CN107748483A - A kind of cleaning device of multi-functional exposure machine base station - Google Patents
A kind of cleaning device of multi-functional exposure machine base station Download PDFInfo
- Publication number
- CN107748483A CN107748483A CN201711154256.8A CN201711154256A CN107748483A CN 107748483 A CN107748483 A CN 107748483A CN 201711154256 A CN201711154256 A CN 201711154256A CN 107748483 A CN107748483 A CN 107748483A
- Authority
- CN
- China
- Prior art keywords
- base station
- cleaning
- exposure machine
- pipe
- station body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants
Landscapes
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a kind of cleaning device of multi-functional exposure machine base station, including base station body, installing plate, cleans pipe device, clean brush device, air-dry machine device, rhone, drainpipe, HEPA filter screens and active carbon filter screen, described installing plate are welded on the right side of base station body；Described cleaning pipe device is arranged on the upper right of base station body.Discharge pipe of the present invention is arranged on the left side of blower fan fixed frame, coordinates the setting of fan body, is advantageous to conveniently air-dry the base station body after cleaning, prevents dust adsorption on the surface of base station body；Wheel and rack engages, be advantageous to it is convenient drive motor moved left and right on slide rail and, the convenient surface to base station body of matching purge brush cleans；The preceding surface inserting of storage tank has observation window, is advantageous to the height of water level in convenient observation storage tank；HEPA filter screens and active carbon filter screen are separately mounted to the junction of rhone and drainpipe, are advantageous to conveniently filter waste water.
Description
Technical field
The invention belongs to exposure machine base station cleaning equipment technical field, more particularly to a kind of multi-functional exposure machine base station
Cleaning device.
Background technology
Exposure machine refers to the ultraviolet that UVA wavelength is sent by opening light, by the image on film or other transparent bodies
Information is transferred to the equipment on the surface for scribbling photoactive substance.Exposure machine base station surface needs to keep cleaning, per first quarter moon or January
Cleaning wipes once, and under prior art, the method for cleaning exposure machine base station is：Operating personnel put on dustless clothes, are held with hand
The non-dust cloth of cleaning fluid is speckled with, arm is stretched into inside exposure machine the base station of exposure machine is wiped.
But the cleaning device of existing exposure machine base station is also there is the air-dried effect to table top is poor, waste water inconvenience mistake
Filter and ineffective problem.
Therefore, invent a kind of cleaning device of multi-functional exposure machine base station and seem very necessary.
The content of the invention
In order to solve the above-mentioned technical problem, the present invention provides a kind of cleaning device of multi-functional exposure machine base station, with solution
The cleaning device of certainly existing exposure machine base station is poor to the air-dried effect of table top, and waste water is inconvenient to filter asks with ineffective
Topic.A kind of cleaning device of multi-functional exposure machine base station, including base station body, installing plate, clean pipe device, cleaning brush dress
Put, air-dry machine device, rhone, drainpipe, HEPA filter screens and active carbon filter screen, described installing plate are welded on base station body
Right side；Described cleaning pipe device is arranged on the upper right of base station body；Described cleaning brush device is arranged on base station body
Upper left-hand；Described air-dry machine device is arranged on the right side of base station body；Described rhone is opened in base station body
Bottom；Described drainpipe is plugged on the left side of rhone；Described cleaning brush device includes slide rail, rack, driving motor, tooth
Wheel, motor, rotary shaft and cleaning brush, lower inside of the described rack welding in slide rail；Described driving motor is set
In slide rail；Described gear is welded on the output shaft of driving motor；Described motor bolt is arranged on driving motor
Bottom；Described rotary shaft is longitudinally mounted on the output shaft of motor；Described cleaning brush is arranged on the outer of rotary shaft
Side.
Preferably, described cleaning pipe device includes storage tank, sparge pipe, water pump, drinking-water pipe, electromagnetic valve and water spray
Head, described sparge pipe are arranged on the left side of water pump；Described water pump is arranged on the upper left-hand of storage tank；Described drinking-water pipe
The inside of storage tank is arranged on, and is connected with the water inlet of water pump；Described electromagnetic valve is arranged on sparge pipe；Described spray
Head is arranged on the bottom of sparge pipe.
Preferably, described air-dry machine device includes exhaust column, blower fan fixed frame, fan body, Air Filter and discharge pipe,
Described blower fan fixed frame is arranged on the left side of exhaust column；Described fan body is arranged on the inside of blower fan fixed frame.
Preferably, described Air Filter is arranged on the right side of blower fan fixed frame.
Preferably, described discharge pipe is arranged on the left side of blower fan fixed frame.
Preferably, described HEPA filter screens and active carbon filter screen are separately mounted to the junction of rhone and drainpipe.
Preferably, the preceding surface inserting of described storage tank has observation window.
Preferably, described wheel and rack engagement.
Compared with prior art, beneficial effects of the present invention are：
1st, in the present invention, described Air Filter is arranged on the right side of blower fan fixed frame, is advantageous to prevent dust to be blown into base
The surface of playscript with stage directions body.
2nd, in the present invention, described discharge pipe is arranged on the left side of blower fan fixed frame, coordinates the setting of fan body, favorably
Base station body after cleaning is air-dried in convenient, prevents dust adsorption on the surface of base station body.
3rd, in the present invention, the engagement of described wheel and rack, be advantageous to convenient drive motor left and right on slide rail and move
It is dynamic and, the convenient surface to base station body of matching purge brush cleans.
4th, in the present invention, the preceding surface inserting of described storage tank has observation window, is advantageous in convenient observation storage tank
Height of water level.
5th, in the present invention, described HEPA filter screens and active carbon filter screen are separately mounted to the connection of rhone and drainpipe
Place, be advantageous to conveniently filter waste water.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of the cleaning pipe device of the present invention.
Fig. 3 is the structural representation of the cleaning brush device of the present invention.
Fig. 4 is the structural representation of the air-dry machine device of the present invention.
In figure：
1st, base station body；2nd, installing plate；3rd, pipe device is cleaned；31st, storage tank；311st, observation window；32nd, sparge pipe；33rd, water
Pump；34th, drinking-water pipe；35th, electromagnetic valve；36th, fountain head；4th, brush device is cleaned；41st, slide rail；42nd, rack；43rd, driving motor；
44th, gear；45th, motor；46th, rotary shaft；47th, cleaning brush；5th, air-dry machine device；51st, exhaust column；52nd, blower fan fixed frame；
53rd, fan body；54th, Air Filter；55th, discharge pipe；6th, rhone；7th, drainpipe；8th, HEPA filter screens；9th, active carbon filter screen.
Embodiment
The present invention is described further below in conjunction with accompanying drawing：
Embodiment：
As shown in accompanying drawing 1 to accompanying drawing 4
The present invention provides a kind of cleaning device of multi-functional exposure machine base station, including base station body 1, installing plate 2, cleaning
Pipe device 3, brush device 4, air-dry machine device 5, rhone 6, drainpipe 7, HEPA filter screens 8 and active carbon filter screen 9 are cleaned, it is described
Installing plate 2 is welded on the right side of base station body 1；Described cleaning pipe device 3 is arranged on the upper right of base station body 1；It is described
Clean brush device 4 be arranged on base station body 1 upper left-hand；Described air-dry machine device 5 is arranged on the right side of base station body 1
Side；Described rhone 6 is opened in the bottom of base station body 1；Described drainpipe 7 is plugged on the left side of rhone 6；Described
Cleaning brush device 4 includes slide rail 41, rack 42, driving motor 43, gear 44, motor 45, rotary shaft 46 and cleaning brush 47,
Described rack 42 is welded on the lower inside of slide rail 41；Described driving motor 43 is arranged in slide rail 41；Described gear
44 are welded on the output shaft of driving motor 43；The described bolt of motor 45 is arranged on the bottom of driving motor 43；It is described
Rotary shaft 46 be longitudinally mounted on the output shaft of motor 45；Described cleaning brush 47 is arranged on the outside of rotary shaft 46.
In above-described embodiment, specifically, described cleaning pipe device 3 includes storage tank 31, sparge pipe 32, water pump 33, take out
Water pipe 34, electromagnetic valve 35 and fountain head 36, described sparge pipe 32 are arranged on the left side of water pump 33；Described water pump 33 is installed
In the upper left-hand of storage tank 31；Described drinking-water pipe 34 is arranged on the inside of storage tank 31, and is connect with the water inlet of water pump 33
It is logical；Described electromagnetic valve 35 is arranged on sparge pipe 32；Described fountain head 36 is arranged on the bottom of sparge pipe 32.
In above-described embodiment, specifically, described air-dry machine device 5 includes exhaust column 51, blower fan fixed frame 52, blower fan sheet
Body 53, Air Filter 54 and discharge pipe 55, described blower fan fixed frame 52 are arranged on the left side of exhaust column 51；Described fan body
53 are arranged on the inside of blower fan fixed frame 52.
In above-described embodiment, specifically, described Air Filter 54 is arranged on the right side of blower fan fixed frame 52.
In above-described embodiment, specifically, described discharge pipe 55 is arranged on the left side of blower fan fixed frame 52.
In above-described embodiment, specifically, described HEPA filter screens 8 and active carbon filter screen 9 is separately mounted to rhone 6 and row
The junction of water pipe 7.
In above-described embodiment, specifically, the preceding surface inserting of described storage tank 31 has observation window 311.
In above-described embodiment, specifically, described gear 44 engages with rack 42.
Operation principle
In the course of the work, in use, connection power supply opens water pump 33, water pump 33 will be stored up the present invention by drinking-water pipe 34
Water in water tank 31 is drawn into sparge pipe 32, and base station body 1 is rinsed by fountain head 36, utilizes motor 45
Rotary shaft 46 is driven, base station body 1 is cleaned using cleaning brush 47, it is right using fan body 53 and discharge pipe 55 after cleaning
Base station body 1 is air-dried.
Using technical solutions according to the invention, or those skilled in the art is under the inspiration of technical solution of the present invention,
Similar technical scheme is designed, and reaches above-mentioned technique effect, is to fall into protection scope of the present invention.
Claims (8)
- A kind of 1. cleaning device of multi-functional exposure machine base station, it is characterised in that the cleaning of the multi-functional exposure machine base station Device, including base station body (1), installing plate (2), cleaning pipe device (3), clean brush device (4), air-dry machine device (5), draining Groove (6), drainpipe (7), HEPA filter screens (8) and active carbon filter screen (9), described installing plate (2) are welded on base station body (1) Right side；Described cleaning pipe device (3) is arranged on the upper right of base station body (1)；Described cleaning brush device (4) is arranged on The upper left-hand of base station body (1)；Described air-dry machine device (5) is arranged on the right side of base station body (1)；Described rhone (6) it is opened in the bottom of base station body (1)；Described drainpipe (7) is plugged on the left side of rhone (6)；Described cleaning brush Device (4) includes slide rail (41), rack (42), driving motor (43), gear (44), motor (45), rotary shaft (46) and Cleaning brush (47), described rack (42) are welded on the lower inside of slide rail (41)；Described driving motor (43) is arranged on cunning In rail (41)；Described gear (44) is welded on the output shaft of driving motor (43)；Described motor (45) bolt peace Mounted in the bottom of driving motor (43)；Described rotary shaft (46) is longitudinally mounted on the output shaft of motor (45)；It is described Cleaning brush (47) be arranged on rotary shaft (46) outside.
- 2. the cleaning device of multi-functional exposure machine base station as claimed in claim 1, it is characterised in that described cleaning pipe dress Putting (3) includes storage tank (31), sparge pipe (32), water pump (33), drinking-water pipe (34), electromagnetic valve (35) and fountain head (36), Described sparge pipe (32) is arranged on the left side of water pump (33)；The top that described water pump (33) is arranged on storage tank (31) is left Side；Described drinking-water pipe (34) is arranged on the inside of storage tank (31), and is connected with the water inlet of water pump (33)；Described electromagnetism Valve (35) is arranged on sparge pipe (32)；Described fountain head (36) is arranged on the bottom of sparge pipe (32).
- 3. the cleaning device of multi-functional exposure machine base station as claimed in claim 1, it is characterised in that described air-dry machine dress Putting (5) includes exhaust column (51), blower fan fixed frame (52), fan body (53), Air Filter (54) and discharge pipe (55), described Blower fan fixed frame (52) is arranged on the left side of exhaust column (51)；Described fan body (53) is arranged on blower fan fixed frame (52) It is internal.
- 4. the cleaning device of multi-functional exposure machine base station as claimed in claim 3, it is characterised in that described Air Filter (54) it is arranged on the right side of blower fan fixed frame (52).
- 5. the cleaning device of multi-functional exposure machine base station as claimed in claim 3, it is characterised in that described discharge pipe (55) it is arranged on the left side of blower fan fixed frame (52).
- 6. the cleaning device of multi-functional exposure machine base station as claimed in claim 1, it is characterised in that described HEPA filter screens (8) and active carbon filter screen (9) is separately mounted to the junction of rhone (6) and drainpipe (7).
- 7. the cleaning device of multi-functional exposure machine base station as claimed in claim 2, it is characterised in that described storage tank (31) preceding surface inserting has observation window (311).
- 8. the cleaning device of multi-functional exposure machine base station as claimed in claim 1, it is characterised in that described gear (44) Engaged with rack (42).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711154256.8A CN107748483A (en) | 2017-11-20 | 2017-11-20 | A kind of cleaning device of multi-functional exposure machine base station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711154256.8A CN107748483A (en) | 2017-11-20 | 2017-11-20 | A kind of cleaning device of multi-functional exposure machine base station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107748483A true CN107748483A (en) | 2018-03-02 |
Family
ID=61250748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711154256.8A Pending CN107748483A (en) | 2017-11-20 | 2017-11-20 | A kind of cleaning device of multi-functional exposure machine base station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107748483A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020220518A1 (en) * | 2019-04-28 | 2020-11-05 | 安徽帝显电子有限公司 | Multifunctional exposure machine base table device |
| CN112205302A (en) * | 2020-09-21 | 2021-01-12 | 叶彭婷 | Cleaning device of domestic animal storehouse |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201840425U (en) * | 2010-06-30 | 2011-05-25 | 廖福彰 | Automatic wallboard cleaner |
| KR20130028181A (en) * | 2011-08-11 | 2013-03-19 | 세메스 주식회사 | Photomask cleaning method |
| CN204113089U (en) * | 2014-09-24 | 2015-01-21 | 赣州圣尼特遮阳科技有限公司 | A kind of solar energy automatically cleaning roller shutter window |
| CN204602672U (en) * | 2015-04-01 | 2015-09-02 | 郑荣虾 | A kind of flexible resin plates automatic rinser |
| CN204892452U (en) * | 2015-06-30 | 2015-12-23 | 浙江天顺生物科技有限公司 | Belt drying equipment's wiper mechanism |
| CN206511951U (en) * | 2016-07-06 | 2017-09-22 | 杭州银江环保科技有限公司 | A kind of effluent treatment plant |
-
2017
- 2017-11-20 CN CN201711154256.8A patent/CN107748483A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201840425U (en) * | 2010-06-30 | 2011-05-25 | 廖福彰 | Automatic wallboard cleaner |
| KR20130028181A (en) * | 2011-08-11 | 2013-03-19 | 세메스 주식회사 | Photomask cleaning method |
| CN204113089U (en) * | 2014-09-24 | 2015-01-21 | 赣州圣尼特遮阳科技有限公司 | A kind of solar energy automatically cleaning roller shutter window |
| CN204602672U (en) * | 2015-04-01 | 2015-09-02 | 郑荣虾 | A kind of flexible resin plates automatic rinser |
| CN204892452U (en) * | 2015-06-30 | 2015-12-23 | 浙江天顺生物科技有限公司 | Belt drying equipment's wiper mechanism |
| CN206511951U (en) * | 2016-07-06 | 2017-09-22 | 杭州银江环保科技有限公司 | A kind of effluent treatment plant |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020220518A1 (en) * | 2019-04-28 | 2020-11-05 | 安徽帝显电子有限公司 | Multifunctional exposure machine base table device |
| CN112205302A (en) * | 2020-09-21 | 2021-01-12 | 叶彭婷 | Cleaning device of domestic animal storehouse |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205628833U (en) | Chemistry experiment room tube cleaning device | |
| CN107457225A (en) | A kind of medical apparatus sterilizing cleaning machine | |
| CN206046525U (en) | A kind of medical apparatus and instruments cleaning machine | |
| CN107748483A (en) | A kind of cleaning device of multi-functional exposure machine base station | |
| CN108940939A (en) | A kind of fingerprint recognition screen having self-cleaning ability | |
| CN106890806A (en) | A kind of machine components automatic flushing device | |
| CN114161269A (en) | Polishing device for manufacturing refined metal products | |
| CN106824884A (en) | A kind of silicon wafer turnover flusher | |
| CN213674569U (en) | Dust collector is used in furniture factory | |
| CN210131481U (en) | Continuous dust collector is used in weaving | |
| CN106110789B (en) | A kind of industrial dedusting device | |
| CN212856773U (en) | Degassing unit is used in gynaecology's nursing | |
| CN205701561U (en) | A kind of energy-saving steam cleaning machine | |
| CN212068215U (en) | Building construction dust collector | |
| CN210874765U (en) | Multistage deodorization equipment | |
| CN210050923U (en) | Air purification device for water quality modifier production workshop | |
| CN209195472U (en) | A kind of sprinkling dust-removing device for development machine underground construction | |
| CN207170333U (en) | A kind of membrane material of specification gimmick reprocesses wiping device | |
| CN220110137U (en) | Sterile purification laboratory with circulating ventilation function | |
| CN210330456U (en) | Water spray cleaning device for door and window glass | |
| CN212489752U (en) | Environmental protection dust particle absorption equipment | |
| CN213965855U (en) | Dust collecting equipment of decorative board production usefulness | |
| CN221014972U (en) | Industrial filter screen cleaning equipment | |
| CN209960851U (en) | Cleaning and drying device for interior of ceramic cup | |
| CN215506196U (en) | Waste gas treatment system of printing ink workshop |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180302 |
|
| RJ01 | Rejection of invention patent application after publication |