CN107727051A - A kind of reversal process linearity measurer based on 6 DOF adjustment - Google Patents
A kind of reversal process linearity measurer based on 6 DOF adjustment Download PDFInfo
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- CN107727051A CN107727051A CN201711214332.XA CN201711214332A CN107727051A CN 107727051 A CN107727051 A CN 107727051A CN 201711214332 A CN201711214332 A CN 201711214332A CN 107727051 A CN107727051 A CN 107727051A
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 97
- 238000005259 measurement Methods 0.000 claims description 33
- 210000002683 foot Anatomy 0.000 claims description 21
- 238000009434 installation Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000003252 repetitive effect Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000004579 marble Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to a kind of linearity measurer, specifically a kind of reversal process linearity measurer based on sextuple resetting, including sextuple adjustment platform, reversion leveling ruler and micro-displacement sensor.Platform is adjusted by 6 DOF, it is possible to achieve invert the sextuple pose adjustment of straight line；There is the point identification ball of straight line two at reversion leveling ruler both ends, and measuring the point identification ball of straight line two by micro-displacement sensor determines reversion linear position, realizes high-precision resetting twice before and after reversion straight line reversion, further realizes high-precision straightness error separating and measuring.
Description
Technical field
The invention belongs to dimensional measurement field, and in particular to a kind of linearity measurer, refer specifically to based on sextuple adjustment
Reversal process linearity measurer.
Background technology
The measuring method of linearity has been broadly divided into benchmark and without the major class of benchmark two.Have the verticality measuring method of benchmark by
It is limited to reference precision, it is difficult to remain in that high-acruracy survey in large-size.Verticality measuring method without benchmark is substantially former
Reason is error separation method, and reversal process is one of which error separation method.The straight line degree measurement of reversal process for from principle
Precision is unrestricted, but inverts the repetitive positioning accuracy meeting restraining error separation accuracy of straight line in actual use so that
Reversal process verticality measuring method is undesirable in actual use.
The content of the invention
The present invention solves the technical problem of provide a kind of reversal process linearity measurer based on 6 DOF adjustment
With reversion straight line mark measurement and localization method, effectively solve the problems, such as the repetitive positioning accuracy in reversal process straight line degree measurement, enter
And realize to large-size direct dimension high accuracy absolute measurement.
The reversal process linearity measurer based on 6 DOF adjustment of the present invention, including sensor installing arm, sensor peace
Seat, micro-displacement sensor, reversion leveling ruler, sextuple adjustment platform are filled, it is characterized in that, the micro-displacement sensor is arranged on sensor
In mounting seat, sensor installation seat is fixed on sensor fixed arm, and sensor fixed arm is arranged on tested guide rail, can be with quilt
Survey guide rail movement；The sextuple adjustment platform base is made up of three support feets and supported at three point platform substrate, two of which branch
Spike is symmetrically distributed in platform side, and another support feet is distributed among platform opposite side；The sextuple adjustment platform homophony
Overall to be made up of two three-dimensional micro-displacement platforms and three leveling ruler support balls, three-dimensional micro-displacement platform is fixed on supported at three point platform substrate
Both sides, two three-dimensional micro-displacement platform top bases support ball for fixed with a leveling ruler respectively；The reversion leveling ruler is positioned over three and put down
In chi support；There is the point identification ball of straight line two at reversion leveling ruler both ends.
Straight line 6 DOF pose adjustment is inverted to be realized by 6 DOF adjustment platform, it is three-dimensional by the support feet of bottom three and both the above
Micro-displacement platform is realized；Specifically adjustment process is：The support feet of that side of bottom dual-gripper pin is adjusted, can adjust reversion leveling ruler rolling
Angle beta；Two three-dimensional micro-displacement platforms of synchronous adjustment, it can adjust the displacement in three directions of reversion leveling ruler x, y, z；Adjust it in the x-direction
In a three-dimensional micro-displacement platform, can adjust reversion leveling ruler deflection angle θ；One of them three-dimensional micro-displacement platform is adjusted in the z-direction, it is adjustable
Whole reversion leveling ruler angle of pitch α.
There is the point identification ball of straight line two at reversion leveling ruler both ends, and the position measurement for by sphere invert straight line positions.
The position measurement positioning for inverting straight line is carried out using following steps：
A, moving guide rail makes the point identification ball of micro-displacement sensor alignment terminating point straight line two, adjusts two above sextuple adjustment platform
Individual three-dimensional micro-displacement platform, make the point identification ball of straight line two in micro-displacement sensor measurement range；
B, moving guide rail makes the point identification ball of micro-displacement sensor alignment other end straight line two, adjusts sextuple adjustment platform, makes straight line
Two point identification balls are in micro-displacement sensor measurement range；
C, moving guide rail makes micro-displacement sensor measurement point on leveling ruler, and z directions adjust two three-dimensional micro-displacement platforms and simultaneously observed
Micro-displacement sensor indicating value, if indicating value changes, sextuple adjustment mesa base support feet is adjusted, until micro-displacement sensor is vertical
Indicating value is kept constant when direction is moved；
D, moving guide rail makes the point identification ball of micro-displacement sensor alignment starting point straight line two, observation micro-displacement sensor indicating value and edge
The sextuple adjustment platform of Z-direction adjustment, moves the point identification ball vertical direction of straight line two, until being adjusted to micro-displacement sensor indicating value
Minimum position；
E, moving guide rail makes the point identification ball of micro-displacement sensor alignment other end straight line two, and repeat step four operates;
F, moving guide rail makes micro-displacement sensor alignment starting point straight line Endpoint ID ball and moves along the rail direction adjustment 6 DOF
Platform is adjusted, the point identification ball of straight line two is moved along the rail direction small range movement, until being adjusted to micro-displacement sensor indicating value
Minimum position.
The beneficial effects of the invention are as follows：
1）The sextuple position and attitude of leveling rulers is inverted by sextuple adjustment three support feets of mesa base and two micro-displacement platform adjustment,
Simple in construction, adjustment is rapid, convenient high-precision resetting twice before and after realizing reversion.
2）Straight line positioning is carried out using the point identification ball of straight line two, reversion straight line repetitive positioning accuracy is high；
3）Realize that inverting straight line positioning measurement and reversion outline of straight line twice measures, and reduces reversion using same displacement transducer
Position error caused by linear position measurement reference system change, improve the precision of reversal process straightness error separating and measuring.
Brief description of the drawings
Fig. 1 is the general structure schematic diagram of the present invention；
Fig. 2 is in Fig. 1 of the present invention 2 decomposing schematic representation；
Fig. 3 is in Fig. 1 of the present invention 4,5 decomposing schematic representation；
In figure：1st, sensor fixed arm 2, sensor installation seat 3, wing nut 4, reversion leveling ruler 5, sextuple adjustment platform
6th, marble platform 7, guide rail 8, hold-down bolt 21, opening chuck 22, bolt 23, nut 24, metallic channel 25, sensing
Device mounting seat 26, bolt 27, micro-displacement sensor 41, reversion leveling ruler 42, the point identification ball 43 of straight line two, reversion straight line
51st, leveling ruler support ball 52, three-dimensional micro-displacement platform 53, support feet 54, supported at three point platform substrate 55, bolt.
Embodiment
1 to 3 pair of apparatus of the present invention elaborates below in conjunction with the accompanying drawings.So that advantages and features of the invention can be easier to
It is readily appreciated by one skilled in the art, apparent is clearly defined so as to be made to protection scope of the present invention.
The reversal process linearity measurer based on 6 DOF adjustment of the present invention, including sensor installing arm 1, sensor peace
Seat 2, micro-displacement sensor 27, reversion leveling ruler 4, sextuple adjustment platform 5 are filled, it is characterized in that, the micro-displacement sensor 27 is installed
On sensor installation seat, sensor installation seat 25 is fixed on sensor fixed arm 1, and sensor fixed arm 1 is arranged on tested
On guide rail 8, it can be moved with tested guide rail；The sextuple adjustment base of platform 5 is by three support feets 53 and supported at three point platform base
Plate 54 is formed, and two of which support feet is symmetrically distributed in platform side, and another support feet is distributed among platform opposite side；Institute
State sextuple adjustment platform 5 homophony entirety to be made up of two three-dimensional micro-displacement platforms 52 and three leveling rulers support balls 51, three-dimensional micro-displacement
Platform 52 is fixed on the both sides of supported at three point platform substrate 54, and two three-dimensional top bases of micro-displacement platform 52 fix 1 and 2 leveling rulers respectively
Support ball 51；The reversion leveling ruler 4 is positioned in three leveling ruler supports 51；There is the point identification ball 42 of straight line two at reversion leveling ruler 4 both ends.
Reversion straight line 6 DOF pose adjustment is realized by 6 DOF adjustment platform 5, by the support feet 54 of bottom three and both the above
Three-dimensional micro-displacement platform 52 is realized；Specifically adjustment process is：The support feet 53 of that side of bottom dual-gripper pin 53 is adjusted, can adjust anti-
Turn the roll angle β of leveling ruler 4；The three-dimensional micro-displacement platform 52 of synchronous adjustment two, it can adjust the displacement in tri- directions of reversion leveling ruler 4x, y, z；
One of them three-dimensional micro-displacement platform 52 is adjusted in the x-direction, can adjust reversion leveling ruler 4 deflection angle θ；Adjust one of them in the z-direction
Three-dimensional micro-displacement platform 52, it can adjust reversion leveling ruler 4 angle of pitch α.
There is the point identification ball 42 of straight line two at reversion leveling ruler 41 both ends, and the position measurement for by sphere invert straight line 43 is determined
Position.
The position measurement positioning of reversion straight line 43 uses following steps：
A, moving guide rail 8 makes micro-displacement sensor 27 be directed at the point identification ball 42 of terminating point straight line two, adjusts on sextuple adjustment platform 5
Two three-dimensional micro-displacement platforms 52 in face, make the point identification ball 42 of straight line two in the measurement range of micro-displacement sensor 27；
B, moving guide rail 8 makes micro-displacement sensor 27 be directed at the point identification ball 42 of other end straight line two, adjusts sextuple adjustment platform 5,
Make the point identification ball 42 of straight line two in the measurement range of micro-displacement sensor 27；
C, moving guide rail makes the measurement point of micro-displacement sensor 27 on leveling ruler, and z directions adjust two three-dimensional micro-displacement platforms 52 simultaneously
The indicating value of micro-displacement sensor 27 is observed, if indicating value changes, the sextuple adjustment bottom support feet 53 of platform 5 is adjusted, until micro-displacement passes
The indicating value when vertical direction moves of sensor 27 keeps constant；
D, moving guide rail 8 makes micro-displacement sensor 27 be directed at the point identification ball 42 of starting point straight line two, observes micro-displacement sensor 27
Indicating value simultaneously adjusts sextuple adjustment platform 5 along Z-direction, moves the vertical direction of two point identification ball of straight line 42, until being adjusted to microbit
The indicating value minimum position of displacement sensor 27；
E, moving guide rail 8 makes micro-displacement sensor 27 be directed at the point identification ball 42 of other end straight line two, and repeat step four operates;
F, moving guide rail 8 makes micro-displacement sensor 27 be directed at starting point straight line Endpoint ID ball 42 and moves along the rail direction adjustment
6 DOF adjustment platform 5, the point identification ball 42 of straight line two is set to move along the rail direction small range movement, until being adjusted to micro-displacement sensing
The indicating value minimum position of device 27.
The reversal process linearity measurer based on 6 DOF adjustment of the present invention, using the device to same on reversion leveling ruler
Bar straight line measures twice before and after being inverted, and can realize high-precision straight line degree measurement by error separate.The device can
The straight line degree measurement of leveling ruler and guide rail is realized simultaneously.
Based on the reversal process linearity measurer of 6 DOF adjustment, including sextuple adjustment platform, reversion leveling ruler and micro-displacement
Sensor.The sextuple adjustment mesa base has three support feets, there is two three-dimensional micro-displacement platforms above；The three-dimensional micro-displacement
Platform is bolted to the supported at three point platform substrate both sides of sextuple adjustment platform, has three leveling ruler branch on three-dimensional micro-displacement platform
Support ball；The reversion leveling ruler is positioned on three leveling ruler support balls, and reversion leveling ruler both ends are fixed with the point identification ball of straight line two；It is described
Micro-displacement sensor is arranged on sensor installation seat, and sensor installation seat is fixed in sensor installing arm, sensor installation
Arm, which is fixed on tested guide rail, to be moved with guide rail.
The step of using described in the present embodiment measurement apparatus to carry out straight line degree measurement for：
1st, straight line positioning and measurement before inverting：
1. micro-displacement sensor is installed on sensor installation seat when using；Sensor installation seat is fixed on into sensor to consolidate
On the side of fixed arm；Sensor installing arm is fixed on guide rail.
2. 6 DOF adjustment platform is positioned in marble platform；Reversion leveling ruler equipped with the point identification ball of straight line two is put
It is placed on three leveling rulers support ball of sextuple adjustment table top, measures reversion leveling ruler working face face micro-displacement sensor
Face.
3. the sextuple adjustment mesa base support feet of adjustment, makes reversion leveling ruler measuring surface and the measuring surface of micro-displacement sensor
It is parallel.
4. moving guide rail makes micro-displacement sensor move to one of point identification ball center position of straight line two and static,
The sextuple adjustment platform both the above three-dimensional micro-displacement platform of adjustment makes the point identification ball of straight line two in micro-displacement sensor measurement range.
5. vertically adjusting three-dimensional micro-displacement platform to the minimum position of micro-displacement sensor indicating value, now sensor is being just
To the point identification ball sphere center position of straight line two.
6. moving guide rail makes micro-displacement sensor move to the point identification ball center position of opposite side straight line two and static.
7. repeat the above steps 5., 6..
8. carry out unilateral outline of straight line measurement.
2nd, straight line positioning and measurement after inverting：
1. by sensor installation seat together with micro-displacement sensor（Both need not be assembled and disassembled）Remove, be fixed on sensor and fix
On the opposite side of arm.
2. reversion leveling ruler is inverted into 180 ° around y-axis, make reversion leveling ruler measuring surface face micro-displacement sensor measuring surface.
3. repeat invert before straight line positioning with measurement 3. -7..
4. the outline of straight line measurement after being inverted.
3rd, data analysis：
Measurement data is separated using reversal process straightness error, the straight line of leveling ruler linearity and guide rail vertical plane can be obtained
Degree.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair
The equivalent structure or equivalent flow conversion that bright specification and accompanying drawing content are made, or directly or indirectly it is used in other related skills
Art field, is included within the scope of the present invention.
Claims (4)
1. a kind of reversal process linearity measurer based on 6 DOF adjustment, including sensor installing arm（1）, sensor installation seat
（2）, micro-displacement sensor（27）, reversion leveling ruler（4）, sextuple adjustment platform（5）, it is characterized in that, the micro-displacement sensor
（27）On sensor installation seat, sensor installation seat（25）It is fixed on sensor fixed arm（1）On, sensor fixed arm
（1）Installed in tested guide rail（8）On, it can be moved with tested guide rail；The sextuple adjustment platform（5）Base is by three support feets
（53）With supported at three point platform substrate（54）Composition, two of which support feet are symmetrically distributed in platform side, another support feet
It is distributed among platform opposite side；The sextuple adjustment platform（5）Homophony is overall by two three-dimensional micro-displacement platforms（52）With three
Leveling ruler supports ball（51）Composition, three-dimensional micro-displacement platform（52）It is fixed on supported at three point platform substrate（54）Both sides, two three-dimensionals are micro-
Displacement platform（52）Top base fixes 1 and 2 leveling ruler support balls respectively（51）；The reversion leveling ruler（4）It is positioned over three leveling rulers
Support（51）On；Invert leveling ruler（4）There is the point identification ball of straight line two at both ends（42）.
A kind of 2. reversal process linearity measurer based on 6 DOF adjustment according to claim 1, it is characterised in that：Instead
Turn straight line 6 DOF pose adjustment and platform is adjusted by 6 DOF（5）Realize, by the support feet of bottom three（54）It is micro- with both the above three-dimensional
Displacement platform（52）Realize；Specifically adjustment process is：Adjust bottom dual-gripper pin（53）The support feet of that side（53）, can adjust anti-
Turn leveling ruler（4）Roll angle β；Two three-dimensional micro-displacement platforms of synchronous adjustment（52）, can adjust reversion leveling ruler（4）Three directions of x, y, z
Displacement；One of them three-dimensional micro-displacement platform is adjusted in the x-direction（52）, can adjust reversion leveling ruler（4）Deflection angle θ；Adjust in the z-direction
One of them whole three-dimensional micro-displacement platform（52）, can adjust reversion leveling ruler（4）Angle of pitch α.
A kind of 3. reversal process linearity measurer based on 6 DOF adjustment according to claim 1, it is characterised in that：Instead
Turn leveling ruler（41）There is the point identification ball of straight line two at both ends（42）, reversion straight line is carried out by sphere（43）Position measurement positioning.
A kind of 4. reversal process linearity measurer based on 6 DOF adjustment according to claim 3, it is characterised in that：Instead
Turn straight line（43）Position measurement positioning using following steps carry out：
A, moving guide rail（8）Make micro-displacement sensor（27）It is directed at the point identification ball of terminating point straight line two（42）, adjust sextuple adjustment
Platform（5）Two three-dimensional micro-displacement platforms above（52）, make the point identification ball of straight line two（42）In micro-displacement sensor（27）Measurement
In the range of；
B, moving guide rail（8）Make micro-displacement sensor（27）It is directed at the point identification ball of other end straight line two（42）, adjust sextuple adjustment
Platform（5）, make the point identification ball of straight line two（42）In micro-displacement sensor（27）In measurement range；
C, moving guide rail makes micro-displacement sensor（27）For measurement point on leveling ruler, z directions adjust two three-dimensional micro-displacement platforms
（52）And observe micro-displacement sensor（27）Indicating value, if indicating value changes, adjust sextuple adjustment platform（5）Bottom support feet（53）,
Until micro-displacement sensor（27）When vertical direction moves, indicating value is kept constant；
D, moving guide rail（8）Make micro-displacement sensor（27）It is directed at the point identification ball of starting point straight line two（42）, observation micro-displacement biography
Sensor（27）Indicating value simultaneously adjusts sextuple adjustment platform along Z-direction（5）, make the point identification ball of straight line two（42）Vertical direction moves, directly
To being adjusted to micro-displacement sensor（27）Indicating value minimum position；
E, moving guide rail（8）Make micro-displacement sensor（27）It is directed at the point identification ball of other end straight line two（42）, repeat step four grasps
Make;
F, moving guide rail（8）Make micro-displacement sensor（27）It is directed at starting point straight line Endpoint ID ball（42）And the side of moving along the rail
To the sextuple adjustment platform of adjustment（5）, make the point identification ball of straight line two（42）Direction small range movement is moved along the rail, until being adjusted to
Micro-displacement sensor（27）Indicating value minimum position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711214332.XA CN107727051B (en) | 2017-11-28 | 2017-11-28 | Inversion method straightness measuring device based on six-dimensional adjustment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711214332.XA CN107727051B (en) | 2017-11-28 | 2017-11-28 | Inversion method straightness measuring device based on six-dimensional adjustment |
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| Publication Number | Publication Date |
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| CN107727051A true CN107727051A (en) | 2018-02-23 |
| CN107727051B CN107727051B (en) | 2024-02-13 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006322A (en) * | 2019-04-25 | 2019-07-12 | 中国工程物理研究院机械制造工艺研究所 | Testing apparatus for verticality and method between a kind of movement of two linear axis of lathe |
| CN112964169A (en) * | 2021-03-11 | 2021-06-15 | 中国工程物理研究院机械制造工艺研究所 | High-precision measuring device and method for straightness of cylindrical bus |
| CN113390340A (en) * | 2021-06-15 | 2021-09-14 | 中国工程物理研究院机械制造工艺研究所 | Method for detecting spatial position of spherical center of corner spherical surface in discontinuous region |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121676U (en) * | 1992-01-03 | 1992-11-11 | 天津大学 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
| JP2001336927A (en) * | 2000-05-30 | 2001-12-07 | Tokimec Inc | Device for measuring longitudinal-section shape |
| CN1789901A (en) * | 2005-12-05 | 2006-06-21 | 成都司塔瑞测控工程有限公司 | Three-coordinate calibrating and measuring instrument |
| US20080257023A1 (en) * | 2007-04-18 | 2008-10-23 | Hexagon Metrology Ab | Scanning probe with constant scanning speed |
| CN101571374A (en) * | 2009-06-15 | 2009-11-04 | 合肥工业大学 | Error detecting system of minitype high accuracy three coordinate measuring machine |
| CN103033161A (en) * | 2011-10-10 | 2013-04-10 | 上海三菱电梯有限公司 | Device and method of guide rail straightness measuring |
| CN104296716A (en) * | 2014-10-11 | 2015-01-21 | 中国人民解放军国防科学技术大学 | Ultra-precise straightness measuring method based on single-measuring-head error separation |
| CN106017366A (en) * | 2016-07-22 | 2016-10-12 | 中国工程物理研究院机械制造工艺研究所 | Straightness comprehensive detection device |
| CN106863014A (en) * | 2017-02-24 | 2017-06-20 | 大连理工大学 | A kind of five-axle number control machine tool linear axis geometric error detection method |
| CN107263133A (en) * | 2017-08-02 | 2017-10-20 | 四川明日宇航工业有限责任公司 | A kind of offline centering system and its aligning method for centering workpiece |
| CN207610690U (en) * | 2017-11-28 | 2018-07-13 | 中国工程物理研究院机械制造工艺研究所 | A kind of reversal process linearity measurer based on 6 DOF adjustment |
-
2017
- 2017-11-28 CN CN201711214332.XA patent/CN107727051B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121676U (en) * | 1992-01-03 | 1992-11-11 | 天津大学 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
| JP2001336927A (en) * | 2000-05-30 | 2001-12-07 | Tokimec Inc | Device for measuring longitudinal-section shape |
| CN1789901A (en) * | 2005-12-05 | 2006-06-21 | 成都司塔瑞测控工程有限公司 | Three-coordinate calibrating and measuring instrument |
| US20080257023A1 (en) * | 2007-04-18 | 2008-10-23 | Hexagon Metrology Ab | Scanning probe with constant scanning speed |
| CN101571374A (en) * | 2009-06-15 | 2009-11-04 | 合肥工业大学 | Error detecting system of minitype high accuracy three coordinate measuring machine |
| CN103033161A (en) * | 2011-10-10 | 2013-04-10 | 上海三菱电梯有限公司 | Device and method of guide rail straightness measuring |
| CN104296716A (en) * | 2014-10-11 | 2015-01-21 | 中国人民解放军国防科学技术大学 | Ultra-precise straightness measuring method based on single-measuring-head error separation |
| CN106017366A (en) * | 2016-07-22 | 2016-10-12 | 中国工程物理研究院机械制造工艺研究所 | Straightness comprehensive detection device |
| CN106863014A (en) * | 2017-02-24 | 2017-06-20 | 大连理工大学 | A kind of five-axle number control machine tool linear axis geometric error detection method |
| CN107263133A (en) * | 2017-08-02 | 2017-10-20 | 四川明日宇航工业有限责任公司 | A kind of offline centering system and its aligning method for centering workpiece |
| CN207610690U (en) * | 2017-11-28 | 2018-07-13 | 中国工程物理研究院机械制造工艺研究所 | A kind of reversal process linearity measurer based on 6 DOF adjustment |
Non-Patent Citations (2)
| Title |
|---|
| LIANG TIAN等: "Influence of Surface Radius Curvature on Laser Plasma Propulsion with Ablation Water Propellant", PLASMA SCIENCE AND TECHNOLOGY, vol. 18, no. 10, pages 1034 - 1037, XP020309033, DOI: 10.1088/1009-0630/18/10/11 * |
| 李凯 等: "基于加权最小二乘法的空间目标模拟器平面度测量与补偿研究", 光电子・激光, vol. 27, no. 02, pages 162 - 170 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006322A (en) * | 2019-04-25 | 2019-07-12 | 中国工程物理研究院机械制造工艺研究所 | Testing apparatus for verticality and method between a kind of movement of two linear axis of lathe |
| CN110006322B (en) * | 2019-04-25 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Device and method for detecting perpendicularity between two linear axes of machine tool |
| CN112964169A (en) * | 2021-03-11 | 2021-06-15 | 中国工程物理研究院机械制造工艺研究所 | High-precision measuring device and method for straightness of cylindrical bus |
| CN113390340A (en) * | 2021-06-15 | 2021-09-14 | 中国工程物理研究院机械制造工艺研究所 | Method for detecting spatial position of spherical center of corner spherical surface in discontinuous region |
| CN113390340B (en) * | 2021-06-15 | 2022-07-22 | 中国工程物理研究院机械制造工艺研究所 | Method for detecting spatial position of spherical center of corner spherical surface in discontinuous region |
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