CN107907526A - A kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell - Google Patents

A kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell Download PDF

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CN107907526A
CN107907526A CN201711426271.3A CN201711426271A CN107907526A CN 107907526 A CN107907526 A CN 107907526A CN 201711426271 A CN201711426271 A CN 201711426271A CN 107907526 A CN107907526 A CN 107907526A
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ultraviolet
microcobjective
high power
optical axis
motor driver
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CN107907526B (en
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万雄
袁汝俊
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Shanghai Institute of Technical Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6402Atomic fluorescence; Laser induced fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications

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Abstract

The invention discloses a kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell, which is made of master controller, spectrometer, optical fiber, three-dimensional motor driver, three-dimensional precise electric platforms and optical head.The invention has the advantages that providing a kind of adaptive Raman fluorescence imaging combined system, the diameter of focal beam spot can be adaptively adjusted in micro-zone analysis;Zone leveling gray scale using electronic eyepiece meets self-focusing and the requirement of wide range scanning imagery as being scanned into picture point intensity;Three dimensions active laser Raman, EO-1 hyperion fluorescence, visible wide range scanning imagery can be achieved at the same time, there is provided much information is to carry out micro-zone analysis.

Description

A kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell
Technical field
The present invention relates to a kind of substance detection system, more particularly to one kind is using scanning laser Raman image, scanning laser Induced fluorescence is imaged and the substance detection system of face battle array wide range scanning imagery, suitable for the thing under survey of deep space planet open environment Matter detects, and belongs to planet in-situ investigation field.
Background technology
For following survey of deep space, material composition Detection Techniques and method are proposed with the requirement of higher, it is in situ fine Detectivity is the technology lofty perch that each spacefaring nation aims at.Fine detection requires laser focus point smaller, the material of analysis Very little is measured, element and molecular species are more rich, and quantification is more accurate to be carried out under the monitoring of pole high-space resolution imaging again at the same time.
LR laser raman (Raman) and the important means that Ultra-Violet Laser induced fluorescence is elemental analysis, wherein laser Raman can realize the analysis of material molecule composition, and Ultra-Violet Laser induced fluorescence is in addition to available for imaging, it may also be used for one The analysis of a little element especially rare earth elements.Raman class species analysis in survey of deep space is than conventional Raman application requirement more Height, main facing challenges and technological difficulties form complexity in the mineral matter contained in due to test object rock, soil, together Kind mineral grain particle diameter is minimum.Therefore, magnitude of the laser focal beam spot at 1 micron is required in micro-zone analysis, could be to mineral Accurate micro-zone analysis is carried out, high to micro- optical path requirements, conventional Raman probe is influenced by optical fiber transmission mode, it is poly- Burnt hot spot is excited optical mode degeneration and the influence of diffraction limit, therefore its focal beam spot is often greater than 5 microns, can not meet the requirements; Using free light path add short wavelength laser increase again multiplying power high-NA microcobjective synthesis, can obtain in theory minimum Focal beam spot, but due to focus on the depth of field it is minimum, therefore, it is necessary to find the suitable self-focusing of micro-zone analysis three-dimensional structural analysis Scheme, and ensure that the focal beam spot of every is in the same size and be consistent with design load, meanwhile, if the self-focusing time is grown, will make Scanning imagery speed is obtained to be affected.Therefore, it is necessary to simple and direct quickly Raman self-focusing and wide range scanning imagery mode.
For the detection of above deep space raman microspectroscopy and imaging demand, the present invention propose it is a kind of using scanning laser Raman into The substance detection system of picture, the imaging of scanning laser induced fluorescence and face battle array wide range scanning imagery, is opened suitable for survey of deep space planet The microcell material detection under environment is put, can obtain the three-dimensional appearance and corresponding molecular distribution and terres rares fluorescent material of microcell Distribution.
The content of the invention
, can be accurate it is an object of the invention to provide a kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell Required constant focused spot size is obtained, and while Raman fluorescence spectrum is distributed and detects, obtains the micro- of detected object Area's three-dimensional appearance, meets the needs of micro-zone in situ species analysis.
Adaptive Raman fluorescence imaging combined system proposed by the present invention is by master controller, spectrometer, optical fiber, three-dimensional motor Driver, three-dimensional precise electric platforms and optical head form;
Wherein optical head is by ultraviolet Ramar laser, UV interference filters, secondary motor driver, secondary straight-line electric The ultraviolet microcobjective of moving platform, low power, dichroic mirror, the ultraviolet microcobjective of long reach high power, main motor driver, main straight line Electric platforms, ultraviolet Rayleigh optical filter, ratio light splitting piece, microcobjective, pipe lens and electronic eyepiece composition;Have in electronic eyepiece Imaging lens and imaging sensor;
The nearly collimated laser beam of cylindricality that ultraviolet Ramar laser is sent along primary optical axis passes through UV interference filters, can filter out The subharmonic interference for the Ultra-Violet Laser that ultraviolet Ramar laser is sent so that its Raman signal signal-to-noise ratio higher excited;Column After the nearly collimated laser beam of shape passes through UV interference filters, through the ultraviolet microcobjective of low power, taper laser beam is formed;Taper swashs After light beam passes through dichroic mirror, the entrance pupil of the ultraviolet microcobjective of long reach high power, at the position of entrance pupil, taper laser are reached The diameter of beam will be greater than the diameter of entrance pupil, since the cone angle of taper laser beam is definite value, the ultraviolet microcobjective of low power and length The distance of the ultraviolet microcobjective of operating distance high power is more remote, and the diameter of taper laser beam is bigger than the diameter of entrance pupil must be more, pass through The laser energy of the ultraviolet microcobjective of long reach high power is weaker, but focal beam spot is smaller;Therefore can be by adjusting low power purple The distance of outer microcobjective and the ultraviolet microcobjective of long reach high power, through the ultraviolet microcobjective of long reach high power Laser energy and focal beam spot size in make choice, i.e., big energy large spot, small energy small light spot;The reverse edge of echo-signal Primary optical axis passes through the ultraviolet microcobjective of long reach high power, along optical axis traveling is received after dichroic mirror reflection, reaches ratio light splitting It is divided into orthogonal two-way after piece:Advance all the way through reflecting along imaging optical axis, through the imaging lens in pipe lens focus to electronic eyepiece Between one times to two times focal length of head, imaged camera lens is into the real image of amplification to imaging sensor;Another way is divided through ratio After piece, focused to after ultraviolet Rayleigh optical filter filters out the Rayleigh scattering of ultraviolet Ramar laser wavelength, then through microcobjective The incident end face of optical fiber, is analyzed subsequently into spectrometer;The ultraviolet microcobjective of low power is installed on secondary straight line electric platform On, one-dimensional precise translation can be made along primary optical axis under the drive of secondary motor driver;The ultraviolet micro- thing of long reach high power Mirror is installed on main straight line electric platform, can make one-dimensional precise translation along primary optical axis under the drive of main motor driver;It is secondary The translation of straight line electric platform is mainly used to change the ultraviolet microcobjective of low power and the ultraviolet microcobjective of long reach high power Distance;The translation of main straight line electric platform is mainly used to make the ultraviolet microcobjective vernier focusing of long reach high power;Primary optical axis, Imaging optical axis, reception optical axis three are coplanar;Primary optical axis is parallel with imaging optical axis, and vertical with receiving optical axis;
Optical head is installed on three-dimensional precise electric platforms, and three-dimensional precise electric platforms can be in three-dimensional motor driver Make the three-dimensional precise movement of submicron order under driving;
Master controller can be to three-dimensional motor driver, main motor driver, secondary motor driver, ultraviolet raman laser Device, imaging sensor, spectrometer hair control instruction;And can receive imaging sensor output digital image and spectrometer it is defeated Go out spectral information;
Adaptive Raman fluorescence imaging method for combined use proposed by the present invention comprises the following steps:
(1) expected focal spot adapted local cosine transform calibration
In deep space material in-situ investigation, the Raman focus point of different scale is needed to different detected objects, i.e., it is expected burnt Spot, such as the mineral matter to distribution uniform, can use slightly large-sized expected focal spot;And for changing more mineral Matter, can use the expection focal spot of very small dimensions, to realize very fine micro-zone analysis;
Firstly, for the detected object fundamental property according to test zone, the diameter for being expected focal spot is set;Graduation will be measured Plate is placed on the test zone below the ultraviolet microcobjective of long reach high power;There is uniform groove on measuring reticle;
Main controller controls open ultraviolet Ramar laser, its UV laser beam sent passes through ultraviolet interference filter successively The ultraviolet microcobjective of piece, low power, dichroic mirror, then illuminate through the ultraviolet microcobjective of long reach high power and focus to measurement point Plate is drawn, forms real-time focal spot;The reflected light edge of measuring reticle is reversely ultraviolet micro- along primary optical axis through long reach high power Object lens, reflect through dichroic mirror, then are reflected through ratio light splitting piece, and through pipe lens focus, then the real-time micro-imaging of imaged camera lens is extremely Imaging sensor;
Master controller receives the microscopic digital image of imaging sensor output, and makees scan picture;Carried using edge Algorithm is taken to obtain real-time focal spot excircle configuration, so that it is determined that the imaging region of focal spot in real time, calculates all pixels in imaging region Average gray value G;
Master controller issues instructions to main motor driver, drives main straight line electric platform to move downward a step-length;It is main Controller receives the microscopic digital image of imaging sensor output, determines the imaging region of real-time focal spot, calculates in imaging region The average gray value G of all pixels, and it is to increase or reduce to compare G values:If G values increase, it is to connect to illustrate to move downward The direction of perifocus;If G values reduce, it is the direction close to focus to illustrate movement upwards;
Master controller issues instructions to main motor driver, drives main straight line electric platform to be transported to close to the direction of focus It is dynamic, while the average gray value G of all pixels in the imaging region of real-time focal spot is calculated in real time, until G values reach maximum, this When be tightly focused state, master controller issues instructions to main motor driver, stop motion;
Under tightly focused state, the microscopic digital image that master controller exports imaging sensor uses Boundary extracting algorithm The linear position of the groove of measuring reticle, and focal spot excircle configuration in real time are obtained, then calculates the picture at adjacent scribe line interval The number of pixels of plain number and real-time focal spot excircle configuration diameter, so as to obtain real-time focal spot according to the distance computation of groove Diameter;
If the diameter of real-time focal spot is more than the diameter of expected focal spot, master controller issues instructions to secondary motor driving Device, drives secondary straight line electric platform to move upwards, increases the ultraviolet microcobjective of low power and long reach high power is ultraviolet micro- The distance of object lens, weakens through the laser energy of the ultraviolet microcobjective of long reach high power at this time, but focal spot reduces in real time, directly Diameter to real-time focal spot is equal with the diameter of expected focal spot, and master controller issues instructions to secondary motor driver, stops secondary The movement of level straight line electric platform;
Similarly, if the diameter of focal spot is less than the diameter of expected focal spot in real time, master controller issues instructions to secondary Motor driver, drives secondary straight line electric platform to move downward, reduces the ultraviolet microcobjective of low power and long reach high power The distance of ultraviolet microcobjective, increases, real-time focal spot through the laser energy of the ultraviolet microcobjective of long reach high power at this time Increase, until the diameter of real-time focal spot is equal with the diameter of expected focal spot, master controller issues instructions to secondary motor driver, Stop the movement of secondary straight line electric platform;
(2) detected object single-point tightly focused
Measuring reticle is removed, adaptive Raman fluorescence imaging combined system is moved into actual test region, is detected at this time Object is located at the lower section of optical head, and the distance of the ultraviolet microcobjective of distance operating distance high power is much larger than its focal length;
Main controller controls open ultraviolet Ramar laser, its UV laser beam sent passes through ultraviolet interference filter successively The ultraviolet microcobjective of piece, low power, dichroic mirror, then defocus to the table of detected object through the ultraviolet microcobjective of long reach high power Face, reflected light are reflected along reversely the ultraviolet microcobjective of long reach high power is passed through along primary optical axis through dichroic mirror, then through ratio point Mating plate reflects, and through pipe lens focus, then the real-time micro-imaging of imaged camera lens is to imaging sensor;Master controller receives image and passes The microscopic digital image of sensor output, and make Fast Fourier Transform, extract its high fdrequency component H;
Master controller issues instructions to three-dimensional motor driver, drives optical head on three-dimensional precise electric platforms along Z Axis moves downward, and at this time, detected object and the distance of the ultraviolet microcobjective of long reach high power reduce, main in motion process Controller constantly carries out Fast Fourier Transform to the microscopic digital image of imaging sensor output in real time, and it is high constantly to extract it Frequency component H, until H reaches maximum, at this time laser by tightly focused to detected object surface a bit, real-time focal spot size etc. In expected focal spot size, tightly focused state is now in;
(3) Raman fluorescence and image-forming information obtain
Under this tightly focused state, master controller records the three-D displacement amount of three-dimensional precise electric platforms, sets it to Initial three-dimensional coordinate (x1,y1,z1);Master controller receives the microscopic digital image of imaging sensor output, is calculated using edge extracting Method obtains real-time focal spot excircle configuration, so that it is determined that the imaging region of focal spot in real time, calculates the flat of all pixels in imaging region Equal gray value g1;The Raman of the real-time focal spot position in detected object surface and fluorescence back scattering pass through long reach along primary optical axis The ultraviolet microcobjective of high power, reflects through dichroic mirror, after ratio light splitting piece, through ultraviolet Rayleigh optical filter by ultraviolet raman laser After the Rayleigh scattering of device wavelength filters out, then the incident end face of optical fiber is focused to through microcobjective, subsequently into spectrometer, spectrometer Spectral signal is exported to master controller and is analyzed;Master controller extracts the discrete Raman line of n bars of the spectral signal first λ1, λ2, λ3..., λn, record its intensity of spectral line Ι11, Ι12, Ι13..., Ι1n;Then continuous fluorescence spectral line is divided into etc. between spectrum Every m sections;And record every section of fluorescence Spectra mean intensity J11, J12, J13..., J1m
(4) micro-zone analysis is scanned
Master controller determines number of scan points A, the B in micro-zone analysis XY directions, and scanning step C, D;Master controller is sent Instruct to three-dimensional motor driver, drive the optical head on three-dimensional precise electric platforms to make the S-shaped scanning of X/Y plane, XY is put down Each point on face, then move up and down along Z axis, perform the single-point tightly focused of step (2);
To each scanning element i (i is more than or equal to 2, until i is equal to A × B), under the tightly focused state of the point, master controller The three-D displacement amount of three-dimensional precise electric platforms is recorded, determines its three-dimensional coordinate (xi,yi,zi);Master controller receives image sensing The microscopic digital image of device output, real-time focal spot excircle configuration is obtained using Boundary extracting algorithm, so that it is determined that real-time focal spot Imaging region, calculates the average gray value g of all pixels in imaging regioni;The discrete Raman line λ of master controller record n bars1, λ2, λ3..., λnThe intensity of spectral line Ιi1, Ιi2, Ιi3..., Ιin;And record the fluorescence Spectra mean intensity J of m sections of every section of fluorescence Spectrasi1, Ji2,Ji3,...,Jim
Master controller integrates the three-dimensional coordinate of A × B scanning element first, draws the three-dimensional on scanning area detected object surface Geometrical morphology;Then, the g of comprehensive each scanning element1,g2,...,gi..., the three-dimensional geometry that subject surface is surveyed in detection can be obtained The gray level image of pattern;Then, the I of comprehensive each scanning element11,I21,...,Ii1..., obtain the wavelength on detected object surface For λ1Raman image, similarly, the I of comprehensive each scanning element12,I22,...,Ii2..., obtain the ripple on detected object surface A length of λ2Raman image ..., until it is λ to obtain the wavelength on detected object surfacenRaman image;Finally, synthesis is each sweeps The J of described point11,J21,...,Ji1..., the fluoroscopic image of first spectral coverage on detected object surface is obtained, it is similarly, comprehensive each The J of a scanning element12,J22,...,Ji2..., obtain the fluoroscopic image of second spectral coverage on detected object surface ..., until obtain To the fluoroscopic image of m-th of spectral coverage on detected object surface;
So far, micro-zone analysis is completed, obtains the three-dimensional appearance distribution of microcell, and upper A × B of three-dimensional appearance distribution altogether The Ultra-Violet Laser inducing fluorescent high spectrum of the wide range image of scanning element, the ultraviolet laser Raman image of n wavelength and m spectral coverage Image.
The invention has the advantages that a kind of adaptive Raman fluorescence imaging combined system is provided, can be in micro-zone analysis When be adaptively adjusted the diameter of focal beam spot;Zone leveling gray scale using electronic eyepiece is as picture point intensity is scanned into, at the same time Meet self-focusing and the requirement of wide range scanning imagery;Three dimensions active laser Raman, EO-1 hyperion fluorescence, visible can be achieved at the same time Wide range scanning imagery, there is provided much information is to carry out micro-zone analysis.
Brief description of the drawings
Fig. 1 is present system structure diagram, in figure:1 --- three-dimensional motor driver;2 --- optical head; 3 --- ultraviolet Ramar laser;4 --- primary optical axis;5 --- UV interference filters;6 --- secondary motor driver;7—— Master controller;8 --- the ultraviolet microcobjective of low power;9 --- secondary straight line electric platform;10 --- imaging optical axis;11 --- electricity Specific item mirror;12 --- spectrometer;13 --- optical fiber;14 --- microcobjective;15 --- receive optical axis;16 --- ultraviolet Rayleigh filter Mating plate;17 --- ratio light splitting piece;18 --- real-time focal spot;19 --- it is expected that focal spot;20 --- groove;21 --- main motor drives Dynamic device;22 --- main straight line electric platform;23 --- detected object;24 --- measuring reticle;25 --- long reach is high Ultraviolet microcobjective again;26 --- entrance pupil;27 --- dichroic mirror;28 --- taper laser beam;29 --- three-dimensional precise is electronic flat Platform;30 --- the nearly collimated laser beam of cylindricality;31 --- imaging sensor;32 --- imaging lens;33 --- pipe lens.
Embodiment
The specific embodiment of the invention is as shown in Figure 1.
Adaptive Raman fluorescence imaging combined system proposed by the present invention is by master controller 7, spectrometer 12, optical fiber 13, three Dimension motor driver 1, three-dimensional precise electric platforms 29 are formed with optical head 2;
Wherein optical head 2 is straight by ultraviolet Ramar laser 3, UV interference filters 5, secondary motor driver 6, secondary The ultraviolet microcobjective 8 of line electric platforms 9, low power, dichroic mirror 27, the ultraviolet microcobjective 25 of long reach high power, main motor drive Dynamic device 21, main straight line electric platform 22, ultraviolet Rayleigh optical filter 16, ratio light splitting piece 17, microcobjective 14, pipe lens 33 and electricity Specific item mirror 11 forms;There are imaging lens 32 and imaging sensor 31 in electronic eyepiece 11;
The cylindricality that ultraviolet Ramar laser 3 (continuous wave laser of the present embodiment 360nm, 50mW) sends along primary optical axis 4 Through UV interference filters 5, (UV interference filters 5 are ultraviolet narrow band pass filter to nearly collimated laser beam 30, and the present embodiment is 360nm, bandwidth are the bandpass filter of 1nm), can the subharmonic of Ultra-Violet Laser that sends of filtering ultraviolet Ramar laser 3 do Disturb so that its Raman signal signal-to-noise ratio higher excited;After the nearly collimated laser beam 30 of cylindricality passes through UV interference filters 5, wear The ultraviolet microcobjective 8 of low power is crossed, forms taper laser beam 28;Taper laser beam 28 passes through (the present embodiment 360nm of dichroic mirror 27 High saturating, 364nm-900nm high is instead) after, reaching the ultraviolet microcobjective 25 of long reach high power, (the present embodiment is answered using infinity Close the ultraviolet 100X microcobjectives of flat field anaberration, long working distance 11mm) entrance pupil 26, at the position of entrance pupil 26, cone The diameter of shape laser beam 28 will be greater than the diameter of entrance pupil 26, and since the cone angle of taper laser beam 28 is definite value, low power is ultraviolet The distance of the microcobjective 25 ultraviolet with long reach high power of microcobjective 8 is more remote, and the diameter of taper laser beam 28 is than entrance pupil 26 Diameter it is big must be more, the laser energy through the ultraviolet microcobjective 25 of long reach high power is weaker, but focal beam spot is smaller; Therefore can be by adjusting the distance of the ultraviolet microcobjective 8 of low power and the ultraviolet microcobjective 25 of long reach high power, through length The laser energy of the ultraviolet microcobjective 25 of operating distance high power in focal beam spot size with making choice, i.e., big energy large spot, Small energy small light spot;Echo-signal reversely passes through the ultraviolet microcobjective 25 of long reach high power along primary optical axis 4, and dichroic mirror 27 is anti- Advance along receiving optical axis 15 after penetrating, reach ratio light splitting piece 17 (the present embodiment is 9 to 1 ratio light splitting pieces, i.e., saturating 9 it is anti-1) after divide The two-way being orthogonal:Advance all the way through reflecting along imaging optical axis 10, the imaging lens in electronic eyepiece 11 are focused to through pipe lens 33 One times of first 32 is between two times of focal lengths, and into the real image of amplification to imaging sensor 31, (the present embodiment uses imaged camera lens 32 Black and white area array sensor, its response wave band are 350 to 800 nanometers);After another way passes through ratio light splitting piece 17, through ultraviolet Rayleigh Optical filter 16 (the present embodiment is the Rayleigh optical filter of wavelength 360nm) filters out the Rayleigh scattering of ultraviolet 3 wavelength of Ramar laser Afterwards, then through microcobjective 14 incident end face of optical fiber 13 is focused to, subsequently into (the detection of the present embodiment spectrometer of spectrometer 12 Spectral region is 360-750nm, optical resolution 0.1nm, effective 2000 points of pixel number) analyzed;The ultraviolet micro- thing of low power Mirror 8 is installed on secondary straight line electric platform 9, can be put down under the drive of secondary motor driver 6 along primary optical axis 4 as one-dimensional precise It is dynamic;The ultraviolet microcobjective 25 of long reach high power is installed on main straight line electric platform 22, can be in main motor driver 21 Make one-dimensional precise translation along primary optical axis 4 under drive;It is ultraviolet micro- that the translation of secondary straight line electric platform 9 is mainly used to change low power The distance of object lens 8 and the ultraviolet microcobjective 25 of long reach high power;The translation of main straight line electric platform 22 is mainly used to make length Ultraviolet 25 vernier focusing of microcobjective of operating distance high power;Primary optical axis 4, imaging optical axis 10, reception 15 three of optical axis are coplanar;Key light Axis 4 is parallel with imaging optical axis 10, and vertical with receiving optical axis 15;
Optical head 2 is installed on three-dimensional precise electric platforms 29, and three-dimensional precise electric platforms 29 can drive in three-dimensional motor Make the three-dimensional precise movement of submicron order under the driving of dynamic device 1;
Master controller 7 can be to three-dimensional motor driver 1, main motor driver 21, secondary motor driver 6, ultraviolet Raman Laser 3, imaging sensor 31, spectrometer 12 send out control instruction;And can receive the output digital image of imaging sensor 31 with And the output spectrum information of spectrometer 12;
Adaptive Raman fluorescence imaging method for combined use proposed by the present invention comprises the following steps:
(1) expected focal spot adapted local cosine transform calibration
In deep space material in-situ investigation, the Raman focus point of different scale is needed to different detected objects 23, i.e., it is expected Focal spot 19, such as the mineral matter to distribution uniform, can use slightly large-sized expected focal spot 19;It is and more for changing Mineral matter, can use the expection focal spot 19 of very small dimensions, to realize very fine micro-zone analysis;
Firstly, for 23 fundamental property of detected object according to test zone, diameter (this implementation of expected focal spot 19 is set Example, for olivine mineral, sets be expected focal spot 19 a diameter of 1.7 microns);Measuring reticle 24 is placed on long working distance From the test zone of the ultraviolet lower section of microcobjective 25 of high power;Having uniform groove 20 on measuring reticle 24, (the present embodiment uses The ruling span of measuring reticle is 10 microns);
Ultraviolet Ramar laser 3 is opened in the control of master controller 7, its UV laser beam sent is filtered by ultraviolet interference successively The ultraviolet microcobjective 8 of mating plate 5, low power, dichroic mirror 27, then illuminate and focus on through the ultraviolet microcobjective 25 of long reach high power To measuring reticle 24, real-time focal spot 18 is formed;The reflected light edge of measuring reticle 24 reversely passes through long working distance along primary optical axis 4 From the ultraviolet microcobjective 25 of high power, reflect through dichroic mirror 27, then reflected through ratio light splitting piece 17, focused on through pipe lens 33, then pass through 32 real-time micro-imaging of imaging lens is to imaging sensor 31;
Master controller 7 receives the microscopic digital image that imaging sensor 31 exports, and makees scan picture;Using edge Extraction algorithm obtains real-time 18 excircle configuration of focal spot, so that it is determined that the imaging region of focal spot 18 in real time, calculates institute in imaging region There is the average gray value G of pixel;
Master controller 7 issues instructions to main motor driver 21, drives main straight line electric platform 22 to move downward a step It is long;Master controller 7 receives the microscopic digital image that imaging sensor 31 exports, and determines the imaging region of real-time focal spot 18, calculates The average gray value G of all pixels in imaging region, and it is to increase or reduce to compare G values:If G values increase, illustrate to Lower movement is the direction close to focus;If G values reduce, it is the direction close to focus to illustrate movement upwards;
Master controller 7 issues instructions to main motor driver 21, drives main straight line electric platform 22 to the side close to focus To movement, while the average gray value G of all pixels in the imaging region of real-time focal spot 18 is calculated in real time, until G values reach most Big value, is at this time tightly focused state, master controller 7 issues instructions to main motor driver 21, stop motion;
Under tightly focused state, master controller 7 uses edge extracting to the microscopic digital image that imaging sensor 31 exports Algorithm obtains the linear position of the groove 20 of measuring reticle 24, and 18 excircle configuration of focal spot in real time, then calculates adjacent quarter The number of pixels for the 18 excircle configuration diameter of number of pixels and real-time focal spot that line 20 is spaced, so that the spacing meter according to groove 20 Calculation obtains the diameter of real-time focal spot 18;
If the diameter of real-time focal spot 18 is more than the diameter of expected focal spot 19, master controller 7 issues instructions to secondary electrical Machine driver 6, drives secondary straight line electric platform 9 to move upwards, the increase ultraviolet microcobjective 8 of low power and long reach high power The distance of ultraviolet microcobjective 25, weakens through the laser energy of the ultraviolet microcobjective 25 of long reach high power at this time, but real When focal spot 18 reduce, until the diameter of real-time focal spot 18 is equal with the diameter of expected focal spot 19, master controller 7 issues instructions to secondary Level motor driver 6, stops the movement of secondary straight line electric platform 9;
Similarly, if the diameter of focal spot 18 is less than the diameter of expected focal spot 19 in real time, master controller 7 issues instructions to Secondary motor driver 6, drives secondary straight line electric platform 9 to move downward, reduces the ultraviolet microcobjective 8 of low power and long working distance With a distance from the ultraviolet microcobjective 25 of high power, increase at this time through the laser energy of the ultraviolet microcobjective 25 of long reach high power Greatly, real-time focal spot 18 increases, until the diameter of real-time focal spot 18 is equal with the diameter of expected focal spot 19, master controller 7 sends finger Make to secondary motor driver 6, stop the movement of secondary straight line electric platform 9;
(2) detected object single-point tightly focused
Measuring reticle 24 is removed, adaptive Raman fluorescence imaging combined system is moved into actual test region, is visited at this time The lower section that object 23 is located at optical head 2 is surveyed, the distance of the ultraviolet microcobjective 25 of distance operating distance high power is much larger than its focal length;
Ultraviolet Ramar laser 3 is opened in the control of master controller 7, its UV laser beam sent is filtered by ultraviolet interference successively The ultraviolet microcobjective 8 of mating plate 5, low power, dichroic mirror 27, then defocus to detection through the ultraviolet microcobjective 25 of long reach high power The surface of object 23, reflected light along primary optical axis 4 along reversely the ultraviolet microcobjective 25 of long reach high power is passed through, through dichroic mirror 27 Reflection, then reflects through ratio light splitting piece 17, is focused on through pipe lens 33, then 32 real-time micro-imaging of imaged camera lens is to image sensing Device 31;Master controller 7 receives the microscopic digital image that imaging sensor 31 exports, and makees Fast Fourier Transform, and it is high to extract it Frequency component H;
Master controller 7 issues instructions to three-dimensional motor driver 1, drives the optical head on three-dimensional precise electric platforms 29 2 move downward along Z axis, and at this time, detected object 23 and the distance of the ultraviolet microcobjective 25 of long reach high power reduce, and are moved through Cheng Zhong, master controller 7 constantly carry out Fast Fourier Transform to the microscopic digital image that imaging sensor 31 exports in real time, not Disconnected extraction its high fdrequency component H, until H reaches maximum, at this time laser by tightly focused to 23 surface of detected object a bit, it is real When focal spot 18 size be equal to 19 size of expected focal spot, be now in tightly focused state;
(3) Raman fluorescence and image-forming information obtain
Under this tightly focused state, master controller 7 records the three-D displacement amount of three-dimensional precise electric platforms 29, is set For initial three-dimensional coordinate (x1,y1,z1);Master controller 7 receives the microscopic digital image that imaging sensor 31 exports, using edge Extraction algorithm obtains real-time 18 excircle configuration of focal spot, so that it is determined that the imaging region of focal spot 18 in real time, calculates institute in imaging region There is the average gray value g of pixel1;The Raman of real-time 18 position of focal spot in 23 surface of detected object and fluorescence back scattering are along primary optical axis 4 pass through the ultraviolet microcobjective 25 of long reach high power, are reflected through dichroic mirror 27, after ratio light splitting piece 17, through ultraviolet auspicious After sharp optical filter 16 filters out the Rayleigh scattering of ultraviolet 3 wavelength of Ramar laser, then through microcobjective 14 focus to optical fiber 13 Incident end face, subsequently into spectrometer 12, spectral signal is exported to master controller 7 and analyzed by spectrometer 12;Master controller 7 The discrete Raman line λ of n bars (the present embodiment n=3) of the spectral signal is extracted first1, λ2, λ3..., λn, it is strong to record its spectral line Spend Ι11, Ι12, Ι13..., Ι1n;Then continuous fluorescence spectral line is divided into etc. to the m sections (the present embodiment m=300) of spectrum interval;And remember Record every section of fluorescence Spectra mean intensity J11, J12, J13..., J1m
(4) micro-zone analysis is scanned
Master controller 7 determines number of scan points A, the B in micro-zone analysis XY directions, and scanning step C, D;Master controller 7 is sent out Go out instruction to three-dimensional motor driver 1, drive the optical head 2 on three-dimensional precise electric platforms 29 to make the S-shaped scanning of X/Y plane (after being swept to A point by scanning step C along X-axis, Y-axis shuffles a step-length D, then A point is reversely swept along X-axis, and then Y-axis is being just Move a step-length D, then sweep A point along X-axis forward direction, then Y-axis shuffles a step-length D, then reversely sweep along X-axis A point ..., up to Predetermined Scanning size is completed, number of scan points is multiplied by B, i.e. A × B for A altogether), to each point on X/Y plane, then along Z axis Move up and down, perform the single-point tightly focused of step (2);
To each scanning element i (i is more than or equal to 2, until i is equal to A × B), under the tightly focused state of the point, master controller The three-D displacement amount of 7 record three-dimensional precise electric platforms 29, determines its three-dimensional coordinate (xi,yi,zi);Master controller 7 receives image The microscopic digital image that sensor 31 exports, real-time 18 excircle configuration of focal spot is obtained using Boundary extracting algorithm, so that it is determined that real When focal spot 18 imaging region, calculate imaging region in all pixels average gray value gi;It is discrete that master controller 7 records n bars Raman line λ1, λ2, λ3..., λnThe intensity of spectral line Ιi1, Ιi2, Ιi3..., Ιin;And record the fluorescence Spectra of m sections of every section of fluorescence Spectras Mean intensity Ji1,Ji2,Ji3,...,Jim
Master controller 7 integrates the three-dimensional coordinate of A × B scanning element first, draws 23 surface of scanning area detected object Three-dimensional geometry pattern;Then, the g of comprehensive each scanning element1,g2,...,gi..., 23 surface of object is surveyed in detection three can be obtained Tie up the gray level image of geometrical morphology (the present embodiment is the wide range image that response wave band is 350 to 800 nanometers);Then, it is comprehensive each The I of a scanning element11,I21,...,Ii1..., the wavelength for obtaining 23 surface of detected object is λ1Raman image, it is similarly, comprehensive Close the I of each scanning element12,I22,...,Ii2..., the wavelength for obtaining 23 surface of detected object is λ2Raman image ..., straight It is λ to the wavelength on 23 surface of detected object is obtainednRaman image;Finally, the J of comprehensive each scanning element11,J21,..., Ji1..., the fluoroscopic image of first spectral coverage on 23 surface of detected object is obtained, and similarly, the J of comprehensive each scanning element12, J22,...,Ji2..., obtain the fluoroscopic image of second spectral coverage on 23 surface of detected object ..., until obtain detected object The fluoroscopic image of m-th of spectral coverage on 23 surfaces;
So far, micro-zone analysis is completed, obtains the three-dimensional appearance distribution of microcell, and upper A × B of three-dimensional appearance distribution altogether The Ultra-Violet Laser inducing fluorescent high spectrum of the wide range image of scanning element, the ultraviolet laser Raman image of n wavelength and m spectral coverage Image.

Claims (1)

1. a kind of adaptive Raman fluorescence imaging combined system of survey of deep space microcell, including master controller (7), spectrometer (12), Optical fiber (13), three-dimensional motor driver (1), three-dimensional precise electric platforms (29) and optical head (2);It is characterized in that:
The optical head (2) by ultraviolet Ramar laser (3), UV interference filters (5), secondary motor driver (6), Secondary straight line electric platform (9), the ultraviolet microcobjective of low power (8), dichroic mirror (27), the ultraviolet microcobjective of long reach high power (25), main motor driver (21), main straight line electric platform (22), ultraviolet Rayleigh optical filter (16), ratio light splitting piece (17), aobvious Speck mirror (14), pipe lens (33) and electronic eyepiece (11) composition;There are imaging lens (32) and image to pass in electronic eyepiece (11) Sensor (31);
The nearly collimated laser beam of cylindricality (30) that the ultraviolet Ramar laser (3) is sent along primary optical axis (4) passes through ultraviolet interference Optical filter (5), can the Ultra-Violet Laser that sends of filtering ultraviolet Ramar laser (3) subharmonic interference so that its drawing excited Graceful Signal-to-Noise higher;It is ultraviolet micro- through low power after the nearly collimated laser beam of cylindricality (30) passes through UV interference filters (5) Object lens (8), form taper laser beam (28);After taper laser beam (28) passes through dichroic mirror (27), long reach high power is reached The entrance pupil (26) of ultraviolet microcobjective (25), at the position of entrance pupil (26), the diameter of taper laser beam (28) will be greater than entrance pupil (26) diameter, since the cone angle of taper laser beam (28) is definite value, the ultraviolet microcobjective of low power (8) and long reach The distance of the ultraviolet microcobjective of high power (25) is more remote, and the diameter of taper laser beam (28) is bigger than the diameter of entrance pupil (26) must be more, Laser energy through the ultraviolet microcobjective of long reach high power (25) is weaker, but focal beam spot is smaller;Therefore tune can be passed through The ultraviolet microcobjective of low power (8) and the distance of the ultraviolet microcobjective of long reach high power (25) are saved, through long reach The laser energy of the ultraviolet microcobjective of high power (25) in focal beam spot size with making choice, i.e., big energy large spot, small energy Small light spot;Echo-signal reversely passes through the ultraviolet microcobjective of long reach high power (25) along primary optical axis (4), and dichroic mirror (27) is anti- Along optical axis (15) traveling is received after penetrating, it is divided into orthogonal two-way after reaching ratio light splitting piece (17):All the way through reflecting along imaging Axis (10) is advanced, focused to through pipe lens (33) imaging lens (32) in electronic eyepiece (11) one times to two times focal length it Between, imaged camera lens (32) is into the real image of amplification to imaging sensor (31);After another way passes through ratio light splitting piece (17), through purple After outer Rayleigh optical filter (16) filters out the Rayleigh scattering of ultraviolet Ramar laser (3) wavelength, then through microcobjective (14) focusing To the incident end face of optical fiber (13), analyzed subsequently into spectrometer (12);The ultraviolet microcobjective of low power (8) is installed on secondary On straight line electric platform (9), one-dimensional precise translation can be made along primary optical axis (4) under the drive of secondary motor driver (6);Farm labourer Make to be installed on main straight line electric platform (22) apart from the ultraviolet microcobjective of high power (25), can be in the band of main motor driver (21) Make one-dimensional precise translation along primary optical axis (4) under dynamic;It is ultraviolet aobvious that the translation of secondary straight line electric platform (9) is mainly used to change low power The distance of speck mirror (8) and the ultraviolet microcobjective of long reach high power (25);The translation of main straight line electric platform (22) is main For making the ultraviolet microcobjective of long reach high power (25) vernier focusing;Primary optical axis (4), imaging optical axis (10), receive optical axis (15) three is coplanar;Primary optical axis (4) is parallel with imaging optical axis (10), and vertical with receiving optical axis (15);
The optical head (2) is installed on three-dimensional precise electric platforms (29), and three-dimensional precise electric platforms (29) can be three Make the three-dimensional precise movement of submicron order under the driving of dimension motor driver (1);
The master controller (7) can be to three-dimensional motor driver (1), main motor driver (21), secondary motor driver (6), ultraviolet Ramar laser (3), imaging sensor (31), spectrometer (12) hair control instruction;And imaging sensor can be received (31) output digital image and the output spectrum information of spectrometer (12).
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