CN107907959B - Ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection - Google Patents
Ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection Download PDFInfo
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- CN107907959B CN107907959B CN201711192259.0A CN201711192259A CN107907959B CN 107907959 B CN107907959 B CN 107907959B CN 201711192259 A CN201711192259 A CN 201711192259A CN 107907959 B CN107907959 B CN 107907959B
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Abstract
An ultra-precise five-axis adjusting device with six degrees of freedom for optical adjustment and detection belongs to the technical field of optical adjustment and detection. Two X-axis linear motor stators, an X-axis grating ruler and a plurality of X-axis limiting components are all arranged on a granite base, two X-axis linear motor coils are respectively arranged on an X-axis slide carriage through an X-axis linear motor coil seat, the X-axis slide carriage is arranged on the granite base in a sliding manner, four Y-axis limiting components are arranged on the two X-axis linear motor coil seats, and the Y-axis grating ruler is arranged on the X-axis slide carriage; two Y-axis linear motor coils are respectively installed on a Y-axis slide carriage through a Y-axis linear motor coil seat, the Y-axis slide carriage is arranged on an X-axis slide carriage in a sliding mode, a Z-axis precision lifting table is fixed on the two Y-axis linear motor coil seats, a Z-axis precision rotating table is installed on the Z-axis precision lifting table, and a theta-axis three-point adjusting platform is installed on the Z-axis precision rotating table. The invention is used for occasions needing to use the ultra-precise multi-axis adjusting table.
Description
Technical Field
The invention relates to an ultra-precise six-degree-of-freedom five-axis motion device, and belongs to the technical field of optical adjustment and detection.
Background
With the continuous development of science and technology in China, ultra-precise subjects are more and more widely applied to high-precision industries, and particularly, the application of multi-axis ultra-precise motion tables is increased day by day, for example, the adjustment of a small turntable, the debugging of an ultra-precise optical path system, the application of nuclear energy, the detection of a wafer, the detection of a gene sequence and the like, the ultra-precise multi-axis adjustment table is required to be used, mechanical joint arms cannot meet the requirements of some special industries from the aspects of rigidity and precision, and the speed and variable motion of the traditional pure mechanical adjustment table cannot realize corresponding functions.
Disclosure of Invention
The present invention is directed to solving the above-mentioned problems, and an object of the present invention is to provide an ultra-precise five-axis adjusting device with six degrees of freedom for optical adjustment and detection.
The purpose of the invention is realized by the following technical scheme:
an ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection comprises a base assembly, an X-axis air-floating guide rail, a Y-axis air-floating guide rail, a Z-axis precise lifting platform, a Z-axis precise rotating platform and a theta-axis three-point adjusting platform; the base component comprises a granite base, an X-axis grating ruler, two X-axis linear motor stators and eight X-axis limiting components; the X-axis air-floating guide rail comprises a Y-axis grating ruler, an X-axis slide carriage, two X-axis linear motor coil seats, two X-axis linear motor coils and four Y-axis limiting assemblies; the Y-axis air-floating guide rail comprises a Y-axis slide carriage, two Y-axis linear motor coil seats and two Y-axis linear motor coils;
the X-axis grating ruler and the two X-axis linear motor stators are both arranged on the granite base, the eight X-axis limiting assemblies are arranged on four supports which are arranged in a rectangular shape and fixed on the granite base, the two X-axis linear motor stators are oppositely arranged, and the X-axis grating ruler is arranged between the two X-axis linear motor stators;
the two X-axis linear motor coils are respectively arranged on an X-axis slide carriage through an X-axis linear motor coil base, the X-axis slide carriage is arranged on a granite base in a sliding mode, the four Y-axis limiting components are arranged on the two X-axis linear motor coil bases, the X-axis slide carriage realizes reciprocating motion under the action of the X-axis linear motor coils during work and limits the mechanical position of the X-axis slide carriage through the eight X-axis limiting components, and the Y-axis grating ruler is arranged on the X-axis slide carriage;
the two Y-axis linear motor coils are respectively arranged on a Y-axis slide carriage through a Y-axis linear motor coil seat, and the Y-axis slide carriage is arranged on the X-axis slide carriage in a sliding manner;
the Z-axis precision lifting platform is fixed on the two Y-axis linear motor coil bases, the Z-axis precision rotating platform is installed on the Z-axis precision lifting platform, and the theta-axis three-point adjusting platform is installed on the Z-axis precision rotating platform.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention adopts a UMAC motion controller (which is an external control component) to control a direct drive motor, and uses a grating system (referring to an X-axis grating scale and a Y-axis grating scale) to realize the final precision requirement, the linear motion of a key shaft system (referring to an X-axis fixed part, referring to an X-axis moving part and a Y-axis fixed part, referring to a figure 2, referring to a figure 3, referring to an X-axis moving part and a Y-axis moving part) X, Y adopts a gantry motor double-drive mode by adopting two linear motors (so that the gantry double-drive mode is adopted), so that the high-speed motion and the frequent acceleration and deceleration motion can be ensured, the precise position stepping and the rapid response are realized, a Z-axis adopts a wedge surface type structure to realize the regulation of a micro distance, the Z-rotation adopts the direct drive motor to match with a precise bearing and to match with a circular grating to reach the +/-10 mu rad positioning precision, and the regulation of a theta-axis (namely a theta-axis three-point regulation, the ball joint is matched and ground, and the positioning precision of +/-10 mu rad is achieved through manual adjustment.
2. The invention adopts five-axis six-degree-of-freedom ultra-precise adjustment, can carry out interpolation type movement, and can also realize single-axis adjustment. The equipment main part is the granite material, and equipment rigidity is good, and the bi-motor drive can brake the location accurate, realizes quick response.
3. The invention is suitable for adjustment and use in the project research and development of research institutes, colleges and universities and high-precision enterprises.
Drawings
FIG. 1 is an isometric view of an ultra-precise six-degree-of-freedom five-axis adjustment apparatus for optical adjustment and detection in accordance with the present invention;
FIG. 2 is an isometric view of the base assembly;
FIG. 3 is an isometric view of an X-axis air bearing guide;
FIG. 4 is an isometric view of the Y-axis air bearing guide;
FIG. 5 is an isometric view of a Z-axis precision lift table;
FIG. 6 is an isometric view of a Z-axis precision rotation stage;
FIG. 7 is an isometric view of a theta axis three point adjustment platform;
FIG. 8 is an enlarged view of a portion of FIG. 1 at A;
FIG. 9 is an enlarged view of a portion of FIG. 1 at B;
FIG. 10 is an enlarged view of a portion of FIG. 2 at C;
FIG. 11 is an enlarged view of a portion of FIG. 3 at D;
FIG. 12 is an enlarged view of a portion of FIG. 5 at E;
FIG. 13 is an enlarged view of a portion of FIG. 6 at F;
FIG. 14 is an enlarged view of a portion of FIG. 7 at G;
fig. 15 is a partial enlarged view of fig. 7 at H.
The names and the labels of the components in the figure are as follows:
the device comprises a base assembly 1, an X-axis air-floating guide rail 2, a Y-axis air-floating guide rail 3, a Z-axis precise lifting platform 4, a Z-axis precise rotating platform 5, a theta-axis three-point adjusting platform 6, an X-axis linear motor stator 7, a granite base 8, an X-axis limiting assembly 9, an X-axis grating ruler 10, a Y-axis limiting assembly 11, an X-axis linear motor coil base 12, an X-axis linear motor coil 13, a Y-axis grating ruler 14, an X-axis slide carriage 15, a Y-axis slide carriage 16, a Y-axis linear motor coil base 17, a Y-axis linear motor coil 18, a lifting platform upper plate 19, an upper crossed roller guide rail 20, a wedge-shaped block 21, a guide pillar 22, a self-lubricating linear bearing 23, a Z-axis grating ruler 24, a Z-axis grating ruler base 25, a linear shaft bearing base 26, a lower crossed roller guide rail 27, a speed reducer base 28, a harmonic speed reducer 29, a servo motor 30, a lifting platform lower plate 31, The device comprises an angular contact bearing 35, a spacer ring 36, a rotary table lower plate 37, a rotating shaft 38, a direct-drive rotating motor 39, a motor pressing ring 40, a circular grating 41, a reading head 42, a reading head seat 43, a rotary table upper plate 44, a spring guide column seat 45, a spring 46, a spring guide column 47, an L-shaped connecting plate 48, a ball joint concave surface 49, a ball joint convex surface 50, a differential micrometer head 51, a differential micrometer head seat 52 and a rotary table lower plate 53.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
The first embodiment is as follows: as shown in fig. 1-4 and 8-11, the present embodiment discloses an ultra-precise five-axis adjustment device with six degrees of freedom for optical adjustment and detection, which includes a base assembly 1, an X-axis air-floating guide rail 2, a Y-axis air-floating guide rail 3, a Z-axis precise lifting platform 4, a Z-axis precise rotation platform 5, and a θ -axis three-point adjustment platform 6; the base component 1 comprises a granite base 8, an X-axis grating ruler 10, two X-axis linear motor stators 7 and a plurality of X-axis limiting components 9; the X-axis air-floating guide rail 2 comprises a Y-axis grating ruler 14, an X-axis slide carriage 15, two X-axis linear motor coil bases 12, two X-axis linear motor coils 13 and four Y-axis limiting assemblies 11; the Y-axis air-floating guide rail 3 comprises a Y-axis slide carriage 16, two Y-axis linear motor coil seats 17 and two Y-axis linear motor coils 18;
the eight X-axis limiting assemblies 9 are arranged on four supports which are arranged in a rectangular shape and fixed on a granite base 8, the two X-axis linear motor stators 7 are oppositely arranged, and the X-axis grating ruler 10 is arranged between the two X-axis linear motor stators 7;
the two X-axis linear motor coils 13 are respectively arranged on an X-axis slide carriage 15 through an X-axis linear motor coil holder 12, the X-axis slide carriage 15 is arranged on a granite base 8 in a sliding mode, the four Y-axis limiting assemblies 11 are arranged on the two X-axis linear motor coil holders 12, the X-axis slide carriage 15 realizes reciprocating motion under the action of the X-axis linear motor coils 13 during work and limits the mechanical position of the X-axis slide carriage 15 through the eight X-axis limiting assemblies 9, and the Y-axis grating ruler 14 is arranged on the X-axis slide carriage 15;
the two Y-axis linear motor coils 18 are respectively arranged on a Y-axis slide carriage 16 through a Y-axis linear motor coil seat 17 (the working principle is the same as that of the X-axis), and the Y-axis slide carriage 16 is arranged on the upper surface of the X-axis slide carriage 15 in a sliding manner (the X-axis slide carriage 15 is also a Y-axis guide rail seat at the same time, so that the space is saved);
the Z-axis precision lifting platform 4 is fixed on the two Y-axis linear motor coil bases 17, the Z-axis precision rotating platform 5 is installed on the Z-axis precision lifting platform 4, and the theta-axis three-point adjusting platform 6 is installed on the Z-axis precision rotating platform 5.
The second embodiment is as follows: as shown in fig. 5 and 12, the present embodiment is further described with respect to the first embodiment, and the Z-axis precision lifting stage 4 includes a lifting stage upper plate 19, an upper cross roller guide 20, a wedge block 21, a Z-axis grating scale 24, a Z-axis grating scale base 25, a lower cross roller guide 27, a reducer base 28, a harmonic reducer 29, a servo motor 30, a lifting stage lower plate 31, a ball screw system 32, four guide posts 22, four self-lubricating linear bearings 23, and four linear bearing bases 26;
the wedge block 21 is respectively connected with the lifting platform upper plate 19 and the lifting platform lower plate 31 through an upper crossed roller guide rail 20 and a lower crossed roller guide rail 27, the ball screw system 32 is fastened with the wedge block 21, the four linear bearing blocks 26 are mounted on the lower lifting platform plate 31, one self-lubricating linear bearing 23 is mounted on each linear bearing block 26, the four guide posts 22 mounted below the upper lifting platform plate 19 and the four self-lubricating linear bearings 23 move relatively, the speed reducer base 28 is installed on the lower plate 31 of the lifting platform, the harmonic speed reducer 29 is installed on the speed reducer base 28, the ball screw system 32 is connected with the servo motor 30 through a harmonic reducer 29, the Z-axis grating ruler seat 25 is installed on the lower plate 31 of the lifting platform, and the Z-axis grating ruler 24 is installed on the Z-axis grating ruler seat 25.
The servo motor 30 drives the ball screw system 32 to generate a rotational motion, the ball screw system 32 converts the rotational motion into a linear motion and drives the wedge block 21 to make a linear motion (a horizontal linear motion), and the upper cross roller guide rail 20 and the lower cross roller guide rail 27 convert the horizontal linear motion into a more precise vertical linear motion under the action of the four self-lubricating linear bearings 23. Both the upper cross roller guide 20 and the lower cross roller guide 2 are outsourced items.
The third concrete implementation mode: as shown in fig. 6 and 13, in the present embodiment, which is further described with respect to the first or second embodiment, the Z-axis precision rotation stage 5 includes a rotation stage upper plate 33, a pressing ring 34, a spacer ring 36, a rotation stage lower plate 37, a rotation shaft 38, a direct-drive rotation motor 39, a motor pressing ring 40, a circular grating 41, a reading head 42, a reading head seat 43, and two angular contact bearings 35;
the rotary table lower plate 37 is fixed on the Z-axis precision lifting table 4, the lower end of the rotary table upper plate 33 is arranged in the rotary table lower plate 37, two angular contact bearings 35 are arranged between the rotary table upper plate 33 and the rotary table lower plate 37, the two angular contact bearings 35 are separated by a spacer ring 36, the rotary table lower plate 37 makes opposite rotation movement with the rotary table upper plate 33 through the two angular contact bearings 35 and the spacer ring 36, the pressing ring 34 is arranged between the rotary table lower plate 37 and the rotary table upper plate 33, the pressing ring 34 presses the angular contact bearings 35 tightly, the rotating shaft 38 is arranged in the middle of the inner surface of the upper end of the rotary table upper plate 33, the direct-drive rotating motor 39 is arranged on the rotary table lower plate 37, the direct-drive rotating motor 39 rotates through the rotating shaft 38 of the motor pressing ring 40, so as to drive the rotary table upper plate 33 to rotate, the circular grating 41, the reading head 42 is fixedly connected with the lower plate 37 of the rotating table through a reading head seat 43 (the reading head 42 feeds back the position information on the circular grating 41 at any time to perform precise control).
The fourth concrete implementation mode: as shown in fig. 7, 14 and 15, the present embodiment is further described with respect to the first embodiment, in which the θ -axis three-point adjusting platform 6 (adopting a structure of a schalty plateau) includes a rotating table upper plate 44, a rotating table lower plate 53, three spring guide post seats 45, three springs 46, three spring guide posts 47, six L-shaped connecting plates 48, three ball joint concave surfaces 49, three ball joint convex surfaces 50, three differential micrometer heads 51 and three differential micrometer head seats 52;
the six L-shaped connecting plates 48 are arranged on the periphery of the rotating table lower plate 53 and fixedly connected with the rotating table lower plate 53, wherein spring guide post seats 45 are arranged on three L-shaped connecting plates 48 which are separated from each other, a spring guide post 47 penetrates into each spring guide post seat 45, the upper ends of the three spring guide posts 47 are fixedly connected with the lower surface of the rotating table upper plate 44, a spring 46 is sleeved on each spring guide post 47 which is positioned below the spring guide post seat 45, the spring guide posts 47 are flexibly connected with the spring guide post seats 45 through the springs 46 (the three spring guide posts 47 mainly aim to realize the precise compression of the mechanism and eliminate reverse gaps), the three differential micrometer seats 52 are fixed on the other three L-shaped connecting plates 48, a differential micrometer head 51 is arranged on each differential micrometer seat 52, the three spherical joint concave surfaces 49 are arranged corresponding to the three spherical joint convex surfaces 50 one by one, each spherical joint concave surface 49 is matched with a corresponding spherical joint convex surface 50 (for a ball joint to be researched, the precision is extremely high), the three spherical joint concave surfaces 49 are fixedly connected with the lower surface of the rotating table upper plate 44, the three spherical joint convex surfaces 50 correspond to the three differential micrometer heads 51 one by one, and each spherical joint convex surface 50 is fixedly connected with the corresponding differential micrometer head 51 (by adjusting the three differential micrometer heads 51, the device realizes three-point leveling).
The working principle is as follows:
the base 1 is arranged on a platform to be used, in the working condition that high-frequency motion is required, firstly, the theta-axis three-point adjusting platform 6 is leveled, the lower plate 53 of the rotating platform is a fixed part, six L-shaped connecting plates 48 are fixedly connected with the lower plate, spring guide post seats 45 are arranged on three L-shaped connecting plates 48 which are separated from each other, the spring guide posts 47 are flexibly connected with the spring guide post seats 45 through springs 46, the spring guide posts 47 are simultaneously arranged on the upper plate 44 of the rotating platform, the three spring guide posts 47 are mainly used for realizing the precise compression of the mechanism and eliminating reverse gaps, a differential micrometer seat 52 is fixed on the other three L-shaped connecting plates 48, a differential micrometer seat 51 is arranged on the differential micrometer seat 52, a spherical joint concave surface 49 and a spherical joint convex surface 50 are matched spherical joints, the precision is extremely high, the spherical joint concave surface 49 is fixedly connected with the upper plate 44 of the rotating platform, the spherical joint convex surface 50 is fixedly connected, by adjusting the three differential micrometer heads 51, the device achieves three-point leveling.
And then operating the Z-axis precision rotating platform 5 to adjust the Z-direction angle, wherein the Z-axis precision rotating platform 5 mainly serves to drive the theta-axis three-point adjusting platform 6 to rotate, and the working principle is that a rotating platform lower plate 37 is fixed on the Z-axis precision lifting platform 4, the rotating platform lower plate 37 and a rotating platform upper plate 33 do opposite rotation motion through an angular contact bearing 35 and a spacing ring 36, a pressing ring 34 tightly presses the angular contact bearing 35, a rotating shaft 38 is installed on the rotating platform upper plate 33, a direct-drive rotating motor 39 is installed on the rotating platform lower plate 37, and drives the rotating platform upper plate 33 to do rotation motion through a motor pressing ring 40, a circular grating 41 is installed on the motor pressing ring 40, a reading head 42 is fixed with the rotating platform lower plate 37 through a reading head seat 43, and the reading head 42 feeds back position information on the circular grating.
Then according to elevation and detection, finely adjusting the Z-axis precision lifting platform 4, wherein the working principle of the Z-axis precision lifting platform 4 is as follows: the wedge block 21 is respectively connected with the lifting platform upper plate 19 and the lifting platform lower plate 31 through an upper crossed roller guide rail 20 and a lower crossed roller guide rail 27, and the ball screw system 32 is tightly connected with the wedge block 21. Four linear bearing seats 26 are arranged on a lower lifting platform plate 31, four self-lubricating linear bearings 23 are arranged on the four linear bearing seats 26, guide posts 22 arranged on an upper lifting platform plate 19 and the self-lubricating linear bearings 23 do relative motion, a speed reducer seat 28 is arranged on the lower lifting platform plate 31, a harmonic speed reducer 29 is arranged on the speed reducer seat 28 and is connected with a servo motor 30, the servo motor 30 drives a ball screw system 32 to generate rotary motion, the ball screw system 32 converts the motion into linear motion and drives a wedge block 21 to do linear motion together, an upper cross roller guide rail 20 and a lower cross roller guide rail 27 convert horizontal linear motion into more precise vertical linear motion under the action of the four self-lubricating linear bearings 23, a Z-axis grating ruler 24 is fixed through a Z-axis grating ruler seat 25 arranged on the lower lifting platform plate 31, and feeds back position information at any time.
After the four degrees of freedom are adjusted, the X-axis air-floating guide rail 2 and the Y-axis air-floating guide rail 3 can be respectively controlled to perform high-frequency variable-speed motion, and the X-axis air-floating guide rail 2 and the Y-axis air-floating guide rail 3 can respectively perform repeated start-stop motion with the acceleration of 1.4g and 220mm/s during high-frequency motion.
When the interpolation algorithm is moved, the theta-axis three-point adjusting platform 6 can be manually leveled, then the Z-axis precise rotating platform 5, the Z-axis precise lifting platform 4, the X-axis air-floating guide rail 2 and the Y-axis air-floating guide rail 3 are operated to be linked, the requirement of quick response and accurate positioning is met, and at the moment, the X-axis air-floating guide rail 2 and the Y-axis air-floating guide rail 3 can respectively perform quick response movement at the speed of 1g acceleration of 350 mm/s.
On the base 1, X-axis linear motor stator 7, X-axis spacing subassembly 9 (have bolt and nut combination to constitute), X-axis grating chi 10 all install on granite base 8. The X-axis linear motor coil 13 is arranged on an X-axis slide carriage 15 through an X-axis linear motor coil seat 12, the X-axis slide carriage 15 can reciprocate under the action of the X-axis linear motor coil 13 during operation, and the X-axis limiting component 9 limits the mechanical position. The X-axis slide carriage 15 is also a Y-axis guide rail seat at the same time, and plays a role in saving space, the Y-axis linear motor coil 18 is arranged on the Y-axis slide carriage 16 through the Y-axis linear motor coil seat 17, and the working principle is the same as that of the X-axis slide carriage.
All the X-axis limiting assemblies 9 and the Y-axis limiting assemblies 11 are products produced by German FESTO.
Parameter(s)
Claims (1)
1. An ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection is characterized in that: the device comprises a base assembly (1), an X-axis air-floating guide rail (2), a Y-axis air-floating guide rail (3), a Z-axis precision lifting platform (4), a Z-axis precision rotating platform (5) and a theta-axis three-point adjusting platform (6); the base component (1) comprises a granite base (8), an X-axis grating ruler (10), two X-axis linear motor stators (7) and eight X-axis limiting components (9); the X-axis air-floating guide rail (2) comprises a Y-axis grating ruler (14), an X-axis slide carriage (15), two X-axis linear motor coil seats (12), two X-axis linear motor coils (13) and four Y-axis limiting components (11); the Y-axis air-floating guide rail (3) comprises a Y-axis slide carriage (16), two Y-axis linear motor coil seats (17) and two Y-axis linear motor coils (18);
the X-axis grating ruler (10) and the two X-axis linear motor stators (7) are installed on a granite base (8), the eight X-axis limiting assemblies (9) are installed on four supports which are arranged in a rectangular shape and fixed on the granite base (8), the two X-axis linear motor stators (7) are arranged oppositely, and the X-axis grating ruler (10) is arranged between the two X-axis linear motor stators (7); the X-axis linear motor coil assembly comprises two X-axis linear motor coils (13), four Y-axis limiting assemblies (11) and a Y-axis grating ruler (14), wherein the two X-axis linear motor coils (13) are respectively arranged on an X-axis slide carriage (15) through an X-axis linear motor coil seat (12), the X-axis slide carriage (15) is arranged on a granite base (8) in a sliding mode, the four Y-axis limiting assemblies (11) are arranged on the two X-axis linear motor coil seats (12), the X-axis slide carriage (15) can reciprocate under the action of the X-axis linear motor coils (13) during work, the mechanical position of the X-axis slide carriage (15) is limited through the eight X-axis limiting assemblies (9), and the Y-axis grating ruler (14) is arranged on the X-axis slide carriage; the two Y-axis linear motor coils (18) are respectively arranged on a Y-axis slide carriage (16) through a Y-axis linear motor coil seat (17), and the Y-axis slide carriage (16) is arranged on the X-axis slide carriage (15) in a sliding manner; the Z-axis precision lifting platform (4) is fixed on two Y-axis linear motor coil bases (17), the Z-axis precision rotating platform (5) is installed on the Z-axis precision lifting platform (4), and the theta-axis three-point adjusting platform (6) is installed on the Z-axis precision rotating platform (5); the Z-axis precision rotary table (5) comprises a rotary table upper plate (33), a pressing ring (34), a spacer ring (36), a rotary table lower plate (37), a rotating shaft (38), a direct-drive rotating motor (39), a motor pressing ring (40), a circular grating (41), a reading head (42), a reading head seat (43) and two angular contact bearings (35);
the rotary table lower plate (37) is fixed on the Z-axis precision lifting table (4), the lower end of the rotary table upper plate (33) is arranged in the rotary table lower plate (37), two angular contact bearings (35) are arranged between the rotary table upper plate (33) and the rotary table lower plate (37), the two angular contact bearings (35) are separated by a spacer ring (36), the rotary table lower plate (37) is in opposite rotation movement with the rotary table upper plate (33) through the two angular contact bearings (35) and the spacer ring (36), the pressing ring (34) is arranged between the rotary table lower plate (37) and the rotary table upper plate (33), the angular contact bearings (35) are tightly pressed by the pressing ring (34), the rotating shaft (38) is arranged in the middle of the inner surface of the upper end of the rotary table upper plate (33), the direct-drive rotating motor (39) is arranged on the rotary table (37), and the rotating motor (39) rotates through the motor pressing ring (40), thereby driving the rotating platform upper plate (33) to rotate, the circular grating (41) is arranged on the motor pressing ring (40), and the reading head (42) is fixedly connected with the rotating platform lower plate (37) through a reading head seat (43);
the theta-axis three-point adjusting platform (6) comprises a rotary table upper plate (44), a rotary table lower plate (53), three spring guide post seats (45), three springs (46), three spring guide posts (47), six L-shaped connecting plates (48), three ball joint concave surfaces (49), three ball joint convex surfaces (50), three differential micrometer heads (51) and three differential micrometer head seats (52); the six L-shaped connecting plates (48) are arranged on the outer periphery of the rotating table lower plate (53) and are fixedly connected with the rotating table lower plate (53), spring guide post seats (45) are respectively arranged on the three L-shaped connecting plates (48) which are separated from each other, a spring guide post (47) penetrates into each spring guide post seat (45), the upper ends of the three spring guide posts (47) are fixedly connected with the lower surface of the rotating table upper plate (44), a spring (46) is sleeved on each spring guide post (47) and positioned below the spring guide post seat (45), the spring guide posts (47) are flexibly connected with the spring guide post seats (45) through the springs (46), the three differential micrometer measuring bases (52) are fixed on the other three L-shaped connecting plates (48), a differential micrometer measuring head (51) is arranged on each differential micrometer measuring head base (52), the three spherical joint concave surfaces (49) and the three spherical joint convex surfaces (50) are arranged in a one-to-one correspondence manner, each spherical joint concave surface (49) is matched with a corresponding spherical joint convex surface (50), the three spherical joint concave surfaces (49) are fixedly connected with the lower surface of the rotating table upper plate (44), the three spherical joint convex surfaces (50) correspond to the three differential micrometer heads (51) one by one, and each spherical joint convex surface (50) is fixedly connected with the corresponding differential micrometer head (51);
the Z-axis precise lifting platform (4) comprises a lifting platform upper plate (19), an upper crossed roller guide rail (20), a wedge-shaped block (21), a Z-axis grating ruler (24), a Z-axis grating ruler seat (25), a lower crossed roller guide rail (27), a speed reducer seat (28), a harmonic reducer (29), a servo motor (30), a lifting platform lower plate (31), a ball screw system (32), four guide columns (22), four self-lubricating linear bearings (23) and four linear bearing seats (26); the wedge-shaped block (21) is respectively connected with an upper lifting platform plate (19) and a lower lifting platform plate (31) through an upper crossed roller guide rail (20) and a lower crossed roller guide rail (27), a ball screw system (32) is tightly connected with the wedge-shaped block (21), four linear bearing seats (26) are arranged on the lower lifting platform plate (31), each linear bearing seat (26) is provided with one self-lubricating linear bearing (23), four guide posts (22) arranged below the upper lifting platform plate (19) and the four self-lubricating linear bearings (23) move relatively, the speed reducer seat (28) is arranged on the lower lifting platform plate (31), the harmonic reducer (29) is arranged on the speed reducer seat (28), and the ball screw system (32) is connected with a servo motor (30) through the harmonic reducer (29), the Z-axis grating ruler seat (25) is installed on the lower plate (31) of the lifting platform, and the Z-axis grating ruler (24) is installed on the Z-axis grating ruler seat (25).
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| CN201711192259.0A CN107907959B (en) | 2017-11-24 | 2017-11-24 | Ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection |
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| CN201711192259.0A CN107907959B (en) | 2017-11-24 | 2017-11-24 | Ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection |
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| CN107907959B true CN107907959B (en) | 2020-11-24 |
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| CN110442154B (en) * | 2019-08-30 | 2022-07-15 | 北京遥感设备研究所 | Multi-degree-of-freedom precision control platform |
| JP6825148B1 (en) * | 2020-06-02 | 2021-02-03 | 株式会社ソディック | Laminated modeling equipment |
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