction of modulated seed light saturating along corresponding collimation
The optical axis direction of mirror；It is used to collimate the seed light received to corresponding VCSEL units per collimating lens 140；In Fig. 1
There are 5 second waveguides 13 in second waveguide group.
Every VCSEL units 150 are used to dock the seed light progress light amplification after received collimation, and launch amplified
The laser of formation.
Specifically, need to meet three conditions due to realizing that multiple laser is concerned with, i.e.,：Frequency is identical, constant phase difference and
Direction of vibration out of plumb.Due to using the laser that same seed laser 11 is sent in the present invention as seed light, so by
Light frequency after VCSEL array is identical, direction of vibration also out of plumb.And pass through the optical waveguide structure in the present invention, by a branch of kind
Sub-light is divided into multi beam seed light, and passes through optical antenna array, it is possible to achieve the phase difference between each beam seed light is definite value, most
Phase difference is collimated into the correspondence position to VCSEL array for the multi beam seed light of definite value by collimator lens array afterwards, realizes light
Injection locking, obtains the laser array of output coherent laser.Each transmitter unit, corresponding collimation lens in the present invention and
Corresponding VCSEL units, which can be regarded as, forms a laser element, so laser array provided by the invention can be regarded as
It is the VCSEL array that multiple laser elements are formed.It is convenient, clear for ease of subsequent descriptions, follow-up described laser array
It is the laser array for exporting coherent laser, VCSEL array is vertical cavity surface emitting laser arrays, and VCSEL units are vertical
Vertical cavity surface emitting laser unit in straight cavity surface-emitting laser array.
The present invention is proposed a kind of realized based on optical waveguide structure transmission technology and is uniformly divided injection to high-power seed light
The two-dimensional VCSEL array of locking, can obtain high power, the multiple laser of high coherence.In the present invention, by setting an a pair
Optical antenna, collimation lens and the VCSEL units answered, form laser array, which can realize that multi beam is concerned with
The output of laser, makes being more widely applied for VCSEL array.
On the basis of above-described embodiment, the seed laser used in the present invention can be single-frequency laser, and output is single
The seed light of longitudinal mode, narrow linewidth.Preferably, single frequency optical fiber laser can be selected.Can be by the wavelength model of seed light
Enclose and be set as infrared band.Seed laser is connected with one end of first wave guide 12, make the seed light that seed laser is sent into
Enter in first wave guide 12.
As shown in Fig. 2, optical waveguide structure includes first wave guide 12 and second waveguide group, first wave guide 12 is linear pattern knot
Structure, with 11 coplanar placement of seed laser.Each second waveguide 13 is L-type structure in second waveguide group, the L-type structure
The first side 131 it is parallel with the first wave guide 12 and contact, to realize the seed light in first wave guide 12 coupled to each
In second waveguide 13.Second side of the L-type structure is parallel with the coupling unit in multiple optical antennas and contacts, with realize by
Seed light in second waveguide 13 is coupled in multiple coupling units 161.The second side 132 and described first of the L-type structure
Side 131 is vertical.First wave guide 12 is vertical with the second side 132 of each second waveguide 13 in second waveguide group.As preferred
Scheme, the first side 131 of L-type structure is parallel with the first wave guide 12 and fits closely, the second side 132 and multiple optical antennas
In coupling unit 161 it is parallel and fit closely so that coupling effect is more preferable.The second side in Fig. 2 in each second waveguide 13
132 is parallel with the coupling unit 161 in 5 optical antennas 16 and contact.
On the basis of above-described embodiment, the laser array of output coherent laser provided by the invention further includes：Waveguide
Substrate 200；The optical waveguide structure, the collimator lens array 14 and the VCSEL array 15 are stacked gradually to the waveguide
On substrate 200.As shown in figure 3, illustrating the side view of the laser array of output coherent laser, ripple is not embodied in side view
Conductive substrate 200 and seed laser 11.But since the optical waveguide structure in the present invention and optical antenna array can also be quarter
Erosion optical waveguide substrates are prepared, so it is also assumed that optical waveguide substrates 200 and optical waveguide structure are integral.Used in the present invention
The optical waveguide substrates material of optical waveguide structure be silicon or silicon compound.The optical antenna array is arranged in optical waveguide substrates 200,
And the optical antenna array and the optical waveguide structure are coplanar.
On the basis of above-described embodiment, the optical axis of the collimation lens is conllinear with the optical axis of corresponding VCSEL units, institute
The luminous point of optical antenna is stated on the optical axis of corresponding collimation lens.
Specifically, the luminous point of optical antenna mentioned here refers to the luminous position of the transmitter unit of optical antenna.Through
The seed light of transmitter unit transmitting enters VCSEL units by the rear facet of VCSEL units, swashs through VCSEL units are amplified
Light is projected by the front cavity surface of VCSEL units, the upper surface of VCSEL array 15 in wherein front cavity surface, that is, Fig. 1 of VCSEL units.
On the basis of above-described embodiment, every collimating lens are planoconvex lens in the collimator lens array, described flat
The lower minute surface of convex lens is plane, and the upper minute surface of the planoconvex lens is convex surface.Upper minute surface and lower minute surface per collimating lens plate
There is transmission film, the seed light easy to launch transmitter unit is collimated on VCSEL units.That is, collimator lens array
For two-dimentional convex lens array, the seed light for transmitter unit in optical antenna to be sent is collimated, and through VCSEL array
Rear facet is coupled into VCSEL array.
VCSEL array receives the seed light of injection in rear facet, makes the vibration in every VCSEL units by multiple oscillation
The frequency for the seed light that frequency jump sends for seed laser, the phase of the laser obtained after the interior amplification of every VCSEL units
There are the difference of certain value between the phase of the seed light of injection, i.e., there are constant phase difference, realize the note of seed light
Enter locking, two-dimensional VCSEL array forms phase-locked array.
On the basis of above-described embodiment, the transmitter unit in optical antenna usually has directional radiation properties, specific table
Now to do 90 degree of direction modulation to the modulated seed light of phase modulation unit, make the biography of the seed light in phase modulation unit
Defeated direction is changed into perpendicular to the plane where optical waveguide structure.Preferably, the transmitter unit is optical grating construction.
On the basis of above-described embodiment, first length of side and the coupling unit in each optical antenna of each L-type structure
Length it is adjustable.
Specifically, the transmission loss of about 2dB/cm can be produced when being transmitted due to light in fiber waveguide, tune can be passed through
The length of each second waveguide is saved so that the laser energy that receives of the coupling unit in optical antenna is identical.Each second waveguide
Change the transmission direction of laser by L-type structure, since multiple second waveguides arrange in a row in optical waveguide substrates, so can
To regard that multiple second waveguides form one-dimensional array in optical waveguide substrates as, and since first wave guide and multiple second waveguides are equal
Vertically, so first wave guide and multiple second waveguides, which can be regarded as, constitutes a two dimensional surface waveguiding structure.That is,
Laser energy can be averagely coupled on each optical antenna by two dimensional surface waveguiding structure.
On the basis of above-described embodiment, the optical antenna can be adjusted with VCSEL units, both can be 2 × 2 times
Row, or n × n array, can also be m n array, wherein m ≠ n.Correspondingly, finally swash through what laser array was sent
The quantity of light light beam can also change, and specific number of beams is 4, m2Or m × n.
On the basis of above-described embodiment, the optical waveguide structure is club shaped structure, and optical antenna is club shaped structure, spherical
One or more structures combination in structure or optical grating construction.
On the basis of above-described embodiment, the integer for the seed optical wavelength that the definite value provides for the seed laser
Times.
Specifically, since the laser array in the present invention can apply a variety of different fields, if high in order to obtain
Energy, it may be necessary to the multi beam for producing laser array
On the basis of above-described embodiment, the seed optical wavelength range that the seed laser provides is infrared band, can
To be near infrared band, middle infrared band or far infrared band, or whole infrared band.
On the basis of above-described embodiment, the size of the size of the optical waveguide structure and each optical antenna with it is described
The seed optical wavelength that seed laser provides on the same order of magnitude, that is, is nm magnitudes.
Finally, method of the invention is only preferable embodiment, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on, should be included in the protection of the present invention
Within the scope of.
Claims (10)
- A kind of 1. laser array for exporting coherent laser, it is characterised in that including：Seed laser, optical waveguide structure, optics Aerial array, collimator lens array and vertical cavity surface emitting laser VCSEL array；The seed laser is used to provide seed light for the laser array；The optical waveguide structure includes first wave guide and second waveguide group, and the first wave guide is used for transmission seed light, and will kind Sub-light is coupled to each second waveguide in the second waveguide group；Optical antenna in the optical antenna array and the collimation lens in the collimator lens array, and with it is described The quantity of VCSEL units in VCSEL array is equal and corresponds；The optical antenna includes：Coupling unit, phase modulation unit and transmitter unit；The coupling unit, phase-modulation list Member and transmitter unit are sequentially connected；The coupling unit is used to obtain the seed light in a second waveguide, the phase-modulation list The phase that member is used for the seed light to getting is modulated, so that the seed light in the second waveguide group is through the optics day It is changed into the seed light that phase difference is definite value after linear array；The transmitter unit is used for the transmission side for changing modulated seed light To making optical axis direction of the transmission direction of modulated seed light along corresponding collimation lens；The collimation lens is used to connect Received seed light is collimated to corresponding VCSEL units；The VCSEL units are used to dock the seed light progress light amplification after received collimation, and launch amplified formation Laser.
- 2. laser array according to claim 1, it is characterised in that further include：Optical waveguide substrates；The fiber waveguide knot Structure, the collimator lens array and the VCSEL array are stacked gradually to the optical waveguide substrates.
- 3. laser array according to claim 2, it is characterised in that the optical axis of the collimation lens with it is corresponding The optical axis of VCSEL units is conllinear, and the luminous point of the optical antenna is on the optical axis of corresponding collimation lens.
- 4. laser array according to claim 2, it is characterised in that the collimation lens is planoconvex lens, the plano-convex The lower minute surface of mirror is plane, and the upper minute surface of the planoconvex lens is convex surface.
- 5. laser array according to claim 1, it is characterised in that each second waveguide is equal in the second waveguide group For L-type structure, the first side of the L-type structure is parallel with the first wave guide and contacts, the second side of the L-type structure with it is more Coupling unit in a optical antenna is parallel and contacts, and the second of the L-type structure is vertical while with described first.
- 6. laser array according to claim 5, it is characterised in that the transmitter unit is grating.
- 7. laser array according to claim 5, it is characterised in that first length of side of each L-type structure and the light The length for learning the coupling unit in antenna is adjustable.
- 8. according to the laser array any one of claim 1-7, it is characterised in that the definite value swashs for the seed The integral multiple for the seed optical wavelength that light device provides.
- 9. laser array according to claim 8, it is characterised in that the seed optical wavelength that the seed laser provides Scope is infrared band.
- 10. laser array according to claim 8, it is characterised in that the size of the optical waveguide structure and the light Seed optical wavelength of the size of antenna with seed laser offer is learned on the same order of magnitude.
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| CN201711489418.3A CN107994459B (en) | 2017-12-30 | 2017-12-30 | Export the laser array of coherent laser |
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| CN107994459B CN107994459B (en) | 2019-08-16 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680929A (en) * | 2018-07-18 | 2018-10-19 | 度亘激光技术（苏州）有限公司 | A kind of three-dimensional sensing system based on vertical cavity surface emitting laser arrays |
| CN108767656A (en) * | 2018-06-01 | 2018-11-06 | 清华大学 | Coherent source component |
| CN109343025A (en) * | 2018-08-14 | 2019-02-15 | 清华大学 | A kind of emission system of laser radar, detection system and detection method |
| WO2020057856A1 (en) * | 2018-09-21 | 2020-03-26 | Osram Oled Gmbh | Phase-coupled laser assembly and method for producing a phase-coupled laser assembly |
| CN114172023A (en) * | 2020-09-11 | 2022-03-11 | 朗美通经营有限责任公司 | Integrated flood and spot lighting |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002089272A1 (en) * | 2001-04-27 | 2002-11-07 | Photodigm | High-powered coherent arrays of vertical cavity surface-emitting semiconducting lasers |
| CN102714396A (en) * | 2010-01-29 | 2012-10-03 | 惠普发展公司，有限责任合伙企业 | Multimode vertical-cavity surface-emitting laser arrays |
| CN102709808A (en) * | 2012-05-29 | 2012-10-03 | 中国科学院长春光学精密机械与物理研究所 | Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers) |
| US8615028B1 (en) * | 2010-10-12 | 2013-12-24 | Hrl Laboratories, Llc | Vertically integrated optical phased array with pseudo-random array architecture |
| CN104393485A (en) * | 2014-09-26 | 2015-03-04 | 中国科学院长春光学精密机械与物理研究所 | Laser array coherent device and preparation method thereof |
| CN106410607A (en) * | 2016-11-17 | 2017-02-15 | 清华大学 | Active optical phased array photon integration chip and manufacturing method thereof |
-
2017
- 2017-12-30 CN CN201711489418.3A patent/CN107994459B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002089272A1 (en) * | 2001-04-27 | 2002-11-07 | Photodigm | High-powered coherent arrays of vertical cavity surface-emitting semiconducting lasers |
| CN102714396A (en) * | 2010-01-29 | 2012-10-03 | 惠普发展公司，有限责任合伙企业 | Multimode vertical-cavity surface-emitting laser arrays |
| US8615028B1 (en) * | 2010-10-12 | 2013-12-24 | Hrl Laboratories, Llc | Vertically integrated optical phased array with pseudo-random array architecture |
| CN102709808A (en) * | 2012-05-29 | 2012-10-03 | 中国科学院长春光学精密机械与物理研究所 | Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers) |
| CN104393485A (en) * | 2014-09-26 | 2015-03-04 | 中国科学院长春光学精密机械与物理研究所 | Laser array coherent device and preparation method thereof |
| CN106410607A (en) * | 2016-11-17 | 2017-02-15 | 清华大学 | Active optical phased array photon integration chip and manufacturing method thereof |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108767656A (en) * | 2018-06-01 | 2018-11-06 | 清华大学 | Coherent source component |
| CN108680929A (en) * | 2018-07-18 | 2018-10-19 | 度亘激光技术（苏州）有限公司 | A kind of three-dimensional sensing system based on vertical cavity surface emitting laser arrays |
| CN108680929B (en) * | 2018-07-18 | 2024-05-31 | 度亘激光技术（苏州）有限公司 | Three-dimensional sensing system based on vertical cavity surface emitting laser array |
| CN109343025A (en) * | 2018-08-14 | 2019-02-15 | 清华大学 | A kind of emission system of laser radar, detection system and detection method |
| CN109343025B (en) * | 2018-08-14 | 2023-06-27 | 清华大学 | Laser radar transmitting system, laser radar detecting system and laser radar detecting method |
| WO2020057856A1 (en) * | 2018-09-21 | 2020-03-26 | Osram Oled Gmbh | Phase-coupled laser assembly and method for producing a phase-coupled laser assembly |
| DE102018123320A1 (en) * | 2018-09-21 | 2020-03-26 | Osram Opto Semiconductors Gmbh | Phase-coupled laser arrangement and method for producing a phase-coupled laser arrangement |
| DE102018123320B4 (en) | 2018-09-21 | 2023-01-26 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Phase-locked laser assembly and method of manufacturing a phase-locked laser assembly |
| US11923656B2 (en) | 2018-09-21 | 2024-03-05 | Osram Oled Gmbh | Phase-coupled laser assembly and method for producing a phase-coupled laser assembly |
| CN114172023A (en) * | 2020-09-11 | 2022-03-11 | 朗美通经营有限责任公司 | Integrated flood and spot lighting |
| CN114172023B (en) * | 2020-09-11 | 2024-04-09 | 朗美通经营有限责任公司 | Integrated floodlight and spot illuminator |
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| Publication number | Publication date |
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| CN107994459B (en) | 2019-08-16 |
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