CN107727123B - Adjustable type fiber integration Michelson interferometer based on electric heating effect - Google Patents
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35325—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using interferometer with two arms in reflection, e.g. Mickelson interferometer
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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Abstract
The invention provides a modulatable fiber integrated Michelson interferometer based on an electrothermal effect. Including light source, single mode fiber circulator, optic fibre awl, asymmetric two-core optic fibre, electric heat array, power control system, speculum and photoelectric detection device, characterized by: the light source links to each other with the first port of single mode fiber circulator, and the second port of single mode fiber circulator passes through the optic fibre awl and links to each other with the one end of asymmetric two-core fiber, and the third port of single mode fiber circulator links to each other with photoelectric detection device, and the speculum is located the other end of asymmetric two-core fiber, asymmetric two-core fiber include middle core and limit core, the electric heat array is located the cladding of asymmetric two-core fiber limit core one side, the electric heat array is connected with power control system through the wire. The invention has the advantages of simple and compact structure, good system stability, convenient manufacture and low cost, and has wider application prospect in the aspects of optical fiber sensing, optical information detection, external environment monitoring and the like.
Description
Technical Field
The invention relates to an optical fiber sensor, in particular to a modulation type fiber integrated Michelson interferometer.
Background
Since the 70 s in the 20 th century, the optical fiber sensing technology in which the optical fiber is used as a light transmission medium or a sensing medium to sense external information has been developed vigorously, and the optical fiber sensor has been widely used as an optical sensing tool in many fields in daily production and life of people. The sensor is a detection device capable of sensing external environment information, converting the external environment information into an electric signal or other forms of signals, transmitting, processing, storing and displaying the electric signal or other forms of signals, and is an essential sensing tool for assisting human beings to acquire required external information. The traditional electrical sensor has some inherent defects, such as large transmission loss, poor multiplexing capability, susceptibility to electromagnetic interference and the like, and is particularly limited to be applied in some extreme working environments (such as strong electromagnetic fields, strong radiation fields, high-temperature and high-voltage environments and the like). Fiber optic sensors do not suffer from these drawbacks and have gained widespread attention and considerable development in recent decades. Interferometric fiber optic sensors based on phase modulation are a very typical and widely used class of fiber optic sensing technologies. The high-performance optical fiber sensors, such as optical fiber gyroscope, optical fiber hydrophone and optical fiber current transformer, which are currently used, are typical interference type optical fiber sensors, and the appearance of these high-performance interference type optical fiber sensors has promoted the overall progress of optical fiber sensing technology and optical fiber sensing industry.
The phase modulation type optical fiber sensor is also called an interferometric type optical fiber sensor, in which a physical quantity to be measured is obtained by converting a change of an external environment parameter into a phase change of light transmitted through an optical fiber, and the physical quantity to be measured is generally obtained by an interferometric method. Compared with other types of optical fiber sensors, the interference type optical fiber sensor has the most outstanding advantages of high sensitivity, easy multiplexing, good flexibility and high practical value, and sensitive parts of the interference type optical fiber sensor are all formed by optical fibers, and can be designed into various different forms according to requirements.
The main phase modulators at present are piezoelectric ceramic phase modulators and lithium niobate phase modulators.
Disclosure of Invention
The invention aims to provide a modulatable fiber integrated Michelson interferometer based on an electrothermal effect, which has the advantages of simple structure, high integration level, flexible modulation and convenience in manufacturing.
The purpose of the invention is realized as follows:
including light source, single mode fiber circulator, optic fibre awl, asymmetric two-core fiber, electric heat array, power control system, speculum and photoelectric detection device, the light source links to each other with the first port of single mode fiber circulator, and the second port of single mode fiber circulator passes through the optic fibre awl and links to each other with the one end of asymmetric two-core fiber, and the third port of single mode fiber circulator links to each other with photoelectric detection device, and the speculum is located the other end of asymmetric two-core fiber, asymmetric two-core fiber including middle core and limit core, the electric heat array is located the cladding of asymmetric two-core fiber limit core one side, the electric heat array is connected with power control system through the wire.
The present invention may further comprise:
1. the electric heating array comprises a resistive film and electrodes, wherein the resistive film is plated on an optical fiber cladding on one side of an edge core, the resistive film is directly contacted with the optical fiber cladding, the electrodes are deposited on two sides of the upper surface of the resistive film and are contacted with the resistive film, the electrodes are connected with a power supply control system through a lead, an electric heating effect is generated by applying voltage to the resistive film, joule heat generated after the resistive film is electrified causes temperature change of the resistive film, temperature difference exists between the resistive film and the asymmetrical double-core optical fiber and heat conduction is carried out to the inside of the optical fiber, the temperature of two fiber cores in the asymmetrical double-core optical fiber is changed, the refractive index of the asymmetrical double-core optical fiber is changed, the refractive indexes of the two fiber cores in the asymmetrical double-core optical fiber are different, an optical path difference is generated, phase change is generated, the electric heating array is, modulation of the interferometer phase is achieved.
2. The resistance film is deposited on the surface of the asymmetric double-core optical fiber by a mask method and a metal sputtering coating method.
3. For an asymmetric dual core fiber with a diameter of 125 microns, the resistive film width was 200 microns and the electrode size was 15 microns.
4. Each electric heater in the electrothermal array is individually energized by a power control system.
5. The reflecting mirror is a well-cut optical fiber end face or a metal film plated on the optical fiber end face.
The invention provides a modulatable fiber integrated Michelson interferometer based on an electrothermal effect. The light source is connected with a first port of the single-mode optical fiber circulator, a second port of the single-mode optical fiber circulator is connected with one end of the asymmetric double-core optical fiber through an optical fiber cone, a third port of the single-mode optical fiber circulator is connected with the photoelectric detection device, the electric heating array is arranged on one side of the side core of the asymmetric optical fiber, and the reflector is arranged on the other end of the asymmetric double-core optical fiber. The electrothermal array comprises a resistive film and electrodes, wherein the resistive film is directly contacted with an optical fiber cladding, the resistive film is plated on the optical fiber cladding on one side of the edge core, and the electrodes are deposited on two sides of the upper surface of the resistive film, are contacted with the resistive film and are connected with a power supply through a lead. The invention generates an electrothermal effect by applying a voltage to the resistive film. Joule heat can be generated after the resistance film is electrified, so that the temperature of the resistance film is changed, the temperature difference exists between the resistance film and the optical fiber, heat conduction can be carried out towards the inside of the optical fiber, the temperature of two fiber cores in the optical fiber is changed, and the refractive index of the optical fiber is changed. Because the resistance film is plated on one side of the edge core, the temperature changes of the edge core and the middle core are different when heat conduction occurs, so that the two fiber cores in the optical fiber have different refractive indexes, optical path difference is generated, and phase change is generated. The programmable voltage control electric heating array is matched, the refractive index is changed along the axial direction of the optical fiber, the transmission optical path difference is changed, and the phase modulation of the interferometer is realized.
The resistance film in the optical fiber thermo-optical modulator is plated on the cladding layer on one side of the edge core, the film thickness is uniform, the width of the resistance film is smaller than a given size, and the smaller the width of the resistance film is, the higher the modulation precision is (for example, for an optical fiber with the diameter of 125 micrometers, the width of the resistance film can be selected to be 200 micrometers under the environment with good heat dissipation).
The resistance film material is metal, metal oxide, alloy and other materials with resistance property.
The resistance film is deposited on the surface of the optical fiber by a mask preparation technology and a metal sputtering coating technology and is completely contacted with the surface of the optical fiber.
The electrodes are uniformly deposited on both sides of the upper surface of the resistive film and each electrode should have a width less than a given dimension (e.g., for a 125 micron diameter optical fiber, the resistive film width is chosen to be 200 microns and the electrode size is chosen to be 15 microns).
The electrothermal array is connected with an external electrode through a gold wire lead, the external electrode is connected with a voltage control unit, and each electric heater can independently determine the applied voltage through the control unit.
The optical fiber used is an asymmetric dual-core fiber, and the distance between the two cores should be larger than a given size (for example, for an asymmetric dual-core fiber with a diameter of 125 microns, the distance between the cores may be 25 microns to avoid coupling of light between the two cores).
The reflecting mirror is a well-cut optical fiber end face or a metal film plated on the optical fiber end face.
The optical fiber cone is manufactured by performing fusion tapering on a welding spot after core welding of a single-mode optical fiber and an asymmetric double-core optical fiber; the optical fiber taper couples light in the single-mode optical fiber into the middle core and the side core of the asymmetric double-core optical fiber according to a certain splitting ratio, or couples light transmitted in the middle core and the side core into the single-mode optical fiber simultaneously.
The tunability of the interferometer is realized by controlling the number of energized heaters and the magnitude of applied voltage through a programmable control unit.
The interferometer provides a stable packaging and heat dissipation environment through the heat-conducting silica gel and the packaging shell.
The invention utilizes the characteristic that the refractive index of the fiber core in the asymmetric double-core optical fiber changes along with the temperature, completes the change of the optical path difference through electrical modulation, and finally realizes the manufacture of the modulation type fiber integrated Michelson interferometer.
The invention is based on the electrothermal effect and the optical fiber interference principle, utilizes the characteristic that the refractive index of a fiber core in the asymmetric double-core optical fiber changes along with the temperature, obtains phase modulation by changing the voltage applied to the electrothermal film and the number of electrified electrothermal films, and realizes the modulation performance of the Michelson interferometer. The working principle of the present invention is specifically given below by taking the measurement using a broad spectrum light source as an example.
When voltage is applied to two ends of the resistance film, the resistance film generates joule heat under the action of current, and the joule heat is generated according to the formula
Q＝I2Rt
It is known that over time, the more joule heat generated by the electric heating film accumulates, thereby causing a change in the temperature of the resistance film
Q＝cmΔT
Where c is the specific heat of the resistive film, m is the resistive mass, and Δ T is the change in temperature.
The temperature difference exists between the resistance film and the optical fiber after the temperature is raised, so that the heat conduction phenomenon can be caused. The temperature is transmitted along the radial direction of the optical fiber, so that the temperature of the side core and the temperature of the middle core are changed, the thermal balance is finally achieved, the model is discretized through a finite difference method, the nodes are obtained, and according to the law of energy conservation and the Fourier law, each node is provided with
Ei+Eg＝Eo+Es
Wherein E isiIs an energy inflow term; egThe energy generation item is heat released by a heat source in the node within unit time; eoIs an energy output term; esThe term of energy storage variation is the increment of energy in the substance in a unit time node. The numerical solution of the temperature of each node can be calculated by using an iterative method, the temperature distribution in a steady state can be finally obtained, and a temperature distribution image can also be obtained by using simulation software.
A model is built according to fig. 4 and simulation is performed, wherein the resistive film and the electrodes are made of gold, a voltage V is applied to the electrode 6-2-1 on one side, the electrode 6-2-2 on the other side is grounded, the temperature distribution when a steady state is reached is as shown in fig. 5, and the obtained data is analyzed and processed to obtain the refractive index distributions of the two fiber cores as shown in fig. 6 a-6 b.
A change in temperature will cause a change in the refractive index and thus a modulation of the phase of the incident light is achieved. The refractive index n of the fiber is not only a function of the wavelength λ, but also varies with the ambient temperature T and the strain state epsilon in which it is placed. Thus, the fiber refractive index can be generally described by a state function n (λ, T, ε).
Because of factors such as optical fiber material, doping concentration, measuring environment and measuring method, it is difficult to obtain a very accurate temperature coefficient function of refractive index, but through a large number of experimental measurements and demonstrations in the existing literature, the temperature coefficient of refractive index of the optical fiber is about 10-5The magnitude changes in/° c, and the refractive index exhibits a linear change with temperature, excluding interference from other external factors.
Therefore, when the thermal conductivity is stable, there will be a temperature difference between the middle core and the side core of the optical fiber, so there will be a refractive index difference Δ n, so the optical path difference between the two cores becomes Δ nL, where L is the length of the resistance film to be energized.
Since light is reflected at the end face and finally coupled into a single-mode optical fiber to cause interference, 2 Δ nL — m λ is an interference order by the interference theorem. When the applied voltage is changed, the refractive index is changed, and the position of the interference peak of the output spectrum can be modulated by adjusting the number of the electrified heaters.
The invention has the advantages of simple and compact structure, good system stability, convenient manufacture and low cost, and has wider application prospect in the aspects of optical fiber sensing, optical information detection, external environment monitoring and the like.
Drawings
FIG. 1 is a schematic diagram of a tunable fiber-integrated Michelson interferometer apparatus based on the electrothermal effect.
FIG. 2 is a schematic diagram of an electrothermal array structure.
FIG. 3 is a schematic cross-sectional view of an asymmetric two-core fiber.
FIG. 4 is a schematic view of a simulation model.
FIG. 5 is a schematic diagram of the temperature profile in the steady state of thermal conduction.
FIGS. 6 a-6 b are schematic diagrams of the two core index changes after resistive film heating with different periods.
Fig. 7 is a schematic package diagram.
Detailed Description
The invention is described in more detail below by way of example.
FIG. 1 shows an embodiment of a modulatable fiber-integrated Michelson interferometer based on the electrothermal effect. The device comprises a light source 1, single-mode optical fibers 2-1 to 2-3, a single-mode optical fiber circulator 3, an optical fiber cone 4, an asymmetric double-core optical fiber 5, an electrothermal array 6, a voltage control unit 7, a reflector 8 and a photoelectric detection device 9; the light source is connected with a first port of a single-mode optical fiber circulator through a first single-mode optical fiber 2-1, a second port of the single-mode optical fiber circulator is connected with one end of an asymmetric double-core optical fiber 5 through a second single-mode optical fiber 2-2 and an optical fiber cone 4, a third port of the single-mode optical fiber circulator is connected with a photoelectric detection device 9 through a third single-mode optical fiber 2-3, an electric heating array 6 is arranged on one side of a side core of the asymmetric optical fiber, and a reflector 8 is arranged at the other end of the asymmetric double-core optical fiber. The asymmetric double-core optical fiber 5 comprises a middle core 5-1, an edge core 5-2 and an optical fiber cladding, an electric heating array comprises a resistance film 6-1 and electrodes 6-2, the resistance film is directly contacted with the optical fiber cladding, the resistance film is plated on the optical fiber cladding on one side of the edge core, the electrodes are deposited on two sides of the upper surface of the resistance film, contacted with the resistance film and connected with outer electrodes through gold wires, and the outer electrodes are connected with a control power supply. The invention generates an electrothermal effect by applying a voltage to the resistive film. Joule heat can be generated after the resistance film is electrified, so that the temperature of the resistance film is changed, the temperature difference exists between the resistance film and the optical fiber, the heat conduction phenomenon can occur, the temperature of two fiber cores in the optical fiber is changed, and the refractive index of the optical fiber is changed. Because the resistance film is plated on one side of the edge core, when heat conduction occurs, the temperature change of the edge core and the temperature of the middle core are different, and the temperature of the edge core is higher than that of the middle core, so that the refractive indexes of the two fiber cores are different, the optical path difference can be generated, and interference is generated. And the programmable heating subarray is matched to control the change of the refractive index along the axial direction of the optical fiber, so that the transmission optical path is changed, and the phase modulatable of the interferometer is realized.
The resistance film is plated on the cladding on one side of the optical fiber side core in a sputtering coating mode, and the used material has resistance characteristics.
The electrodes are deposited on two sides of the upper surface of the resistive film and are connected with the outer electrodes through the leads, and the outer electrodes are connected with a control power supply. The reflecting mirror is a well-cut optical fiber end face or a metal film plated on the optical fiber end face. The optical fiber cone is obtained by welding a single-mode optical fiber and an asymmetric double-core optical fiber core to core and then performing fused tapering at a welding spot to manufacture the optical fiber cone; the optical fiber taper couples light in the single-mode optical fiber into the middle core and the side core of the asymmetric double-core optical fiber according to a certain splitting ratio, or couples light transmitted in the middle core and the side core into the single-mode optical fiber simultaneously. The light source can be a wide-spectrum light source or a tunable narrow-band light source; the photoelectric detection device is a spectrum analyzer.
In order to realize the adjustability of the output interference spectrum, the invention firstly applies a metal coating sputtering method and plates a layer of resistance film on the specific position of the cladding surface at one side of the edge core of the asymmetric double-core optical fiber through a mask plate. And then correcting the outline of the resistive film by using a photoetching technology. Subsequently, the mask is replaced and moved to a preset position under the control of a computer. And simultaneously replacing the coating material, and manufacturing the electrode by a sputtering coating method. Then the fabricated Michelson interferometer is taken down and put into a given environment for annealing treatment (for example, for the use of nichrome as the resistive film material, after the film coating is completed, the interferometer can be put into an environment of 450-500 ℃ for annealing treatment for 110-130 minutes), the structure of the electrothermal array is shown in FIG. 2, 6-1 is the resistive film, and 6-2 is the deposited electrode.
The fiber taper 4 shown in fig. 1 is obtained by fusion tapering at the junction of a single-mode fiber and an asymmetric double-core fiber. Fig. 7 is a schematic diagram of a package, wherein 10 is a fiber pigtail, 11 is a metal outer electrode connected to a power supply, and 12 is a package housing.
When the device is in operation, the magnitude of joule heat generation can be controlled by controlling the magnitude of the flowing electric signal, so that the refractive index in the optical fiber is changed, and the refractive index change in the two cores under different periods is shown in fig. 6 a-6 b. Therefore, the optical path difference can be changed by adjusting the number of the electrified heaters, and the modulation of the output interference spectrum is realized.
Claims (7)
1. The utility model provides a modulation type fibre integration Michelson interferometer based on electric heat effect, includes light source, single mode fiber circulator, optic fibre awl, asymmetric two-core optic fibre, electric heat array, power control system, speculum and photoelectric detection device, characterized by: the light source is connected with a first port of a single-mode optical fiber circulator, a second port of the single-mode optical fiber circulator is connected with one end of an asymmetric double-core optical fiber through an optical fiber cone, a third port of the single-mode optical fiber circulator is connected with a photoelectric detection device, a reflector is positioned at the other end of the asymmetric double-core optical fiber, the asymmetric double-core optical fiber comprises a middle core and a side core, an electric heating array is positioned on a cladding on one side of the side core of the asymmetric double-core optical fiber, and the electric heating array is connected with a power supply control system through a lead; the system comprises a fiber integration Michelson interferometer and an electrothermal array; the fiber integrated Michelson interferometer consists of a light source, a single-mode fiber, an optical circulator, a bias dual-core fiber and a photoelectric detection device, wherein the Michelson interferometer is formed by tapering a welding point of the single-mode fiber and the bias dual-core fiber and plating a reflecting film on the end face of the bias dual-core fiber; the electrothermal array consists of a resistive film, electrodes, a lead and a power supply control system, wherein the resistive film is plated on the eccentric twin-core optical fiber in an array form, the electrodes are deposited on two sides of the resistive film and are connected with a power supply control end through the lead, the refractive index difference is generated between two fiber cores below the resistive film along the axial direction of the optical fiber by matching the power supply control system, and the flexible modulation of output light is realized by controlling the magnitude of applied voltage and the number of electrified resistive films.
2. The electro-thermal effect based modulatable fiber-integrated Michelson interferometer of claim 1, wherein: the resistance film is plated on the optical fiber cladding on one side of the edge core, the resistance film is directly contacted with the optical fiber cladding, the electrodes are deposited on two sides of the upper surface of the resistance film and are contacted with the resistance film, the electrodes are connected with a power supply control system through leads, the temperature of the resistive film is changed by Joule heat generated after the resistive film is electrified, so that temperature difference exists between the resistive film and the asymmetric double-core optical fiber and heat conduction is carried out to the inside of the optical fiber, the temperature of two fiber cores in the asymmetric double-core optical fiber is changed, the refractive index of the asymmetric double-core optical fiber is changed, the refractive indexes of the two fiber cores in the asymmetric double-core optical fiber are different, an optical path difference is generated, phase change is generated, the programmable voltage control electric heating array is matched, the refractive index is changed along the axial direction of the asymmetric double-core optical fiber, the transmission optical path difference is changed, and the modulation of the phase of the interferometer is realized.
3. The electro-thermal effect based modulatable fiber-integrated Michelson interferometer of claim 2, wherein: the resistance film is deposited on the surface of the asymmetric double-core optical fiber by a mask method and a metal sputtering coating method, and is made of metal, metal oxide, alloy and other materials with resistance property.
4. The electro-thermal effect based modulatable fiber-integrated Michelson interferometer of claim 3, wherein: the eccentric double-core optical fiber consists of a middle core and a side core, wherein the middle core is positioned in the middle of the optical fiber cores, the distance between the side core and the middle core is required to ensure that light of the two optical fiber cores cannot be coupled, and the distance between the optical fiber cores is 25 microns.
5. The tunable fiber-integrated Michelson interferometer based on electrothermal effect according to any one of claims 1 to 4, wherein: each electric heater in the electrothermal array is individually energized by a power control system.
6. The tunable fiber-integrated Michelson interferometer based on electrothermal effect according to any one of claims 1 to 4, wherein: the reflecting mirror is a well-cut optical fiber end face or a metal film plated on the optical fiber end face.
7. The electro-thermal effect based modulatable fiber-integrated Michelson interferometer of claim 5, wherein: the reflecting mirror is a well-cut optical fiber end face or a metal film plated on the optical fiber end face.
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| CN201710896517.7A CN107727123B (en) | 2017-09-28 | 2017-09-28 | Adjustable type fiber integration Michelson interferometer based on electric heating effect |
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| CN201710896517.7A CN107727123B (en) | 2017-09-28 | 2017-09-28 | Adjustable type fiber integration Michelson interferometer based on electric heating effect |
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| CN109656032A (en) * | 2018-12-12 | 2019-04-19 | 桂林电子科技大学 | Fiber based on miniature piezoelectric transducer array integrates Mach-Zehnder intensity modulator |
| CN110927113A (en) * | 2019-10-29 | 2020-03-27 | 桂林电子科技大学 | Fiber integrated hydrogen sensor and manufacturing method thereof |
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| CN101369084B (en) * | 2008-10-07 | 2010-10-20 | 哈尔滨工程大学 | Interference type integral photo-signal modulator and preparation thereof |
| CN101923102B (en) * | 2010-05-17 | 2013-06-05 | 哈尔滨工程大学 | Fiber accelerometer based on Mach-Zehnder interferometer |
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