CN106323202A - Linear feed system's guide rail linearity measuring apparatus and method - Google Patents

Linear feed system's guide rail linearity measuring apparatus and method Download PDF

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Publication number
CN106323202A
CN106323202A CN201610859456.2A CN201610859456A CN106323202A CN 106323202 A CN106323202 A CN 106323202A CN 201610859456 A CN201610859456 A CN 201610859456A CN 106323202 A CN106323202 A CN 106323202A
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guide rail
displacement
laser
laser collimator
collimator
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CN106323202B (en
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刘志刚
洪军
赵列斌
李逸群
郭俊康
刘鹏
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Xian Jiaotong University
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Xian Jiaotong University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a linear feed system's guide rail linearity measuring apparatus and method wherein the reference coordinate system of the linear feed system's guide rail uses the vertical direction as Z axis, the moving direction of the sliding block as Y axis, and the direction horizontally perpendicular and away from the guide rail as X axis. The apparatus comprises a first measuring clamp and a second measuring clamp fixedly arranged on the sliding block respectively; a laser collimator fixedly arranged on the first measuring clamp; a No. 2 displacement sensor and a No. 3 displacement sensor symmetrically arranged in the X direction of the second measuring clamp; and a No. 1 displacement sensor on the Z direction of the second measuring clamp. The optical path of the laser collimator is parallel to the Y direction of the first measuring clamp. The center line of the No. 1 displacement sensor passes through the center point of the laser collimator. The three displacement sensors are located on the plane perpendicular to the Y direction. The No. 2 displacement sensor and the No. 3 displacement sensor are used to measure the displacement gap between the guide rail and the Y direction of the sliding block respectively. The No. 1 displacement sensor and the laser collimator are used to measure the displacement gap between the sliding block and the Z direction of the guide rail.

Description

The guide rail linearity measurement apparatus of a kind of linear feeding system and method
Technical field
The present invention relates to the measurement of machine finish, the guide rail linearity of a kind of linear feeding system measures dress Put and method.
Background technology
Machine finish is the key criterion of evaluation lathe combination property, the processing of the most external advanced precision machine tool Precision has reached 1 μm～0.1 μm, and the machining accuracy of ultraprecise rank lathe is already above 0.1 μm, and this indicates machine industry Machining accuracy come into the nanoscale epoch.And no matter China is protected in precision, concordance at the precision machine tool of this precision grade The aspects such as card all also exist obvious gap with the leading level in the world.Research shows that machine tooling source of error mainly includes quasistatic Error, such as geometric error, Thermal Error；Error in the course of processing, such as error of cutter, jig error etc.；Detection error, such as Uncertain error, alignment error etc..
During precision machine tool assembles, measuring method and instrument Rational choice play vital work to whole assembling With, measuring method can effectively promote efficiency and the precision of whole assembly technology the most accurately.Existing several guide rail linearity Measuring method can not meet the certainty of measurement requirement of high-precision machine tool assembly technology, the guide rail geometry of a kind of efficiently and accurately The measuring method of error is for linear feeding system precision guarantee and the actual application of forecast model, particularly high-precision machine tool Assembly technology optimization is all particularly important.Meanwhile, in actual production, the horizontally and vertically direction of linear feeding system middle guide Straightness error be main precision index in accuracy Design and assembling link, these errors are all in design and assembling process In can be with directly actuated precision item, and the aimed at precision of the linear feeding system i.e. kinematic error of workbench is directly to adjust Control, this also brings obstacle for accuracy guarantee in linear feeding system.
Summary of the invention
For problems of the prior art, the present invention provides the guide rail linearity of a kind of linear feeding system to measure dress Put and method, improve the certainty of measurement of guide rail linearity and the simplification of measurement.
The present invention is to be achieved through the following technical solutions:
The guide rail frame of reference of the guide rail linearity measurement apparatus cathetus feed system of a kind of linear feeding system is With vertical direction as Z axis, the moving direction of slide block is Y-axis, and horizontal vertical is X-axis away from the direction of guide rail；
It includes the first measured material and the second measured material being separately fixed on slide block；It is fixed on the first measured material On laser collimator, be symmetrically arranged at the second measured material X No. two displacement transducers upwards and third place move sensing Device, and the displacement transducer being arranged in the second measured material Z-direction；The light path of laser collimator and the first measured material Y-direction is parallel；The centrage of a number displacement transducer is through the central point of laser collimator；Two, three, displacement transducer is positioned at In the same plane being perpendicular to Y-direction；No. two displacement transducers and third place displacement sensor are respectively used to measure guide rail and slide block Between the displacement gaps of Y-direction；A number displacement transducer and laser collimator are used for measuring between slide block and guide rail between Z-direction displacement Gap.
Preferably, the first measured material is fixed on two slide blocks becoming gap to arrange；Second measured material is arranged on two In the gap of individual slide block, and it is fixed in the first measured material.
Preferably, two, three and displacement transducers all use eddy current displacement sensor, and certainty of measurement is 0.25um.
Preferably, the measurement distance of laser collimator is 0-15m, and certainty of measurement is 0.1um.
The guide rail linearity measuring method of a kind of linear feeding system, comprises the steps,
Step 1, sets up measurement apparatus as claimed in claim 1, determine the first measured material and the second measured material with And three geometrical relationships between displacement transducer and laser collimator, set up corresponding geometric model；
Step 2, according to the geometric model set up, using the laser optical path of laser collimator as benchmark, passes through laser alignment The linearity that instrument measurement obtains guide rail is as follows,
The measured value of vertical direction is ez(yi)=Bz+mz(yi)-h1-d1(yi)；
The measured value of horizontal direction is
Wherein, BzIt is laser datum and the distance on guide rail vertical direction, mz(yi) it is collimator vertical direction reading, h1 It is a displacement transducer receiving plane and the distance on laser collimator center vertical direction, d1(yi) it is a displacement transducer Reading；
BxIt is the distance of laser datum and guide rail horizontal direction, GxIt is the difference of the measured value of guide rail left and right sides, l2It is two Number displacement transducer and the distance in laser collimator horizontal direction, l3For third place displacement sensor and laser collimator level side Spacing upwards, mx(yi) it is laser collimator vertical direction reading, d2(yi) it is the reading of No. two displacement transducers, d3(yi) it is The reading of third place displacement sensor.
Preferably, in step 2,
Gx=e2x(yi)-e1x(yi),
And e2x(yi)=Bx+mx(yi)+l2-d2(yi), e1x(yi)=Bx+mx(yi)-l3+d3(yi),
Wherein, e2x(yi) and e1x(yi) it is respectively the measured value for guide rail left and right side, mx(yi) it is that laser collimator erects Nogata is to reading, d2(yi) and d3(yi) it is No. two, the reading of third place displacement sensor.
Preferably, in step 1, also comprise the steps,
Step 1.1, according to the geometric model set up, sets up straight-line displacement error and three displacement transducer measured amount and dress Put the numerical relationship model between design size；
Step 1.2, according to the mathematical model set up, analyzes Measuring origin analysis vertically and horizontally；
Step 1.3, according to analysis on Source of Error formula, design laser collimator and three sensors and guide rail and two folders Relative size size between tool.
Further, step 1.3 obtaining, displacement sensor plane accepts plane with laser collimator receptor, At stroke to the rigging error of distance less than or equal to 4mm.
Further, step 1.3 obtain, h1And h2At least above 25mm.
Compared with prior art, the present invention has a following useful technique effect:
Device of the present invention is mainly by laser collimator, measurement apparatus fixture and three displacement transducer three part groups Becoming, laser collimator and three displacement transducers are fixed on two guide rail slide blocks by measurement apparatus fixture, and measurement apparatus exists Moving back and forth on guide rail, wherein laser collimator records device for the upper surface and lateral distance measuring slide block position Distance such that it is able to be simply accurately obtained guide rail linearity, simple in construction, easy to use.
The method of the invention uses a laser as measuring basis, improves the accuracy of measuring basis；Pass through laser alignment Instrument measures slide block movement straightness error as indirection reference；The method improves the certainty of measurement of guide rail linearity and measurement Simplification.The difference between guide rail linearity error and slide block movement straightness error is compared, by surveying by displacement transducer Amount amount compensates and replaces the measurement error that causes of guide rail linearity error with slide block movement straightness error, thus several to its device What relation accurately defines, it is ensured that certainty of measurement.
Further, by the transitive relation between geometric error and the kinematic error of workbench of analysis guide rail, with this Based on build linear feeding system kinematic accuracy forecast model, obtain two linearitys of linear feeding system by experiment Error, carries out instructing restriction, by measurement apparatus to the linear feeding system accuracy Design theorized and assembly process planning Design reduces the angular error impact on straightness error as far as possible.
Accompanying drawing explanation
Fig. 1 is the relation signal in present example between vertical direction geometric error and collimator and sensor reading Figure.
Fig. 2 is the relation signal in present example between horizontal direction geometric error and collimator and sensor reading Figure.
Fig. 3 a is the structure front view of measurement apparatus in present example.
Fig. 3 b is measurement apparatus sectional view at displacement transducer in present example.
Fig. 4 a is measurement apparatus installation site front view in present example.
Fig. 4 b is measurement apparatus installation site sectional view at displacement transducer in present example.
Fig. 5 is experimental measurement method and checking flow chart in present example.
Each coordinate system of measurement apparatus when Fig. 6 is the measurement of present example cathetus degree analysis on Source of Error vertical direction Position relationship.
In figure: the first measured material 1, the second measured material 2, No. two displacement transducers 3, third place displacement sensor 4, No. one Displacement transducer 5, laser collimator 6.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in further detail, described in be explanation of the invention and It not to limit.
Measurement apparatus of the present invention, as shown in Figure 3 a and Figure 3 b shows, it includes connecting laser collimator 6 and guide rail slide block The first measured material 1, fix the second measured material 2 of No. two displacement transducers 3 and third place displacement sensor 4, measure guide rail And No. two displacement transducers 3 of Y-direction displacement gaps and third place displacement sensor 4 between slide block, be used for measuring slide block and guide rail it Between a displacement sensing 5 of Z-direction displacement gaps and laser collimator 6.Its frame of reference is with vertical direction as Z axis, sliding The moving direction of block is Y-axis, and horizontal vertical is X-axis away from the direction of guide rail.
As shown in figures 4 a and 4b, in the installation process of measurement apparatus, LY, LX, LZRepresent that laser collimator receives respectively The length, width and height of device, are determined by laser collimator model, l1It is sensor measurement plane and the connecing of laser collimator receptor By plane stroke to distance, rotate, in order to reduce, the error that causes, device uses symmetric design when horizontal error is measured 's；l2Represent the distance of No. two displacement sensor heads and laser collimator receptor central horizontal direction because use right Claiming design, third place displacement sensor is measured the distance in head and laser collimator receptor central horizontal direction and is all l2；h1And h2Point Do not represent one, No. two displacement sensor heads and the laser collimator receptor center distance at vertical direction.In order to determine The size of these critical sizes needs to analyze the error during measuring guide rail both vertically as well as horizontally geometric error respectively and comes Source and error transfer relationship.
Method of the present invention, as it is shown in figure 5, initially set up corresponding geometric model, the experimental provision that design is relevant, In order to detect the straightness error of guide rail, next need to set up relevant mathematical model, derive in the x-direction and the z-direction Error and the mathematical relationship of other parameters, draw the factor affecting guide rail linearity error, and next step is contemplated to eliminate other The factor impact on straightness error, is designed guide rail linearity error measuring means critical size, thus eliminates The error that additive factors brings.Next horizontal direction linearity and vertical direction straightness error are originated and be analyzed, After utilize three-coordinates measuring machine to verify.
Concrete, the present invention comprises the steps.
1, assemblied guide rail straight line degree measurement principle geometric model based on laser collimator design:
In order to realize the measurement of guide rail linearity, need some dimensional parameters of appropriate design device, need the chi of design Very little including, No. two displacement transducers 3 and laser collimator 6 benchmark are in distance h of vertical direction1, laser datum erects with guide pass Nogata to distance BZ, distance l measuring head and laser collimator 6 receptor central horizontal direction of No. two displacement transducers2, Distance h measuring head and laser collimator receptor center in the vertical direction of No. two displacement transducers2.Here select to swash Model GEPARD5-M4 of collimator, size is 140mm × 50mm × 50mm, and it measures distance is 0-15m, measures essence Degree is 0.1um, selects model C S05 of displacement transducer, and certainty of measurement is 0.25um.
2, assemblied guide rail straight line degree measurement principle Design of Mathematical Model based on laser collimator:
By the design to experimental provision, can be concluded that by geometrical relationship and utilize laser collimator to record Horizontal direction on reading be mxY (), the reading on vertical direction is mz(y), two, three, displacement transducer 3,4,5 cloth It is placed in the same plane being perpendicular to Y-axis, if the range reading that three sensors record respectively is d1(y)、d2(y)、d3(y), Rotation error in ignoring device motor process ideally, as a example by vertical direction, ez(yi)、mz(yi)、d1(yi) Between relation as shown in Equation 1, its geometrical relationship is as shown in Figure 1.
ez(yi)=Bz+mz(yi)-h1-d1(yi) (1)
h1It is a displacement transducer and the distance on laser collimator vertical direction, BzIt is that laser datum is vertical with guide rail Distance on direction, is all fixed value, so measurement apparatus is at yiDuring position, the measured value e of guide rail vertical directionz(yi)、mz (yi) it is collimator vertical direction reading, d1(yi) it is the reading of a displacement transducer.Utilize the water that laser collimator 6 records Reading square upwards is mxY (), the reading on vertical direction is mzY (), two, three, displacement transducer 3,4,5 cloth is placed on In the same plane being perpendicular to Y-axis, if the range reading that three sensors record respectively is d1(y)、d2(y)、d3Y (), is neglecting Slightly the rotation error in device motor process is ideally, as a example by horizontal direction, and ex(yi)、mx(y)、d1Between (y) Relation geometrical relationship as shown in Equation 2 is as shown in Figure 2:
Measured value e for left and right side guide rail2x(yi), e1x(yi), collimator vertical direction reading is mx(yi) and two Number, the reading d of third place displacement sensor2(yi)、d3(yiRelation between) is:
e2x(yi)=Bx+mx(yi)+l2-d2(yi) (2)
e1x(yi)=Bx+mx(yi)-l3+d3(yi) (3)
For the precise linear guide of the finished product used in linear feeding system assembles, same guide rail is around The geometric error of side guide has good concordance, it is possible to think: Gx=e2x(yi)-e1x(yi) so having:
e x ( y i ) = B x + 1 2 ( G x + l 2 - l 3 ) + m x ( y i ) - d 2 ( y i ) - d 3 ( y i ) 2 - - - ( 4 )
Wherein: l2It is No. two displacement transducers and the distance in laser collimator horizontal direction, l3For third place displacement sensor With the spacing in laser collimator horizontal direction, BxIt is the distance of laser alignment and guide rail horizontal direction, ex(yi) it is guide rail level The measured value in direction, mx(yi) it is collimator vertical direction reading, d2(yi) it is the reading of No. two displacement transducers, d3(yi) it is three The reading of number displacement transducer.
Concrete error to the present invention as follows is analyzed optimizing.
1, assemblied guide rail straight line degree measurement vertically and horizontally Measuring origin based on laser collimator Analyze:
In order to computation and measurement value needs design to place laser collimator mobile terminal and the peace of three displacement transducers accurately Assembling device.Need installation dimension design and the laser quasi utilizing the analysis on Source of Error measured to determine three displacement transducers respectively The installation dimension of straight instrument.
Experimental provision is in the mobile terminal of guide rail slide block and fixes the measuring cell location arrangements and installation dimension held Determination；Assume that device only exists the skew in horizontally and vertically direction in motor process, and during have ignored assembling The error that causes of assembling, but in a practical situation, whole device is when moving on rails, except on horizontally and vertically direction Kinematic error, there is also around X-axis rotation error i.e. pitch error α, rotates i.e. roll error β around Y-axis, and rotation error is i.e. about the z axis Run-out error γ, the value of laser collimator actual measurement and the measurement amount of displacement transducer all can be caused measurement by rotation error effect Error, so in the design process of device, needing to be designed for critical size and mechanism, to reduce rotation error.Whole Critical size in individual device refers mainly to the position of laser collimator and laying of three sensors.
Critical size mainly has: Ly, Lx and Lz represent the length, width and height of laser collimator receptor respectively, is by laser alignment Instrument model determines；l1Sensor measurement plane with laser collimator receptor accept plane stroke to distance, for Reducing and rotate the error caused, device uses symmetric design when horizontal error is measured；l2Represent No. two displacement transducers Measuring the distance of head and laser collimator receptor central horizontal direction, because using symmetric design, third place displacement sensor is surveyed Amount head and distance l in laser collimator receptor central horizontal direction3It is all l2；h1And h2Represent No. one and No. two displacements respectively Sensor head and laser collimator receptor center are in the distance of vertical direction.In order to determine the size of these critical sizes Need to analyze the source of error during measuring guide rail both vertically as well as horizontally geometric error and error transfer relationship respectively.
As it is shown in figure 1, in relation between vertical direction geometric error and collimator and sensor reading, wherein h1It is one The distance in number displacement transducer receiving plane and laser collimator center vertical direction, BzIt is laser alignment and guide rail vertical direction Distance, is all fixed value, so measurement apparatus is at yiDuring position, the measured value e of guide rail vertical directionz(yi)、mz(yi) for collimating Instrument vertical direction reading, d1(yi) it is the reading of a displacement transducer.
As in figure 2 it is shown, in relation between horizontal direction geometric error and collimator and sensor reading, wherein l2It is two Number displacement transducer and the distance in laser collimator horizontal direction, l3For third place displacement sensor and laser collimator level side Spacing upwards, BxIt is the distance of laser alignment and guide rail horizontal direction, ex(yi) it is the measured value of guide rail horizontal direction, mx(yi) For collimator vertical direction reading, d2(yi) it is the reading d of No. two displacement transducers3(yi) it is the reading of third place displacement sensor.
As shown in Figure 6, when straightness error source analysis vertical direction is measured, the position of each coordinate system of measurement apparatus is closed System.First in whole measurement system, coordinate system is set up, if the coordinate system of laser optical path is coordinate system P1, light path is Y-axis；In standard The receiving plane of straight instrument sets up coordinate system P2, XOZ plane overlaps with receiving plane, initial point and receiving plane center superposition；Coordinate system P3For The coordinate system of the receiving plane of a number displacement transducer, initial point overlaps with the receiving plane center of circle, and ZOY plane overlaps with receiving plane；Sit Mark system P4For the top plane of guide rail, ZOY plane and top planes overlapping.
Concrete, analyze the source of error during measuring guide rail both vertically as well as horizontally geometric error and error propagation Relation, first gives the initial value of some parameters, utilizes the position relationship between different coordinates, by the side of homogeneous coordinate transformation Method, from coordinate system P of laser optical path1It is delivered to coordinate system P of guide rail measuring surface4, transformation for mula is as follows:
The measurement error of vertical direction is just to solve for coordinate system P4Relative to coordinate system P1Side-play amount and reason at vertical direction Opinion side-play amount z '4=d1+mz+Δz23Between difference, then utilize the principle of homogeneous coordinate transformation, due to reality measure during Between each coordinate system, deflection angle error is the least,
So having:
Wherein,Δxmn、Δymn、ΔzmnDenotation coordination system P respectivelymFormer Point is at PnIn position, αmn、βmn、γmnDenotation coordination system P respectivelymRelative to PnThe anglec of rotation of X, Y, Z axis, finally try to achieve:
p 4 = T 3 4 p 3 = T 3 4 T 2 3 T 1 2 p 1 - - - ( 5 )
Draw:
z4=-α23α34mz+α34γ23mx-β23β34mz+α34Δy23-β23mx-β34mx-β34Δx23+d1+mz+Δz23 (6)
Because theoretical side-play amount
z′4=d1+mz+Δz23 (7)
So the main error size of vertical direction is:
ξz≈α34l1-β23mx-β34mx (8)
In like manner can obtain in the horizontal direction
x′4=(-β2′3β3′4-γ2′3γ3′4)mx+(α2′3γ3′4+β2′3+β34)mz+β3′4h2-γ3′4l1+l2-d2+mx (9)
Because theoretical side-play amount is
x4=d1+mz+Δz23 (10)
So the main error size of horizontal direction is:
ξx≈(β2′3+β3′4)mz+β3′4h2-γ3′4l1 (11)
2, the critical size design of assemblied guide rail measuring straightness error device based on laser collimator:
By analyzing source of error vertically and horizontally, it can be seen that mainly have at vertical direction source of error α34、β23、β34、mx、l1Five compositions, main design size is l1, l1It is center and the laser of a displacement transducer The receiving surface of collimator is zero, at utmost to reduce herein in stroke upwards distance, design phase in structure designs l1Impact on certainty of measurement, during the assembling of device, wants l equally1Rigging error the least, due to α34≤2 ×10-4Rad it requires l1Rigging error less than or equal to 4mm, in this case by α34l1The error size caused is less than 1 μ m。
Source of error mainly has β ' in the horizontal direction23、β'34、γ'34、mz、h2、l1, six compositions, wherein β '23、β'34、 γ'34For error, h can not be eliminated2Mainly determined by the physical dimension of laser collimator, it is necessary at least above 25mm, use one During individual displacement transducer, this fractional error is due to arm of force h2Long, it is exaggerated the torsional error of measurement apparatus and creates error.
Can be seen that if placing a displacement transducer again, owing to the arm of force of the two is long in the symmetric position of guide rail simultaneously Degree is all h2, and the anglec of rotation is identical, β3′4=β3″4, so the size of the increment of both these fractional errors is identical, and direction phase Instead, this shows that use Measured by Twin Displacement Transducer measures average and can effectively eliminate h2Produce in measuring in the horizontal direction Error l2=l3。
In like manner analyze γ3′4l1The measuring method understanding dibit displacement sensor can also offset this fractional error.So herein It is designed with the geometric error of Measured by Twin Displacement Transducer amount guide rail.
The measurement error of horizontal direction, due to the homo-effect of symmetrical structure, eliminates the parameters of structural dimension shadow to it Ring, only affected by device rigging error, require can greatly improve measurement further by strict assembly technology Precision.
The concrete linearity obtained the present invention as follows is verified.
Line slideway measuring straightness error method analysis on Uncertainty:
The guide rail linearity measuring method formed based on laser collimator and displacement transducer is carried out analysis on Uncertainty, Table 1 represents that the measurement standard of laser collimator each measurement position is poor.
The measurement standard difference unit μm of table 1 laser collimator each measurement position
The measurement standard difference unit μm of table 2 displacement transducer each measurement position
This measurement apparatus measurement single-point uncertainty for horizontally and vertically direction is may determine that according to Tables 1 and 2.Combine On, the bessel method in the assessment method of establishing criteria uncertain A class, it may be determined that the level of two guide rails in this time measuring As shown in table 3 with the uncertainty of measurement of vertical direction:
The uncertainty unit μm that table 3 measurement apparatus is this time measured
In sum: use a kind of guide rail linearity being made up of laser collimator and displacement transducer of the present invention to measure Method, can effectively measure the straightness error of guide rail during straight-line feed, thus be linear feeding system kinematic accuracy Forecast model application in the actual production of linear feeding system is laid a good foundation.

Claims (9)

1. the guide rail linearity measurement apparatus of a linear feeding system, it is characterised in that the guide rail benchmark of linear feeding system Coordinate system is with vertical direction as Z axis, and the moving direction of slide block is Y-axis, and horizontal vertical is X-axis away from the direction of guide rail；
Described measurement apparatus includes the first measured material (1) and the second measured material (2) being separately fixed on slide block, is fixed on Laser collimator (6) in first measured material (1), is symmetrically arranged at the second measured material (2) X No. two displacements upwards Sensor (3) and third place displacement sensor (4), and the displacement transducer being arranged in the second measured material (2) Z-direction (5)；The light path of laser collimator (6) is parallel with the first measured material (1) Y-direction；The centrage of a number displacement transducer (5) passes through The central point of laser collimator (6)；Two, three, displacement transducer (3,4,5) is positioned at the same plane being perpendicular to Y-direction；
No. two displacement transducers (3) and third place displacement sensor (4) are respectively used to measure between guide rail and slide block between the displacement of Y-direction Gap；
A number displacement transducer (5) and laser collimator (6) are used for measuring Z-direction displacement gaps between slide block and guide rail.
The guide rail linearity measurement apparatus of a kind of linear feeding system the most according to claim 1, it is characterised in that first Measured material (1) is fixed on two slide blocks becoming gap to arrange；Second measured material (2) is arranged on the gap of two slide blocks In, and be fixed in the first measured material (1).
The guide rail linearity measurement apparatus of a kind of linear feeding system the most according to claim 1, it is characterised in that two, Three and displacement transducers (3,4,5) all use eddy current displacement sensor, and certainty of measurement is 0.25um.
The guide rail linearity measurement apparatus of a kind of linear feeding system the most according to claim 1, it is characterised in that laser The measurement distance of collimator (6) is 0-15m, and certainty of measurement is 0.1um.
5. the guide rail linearity measuring method of a linear feeding system, it is characterised in that comprise the steps,
Step 1, sets up measurement apparatus as claimed in claim 1, determines the first measured material and the second measured material and three Geometrical relationship between individual displacement transducer and laser collimator, sets up corresponding geometric model；
Step 2, according to the geometric model set up, using the laser optical path of laser collimator as benchmark, is surveyed by laser collimator The linearity measuring guide rail is as follows,
The measured value of vertical direction is ez(yi)=Bz+mz(yi)-h1-d1(yi)；
The measured value of horizontal direction is
Wherein, BzIt is laser datum and the distance on guide rail vertical direction, mz(yi) it is collimator vertical direction reading, h1It it is No. one Displacement transducer receiving plane and the distance on laser collimator center vertical direction, d1(yi) it is the reading of a displacement transducer；
BxIt is the distance of laser datum and guide rail horizontal direction, GxIt is the difference of the measured value of guide rail left and right sides, l2It is No. two positions Displacement sensor and the distance in laser collimator horizontal direction, l3For on third place displacement sensor and laser collimator horizontal direction Spacing, mx(yi) it is laser collimator vertical direction reading, d2(yi) it is the reading of No. two displacement transducers, d3(yi) it is No. three The reading of displacement transducer.
The guide rail linearity measuring method of a kind of linear feeding system the most according to claim 5, it is characterised in that step In 2,
Gx=e2x(yi)-e1x(yi),
And e2x(yi)=Bx+mx(yi)+l2-d2(yi), e1x(yi)=Bx+mx(yi)-l3+d3(yi),
Wherein, e2x(yi) and e1x(yi) it is respectively the measured value for guide rail left and right side, mx(yi) it is laser collimator vertically side To reading, d2(yi) and d3(yi) it is No. two, the reading of third place displacement sensor.
The guide rail linearity measuring method of a kind of linear feeding system the most according to claim 5, it is characterised in that step In 1, also comprise the steps,
Step 1.1, according to the geometric model set up, sets up straight-line displacement error and sets with three displacement transducer measured amount and device Numerical relationship model between meter size；
Step 1.2, according to the mathematical model set up, analyzes Measuring origin analysis vertically and horizontally；
Step 1.3, according to analysis on Source of Error formula, design laser collimator and three sensors and guide rail and two fixtures it Between relative size size.
The guide rail linearity measuring method of a kind of linear feeding system the most according to claim 7, it is characterised in that by step Rapid 1.3 obtain, and displacement sensor plane accepts plane with laser collimator receptor, at stroke to the assembling of distance by mistake Difference is less than or equal to 4mm.
The guide rail linearity measuring method of a kind of linear feeding system the most according to claim 7, it is characterised in that by step Rapid 1.3 obtain, h1And h2At least above 25mm.
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