CN107866410A - A kind of semiconductor die box is cleaned and dried storage integrated method and apparatus - Google Patents
A kind of semiconductor die box is cleaned and dried storage integrated method and apparatus Download PDFInfo
- Publication number
- CN107866410A CN107866410A CN201610850773.8A CN201610850773A CN107866410A CN 107866410 A CN107866410 A CN 107866410A CN 201610850773 A CN201610850773 A CN 201610850773A CN 107866410 A CN107866410 A CN 107866410A
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- China
- Prior art keywords
- box
- brilliant
- brilliant box
- carrier
- unit
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
- F26B5/048—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum in combination with heat developed by electro-magnetic means, e.g. microwave energy
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- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention provides a kind of semiconductor die box and is cleaned and dried storage integrated method and apparatus, and the equipment includes：Control module, brilliant box-packed carrier unit, brilliant box cleaning unit, brilliant box are dried in vacuo the feeding device of unit, brilliant box storage element, brilliant box unloading unit, brilliant box carrier and the brilliant box carrier；This method loads brilliant box using brilliant box carrier；Brilliant box is subjected to ultrasonic wave together with brilliant box carrier or mega sonic wave cleans；Brilliant box after cleaning is dried in vacuo together with brilliant box carrier；Brilliant box after vacuum drying is stored together with brilliant box carrier；The brilliant box of storage is taken out together with brilliant box carrier, and brilliant box is unloaded from brilliant box carrier.The cleaning, dry of the achievable semiconductor die box of the present invention, storage integrated, improve the efficiency and quality of the cleaning-drying of brilliant box, have saved time cost.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, and storage one is cleaned and dried more particularly to a kind of semiconductor die box
Change method and apparatus.
Background technology
In semiconductor fabrication process, the cleaning of traditional silicon chip crystalline substance box is manually cleaned using immersion type, or monomer suspension spray
Formula is cleaned.Manual cleaning method is that brilliant box is immersed into tank, is cleaned using nylon or sponge.Monomer hanging spray type cleans
Mode need to use purpose-built washing equipment, and a main shaft is provided with the centre of cleaning equipment, and some insertion cages are set around main shaft
(Insert Cage), some brilliant boxes of set can be placed by each inserting cage (Insert Cage).Typically by the brilliant box after uncapping and
Brilliant lid is vertically put into the insertion cage (Insert Cage) of cleaning equipment, wherein the open level of brilliant box is outwardly, brilliant lid is placed
In brilliant box side, cleaning showers are then carried out.Drying after artificial cleaning generally spontaneously dries.Fountain cleaning equipment uses
Gas drying, Rotary drying etc..
Traditional silicon chip crystalline substance box cleaning and the subject matter dried are：
Brilliant box pollutant is easily removed on artificial cleaning technique, but is relied on manually, the uniformity of cleaning quality can not ensure.
And for important brilliant box, such as shipment to client, client will not typically allow manually to clean.
Fountain cleaning is cleaned using nozzle spray, it is impossible to is targetedly cleaned for brilliant box dead angle, technology
On for brilliant box pollutant removal effect it is general.
Gas, which is dried, can be reintroduced back to pollutant；Rotary drying is likely to cause to brilliant box to wear to a certain degree；Naturally it is dry
Dry time-consuming longer, typically in 8 hours or more, and spontaneously drying needs operator ceaselessly to operate, and personnel are dirty in itself
Dye source.
Therefore, it is necessary that the cleaning to existing semiconductor die box, drying means improve in fact, to solve the above problems.
The content of the invention
Prior art in view of the above, it is an object of the invention to provide a kind of semiconductor die box to be cleaned and dried storage one
Body method and apparatus, for solving variety of problems of the prior art.
In order to achieve the above objects and other related objects, the present invention provides a kind of semiconductor die box and is cleaned and dried storage one
Change method, including step：
Brilliant box is loaded using brilliant box carrier；
Brilliant box is subjected to ultrasonic wave together with brilliant box carrier or mega sonic wave cleans；
Brilliant box after cleaning is dried in vacuo together with brilliant box carrier；
Brilliant box after vacuum drying is stored together with brilliant box carrier；
The brilliant box of storage is taken out together with brilliant box carrier, and brilliant box is unloaded from brilliant box carrier.
Preferably, brilliant box is carried out being dried under vacuum to dry standard together with brilliant box carrier.
Preferably, brilliant box is stored together with brilliant box carrier and spontaneously dried to the standard of drying.
In order to achieve the above objects and other related objects, the present invention also provides a kind of semiconductor die box and is cleaned and dried storage one
Body equipment, including：Control module, brilliant box-packed carrier unit, brilliant box cleaning unit, brilliant box vacuum drying unit, the storage of brilliant box are single
First, brilliant box unloading unit, brilliant box carrier and in the box-packed carrier unit of the crystalline substance, brilliant box cleaning unit, the predrying unit of brilliant box, crystalline substance
The feeding device of the brilliant box carrier is transported between box stored dry unit and brilliant box unloading unit；Wherein,
The control module is dried with the box-packed carrier unit of the crystalline substance, brilliant box cleaning unit, the predrying unit of brilliant box, brilliant box and stored up
Memory cell, brilliant box unloading unit and feeding device connection；
The box-packed carrier unit of crystalline substance provides empty brilliant box carrier, and brilliant box is loaded into brilliant box in the box-packed carrier unit of crystalline substance and carried
Tool；
The brilliant box cleaning unit includes the rinse bath for being configured with ultrasonic wave or mega sonic wave generator, the control module control
Make the feeding device to take out the brilliant box carrier for being mounted with brilliant box from the box-packed carrier unit of crystalline substance, and put into the rinse bath
Middle cleaning；
The brilliant box vacuum drying unit is provided with vacuum drying chamber, and the control module controls the feeding device from described
That completion cleaning is taken out in brilliant box cleaning unit is mounted with the brilliant box carrier of brilliant box, and puts into the vacuum drying chamber and dry；
The brilliant box storage element includes storage bed, and the control module controls the feeding device from the vacuum drying
That completion drying is taken out in unit is mounted with the brilliant box carrier of brilliant box, and is positioned on the storage bed and stores；
The control module control feeding device takes out from the storage bed in the brilliant box storage element reaches dry
Dry standard is mounted with the brilliant box carrier of brilliant box, and launches into the brilliant box unloading unit, and brilliant box is in the brilliant box unloading unit
It is interior to be unloaded from brilliant box carrier.
Preferably, the brilliant box includes box body and lid, and the brilliant box carrier includes box body neck and corresponding lid
Neck, the box body and lid of the brilliant box are respectively embedded in the box body neck and corresponding lid neck, make the box
Body is relative with the corresponding lid back side.
It is further preferred that the box body back side and the corresponding lid back side are at a distance of 1~20 centimetre.
It is further preferred that the brilliant box carrier includes multigroup box body neck and corresponding lid neck, multigroup box body
Neck and corresponding lid neck are arranged in rows.
It is further preferred that the brilliant box carrier includes 2~10 groups of box body necks and corresponding lid neck, adjacent two
Group box body neck and corresponding lid neck are at a distance of 1~20 centimetre.
It is further preferred that convex ridge or groove are provided between two adjacent groups box body neck and corresponding lid neck.
Preferably, the brilliant box carrier both ends are provided with handle.
It is further preferred that the handle is that the semicircular arc to extend along the brilliant box carrier both ends is raised.
Preferably, the raised thickness of the semicircular arc is 2~5 centimetres.
Preferably, the material of the brilliant box carrier is Teflon.
Preferably, when loading brilliant box, the box-packed carrier unit of crystalline substance is by the brilliant box carrier of sky to outside the box-packed carrier unit of crystalline substance
Roll oblique certain angle.
Preferably, after completing brilliant box-packed load, the box-packed carrier unit of crystalline substance will be mounted with the brilliant box carrier of brilliant box to the crystalline substance
Certain angle is tilted on the inside of box-packed carrier unit.
It is further preferred that dried in the box-packed carrier unit of the crystalline substance, brilliant box cleaning unit, the predrying unit of brilliant box, brilliant box
When transporting the brilliant box carrier between storage element and brilliant box unloading unit, brilliant box carrier is kept to tilt the certain angle.
It is further preferred that the brilliant box carrier angle of inclination is 15 degree.
Preferably, the brilliant box cleaning unit changes water after fixing lot number using deionized water cleaning overflow manner or cleaning
Mode is cleaned.
Preferably, the brilliant box cleaning unit is cleaned using 950KHZ mega sonic wave.
Preferably, the brilliant box vacuum drying unit is additionally provided with infrared drying equipment and/or microwave drier.
Preferably, the brilliant box storage element includes Multi-layer Store platform, and every layer of storage bed can place multiple brilliant box carriers.
Preferably, the storage bed dips down tiltedly at a certain angle, and one end that the storage bed tilts down is provided with baffle plate.
It is further preferred that the angle of inclination of the storage bed is with transporting the angle of inclination one kept during the brilliant box carrier
Cause.
Preferably, the feeding device includes mechanical arm.
Preferably, the semiconductor die box, which is cleaned and dried storage integrated equipment, also includes brilliant box carrier recovery unit, institute
State brilliant box carrier recovery unit to be located between the brilliant box unloading unit and brilliant box-packed carrier unit, the brilliant box unloading unit is unloaded
Brilliant box carrier after load is transported to the box-packed carrier unit of crystalline substance.
Preferably, the semiconductor die box, which is cleaned and dried storage integrated equipment, also includes blower fan filtering unit.
As described above, the semiconductor die box of the present invention is cleaned and dried storage integrated method and apparatus, have beneficial below
Effect：
The present invention uses brilliant box carrier to load brilliant box, and the tradition side such as artificial scrub and nozzle spray is substituted with sound wave cleaning
Formula, dryings, the traditional approach such as wind are substituted with vacuum drying, the cleaning, dry of achievable semiconductor die box, storage integrated,
The efficiency and quality of the cleaning-drying of brilliant box are improved, has saved time cost.
Brief description of the drawings
Fig. 1 is shown as the schematic diagram that semiconductor die box provided in an embodiment of the present invention is cleaned and dried storage integrated equipment.
Fig. 2 is shown as the schematic top plan view of the brilliant box carrier in the embodiment of the present invention.
Fig. 3 is shown as the schematic side view of the brilliant box carrier in the embodiment of the present invention.
Fig. 4 is shown as the schematic diagram of the brilliant box storage element in the embodiment of the present invention.
Component label instructions
100 control modules
101 brilliant box-packed carrier units
102 brilliant box cleaning units
103 brilliant box vacuum drying units
104 brilliant box storage elements
105 brilliant box unloading units
106 brilliant box carrier recovery units
107 blower fan filtering units
200 brilliant box carriers
201 box body necks
202 lid necks
203 handles
300 feeding devices
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.It should be noted that in the case where not conflicting, following examples and implementation
Feature in example can be mutually combined.
It should be noted that the diagram provided in following examples only illustrates the basic structure of the present invention in a schematic way
Think, only show the component relevant with the present invention in schema then rather than according to component count, shape and the size during actual implement
Draw, kenel, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its assembly layout kenel
It is likely more complexity.
In order to solve traditional silicon chip crystalline substance box cleaning and drying means, time-consuming, efficiency is low, manual operation is easily introduced pollution
The problems such as, the present invention provides a kind of semiconductor die box and is cleaned and dried storage integrated method, including step：
S1 loads brilliant box using brilliant box carrier；
Brilliant box is carried out S2 into ultrasonic wave together with brilliant box carrier or mega sonic wave cleans；
Brilliant box after cleaning is dried in vacuo by S3 together with brilliant box carrier；
S4 stores the brilliant box after vacuum drying together with brilliant box carrier；
S5 takes out the brilliant box of storage together with brilliant box carrier, and brilliant box is unloaded from brilliant box carrier.
Specifically, brilliant box is subjected to vacuum drying until the standard of drying together with brilliant box carrier.Or by brilliant box together with
Brilliant box carrier using vacuum drying as predrying, the water droplet after removal cleaning, then stands storage and spontaneously dried to dry together
Dry standard.
Referring to Fig. 1, the present embodiment, which provides a kind of semiconductor die box, is cleaned and dried storage integrated equipment, can be achieved above-mentioned
Method, including：Control module 100, brilliant box-packed carrier unit 101, brilliant box cleaning unit 102, brilliant box vacuum drying unit 103, crystalline substance
Box storage element 104, brilliant box unloading unit 105, brilliant box carrier 200 and single in the box-packed carrier unit 101 of the crystalline substance, the cleaning of brilliant box
The brilliant box is transported between member 102, the predrying unit 103 of brilliant box, brilliant box stored dry unit 104 and brilliant box unloading unit 105
The feeding device 300 of carrier 200；Wherein,
The control module 100 and the box-packed carrier unit 101 of the crystalline substance, brilliant box cleaning unit 102, the predrying unit of brilliant box
103rd, brilliant box stored dry unit 104, brilliant box unloading unit 105 and feeding device 300 connect, and realize box-packed to the crystalline substance
Carrier unit 101, brilliant box cleaning unit 102, the predrying unit 103 of brilliant box, brilliant box stored dry unit 104, brilliant box unloading unit
105 and the control of feeding device 300；
The box-packed carrier unit 101 of crystalline substance provides the brilliant box carrier 200 of sky, and brilliant box is built-in in the box-packed carrier unit 101 of the crystalline substance
It is loaded into brilliant box carrier 200；
The brilliant box cleaning unit 102 includes the rinse bath for being configured with ultrasonic wave or mega sonic wave generator, the control mould
Block 100 controls the feeding device 300 to take out the brilliant box carrier 200 for being mounted with brilliant box from the box-packed carrier unit 101 of the crystalline substance,
And put into the rinse bath and clean；
The brilliant box vacuum drying unit 103 is provided with vacuum drying chamber, and the control module 100 controls the feeding device
300 taken out from the brilliant box cleaning unit 102 complete cleaning be mounted with the brilliant box carrier 200 of brilliant box, and put into described true
Dried in empty drying chamber；
The brilliant box storage element 104 includes storage bed, and the control module 100 controls the feeding device 300 from institute
State taken out in vacuum drying unit 103 complete it is dry be mounted with the brilliant box carrier 200 of brilliant box, and be positioned on the storage bed
Storage；
The control module 100 controls the feeding device 300 to be taken from the storage bed in the brilliant box storage element 104
Go out to reach dry standard is mounted with the brilliant box carrier 200 of brilliant box, and launches into the brilliant box unloading unit 105, and brilliant box is in institute
State and unloaded in brilliant box unloading unit 105 from brilliant box carrier 200.
Specifically, the brilliant box includes box body and lid.The brilliant box carrier 200 is including box body neck 201 and correspondingly
Lid neck 202, the box body and lid of the brilliant box can be respectively embedded in the box body neck 201 and corresponding lid
In neck 202, make the box body relative with the corresponding lid back side, as shown in Figure 2.Carried on the back with corresponding lid at the box body back side
At a distance of 1~20 centimetre, the present embodiment is preferably 10 centimetres in face.Box body neck 201 and corresponding lid neck 202 are 1 group, are used
In the same brilliant box of loading.The brilliant box carrier 200 can include multigroup box body neck 201 and corresponding lid neck 202,
To load multiple brilliant boxes.For example, the brilliant box carrier 200 can include 2~10 groups of box body necks and corresponding lid card
Groove, preferable quantity are 5 groups.It is placed adjacent between group, multigroup box body neck 201 and corresponding lid neck 202 are arranged in rows.
At a distance of 1~20 centimetre, the present embodiment is preferably 10 centimetres for two adjacent groups box body neck 201 and corresponding lid neck 202.Phase
Convex ridge or groove are provided between adjacent two groups of box body necks 201 and corresponding lid neck 202.Position configuration ring between group and group
Support when shape convex ridge or groove are advantageous to clean, dry, store to brilliant box carrier 200.The specific design of brilliant box carrier 200 with
After all brilliant box box bodies and lid are embedded in brilliant box carrier 200, brilliant box carrier 200 tilts 30 degree to all directions, brilliant box box body and box
Lid, which will not mark, to be preferred.Lid is embedded in the brilliant part of box carrier 200, can design the supporting construction to the lid back side.Brilliant box carrier
200, part containing neck, hollow out can be taken to design, be cleaned and dried dead angle to eliminate, and mitigate gross weight.
Specifically, handle 203 can be provided with the brilliant both ends of box carrier 200, as shown in Figure 3.The handle 203 can be with
It is that the semicircular arc to extend along the brilliant both ends of box carrier 200 is raised.The raised thickness of the semicircular arc is 2~5 centimetres, excellent
Elect 4 centimetres as.The feeding device transport that is designed to facilitate of handle 203 is defined, for example, being easy to manipulator to capture and be easy in circle
Slided on pole.
Specifically, the material of the brilliant box carrier 200 is using resistance to cleaning, high temperature resistant, high intensity, high-cleanness, high, smooth
Plastic material, resistance to infrared ray or microwave radiation are needed in some embodiments.In the present embodiment, the material of the brilliant box carrier 200
Preferably Teflon.
Specifically, the control module 100 can set control panel, control the box-packed carrier unit 101 of the crystalline substance, brilliant box clear
Wash the predrying unit 103 of unit 102, brilliant box, brilliant box stored dry unit 104, brilliant box unloading unit 105 and feeding device
300 carry out corresponding operating.
Specifically, the feeding device 300 includes mechanical arm, is captured by mechanical arm and transports brilliant box carrier 200.
Specifically, when loading brilliant box, the box-packed carrier unit 101 of crystalline substance is by the brilliant box carrier 200 of sky to the box-packed load of crystalline substance
The outside of unit 101 tilts certain angle, is easy to brilliant box-packed load.Loading brilliant box can take mechanical arm to operate or manually grasp
Make.For example, operator can select " loading " on the control panel of integration apparatus, control module 100 controls brilliant box-packed load
Unit 101 opens external door, and empty brilliant box carrier 200 is 15 degree to equipment outer incline, preferable angle of inclination, and operator will treat
After the brilliant box of cleaning is split up into brilliant box box body and lid manually, box body and lid are embedded in brilliant box carrier 200 manually
In neck.
After completing brilliant box-packed load, the brilliant box carrier for being mounted with brilliant box is carried list by the box-packed carrier unit of crystalline substance to the crystalline substance is box-packed
First inner side tilts certain angle.For example, neck pile after by " it is determined that ", control module 100 controls brilliant box-packed carrier unit 101 outer
Door is closed, and fully loaded brilliant box carrier 200 is tilted to equipment.Preferable angle of inclination is 15 degree, and can be in cleaning, vacuum afterwards
Dry, store, keep same angle in uninstall process.Preferably, in the box-packed carrier unit 101 of the crystalline substance, brilliant box cleaning unit
102nd, the brilliant box is transported between the predrying unit 103 of brilliant box, brilliant box stored dry unit 104 and brilliant box unloading unit 105 to carry
When having 200, the angle of inclination is kept.
Specifically, the brilliant box cleaning unit 102 can use deionized water cleaning overflow manner, or fixed batch of cleaning
The mode that water is changed after number is cleaned.Preferably, the brilliant box cleaning unit 102 is entered the present embodiment using 950KHZ mega sonic wave
Row cleaning.For example, in supersonic generator of the rinse bath configuration more than 20KHZ, preferably 950KHZ mega sonic wave generator, pin
Specific aim mega sonic wave cleaning is carried out to brilliant box box body opening direction and lid inwall direction.Rinse bath can be quartz material.
Specifically, the brilliant box vacuum drying unit 103 is also provided with infrared drying equipment and/or microwave drying dress
Put, auxiliary vacuum drying.
Vacuum drying can be used as predrying, be mainly used in removing the water droplet after brilliant box cleaning, brilliant box is thoroughly dried
To the standard of drying, then it is preferred with spontaneously drying.The brilliant box storage element 104 can be used for the natural drying of brilliant box.Such as Fig. 4 institutes
Show, the brilliant box storage element 104 can include Multi-layer Store platform, and every layer of storage bed can place multiple brilliant box carriers 200, this reality
It is preferably four layers of storage bed to apply example, and every layer of storage bed can place five brilliant box carriers 200, i.e., can dry 100 brilliant boxes altogether.Institute
State storage bed preferably to dip down at a certain angle tiltedly, one end that the storage bed tilts down is provided with baffle plate.The storage bed
Angle of inclination with transporting the brilliant box carrier 200 when the angle of inclination that keeps it is consistent.
In the present embodiment, with vacuum drying carry out it is predrying after the completion of, mechanical arm is captured described in brilliant box carrier 200 enters
In brilliant box storage element 104, put into since orlop, because gravity relationship, brilliant box carrier 200 are sliding to inclination side after input
It is dynamic, until being blocked.As shown in figure 4, rightmost has baffle plate to block first brilliant box carrier 200, brilliant box carrier 200 afterwards
Blocked by previous brilliant box carrier 200.After one layer is piled, next brilliant box carrier 200 can be placed into last layer, by that analogy.
Brilliant box, which is stood, after the completion of the brilliant placement of box carrier 200 is spontaneously dried.
Pre-drying-time can be increased in implementation process as needed, time, present device production capacity are spontaneously dried to reduce
It can increase, but energy resource consumption also accordingly increases.As present device production capacity is enough, then when can reduce predrying as needed
Between, to save energy resource consumption.It can be set as needed per the predrying of layer crystal box carrier with spontaneously drying the time in implementation process
It is set to difference.Due to spontaneously drying time length, degree of drying not up to dries standard when may result in the need for unloading brilliant box.For
Such case, another batch of brilliant box can be put into, and the prolonged vacuum drying of progress is set until the standard of drying, skips nature and do
Dry step, the ad-hoc location of brilliant box storage element 104 is put into, unloading is directly drawn off by mechanical arm and is used.
Brilliant box unloading can take mechanical arm operation or manual operation.For example, operator can control in integration apparatus
Panel selects " unloading ", and the control machinery arm of control module 100 enters the brilliant box storage element 104 and takes out crystalline substance dry at first
Box carrier 200.In the present embodiment, complete, alarm, such as judge if control module 100 judges to dry without brilliant box carrier 200
Drying has been completed, then the brilliant box carrier 200 of taking-up is put into brilliant box unloading unit 105 by the control machinery arm of control module 100, and
Control the external door of brilliant box unloading unit 105 to open, operator by the brilliant box box body and corresponding lid from brilliant box carrier 200 manually
After taking away by " it is determined that ", unloading complete.
As shown in figure 1, the present embodiment is preferably, the semiconductor die box, which is cleaned and dried storage integrated equipment, also includes crystalline substance
Box carrier recovery unit 106, the brilliant box carrier recovery unit 106 is located at the brilliant box unloading unit 105 and brilliant box-packed load is single
Between member 101, the brilliant box carrier 200 after the brilliant box unloading unit 105 is unloaded is transported to the box-packed carrier unit 101 of the crystalline substance.
Specifically, the brilliant box carrier recovery unit can include the load terminal of unloading end and level height less than the unloading end, unload
Carry and the structures such as slideway or litter be provided between end and load terminal, way of recycling be using gravity make the brilliant box carrier 200 of recovery from
The load terminal slid back into close to the unloading end of brilliant box unloading unit 105 near the box-packed carrier unit 101 of crystalline substance, can be by when loading every time
The brilliant support of box carrier 200 for having reclaimed and having awaited orders is entered brilliant box-packed carrier unit 101 by mechanical arm, is loaded.
As shown in figure 1, the present embodiment is preferably, the semiconductor die box, which is cleaned and dried storage integrated equipment, also includes wind
Machine filter bank 107, positioned at the top of each unit, the semiconductor die box is cleaned and dried storage integrated equipment and be in cleaning
In dustless environment.
In summary, the present invention uses brilliant box carrier to load brilliant box, substitutes artificial scrub with sound wave cleaning and nozzle sprays
Deng traditional approach, the traditional approach such as drying, wind are substituted with vacuum drying, cleaning, dry, storing for semiconductor die box can be achieved
Integration, the efficiency and quality of the cleaning-drying of brilliant box are improved, has saved time cost.So the present invention effectively overcomes
Various shortcoming of the prior art and have high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (26)
1. a kind of semiconductor die box is cleaned and dried storage integrated method, it is characterised in that including step：
Brilliant box is loaded using brilliant box carrier；
Brilliant box is subjected to ultrasonic wave together with brilliant box carrier or mega sonic wave cleans；
Brilliant box after cleaning is dried in vacuo together with brilliant box carrier；
Brilliant box after vacuum drying is stored together with brilliant box carrier；
The brilliant box of storage is taken out together with brilliant box carrier, and brilliant box is unloaded from brilliant box carrier.
2. semiconductor die box according to claim 1 is cleaned and dried storage integrated method, it is characterised in that：Brilliant box is connected
Isomorphous box carrier carries out being dried under vacuum to dry standard together.
3. semiconductor die box according to claim 1 is cleaned and dried storage integrated method, it is characterised in that：Brilliant box is connected
Isomorphous box carrier is stored and spontaneously dried to the standard of drying together.
4. a kind of semiconductor die box is cleaned and dried storage integrated equipment, it is characterised in that including：Control module, brilliant box-packed load
Unit, brilliant box cleaning unit, brilliant box vacuum drying unit, brilliant box storage element, brilliant box unloading unit, brilliant box carrier and in institute
State between brilliant box-packed carrier unit, brilliant box cleaning unit, the predrying unit of brilliant box, brilliant box stored dry unit and brilliant box unloading unit
Transport the feeding device of the brilliant box carrier；Wherein,
The control module and the box-packed carrier unit of the crystalline substance, brilliant box cleaning unit, the predrying unit of brilliant box, brilliant box stored dry list
First, brilliant box unloading unit and feeding device connection；
The box-packed carrier unit of crystalline substance provides empty brilliant box carrier, and brilliant box is loaded into brilliant box carrier in the box-packed carrier unit of crystalline substance；
The brilliant box cleaning unit includes the rinse bath for being configured with ultrasonic wave or mega sonic wave generator, and the control module controls institute
State feeding device to take out the brilliant box carrier for being mounted with brilliant box from the box-packed carrier unit of crystalline substance, and put into clear in the rinse bath
Wash；
The brilliant box vacuum drying unit is provided with vacuum drying chamber, and the control module controls the feeding device from the brilliant box
That completion cleaning is taken out in cleaning unit is mounted with the brilliant box carrier of brilliant box, and puts into the vacuum drying chamber and dry；
The brilliant box storage element includes storage bed, and the control module controls the feeding device from the vacuum drying unit
Middle taking-up completion drying is mounted with the brilliant box carrier of brilliant box, and is positioned on the storage bed and stores；
The control module control feeding device takes out from the storage bed in the brilliant box storage element reaches dry mark
Accurate is mounted with the brilliant box carrier of brilliant box, and launches into the brilliant box unloading unit, brilliant box in the brilliant box unloading unit from
Unloaded in brilliant box carrier.
5. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The brilliant box
Including box body and lid, the brilliant box carrier includes box body neck and corresponding lid neck, the box body and box of the brilliant box
Lid is respectively embedded in the box body neck and corresponding lid neck, makes the box body relative with the corresponding lid back side.
6. semiconductor die box according to claim 5 is cleaned and dried storage integrated equipment, it is characterised in that：The box body
The back side is with the corresponding lid back side at a distance of 1~20 centimetre.
7. semiconductor die box according to claim 5 is cleaned and dried storage integrated equipment, it is characterised in that：The brilliant box
Carrier includes multigroup box body neck and corresponding lid neck, and multigroup box body neck and corresponding lid neck are arranged in
OK.
8. semiconductor die box according to claim 7 is cleaned and dried storage integrated equipment, it is characterised in that：The brilliant box
Carrier includes 2~10 groups of box body necks and corresponding lid neck, two adjacent groups box body neck and corresponding lid neck
At a distance of 1~20 centimetre.
9. semiconductor die box according to claim 7 is cleaned and dried storage integrated equipment, it is characterised in that：Two adjacent groups
Convex ridge or groove are provided between box body neck and corresponding lid neck.
10. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
Box carrier both ends are provided with handle.
11. semiconductor die box according to claim 10 is cleaned and dried storage integrated equipment, it is characterised in that：Described
Hand is that the semicircular arc to extend along the brilliant box carrier both ends is raised.
12. semiconductor die box according to claim 11 is cleaned and dried storage integrated equipment, it is characterised in that：Described half
The thickness of arc-shaped convex is 2~5 centimetres.
13. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
The material of box carrier is Teflon.
14. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：Load brilliant
During box, the brilliant box carrier of sky is tilted certain angle by the box-packed carrier unit of crystalline substance to the box-packed carrier unit outside of the crystalline substance.
15. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：Complete brilliant
After box-packed load, the box-packed carrier unit of crystalline substance is certain to inclination on the inside of the box-packed carrier unit of the crystalline substance by the brilliant box carrier for being mounted with brilliant box
Angle.
16. semiconductor die box according to claim 15 is cleaned and dried storage integrated equipment, it is characterised in that：Described
It is defeated between brilliant box-packed carrier unit, brilliant box cleaning unit, the predrying unit of brilliant box, brilliant box stored dry unit and brilliant box unloading unit
When transporting the brilliant box carrier, brilliant box carrier is kept to tilt the certain angle.
17. the semiconductor die box according to any one of claim 15 or 16 is cleaned and dried storage integrated equipment, its feature
It is：The brilliant box carrier angle of inclination is 15 degree.
18. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
Box cleaning unit is cleaned by the way of water is changed after deionized water cleans overflow manner or the fixed lot number of cleaning.
19. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
Box cleaning unit is cleaned using 950KHZ mega sonic wave.
20. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
Box vacuum drying unit is additionally provided with infrared drying equipment and/or microwave drier.
21. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The crystalline substance
Box storage element includes Multi-layer Store platform, and every layer of storage bed can place multiple brilliant box carriers.
22. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：The storage
Deposit platform to dip down at a certain angle tiltedly, one end that the storage bed tilts down is provided with baffle plate.
23. semiconductor die box according to claim 16 is cleaned and dried storage integrated equipment, it is characterised in that：The storage
The angle of inclination kept when depositing the angle of inclination of platform with transporting the brilliant box carrier is consistent.
24. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：It is described defeated
Shipping unit includes mechanical arm.
25. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：Described half
Conductor crystalline substance box, which is cleaned and dried storage integrated equipment, also includes brilliant box carrier recovery unit, and the brilliant box carrier recovery unit is located at
Between the brilliant box unloading unit and brilliant box-packed carrier unit, the brilliant box carrier after the brilliant box unloading unit unloading is transported to institute
State brilliant box-packed carrier unit.
26. semiconductor die box according to claim 4 is cleaned and dried storage integrated equipment, it is characterised in that：Described half
Conductor crystalline substance box, which is cleaned and dried storage integrated equipment, also includes blower fan filtering unit.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610850773.8A CN107866410B (en) | 2016-09-26 | 2016-09-26 | Integrated method and equipment for cleaning, drying and storing semiconductor crystal box |
| TW106112992A TWI649132B (en) | 2016-09-26 | 2017-04-18 | Semiconductor crystal box cleaning and drying storage integrated equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610850773.8A CN107866410B (en) | 2016-09-26 | 2016-09-26 | Integrated method and equipment for cleaning, drying and storing semiconductor crystal box |
Publications (2)
| Publication Number | Publication Date |
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| CN107866410A true CN107866410A (en) | 2018-04-03 |
| CN107866410B CN107866410B (en) | 2021-07-06 |
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|---|---|---|---|
| CN201610850773.8A Active CN107866410B (en) | 2016-09-26 | 2016-09-26 | Integrated method and equipment for cleaning, drying and storing semiconductor crystal box |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107866410B (en) |
| TW (1) | TWI649132B (en) |
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| CN112038257A (en) * | 2019-06-04 | 2020-12-04 | 北京北方华创微电子装备有限公司 | Cleaning equipment |
| CN113701464A (en) * | 2021-10-28 | 2021-11-26 | 华林科纳(江苏)半导体设备有限公司 | Drying device for semiconductor cleaning equipment |
| CN117900221A (en) * | 2024-03-07 | 2024-04-19 | 深圳市凯尔迪光电科技有限公司 | Semiconductor wafer conveying box cleaning machine and control method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102596033B1 (en) * | 2020-11-16 | 2023-11-01 | (주)에스티아이 | Pod cleaning process |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201825204A (en) | 2018-07-16 |
| TWI649132B (en) | 2019-02-01 |
| CN107866410B (en) | 2021-07-06 |
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