CN107807454A - A kind of realization device and implementation method of the quasi- Gauss collimated laser beam of Terahertz - Google Patents
A kind of realization device and implementation method of the quasi- Gauss collimated laser beam of Terahertz Download PDFInfo
- Publication number
- CN107807454A CN107807454A CN201711262291.1A CN201711262291A CN107807454A CN 107807454 A CN107807454 A CN 107807454A CN 201711262291 A CN201711262291 A CN 201711262291A CN 107807454 A CN107807454 A CN 107807454A
- Authority
- CN
- China
- Prior art keywords
- terahertz
- quasi
- laser beam
- laser
- gauss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000001105 regulatory effect Effects 0.000 claims abstract description 25
- 230000010354 integration Effects 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 238000010622 cold drawing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lasers (AREA)
Abstract
The present invention relates to a kind of realization device of the quasi- Gauss collimated laser beam of Terahertz, including Terahertz quantum cascaded laser to be connected with driving power and send Terahertz divergencing laser；The regulating system being movably mounted on cryogenic sample frame；The off-axis parabolic mirror being installed in regulating system, it is collected Terahertz divergencing laser and exports the quasi-parallel laser beam of Terahertz；The moveable aperture-variable diaphragm being arranged at outside cooled cryostat, it carries out light beam to the quasi-parallel laser beam of Terahertz preferably to form the quasi- Gauss collimated laser beam of Terahertz；And the moveable Terahertz detector array outside cooled cryostat is arranged at, its two-dimentional Energy distribution to the quasi-parallel laser beam of Terahertz is characterized and calibrates the collimation of the quasi-parallel laser beam of Terahertz.The invention further relates to a kind of implementation method of the quasi- Gauss collimated laser beam of Terahertz.The realization device and implementation method of the present invention can obtain the quasi- Gauss collimated laser beam of Terahertz reliable and stable, that beam quality is excellent.
Description
Technical field
The present invention relates to Terahertz applied technical field, relates more specifically to a kind of quasi- Gauss collimated laser beam of Terahertz
Realization device and implementation method.
Background technology
Terahertz (THz) lasing light emitter is the important radiation source of THz technical fields, the THz amounts based on semiconductor low-dimensional materials
Qc laser (THz QCL) is a kind of very important lasing light emitter of THz frequency ranges, and it has energy conversion efficiency height, volume
The features such as small, stable performance, long service life.Because size of the laser ridges in thickness direction is less than optical maser wavelength, THz
The laser of QCL end faces transmitting shows the characteristic of diverging, and laser beam quality is poor.In order to improve the shoot laser matter of laser
Amount, the methods of existing method generally use surface grating technique, end face grating technique, hemispherical high resistant silicon lens.However, it is
Realize surface grating technique, the Current Voltage working characteristics of device can be influenced to different extents, although laser beam quality
It is improved, but above-mentioned technique manufacturing process can cause the decline of device power performance；The implementation process of end face grating technique
Difficulty is had much, and yield prepared by device technology can not be ensured well；In addition, held using hemispherical high resistant silicon lens
The mode of face coupling is widely used, but this method can be because absorption of the high resistant silicon lens to THz laser to couple
The effective laser power exported afterwards reduces, and output beam still has certain diversity, is not quasi parallel beams.
The content of the invention
In order to solve the above-mentioned problems of the prior art, the present invention is intended to provide a kind of quasi- Gauss parallel laser of Terahertz
The realization device and implementation method of beam.
The present invention provides a kind of realization device of the quasi- Gauss collimated laser beam of Terahertz, including：For providing vacuum and low
The cooled cryostat of warm environment；The driving power being arranged at outside cooled cryostat；The cryogenic sample frame being arranged inside cooled cryostat；
The Terahertz quantum cascaded laser being fixed on the cryogenic sample frame, the Terahertz quantum cascaded laser and institute
Driving power is stated to connect and send Terahertz divergencing laser；The regulating system being movably mounted on the cryogenic sample frame；
The off-axis parabolic mirror being installed in regulating system, it collects described Terahertz divergencing laser and to export Terahertz quasi-parallel
Laser beam；The moveable aperture-variable diaphragm being arranged at outside cooled cryostat, it enters to the quasi-parallel laser beam of the Terahertz
Row light beam is preferably to form the quasi- Gauss collimated laser beam of Terahertz；And it is arranged at the moveable Terahertz outside cooled cryostat
Detector array, its two-dimentional Energy distribution to the quasi-parallel laser beam of the Terahertz are characterized and calibrate the Terahertz standard
The collimation of collimated laser beam.
The regulating system includes fixed mount and vacuumizing bar, and the vacuumizing bar is connected with the fixed mount to drive
The fixed mount is moved to may move in two mutually orthogonal directions.
Vacuum sealing interface is provided with the cooled cryostat, two action bars stretch into low temperature by the vacuum sealing interface
The inside of Dewar is to form the vacuumizing bar.
Vacuum electrical interface is provided with the cooled cryostat, the Terahertz quantum cascaded laser passes through the vacuum
Electrical interface is connected with the driving power.
Vacuum window is provided with the cooled cryostat, the quasi-parallel laser beam of Terahertz is penetrated by the vacuum window
Go out.
The mirror body diameter and effective focal length of the off-axis parabolic mirror are less than 3cm, and effective focal length and mirror body diameter
Ratio be less than 1.Preferably, a diameter of 12.7mm of the mirror body of the off-axis parabolic mirror, effective focal length 6.8mm, has
The ratio for imitating focal length and mirror body diameter is 0.535.In the prior art, the diameter of off-axis parabolic mirror and focal length generally exist
More than 7cm, because laser works are inside cooling device, laser end face can not be too near from vacuum window, causes outside to be adopted
The focal length and mirror body diameter ratio of off-axis parabolic mirror can only select large scale speculum generally more than 1.And
The application can integrate, from laser using very small customization off-axis parabolic mirror with device example frame
Device end face can be with close, and focal length and the selection of mirror body diameter ratio can effectively improve the collection effect of laser between 0.5-0.8
Rate.
The realization device of the quasi- Gauss collimated laser beam of Terahertz of the present invention is anti-by built-in small-sized off axis paraboloid mirror
Coupling device of the mirror as Terahertz quantum cascaded laser output laser is penetrated, it is parallel sharp not only effectively to reduce the quasi- Gauss of Terahertz
The volume of beam generated device, and the high reflection using off-axis parabolic mirror surface to Terahertz quantum cascaded laser
Rate effectively reduces the loss in coupling process to laser power, it is clear that this built-in fixed mount and off-axis parabolic mirror
The mode being combined has the advantages that small, registration is lost in collection efficiency height, reflected energy.In addition, using Terahertz array
Detector carries out the collimation calibration of laser beam, and it is preferred to carry out light beam with aperture-variable diaphragm, have effectively achieved the quasi- height of Terahertz
This collimated laser beam, caused thz laser beam have the advantages that the depth of parallelism is high, Gaussian Profile form is obvious, can be terahertz
Hereby detect, imaging and communications applications provide a kind of lasing light emitter reliable and stable, beam quality is excellent.Preferably, the present invention passes through
Vacuumizing bar realizes the accurate movement of laser coupled device under vacuum environment.
The present invention also provides a kind of implementation method of the quasi- Gauss collimated laser beam of Terahertz, including step：S1, by Terahertz
QCL, off-axis parabolic mirror and regulating system integrated installation are integrated to form one on cryogenic sample frame
Part so that the outgoing end face of the Terahertz quantum cascaded laser is in same with the focus of the off-axis parabolic mirror
In plane；S2, the integration member is calibrated by the regulating system so that the Terahertz quantum cascaded laser
Outgoing end face overlaps with the focus of the off-axis parabolic mirror；S3, the integration member after calibration is installed on cooled cryostat
Inside, vacuum and low temperature environment are provided by the cooled cryostat, the Terahertz quantum cascaded laser is given by driving power
Device applies electric current, the Terahertz quantum cascaded laser is exported Terahertz diverging under the vacuum and low temperature environment and swashs
Light, the Terahertz divergencing laser export Terahertz collimated laser beam after off-axis parabolic mirror reflection；S4, move
The Terahertz detector array is moved, adjusts the regulating system so that is moved along the center of Terahertz collimated laser beam described
After Terahertz detector array certain distance, the hot spot of Terahertz collimated laser beam is always held at the Terahertz array detection
The center of the sensitive area of device, to obtain the quasi-parallel laser beam of Terahertz；S5, aperture-variable diaphragm is arranged at the terahertz
The hereby upstream of detector array and the mobile aperture-variable diaphragm so that go out on the sensitive area of the Terahertz detector array
Now it is evenly distributed and there is the laser facula of Gaussian distribution feature, obtains the quasi- Gauss collimated laser beam of Terahertz.
The step S1 includes：The Terahertz quantum cascaded laser is fixed on the cryogenic sample frame,
The off-axis parabolic mirror is installed in the regulating system and is movably mounted at the regulating system described
To form the integration member on cryogenic sample frame.
The step S2 is specially：Wavelength is used as optical path axis of the 670nm feux rouges along the off-axis parabolic mirror
To irradiation minute surface, the visible light spot that the off-axis parabolic mirror is assembled is moved to institute by adjusting the regulating system
State on the outgoing end face of Terahertz quantum cascaded laser.
The present invention is by the way that the outgoing end face of the focus of off-axis parabolic mirror and Terahertz quantum cascaded laser is set
It is placed in same plane, recycles regulating system that the focus of off-axis parabolic mirror is moved into Terahertz quantum cascaded laser
The outgoing end of device so that off-axis parabolic mirror is collected the Terahertz diverging that Terahertz quantum cascaded laser is sent and swashed
Light.Terahertz collimated laser beam is formed after off-axis parabolic mirror reflects, through Terahertz detector array collimation
It may be such that off-axis parabolic mirror exports the quasi-parallel laser beam of Terahertz afterwards.Using aperture-variable diaphragm to the Terahertz
Quasi-parallel laser beam is carried out preferably to obtain the quasi- Gauss collimated laser beam of Terahertz.
Brief description of the drawings
Fig. 1 is showing for the realization device of the quasi- Gauss collimated laser beam of Terahertz according to a preferred embodiment of the present invention
It is intended to；
Fig. 2A-Fig. 2 B are the two-dimensional intensities point of the quasi- Gauss collimated laser beam of the Terahertz realized according to an embodiment of the invention
Butut；
Fig. 3 is the full width at half maximum of the quasi- Gauss collimated laser beam of the Terahertz realized according to an embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawings, presently preferred embodiments of the present invention is provided, and is described in detail.
Fig. 1 shows the realization dress of the quasi- Gauss collimated laser beam of Terahertz according to a preferred embodiment of the present invention
Put, including：Driving power 1, vacuum electrical interface 2, Terahertz quantum cascaded laser 3, cryogenic sample frame 4, cooled cryostat 5,
Regulating system 6, off-axis parabolic mirror 7, aperture-variable diaphragm 8 and Terahertz detector array 9.
On the one hand, the Terahertz quantum cascaded laser 3 is connected by vacuum electrical interface 2 with the driving power 1
Connect, suitable for giving off thz laser under the driving electric signal of the driving power 1.
On the other hand, the Terahertz quantum cascaded laser 3 is arranged on the cooled cryostat 5 by cryogenic sample frame 4
Inside cooled cryostat 5 cold drawing on so that the cooled cryostat 5 is suitable for the Terahertz quantum cascaded laser 3 and carried
For low temperature environment.The cryogenic sample frame 4 works the Terahertz quantum cascaded laser 3 caused heat progress in time
Dissipate, make the stable thz laser of the output of Terahertz quantum cascaded laser 3.
The regulating system 6 includes mounting bracket 61 and vacuumizing bar 62, wherein, the mounting bracket 61 is fixed on low temperature sample
On product frame 4, the vacuumizing bar 62 includes the dimension of two mutually perpendicular directions, is consolidated using mobilizable bonding in vacuum mode
Due on the outer cover of cooled cryostat 5, to realize the accurate two-dimensional movement of mounting bracket 61 under the promotion of the vacuumizing bar 62,
So that the focus 10 of off-axis parabolic mirror 7 overlaps with the outgoing end face of Terahertz quantum cascaded laser 3.Wherein, institute
State off-axis parabolic mirror 7 and be installed on mounting bracket 61, the terahertz sent suitable for collecting the Terahertz quantum cascaded laser 3
Hereby divergencing laser, and under the cooperation of vacuumizing bar 62, divergencing laser is collected into back reflection output and swashed for Terahertz is quasi-parallel
Light beam 11.The vacuum window 12 of the quasi-parallel laser beam 11 of Terahertz through the side of cooled cryostat 5 exports.
The quasi-parallel laser beam 11 of Terahertz that the aperture-variable diaphragm 8 is applied to export vacuum window 12 carries out light beam
It is preferred that preferably go out to be distributed well-balanced outgoing beam, i.e. the quasi- Gauss collimated laser beam 13 of Terahertz.
The two-dimentional Energy distribution that the Terahertz detector array 9 is applied to the quasi-parallel laser beam 11 of Terahertz carries out table
Sign, while suitable for determining the parallel degree of the quasi-parallel laser beam 11 of Terahertz, calibrated with the collimation to laser beam.
In the present embodiment, the Terahertz quantum cascaded laser 3 is end face emitting structural, and the Terahertz given off swashs
Light is diversity laser.Specifically, the Terahertz quantum cascaded laser 3 is the end face emitter junction of one-sided metallic waveguiding structure
Structure device, the laser of device end face output is diversity thz laser.
In the present embodiment, the lasing frequency of the Terahertz quantum cascaded laser 3 is 4.3THz.It is in fact, described
The lasing frequency of Terahertz quantum cascaded laser 3 can be 2THz~5THz.
In the present embodiment, the driving power 1 is pulse current source, and the driving power 1 drives the Terahertz amount
When qc laser 3 works, pulse width of the actual loaded on the Terahertz quantum cascaded laser 3 is 2 μ s, is repeated
Frequency is 20kHz, current amplitude 4.7A.
In the present embodiment, the vacuum electrical interface 2 is SMA standard interfaces.
In the present embodiment, the cryogenic sample frame 4 is the gold-plated heat conduction specimen holder of oxygen-free copper.
In the present embodiment, the cooled cryostat 5 is Dewar container for liquefied nitrogen, and achievable operating temperature is 77K.Specifically, institute
The volume for stating cooled cryostat 5 is 1.2 liters, and the single sustainable working time is 20 hours.
In the present embodiment, the precision of the two-dimensional movement of the mounting bracket 61 is 0.02mm.The vacuumizing bar 62 by
It is made up of the action bars of the vacuum sealing interface of cooled cryostat 5.
In the present embodiment, the off-axis parabolic mirror 7 is 90 degree of off-axis gold-plated speculums.Specifically, it is described from
Mirror body a diameter of 12.7mm, the effective focal length 6.8mm of axle parabolic mirror 7, effective focal length and the ratio of mirror body diameter are
0.535.In fact, the ratio of the effective focal length and mirror body diameter can be between 0.5~0.8.
In the present embodiment, the quasi-parallel light that the vacuum window 12 is applied to reflect off-axis parabolic mirror 7 is defeated
Go out to Dewar.Specifically, the vacuum window 12 is prepared using high-density polyethylene material, thickness 2mm, in Terahertz
Frequency range has higher transmitance.
In the present embodiment, the clear aperature of the aperture-variable diaphragm 8 is adjusted to 3mm.
In the present embodiment, the pixel element of the Terahertz detector array 9 is 320 × 240, and the size of single pixel is
23.5 μm, the two-dimensional of sensitive area is 5.64mm × 7.52mm, and look-in frequency scope is 1-7THz.
In the present invention, the realization device by can small-sized off-axis parabolic mirror 7 built in two-dimensional adjustment be formed as too
The coupling device of the hertz end face shoot laser of QCL 3, the coupling power output of laser is effectively increased, and in fact
Quasi-parallel laser beam is showed.In addition, the features of shape in the aperture using aperture-variable diaphragm 8, to quasi-parallel outgoing laser beam 11
Preferably, efficiently obtained the Gaussian laser beam of Terahertz frequency range, considerably increase diversity thz laser device
Application advantage, stable performance, the excellent lasing light emitter of beam quality are provided for Terahertz application system.
The present invention also provides a kind of realization device using the above-mentioned quasi- Gauss collimated laser beam of Terahertz and realizes Terahertz
The implementation method of quasi- Gauss collimated laser beam, including step：
1) mounting bracket 61 is slidably mounted on cryogenic sample frame 4, Terahertz quantum cascaded laser 3 is installed on
On cryogenic sample frame 4, off-axis parabolic mirror 7 is installed on mounting bracket 61 so that Terahertz quantum cascaded laser 3 goes out
Penetrate end face and the focus 10 of off-axis parabolic mirror 7 is in same plane；
2) light path that wavelength is 670nm feux rouges along off-axis parabolic mirror 7 axially irradiation minute surface is used, passes through regulation
Vacuumizing bar 62 in regulating system 6, the visible light spot that off-axis parabolic mirror 7 is assembled is moved to Terahertz quantum
On the outgoing end face of cascaded laser 3；
3) regulating system 6, off-axis parabolic mirror 7, cryogenic sample frame 4 and mounted terahertz after feux rouges is calibrated
Hereby QCL 3 as an integral installation on the cold drawing of cooled cryostat 5, wherein, cooled cryostat 5 is cold using liquid nitrogen
But, operating temperature 77K；
4) 4.7A electricity is applied to Terahertz quantum cascaded laser 3 by vacuum electrical interface 2 using driving power 1
Stream, Terahertz quantum cascaded laser 3 is set to export stable and Terahertz divergencing laser under the 77K environment that cooled cryostat 5 provides,
Laser frequency is 4.3THz；
5) the Terahertz divergencing laser of output becomes Terahertz after built-in integrated off-axis parabolic mirror 7 reflects
Collimated laser beam, and it is transferred to by vacuum window 12 outside of cooled cryostat 5；
6) being placed at a certain distance from vacuum window 12 is outer can be along the Terahertz moved with vacuum window plane vertical direction
Detector array 9, and make its sensitive area and vacuum window plane keeping parallelism, the level of mobile Terahertz detector array 9 and
Upright position, makes the sensitive area of the most strong area illumination Terahertz detector array 9 of Terahertz parallel laser beam energy, and by institute
The center for stating sensitive area is moved to the most strong position of beam energy distribution；
7) Terahertz detector array 9 is moved along the direction vertical with vacuum window plane, observes Terahertz array detection
Beam energy is distributed the change in location in most strong region on the sensitive area of device 9, and thus judges the skew side of Terahertz collimated laser beam
To；
8) vacuumizing bar 62 is adjusted, makes the most strong region of outgoing beam Energy distribution and Terahertz detector array 9 quick
The center in sense face overlaps；
9) repeat step S7 and S8, until after moving the certain distance of Terahertz detector array 9 along optical axis center, Terahertz
Laser facula is always held at the center of the sensitive area of Terahertz detector array 9, Terahertz collimated laser beam quilt now
It is corrected to the quasi-parallel laser beam 11 of Terahertz；
10) it is d aperture-variable diaphragm 8 to be positioned over apart from vacuum window 120=100mm position, diaphragm are centrally located at
Near beam center axle, clear aperature is arranged to 3mm, diaphragm is moved along horizontally and vertically direction, until Terahertz array detection
Occur being evenly distributed on the sensitive area of device 9 and with Gaussian distribution feature laser facula；
11) it is d Terahertz detector array 9 to be positioned over into distance variable aperture diaphragm 81=130mm position, is measured
To through aperture-variable diaphragm 8 preferably after the quasi- Gauss collimated laser beam 13 of Terahertz two-dimentional Energy distribution as shown in Figure 2 A, edge
Beam center axle movement Terahertz detector array 9 to distance variable aperture diaphragm 8 is d2=150mm position, measurement obtain
The two-dimentional Energy distribution of the quasi- Gauss collimated laser beam 13 of Terahertz after aperture-variable diaphragm 8 is preferred is as shown in Figure 2 B；In order to
The form of laser beam two dimension Energy distribution in Fig. 2A-Fig. 2 B is obtained, the position of X=160 pixels (pixel) in Fig. 2 is chosen, draws
Along the energy distribution curve of Y-direction, as a result as shown in figure 3, as seen from the figure, preferably after the quasi- Gauss collimated laser beam 13 of Terahertz
Energy distribution show the form of Gaussian Profile, above-mentioned d1And d2The quasi- Gauss parallel laser beam energy of two opening position Terahertzs
The full width at half maximum (FWHM) of distribution is respectively S1=59pixels and S2=65pixels, it is single according to Terahertz detector array 9
The length of side of pixel element is 23.5 μm, and S is calculated1=1386.5 μm and S2=1527.5 μm；It follows that moving d=
d1-d2After=20mm distance, the full width at half maximum of the quasi- Gauss collimated laser beam 13 of Terahertz adds 141 μm, illustrates Terahertz standard
Gauss collimated laser beam 13 has the preferable depth of parallelism；Therefore, after above-mentioned collimation adjustment and diaphragm are preferred, terahertz is obtained
Hereby quasi- Gauss collimated laser beam.
The method according to the invention, pass through feux rouges pre-calibration so that the thz laser beam 11 of outgoing reaches preferably flat
Row degree, recycling vacuumizing bar 62 can accurate adjustment and Terahertz detector array 9 can real-time monitored laser beams section in real time
The advantages of face two dimension Energy distribution, effective regulation to being emitted the thz laser depth of parallelism is realized, obtains Terahertz frequency range
Quasi- Gauss collimated laser beam, provide stable performance, beam quality excellent lasing light emitter for the application system of Terahertz frequency range.
Above-described, only presently preferred embodiments of the present invention is not limited to the scope of the present invention, of the invention is upper
Stating embodiment can also make a variety of changes.What i.e. every claims and description according to the present patent application were made
Simply, equivalent changes and modifications, the claims of patent of the present invention are fallen within.The not detailed description of the present invention is
Routine techniques content.
Claims (10)
- A kind of 1. realization device of the quasi- Gauss collimated laser beam of Terahertz, it is characterised in that including：For providing the cooled cryostat (5) of vacuum and low temperature environment；It is arranged at the outside driving power (1) of cooled cryostat (5)；It is arranged at the internal cryogenic sample frame (4) of cooled cryostat (5)；The Terahertz quantum cascaded laser (3) being fixed on the cryogenic sample frame (4), it is described Terahertz quantum cascaded Laser (3) is connected with the driving power (1) and sends Terahertz divergencing laser；The regulating system (6) being movably mounted on the cryogenic sample frame (4)；The off-axis parabolic mirror (7) being installed in regulating system (6), it is collected the Terahertz divergencing laser and exported too The quasi-parallel laser beam (11) of hertz；The outside moveable aperture-variable diaphragm (8) of cooled cryostat (5) is arranged at, it is to the quasi-parallel laser beam of the Terahertz (11) light beam is carried out preferably to form the quasi- Gauss collimated laser beam (13) of Terahertz；AndThe outside moveable Terahertz detector array (9) of cooled cryostat (5) is arranged at, it is quasi-parallel to the Terahertz sharp The two-dimentional Energy distribution of light beam (11) is characterized and calibrates the collimation of the quasi-parallel laser beam of the Terahertz (11).
- 2. realization device according to claim 1, it is characterised in that the regulating system (6) include fixed mount (61) and Vacuumizing bar (62), the vacuumizing bar (62) are connected with the fixed mount (61) to drive the fixed mount (61) two It may move in individual mutually orthogonal direction.
- 3. realization device according to claim 2, it is characterised in that be provided with vacuum sealing on the cooled cryostat (5) Interface, two action bars stretch into the inside of cooled cryostat (5) to form the vacuumizing bar by the vacuum sealing interface (62)。
- 4. realization device according to claim 1, it is characterised in that be provided with vacuum electricity on the cooled cryostat (5) Interface (2), the Terahertz quantum cascaded laser (3) are connected by the vacuum electrical interface (2) and the driving power (1) Connect.
- 5. realization device according to claim 1, it is characterised in that be provided with vacuum window on the cooled cryostat (5) (12), the quasi-parallel laser beam of the Terahertz (11) is projected by the vacuum window (12).
- 6. realization device according to claim 1, it is characterised in that the mirror body of the off-axis parabolic mirror (7) is straight Footpath and effective focal length are less than 3cm, and effective focal length and the ratio of mirror body diameter are less than 1.
- 7. realization device according to claim 6, it is characterised in that the mirror body of the off-axis parabolic mirror (7) is straight Footpath is 12.7mm, effective focal length 6.8mm, and the ratio of effective focal length and mirror body diameter is 0.535.
- 8. a kind of implementation method of the quasi- Gauss collimated laser beam of Terahertz, it is characterised in that including step：S1, by Terahertz quantum cascaded laser (3), off-axis parabolic mirror (7) and regulating system (6) integrated installation low To form an integration member on warm specimen holder (4) so that the outgoing end face of the Terahertz quantum cascaded laser (3) with it is described The focus (10) of off-axis parabolic mirror (7) is in same plane；S2, the integration member is calibrated by the regulating system (6) so that the Terahertz quantum cascaded laser (3) outgoing end face overlaps with the focus (10) of the off-axis parabolic mirror (7)；S3, the integration member after calibration is installed on to the inside of cooled cryostat (5), by the cooled cryostat (5) provide vacuum and Low temperature environment, electric current is applied to the Terahertz quantum cascaded laser (3) by driving power (1), makes the Terahertz amount Qc laser (3) exports Terahertz divergencing laser, the Terahertz divergencing laser warp under the vacuum and low temperature environment Terahertz collimated laser beam is exported after crossing the off-axis parabolic mirror (7) reflection；S4, the mobile Terahertz detector array (9), adjusts the regulating system (6) so that along Terahertz collimated laser beam Center move Terahertz detector array (9) certain distance after, the hot spot of Terahertz collimated laser beam is always held at The center of the sensitive area of the Terahertz detector array (9), to obtain the quasi-parallel laser beam of Terahertz (11)；S5, aperture-variable diaphragm (8) is arranged at the upstream of the Terahertz detector array (9) and the mobile variable aperture Diaphragm (8) so that occur being evenly distributed on the sensitive area of the Terahertz detector array (9) and with Gaussian distribution feature Laser facula, obtain the quasi- Gauss collimated laser beam (13) of Terahertz.
- 9. implementation method according to claim 8, it is characterised in that the step S1 includes：By the Terahertz quantum Cascaded laser (3) is fixed on the cryogenic sample frame (4), and the off-axis parabolic mirror (7) is installed on into institute State in regulating system (6) and the regulating system (6) is movably mounted on the cryogenic sample frame (4) with described in formation Integration member.
- 10. implementation method according to claim 8, it is characterised in that the step S2 is specially：Use wavelength for Light path of the 670nm feux rouges along the off-axis parabolic mirror (7) axially irradiates minute surface, by adjusting the regulating system (6) visible light spot that the off-axis parabolic mirror (7) is assembled is moved to the Terahertz quantum cascaded laser (3) Outgoing end face on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711262291.1A CN107807454B (en) | 2017-12-04 | 2017-12-04 | Device and method for realizing terahertz quasi-Gaussian parallel laser beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711262291.1A CN107807454B (en) | 2017-12-04 | 2017-12-04 | Device and method for realizing terahertz quasi-Gaussian parallel laser beams |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107807454A true CN107807454A (en) | 2018-03-16 |
| CN107807454B CN107807454B (en) | 2024-04-23 |
Family
ID=61589578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711262291.1A Active CN107807454B (en) | 2017-12-04 | 2017-12-04 | Device and method for realizing terahertz quasi-Gaussian parallel laser beams |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107807454B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029718A (en) * | 2018-06-08 | 2018-12-18 | 西安应用光学研究所 | The THz source divergence angle measurement device and measurement method for having self-calibration function |
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN112263234A (en) * | 2020-11-18 | 2021-01-26 | 上海理工大学 | Human body acupuncture point detection device for detecting terahertz radiation signals and using method |
| CN112987203A (en) * | 2021-04-07 | 2021-06-18 | 中国科学院上海微***与信息技术研究所 | Infrared optical system with integrated super-surface lens and detector and manufacturing method thereof |
| CN113075780A (en) * | 2021-04-13 | 2021-07-06 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
| CN113566448A (en) * | 2021-07-13 | 2021-10-29 | 中国科学院上海微***与信息技术研究所 | Cooling device for soft X-ray spectroscopy test |
Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100002739A1 (en) * | 2008-05-08 | 2010-01-07 | Massachusetts Institute Of Technology (Mit) | Lens coupled quantum cascade laser |
| WO2010136605A2 (en) * | 2009-05-29 | 2010-12-02 | Eth Zurich | Microwave circuit |
| CN201666870U (en) * | 2010-03-26 | 2010-12-08 | 无锡沃浦光电传感科技有限公司 | Duel mode long distance infrared gas sensor |
| US20110101250A1 (en) * | 2009-11-03 | 2011-05-05 | Qing Hu | Frequency tunable wire lasers |
| US20120062895A1 (en) * | 2010-09-09 | 2012-03-15 | Adelphi University | Method and Apparatus for the Detection of Trace Gas Species Using Multiple Line Integrated Absorption Spectroscopy |
| CN102445420A (en) * | 2011-10-13 | 2012-05-09 | 中国科学院上海微***与信息技术研究所 | Transmission imaging device and method based on tera-hertz quantum device |
| CN102589713A (en) * | 2012-01-10 | 2012-07-18 | 中国科学院上海微***与信息技术研究所 | Device and method for measuring output laser field shape of terahertz quantum cascade laser |
| CN102636269A (en) * | 2012-05-15 | 2012-08-15 | 中国科学院上海微***与信息技术研究所 | Measurement device and method of pulse tera-hertz radiation source output wave beam field form |
| CN102818632A (en) * | 2012-08-13 | 2012-12-12 | 上海交通大学 | Equivalent low-temperature high-sensitivity infrared spectrometer |
| DE102012000038A1 (en) * | 2012-01-03 | 2013-07-04 | Humboldt-Universität Zu Berlin | laser device |
| JP2013138112A (en) * | 2011-12-28 | 2013-07-11 | Pioneer Electronic Corp | Terahertz wave generating device and measuring device |
| US20130286397A1 (en) * | 2012-04-30 | 2013-10-31 | Eos Photonics, Inc. | Spectroscopy systems and methods using quantum cascade laser arrays with lenses |
| CN103487916A (en) * | 2013-09-23 | 2014-01-01 | 浙江师范大学 | Method for adjusting off-axis paraboloidal mirror based on high-resolution scientific CCD camera |
| CN103557947A (en) * | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| US9001858B1 (en) * | 2013-10-31 | 2015-04-07 | Riken | Quantum cascade laser element |
| CN204462543U (en) * | 2015-01-27 | 2015-07-08 | 中国工程物理研究院激光聚变研究中心 | A kind of light-beam forming unit reducing QCL THz source diffraction effect and the angle of divergence |
| US20150318668A1 (en) * | 2014-05-01 | 2015-11-05 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser and method for manufacturing quantum cascade laser |
| CN105116565A (en) * | 2015-09-18 | 2015-12-02 | 首都师范大学 | Terahertz pulse width modulator device and modulation method |
| CN205263403U (en) * | 2015-12-24 | 2016-05-25 | 中国科学院上海微***与信息技术研究所 | Device is mediated to terahertz polarization modulation of laser now |
| US20160202180A1 (en) * | 2013-08-22 | 2016-07-14 | The University Of Queensland | A laser system for imaging and materials analysis |
| CN105974579A (en) * | 2016-07-18 | 2016-09-28 | 西安交通大学 | Angle changing device for large-aperture parallel beams based on off-axis parabolic mirror |
| CN106198325A (en) * | 2016-06-27 | 2016-12-07 | 南开大学 | In a kind of on-line checking suspension molecule size distribution the measuring and analysis system of elastic scattering spectra dorsad and analyze method |
| CN106290178A (en) * | 2016-09-08 | 2017-01-04 | 电子科技大学 | A kind of Nonuniformity Correction system and method for Terahertz detector array |
| US20170077667A1 (en) * | 2015-09-14 | 2017-03-16 | The Regents Of The University Of California | Quantum cascade external cavity laser with metasurfaces |
| CN106816805A (en) * | 2015-12-02 | 2017-06-09 | 中国科学院半导体研究所 | The liquid nitrogen cooling system of Terahertz quantum cascaded laser and use its laser |
| CN206330885U (en) * | 2016-12-28 | 2017-07-14 | 中国科学院上海微***与信息技术研究所 | Terahertz two-dimensional imaging system |
| CN207457623U (en) * | 2017-12-04 | 2018-06-05 | 中国科学院上海微***与信息技术研究所 | A kind of realization device of the quasi- Gauss collimated laser beam of Terahertz |
-
2017
- 2017-12-04 CN CN201711262291.1A patent/CN107807454B/en active Active
Patent Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100002739A1 (en) * | 2008-05-08 | 2010-01-07 | Massachusetts Institute Of Technology (Mit) | Lens coupled quantum cascade laser |
| WO2010136605A2 (en) * | 2009-05-29 | 2010-12-02 | Eth Zurich | Microwave circuit |
| US20110101250A1 (en) * | 2009-11-03 | 2011-05-05 | Qing Hu | Frequency tunable wire lasers |
| CN201666870U (en) * | 2010-03-26 | 2010-12-08 | 无锡沃浦光电传感科技有限公司 | Duel mode long distance infrared gas sensor |
| US20120062895A1 (en) * | 2010-09-09 | 2012-03-15 | Adelphi University | Method and Apparatus for the Detection of Trace Gas Species Using Multiple Line Integrated Absorption Spectroscopy |
| CN102445420A (en) * | 2011-10-13 | 2012-05-09 | 中国科学院上海微***与信息技术研究所 | Transmission imaging device and method based on tera-hertz quantum device |
| JP2013138112A (en) * | 2011-12-28 | 2013-07-11 | Pioneer Electronic Corp | Terahertz wave generating device and measuring device |
| DE102012000038A1 (en) * | 2012-01-03 | 2013-07-04 | Humboldt-Universität Zu Berlin | laser device |
| CN102589713A (en) * | 2012-01-10 | 2012-07-18 | 中国科学院上海微***与信息技术研究所 | Device and method for measuring output laser field shape of terahertz quantum cascade laser |
| US20130286397A1 (en) * | 2012-04-30 | 2013-10-31 | Eos Photonics, Inc. | Spectroscopy systems and methods using quantum cascade laser arrays with lenses |
| CN102636269A (en) * | 2012-05-15 | 2012-08-15 | 中国科学院上海微***与信息技术研究所 | Measurement device and method of pulse tera-hertz radiation source output wave beam field form |
| CN102818632A (en) * | 2012-08-13 | 2012-12-12 | 上海交通大学 | Equivalent low-temperature high-sensitivity infrared spectrometer |
| US20160202180A1 (en) * | 2013-08-22 | 2016-07-14 | The University Of Queensland | A laser system for imaging and materials analysis |
| CN103487916A (en) * | 2013-09-23 | 2014-01-01 | 浙江师范大学 | Method for adjusting off-axis paraboloidal mirror based on high-resolution scientific CCD camera |
| CN103557947A (en) * | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| US9001858B1 (en) * | 2013-10-31 | 2015-04-07 | Riken | Quantum cascade laser element |
| US20150318668A1 (en) * | 2014-05-01 | 2015-11-05 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser and method for manufacturing quantum cascade laser |
| CN204462543U (en) * | 2015-01-27 | 2015-07-08 | 中国工程物理研究院激光聚变研究中心 | A kind of light-beam forming unit reducing QCL THz source diffraction effect and the angle of divergence |
| US20170077667A1 (en) * | 2015-09-14 | 2017-03-16 | The Regents Of The University Of California | Quantum cascade external cavity laser with metasurfaces |
| CN105116565A (en) * | 2015-09-18 | 2015-12-02 | 首都师范大学 | Terahertz pulse width modulator device and modulation method |
| CN106816805A (en) * | 2015-12-02 | 2017-06-09 | 中国科学院半导体研究所 | The liquid nitrogen cooling system of Terahertz quantum cascaded laser and use its laser |
| CN205263403U (en) * | 2015-12-24 | 2016-05-25 | 中国科学院上海微***与信息技术研究所 | Device is mediated to terahertz polarization modulation of laser now |
| CN106198325A (en) * | 2016-06-27 | 2016-12-07 | 南开大学 | In a kind of on-line checking suspension molecule size distribution the measuring and analysis system of elastic scattering spectra dorsad and analyze method |
| CN105974579A (en) * | 2016-07-18 | 2016-09-28 | 西安交通大学 | Angle changing device for large-aperture parallel beams based on off-axis parabolic mirror |
| CN106290178A (en) * | 2016-09-08 | 2017-01-04 | 电子科技大学 | A kind of Nonuniformity Correction system and method for Terahertz detector array |
| CN206330885U (en) * | 2016-12-28 | 2017-07-14 | 中国科学院上海微***与信息技术研究所 | Terahertz two-dimensional imaging system |
| CN207457623U (en) * | 2017-12-04 | 2018-06-05 | 中国科学院上海微***与信息技术研究所 | A kind of realization device of the quasi- Gauss collimated laser beam of Terahertz |
Non-Patent Citations (5)
| Title |
|---|
| ZHIYONG TAN 等: "Direct detection of a fast modulated terahertz light with a spectrally matched quantum-well photodetector", ELECTRONICS LETTERS, pages 91 - 93 * |
| 刘俊岐;王涛;刘峰奇;: "单模太赫兹量子级联激光器", 太赫兹科学与电子信息学报, no. 02, pages 195 - 197 * |
| 王涛 等: "高功率输出锥形波导太赫兹量子级联激光器", 太赫兹科学与电子信息学报, pages 361 - 364 * |
| 谭智勇;万文坚;黎华;曹俊诚;: "基于太赫兹量子级联激光器的实时成像研究进展", 中国光学, no. 01, pages 68 - 76 * |
| 黎华;曹俊诚;: "太赫兹量子级联激光器制备及其成像应用", 中国科学(G辑:物理学 力学 天文学), no. 05, pages 485 - 493 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029718A (en) * | 2018-06-08 | 2018-12-18 | 西安应用光学研究所 | The THz source divergence angle measurement device and measurement method for having self-calibration function |
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN110153106B (en) * | 2019-04-29 | 2024-02-13 | 苏州创鑫激光科技有限公司 | Laser cleaning system and cleaning method |
| CN112263234A (en) * | 2020-11-18 | 2021-01-26 | 上海理工大学 | Human body acupuncture point detection device for detecting terahertz radiation signals and using method |
| CN112987203A (en) * | 2021-04-07 | 2021-06-18 | 中国科学院上海微***与信息技术研究所 | Infrared optical system with integrated super-surface lens and detector and manufacturing method thereof |
| CN113075780A (en) * | 2021-04-13 | 2021-07-06 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
| CN113075780B (en) * | 2021-04-13 | 2022-09-16 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
| CN113566448A (en) * | 2021-07-13 | 2021-10-29 | 中国科学院上海微***与信息技术研究所 | Cooling device for soft X-ray spectroscopy test |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107807454B (en) | 2024-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107807454A (en) | A kind of realization device and implementation method of the quasi- Gauss collimated laser beam of Terahertz | |
| CN207457623U (en) | A kind of realization device of the quasi- Gauss collimated laser beam of Terahertz | |
| US8749225B2 (en) | Apparatus and method of power measurement for pulsed terahertz quantum-cascade laser | |
| Lee et al. | Real-time terahertz imaging over a standoff distance (> 25meters) | |
| CN104201557B (en) | A kind of encapsulating structure and its packaging method of tunable laser | |
| JP5222532B2 (en) | Photoconductive antenna element | |
| US7498593B2 (en) | Terahertz radiation sources and methods | |
| CN106442394A (en) | Terahertz near-field imaging system and terahertz near-field imaging method | |
| CN102445420A (en) | Transmission imaging device and method based on tera-hertz quantum device | |
| US11248960B2 (en) | High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam | |
| CN109696447A (en) | A kind of Soft X-ray microimaging device | |
| Schäfer et al. | High efficiency mid-infrared interband cascade LEDs grown on low absorbing substrates emitting> 5 mW of output power | |
| CN111562008A (en) | Method and device for measuring PL wavelength of incident angle of variable excitation light source | |
| CN101995384B (en) | Saturated absorption spectrum method and device based on internal surface reflection of atomic gas sample cell | |
| CN1831517A (en) | Miniature portable infrared spectrograph | |
| CN209542832U (en) | A kind of radar transmitter and laser radar using photonic crystal semiconductor laser | |
| CN209656591U (en) | A kind of Soft X-ray microimaging device | |
| CN114324272B (en) | Ion beam fluorescence detection device and method for 4 pi solid angle | |
| Downes et al. | A practical guide to terahertz imaging using thermal atomic vapour | |
| Khazan | Time-domain terahertz spectroscopy and its application to the study of high-Tc superconductor thin films | |
| US20210391142A1 (en) | Scanning electron microscope | |
| CN208078376U (en) | 3 temperature-compensating 473nm blue light continuous wave lasers | |
| KR100943969B1 (en) | Apparatus for protecting heat and uniformiting light in solar electricity generator | |
| CN113422196A (en) | Terahertz heat radiation source capable of generating ultra-narrow bandwidth and working method thereof | |
| CN217466684U (en) | Imaging device for phase change process of material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |