CN107764331A - Flexible compound type sensor array for the artificial sensitive skin of intelligent robot - Google Patents
Flexible compound type sensor array for the artificial sensitive skin of intelligent robot Download PDFInfo
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- CN107764331A CN107764331A CN201710988483.4A CN201710988483A CN107764331A CN 107764331 A CN107764331 A CN 107764331A CN 201710988483 A CN201710988483 A CN 201710988483A CN 107764331 A CN107764331 A CN 107764331A
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- sensor
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- humidity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The present invention provides one kind and is used for the artificial sensitive skin flexible compound type sensor array of intelligent robot, it is characterized in that the sensing unit of forming array is using flexible polyimide circuits plate as substrate, pressure sensor, temperature sensor and humidity sensor are set respectively on the same face of substrate；The apparent height of pressure sensor is higher than temperature sensor and humidity sensor, forms the overall distribution form in male and fomale(M＆F).The present invention can measure pressure, temperature and humidity simultaneously, and have the advantages of flexible, precision is high, stable performance.
Description
Technical field
The present invention relates to field of sensing technologies, more specifically a kind of sensitive skin applied to intelligent robot is flexible
Composite array sensor.
Background technology
International robot circle is all increasing the research dynamics of scientific research, has both required that sensor could for intelligent robot
Environment is accurately perceived, requires enough softnesses again, makes the same perception of robot someone and degree of flexibility.Intelligence machine
The artificial sensitive skin of people is modularization, the sensor array with data analytic ability, is covered in intelligent robot surface, according to
Rely in the composite array sensor on artificial intelligence skin to perceive external environmental information.As intelligent robot work is complicated
Property increase, single touch sensor can not completely meet the needs of real work, have detection simultaneously more now
The flexible compound type sensor of weight information has become the hot issue in the fields such as international research intelligence machine application on human skin, at this stage
The approach of realization is largely the medium profit for relying on the either flexible high polymer material of flexible automation workshops as transmission information
It is prepared with various sensitive materials.Japanese Tokyo University Someya in 2005 et al., which is developed, possesses pressure and temperature inspection
The transistor array column electronic skin of brake.Illinois, USA university Engel et al. utilizes MEMS manufacture crafts, will know
The standalone sensor part of the material properties such as other material, temperature, pressure and hardness is distributed in polymeric inner, prepares recognizable thing
The flexible multi-functional tactile sensing system of body performance.Taiwan Univ. Yang et al. utilizes MEMS technology, sub- in flexible substrate polyamides
Designed on amine-Copper thin film and made the integrated form tactile sensing array of 8 × 8 array structures, applied to the quick of intelligent robot
Feel skin.Japanese Feng Qiao technological sciences university Takao et al. utilizes silicon IC plastic deformation Technology design is a kind of to have detection
Contact force, hardness, the integrated multifunction tactile sensor array picture system of Temperature Distribution.The North Carolina in the U.S. is state
University Daniel et al. has made metallic film type temperature and strain sensing device array on flexible polyimide thin layer.2010
Thermoelectric pile is embedded in polymer film and flexible thermal electric touch sensor is made by Yoon et al., realizes contact and temperature
Detect simultaneously.Analyze domestic and international research situation and understand that the research of the artificial sensitive skin of intelligent robot at present is confined to or pressed
Power or temperature or pressure and temp combined type, and the temperature sensing unit of pressure and temp combined type is non-flexible sensor.Not yet
Have while detect pressure, the related report of the flexible sensor array of three kinds of signals of temperature and humidity.
The content of the invention
The present invention is to realize that the artificial sensitive skin of intelligent robot being capable of sensing external environment information, there is provided Yi Zhongrou
Property is good, precision is high, the flexible compound type sensor array for the artificial sensitive skin of intelligent robot of stable performance, to same
When measure pressure, temperature and humidity.
The present invention adopts the following technical scheme that to solve technical problem：
The present invention is structurally characterized in that composition for the artificial sensitive skin flexible compound type sensor array of intelligent robot
The sensing unit of array is using flexible polyimide circuits plate as substrate, sets pressure to pass respectively on the same face of the substrate
Sensor, temperature sensor and humidity sensor；The apparent height of the pressure sensor is higher than temperature sensor and humidity sensor
Device, form the overall distribution form in male and fomale(M＆F).
The characteristics of sensitive skin flexible compound type sensor array artificial for intelligent robot of the invention, lies also in：It is described
Pressure sensor is to be used as pressure sensitive material using carbon black filled silicon rubber；The temperature sensor is to fill silicon rubber with carbon fiber
Glue is as temperature-sensitive material；The humidity sensor is to be used as humidity sensitive material using carbon nano-tube filled silicon rubber.
Compared with the prior art, the present invention has the beneficial effect that：
1st, the present invention sets combined type jointly using three kinds of sensor groups into a compound transducer unit in substrate
Sensor array so that sensor can detect pressure, temperature and humidity information simultaneously；
2nd, the height of different function units is different in sensor array in the present invention, and overall is in the distribution form of male and fomale(M＆F),
Eliminate by the interference of pressure on temperature and humidity sensor；Temperature sensor and pressure sensor are available in same unit
The temperature sensor compensation pressure sensor of same unit, eliminates interference of the temperature to pressure sensor, can significantly reduce
Cross jamming between pressure and temperature, improve the accuracy of sensor measurement；
3rd, substrate, pressure sensitive material, temperature-sensitive material and the humidity sensitive material in the present invention are elastomeric material,
Sensor array is allowed to realize flexural deformation, can be with cloth on the surface of any robot；
4th, because interdigitated electrode structure is stable in the present invention, three kinds of sensor electrodes all use interdigitated electrode structure, form
Compound transducer unit as shown in Figure 1, is detected while realizing pressure, temperature and humidity.
Brief description of the drawings
Fig. 1 is flexible compound type sensor unit electrode schematic diagram of the present invention；
Fig. 2 is compound transducer side structure schematic diagram of the present invention；
Fig. 3 is flexible compound type sensor array of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Referring to Fig. 1, Fig. 2, the artificial sensitive skin flexible compound type sensor array of intelligent robot is used in the present embodiment
Structure type be：The sensing unit of forming array is using flexible polyimide circuits plate as substrate, on the same face of substrate
Pressure sensor 1, temperature sensor 2 and humidity sensor 3 are set respectively；The apparent height of pressure sensor is higher than TEMP
Device and humidity sensor, form the overall distribution form (as shown in Figure 2) in male and fomale(M＆F).
Specific implementation is at normal temperatures and pressures, pressure sensitive material to be prepared into the fritter that thickness is about 2mm, temperature is quick
Sense material is prepared into film with humidity sensitive material using spin-coating method.By the rotating speed and spin-coating time that control desk-top sol evenning machine
To control the thickness of temperature-sensitive material and humidity sensitive material film, make the film of temperature and moisture sensors sensitive material low
In the thickness of pressure sensor sensitive material.
Pressure sensor is used as pressure sensitive material by the use of carbon black filled silicon rubber；Temperature sensor fills silicon rubber with carbon fiber
Glue is as temperature-sensitive material；Pressure sensitive material and temperature-sensitive material therein exist《Functional material》The second phase in 2010,
Report is disclosed in " conducing composite material for being used for composite flexible touch sensor is studied " that Zhao Xing, Huang Ying et al. are delivered
Lead；Humidity sensor exists by the use of carbon nano-tube filled silicon rubber as humidity sensitive material, this material《Functional material》2012
Existing public affairs in " humidity sensitivity of multi-walled carbon nanotube/silicon rubber composite material " that 06 interim Lian Chao, Huang Ying et al. is delivered
Open report)
Shown in Fig. 2, on the surface of substrate 4, the pressure sensitive material of compound transducer unit, temperature-sensitive material, humidity
Sensitive material and positioned at substrate and pressure sensitive material, temperature-sensitive material, the electrode composition knot between humidity sensitive material
Structure is closely overall, and wherein the apparent height of pressure sensor 1 is 2mm, temperature sensor 2 and humidity sensor 3 surface height
Spend for 0.5mm.
Fig. 1 show the electrode structure of compound transducer unit.Pressure sensing wherein in compound transducer unit
Device, temperature sensor, the electrode of humidity sensor use interdigitated electrode structure.Pressure is eliminated in compound transducer unit,
Temperature, the method that humidity interferes are as follows：
Because influence of the humidity to pressure and temperature sensitive material is little, i.e. humidity change is to pressure and temperature sensor
Influence can be ignored.So only consider the interference between temperature and pressure sensor, when pressure and temp changes, pressure sensor
Output resistance RF=R0 (1+k1F+a1 △ T), in formula：RF is that pressure sensor is under pressure F (0<F≤FN) when pressure sensor
Resistance；Resistance when R0 does not stress for pressure sensor；FN is the measurable maximum pressure of pressure sensor, is measured by experiment；
K1 is pressure-resistance coefficient of pressure sensor, is measured by experimental calibration；A1 is the temperature-resistance coefficient of pressure sensor,
Measured by experimental calibration.
Because Sensor Design is into concavo-convex, pressure sensor is higher than temperature sensor and humidity sensor, and combined type passes
Influence of the pressure to temperature sensor in unit and humidity sensor suffered by sensor cell can be neglected.So during temperature change,
Temperature sensor output resistance is RT=R0 (1+a2 △ T), wherein, RT is temperature sensor in temperature T (T0<T≤Tc) under
Resistance；T0 can measure minimum temperature for temperature sensor and can be measured by experiment；Tc is the measurable maximum temperature of temperature sensor
It can be measured by experiment；R0 is that resistance of the temperature sensor at a temperature of T0 can be measured by experiment；α 2 is resistance temperature sensor temperature
Degree coefficient can be measured by experimental calibration；△ T=T-T0.Compound transducer unit then can be surveyed by equation RT=R0 (1+a2 △ T)
On accurate temperature T and △ T.Again in the hope of △ T bring into RF=R0 (1+k1F+a1 △ T) can obtain combined type sensing
Suffered pressure F on device unit.Can be in the hope of the temperature and pressure in each compound transducer unit by this computational methods
Power can pressure release sensor temperature interference.
Fig. 3 show the compound transducer array combined by compound transducer unit.Each compound transducer
Unit spacing is 3mm.The size and shape of array can adjust as needed.Compound transducer array is due to being multiple combined types
Sensor combinations are formed so pressure field can be gathered simultaneously, temperature field and moisture field information.
Manufacture craft：
1st, flexible polyimide circuits plate is made using standard flex circuit board manufacturing technology；
2nd, pressure sensitive cells electrode is made on flexible polyimide circuits plate using screen printing technique, temperature is sensitive
Cell electrode, humidity sensitive cell electrode；
3rd, the mixed solution of flexible pressure-sensitive conductive rubber, temperature sensitivity are made using solution blending technique respectively at room temperature
The mixed solution and humidity sensitive conductive rubber mixed solution of conductive rubber；
4th, it is 5mm × 5mm × 2mm that the mixed solution of making flexible pressure-sensitive conductive rubber is solidified into size at room temperature, at a normal
Small bulk material
5th, 0.5mm thickness is made using spin coating in the mixed solution of temperature-sensitive material and humidity sensitive material mixed solution
Film, curing molding under room temperature normal pressure.So as to temperature sensor formed with certain altitude difference concaveconvex structure.
Claims (2)
1. it is used for the artificial sensitive skin flexible compound type sensor array of intelligent robot, it is characterized in that the sensing list of forming array
Member is using flexible polyimide circuits plate as substrate, sets pressure sensor, temperature to pass respectively on the same face of the substrate
Sensor and humidity sensor；The apparent height of the pressure sensor is higher than temperature sensor and humidity sensor, is formed overall
In the distribution form of male and fomale(M＆F).
2. it is used for the artificial sensitive skin flexible compound type sensor array of intelligent robot, its feature according to claim 1
It is that the pressure sensor is to be used as pressure sensitive material using carbon black filled silicon rubber；The temperature sensor is with carbon fiber
Filled silicon rubber is as temperature-sensitive material；The humidity sensor is to be used as humidity sensitive material using carbon nano-tube filled silicon rubber
Material.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108753169A (en) * | 2018-06-14 | 2018-11-06 | 杭州电子科技大学 | A kind of preparation method of pressure sensitive composite material suitable for silk-screen printing technique |
| CN108801516A (en) * | 2018-06-14 | 2018-11-13 | 杭州电子科技大学 | A kind of preparation method of large area flexible sensor array |
| CN108789459A (en) * | 2018-07-19 | 2018-11-13 | 深圳市慧传科技有限公司 | A kind of control system of puma manipulator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
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- 2017-10-21 CN CN201710988483.4A patent/CN107764331A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108753169A (en) * | 2018-06-14 | 2018-11-06 | 杭州电子科技大学 | A kind of preparation method of pressure sensitive composite material suitable for silk-screen printing technique |
| CN108801516A (en) * | 2018-06-14 | 2018-11-13 | 杭州电子科技大学 | A kind of preparation method of large area flexible sensor array |
| CN108789459A (en) * | 2018-07-19 | 2018-11-13 | 深圳市慧传科技有限公司 | A kind of control system of puma manipulator |
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