CN107878983A - Article carrying equipment - Google Patents
Article carrying equipment Download PDFInfo
- Publication number
- CN107878983A CN107878983A CN201710907212.1A CN201710907212A CN107878983A CN 107878983 A CN107878983 A CN 107878983A CN 201710907212 A CN201710907212 A CN 201710907212A CN 107878983 A CN107878983 A CN 107878983A
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- China
- Prior art keywords
- foregoing
- port
- washing
- container
- carrying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0478—Storage devices mechanical for matrix-arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Mathematical Physics (AREA)
- Warehouses Or Storage Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Possess and move into container（2）Move into and use port（7）, supporting accommodate by the 1st rinsing maching（CL1）Article before washing（1）Container（2）The 1st washing port（11）, supporting by the 1st rinsing maching（CL1）Article after washing（1）The 2nd washing port（12）, carry article（1）The 1st handling device（5）, conveying container（2）The 2nd handling device（6）, the 2nd handling device（6）Carry out container（2）Port is used from moving into（7）To the 1st washing port（11）Carrying, article（1）Container after being removed（2）From the 1st washing port（11）Carrying to the 2nd carrying destination, the 1st handling device（5）Carry out article（1）From the 2nd washing port（12）Carrying to the 1st carrying destination.
Description
Technical field
The present invention relates to the article carrying of the 1st handling device for possessing carrying article, the 2nd handling device of conveying container to set
It is standby.
Background technology
One of the article carrying equipment is described in Japanese Unexamined Patent Publication 2000-091401 publications (patent document 1).Special
In the article carrying equipment of sharp document 1, possess 1 handling device (transfer robot 76), move into and accommodate article (mask)
Container (box) move into port (going out to be put in storage mouth 81), the Storage Department (frame 72A) of article, container Storage Department (carriage
72B).Handling device possesses box hand 77 and mask hand 78, and a handling device is also used as the carrying dress for carrying article
2nd handling device of the 1st handling device put and the handling device as conveying container.Also, handling device uses box hand
77, by by move into Storage Department from the container that port is moved into container carry.In addition, handling device uses mask hand
78, article is taken out from the container certainly in the keeping of the Storage Department of container, carried to the Storage Department of article,
And by the article container of the Storage Department of article in the container in keeping.
Consider the article carrying equipment as come washing articles, container.That is, the Storage Department of substitution goods, set
Article washing port, instead of the Storage Department of container, container washing port is set.Article washing is to be arranged at port
With by the port of the corresponding position of the 1st rinsing maching of article washing, container washing with port be arranged at by container washing
The 2nd rinsing maching corresponding to position port.
That is, following scheme is considered：Using the box hand of handling device, by the container before washing from moving into port to container
Washing is carried with port, using the mask hand of handling device, is taken out out of container positioned at container washing port before washing
Article, the article before this is washed carried to article washing with port, and will be by after the washing of the 1st rinsing maching washing
Article is accommodated to the container positioned at container washing port from article washing with port.
But if as described above, by handling device conveying container, article, by mask hand, carry before washing
Both articles after article and washing.Accordingly, it is considered to arrive situations below：When carrying the article before washing with hand by mask,
The polluters such as the dust of article being attached to before washing are attached to mask hand, the thing after washing is carried with hand by mask
During product, the article after mask is attached to washing with the polluter of hand is attached to, the article after thus washing is contaminated.
The content of the invention
Therefore, it is intended that realize the contaminated article carrying equipment of article after can avoiding washing.
In view of the foregoing, article carrying equipment is characterised by, is possessed and is moved into port, the 1st washing port, the 2nd
Washing port, the 1st handling device, the 2nd handling device, it is foregoing to move into the container moved into port and accommodate article, the foregoing 1st
Washing is arranged at position corresponding with the 1st rinsing maching for washing items with port, will accommodate by foregoing 1st rinsing maching
The aforesaid receptacle supporting of items before washing, foregoing 2nd washing is arranged at corresponding with foregoing 1st rinsing maching with port
Position, it will be taken out and supported by the items after the washing of foregoing 1st rinsing maching, foregoing 1st handling device from aforesaid receptacle
Carry items, foregoing 2nd handling device carries aforesaid receptacle, foregoing 2nd washing with port by with foregoing 1st washing end
Mouth is provided separately, and foregoing 2nd handling device carries out aforesaid receptacle and moves into the removing to foregoing 1st washing port with port from foregoing
Fortune, items be removed after carrying of the aforesaid receptacle from foregoing 1st washing port to the 2nd carrying destination, the foregoing 1st
Handling device carries out carrying of the items from foregoing 2nd washing port to the 1st carrying destination.
According to the program, by move into the container that port is moved into by the 2nd handling device by from moving into port to the 1st
Washing is carried with port.Now in the container carried by the 2nd handling device, the article before being washed by the 1st rinsing maching is accommodated.
Also, on article, after being washed positioned at the 1st washing with the container taking-up of port by the 1st rinsing maching, it is placed in the 2nd and is washed
Wash and use port.Also, the article after the washing is removed by the 1st handling device from the 2nd washing with port to the 1st carrying destination
Fortune.In addition, article is removed and emptying container is carried purpose by the 2nd handling device from the 1st washing port to the 2nd
Carry on ground.
Article before being washed by the 1st rinsing maching is moved into moving into the state of container is housed inside with port, in quilt
It is contained in the state of container and is carried by the 2nd handling device with port to the 1st washing with port from moving into.Also, by the 1st
Article after rinsing maching washing is carried by the 1st handling device from the 2nd washing port to carrying destination.So, the 1st remove
Shipping unit does not carry the article before being washed by the 1st rinsing maching, only carries out the carrying of the article after being washed, so can avoid,
By due to carry it is washed before article and contaminated 2nd handling device to carry the article after washing, so that washing
Article after washing is contaminated.
Brief description of the drawings
Fig. 1 is the top view of article carrying equipment.
Fig. 2 is the side view of article carrying equipment.
Fig. 3 is the explanation figure by the carrying of the container of the 2nd stakcer crane.
Fig. 4 is the explanation figure by the carrying of the plate body of the 1st stakcer crane.
Fig. 5 is the carrying by the carrying of the plate body of the 1st stakcer crane and the container by the 2nd stakcer crane
Illustrate figure.
Fig. 6 is the carrying by the carrying of the plate body of the 1st stakcer crane and the container by the 2nd stakcer crane
Illustrate figure.
Fig. 7 is the explanation figure by the carrying of the container of the 2nd stakcer crane.
Fig. 8 is the explanation figure by the carrying of the plate body of the 1st stakcer crane.
Embodiment
Hereinafter, based on accompanying drawing, the embodiment of the article carrying equipment of the present invention is illustrated.
As shown in figure 1, in article carrying equipment, possess the storage rack 4 of keeping plate body 1 and container 2, carry plate body
What 1 the 1st stakcer crane 5, the 2nd stakcer crane 6, the container of conveying container 2 were moved into move into is taken out of with port 7, container
Take out of with port 8.In addition, possess wall body W in article carrying equipment, storage rack 4, the 1st stakcer crane 5, the 2nd stacking
Crane 6 is arranged at the inside surrounded by wall body W.
In wall body W outside the 1st rinsing maching CL1 and the 2nd rinsing maching CL2 is provided with the state of adjacent with wall body W.
1st rinsing maching CL1 is the rinsing maching for washing plate body 1, and the 2nd rinsing maching CL2 is for washing after plate body 1 is removed
The rinsing maching of container 2.Also, possesses the 1st washing port set relative to the 1st rinsing maching CL1 in article carrying equipment
11 and the 2nd washing with port 12, relative to the 3rd washing that the 2nd rinsing maching CL2 is set with the washing port of port 13 and the 4th
14.1st washing port 11 is provided separately with the 2nd washing port 12, the 4th washing with port 14 by with the 3rd washing end
Mouth 13 is provided separately.
In the present embodiment, plate body 1 is photomask, is shaped so as to rectangle during vertical view.In addition, the phase of plate body 1
When in article.Container 2 is the container for the plate body 1 that can accommodate regulation number.As container 2 can use possess lid and need
The container of the closed closed of the opening and closing of lid, certain appearance for not possessing open container of the lid without the opening and closing of lid
Device.But in the case of the container using closed, in the position for the opening and closing for needing to cover (for example, described later take out of with port 8
Deng) on, it is necessary to possess by container 2 lid be opened and closed opening and closing device.
Hereinafter, each composition of article carrying equipment is illustrated, observed on above-below direction Z, by the 1st rinsing maching CL1
Orientation Y is set to the direction of the 2nd rinsing maching CL2 arrangements, front and back will be set to relative to the orthogonal directions of orientation Y
Illustrate to X.In addition, in fore-and-aft direction X, the 1st stakcer crane 5, the 2nd stakcer crane 6 are existed relative to storage rack 4
Direction be set to front X1, its opposite direction is set to rear X2 to illustrate.In addition, on orientation Y, by the 1st rinsing maching
CL1 is set to the 1st direction Y1 relative to direction existing for the 2nd rinsing maching CL2, and its opposite direction is set into the 2nd direction Y2 to illustrate.
As shown in Fig. 2 the ceiling portion of article carrying equipment is provided with the 1st fan filter unit 16.1st fan mistake
Filter module 16 is set by the top than storage rack 4, the 1st stakcer crane 5, the 2nd stakcer crane 6, aspirates the sky of top
Gas, air is discharged downwards.Thus, in wall body W inside, flowed downward formed with peace and quiet air from ceiling side towards ground side
Sinking.
In addition, the 2nd fan filter unit 17 is provided with wall body W.2nd fan filter unit 17 is configured to phase
X2 sides are located behind for storage rack 4.Also, rear X2 air suction is carried out X1 forwards by the 2nd fan filter unit 17
Discharge.Thus, the flowing in storage rack 4 formed with peace and quiet air from X1 peace and quiet air in front of rear X2 flow directions.
The floor portion F of article haulage equipment is set by lower ground F1 and more upper than lower ground F1 the top arranged
Ground F2 is formed, formed with subsurface space between lower ground F1 and upper base F2, upper base F2 and ceiling it
Between formed with working space.Upper base F2 is grid ground, formed with multiple passages penetrated on above-below direction Z.Under
Portion ground F1 is the ground of no passage, in the present embodiment, is made up of the concrete of aporate.
(moving into out with conveyer)
As shown in figure 1, in article carrying equipment, move into conveyer 19 and take out of with conveyer 20 respectively to penetrate wall body W
State be set.Move into conveyer 19, take out of and the container 2 for accommodating plate body 1 is carried with conveyer 20.
Move into and removed with conveyer 19 from the 1st move-in position positioned at wall body W outside to positioned at the 2nd of wall body W inside
Enter position conveying container 2.By move into conveyer 19 be located at than wall body W in the inner part it is position, move into conveyer 19
Front X1 end forms and moved into port 7.In other words, it is for supporting the container positioned at the 2nd move-in position to move into port 7
2 port.Also, container 2 is carried to the 2nd move-in position from the 1st move-in position with conveyer 19 by moving into, thus container
2 are carried to and move into port 7.So, move into port 7 be carry accommodate plate body 1 container 2 port.
Take out of and container 2 is taken out of into position to positioned at wall body W outside from positioned at the 1st of wall body W inside with conveyer 20
The 2nd take out of position carrying.By take out of with conveyer 20 be located at than wall body W in the inner part it is position, take out of with conveyer 20
Front X1 end form take out of with port 8.In other words, it is for supporting positioned at the 1st appearance for taking out of position to take out of with port 8
The port of device 2.Also, position is taken out of by taking out of with conveyer 20 container 2 to be taken out of into position from the 1st to be carried to the 2nd, is thus held
Device 2 is taken out of with port 8 from taking out of.So, take out of with port 8 be the container 2 that plate body 1 is accommodated for taking out of port.
(washing conveyer)
In addition, as shown in figure 1, in article carrying equipment, the 1st washing conveyer 21, the 2nd washing conveyer the 22, the 3rd are washed
Wash and set respectively with penetrating wall body W state with conveyer 23, the 4th washing conveyer 24.1st washing with conveyer 21 and
2nd washing is set with conveyer 22 relative to the 1st rinsing maching CL1, and the 3rd washing is with the washing conveyer of conveyer 23 and the 4th
24 are set relative to the 2nd rinsing maching CL2.
1st washing with conveyer 21 by container 2 from the 1st position P1 positioned at wall body W inside to the 1st rinsing maching CL1
The position abutted is carried, and container 2 is carried from the position abutted with the 1st rinsing maching CL1 to the 1st position P1.In the 1st washing
Equipped with the robot (not shown) for taking out plate body 1 from container 2 on machine CL1.Therefore, conveyed by the 1st washing
Machine 21 accommodates plate body 1 from the 1st position P1 containers 2 carried to the position abutted with the 1st rinsing maching CL1, but by machine
People takes out plate body 1 from the container 2 of the position that this is abutted, thus by the 1st washing with conveyer 21 from the 1st rinsing maching
Plate body 1 is not accommodated at the container 2 that the position that CL1 is abutted is carried to the 1st position P1.So, the 1st washing conveyer 21 is carried
Accommodate the container 2 of plate body 1 and do not accommodate both containers 2 of plate body 1.In addition, carried by the 1st washing conveyer 21
Container 2 and the plate body 1 being accommodated therein are that container 2 (container 2 before washing) before washed machine washing is washed and plate body 1 (are washed
Plate body 1 before washing).By the 1st washing with conveyer 21 positioned at position, the 1st washing conveyer than wall body W in the inner part
21 front X1 end forms the 1st washing and uses port 11.In other words, the 1st washing port 11 is to be used to support to be located at the 1st
Put the port of P1 container 2.In addition, the 1st washing with port 11 equivalent to, be arranged at washing plate body 1 the 1st washing
The port that position corresponding to machine CL1 supports the container 2 for accommodating the plate body 1 before being washed by the 1st rinsing maching CL1.
2nd washing is removed with conveyer 22 out of the 1st rinsing maching CL1 to the 2nd position P2 positioned at the position of wall body W inside
Transport plate body 1.The plate body 1 that 1st rinsing maching CL1 washings are taken out by robot, the plate body 1 after this is washed is (after washing
Plate body 1) it is placed in the 2nd washing conveyer 22.Therefore, by the 2nd washing with conveyer 22 by out of the 1st rinsing maching CL1
The plate body 1 carried to the 2nd position P2 is the plate body 1 after washing.Leaned on by the 2nd washing with being located at for conveyer 22 than wall body W
The position of inner side, the 2nd washing form the 2nd washing with the front X1 of conveyer 22 end and use port 12.In other words, the 2nd wash
It is positioned at the port of the 2nd position P2 plate body 1 for supporting to wash with port 12.In addition, the 2nd washing is suitable with port 12
In, be arranged at position corresponding with the 1st rinsing maching CL1 support taken out from container 2 and by the 1st rinsing maching CL1 wash after
The port of plate body 1.
3rd washing with conveyer 23 by container 2 from the 3rd position P3 positioned at wall body W inside into the 2nd rinsing maching CL2
Carry.It is (the container before washing of container 2 before being washed by the 2nd rinsing maching CL2 by the container 2 that the 3rd washing is carried with conveyer 23
2).By the 3rd washing with conveyer 23 positioned at position, the 3rd washing conveyer 23 the front X1's than wall body W in the inner part
End forms the 3rd washing and uses port 13.In other words, the 3rd washing port 13 is for supporting the container 2 positioned at the 3rd position P3
Port.In addition, the 3rd washing with port 13 equivalent to, be arranged at position corresponding with the 2nd rinsing maching CL2 and will be by the 2nd
The port that container 2 before rinsing maching CL2 washings supports.
4th washing with conveyer 24 by container 2 out of the 2nd rinsing maching CL2 to the 4th position P4 positioned at wall body W inside
Carry.It is (the container after washing of container 2 after being washed by the 2nd rinsing maching CL2 by the container 2 that the 4th washing is carried with conveyer 24
2).By the 4th washing with conveyer 24 positioned at position, the 4th washing conveyer 24 the front X1's than wall body W in the inner part
End forms the 4th washing and uses port 14.In other words, the 4th washing port 14 is for supporting the container 2 positioned at the 4th position P4
Port.4th washing with port 14 equivalent to, be arranged at position corresponding with the 2nd rinsing maching CL2 and will be by the 2nd washing
The port that container 2 after machine CL2 washings supports.
(storage rack)
Storage rack 4 possesses multiple Storage Departments 26.Storage rack 4 has to arrange multiple states on above-below direction Z and orientation Y
Standby Storage Department 26.On storage rack 4, possess the 1st Storage Department 27 for taking care of plate body 1 and protected for the 2nd of storage container 2
Pipe portion 28 is used as Storage Department 26.Storage rack 4 is located at the 1st on orientation Y, with the 1st Storage Department 27 relative to the 2nd Storage Department 28
Direction Y1 mode possesses the 1st Storage Department 27 and the 2nd Storage Department 28.
In addition, on storage rack 4, it is also equipped with moving into port 7 (moving into conveyer 19), takes out of and (take out of use with port 8
Conveyer 20), the 1st washing port 11 (the 1st washing conveyer 21), (the 2nd washing conveyer of the 2nd washing port 12
22), the 3rd washing with port 13 (the 3rd washing use conveyer 23), the 4th washing port 14 (the 4th wash use conveyer 24), after
The inspection Check portions 29 stated.
In the present embodiment, a pair of storage racks 4 are provided with the state arranged on fore-and-aft direction X, in fore-and-aft direction X
On, the 1st stakcer crane 5 and the 2nd stakcer crane 6 are provided between a pair of storage racks 4.One in a pair of storage racks 4
On the storage rack 4 of side, it is provided with and moves into port 7, takes out of with port 8 and inspection Check portions 29, the opposing party in a pair of storage racks 4
Storage rack 4 on, possess the 1st washing with port 11, the 2nd washing with port 12, the 3rd washing with the washing end of port 13 and the 4th
Mouth 14.Each of 1st Storage Department 27 and the 2nd Storage Department 28 are possessed by both a pair of storage racks 4.In addition, in this implementation
In mode, as inspection Check portions 29, possess the 1st inspection Check portions the 30 and the 2nd and examine the two inspection Check portions 29 of Check portions 31.1st inspection Check portions 30 examine
The outward appearance of the plate bodys such as the defects of looking into particle, pattern 1.2nd inspection Check portions 31 measure the plates such as length, width and the thickness of plate body 1
The size (measurement length) of shape body 1.
As shown in Fig. 2 the 2nd Storage Department 28A after the washing for the container 2 after keeping washing be present, washed for keeping
Before the washing of container 2 before washing by the use of the 2nd Storage Department 28B be used as the 2nd Storage Department 28.The 2nd Storage Department 28A after than washing is leaned on
Possesses the 2nd Storage Department 28B before washing at lower section.The 2nd Storage Department 28A on above-below direction Z after adjacent washing and
The 2nd Storage Department 28B before washing is spaced by distance piece 32.After distance piece 32 is with washing adjacent to each other on above-below direction Z
The mode that air does not flow mutually on 2nd Storage Department 28A and the 2nd Storage Department 28B after washing, by the tabular of aporate
Part is formed.
(stakcer crane)
As shown in figure 1, the 1st stakcer crane 5 and the 2nd stakcer crane 6 are respectively structured as to move on orientation Y.
1st stakcer crane 5 is the stakcer crane for carrying plate body 1.2nd stakcer crane 6 is the stacking lifting of conveying container 2
Machine.1st stakcer crane 5 is located at the 1st direction side relative to the 2nd stakcer crane 6.The mobile route M1 of 1st stakcer crane 5
There is overlapping part in orientation Y with the mobile route M2 of the 2nd stakcer crane 6.In addition, the 1st stakcer crane 5 is suitable
In the 1st handling device for carrying plate body 1,2nd handling device of the 2nd stakcer crane 6 equivalent to conveying container 2.
As shown in Fig. 2 the 2nd stakcer crane 6 possesses traveling chassis 33, bar 34, lifting body 35, shifting apparatus 36, it is foregoing
Traveling chassis 33 is advanced on orientation Y, and aforementioned rod 34, which is erected, is arranged at traveling chassis 33, and foregoing lifting body 35 is along bar 34
Lifting, foregoing shifting apparatus 36 are supported in lifting body 35.Though omitting detailed description, possesses supporting on shifting apparatus 36
The supporting mass of container 2, make the supporting mass linkage that X is moved along the longitudinal direction.The shifting apparatus 36 of 2nd stakcer crane 6
It is configured to, source S2 can be carried to itself load moving container 2 from the 2nd, and can be from itself to the 2nd carrying destination G2 load moving containers
2.1st stakcer crane 5 is in addition to the supporting mass of shifting apparatus 36 supporting plate body 1, this puts, with the 2nd stakcer crane 6
Similarly form.The shifting apparatus 36 of 1st stakcer crane 5 is configured to, and can carry source S1 to itself transfer plate body from the 1st
1, and can be from itself to the 1st carrying destination G1 transfers plate body 1.
(position relationship of port)
1st washing port 11, the 2nd washing port 12, the 3rd washing port 13, the 4th washing port 14, move into and use end
Mouthfuls 7, take out of and be configured to most lean on the 1st direction Y1 sides with the 2nd washing port 12 in port 8, and the 4th washs and use port 14
It is configured to most lean on the 2nd direction Y2 sides.In the present embodiment, the 1st washing port 11, the 2nd washing port the 12, the 3rd are washed
Wash with port 13, the 4th washing port 14 towards the 2nd direction Y2, with the 2nd washing port 12, the 1st washing port the 11, the 3rd
Washing is arranged with the order of the washing port 14 of port the 13, the 4th.So, the 1st stakcer crane 5 as carrying source or carries mesh
The 2nd washing port 12 on ground be configured to, with 1st washing of the 2nd stakcer crane 6 as carrying source or carrying destination
Compared with port 11, the 3rd washing port 13 and the 4th washing port 14, positioned at the 1st direction Y1.
Move into port 7 and take out of with port 8 towards the 2nd direction Y2, to move into port 7, take out of order with port 8
Arrangement.Move into and be configured to port 7 and taking out of with port 8, the 1st side on orientation Y positioned at the 2nd washing with port 12
Between the end of end and the 4th washing with the 2nd direction Y2 sides of port 14 to Y1 sides.Also, these are moved into port 7 and removed
Go out to be arranged at the shifting of the mobile route M1 and the 2nd stakcer crane 6 of the 1st stakcer crane 5 on orientation Y with port 8
In region overlapping dynamic path M2.With the 2nd washing with port 12 compared with the 1st direction Y1 position, be provided only with the 1st keeping
The 1st Storage Department 27 in the Storage Department 28 of portion 27 and the 2nd, with the 4th washing with port 14 compared with the 2nd direction Y2 position, only
The 2nd Storage Department 28 being provided with the 1st Storage Department 27 and the 2nd Storage Department 28.
(mode of carrying)
Plate body 1 is carried to the 1st carrying destination G1 by the 1st stakcer crane 5 from the 1st carrying source S1.1st stakcer crane 5
2nd washing is examined into Check portions the 30, the 2nd by the use of port the 12, the 1st and examines Check portions 31 and the 1st Storage Department 27 as the 1st carrying source S1, by the 1st inspection
Check portions the 30, the 2nd, which examine Check portions 31, the 1st Storage Department 27 and taken out of by the use of port 8, is used as the 1st carrying destination G1.That is, if concrete example is lifted
Son, then the 1st stakcer crane 5 as described below by plate body 1 from the 1st carrying source S1 be carried to the 1st carrying destination G1.
As shown in figure 4, the 2nd washing is carried source S1 by the 1st stakcer crane 5 by the use of port 12 as the 1st, by the 1st inspection Check portions
30 are used as the 1st carrying destination G1, carry out plate body 1 from the 2nd washing carrying of the port 12 to the 1st inspection Check portions 30.Such as Fig. 5 institutes
Show, the 1st stakcer crane 5 is using the 1st inspection Check portions 30 as the 1st carrying source S1, using the 2nd inspection Check portions 31 as the 1st carrying destination
G1, carry out carrying of the plate body 1 from the 1st inspection Check portions 30 to the 2nd inspection Check portions 31.As shown in fig. 6, the 1st stakcer crane 5 is by the 2nd
Examine Check portions 31 and carry source S1 as the 1st, using the 1st Storage Department 27 as the 1st carrying destination G1, carry out plate body 1 from the 2nd inspection Check
Carrying of the portion 31 to the 1st Storage Department 27.As shown in figure 8, the 1st Storage Department 27 is carried source S1 by the 1st stakcer crane 5,
It will take out of by the use of port 8 as the 1st carrying destination G1, and carry out plate body 1 from the 1st Storage Department 27 to the carrying taken out of with port 8.
Specifically, the 1st Storage Department 27 is carried source S1 by the 1st stakcer crane 5, will make positioned at the container 2 taken out of with port 8
For the 1st carrying destination G1, plate body 1 is carried out from the 1st Storage Department 27 to the carrying for taking out of the container 2 with port 8.
In addition, the 1st stakcer crane 5 will take out of and be made with port 8 sometimes also using the 2nd inspection Check portions 31 as the 1st carrying source S1
For the 1st carrying destination G1, plate body 1 is carried to from the 2nd inspection Check portions 31 and taken out of with port 8, by the 1st stakcer crane 5
The carrying source of carrying plate body 1 and the combination of carrying destination are not limited to the combination shown in figure.
Container 2 is carried to the 2nd carrying destination G2 by the 2nd stakcer crane 6 from the 2nd carrying source S2.2nd stakcer crane
6 will move into by the use of port 7, the 1st washing port 11, the 4th washing port 14 and the 2nd Storage Department 28 as the 2nd carrying source S2, will
Take out of by the use of port 8, the 1st washing port 11, the 3rd washing port 13 and the 2nd Storage Department 28 and be used as the 2nd carrying destination G2.
In addition, the 2nd stakcer crane 6 will be being taken out of by the use of the Storage Department 28 of port 8 and the 2nd as the 3rd carrying destination, mesh is carried by the 2nd
Ground G2 in the 4th washing with port 14 as the 2nd carrying source S2 in the case of, using as the end of the destination of conveying container
Mouth, Storage Department 26 are used as the 3rd carrying destination.
That is, if lifting specific example, container 2 is carried to by the 2nd stakcer crane 6 from the 2nd carrying source S2 as described below
2nd carrying destination G2.As shown in figure 3, the 2nd stakcer crane 6 will be moved into carries source S2 by the use of port 7 as the 2nd, the 1st is washed
Wash by the use of port 11 as the 2nd carrying destination G2, carry out container 2 from moving into and use carrying of the port 7 to the 1st washing port 11.
As shown in figure 5, the 1st washing is carried source S2 by the 2nd stakcer crane 6 by the use of port 11 as the 2nd, the 3rd washing port 13 is made
For the 2nd carrying destination G2, container 2 is carried to the 3rd washing port 13 from the 1st washing port 11.As shown in fig. 6, the 2nd
4th washing is carried source S2 by stakcer crane 6 by the use of port 14 as the 2nd, using the 2nd Storage Department 28 as the 2nd carrying destination G2
(the 3rd carrying destination), container 2 is carried out from the 4th washing carrying of the port 14 to the 2nd Storage Department 28.As shown in fig. 7, the 2nd heap
The 2nd Storage Department 28 is carried source S2 by pile crane 6, will take out of by the use of port 8 as the 2nd carrying destination G2, is held
Device 2 is from the 2nd Storage Department 28 to the carrying taken out of with port 8.
In addition, it is moved in container 2 to moving into port 7 but because other container 2 is present in the 1st washing port 11
Deng and in the case of the container 2 moved into port 7 can not being carried into the 1st washing port 11, the 2nd stakcer crane 6 will be removed
Enter and carry source S2 by the use of port 7 as the 2nd, using the 2nd Storage Department 28 as the 2nd carrying destination G2, container 2 is used into port from moving into
7 are carried to the 2nd Storage Department 28.Also, in the case where being changed into the container 2 being carried into the 1st washing port 11, the 2nd
The 2nd Storage Department 28 is carried source S2 by stakcer crane 6, using the 1st washing by the use of port 11 as the 2nd carrying destination G2,
Container 2 is carried to the 1st washing port 11 from the 2nd Storage Department 28.So, by the conveying container 2 of the 2nd stakcer crane 6
The combination of carrying source and carrying destination is not limited to the combination shown in figure.
As shown in figure 1, in article carrying equipment, possesses the control of the 1st stakcer crane 5 of control and the 2nd stakcer crane 6
Portion H processed.As follows, in order to carry plate body 1 and container 2, the 1st stakcer crane 5 and the 2nd heap are controlled by control unit H
Pile crane 6.
As shown in imaginary line (double dot dash line) in Fig. 3, container 2, which is moved to be moved into moving into conveyer 19, uses port 7.Quilt
Move into this move into the container 2 of port 7 be washing before container 2, on the container 2, accommodate washing before plate body 1.
Also, control unit H is carried to the 1st washing port 11 from moving into moving into the container 2 of port 7 that will be moved to port 7
The mode of (reference picture 3), perform the 1st container handling control of the 2nd stakcer crane 6 of control.It is carried to the 1st washing port
11 container 2 is carried to behind the 1st rinsing maching CL1 position by the 1st washing conveyer 21, by the 1st rinsing maching
CL1 robot (not shown) takes out plate body 1 from container 2, and plate body 1 is washed by the 1st rinsing maching CL1.By the 1st washing
Plate body 1 after machine CL1 washings is placed on the 2nd washing conveyer 22 by the 1st rinsing maching CL1 robot, such as Fig. 3 institutes
Show, the 2nd washing port 12 is carried to by the 2nd washing conveyer 22.The container 2 that plate body 1 is all removed is by the 1st
Washing is carried to the 1st washing port 11 with conveyer 21 from against the 1st rinsing maching CL1 position.
Control unit H from the 1st washing port 11 by the container 2 of the 1st washing port 11 to be carried to the 3rd washing port
The mode of 13 (reference pictures 5), perform the 2nd container handling control of the 2nd stakcer crane 6 of control.Pass through the 2nd container handling control
System by the container 2 that the 2nd stakcer crane 6 is carried be washing before container 2, do not accommodate plate body 1 on the container 2.Also,
As shown in figure 5, the container 2 being carried to before the washing of the 3rd washing port 13 is carried to the 2nd by the 3rd washing conveyer 23
In rinsing maching CL2, washed by the 2nd rinsing maching CL2.The container 2 after washing after being washed by the 2nd rinsing maching CL2 is used by the 4th washing
Conveyer 24 is carried to the 4th washing port 14.
Control unit H from the 4th washing port 14 by the container 2 of the 4th washing port 14 to be carried to the 2nd Storage Department 28
The mode of (reference picture 6), perform the 3rd container handling control of the 2nd stakcer crane 6 of control.Also, accommodated by plate body 1
In the case of taking out of container 2 in container 2, control unit H is taken out of with port 8 (reference picture 7) with being carried to from the 2nd Storage Department 28
Mode, perform the 4th container handling control of the 2nd stakcer crane 6 of control.Controlled by the 3rd container handling, the 4th container is removed
The container 2 that fortune is controlled and carried by the 2nd stakcer crane 6 is the container 2 after washing, and plate body is not accommodated on the container 2
1。
Control unit H examines Check portions 30 so that the plate body 1 of the 2nd washing port 12 is carried into the 1st from the 2nd washing port 12
The mode of (reference picture 4), the 1st plate body for performing the 1st stakcer crane 5 of control carry control.Control unit H with by the 1st examine Check
Plate body 1 after the inspection Check in portion 30 terminates is carried to the 2nd mode for examining Check portions 31 (reference picture 5) from the 1st inspection Check portions 30, performs control
The 2nd plate body for making the 1st stakcer crane 5 carries control.Control unit H is with the tabular after the inspection Check in the 2nd inspection Check portions 31 is terminated
Body 1 is carried to the mode of the 1st Storage Department 27 (reference picture 6) from the 2nd inspection Check portions 31, performs the 3rd of the 1st stakcer crane 5 of control
Plate body carries control.Also, in the case that control unit H takes out of container 2 plate body 1 is contained in into container 2, by the 1st
The plate body 1 of Storage Department 27 is carried to the mode taken out of with port 8 (reference picture 8) from the 1st Storage Department 27, performs the 1st heap of control
4th plate body of pile crane 5 carries control.Control is carried by the 1st plate body, the 2nd plate body carries control, the 3rd tabular
Body carries control and the 4th plate body carries control, is the plate body 1 after washing by the plate body 1 that the 1st stakcer crane 5 is carried.
Also, in the 4th plate body carries control, plate body 1 is being carried to the feelings that take out of with port by the 1st stakcer crane 5
Under condition, the 1st stakcer crane 5 is to make plate body 1 be contained in a manner of take out of the container 2 with port 8, by the plate body 1
It is carried to and takes out of with port 8.
2. other embodiment
Then, the other embodiment of article carrying equipment is illustrated.
(1) in the above-described embodiment, the 1st washing port 11 is arranged at the 1st side relative to the 2nd washing port 12
To Y1 sides, but the set location of the 1st washing port 11 and the 2nd washing port 12 can also suitably be changed.For example, also may be used
So that the 1st washing port 11 is arranged at into the 2nd direction Y2 relative to the 2nd washing port 12, in addition it is also possible to be, with upper
The 1st washing is set with the washing of port 11 and the 2nd with the overlapping mode in port 12 when being observed on lower direction Z, by the 1st washing port
11 and the 2nd washing is arranged at identical position with port 12 on orientation Y.In addition, on the 3rd washing port 13 and
The set location of 4 washing ports 14 and move into port 7 and take out of set location with port 8, with the 1st washing end
The washing port 12 of mouth the 11 and the 2nd is it is equally possible that appropriate change.
In addition, in the above-described embodiment, the 4th washing port 14 is provided separately with the 3rd washing port 13, but
The 3rd washing port 13 can be made to possess the function of the 4th washing port 14, by the 3rd washing with the washing end of port 13 and the 4th
Mouth 14 shares.It is provided separately in addition, will take out of with port 8 with moving into port 7, but can also makes to move into possess with port 7 and remove
Go out to use the function of port 8, will move into and shared with port 7 and taking out of with port 8.
(2) in the above-described embodiment, the 2nd stakcer crane 6 will be washed by the 2nd rinsing maching CL2 and not accommodate tabular
The container 2 of body 1, which is carried to, to take out of with the stakcer crane 5 of port the 8, the 1st so as to be accommodated positioned at the container 2 taken out of with port 8 by the 1st
The mode of plate body 1 after rinsing maching CL1 washings, the plate body 1 is carried to and taken out of with port 8, plate body 1 is contained in
Device 2, but plate body 1 can also be contained in container 2 by other structures.Specifically, for example, it is also possible to be, except taking out of use
Container receiving port is provided additionally with outside port 8, the 2nd stakcer crane 6 will be washed by the 2nd rinsing maching CL2 and do not accommodated
The container 2 of plate body 1 is carried to container receiving port, and the 1st stakcer crane 5 is so that container positioned at container receiving port
2 accommodate the mode of the plate body 1 after being washed by the 1st rinsing maching CL1, and the plate body 1 is carried into container receiving port.The feelings
Under condition, the container 2 for accommodating plate body 1 is carried to take out of from container receiving with port by the 2nd stakcer crane 6 and uses port
8.In addition, for example, being provided additionally with plate body port in addition to port 8 except taking out of, the 2nd stakcer crane 6 will be by the 2nd washing
Machine CL2 wash and do not accommodate plate body 1 container 2 be carried to take out of with the stakcer crane 5 of port the 8, the 1st will by the 1st washing
Plate body 1 after machine CL1 washings is carried to plate body port.And or by the receiving machine being provided additionally with
People, in a manner of making to be located at and take out of the receiving plate body 1 of container 2 with port 8, plate body 1 is carried to from plate body with port
Take out of and use port 8.
(3) in the above-described embodiment, the 1st stakcer crane 5 is configured to, the bottom surface of plate body 1 is supported from below,
But it can also suitably change the structure of the plate body 1 of the 1st stakcer crane 5 of supporting, for example, it is also possible to be configured to, by the 1st stacking
Crane 5 is supported plate body 1 from top by adsorbing the upper surface of plate body 1.
2nd stakcer crane 6 is configured to, the bottom surface of container 2 is supported from below, but can also will support the 2nd stacking
The structure of the supporting container 2 of crane 6 suitably changes, for example, it is also possible to by the 2nd stakcer crane 6 with the top of supporting container 2
The mode for carrying out Suspended containerses 2 supports.
(4) in the above-described embodiment, with the 1st washing with port 11, the 2nd washing with port 12, the 3rd washing port
13rd, the 4th washing port 14, move into port 7, take out of with port 8 positioned at most by the 1st direction Y1 side position port
Compare, be provided only with the 1st direction Y1 the 1st Storage Department 27 in the 1st Storage Department 27 and the 2nd Storage Department 28 but it is also possible to be,
Compared with positioned at the position port for most leaning on the 1st direction Y1 sides on the 1st direction Y1, the 1st Storage Department 27 and the 2nd Storage Department 28 are set
Both.In addition, with the 1st washing with port 11, the 2nd washing with port 12, the 3rd washing with port 13, the 4th washing port
14th, move into port 7, take out of and most compared with the position in port 8 by the port of the 2nd direction Y2 sides, only set on the 2nd direction Y2
The 2nd Storage Department 28 in the 1st Storage Department 27 and the 2nd Storage Department 28 is equipped with but it is also possible to be and positioned at most leaning on the 2nd direction Y2 sides
The port of position compare on the 2nd direction Y2, both the 1st Storage Department 27 and the 2nd Storage Department 28 are set.
(5) in the above-described embodiment, the 3rd washing port 13 and the 4th washing port 14 are arranged at into the 2nd stacking to rise
Heavy-duty machine 6 is capable of the position of transferring case 2, but can also suitably change and set the 3rd washing port 13 and the 4th washing port 14
Position.Specifically, for example, it is also possible to be, the 3rd washing port 13 and the 4th washing port 14 are arranged at the outer of wall body W
Portion, do not accommodate before washing and the container 2 of plate body 1 and taken out of with port 8 from taking out of, will take out of what is taken out of with port 8 from this
Container 2 is carried to the 3rd washing port 13 by the handling device of outside, and will not accommodate after washing and plate body 1
Container 2 is carried by the handling device of outside from the 4th washing port 14, and the container 2 is moved into port 7 from moving into.In addition,
Can not also possess the 2nd rinsing maching CL2, the 3rd washing port 13 and the 4th washing port 14.
(6) in the above-described embodiment, article is set to photomask but it is also possible to be other plate bodys 1 such as chip, this
Outside, the shape as article, can also be the other shapes such as cubic, pole shape in addition to tabular.
(7), just also can be with other embodiment as long as the structure disclosed in above-mentioned each embodiment does not conflict
Disclosed in structure appropriately combined apply.On other structures, in embodiment disclosed in this specification in all sides
Face is all to illustrate, and various changes can be suitably carried out in the range of the objective of the disclosure is not departed from.
3. the summary of above-mentioned embodiment
Hereinafter, in the above description it is stated that the summary of article carrying equipment illustrate.
Article carrying equipment, which possesses, to be moved into port, the 1st washing port, the 2nd washing port, the 1st handling device,
2 handling devices, foregoing to move into the container moved into port and accommodate article, foregoing 1st washing is arranged at and washed with port
Position corresponding to 1st rinsing maching of items, the foregoing appearance of the items before being washed by foregoing 1st rinsing maching will be accommodated
Device supports, and foregoing 2nd washing is arranged at position corresponding with foregoing 1st rinsing maching with port, will taken out from aforesaid receptacle
And the items after being washed by foregoing 1st rinsing maching support, foregoing 1st handling device carries items, and the foregoing 2nd carries
Device carries aforesaid receptacle, and foregoing 2nd washing is provided separately with port with foregoing 1st washing with port, and the foregoing 2nd carries dress
Put carry out aforesaid receptacle from it is foregoing move into be removed with port to foregoing 1st washing with the carrying of port, items after before
State carrying of the container from foregoing 1st washing port to the 2nd carrying destination, foregoing 1st handling device carry out items from
Carrying of the foregoing 2nd washing port to the 1st carrying destination.
According to the program, by move into the container that port is moved into by the 2nd handling device by from moving into port to the 1st
Washing is carried with port.Now in the container carried by the 2nd handling device, the article before being washed by the 1st rinsing maching is accommodated.
Also, on article, after being washed positioned at the 1st washing with the container taking-up of port by the 1st rinsing maching, it is placed in the 2nd and is washed
Wash and use port.Also, the article after the washing is removed by the 1st handling device from the 2nd washing with port to the 1st carrying destination
Fortune.In addition, article is removed and emptying container is carried purpose by the 2nd handling device from the 1st washing port to the 2nd
Carry on ground.
Article before being washed by the 1st rinsing maching is moved into moving into the state of container is housed inside with port, in quilt
It is contained in the state of container and is carried by the 2nd handling device with port to the 1st washing with port from moving into.Also, by the 1st
Article after rinsing maching washing is carried by the 1st handling device from the 2nd washing port to carrying destination.So, the 1st remove
Shipping unit does not carry the article before being washed by the 1st rinsing maching, only carries out the carrying of the article after being washed, so can avoid,
By due to carry it is washed before article and contaminated 2nd handling device to carry the article after washing, so as to causing to wash
Article after washing is contaminated.
Moreover it is preferred that being also equipped with the 3rd washing port and the 4th washing port, port quilt is used in foregoing 3rd washing
Position corresponding with the 2nd rinsing maching for washing the aforesaid receptacle after items are removed is arranged at, will be by foregoing 2nd rinsing maching
Aforesaid receptacle supporting before washing, foregoing 4th washing is arranged at position corresponding with foregoing 2nd rinsing maching with port, will be by
Aforesaid receptacle supporting after foregoing 2nd rinsing maching washing, foregoing 4th washing are separated with port with foregoing 3rd washing with port
Set, or foregoing 4th washing is shared with port with foregoing 3rd washing with port, foregoing 2nd handling device is taken out foregoing
Aforesaid receptacle after article is from foregoing 1st washing by the use of port to the foregoing 3rd washing port as foregoing 2nd carrying destination
Carrying from from foregoing 4th washing port to the 3rd carrying destination of carrying and aforesaid receptacle.
According to the structure, it is carried to the 3rd washing port with port from the 1st washing and is washed by the 2nd by the 2nd handling device
The container that machine washing is washed, is carried by the 2nd handling device from the 4th washing port to the 3rd carrying destination.In such manner, it is possible to by the 2nd
Rinsing maching washing container, and the container is carried to the 3rd carrying destination from the 4th washing by the 2nd handling device with port,
Thus compared with additionally possessing the situation of handling device, the simplification of the structure of article carrying equipment can be realized.
Here it is preferred that the direction that foregoing 1st rinsing maching and foregoing 2nd rinsing maching are arranged is set to orientation, will
Foregoing 1st rinsing maching on foregoing arrangement direction is set to the 1st direction relative to direction existing for foregoing 2nd rinsing maching, by its phase
Opposite direction is set to the 2nd direction, and foregoing 1st handling device and foregoing 2nd handling device are respectively structured as can be in foregoing arrangement side
Move up, foregoing 1st handling device is located at foregoing 1st direction side relative to foregoing 2nd handling device, and the foregoing 1st carries dress
The mobile route and the mobile route of foregoing 2nd handling device put have overlapping part in foregoing arrangement direction.
According to the structure, carrying destination is disposed in the shifting in the mobile route and the 2nd handling device of the 1st handling device
Part overlapping in orientation on dynamic path, thus, it is possible to be carried with the 1st handling device and the 2nd handling device to identical
Carry article, container in destination.Thus, for example, can by the 2nd handling device by the container handling after washing to carrying purpose
Ground, carrying destination can be carried in a manner of the article container after by washing is in the container positioned at carrying destination.So,
Easy-to-use article carrying equipment can be provided.
Moreover it is preferred that be also equipped with for take care of items the 1st Storage Department, for take care of aforesaid receptacle the 2nd
Storage Department, foregoing 1st handling device also carry out items and carry purpose by the use of port to as the foregoing 1st from foregoing 2nd washing
The carrying of foregoing 1st Storage Department on ground, foregoing 2nd handling device also carry out aforesaid receptacle from foregoing 4th washing port to work
For the carrying of foregoing 2nd Storage Department of foregoing 3rd carrying destination.
According to the structure, can by the article keeping after washing in the 1st Storage Department, can by the container keeping after washing in
2nd Storage Department.Also, in the article container after by washing in the case of the container after washing, completed in the washing of article
Situation that the opportunity that the washing of opportunity and container is completed staggers etc., the 1st Storage Department, the 2nd Storage Department can be used as article, appearance
The buffering area of device temporary safe-keeping（buffer）.
In addition, foregoing 1st rinsing maching is set to the 1st direction relative to direction existing for foregoing 2nd rinsing maching, its is opposite
Direction is set to the 2nd direction, foregoing 1st washing port, foregoing 2nd washing port, foregoing 3rd washing port, the foregoing 4th
Washing is configured to most forward with port with foregoing 2nd washing in port and is stated the 1st direction side with port, foregoing move into, and
Foregoing 4th washing is configured to most forward with port and states the 2nd direction side, in foregoing 1st side compared with foregoing 2nd washing port
Upwards, foregoing 1st Storage Department being provided only with foregoing 1st Storage Department and foregoing 2nd Storage Department, with foregoing 4th washing end
Mouth is compared on foregoing 2nd direction, foregoing 2nd Storage Department being provided only with foregoing 1st Storage Department and foregoing 2nd Storage Department.
According to the structure, in orientation, set between the 1st Storage Department and the 2nd Storage Department the 1st washing port,
2nd washing port, the 3rd washing port, the 4th washing port, move into port, thus, it is possible to by these port-denses
Set.Therefore, when carrying article, container to other port from port, article, container can expeditiously be carried.This
Outside, it is provided only with compared with most being leaned on the 2nd washing port of the 1st direction side setting on the 1st direction for custody articles
1st Storage Department, so that the 2nd handling device for conveying container will not be compared with the 2nd washing port towards the 1st direction
It is mobile, the mobile route of the 2nd handling device can be shortened.In addition, the 4th washing port with most being leaned on the setting of the 2nd direction side
Compared to the 1st Storage Department on the 2nd direction, being provided only with for storage container, so that for carrying article the 1st carries
Device will not move compared with the 4th washing port towards the 2nd direction, can shorten the mobile route of the 1st handling device.So
The mobile route of the 1st handling device and the 2nd handling device can be shortened, can expeditiously carry out the progress of the 1st handling device
The carrying for the container that the carrying of article, the 2nd handling device are carried out.
Moreover it is preferred that be also equipped with for taking out of of taking out of the aforesaid receptacle for accommodating items with port, it is preceding
State the 2nd handling device and will not washed by foregoing 2nd rinsing maching and do not accommodated the aforesaid receptacles of items and take out of use to foregoing
Port is carried, and foregoing 1st handling device positioned at foregoing take out of with the aforesaid receptacle of port so as to be accommodated by the foregoing 1st washing machine washing
The mode for the items washed, the article is carried to foregoing take out of with port.
According to the structure, by the 2nd handling device, the container for not accommodating article is carried with port to taking out of in advance,
In a manner of making article container in the container, by the 1st handling device, will it is washed after article carried with port to taking out of.
So, using take out of with port by article container in container, thus, without will for example be washed with the place beyond port taking out of
Article container after washing is such in the situation of container, by the container handling for accommodating article to taking out of the cartage department as port
Reason, can expeditiously take out of container.
Industrial applicability
Technology of the present invention can be used in article, container handling to the end for being arranged at position corresponding with rinsing maching
The article carrying equipment of mouth.
Description of reference numerals
1：Plate body (article)
2：Container
5：1st stakcer crane (the 1st handling device)
6：2nd stakcer crane (the 2nd handling device)
7：Move into and use port
8：Take out of and use port
11：1st washing port
12：2nd washing port
13：3rd washing port
14：4th washing port
27：1st Storage Department
28：2nd Storage Department
CL1：1st rinsing maching
CL2：2nd rinsing maching
M1：Mobile route
M2：Mobile route
Y：Orientation
Y1：1st direction
Y2：2nd direction.
Claims (6)
1. a kind of article carrying equipment, items haulage equipment possesses to move into be used with port, the 1st washing port, the 2nd washing
Port, the 1st handling device, the 2nd handling device,
It is foregoing to move into the container moved into port and accommodate article,
Foregoing 1st washing is arranged at position corresponding with the 1st rinsing maching for washing items with port, preceding by accommodating
The aforesaid receptacle supporting of the items before the washing of the 1st rinsing maching is stated,
Foregoing 2nd washing is arranged at position corresponding with foregoing 1st rinsing maching with port, will be taken out from aforesaid receptacle and by
Items supporting after foregoing 1st rinsing maching washing,
Foregoing 1st handling device carries items,
Foregoing 2nd handling device carries aforesaid receptacle,
Items haulage equipment is characterised by,
Foregoing 2nd washing is provided separately with port with foregoing 1st washing with port,
Foregoing 2nd handling device carries out aforesaid receptacle and moved into from foregoing with carrying of the port to foregoing 1st washing port, foregoing
Article be removed after carrying of the aforesaid receptacle from foregoing 1st washing port to the 2nd carrying destination,
Foregoing 1st handling device carries out carrying of the items from foregoing 2nd washing port to the 1st carrying destination.
2. article carrying equipment as claimed in claim 1, it is characterised in that
The 3rd washing port and the 4th washing port are also equipped with,
Foregoing 3rd washing is arranged at position corresponding with the 2nd rinsing maching with port, before being washed by foregoing 2nd rinsing maching
Aforesaid receptacle supports, and foregoing 2nd rinsing maching washs the aforesaid receptacle after items are removed,
Foregoing 4th washing is arranged at position corresponding with foregoing 2nd rinsing maching with port, will be washed by foregoing 2nd rinsing maching
Aforesaid receptacle supporting afterwards,
Foregoing 4th washing is provided separately with port with foregoing 3rd washing with port, or foregoing 4th washing port by with it is preceding
The 3rd washing is stated to be shared with port,
Foregoing 2nd handling device is taken out the aforesaid receptacle after items from foregoing 1st washing by the use of port to as foregoing
The carrying of the foregoing 3rd washing port of 2nd carrying destination and aforesaid receptacle are carried from foregoing 4th washing port to the 3rd
The carrying of destination.
3. article carrying equipment as claimed in claim 1 or 2, it is characterised in that
The direction that foregoing 1st rinsing maching and foregoing 2nd rinsing maching arrange is set to orientation, before on foregoing arrangement direction
State the 1st rinsing maching and be set to the 1st direction relative to direction existing for foregoing 2nd rinsing maching, its opposite direction is set to the 2nd direction,
Foregoing 1st handling device and foregoing 2nd handling device are respectively structured as to move up in foregoing arrangement side,
Foregoing 1st handling device is located at foregoing 1st direction side relative to foregoing 2nd handling device,
The mobile route of foregoing 1st handling device and the mobile route of foregoing 2nd handling device have weight in foregoing arrangement direction
Folded part.
4. article carrying equipment as claimed in claim 2 or claim 3, it is characterised in that
The 1st Storage Department, the 2nd Storage Department for taking care of aforesaid receptacle for taking care of items are also equipped with,
Foregoing 1st handling device also carries out items from foregoing 2nd washing by the use of port to being used as foregoing 1st carrying destination
The carrying of foregoing 1st Storage Department,
Foregoing 2nd handling device also carries out aforesaid receptacle from foregoing 4th washing by the use of port to being used as foregoing 3rd carrying destination
The carrying of foregoing 2nd Storage Department.
5. article carrying equipment as claimed in claim 4, it is characterised in that
Foregoing 1st rinsing maching is set to the 1st direction relative to direction existing for foregoing 2nd rinsing maching, its opposite direction is set to
2nd direction,
It is foregoing 1st washing with port, it is foregoing 2nd washing with port, it is foregoing 3rd washing with port, it is foregoing 4th washing with port,
Foregoing move into is configured to most forward with port with foregoing 2nd washing in port and states the 1st direction side, and foregoing 4th washing
It is configured to most forward with port and states the 2nd direction side,
Compared with foregoing 2nd washing port on foregoing 1st direction, foregoing 1st Storage Department and foregoing 2nd keeping are provided only with
Foregoing 1st Storage Department in portion,
Compared with foregoing 4th washing port on foregoing 2nd direction, foregoing 1st Storage Department and foregoing 2nd keeping are provided only with
Foregoing 2nd Storage Department in portion.
6. the article carrying equipment as any one of claim 1 to 5, it is characterised in that
It is also equipped with for taking out of of taking out of the aforesaid receptacle for accommodating items with port,
Foregoing 2nd handling device carries the aforesaid receptacle for not accommodating items to foregoing take out of with port,
Foregoing 1st handling device with the aforesaid receptacle of port positioned at foregoing take out of so as to accommodate what is washed by foregoing 1st rinsing maching
The mode of items, the article is carried to foregoing take out of with port.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-193915 | 2016-09-30 | ||
| JP2016193915A JP6601360B2 (en) | 2016-09-30 | 2016-09-30 | Goods transport equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107878983A true CN107878983A (en) | 2018-04-06 |
| CN107878983B CN107878983B (en) | 2021-05-14 |
Family
ID=61781035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710907212.1A Active CN107878983B (en) | 2016-09-30 | 2017-09-29 | Article carrying apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6601360B2 (en) |
| KR (1) | KR102419509B1 (en) |
| CN (1) | CN107878983B (en) |
| TW (1) | TWI741028B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6835031B2 (en) * | 2018-04-27 | 2021-02-24 | 株式会社ダイフク | Goods transport equipment |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5525106A (en) * | 1993-04-12 | 1996-06-11 | Daifuku Co., Ltd. | Load storing equipment with cleaning device |
| CN1351758A (en) * | 1999-05-19 | 2002-05-29 | 因芬尼昂技术股份公司 | Installation for processing wafers |
| CN1426087A (en) * | 2001-11-30 | 2003-06-25 | 东京毅力科创株式会社 | Lining treatment system |
| CN1672068A (en) * | 2002-07-22 | 2005-09-21 | 大日本印刷株式会社 | Production line system and automated warehouse used in the system |
| CN1717796A (en) * | 2003-09-01 | 2006-01-04 | 东京毅力科创株式会社 | Substrate processing device |
| CN1819135A (en) * | 2005-01-28 | 2006-08-16 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN101211757A (en) * | 2006-12-27 | 2008-07-02 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| JP2009057117A (en) * | 2007-08-29 | 2009-03-19 | Sharp Corp | Carrying control system, carrying control method, and carrying control program |
| CN103171842A (en) * | 2011-12-21 | 2013-06-26 | 株式会社大福 | Article keeping equipment and maintaining method used in the article keeping equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07122531A (en) * | 1993-10-22 | 1995-05-12 | Dainippon Screen Mfg Co Ltd | Substrate processing liquid container and substrate processing equipment |
| JP3143700B2 (en) * | 1995-06-27 | 2001-03-07 | 東京エレクトロン株式会社 | Positioning device |
| JP3682170B2 (en) * | 1998-09-09 | 2005-08-10 | 株式会社東芝 | Cassette transport system, semiconductor exposure apparatus, and reticle transport method |
| JP2004303835A (en) * | 2003-03-28 | 2004-10-28 | Ｆａｓｌ Ｊａｐａｎ 株式会社 | Substrate storing device |
| JP5610009B2 (en) | 2013-02-26 | 2014-10-22 | 東京エレクトロン株式会社 | Substrate processing equipment |
-
2016
- 2016-09-30 JP JP2016193915A patent/JP6601360B2/en active Active
-
2017
- 2017-09-13 TW TW106131409A patent/TWI741028B/en active
- 2017-09-27 KR KR1020170124957A patent/KR102419509B1/en active IP Right Grant
- 2017-09-29 CN CN201710907212.1A patent/CN107878983B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5525106A (en) * | 1993-04-12 | 1996-06-11 | Daifuku Co., Ltd. | Load storing equipment with cleaning device |
| CN1351758A (en) * | 1999-05-19 | 2002-05-29 | 因芬尼昂技术股份公司 | Installation for processing wafers |
| CN1426087A (en) * | 2001-11-30 | 2003-06-25 | 东京毅力科创株式会社 | Lining treatment system |
| CN1672068A (en) * | 2002-07-22 | 2005-09-21 | 大日本印刷株式会社 | Production line system and automated warehouse used in the system |
| CN1717796A (en) * | 2003-09-01 | 2006-01-04 | 东京毅力科创株式会社 | Substrate processing device |
| CN1819135A (en) * | 2005-01-28 | 2006-08-16 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN101211757A (en) * | 2006-12-27 | 2008-07-02 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| JP2009057117A (en) * | 2007-08-29 | 2009-03-19 | Sharp Corp | Carrying control system, carrying control method, and carrying control program |
| CN103171842A (en) * | 2011-12-21 | 2013-06-26 | 株式会社大福 | Article keeping equipment and maintaining method used in the article keeping equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI741028B (en) | 2021-10-01 |
| JP6601360B2 (en) | 2019-11-06 |
| TW201814815A (en) | 2018-04-16 |
| JP2018052724A (en) | 2018-04-05 |
| KR102419509B1 (en) | 2022-07-08 |
| KR20180036576A (en) | 2018-04-09 |
| CN107878983B (en) | 2021-05-14 |
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