KR20160082076A - Simultaneous Imaging device for tomography and surface profiler based on interferometer - Google Patents

Simultaneous Imaging device for tomography and surface profiler based on interferometer Download PDF

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KR20160082076A
KR20160082076A KR1020140194074A KR20140194074A KR20160082076A KR 20160082076 A KR20160082076 A KR 20160082076A KR 1020140194074 A KR1020140194074 A KR 1020140194074A KR 20140194074 A KR20140194074 A KR 20140194074A KR 20160082076 A KR20160082076 A KR 20160082076A
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South Korea
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laser beam
light source
laser
sample stage
measuring
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KR1020140194074A
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Korean (ko)
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한영근
김선덕
심영보
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한양대학교 산학협력단
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Publication of KR20160082076A publication Critical patent/KR20160082076A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02035—Shaping the focal point, e.g. elongated focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02043—Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

An apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape according to an embodiment of the present invention includes: a light source for generating a linear or area laser beam; A parallel conversion unit for converting the laser beam in parallel; Receiving a laser beam from a parallel conversion unit, collecting a laser beam by a beam splitter disposed at the rear side, and sending the same to a sample stage and a reference stage arranged adjacent to the beam splitter so that a focus can be generated; A light receiving optical unit for receiving the laser beam from the sample stage and the reference stage through the beam splitter; And a measuring unit for measuring a laser beam received by the light receiving optical unit and measuring an interference signal for each wavelength, wherein the Fourier transform is performed using frequency information and phase information extracted from the interference signal for each wavelength measured by the measuring unit, The Fourier transform is performed to simultaneously measure the tomographic image or the surface shape of the sample stage.

Description

Technical Field [0001] The present invention relates to a simultaneous imaging apparatus and a surface profiler based on interferometer,

An interferometer-based tomographic image and surface shape simultaneous acquisition device is disclosed. More particularly, the present invention relates to an interferometer-based tomographic image and surface shape simultaneous acquisition apparatus capable of simultaneously measuring tomographic image information and surface shape information using a linear or area laser beam. do.

An interferometer is a device that divides the light coming from the same light source into two or more beams to make a difference in the propagation path, and then observes the interference phenomenon that occurs when the light meets again.

To realize such an interferometer, an interferometer using a point light source is implemented. Such an interferometer has a device capable of scanning at a sample stage, and takes a method of scanning a sample. However, in such a point light source using interferometer, since the sample stage must be scanned by the point light source, the velocity is low and distortion may be caused due to the aberration.

On the other hand, an interferometer using a linear beam or an area beam can be implemented. In the case of such an interferometer, the optical system is complicated because it has an illumination optical system and a light receiving optical system. In addition, these limitations make miniaturization difficult and require more attention to alignment.

An object of an embodiment of the present invention is to provide a method and apparatus for measuring a sample at a high speed using a linear or area laser beam and providing 3D information as well as simple 2D through inspection, The present invention also provides an apparatus for simultaneous acquisition of an interferometer-based tomographic image and a surface shape, which can be applied to various fields such as biotechnology, medicine, and agriculture as well as inspection such as inspection.

Another object of the present invention is to reduce the cost required for constructing the apparatus because the tomographic image information and the surface shape information can be measured at the same time, thereby enhancing the profitability and enhancing the price competitiveness. And to provide an apparatus for simultaneous acquisition of an interferometer-based tomographic image and a surface shape.

An apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape according to an embodiment of the present invention includes: a light source for generating a linear or area laser beam; A parallel conversion unit for converting the laser beam in parallel; An illumination optical unit that receives the laser beam from the parallel conversion unit and collectively transmits the laser beam to a beam splitter disposed at the rear, and sends a sample stage and a reference stage disposed adjacent to the beam splitter such that a focus can be generated; A light receiving optical unit for receiving the laser beam from the sample stage and the reference stage through the beam splitter; And a measuring unit for measuring a laser beam received by the light receiving optical unit and measuring an interference signal for each wavelength, wherein the frequency information and the phase information extracted from the interference signal for each wavelength measured by the measuring unit are used A tomographic image or a surface shape of the sample stage can be simultaneously measured by performing a Fourier transform.

According to one aspect, when the light source is a light source that generates a linear laser beam, the illumination optical unit may be a cylinder lens.

According to one aspect, when the light source is a light source that generates a laser beam having an area, the illumination optical unit may be a condensing lens.

According to one aspect, an imaging lens can be used so that the light receiving optical unit forms an image on the measurement unit without distortion of spherical aberration or chromatic aberration.

According to one aspect, the measurement unit may be a line CCD camera for measuring a linear laser beam or an area CCD camera for measuring a laser beam of an area beam.

According to one aspect of the present invention, the light source is a wavelength tunable laser, which includes an optical fiber tunable laser using a fiber Fabry-Perot filter, an optical fiber tunable laser which adjusts a dispersion value of a laser resonator, A tunable laser using a mirror (Galvo-mirror) or a polygon mirror, or a tunable laser based on Bragg grating.

According to one aspect of the present invention, the apparatus may further include a beam planarizing element interposed between the light source and the parallel conversion unit for beam-flattening the laser beam from the light source to have uniform light intensity.

According to one aspect, the beam planarizing element may be a diffuser, a light pipe, or a lens array based homogenizer.

According to one aspect, the sample stage can be mounted on a stage movable in the horizontal direction, such that scanning over the entire area of the sample stage is possible.

According to the embodiment of the present invention, it is possible to measure a sample at a high speed using a linear or area laser beam, thereby providing not only a simple 2D but also 3D information through inspection and various inspection systems such as semiconductor inspection, It can be applied to various fields such as biotechnology, medicine, and agriculture as well as inspection of internal inspection and surface morphology.

In addition, according to the embodiment of the present invention, since the tomographic image information and the surface shape information can be measured at the same time, it is possible to reduce the cost of constructing the apparatus, thereby increasing the profitability and enhancing the cost competitiveness.

FIG. 1 is a view showing a configuration of an apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape according to an embodiment of the present invention.
Figs. 2A and 2B are diagrams showing a beam transmission structure of the illumination optical section and the light receiving optical section shown in Fig. 1. Fig.
3 is a view illustrating a configuration of an apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape according to another embodiment of the present invention.
4A and 4B are diagrams showing the beam transmission structure of the illumination optical section and the light receiving optical section shown in Fig.

Hereinafter, configurations and applications according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE INVENTION The following description is one of many aspects of the claimed invention and the following description forms part of a detailed description of the present invention.

In the following description, well-known functions or constructions are not described in detail for the sake of clarity and conciseness.

FIG. 1 is a view showing a configuration of an apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape according to an embodiment of the present invention. FIGS. 2A and 2B are views showing a beam transmission structure of the illumination optical part and the light- Fig.

1, an apparatus 100 for simultaneously acquiring an interferometer-based tomographic image and a surface shape according to an embodiment of the present invention includes a light source 110 for generating a linear laser beam, a laser 110 for generating a laser beam from the light source 110, A parallel conversion unit 130 for converting the laser beam into a parallel beam, a beam splitter 150 for receiving the laser beam from the parallel conversion unit 130, and a beam splitter 150 disposed at the trailing end for receiving the laser beam, A sample stage 161 disposed adjacent to the beam splitter 150 and a reference stage 165 to which a focus can be generated and a sample stage 161 and a reference stage 165 A light receiving optical unit 170 for receiving a laser beam that passes from the beam splitter 150 through the beam splitter 150 and a measuring unit 180 for measuring the received laser beam.

With this configuration, the sample can be measured at a high speed using a linear laser beam, and tomographic image information and surface shape information can be simultaneously obtained by one measuring apparatus 100. FIG.

First, the light source 110 of this embodiment is a tunable laser, which includes an optical fiber tunable laser using a fiber Fabry-Perot, an optical fiber tunable laser that changes its wavelength by adjusting the dispersion value of the laser resonator, And a tunable laser using a scan mirror or a polygon mirror or a tunable laser based on a bragg grating. However, the present invention is not limited thereto, and it is natural that another light source 110 can be applied.

On the other hand, the beam flattening element 120 of the present embodiment allows the entire beam irradiated when illumination is applied to the sample stage 161 and the reference stage 165 to be irradiated with a uniform light intensity, Lens array-based homogenizer. However, the present invention is not limited thereto.

The parallel conversion unit 130 of the present embodiment includes a lens 131 and a diaphragm 135 as shown in Fig. 1 for converting the laser beam transmitted by the beam flattening element 120 in parallel . The lens 131 makes the laser beam parallel, and the diaphragm 135 functions to adjust the diameter of the laser beam converted in parallel so that the laser beam can be formed in parallel.

On the other hand, the illumination optical section 140 of the present embodiment is provided with a cylindrical lens (not shown) so as to be beam-splitted by the beam splitter 150 to generate a focus of a linear laser beam at the sample stage 161 and the reference stage 165 140, and a cylinder lens. 1, the parallel laser beam transmitted to the cylinder lens 140 is gathered through the cylinder lens 140 and reaches the sample stage 161 and the reference stage 165 through the beam splitter 150 Thereby forming a focus of the linear laser beam.

As shown in FIG. 2A, the cylinder lens 140 has a semicircular shape when viewed from one side, but has a rectangular shape when viewed from a direction perpendicular thereto, as shown in FIG. 2B. That is, the cylinder lens 140 has a semi-cylindrical shape. This shape allows the linear focal point of the sample stage 161 to be generated and transmitted to the measuring section 180 through the light receiving optical section 170.

The sample stage 161 is mounted on the moving stage 180 so as to scan over the entire area of the sample stage 161 when the laser beam is incident on the sample stage 161 through the illumination optical section 140, The moving stage 190 has a structure that moves in the horizontal direction.

The light receiving optical section 170 of this embodiment can use an imaging lens for receiving light coming from the sample stage 161 and the reference stage 165. [ The imaging lens allows images to be formed without distortion of spherical aberration and chromatic aberration.

Meanwhile, the measuring unit 180 of the present embodiment detects a laser beam received by the light receiving optical unit 170 and measures an interference signal for each wavelength. A line CCD camera can be applied because it measures a linear laser beam. However, the present invention is not limited thereto.

The interference signal can be obtained through the following equation.

Figure pat00001
... Equation 1

Where I is the interference signal, h is the sample height of a stage (161), k is a wave number, I sam is the sample only the reflected signal from the (161), I ref is a signal, I o reflected by the reference stage (165) Means an interference signal generated by the signal of the sample stage 161 and the reference stage 165. The light intensity according to the wavelength can be measured by measuring the light intensity with time in the sample stage 161 while varying the wavelength in the light source 110 provided with the tunable laser, can do.

On the other hand, if the obtained interference signal is Fourier transformed, the following equation can be obtained.

Figure pat00002
... Equation 2

Here, Γ sam and Γ ref are Fourier transformed signals reflected from the sample stage 161 and the reference stage 165, and Γ o is a result of Fourier transform of the interference signal. The fault information can be obtained through Γ o . The resolution of the obtained tomographic image is determined by the following equation.

Figure pat00003
... Equation 3

Here,? O is the central wavelength of the light source 110, and? Is the wavelength bandwidth.

Further, if the phase obtained by the Fourier transform is differentiated by the wave number, the height H of the surface can be obtained. This can be expressed by the following equation.

Figure pat00004
... Equation 4

As described above, the tomographic image or the surface shape of the sample stage 161 can be simultaneously measured by performing the Fourier transform using the frequency information and the phase information extracted from the interference signal for each wavelength measured by the measuring unit 180.

As described above, according to the embodiment of the present invention, it is possible to simultaneously measure tomographic image information and surface shape information, as well as measure a sample at high speed using a linear laser beam.

In addition, it is possible to measure samples at high speed using a linear laser beam. By providing not only simple 2D but also 3D information through inspection, various inspection systems such as semiconductor inspection and display inspection, It can be applied to various fields such as medicine, agriculture, etc., and can inspect internal inspection and surface shape.

In addition, since the tomographic image information and the surface shape information can be simultaneously measured through the apparatus 100, it is possible to reduce the cost of constructing the apparatus, thereby increasing the profitability and enhancing the competitiveness at a price. have.

In addition, since the illumination optical unit 140 and the light receiving optical unit 170 are separately arranged, the structure of the optical unit of the conventional interferometer is simplified, which is advantageous in miniaturization of the apparatus and can be applied to a portable apparatus.

Hereinafter, an apparatus for simultaneously acquiring an interferometer-based tomographic image and a surface shape according to another embodiment of the present invention will be described, but a description of parts substantially identical to those of the acquiring apparatus of the above-described embodiment will be omitted.

3 is a view showing a configuration of an apparatus for simultaneously obtaining an interferometer-based tomographic image and a surface shape simultaneously according to another embodiment of the present invention, and FIG. 4 shows a beam transmission structure of the illumination optical unit and the light- FIG.

Referring to FIG. 3, an apparatus 200 for simultaneously acquiring a tomographic image and a surface shape according to another embodiment of the present invention includes a light source 210 for generating a laser beam of an area beam. The laser beam generated from the light source 210 is transmitted to the sample stage 261 and the reference stage 265 via the beam flattening device, the parallel conversion unit, the illumination optical unit 240 and the beam splitter 250.

The illumination optical section 240 of this embodiment may be provided with a condensing lens, as shown in Figs. 4A and 4B. The laser beam beam-fritted by the beam splitter 250 from the condenser lens forms an area type focus at the sample stage 261 and the reference stage 265. The laser beam reflected from the sample stage 261 and the reference stage 265 reaches the measuring section 280 via the light receiving optical section 270, that is, the imaging lens of this embodiment. At this time, the laser beam is collected in the light-receiving optical unit 270 so that the measurement unit 280 can be focused.

The measurement unit 280 detects the laser beam received by the light receiving optical unit 270 and measures the interference signal for each wavelength. The area CCD camera can be applied because the laser beam is measured. However, the present invention is not limited thereto.

Then, the tomographic image or the surface shape of the sample stage 261 can be simultaneously measured by performing the Fourier transform using the extracted frequency information and phase information based on the interference signal measured by the measuring unit 280.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: Interferometer-based tomographic image and surface shape simultaneous acquisition device
110: Light source
120: beam flattening element
130:
140: illumination optical part
150: beam splitter
161: Sample stage
165: reference stage
170:
180:

Claims (9)

A light source for generating a linear or area laser beam;
A parallel conversion unit for converting the laser beam in parallel;
An illumination optical unit that receives the laser beam from the parallel conversion unit and collectively transmits the laser beam to a beam splitter disposed at the rear, and sends a sample stage and a reference stage disposed adjacent to the beam splitter such that a focus can be generated; And
A light receiving optical unit for receiving the laser beam from the sample stage and the reference stage through the beam splitter;
A measuring unit for detecting a laser beam received by the light receiving optical unit and measuring an interference signal for each wavelength;
/ RTI >
An interferometer-based tomographic image and / or a tomographic image that simultaneously measures a tomographic image or a surface shape of the sample stage by performing a Fourier transform using frequency information and phase information extracted from the interference signal for each wavelength measured by the measurement unit; Device for simultaneous acquisition of surface shape.
The method according to claim 1,
Wherein the illumination optics is a cylinder lens when the light source is a light source generating a linear laser beam.
The method according to claim 1,
Wherein the illumination optics is a light focusing lens when the light source is a light source generating a laser beam of an area.
The method according to claim 1,
Wherein the light receiving optical unit uses an imaging lens to form an image on the measurement unit without distortion of spherical aberration or chromatic aberration.
5. The method of claim 4,
Wherein the measuring unit is a line CCD camera for measuring a linear laser beam or an area CCD camera for measuring a laser beam of an area beam.
The method according to claim 1,
The light source may be a variable wavelength laser, such as an optical fiber tunable laser using a fiber Fabry-Perot filter, an optical fiber tunable laser for adjusting a dispersion value of a laser resonator, a diffraction element, An apparatus for simultaneous acquisition of an interferometer-based tomographic image and a surface shape, which is a tunable laser or a Bragg grating-based tunable laser using a mirror or a polygon mirror.
The method according to claim 1,
Further comprising a beam planarizing element interposed between the light source and the parallel conversion unit for beam flattening the laser beam from the light source such that the laser beam has uniform light intensity.
8. The method of claim 7,
Wherein the beam planarizing element is a diffuser, a light pipe, or a lens array based homogenizer.
The method according to claim 1,
Wherein the sample stage is mounted on a stage movable in a horizontal direction so that scanning of the entire area of the sample stage is possible.
KR1020140194074A 2014-12-30 2014-12-30 Simultaneous Imaging device for tomography and surface profiler based on interferometer KR20160082076A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018067243A1 (en) * 2016-10-04 2018-04-12 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
KR20200092905A (en) * 2017-11-28 2020-08-04 주식회사 고영테크놀러지 Apparatus for inspecting substrate and method thereof
US11543238B2 (en) 2017-11-28 2023-01-03 Koh Young Technology Inc. Apparatus for inspecting substrate and method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018067243A1 (en) * 2016-10-04 2018-04-12 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
CN109791896A (en) * 2016-10-04 2019-05-21 科磊股份有限公司 Accelerate the spectral measurement in semiconductor device fabrication
US10761034B2 (en) 2016-10-04 2020-09-01 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
CN109791896B (en) * 2016-10-04 2023-06-20 科磊股份有限公司 Speeding up spectral measurements in semiconductor device fabrication
KR20200092905A (en) * 2017-11-28 2020-08-04 주식회사 고영테크놀러지 Apparatus for inspecting substrate and method thereof
US11543238B2 (en) 2017-11-28 2023-01-03 Koh Young Technology Inc. Apparatus for inspecting substrate and method thereof

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