CN107976274A - A kind of pressure-detecting device and detection method based on synchro-resonance - Google Patents
A kind of pressure-detecting device and detection method based on synchro-resonance Download PDFInfo
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- CN107976274A CN107976274A CN201810051934.6A CN201810051934A CN107976274A CN 107976274 A CN107976274 A CN 107976274A CN 201810051934 A CN201810051934 A CN 201810051934A CN 107976274 A CN107976274 A CN 107976274A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
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Abstract
The present invention relates to a kind of pressure-detecting device and detection method based on synchro-resonance, belong to pressure-detecting device.Including 2N resonant element, upper substrate and lower substrate, each resonant element is installed between edge pedestal and central seat, the present invention is vibrated using the inverse piezoelectric effect driving beam for the piezoelectric patches being arranged on clamped beam, when vibration frequency levels off to the intrinsic frequency of clamped beam, pass through the effect of coupling unit, with cantilever beam synchro-resonance occurs for clamped beam, realizes frequency multiplication.N groups data are subjected to error control, so as to improve detection sensitivity and precision.Cantilever beam resonant frequency is detected under closed-loop feedback control system, the size of the variable quantity characterization testing pressure of resonant frequency, has the advantages that high sensitivity, high accuracy, high-resolution.
Description
Technical field
The present invention relates to a kind of pressure-detecting device, more particularly, to a kind of pressure-detecting device based on synchro-resonance.
Background technology
Pressure-detecting device currently on the market mainly has resonant mode, pressure resistance type and condenser type.Both output signals afterwards
It is analog quantity, it is necessary to carry out signal processing to it with high-precision adjustment circuit, the shortcomings that this processing mode can exactly cause
The decline of measurement accuracy.And resonant mode pressure detector is then the resonant frequency for changing beam using pressure change, so that logical
The change for crossing measurement frequency measures pressure indirectly, can improve measurement accuracy.Since what resonant mode pressure detector exported is
Quasi- digital signal, therefore there is measurement sensitivity height, precision height, high resolution, strong antijamming capability, have over long distances
The advantage transmitted without reducing its precision, is relatively adapted to carry out pressure high-precision detection.
The micropressure sensor manufactured using MEMS technology, Precision Machining or other precision machining methods has volume
Small, light-weight, high sensitivity, high reliability, becoming in world wide has strategic research field.It is domestic at present
Research to MEMS resonant formula pressure sensor outside is mainly silicon micro resonance type pressure sensor, the flexible member of sensor and quick
Sensing unit uses silicon materials, is processed using silicon technology.A kind of such as patent " beam film point of CAS Electronics Research Institute
The patent of invention of body structure resonance beam pressure sensor " and Xiamen University " a kind of holohedral symmetry silicon micro resonance type pressure sensor " is adopted
All it is that a vibration unit includes a walking beam.
The content of the invention
The present invention provides a kind of pressure-detecting device and detection method based on synchro-resonance, it is therefore an objective to improves existing pressure
Measurement accuracy, sensitivity, the resolution ratio of sensor.
The present invention adopts the technical scheme that：The front etching upper groove of upper substrate, is formed centrally within Shang Dan islands；Upper substrate
Back-etching lower groove, be formed centrally within Xia Dan islands, uniformly distributed 2N edge pedestal on the inside of upper groove, N is positive integer；Fovea superior
Groove, the center of circle of lower groove are respectively positioned on the axis of substrate, lower substrate top and Xia Dan islands lower contact and lower substrate and upper base
Bottom surrounding is fixed together, and the coupling unit of 2N resonant element is fixedly connected with 2N edge pedestal respectively, clamped beam
It is fixedly connected respectively with the side of center substrate, lower section and the Shang Dan islands overlying contact of center substrate.
The upper substrate is cylindric with identical appearance and size, presentation with lower substrate.
The front of the lower substrate has etched groove, and groove and Xia Dan islands are tightly connected, and the center of groove processes a pressure
Power hole.
The structure of the resonant element is：Cantilever beam and clamped beam are connected with coupling unit respectively, piezoelectric patches one and piezoelectricity
Piece two is separately mounted to the fixing end of clamped beam and cantilever beam.
A kind of pressure detection method based on synchro-resonance, comprises the following steps：
(1) clamped beam resonance is encouraged with electric signal before pressure is detected, pressure or gas is then acted on into lower substrate
Center, removes pressure or gas after signal stabilization；
(2) under the effect of the pressure, the film of upper substrate moves up, and then forces central seat to move up, and changes
The intrinsic frequency of clamped beam, picks up exaggerated frequency signal and output on a cantilever beam；
(3) all data averageds in the range of error condition are met in N groups data, as final rate-adaptive pacemaker
Signal；
(4) testing pressure is determined by the relation between output frequency and pressure.
The advantage of the invention is that：Two walking beams being coupled are included using a resonant element, utilize synchronization
Resonance effects so that the clamped beam being coupled will double with cantilever beam output signal according to the two frequency ratio, so that
The frequency bigger of output, sensitivity and resolution ratio increase.In addition, in 2N resonant element being centrosymmetrically arranged, by N group data
Error control, and the superposition amplification of cell signal are carried out, accuracy of detection can be improved.Using MEMS technology, Precision Machining or
The substrate up and down that other precision machining methods make has the good characteristics such as dimensional accuracy is good, reliability is high, cost is low, and substrate is just
Face design bonding boss and the single island of back side design can improve the linearity.Advantage with reference to both this, the base that the present invention designs and produces
In the resonance type pressure sensor chip of novel synchronous resonant structure, there is high sensitivity, high accuracy, high-resolution, the linearity
The features such as good.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the half section structure diagram of present invention detection contact pressure；
Fig. 3 is the half section structure diagram of detection gas pressure of the present invention；
Fig. 4 is the structure diagram of resonant element of the present invention；
Fig. 5 is the structure diagram that resonant element number of the present invention is 8；
Fig. 6 is the structure diagram that resonant element number of the present invention is 4.
Embodiment
With reference to Fig. 1, Fig. 2, the front etching upper groove 102 of upper substrate 1, is formed centrally within Shang Dan islands 104；Upper substrate 1
Back-etching lower groove 103, is formed centrally within Xia Dan islands 105, and 2N edge pedestal 101 is evenly distributed with the inside of upper groove, and N is just whole
Number；Upper groove, the center of circle of lower groove are respectively positioned on the axis of substrate, the top of lower substrate 4 and 105 lower contact of Xia Dan islands and
Lower substrate 4 is fixed together with upper 1 surrounding of substrate, the coupling unit 201 of 2N resonant element 2 respectively with 2N edge base
Seat 101 is fixedly connected, side of the clamped beam 203 respectively with center substrate 3 is fixedly connected, lower section and the Shang Dan islands of center substrate 3
104 overlying contacts；
The upper substrate 1 is cylindric with identical appearance and size, presentation with lower substrate 4.
With reference to Fig. 3, the front of the lower substrate 4 has etched groove 401, and groove 401 and Xia Dan islands 105 are tightly connected, recessed
The center of groove processes a pressure port 402；Pressure port 402 communicates to form gauge pressure formula detection device with air, or with another quilt
Source of the gas is surveyed to communicate to form differential detection device.
With reference to Fig. 4, the structure of the resonant element 2 is：Cantilever beam 202 and clamped beam 203 connect with coupling unit 201 respectively
Connect, piezoelectric patches 1 and piezoelectric patches 2 205 are separately mounted to the fixing end of clamped beam 203 and cantilever beam 202.
Additional testing pressure is not to directly act on resonance mechanism, but is acted on by Xia Dan islands 105 and Shang Dan islands 104
In center substrate 3, and then change the rigidity of resonant element, change its resonant frequency, measure testing pressure indirectly, when measurement gas
During body pressure, Xia Dan islands 105 are subject to upward power to be F=pAHole, it is F that every rectangular beam, which is evenly distributed with stress,N=F/N.
During work, resonant element resonance is first encouraged, pressure is born afterwards or is passed through under test gas, pressure will be forced and placed an order
Dao Heshangdan islands move up, and upward center substrate 3, so as to drive 203 deformation of clamped beam；Since deformation causes its axis
Change to mechanical stress, and then influence the intrinsic frequency of beam.Assuming that the axial stress that rectangular section clamped beam produces is approximate
With FNIt is linearly proportional, i.e.,：
σ=δ FN
σ is rectangular cross section beam axial stress in formula, and δ is linear coefficient；
When σ=0
Clamped beam first natural frequency is：
When σ ≠ 0
In formula, critical Eulerian equationE be material elasticity modulus, ρ be beam volume density, a, b, c
It is the length of rectangular cross section beam respectively.
Clamped beam and cantilever beam are designed based on synchro-resonance principle, if clamped beam and cantilever beam intrinsic frequency are f1And f2,
Then the two meets：
Using the inverse piezoelectric effect driving silicon beam vibration for the piezoelectric patches being arranged on clamped beam, when vibration frequency levels off to admittedly
Resonance occurs during the intrinsic frequency of strutbeam, by the effect of coupling unit, with cantilever beam synchro-resonance, clamped beam occur for clamped beam
It is m with cantilever beam first natural frequency ratio：N, m, n are integer, n>M, it is so as to fulfill frequency multiplication, the frequency of amplification is defeated
Go out, improve sensitivity, the frequency of output is：
Final output frequency f2With pressure p linear approximate relationship, i.e.,：
The distribution in a center of symmetry of N group resonant elements, carries out error control by N groups, if multi-group data difference is larger, illustrates core
Piece damages, and data are wrong；Otherwise data are errorless, and measurement is accurate；
With reference to Fig. 5 and Fig. 6, the resonant element number in apparatus of the present invention is 2N, belongs to variable, and wherein N is more than 1
Integer, N=2 in N=4 in Fig. 5, Fig. 6.
The shape of each beam of uniformly distributed resonant element is not fixed, and can be the shapes such as banding or S-shaped.
A kind of pressure detection method based on synchro-resonance, comprises the following steps：
(1) clamped beam resonance is encouraged with electric signal before pressure is detected, pressure or gas is then acted on into lower substrate
Center, removes pressure or gas after signal stabilization；
(2) under the effect of the pressure, the film of upper substrate moves up, and then forces central seat to move up, and changes
The intrinsic frequency of clamped beam, picks up exaggerated frequency signal and output on a cantilever beam；
(3) all data averageds in the range of error condition are met in N groups data, as final rate-adaptive pacemaker
Signal；
(4) testing pressure is determined by the relation between output frequency and pressure.
Claims (6)
- A kind of 1. pressure-detecting device based on synchro-resonance, it is characterised in that：The front etching upper groove of upper substrate, at center Form Shang Dan islands；The back-etching lower groove of upper substrate, is formed centrally within Xia Dan islands, 2N edge base is evenly distributed with the inside of upper groove Seat, N is positive integer；Upper groove, the center of circle of lower groove are respectively positioned on the axis of substrate, with being connect below Xia Dan islands above lower substrate Touch and lower substrate be fixed together with upper substrate surrounding, the coupling unit of 2N resonant element respectively with 2N edge base Seat is fixedly connected, clamped beam is fixedly connected with the side of center substrate respectively, lower section and the Shang Dan islands overlying contact of center substrate.
- A kind of 2. pressure-detecting device based on synchro-resonance according to claim 1, it is characterised in that：The upper substrate It is cylindric with identical appearance and size, presentation with lower substrate.
- A kind of 3. pressure-detecting device based on synchro-resonance according to claim 1 or 2, it is characterised in that：Under described The front of substrate has etched groove, and groove and Xia Dan islands are tightly connected, and the center of groove processes a pressure port.
- A kind of 4. pressure-detecting device based on synchro-resonance according to claim 1 or 2, it is characterised in that：It is described humorous The structure of unit of shaking is：Cantilever beam and clamped beam are connected with coupling unit respectively, and piezoelectric patches one and piezoelectric patches two are separately mounted to The fixing end of clamped beam and cantilever beam.
- A kind of 5. pressure-detecting device based on synchro-resonance according to claim 3, it is characterised in that：The resonance list Member structure be：Cantilever beam and clamped beam are connected with coupling unit respectively, and piezoelectric patches one and piezoelectric patches two are separately mounted to clamped The fixing end of beam and cantilever beam.
- 6. a kind of pressure detection method based on synchro-resonance, it is characterised in that comprise the following steps：(1) clamped beam resonance is encouraged with electric signal before pressure is detected, pressure or gas is then acted on into lower base center, Pressure or gas are removed after signal stabilization；(2) under the effect of the pressure, the film of upper substrate moves up, and then forces central seat to move up, and changes clamped The intrinsic frequency of beam, picks up exaggerated frequency signal and output on a cantilever beam；(3) meet all data averageds in the range of error condition in N groups data, believe as final rate-adaptive pacemaker Number；(4) testing pressure is determined by the relation between output frequency and pressure.
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| CN201810051934.6A CN107976274B (en) | 2018-01-18 | 2018-01-18 | Pressure detection device and method based on synchronous resonance |
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| CN201810051934.6A CN107976274B (en) | 2018-01-18 | 2018-01-18 | Pressure detection device and method based on synchronous resonance |
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| CN107976274B CN107976274B (en) | 2023-05-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112033587A (en) * | 2020-09-16 | 2020-12-04 | 辽宁工程技术大学 | In-service large-span structure rod piece axial force testing member |
| CN113433213A (en) * | 2021-07-05 | 2021-09-24 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
| US20220163418A1 (en) * | 2019-04-18 | 2022-05-26 | King Abdullah University Of Science And Technology | Wide range highly sensitive pressure sensor based on heated micromachined arch beam |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220163418A1 (en) * | 2019-04-18 | 2022-05-26 | King Abdullah University Of Science And Technology | Wide range highly sensitive pressure sensor based on heated micromachined arch beam |
| US11703406B2 (en) * | 2019-04-18 | 2023-07-18 | King Abdullah University Of Science And Technology | Wide range highly sensitive pressure sensor based on heated micromachined arch beam |
| CN112033587A (en) * | 2020-09-16 | 2020-12-04 | 辽宁工程技术大学 | In-service large-span structure rod piece axial force testing member |
| CN113433213A (en) * | 2021-07-05 | 2021-09-24 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
| CN113433213B (en) * | 2021-07-05 | 2022-07-19 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
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| CN107976274B (en) | 2023-05-23 |
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