CN107807491B - A kind of double spherical surface bent crystal imaging systems and its adjusting method for zero astigmatic image error - Google Patents

A kind of double spherical surface bent crystal imaging systems and its adjusting method for zero astigmatic image error Download PDF

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CN107807491B
CN107807491B CN201711063235.5A CN201711063235A CN107807491B CN 107807491 B CN107807491 B CN 107807491B CN 201711063235 A CN201711063235 A CN 201711063235A CN 107807491 B CN107807491 B CN 107807491B
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spherical surface
bead
brilliant
fixed
times regualting
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CN107807491A (en
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王瑞荣
安红海
舒桦
方智恒
贾果
谢志勇
王伟
熊俊
张帆
华能
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SHANGHAI LASER PLASMA INSTITUTE OF CHINA ACADEMY OF ENGINEERING PHYSICS
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SHANGHAI LASER PLASMA INSTITUTE OF CHINA ACADEMY OF ENGINEERING PHYSICS
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B42/00Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
    • G03B42/02Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B42/00Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
    • G03B42/02Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays
    • G03B42/025Positioning or masking the X-ray film cartridge in the radiographic apparatus

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  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention discloses a kind of double spherical surface bent crystal imaging systems for zero astigmatic image error, the system includes fixed bottom plate, five times regualting frame I, the recessed crystalline substance of spherical surface, five times regualting frame II, the convex crystalline substance of spherical surface, two-dimensional adjustment frame I, five times regualting frame III, connecting rod, cuboid glass blocks, egative film room, film case, filter disc frame, filter disc, egative film, light barrier, five times regualting frame IV, the recessed crystalline substance of spherical surface is fixed on five times regualting frame I, the convex crystalline substance of spherical surface is fixed on five times regualting frame II, cuboid glass blocks is fixed on five times regualting frame III, one end of connecting rod is fixed on the lower surface of fixed bottom plate, the other end is fixed on five times regualting frame IV, egative film room is fixed on two-dimensional adjustment bracket, each five times regualting frame is sequentially fixed on fixed bottom plate.The present invention effectively eliminates influence of the astigmatic image error to spatial resolution of the spherical surface bent crystal, the diagnosis for making the spherical surface bent crystal have high-space resolution ability applied to bead implosion process in Hot dense plasma, inertial confinement fusion.

Description

A kind of double spherical surface bent crystal imaging systems and its adjusting method for zero astigmatic image error
Technical field
The invention belongs to x-ray imaging fields, and in particular to a kind of double spherical surface bent crystals imaging system for zero astigmatic image error System and its adjusting method, can be used for the high-temperature plasma of small Bragg angle (grazing angle), high spatial resolution, quasi-monchromaticity X-ray imaging.
Background technique
X-ray imaging technology be usually used in Hot dense plasma, in inertial confinement fusion bead implosion process diagnosis. Such as during implosion, the distortion that pellet promoting layer and fuel interface are generated due to hydrodynamic instability, and due to The asymmetric large scale deformation etc. generated of driving seriously affects implosion efficiency.The experimental observation of fuel interface is to study these The effective way of problem, and interface image can accurately reflect the compression shape of fuel region.By to the compressed of pellet Cheng Jinhang X-ray backlight photography can obtain the when spatial discrimination target ball implosion backlight image with certain precision, to study The symmetry problem of radiation-driven implosion and the process of analysis implosion promoting layer movement, and be compared with Numerical Simulation Program.
Mainly there are pinhole camera, KB microscope, the spherical surface bent crystal or the toroid bent crystal for x-ray imaging element.X-ray needle What the imaging space resolving power of hole camera was mainly determined by pore size.Spatial resolution and imaging efficiency restricting relation each other, So that pinhole camera is only applicable to miniature laser and generates plasma X-ray imaging.The central vision of KB microscope imaging point Distinguish that power determines that non-central visual field resolving power is by spherical aberration and off-axis aberration joint effect by putting spherical aberration on axis;With the increase of visual field, Off-axis aberration increases, and causes the reduction of off-axis point spatial resolution, so that spatial resolution is in " V " with the change curve of visual field Shape.When compared with Gao Nengdian, KB microscope is limited by total external reflection critical angle, and work glancing incidenceθIt is smaller, differentiate the oblique of force curve Rate is larger.The spherical surface bent crystal is due to the shortcomings that with focus characteristics, can overcoming X-ray pinhole camera for x-ray imaging and more The microscopical deficiency of KB is mended, but the imaging resolution capability of the spherical surface bent crystal will mainly consider the spatial discrimination energy determined by astigmatic image error Power, and as Bragg angle reduces, the spherical surface bent crystal increases at the focal plane interval of meridian and sagittal surface, and spatial resolving power is caused to drop It is low, thus the spherical surface bent crystal will face the imaging problem of dtmf distortion DTMF of non-normal incidence astigmatic image error for x-ray imaging.If spherical surface is curved Brilliant x-ray imaging scheme limitation Bragg angle is 830 < θ< 900(near-normal incidence) range and detector are in X-ray light Source nearby uses, and imaging space resolving power can achieve, but the predicament encountered is: detector is easy to spray by laser target shooting Fragment damage out.Secondly, can only almost use lattice constant menu, the lattice constant due to being presently available for analyzing crystal has Limit, thus limited to the application of the spherical surface bent crystal to a certain extent, so that the advantage of its analogy will be lost.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides a kind of double spherical surface bent crystals imaging for zero astigmatic image error System and its adjusting method, the present invention be high-space resolution ability under the conditions of can be used for small Bragg angle, quasi- homogeneous X-ray at Double spherical surface bent crystals of picture, double spherical surface bent crystals of the invention are the improvement to proposing on the basis of the imaging of the single spherical surface bent crystal, effectively Ground eliminates influence of the astigmatic image error to spatial resolution, so that the spherical surface bent crystal almost can all may be used under the conditions of any Bragg angle It is able to achieve the x-ray imaging of high spatial resolution, quasi-monchromaticity.
To achieve the above object of the invention, the invention adopts the following technical scheme:
A kind of double spherical surface bent crystal imaging systems for zero astigmatic image error, the imaging system include fixed bottom plate, five dimension tune Save frame I, the recessed crystalline substance of spherical surface, five times regualting frame II, the convex crystalline substance of spherical surface, two-dimensional adjustment frame I, five times regualting frame III, connecting rod, cuboid glass Block, egative film room, film case, filter disc frame, filter disc, egative film, light barrier, five times regualting frame IV, the recessed crystalline substance of spherical surface are fixed at On five times regualting frame I, the convex crystalline substance of spherical surface is fixed on five times regualting frame II, and cuboid glass blocks is fixed at the adjusting of five dimensions On frame III, one end of connecting rod is fixed on the lower surface of fixed bottom plate, the other end is fixed on five times regualting frame IV, and egative film room is fixed It is arranged on two-dimensional adjustment bracket, the five times regualting frame I, five times regualting frame II, five times regualting frame III are sequentially fixed at fixation On bottom plate;
The central point of the film case is on the extended line of light source center and cuboid glass blocks central point line, the bottom The normal direction of film magazine signal receiving plane is consistent with the convex brilliant foveal reflex light of spherical surface, and the egative film is located in film case, filter disc It is pasted on filter disc frame, the filter disc frame for then pasting filter disc, which is placed in film case to be superimposed together with egative film, forms record system System, record system are inserted into egative film room, and the central point of filter disc and egative film is on the convex brilliant foveal reflex light of spherical surface.
The circle at the recessed brilliant place of the spherical surface and the circle at the convex brilliant place of spherical surface are concentric circles.
The radius of curvature of the recessed crystalline substance of spherical surface is R1, corresponding Bragg angle is θ1, the radius of curvature of the convex crystalline substance of spherical surface is R2, corresponding Bragg angle is θ2, the constraint relationship of the spherical surface recessed brilliant, between the convex crystalline substance of spherical surface radius of curvature and Bragg angle For R1cosθ1=R2cosθ2
45 ° < the θ1< 90 °, 0 ° < θ2 < 45°。
Recessed brilliant, the convex brilliant and film case of spherical surface of the spherical surface is at the ipsilateral of object, the convex brilliant center of the recessed brilliant and spherical surface of the spherical surface The line of line and object and picture intersects vertically.
A kind of adjusting method of double spherical surface bent crystal imaging systems for zero astigmatic image error, which includes laboratory It is offline to adjust and target chamber on-line control.
It includes the following steps that the laboratory is adjusted offline:
The first step establishes laboratory adjustment monitoring system, adjusts fixed bottom plate to level, in fixed bottom plate using level meter Upper placement cuboid glass blocks carries out the foundation of benchmark, is carved with cross groove, the cross groove at cuboid glass blocks center Horizontal groove and the horizontal sides on the surface between it is mutually parallel, Parallel errors be not more than 2 ", the vertical groove of the cross groove Mutually parallel between the vertical edge on the surface, Parallel errors are not more than 2 ", adjust first laser theodolite, the first directional light Autocollimatic in pipe visual field is overlapped the optical axis of first laser theodolite with horizontal groove, the optical axis of the first parallel light tube and vertical groove It is overlapped, establishing by X-axis, first laser theodolite optical axis of the first parallel light tube optical axis is Y-axis, and X-axis, Y-axis intersection point are that coordinate is former Descartes's OXYZ coordinate system of point O;
Auxiliary bead is mounted on five times regualting frame III, is fixed on fixed bottom plate by five times regualting frame III by second step On, using laboratory adjustment monitoring system, the position that bead will be assisted accurately to be placed into coordinate origin O;
Third step, the recessed crystalline substance of the spherical surface is fixed on five times regualting frame I, is fixed on fixed bottom by five times regualting frame I It on plate, is observed using first laser theodolite, by the recessed brilliant center adjustment of the spherical surface until in y-axis, then to assist the bead to be The recessed brilliant center of spherical surface is precisely placed at the position of the recessed brilliant given design of spherical surface by benchmark;
4th step is monitored with first parallel light tube, and on the basis of assisting bead, it is accurate to distinguish in the position of object and picture The second bead and the first bead are placed with substitute and picture, the second bead and the first bead are fixed on two-dimensional adjustment frame II respectively On two-dimensional adjustment frame I, then using the recessed brilliant center position of auxiliary bead and the spherical surface, resettling observation reference line is the The optical axis of dual-laser theodolite, using the power supply of Laboratory X-ray diffractometer, light beam irradiates the recessed crystalline substance of spherical surface by the second bead On, the two-dimensional rotary in the XY axial plane of five times regualting frame I is rotated, so that the recessed brilliant diffraction angle of spherical surface1Meet Bragg condition, and The clear image of the second bead is observed on the position of auxiliary bead, and the second bead image outline center and auxiliary are small Ball center is overlapped, and closes X-ray diffractometer power supply, locks five times regualting frame I;
The convex crystalline substance of the spherical surface is fixed on five times regualting frame II by the 5th step, places the side of the convex brilliant position of spherical surface on the y axis Method is identical as third step, adjusts the posture of the convex crystalline substance of spherical surface and the method for position with the 4th step, is adjusted on the first small ball position The power supply of X-ray diffractometer is closed in the clear image for observing the second bead, locks five times regualting frame II;
6th step removes the auxiliary bead, and auxiliary bead is changed to cuboid glass blocks and fixation, is swashed by first Light theodolite coating process completes visual field autocollimatic using the first parallel light tube, locks five times regualting frame III, completes to be used for zero astigmatism The laboratory of double spherical surface bent crystal imaging systems of aberration is adjusted offline.
The target chamber on-line control includes the following steps:
Step (1), the placement positioning bead at the target position of target chamber, using positioning bead, first flange window center and Second parallel light tube establishes the monitoring reference line of the on-line control of target chamber, to position bead as zero reference, measures image distance position, Third bead is placed on image distance position, is located at third center of pellet on monitoring reference line;
Step (2), connecting rod is fixed on five times regualting frame V, and the five times regualting frame V is fixed on target chamber bottom plate, The cuboid glass blocks center is moved on monitoring reference line, the same step of specific method (1), and passes through the second directional light Pipe completes visual field autocollimatic;
Step (3), using the positioning bead, third bead, the cuboid glass blocks line of centres as benchmark line, using swash Light level meter, by making center, the spherical surface of the recessed crystalline substance of spherical surface with the constant adjusting five times regualting frame V in cuboid glass blocks center The center of convex crystalline substance and the center of positioning bead are in same level;
Step (4), establishes experimental observation benchmark, utilizes positioning bead, the center of second flange window and the recessed crystalline substance of spherical surface Center, the optical axis for establishing third laser transit are to observe benchmark in real time;
Step (5), places light barrier before cuboid glass blocks, makes light barrier center on monitoring reference line;
Step (6), filter disc frame, filter disc, egative film are installed in film case, remove third bead, are changed to egative film room, peace It reloads box, filter disc frame, filter disc, egative film adjust the gradient of film case, so that the normal direction of whole film case signal receiving plane Consistent with the convex brilliant foveal reflex light of spherical surface, the target chamber for completing double spherical surface bent crystal imaging systems for zero astigmatic image error is adjusted online Section.
I-five times regualting frame of five times regualting frame IV includes three-dimensional translating and two-dimensional rotary in the present invention, and three-dimensional translating is realized Translational adjustment, two-dimensional rotary is adjusted for realizing pitch orientation and the left-right rotation of horizontal direction is adjusted, and cuboid glass blocks is Accessory is mainly used for the autocollimatic operation of target chamber on-line control, and the imaging for being not involved in double spherical surface bent crystals, light barrier are for blocking The light direct beam directly issued from light source enters egative film exposure to filter disc, if it is necessary, light-blocking stereotype, Ke Yiping can also be changed to Cover major partRay can guarantee the high s/n ratio of double spherical surface bent crystal images;The normal at the light barrier center and imaging The line that object center is located at is consistent, and range Imaging object is 300 mm, having a size of 200 mm 200 mm。
Compared with prior art, the invention has the benefit that
1. the present invention realizes the imaging of zero astigmatic image error using the recessed brilliant combination of the convex brilliant and spherical surface of a spherical surface, it can be used for height The x-ray imaging of spatial resolution diagnoses;2. the present invention not only improves the high spatial resolution X of small Bragg angle (grazing angle) Radial imaging, and solve the predicament with lattice constant (2d) menu;3. image-forming component of the present invention and picture are all located at light source (object Body) it is ipsilateral, complicated backlight imaging layout facilitation can be made;4. the present invention is simplified by laboratory installation and adjustment and on-line control Field adjustment step improves and adjusts precision, saves adjustment time.
Detailed description of the invention
Fig. 1 is the overall structure diagram of imaging system of the present invention.
Fig. 2 is the structural schematic diagram of adjustment monitoring system during laboratory of the present invention is adjusted offline.
Fig. 3 is the structural schematic diagram that the laboratory of imaging system of the present invention is adjusted offline.
Fig. 4 is the structural schematic diagram of the target chamber on-line control of imaging system of the present invention.
Fig. 5 is record system enlarged diagram in the present invention.
Fig. 6 is the left view of Fig. 5.
In figure: 1, light source (i.e. object), 2, fixed bottom plate, 3, five times regualting frame I, 4, the recessed crystalline substance of spherical surface, 5, five times regualting frame II, 6, the convex crystalline substance of spherical surface, 7, two-dimensional adjustment frame I, the 8, first bead, 9, five times regualting frame III, 10, auxiliary bead, 11, two-dimensional adjustment Frame II, 12, the second bead, 13, connecting rod, the 14, first parallel light tube, 15, second laser theodolite, 16, first laser theodolite, 17, cuboid glass blocks, 18, third bead, 19, positioning bead, 20, five times regualting frame V, 21, the second parallel light tube, 22, the Three laser transits, 23, egative film room, 24, film case, 25, filter disc frame, 25-1, filter disc, 25-2, egative film, 26, light barrier, 27, Five times regualting frame IV, 28, target chamber, 29, first flange window, 30, second flange window.
Specific embodiment
It is used for double spherical surface bent crystal imaging systems of zero astigmatic image error to the present invention with specific embodiment with reference to the accompanying drawing And its adjusting method further describes in detail, in the hope of providing a clearer understanding of its structure composition and application mode, But it should not be limited the scope of the invention with this.
Embodiment 1
As shown in Figs. 1-5, the present embodiment is used for double spherical surface bent crystal imaging systems of zero astigmatic image error, which includes Fixed bottom plate 2, five times regualting frame I 3, spherical surface be recessed brilliant 4, five times regualting frame II 5, spherical surface are convex brilliant 6, the dimension of two-dimensional adjustment frame I 7, five is adjusted Save frame III 9, connecting rod 13, cuboid glass blocks 17, egative film room 23, film case 24, filter disc frame 25, filter disc 25-1, egative film 25-2, gear Tabula rasa 26, five times regualting frame IV 27, the spherical surface recessed brilliant 4 are fixed on five times regualting frame I 3, convex brilliant 6 fixed setting of spherical surface On five times regualting frame II 5, cuboid glass blocks 17 is fixed on five times regualting frame III 9, and one end of connecting rod 13 is fixed on The lower surface of fixed bottom plate 2, the other end are fixed on five times regualting frame IV 27, and egative film room 23 is fixed at two-dimensional adjustment bracket On 7, the five times regualting frame I 3, five times regualting frame II 5, five times regualting frame III 9 are sequentially fixed on fixed bottom plate 2;
The central point of the film case 24 on the extended line of 17 central point line of 1 center of light source and cuboid glass blocks, The normal direction of the 24 signal receiving plane of film case is consistent with the convex brilliant 6 foveal reflex light of spherical surface, and the egative film 25-2 is located at In film case 24, filter disc 25-1 is pasted on filter disc frame 25, and the filter disc frame for then pasting filter disc is placed in film case 24 and bottom Piece 25-2, which is superimposed together, forms record system, and record system is inserted into egative film room 23, and filter disc 25-1 and egative film 25-2 Central point is on the convex brilliant foveal reflex light of spherical surface.
Preferably, the circle at convex brilliant 6 place of circle and spherical surface in the present embodiment where spherical surface recessed brilliant 4 is concentric circles;Spherical surface Recessed brilliant 4 radius of curvature R1=563.35 mm, corresponding Bragg angle θ1 = 68.43°, convex brilliant 6 curvature of spherical surface half Diameter R2 =250mm, corresponding Bragg angle θ2 = 34.07°, recessed brilliant, between the convex crystalline substance of spherical surface the radius of curvature of the spherical surface and cloth The constraint relationship at glug angle is R1cosθ1=R2cosθ2, the clear aperature is having a size of 40 mm30 mm。
As further preferred, spherical surface described in the present embodiment is recessed brilliant 4, spherical surface convex brilliant 6 and film case 24 are in the ipsilateral of object, The line of the recessed brilliant and spherical surface of the spherical surface convex brilliant line of centres and object and picture intersects vertically.
A kind of adjusting method of double spherical surface bent crystal imaging systems for zero astigmatic image error of the present embodiment, the adjusting method packet Laboratory is included to adjust offline and target chamber on-line control;It includes the following steps that laboratory is adjusted offline:
The first step establishes laboratory adjustment monitoring system, adjusts fixed bottom plate to level, in fixed bottom plate using level meter Upper placement cuboid glass blocks carries out the foundation of benchmark, is carved with cross groove, the cross groove at cuboid glass blocks center Horizontal groove and the horizontal sides on the surface between it is mutually parallel, Parallel errors be not more than 2 ", the vertical groove of the cross groove Mutually parallel between the vertical edge on the surface, Parallel errors are not more than 2 ", it is parallel to adjust first laser theodolite 16, first Autocollimatic in 14 visual field of light pipe, is overlapped the optical axis of first laser theodolite with horizontal groove, the optical axis of the first parallel light tube and vertical Groove is overlapped, and establishing by X-axis, first laser theodolite optical axis of the first parallel light tube optical axis is Y-axis, and X-axis, Y-axis intersection point are to sit Mark Descartes's OXYZ coordinate system of origin O;
Auxiliary bead 10 is mounted on five times regualting frame III 9, is fixed on fixation by five times regualting frame III 9 by second step On bottom plate 2, using laboratory adjustment monitoring system, the position that bead 10 will be assisted accurately to be placed into coordinate origin O;
The spherical surface recessed brilliant 4 is fixed on five times regualting frame I 3, is fixed on fixation by five times regualting frame I by third step It on bottom plate 2, is observed using first laser theodolite 16, by the recessed brilliant 4 center adjustment of the spherical surface until in y-axis, then with auxiliary On the basis of bead 10, recessed brilliant 4 center of spherical surface is precisely placed at the position of given design (i.e. origin to the recessed brilliant central point of spherical surface Distance);
4th step is monitored with first parallel light tube 14, on the basis of assisting bead 10, is distinguished in the position of object and picture Second bead 12 and the first bead 8 are fixed on two respectively with substitute and picture by accurate the second bead 12 and the first bead 8 placed It ties up on adjusting bracket II 11 and two-dimensional adjustment frame I 7, then using auxiliary bead 10 and recessed brilliant 4 center position of the spherical surface, then builds Vertical observation reference line is the optical axis of second laser theodolite 15, and using the power supply of Laboratory X-ray diffractometer, light beam passes through the Two beads 12 irradiate on spherical surface recessed brilliant 4, rotate the two-dimensional rotary in the XY axial plane of five times regualting frame I 3, so that the recessed brilliant diffraction of spherical surface Angle θ1Meet Bragg condition, and observes the clear image of the second bead 12 on the position of auxiliary bead 10, and the Two beads, 12 image outline center is overlapped with auxiliary 10 center of bead, closes X-ray diffractometer power supply, locks five times regualting frame I 3;
The spherical surface convex brilliant 6 is fixed on five times regualting frame II 5 by the 5th step, places the convex brilliant position of spherical surface on the y axis Method is identical as third step, adjusts the posture of the convex crystalline substance of spherical surface and the method for position with the 4th step, is adjusted in 8 position of the first bead On observe the clear image of the second bead 12, close the power supply of X-ray diffractometer, lock five times regualting frame II 5;
6th step removes the auxiliary bead 10, and auxiliary bead is changed to cuboid glass blocks 17 and fixed, by the One laser transit, 16 coating process completes visual field autocollimatic using the first parallel light tube 14, locks five times regualting frame III 9, completes The laboratory of double spherical surface bent crystal imaging systems for zero astigmatic image error is adjusted offline.
Target chamber on-line control includes the following steps:
Step (1), the placement positioning bead 19 at the target position of target chamber 28 utilize positioning bead 19, first flange window 29 Center and the second parallel light tube 21 establish target chamber on-line control monitoring reference line, to position bead 19 as zero reference, amount Capture places third bead 18 away from position on image distance position, is located at 18 center of third bead on monitoring reference line;
Step (2), connecting rod 13 is fixed on five times regualting frame V 20, and the five times regualting frame V 20 is fixed on target chamber bottom On plate, 17 center of cuboid glass blocks is moved on monitoring reference line, the same step of specific method (1), and pass through the Two parallel light tubes 21 complete visual field autocollimatic;
Step (3), using the positioning bead 19, third bead 18,17 line of centres of cuboid glass blocks as benchmark line, Using laser leveler, by making spherical surface recessed brilliant 4 with the constant adjusting five times regualting frame V 20 in 17 center of cuboid glass blocks Center, convex brilliant 6 center of spherical surface and position bead 19 center in same level;
Step (4), establishes experimental observation benchmark, recessed using positioning bead 19, the center of second flange window 30 and spherical surface The center of crystalline substance 4, the optical axis for establishing third laser transit 22 are to observe benchmark in real time;
Step (5) places light barrier 26 before cuboid glass blocks 17, makes 26 center of light barrier on monitoring reference line;
Step (6), filter disc frame, filter disc, egative film are installed in film case, remove third bead 18, are changed to egative film room 23, film case 24 is installed, filter disc frame 25, filter disc 25-1, egative film 25-2 adjust the gradient of film case 24, so that whole film case The normal direction of 24 signal receiving planes is consistent with convex brilliant 6 reflection light of spherical surface, completes the double spherical surface bent crystals for being used for zero astigmatic image error The target chamber on-line control of imaging system.
Embodiment 2
The recessed brilliant radius of curvature R of spherical surface in this implementation1=628.9mm, corresponding Bragg angle θ1= 71.7°;Spherical surface is convex brilliant bent Rate radius R2=250mm, corresponding Bragg angle θ2=37.8°;The clear aperature is having a size of 40mm30mm.Remaining technology Scheme is the same as embodiment 1.

Claims (8)

1. a kind of double spherical surface bent crystal imaging systems for zero astigmatic image error, which is characterized in that the imaging system includes fixed bottom Plate (2), five times regualting frame I (3), spherical surface recessed brilliant (4), five times regualting frame II (5), spherical surface convex brilliant (6), two-dimensional adjustment frame I (7), Five times regualting frame III (9), connecting rod (13), cuboid glass blocks (17), egative film room (23), film case (24), filter disc frame (25), filter Piece (25-1), egative film (25-2), light barrier (26), five times regualting frame IV (27), the spherical surface recessed brilliant (4) are fixed at five dimensions On adjusting bracket I (3), spherical surface convex brilliant (6) is fixed on five times regualting frame II (5), cuboid glass blocks (17) fixed setting On five times regualting frame III (9), one end of connecting rod (13) is fixed on the lower surface of fixed bottom plate (2), the other end is fixed on five dimensions On adjusting bracket IV (27), egative film room (23) are fixed on two-dimensional adjustment bracket (7), the five times regualting frame I (3), five dimensions Adjusting bracket II (5), five times regualting frame III (9) are sequentially fixed on fixed bottom plate (2);
Extended line of the central point of the film case (24) at light source (1) center and cuboid glass blocks (17) central point line On, the normal direction of film case (24) the signal receiving plane is consistent with convex brilliant (6) reflection light of spherical surface, the egative film (25-2) In film case (24), filter disc (25-1) is pasted on filter disc frame (25), and the filter disc frame for then pasting filter disc is placed in egative film It is superimposed together in box (24) with egative film (25-2) and forms record system, record system is inserted into egative film room (23), and filter disc The central point of (25-1) and egative film (25-2) is on the convex brilliant foveal reflex light of spherical surface.
2. the double spherical surface bent crystal imaging systems according to claim 1 for being used for zero astigmatic image error, which is characterized in that the ball The circle where circle and spherical surface convex brilliant (6) where face recessed brilliant (4) is concentric circles.
3. the double spherical surface bent crystal imaging systems according to claim 1 for being used for zero astigmatic image error, which is characterized in that the ball The radius of curvature in face recessed brilliant (4) is R1, corresponding Bragg angle is θ1, the radius of curvature of the spherical surface convex brilliant (6) is R2, accordingly Bragg angle be θ2, the constraint relationship of recessed brilliant, between the convex crystalline substance of spherical surface the radius of curvature of the spherical surface and Bragg angle is R1cos θ1=R2cosθ2
4. the double spherical surface bent crystal imaging systems according to claim 3 for being used for zero astigmatic image error, which is characterized in that the phase The value range for the Bragg angle answered is 45 ° < θ1< 90 °, 0 ° < θ2 < 45°。
5. the double spherical surface bent crystal imaging systems according to claim 1 to 4 for being used for zero astigmatic image error, which is characterized in that The spherical surface recessed brilliant (4), spherical surface convex brilliant (6) and film case (24) are in the ipsilateral of object, the convex crystalline substance of the recessed brilliant and spherical surface of the spherical surface Heart line and the line of object and picture intersect vertically.
6. the adjusting method described in a kind of claim 5 for double spherical surface bent crystal imaging systems of zero astigmatic image error, feature It is, which includes that laboratory is adjusted and target chamber on-line control offline.
7. the adjusting method of the double spherical surface bent crystal imaging systems according to claim 6 for being used for zero astigmatic image error, feature It is, it includes the following steps that the laboratory is adjusted offline:
The first step establishes laboratory adjustment monitoring system, adjusts fixed bottom plate to level using level meter, pacifies on fixed bottom plate The cube that lengthens glass blocks carries out the foundation of benchmark, is carved with cross groove, the cross of the cross groove at cuboid glass blocks center It is mutually parallel between groove and the horizontal sides on the surface, Parallel errors be not more than 2 ", the vertical groove of the cross groove with should Mutually parallel between the vertical edge on surface, Parallel errors are not more than 2 ", adjust first laser theodolite (16), the first directional light Manage (14) visual field in autocollimatic, is overlapped the optical axis of first laser theodolite with horizontal groove, the optical axis of the first parallel light tube with indulge Groove is overlapped, and establishing by X-axis, first laser theodolite optical axis of the first parallel light tube optical axis is Y-axis, and X-axis, Y-axis intersection point are to sit Mark Descartes's OXYZ coordinate system of origin O;
Auxiliary bead (10) is mounted on five times regualting frame III (9) by second step, is fixed on by five times regualting frame III (9) solid Determine on bottom plate (2), using laboratory adjustment monitoring system, the position that bead (10) will be assisted accurately to be placed into coordinate origin O;
The spherical surface recessed brilliant (4) is fixed on five times regualting frame I (3), is fixed on fixation by five times regualting frame I by third step It on bottom plate (2), is observed using first laser theodolite (16), by recessed brilliant (4) the center adjustment of the spherical surface until in y-axis, then On the basis of assisting bead (10), recessed brilliant (4) center of spherical surface is precisely placed at the position of the recessed brilliant given design of spherical surface;
4th step is monitored with first parallel light tube (14), on the basis of assisting bead (10), is distinguished in the position of object and picture Accurate the second bead (12) and the first bead (8) of placing are with substitute and picture, respectively by the second bead (12) and the first bead (8) It is fixed on two-dimensional adjustment frame II (11) and two-dimensional adjustment frame I (7), then utilizes auxiliary bead (10) and the recessed crystalline substance of the spherical surface (4) center position is resettled the optical axis that observation reference line is second laser theodolite (15), is spread out using Laboratory X-ray The power supply of instrument is penetrated, light beam is irradiated on spherical surface recessed brilliant (4) by the second bead (12), in the XY axial plane for rotating five times regualting frame I (3) Two-dimensional rotary so that the recessed brilliant diffraction angle of spherical surface1Meet Bragg condition, and is observed on the position of auxiliary bead (10) There is the clear image of the second bead (12), and the second bead (12) image outline center is overlapped with auxiliary bead (10) center, X-ray diffractometer power supply is closed, is locked five times regualting frame I (3);
The spherical surface convex brilliant (6) is fixed on five times regualting frame II (5) by the 5th step, places the convex brilliant position of spherical surface on the y axis Method is identical as third step, adjusts the posture of the convex crystalline substance of spherical surface and the method for position with the 4th step, is adjusted in the first bead (8) position The clear image for observing the second bead (12) is set, the power supply of X-ray diffractometer is closed, locks five times regualting frame II (5);
6th step removes the auxiliary bead (10), and auxiliary bead is changed to cuboid glass blocks (17) and fixed, by the One laser transit (16) coating process completes visual field autocollimatic using the first parallel light tube (14), locks five times regualting frame III (9), the laboratory for completing double spherical surface bent crystal imaging systems for zero astigmatic image error is adjusted offline.
8. the adjusting method of the double spherical surface bent crystal imaging systems according to claim 6 for being used for zero astigmatic image error, feature It is, the target chamber on-line control includes the following steps:
Step (1), placement positioning bead (19) at the target position of target chamber (28) utilize positioning bead (19), first flange window (29) the monitoring reference line of the on-line control of target chamber is established at center and the second parallel light tube (21), is zero to position bead (19) Benchmark measures image distance position, places third bead (18) on image distance position, and third bead (18) center is made to be located at monitoring benchmark On line;
Connecting rod (13) is fixed on five times regualting frame V (20) by step (2), and the five times regualting frame V (20) is fixed on target chamber On bottom plate, described cuboid glass blocks (17) center is moved on monitoring reference line, the same step of specific method (1), and lead to It crosses the second parallel light tube (21) and completes visual field autocollimatic;
Step (3), on the basis of the positioning bead (19), third bead (18), cuboid glass blocks (17) line of centres Line, using laser leveler, by making ball with the constant adjusting five times regualting frame V (20) in cuboid glass blocks (17) center The center at the center in face recessed brilliant (4), the center of spherical surface convex brilliant (6) and positioning bead (19) is in same level;
Step (4), establishes experimental observation benchmark, recessed using positioning bead (19), the center of second flange window (30) and spherical surface The center of brilliant (4), the optical axis for establishing third laser transit (22) are to observe benchmark in real time;
Step (5) places light barrier (26) before cuboid glass blocks (17), makes light barrier (26) center in monitoring reference line On;
Step (6), filter disc frame, filter disc, egative film are installed in film case, are removed third bead (18), are changed to egative film room (23), film case (24) are installed, filter disc frame (25), filter disc (25-1), egative film (25-2) adjust the gradient of film case (24), So that the normal direction of whole film case (24) signal receiving plane is consistent with convex brilliant (6) the foveal reflex light of spherical surface, complete to be used for zero The target chamber on-line control of double spherical surface bent crystal imaging systems of astigmatic image error.
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