CN102749092A - Flexible compound type array sensor used for artificial sensitive skin of intelligent robot - Google Patents
Flexible compound type array sensor used for artificial sensitive skin of intelligent robot Download PDFInfo
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- CN102749092A CN102749092A CN2012102432829A CN201210243282A CN102749092A CN 102749092 A CN102749092 A CN 102749092A CN 2012102432829 A CN2012102432829 A CN 2012102432829A CN 201210243282 A CN201210243282 A CN 201210243282A CN 102749092 A CN102749092 A CN 102749092A
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Abstract
The invention discloses a flexible compound type array sensor used for the artificial sensitive skin of an intelligent robot, which is characterized in that a sensing unit for forming an array takes a flexible polyimide circuit board as a substrate; the same surface of the substrate is respectively provided with a pressure sensor, a temperature sensor and a humidity sensor; and the surface height of the pressure sensor is higher than those of the temperature sensor and the humidity sensor to form a distribution form which is integrally in a male and female mode. According to the flexible compound type array sensor used for the artificial sensitive skin of the intelligent robot, which is disclosed by the invention, pressure, temperature and humidity can be simultaneously measured, and the flexible compound type array sensor used for the artificial sensitive skin of the intelligent robot has the advantages of good flexibility, high precision and stable performance.
Description
Technical field
The invention belongs to field of sensing technologies, a kind of sensitive skin flexible compound formula sensor array that is applied to intelligent robot of more specifically saying so.
Background technology
International robot circle had both required accurately perception environment of sensor all in the research dynamics that strengthens scientific research for intelligent robot, require enough softnesses again, made people from robot that the same perception and degree of flexibility arranged.The artificial sensitive skin of intelligent robot is modularization, has the sensor array of data parsing ability that cover the intelligent robot surface, the combined type sensor array that depends on the artificial intelligence skin comes the perception external environmental information.Increase along with the intelligent robot task complexity; Single touch sensor can not satisfy the demand of real work completely; Have the hot issue that the flexible compound formula sensor that detects multiple information has simultaneously become field such as international research intelligence machine application on human skin now, present stage the approach major part that realizes be to rely on flexible tissue structure or flexible macromolecular material to utilize various sensitive materials to be prepared from as the media of the information of transmission.The people such as the Someya of Tokyo University of Japan in 2005 develop the transistor array formula electronics skin that possesses the pressure and temperature measuring ability.People such as the Engel of Illinois, USA university utilize the MEMS manufacture craft, and the standalone sensor spare of discerning material behaviors such as material, temperature, pressure and hardness is distributed in polymkeric substance inside, prepare the flexible multi-functional tactile sensing system of recognizable object performance.People such as the Yang of Taiwan Univ. utilize MEMS technology, on flexible substrate polyimide-copper film, design and made the integrated form tactile sensing array of 8 * 8 array structures, are applied to the sensitive skin of intelligent robot.People such as the Japan Feng Qiao technological sciences Takao of university utilize silicon IC the plastic deformation technical design a kind ofly have an integrated multifunction tactile sensor array picture system that detects contact force, hardness, Temperature Distribution.People such as the Daniel of North Carolina State University of the U.S. have made metallic film type temperature and strain transducer array on the flexible polyimide thin layer.People such as Yoon embedded thermoelectric pile and process flexible thermal electric touch sensor in the polymer film in 2010, detected when having realized contact pressure and temperature.Analyzing domestic and international research situation can know, the artificial sensitive-skinned research of intelligent robot at present is confined to or pressure or temperature or pressure and temp combined type, and the temperature sensing unit of pressure and temp combined type is the sensor of inflexibility.There is not the relevant report of the flexible sensor array of detected pressures, three kinds of signals of temperature and humidity simultaneously.
Summary of the invention
The present invention is in order to realize that the artificial sensitive skin of intelligent robot can perception external environment information; Provide that a kind of flexibility is good, precision is high, stable performance be used for the artificial sensitive-skinned flexible compound formula sensor array of intelligent robot, in the hope of while gaging pressure, temperature and humidity.
The present invention adopts following technical scheme for the technical solution problem:
The design feature that the present invention is used for the artificial sensitive skin flexible compound of intelligent robot formula sensor array is that the sensing unit of forming array is to be substrate with the flexible polyimide circuit board, on the same one side of said substrate, pressure transducer, temperature sensor and humidity sensor is set respectively; The surface elevation of said pressure transducer is higher than temperature sensor and humidity sensor, forms the whole distribution form that is male and fomale(M&F).
The characteristics that the present invention is used for the artificial sensitive skin flexible compound of intelligent robot formula sensor array also are: said pressure transducer is as pressure sensitive material with carbon black filled silicon rubber; Said temperature sensor is as temperature-sensitive material with filled with carbon fibers silicon rubber; Said humidity sensor is as the humidity sensitive material with carbon nano-tube filled silicon rubber.
Compared with present technology, beneficial effect of the present invention is embodied in:
1, the present invention utilizes three kinds of sensors to form a compound transducer unit, and the compound transducer array is set in substrate jointly, makes sensor detected pressures, temperature and humidity information simultaneously;
2, among the present invention in the sensor array height of different function units different, integral body is the distribution form of male and fomale(M&F), eliminates by the interference of pressure to the temperature and humidity sensor; Temperature sensor and pressure transducer are in same unit; The temperature sensor compensating-pressure transducer of same unit capable of using; Eliminate the interference of temperature, can reduce the cross interference between the pressure and temperature significantly, improve the accuracy of sensor measurement pressure transducer;
3, the substrate among the present invention, pressure sensitive material, temperature-sensitive material and humidity sensitive material are resilient material, allow sensor array to realize flexural deformation, can cloth on the surface of robot arbitrarily;
4, among the present invention because the interdigital electrode Stability Analysis of Structures, three kinds of sensor electrodes all adopt the interdigital electrode structure, form compound transducer unit as shown in Figure 1, detection when realizing pressure, temperature and humidity.
Description of drawings
Fig. 1 is a flexible compound formula sensor unit electrode synoptic diagram of the present invention;
Fig. 2 is a compound transducer side structure synoptic diagram of the present invention;
Fig. 3 is a flexible compound formula sensor array of the present invention.
Embodiment
Referring to Fig. 1, Fig. 2; The version that is used for the artificial sensitive skin flexible compound of intelligent robot formula sensor array in the present embodiment is: the sensing unit of forming array is to be substrate with the flexible polyimide circuit board, and pressure transducer 1, temperature sensor 2 and humidity sensor 3 are set respectively on the same one side of substrate; The surface elevation of pressure transducer is higher than temperature sensor and humidity sensor, forms the whole distribution form (as shown in Figure 2) that is male and fomale(M&F).
Practical implementation is, at normal temperatures and pressures, pressure sensitive material is prepared into the fritter that thickness is about 2mm, and temperature-sensitive material and humidity sensitive material use spin-coating method are prepared into film.The thickness that rotating speed through controlling desk-top sol evenning machine and spin coating time are controlled temperature-sensitive material and humidity sensitive material film makes the film of temperature and humidity sensor sensing material be lower than the thickness of pressure transducer sensitive material.
Pressure transducer with carbon black filled silicon rubber as pressure sensitive material; Temperature sensor with filled with carbon fibers silicon rubber as temperature-sensitive material; Pressure sensitive material wherein and temperature-sensitive material are in " functional material " second phase in 2010, and Zhao Xing, Huang Ying etc. " being used for the conducing composite material research of combined type flexible touch sensation sensor " that the people delivered are existing openly to be reported; As the humidity sensitive material, this material is existing public reported in " the humidity sensitive characteristic of multi-walled carbon nano-tubes/silicon rubber composite material " that people such as " functional material " 2012 the 06th interim Lian Chao, Huang Ying deliver with carbon nano-tube filled silicon rubber for humidity sensor)
Shown in Figure 2, at substrate 4 surfaces, the pressure sensitive material of compound transducer unit; Temperature-sensitive material; Humidity sensitive material and be positioned at substrate and pressure sensitive material, temperature-sensitive material, the electrode between the humidity sensitive material is formed hard-packed integral body; Wherein the surface elevation of pressure transducer 1 is 2mm, and the surface elevation of temperature sensor 2 and humidity sensor 3 is 0.5mm.
Shown in Figure 1 is the electrode structure of compound transducer unit.The pressure transducer in the compound transducer unit wherein, temperature sensor, the electrode of humidity sensor all adopts the interdigital electrode structure.Eliminate pressure in the compound transducer unit, temperature, the method for humidity phase mutual interference is following:
Because humidity is little to the influence of pressure and temperature sensitive material, i.e. humidity variation can be ignored the influence of pressure and temperature sensor.So the only interference between account temperature and pressure transducer, when pressure and temp changes, the output resistance R of pressure transducer
F=R
0(1+k
1F+a
1△ T), in the formula: R
FBe the pressure transducer F (0 that is under pressure<f≤F
N) time pressure transducer resistance; R
0Resistance when not stressing for pressure transducer; F
NMaximum pressure for pressure transducer can be surveyed is recorded by experiment; k
1Pressure-resistance coefficient for pressure transducer records through experimental calibration; a
1Temperature-resistance coefficient for pressure transducer is recorded by experimental calibration.
Because Sensor Design becomes concavo-convex, pressure transducer is higher than temperature sensor and humidity sensor, and the suffered pressure in compound transducer unit can be ignored the influence of temperature sensor in the unit and humidity sensor.So during temperature variation, the temperature sensor output resistance is R
T=R
0(1+a
2△ T), wherein, R
TFor temperature sensor at temperature T (T
0<t≤T
c) under resistance; T
0For recording minimum temperature, temperature sensor can record by experiment; T
cThe maximum temperature that can survey for temperature sensor can be recorded by experiment; R
0For temperature sensor at T
0Resistance under the temperature can be recorded by experiment; α
2For the temperature sensor temperature-coefficient of electrical resistance can be recorded by experimental calibration; △ T=T-T
0Then by equation R
T=R
0(1+a
2△ T) can survey accurate temperature T and △ T on the compound transducer unit.Again in the hope of △ T bring R into
F=R
0(1+k
1F+a
1△ T) can obtain the suffered pressure F on the compound transducer unit in.The temperature disturbance that can get rid of pressure transducer through these computing method in the hope of the temperature in each compound transducer unit and pressure.
Compound transducer array for forming shown in Figure 3 by the compound transducer unit combination.Each compound transducer unit interval is 3mm.The size of array and shape can be adjusted as required.So the compound transducer array is owing to be that a plurality of compound transducers combine and can gather pressure field simultaneously, temperature field and moisture field information.
Manufacture craft:
1, adopt standard flexible PCB manufacturing technology to make the flexible polyimide circuit board;
2, adopt screen printing technique on the flexible polyimide circuit board, to make pressure sensitive cells electrode, responsive to temperature cell electrode, humidity sensitive cell electrode;
3, at room temperature adopt solution blending technology to make the mixed solution and the humidity sensitive conductive rubber mixed solution of the mixed solution of flexible pressure-sensitive conductive rubber, responsive to temperature conductive rubber respectively;
4, the mixed solution of making flexible pressure-sensitive conductive rubber is solidified under the room temperature normal pressure and is of a size of the little bulk material of 5mm * 5mm * 2mm
5, the thick film of 0.5mm, curing molding under the room temperature normal pressure are processed in the mixed solution of temperature-sensitive material and the spin coating of humidity sensitive material mixing soln using.So that be formed with the concaveconvex structure of certain altitude difference with temperature sensor.
Claims (2)
1. be used for the artificial sensitive skin flexible compound of intelligent robot formula sensor array; The sensing unit that it is characterized in that forming array is to be substrate with the flexible polyimide circuit board, on the same one side of said substrate, pressure transducer, temperature sensor and humidity sensor is set respectively; The surface elevation of said pressure transducer is higher than temperature sensor and humidity sensor, forms the whole distribution form that is male and fomale(M&F).
2. according to the said artificial sensitive skin flexible compound of the intelligent robot formula sensor array that is used for of claim 1, it is characterized in that said pressure transducer is as pressure sensitive material with carbon black filled silicon rubber; Said temperature sensor is as temperature-sensitive material with filled with carbon fibers silicon rubber; Said humidity sensor is as the humidity sensitive material with carbon nano-tube filled silicon rubber.
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| CN2012102432829A CN102749092A (en) | 2012-07-13 | 2012-07-13 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
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| CN2012102432829A CN102749092A (en) | 2012-07-13 | 2012-07-13 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
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Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014117724A1 (en) * | 2013-01-29 | 2014-08-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | Electronic skin, preparation method and use thereof |
| CN105784788A (en) * | 2016-05-09 | 2016-07-20 | 吉林大学 | Paper-based flexible humidity sensitive element and preparation method thereof |
| CN106057534A (en) * | 2016-08-03 | 2016-10-26 | 中国科学院深圳先进技术研究院 | Pressure sensitive electric switch based on printing technology and manufacturing method thereof |
| CN106352927A (en) * | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106568539A (en) * | 2016-10-20 | 2017-04-19 | 上海交通大学 | Polymer substrate-based monolithic integrated temperature and humidity flexible sensor and preparation method |
| CN107345825A (en) * | 2017-09-06 | 2017-11-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensible equipment |
| CN107374780A (en) * | 2017-08-29 | 2017-11-24 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detection humiture and pressure |
| CN107449467A (en) * | 2017-08-29 | 2017-12-08 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN107551323A (en) * | 2017-08-29 | 2018-01-09 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric and thermistor material |
| CN107582215A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | Artificial intelligence skin and its detection method with humiture and pressure detecting function |
| CN107582216A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detecting pressure and temperature |
| CN107748184A (en) * | 2017-08-31 | 2018-03-02 | 南方科技大学 | Humidity sensor and preparation method thereof |
| CN107764331A (en) * | 2017-10-21 | 2018-03-06 | 长沙展朔轩兴信息科技有限公司 | Flexible compound type sensor array for the artificial sensitive skin of intelligent robot |
| CN108332794A (en) * | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN108519173A (en) * | 2018-03-07 | 2018-09-11 | 南京纳铠生物医药科技有限公司 | A kind of flexibility stress and humidity sensor, preparation method and application |
| CN109249422A (en) * | 2017-07-14 | 2019-01-22 | 江苏申源新材料有限公司 | A kind of flexible high-strength robot skin preparation method |
| CN109253757A (en) * | 2018-09-26 | 2019-01-22 | 东南大学 | A kind of flexible passive is wireless humidity, pressure integrated sensor |
| WO2019047063A1 (en) * | 2017-09-06 | 2019-03-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensing device |
| CN110455871A (en) * | 2019-07-25 | 2019-11-15 | 湘潭大学 | A kind of bimodulus humidity sensor and preparation method thereof based on nickel iodide |
| CN110584833A (en) * | 2019-10-17 | 2019-12-20 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin with touch sense and temperature sense |
| CN110712224A (en) * | 2019-10-17 | 2020-01-21 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin with temperature sensation |
| CN111307204A (en) * | 2019-11-28 | 2020-06-19 | 杭州电子科技大学 | Flexible multifunctional sensor |
| CN113175948A (en) * | 2021-03-31 | 2021-07-27 | 西安交通大学 | Flexible integrated sensor and method for simultaneously measuring temperature, pressure and medium |
| CN113340356A (en) * | 2021-06-29 | 2021-09-03 | 北京科技大学 | Array type temperature and pressure cooperative sensor and application method |
| CN113386158A (en) * | 2021-05-17 | 2021-09-14 | 浙江大学 | Full-printing bionic super-sensing flexible robot skin |
| CN114536355A (en) * | 2022-01-26 | 2022-05-27 | 浙江大学 | Expandable and reconfigurable multi-stage perception flexible robot skin |
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| CN110455871A (en) * | 2019-07-25 | 2019-11-15 | 湘潭大学 | A kind of bimodulus humidity sensor and preparation method thereof based on nickel iodide |
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| CN113175948A (en) * | 2021-03-31 | 2021-07-27 | 西安交通大学 | Flexible integrated sensor and method for simultaneously measuring temperature, pressure and medium |
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| CN113386158B (en) * | 2021-05-17 | 2022-05-27 | 浙江大学 | Full-printing bionic super-sensing flexible robot skin |
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Application publication date: 20121024 |