CN107703332A - A kind of bearing calibration of piezoelectric scanner scanning range and system based on sweep speed - Google Patents
A kind of bearing calibration of piezoelectric scanner scanning range and system based on sweep speed Download PDFInfo
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- CN107703332A CN107703332A CN201710790075.8A CN201710790075A CN107703332A CN 107703332 A CN107703332 A CN 107703332A CN 201710790075 A CN201710790075 A CN 201710790075A CN 107703332 A CN107703332 A CN 107703332A
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
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- G01Q40/02—Calibration standards and methods of fabrication thereof
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Abstract
The invention discloses a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed and system, method to include：Control piezoelectric scanner to carry out actual scanning imagery to standard sample with a series of different given sweep speeds, and the relation of the actual scanning range of piezoelectric scanner and sweep speed is fitted according to the scanning imagery result of reality；Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.System includes actual scanning imaging and fitting module and actual scanning scope correction module.The present invention is fitted by the actual scanning imaging results of piezoelectric scanner to the relation of sweep speed and scanning range, and then actual scanning scope correction is carried out according to the result of fitting, influence of the scan speed change to piezoelectric scanner scanning range is effectively eliminated, more accurately testing result can be obtained.It the composite can be widely applied to microscope field.
Description
Technical field
The present invention relates to microscope field, especially a kind of piezoelectric scanner scanning range correction side based on sweep speed
Method and system.
Background technology
From after nineteen eighty-two PSTM (STM) appearance, and it is similar to have developed a series of activities principle successively
New microtechnic, mainly including AFM (AFM), horizontal force microscope (LFM), magnetic force microscopy (MFM), quiet
Force microscope (EFM), NFM (SNOM), piezoelectricity force microscope (PFM), scan probe acoustics microscope
(SPAM) etc., because they are all that sample is scanned using probe, while detect scanning process middle probe and sample
Interaction (interaction force between such as sample-probe), obtain sample relevant nature (such as pattern, frictional force, magnetic domain knot
Structure etc.), thus it is referred to as scanning probe microscopy (SPM).
Scanning probe microscopy is by controlling probe to scan sample surfaces, synchronous detection and the phase of record probe and sample
Interaction signal, so as to obtain the surface information of sample, as shown in Figure 1.In Fig. 1,1 is sample, and 2 be probe.
Said in principle, as shown in Fig. 2 system is by controlling probe to scan n rows to the specific region on sample surface, often
The interaction signal of row collection n point probes and sample, so that it may obtain the sample surface information of n × n, region pixel.
In scanning probe microscopy field, sweep speed represents typically using scanning line frequency (unit is Hz), such as scans speed
Spend for 2Hz, its physical significance is exactly to scan 2 rows each second, so, for the sample surface morphology picture of 1 512 × 512 pixel
For, it needs 256 seconds could scanning collection completion.
The sweep speed of scanning probe microscopy is all configured by user in sample detection, and can be at any time
Change.Theoretically, sweep speed is slower, and obtained picture quality is better, but excessively slow sweep speed can cause detection time
Lengthen, this aspect can reduce detection efficiency, on the other hand, also can cause image serious distortion because of system thermal drift.Therefore, examine
During survey, setting of the operator to sweep speed, it is necessary to according to the sample characteristics of for example (time stability and environmental sensitivity of such as sample
Deng), instrument state characteristic (such as used by mode of operation and probe mechanical property), many factors such as operating efficiency requirement enter
Row considers.
In order to reach nano level resolution ratio, scanning probe microscopy is substantially using piezoelectric, driving probe and
Sample makees three-dimensional relative motion and is scanned imaging, and in scanning probe microscopy, the drive device is referred to as scanner.Pressure
The operation principle of electroceramics scanner (abbreviation piezoelectric scanner) is the inverse piezoelectric effect using piezoelectric, i.e. piezoelectric exists
The accurate control to realize electric signal to displacement can be deformed in the presence of electric field.At present, scanning probe microscopy uses
Piezoelectric scanner mainly has two kinds：Platform scanner and single piezo-ceramic tube type based on piezoelectric pile driving and flexible hinge structure
Scanner.In both structures, scanning probe microscopy all controls piezoelectric scanner to be transported in X-Y plane by voltage signal
It is dynamic, drive probe or sample to be scanned, obtain the interaction information of probe and sample room, and according to interaction information
Change, control piezoelectric ceramics (piezoelectric pile or piezoelectric ceramic tube) (stretch), risen with offsetting the surface of sample up and down in Z-direction motion
Volt, the interaction of probe and sample room is set to keep constant.
Ideally, the displacement of piezoelectric ceramics is only related to electric-field intensity, and electric-field intensity can be by changing piezoelectricity
Voltage between ceramic electrode is controlled.But creep (straining the stability to the time) in itself be present in piezoceramic material,
Moreover, the scanner as scanning probe microscopy, piezoelectric ceramics (either piezoelectric pile or piezoelectric ceramic tube) must be carried out
Complicated construction packages could drive probe or sample to be moved, and package casing and piezoelectric have in itself it is certain
Quality, therefore, the actual displacement of piezoelectric scanner except related to the amplitude of variation of driving voltage, also with the rate of change of voltage
Correlation, same voltage change amplitude, the rate of change of voltage is faster, and the actual displacement of piezoelectric scanner is smaller.
By taking currently used Sample Scan working method as an example, the scanning range of piezoelectric scanner must all use before dispatching from the factory
The standard sample of known structure is strictly demarcated.So-called standard sample, be exactly structure and yardstick known to sample, generally have
There is sample known to strict periodic structure and cycle yardstick.But in actual use, due to scanner actual scanning scope with
Sweep speed (being determined by the voltage changing rate of driving scanner) is related, therefore, theoretically, actual inspection is being carried out to sample
During survey, unless sweep speed when sweep speed is set as demarcating with scanner is equal, otherwise, obtained testing result is just deposited
In certain error.
Fig. 3 is given using existing scanning probe microscopy (the CSPM5500 types of such as basis nanometer Instrument Ltd.
Scanning probe microscopy) two-dimentional standard sample of the cycle as 2um is detected using 0.5Hz~40.0Hz different scanning speed
The result images of gained.In Fig. 3, scanning probe microscopy employs the piezoelectric ceramics tube scanner that scanning range is 16um.
As seen from Figure 3, as sweep speed is accelerated, the cycle of contained sample in the image of piezoelectric scanner scanning gained
Number of structures gradually tails off (result of this two width figure of 0.5Hz and 40.0Hz is particularly evident), that is to say, that with sweep speed
Accelerate, the actual scanning scope of piezoelectric scanner diminishes.Therefore if the scope that changes of sweep speed is larger, then piezoelectric scanner
Scanning range change clearly.
The scanning probe microscopy of early stage is typically all used for the nano- yardstick measure and sign of material in scientific research, detection
When, the setting range of sweep speed is smaller, typically all between 1~5Hz, therefore because of measurement error caused by scan speed change
It can control in smaller scope.But with the development of science and technology, significant change has occurred for situation, on the one hand, by
In calculation process and signal acquisition chips such as CPU, DSP, FPGA, high speed analog-to-digital conversion (ADC) and high-speed digital-analog conversions (DAC)
Can the automatic control technology such as significant increase, advanced PID be widely applied to scanning probe microscopy, while realize accurate control and
Quick response is possibly realized, and the sweep speed of instrument is significantly improved；On the other hand, the application field of scanning probe microscopy
Obtain very big expansion, in scientific research, except traditional test-material yardstick characterizes, be also widely used in dynamic process (such as biology
Process) detection；Using upper, scanning probe microscopy is also widely used in fields such as semiconductor, Precision Machinings industry
On-line checking and quality control, detection efficiency also have higher requirements；All these, requiring the sweep speed of instrument has more
Wide adjustable extent.At present, the scanning probe microscopy of main flow, its sweep speed is general all in 0.1~20Hz, and some is even
0.1~100Hz can be reached.Because the adjustable extent of sweep speed increases, discounting for sweep speed to piezoelectric scanning
This factor of the influence of device scanning range, the result for detecting to obtain will likely have larger error.Actual result can from Fig. 3
See, the scanning range of piezoelectric scanner when sweep speed is 1Hz, scanning range when than sweep speed being 10Hz big 10% is left
It is right.
, can not effective school however, still lack the scanning range bearing calibration of effective piezoelectric scanner in the industry at present
Just because sweep speed change cause piezoelectric scanner scanning range change and caused by measurement error, it is not accurate enough, meet not
High accuracy requirement of the people to scanning probe microscopy testing result.
The content of the invention
In order to solve the above technical problems, it is an object of the invention to：A kind of accurate, the piezoelectricity based on sweep speed is provided
Scanner scanning range bearing calibration.
Another object of the present invention is to：A kind of accurate, the piezoelectric scanner scanning range based on sweep speed is provided
Correction system.
The technical solution used in the present invention is：
A kind of piezoelectric scanner scanning range bearing calibration based on sweep speed, comprises the following steps：
Piezoelectric scanner is controlled to carry out actual scanning imagery to standard sample with a series of different given sweep speeds,
And the relation of the actual scanning range of piezoelectric scanner and sweep speed is fitted according to the scanning imagery result of reality；
Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained, and combines the relation fitted
The actual scanning scope of piezoelectric scanner is corrected.
Further, the control piezoelectric scanner is carried out actual with a series of different given sweep speeds to standard sample
Scanning imagery, and the actual scanning range of piezoelectric scanner and sweep speed are fitted according to the scanning imagery result of reality
The step for relation, specifically include：
To piezoelectric scanner to be calibrated, standard sample is used to carry out reality with a series of different given sweep speeds
Scanning imagery, obtain the actual scanning scope that piezoelectric scanner to be calibrated corresponds to each sweep speed；
Correspond to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated, intended using approximating method
Close out the relation curve or relation function of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed.
Further, the approximating method is polynomial fitting method.
Further, the actual scanning speed for obtaining piezoelectric scanner when being detected to sample, and combine
The step for actual scanning scope of the relation pair piezoelectric scanner fitted is corrected, specifically includes：
A kind of calibration method as reality is selected from offline postprocessing correction method and on line emendation method；
Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection,
And the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Further, it is described that reality of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection
Border sweep speed, and the step for actual scanning scope of relation pair piezoelectric scanner fitted is corrected is combined, specifically
Including：
After scanning probe microscopy obtains the testing result of sample, sample is obtained by the way of offline
Sweep speed in testing result；
According to the actual scanning model of piezoelectric scanner used in the sweep speed of acquisition and the scanning probe microscopy fitted
The relation with sweep speed is enclosed, off-line calibration is carried out to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy,
And then the testing result after sample calibration is obtained according to the actual scanning scope after off-line calibration.
Further, it is described that reality of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection
Border sweep speed, and the step for actual scanning scope of relation pair piezoelectric scanner fitted is corrected is combined, specifically
Including：
It is online to obtain reality of the piezoelectric scanner when being detected to sample used in scanning probe microscopy in real time
Sweep speed；
According to piezoelectric scanner used in the actual scanning speed obtained in real time online and the scanning probe microscopy fitted
Actual scanning range and the relation of sweep speed, enter to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy
Row on-line calibration, and then the testing result of sample is obtained according to the actual scanning scope after on-line calibration in real time.
Another technical scheme for being taken of the present invention is：
A kind of piezoelectric scanner scanning range correction system based on sweep speed, including：
Actual scanning is imaged and fitting module, for controlling piezoelectric scanner with a series of different given sweep speeds pair
Standard sample carries out actual scanning imagery, and fits the actual scanning of piezoelectric scanner according to the scanning imagery result of reality
The relation of scope and sweep speed；
Actual scanning scope correction module, for obtaining piezoelectric scanner actually sweeping when being detected to sample
Speed is retouched, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Further, the actual scanning imaging includes with fitting module：
Actual scanning imaging unit, for piezoelectric scanner to be calibrated, using standard sample with a series of different
Given sweep speed carries out actual scanning imagery, obtains the reality that piezoelectric scanner to be calibrated corresponds to each sweep speed
Scanning range；
Fitting unit, for corresponding to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated,
The relation curve or relation of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed are fitted using approximating method
Function.
Further, the actual scanning scope correction module includes：
Selecting unit, for selecting a kind of school as reality from offline postprocessing correction method and on line emendation method
Quasi- method；
Unit is corrected, for obtaining piezoelectric scanner when being detected to sample according to the calibration method of selection
Actual scanning speed, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Further, the correction unit includes：
Off-line scan speed obtains subelement, for after scanning probe microscopy obtains the testing result of sample,
The sweep speed in the testing result of sample is obtained by the way of offline；
Off-line calibration subelement, for piezoelectricity used in the sweep speed according to acquisition and the scanning probe microscopy fitted
The relation of the actual scanning range of scanner and sweep speed, to the actual scanning of piezoelectric scanner used in scanning probe microscopy
Scope carries out off-line calibration, and then obtains the detection knot after sample calibration according to the actual scanning scope after off-line calibration
Fruit.
The beneficial effects of the method for the present invention is：Including control piezoelectric scanner with a series of different given sweep speeds
Actual scanning imagery is carried out to standard sample, and sweeping for piezoelectric scanner reality is fitted according to the scanning imagery result of reality
Retouch the relation of scope and sweep speed and obtain actual scanning speed of the piezoelectric scanner when being detected to sample,
And the step of being corrected with reference to the actual scanning scope of the relation pair piezoelectric scanner fitted, it is contemplated that sweep speed is to pressure
The influence of electrical scanner actual scanning scope, the method for employing fitting correction, it is imaged by the actual scanning of piezoelectric scanner
As a result the relation of sweep speed and scanning range is fitted, and then actual scanning scope school is carried out according to the result of fitting
Just, influence of the scan speed change to piezoelectric scanner scanning range is effectively eliminated, more accurately testing result can be obtained.Enter
One step, including a kind of step of the calibration method as reality is selected from offline postprocessing correction method and on line emendation method
Suddenly, the scanning model of offline postprocessing correction method or on line emendation method to piezoelectric scanner can flexibly be selected according to being actually needed
Enclose and be corrected, more flexibly and applicability it is wider.
The beneficial effect of system of the present invention is：Including actual scanning imaging and fitting module and actual scanning scope school
Positive module, it is contemplated that influence of the sweep speed to piezoelectric scanner actual scanning scope, the method for employing fitting correction, pass through
The actual scanning imaging results of piezoelectric scanner are fitted to the relation of sweep speed and scanning range, and then according to fitting
As a result actual scanning scope correction is carried out, effectively eliminates influence of the scan speed change to piezoelectric scanner scanning range, energy
Obtain more accurately testing result.Further, actual scanning scope correction module includes selecting unit, and energy basis is actually needed spirit
It is living that the scanning range of piezoelectric scanner is corrected from offline postprocessing correction method or on line emendation method, more flexibly
And applicability is wider.
Brief description of the drawings
Fig. 1 is the structural representation of existing scanning probe microscopy；
Fig. 2 is theoretical scanning pattern schematic diagram when existing scanning probe microscopy detects；
Fig. 3 be use existing scanning probe microscopy using 0.5Hz~40.0Hz different scanning speed to the cycle as 2 μm
Two-dimentional standard sample detected one group of obtained scanning result image；
Fig. 4 is a kind of step flow chart of the piezoelectric scanner scanning range bearing calibration based on sweep speed of the present invention；
Fig. 5 is probe scanning schematic diagram；
Fig. 6 is Sample Scan schematic diagram；
Fig. 7 is a kind of creep curve figure of typical piezoelectric ceramic tube；
Fig. 8 is a kind of graph of a relation of the actual scanning range of piezoelectric scanner and sweep speed；
Fig. 9 is the pass of the actual scanning range of the piezoelectric scanner obtained using 3 order polynomial fitting process and sweep speed
It is curve map；
Figure 10 is the pass of the actual scanning range of the piezoelectric scanner obtained using 4 order polynomial fitting process and sweep speed
It is curve map；
Figure 11 is the pass of the actual scanning range of the piezoelectric scanner obtained using 5 order polynomial fitting process and sweep speed
It is curve map.
Embodiment
A kind of reference picture 4, piezoelectric scanner scanning range bearing calibration based on sweep speed, comprises the following steps：
Piezoelectric scanner is controlled to carry out actual scanning imagery to standard sample with a series of different given sweep speeds,
And the relation of the actual scanning range of piezoelectric scanner and sweep speed is fitted according to the scanning imagery result of reality；
Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained, and combines the relation fitted
The actual scanning scope of piezoelectric scanner is corrected.
Preferred embodiment is further used as, the control piezoelectric scanner is with a series of different given sweep speeds
Actual scanning imagery is carried out to standard sample, and sweeping for piezoelectric scanner reality is fitted according to the scanning imagery result of reality
The step for retouching the relation of scope and sweep speed, specifically includes：
To piezoelectric scanner to be calibrated, standard sample is used to carry out reality with a series of different given sweep speeds
Scanning imagery, obtain the actual scanning scope that piezoelectric scanner to be calibrated corresponds to each sweep speed；
Correspond to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated, intended using approximating method
Close out the relation curve or relation function of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed.
Preferred embodiment is further used as, the approximating method is polynomial fitting method.
It is further used as preferred embodiment, the reality for obtaining piezoelectric scanner when being detected to sample
Border sweep speed, and the step for actual scanning scope of relation pair piezoelectric scanner fitted is corrected is combined, specifically
Including：
A kind of calibration method as reality is selected from offline postprocessing correction method and on line emendation method；
Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection,
And the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Preferred embodiment is further used as, it is described that piezoelectric scanner is obtained to tested according to the calibration method of selection
Actual scanning speed when sample is detected, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is carried out
The step for correction, specifically include：
After scanning probe microscopy obtains the testing result of sample, sample is obtained by the way of offline
Sweep speed in testing result；
According to the actual scanning model of piezoelectric scanner used in the sweep speed of acquisition and the scanning probe microscopy fitted
The relation with sweep speed is enclosed, off-line calibration is carried out to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy,
And then the testing result after sample calibration is obtained according to the actual scanning scope after off-line calibration.
Preferred embodiment is further used as, it is described that piezoelectric scanner is obtained to tested according to the calibration method of selection
Actual scanning speed when sample is detected, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is carried out
The step for correction, specifically include：
It is online to obtain reality of the piezoelectric scanner when being detected to sample used in scanning probe microscopy in real time
Sweep speed；
According to piezoelectric scanner used in the actual scanning speed obtained in real time online and the scanning probe microscopy fitted
Actual scanning range and the relation of sweep speed, enter to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy
Row on-line calibration, and then the testing result of sample is obtained according to the actual scanning scope after on-line calibration in real time.
Corresponding with Fig. 4 method, present invention also offers a kind of piezoelectric scanner scanning range based on sweep speed
Correction system, including：
Actual scanning is imaged and fitting module, for controlling piezoelectric scanner with a series of different given sweep speeds pair
Standard sample carries out actual scanning imagery, and fits the actual scanning of piezoelectric scanner according to the scanning imagery result of reality
The relation of scope and sweep speed；
Actual scanning scope correction module, for obtaining piezoelectric scanner actually sweeping when being detected to sample
Speed is retouched, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Preferred embodiment is further used as, the actual scanning imaging includes with fitting module：
Actual scanning imaging unit, for piezoelectric scanner to be calibrated, using standard sample with a series of different
Given sweep speed carries out actual scanning imagery, obtains the reality that piezoelectric scanner to be calibrated corresponds to each sweep speed
Scanning range；
Fitting unit, for corresponding to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated,
The relation curve or relation of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed are fitted using approximating method
Function.
Preferred embodiment is further used as, the actual scanning scope correction module includes：
Selecting unit, for selecting a kind of school as reality from offline postprocessing correction method and on line emendation method
Quasi- method；
Unit is corrected, for obtaining piezoelectric scanner when being detected to sample according to the calibration method of selection
Actual scanning speed, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
Preferred embodiment is further used as, the correction unit includes：
Off-line scan speed obtains subelement, for after scanning probe microscopy obtains the testing result of sample,
The sweep speed in the testing result of sample is obtained by the way of offline；
Off-line calibration subelement, for piezoelectricity used in the sweep speed according to acquisition and the scanning probe microscopy fitted
The relation of the actual scanning range of scanner and sweep speed, to the actual scanning of piezoelectric scanner used in scanning probe microscopy
Scope carries out off-line calibration, and then obtains the detection knot after sample calibration according to the actual scanning scope after off-line calibration
Fruit.
The present invention is further explained and illustrated with reference to Figure of description and specific embodiment.
Embodiment 1
The present embodiment illustrates to the general principle of the present invention and involved correlation theory.
Scanning probe microscopy controls probe to scan sample surfaces by piezoelectric scanner, synchronous detection and record probe
With the interaction signal of sample, so as to obtain the surface information of sample.Probe is actually probe and sample to Sample Scan
Controllable relative motion, both can be by the way of probe scanning, also can be by the way of Sample Scan, as shown in Figure 5 and Figure 6.
In Fig. 5 and Fig. 6,1 is sample, and 2 be probe, and 3 be piezoelectric scanner, and Fig. 5 is probe scanning mode, and Fig. 6 is
Sample Scan mode.In fact, the scanning motion of probe and sample is both relative motions, both modes are equivalent.
At present, partial scan probe microscope has installed displacement transducer additional in piezoelectric scanner, the displacement to scanner
Detected, and scanning range is modified in real time accordingly, it might even be possible to which the scanning motion to scanner carries out real-time online
Closed-loop control.But only a few displacement transducer such as capacitance sensor possesses nano-precision, its corresponding signal
Detection circuit is also more complicated, therefore using the technical scheme for installing displacement transducer additional, can increase system complexity, instrument first
Cost be also significantly increased；Moreover, when scanning probe microscopy carries out Regional High Resolution image checking to sample, scanner exists
A small range is scanned motion, now drives the even whole range of movement of motion step pitch of scanner to be above displacement sensing
The valid analysing range of device, therefore many instruments are when small range scans, in order to prevent sensor signal noise from causing control system
Vibration or disorder, all can closure sensor or cut-out close loop control circuit.In addition, sensor insertion is arranged on scanner
In, the overall dimension of scanner can be caused to increase, structure is also more complicated, and every kind of sensor has wanting for respective working environment
Ask, therefore (such as micro- space, vacuum environment) is limited in some special applications.
And the piezoelectric scanner of open loop with simple in construction, drive control due to facilitating, cost advantage is obvious, and in small model
Enclose, high resolution scanning when stability it is high the advantages that, be widely used in scanning probe microscopy.The piezoelectric scanner work of open loop
Determine that its actual scanning range is related to sweep speed during sample detection as principle, but the piezoelectric scanner of existing open loop is past
It is past to have ignored influence of the sweep speed to actual scanning scope, it is difficult to ensure the precision of testing result, it is detailed to this progress below
Explanation：
The principle of piezoelectric scanner is the piezoelectricity back wash effect using piezoelectric, motion is carried out by voltage accurate
Control.Because creep (straining the stability to the time), therefore, the deformation pair of piezoelectric ceramics in itself be present in piezoceramic material
In the voltage change applied response and non-instant reach stable, that is to say, that applying alive Spline smoothing will produce rapidly
A raw initial motion, and small change is persistently produced in a longer time scale afterwards, as shown in Figure 7.
In Fig. 7, abscissa is the time, and timeorigin is that the moment occurs for step voltage；Ordinate is the deformation under step voltage effect.
As seen from Figure 7, in a long-time, creep will be up to 1%~5%.In fact, the material that creep depends on piezoelectric ceramics is special
The factor such as property, dependent variable, external loading and time.Theory analysis shows that creep can be expressed as the logarithmic relationship of time, its letter
Number expression formula is as follows：
In formula (1), institute's having time occurs to start to calculate from the moment with step voltage, Δ l0.1For 0.1 second when piezoelectric ceramics
Deflection, γ are piezoelectric constants (γ values depend on piezoelectric material properties and size, load and environmental condition), and t is the time
(unit is the second).By formula (1) to the derivation of time t, the creep speed expression formula that can obtain piezoelectric ceramic tube is：
Wherein,
It was found from formula (2), creep slows down gradually with the time, and when t is sufficiently large, then creep is very small, the shape of piezoelectric ceramic tube
Change tends towards stability.
As the scanner of scanning probe microscopy, piezoelectric ceramics does round periodic motion under voltage driving, entirely
Scanning imagery process, piezoelectric ceramics are among dynamic process all the time, and sweep speed is faster, and creep is bigger, deviate stable state
It is more remote, therefore scanning range is smaller.This is matches mutually in theory with Fig. 3 experimental result.
As sample and the scanner of probe progress relative motion is controlled in scanning probe microscopy, although piezoelectric ceramics is
Core component therein, but its entirety must carry out complexity construction packages (including insulating support, probe fixed clamping device or
Sample stage, electrode bindiny mechanism etc.), moreover, piezoelectric ceramics itself is there is also material, structure, quality and inhomogeneities and adds
The differences such as work error, all these, are all the factor for hindering scanner quickly to move and the factor for deviateing perfect condition, with pressure
The intrinsic creep properties of electroceramics cooperatively acts, and can qualitatively deduce the scanning range of scanner with sweep speed
Increase and reduce.But, due to differences such as piezoceramic structures (piezoelectric ceramic tube or piezoelectric pile), material, encapsulation, mismachining tolerances
Establish a complete kinetic model and carry out the scanning motion of piezoelectric scanner in accurate description scanning probe microscopy, and obtain
Its scanning range is extremely difficult to the analytic solutions (Analytical Solution) of sweep speed；Obtained by simplified model
" sweep speed-scanning range " analytical function again because widely different without how many real value with actual result of the test.
Nevertheless, still the scanning range error caused by the scan speed change of scanner can be corrected.
The present invention proposes a kind of measured result according to scanner, is swept to what the relation of " sweep speed-scanning range " was fitted
Scope bearing calibration is retouched, using this method, the influence of sweep speed can be effectively eliminated, obtain accurate testing result.
Table 1 below is the quantitative statisticses tables of data measured by Fig. 3 experimental results.
The piezoelectric scanner sweep speed of table 1. and scanning range relation table
| Sweep speed (Hz) | 0.5 | 1.0 | 1.5 | 2.0 | 2.5 | 3.0 | 3.5 | 4.0 |
| Scanning range (μm) | 16.534 | 16.255 | 16.117 | 16.000 | 15.827 | 15.685 | 15.579 | 15.472 |
| Scanning range error | + 3.3% | + 1.6% | + 0.7% | 0 | - 1.1% | - 2.0% | - 2.6% | - 3.3% |
| Sweep speed (Hz) | 4.5 | 5.0 | 5.5 | 6.0 | 6.5 | 7.0 | 8.0 | 9.0 |
| Scanning range (μm) | 15.399 | 15.308 | 15.209 | 15.121 | 15.026 | 14.966 | 14.873 | 14.786 |
| Scanning range error | - 3.8% | - 4.3% | - 4.9% | - 5.5% | - 6.1% | - 6.5% | - 7.0% | - 7.6% |
| Sweep speed (Hz) | 10.0 | 12.0 | 14.0 | 16.0 | 18.0 | 20.0 | 22.0 | 24.0 |
| Scanning range (μm) | 14.695 | 14.513 | 14.383 | 14.219 | 14.122 | 14.076 | 14.005 | 13.955 |
| Scanning range error | - 8.2% | - 9.3% | - 10.1% | - 11.1% | - 11.7% | - 12.0% | - 12.5% | - 12.8% |
| Sweep speed (Hz) | 26.0 | 28.0 | 30.0 | 32.0 | 34.0 | 36.0 | 38.0 | 40.0 |
| Scanning range (μm) | 13.872 | 13.799 | 13.715 | 13.673 | 13.613 | 13.532 | 13.462 | 13.413 |
| Scanning range error | - 13.3% | - 13.8% | - 14.3% | - 14.5% | - 14.9% | - 15.4% | - 15.9% | - 16.2% |
From table 1 it is clear that with the quickening of sweep speed, the scanning range of scanner constantly reduces, if with
The error of scanning range caused by scan speed change is calculated on the basis of 2Hz sweep speeds, it can be deduced that：Work as sweep speed
For 0.5Hz when, scanning range adds 3.3%；When sweep speed is 10Hz, scanning range reduces 8.2%；When scanning speed
Spend for 20Hz when, scanning range reduces 12%；When sweep speed is 30Hz, scanning range reduces 14.3%；Work as scanning
When speed is 40Hz, scanning range reduces 16.2%.The above results also indicate that, unless sweep speed is limited in below 5Hz,
It just can guarantee that measurement error is less than 5%, if be not corrected to scanning range change caused by sweep speed, ordinary circumstance
Under, the error of testing result can more than 10%, therefore in order to meet the requirement of practical application and ensure the degree of accuracy of measurement result,
Scanning range change caused by sweep speed must be calibrated.
It is ordinate by abscissa, scanning range of sweep speed, " the scanning model shown in Fig. 8 is drawn out as the data of table 1
Enclose-sweep speed " graph of a relation.The scan velocity V of scanner and scanning range S are dull non-linear relation as seen from Figure 8.Pass through
S-V relations are fitted, establish function S=f (V), so that it may the change to scanning range caused by sweep speed is corrected,
Overcome the error of the testing result caused by scan speed change.
For scan velocity V and scanning range S nonlinear fitting, there are a variety of approximating methods in theory, below with most normal
Polynomial fitting method illustrates.The mathematic(al) representation of polynomial fitting method is as follows：
In formula (3), n is polynomial number, in principle, is fitted using the multinomial of more high reps, fitting degree
Higher, calculation error is also smaller.
By taking table 1 and Fig. 3 measured data as an example, it is fitted, can be obtained using 3 order polynomials：
S=16.451-2.622 × 10-1V+9.407×10-3V2-1.205×10-4V3 (4)
For the measured data of table 1 and Fig. 3, it is fitted, can obtains according to 4 order polynomials：
S=16.587-3.353 × 10-1V+1.834×10-V2-4.833×10-4V3+4.631×10-6V4 (5)
For the measured data of table 1 and Fig. 3, it is fitted, can be obtained using 5 order polynomials：
S=16.647-3.813 × 10-1V+2.706×10-2V2-1.092×10-3V3+2.215×10-5V4-1.771×
10-7V5 (6)
For the matched curve figure of formula (4)~(6) respectively as shown in Fig. 9~Figure 11, Fig. 9 is 3 order polynomial matched curve figures, right
The coefficient of determination R answered2It is worth for 0.9941；Figure 10 is 4 order polynomial matched curve figure line charts, corresponding coefficient of determination R2It is worth and is
0.9985；Figure 11 is 5 order polynomial matched curve figures, corresponding coefficient of determination R2It is worth for 0.9991.Coefficient of determination R2Value is multinomial
The index of formula Function Fitting degree, span is between 0~1, R2Value is closer to 1, and the reliability of function is higher, its numerical value
Reflect the solution of fitting function and the fitting degree between corresponding real data.It is corresponding that Figure 11 is can be seen that from Fig. 9~Figure 11
5 order polynomial fitting function formulas (6) R2For value closest to 1, fitting degree is best.
When table 2 below is the polynomial fit function progress numerical computations using formula (4)~(6) corresponding to different scanning speed
The statistical comparison table of scanning range and measured result.
The fitting of a polynomial of the scanning range of table 2. and measured result statistical form
As seen from Table 2, Function Fitting is carried out using 3 times, 4 times and 5 order polynomials, after fitted calibration, with measured result
Error can be controlled within 2%, 1% and 0.5%.That is, even if being fitted using 3 fairly simple order polynomials,
The measuring accuracy of scanning probe microscopy can be substantially improved, scanner is come from into sweep speed change is drawn scanning range change
Nearly 20% measurement error risen, reduces within 2%, measurement accuracy is improved into an order of magnitude, can meet one completely
As using characterize demand.
As the above analysis, the actual scanning scope of piezoelectric scanner has correlation with sweep speed, therefore of the invention
Propose a kind of calibration method using fitting correction method, the piezoelectric scanner that this method is calibrated to needs, using standard sample
Actual scanning imagery is carried out with a series of different sweep speeds, obtains the reality that the scanner corresponds to each sweep speed
Scanning range, so as to fit the relation curve or function of the actual scanning scope of the piezoelectric scanner and sweep speed, and with
This is foundation, and the change of actual scanning scope is calibrated caused by sweep speed when testing actual sample.Fitting correction method
It is a kind of empirical formula calibration method based on experimental data, as long as selecting enough different scanning speeds to be tested and obtained
Actually detected result, and the scope of these sweep speeds covers what the piezoelectric scanner may be used in instrument actual use
Sweep speed, the mechanism that speed etc. has an impact to scanning range need not be considered completely, therefore be also applied for non-depressed electroceramics
Other types scanner.
The fitting correction method being corrected according to sweep speed to the scanning range of scanner proposed by the invention, essence
On be it is a kind of be based on carrying out scanner actual measurement, and to the sweep speed and the experiment number of scanning range corresponding relation of acquisition
According to being fitted, so as to eliminate the Automatic Calibration Technique that sweep speed influences on piezoelectric scanner scanning range, therefore this method was both
Suitable for any kind of piezoelectric scanner, it is not required that any repacking is carried out to piezoelectric scanner, without increase hardware and into
This, the degree of accuracy of the testing result of scanning probe microscopy can be effectively improved, have it is simple and practical, wide adaptability it is obvious excellent
Gesture.
Change for scanner scanning range caused by sweep speed, user can be obtained using above-mentioned fitting correction method
Relation curve or function be corrected, concrete implementation method is divided into offline postprocessing correction method and real-time online corrects automatically
Method.
Wherein, the offline postprocessing correction method of scanning range, exactly after scanning probe microscopy obtains testing result, from
The sweep speed that line is obtained in the testing result (can be by the way that when being detected to sample, the every piece image of synchronous recording being swept
The mode for retouching speed obtains), according to the sweep speed of scanner used and the relation of scanning range fitted, to testing result
Calibrated, finally give the accurate testing result after calibration.Offline postprocessing correction method, introduce sweep speed this parameter
To be calibrated to having obtained result, so as to the result after being calibrated, the result eliminates sweep speed to scanning range
Influence, effectively increase the degree of accuracy of testing result.Offline postprocessing correction method is located after being carried out just for the test result of system
Reason correction, it is unrelated with scanning probe microscopy control system, it need to only understand the data format of testing result, so that it may carry out offline school
Standard, the new data after generation calibration.
The automatic correction method of real-time online of scanning range, is exactly integrated into scanning probe microscopy by above-mentioned fitting correction method
Detection imaging control system in, so when being detected to sample, system is according to current sweep speed, in real time to scanning
Scope is calibrated automatically, eliminates influence of the sweep speed to scanning range, can be directly obtained according to Current Scan speed
Result after being calibrated, effectively increase the degree of accuracy of testing result.Compared with offline postprocessing correction method, real-time online school
It is more convenient to execute, but on line emendation method needs to enter the online scan control software of scanning probe microscopy control system
Row modification, and apparatus manufacture does not provide a user source program or development interface typically, therefore its general apparatus manufacture that is only applicable to will
In its embedded control system, the performance of instrument is set to be lifted.
Although the piezoelectric scanner of the explanation based on scanning probe microscopy of the present embodiment, but it is also suitable for other using pressure
The situation that the motion of electroceramics driving is calibrated according to movement velocity to its traveled distance.
One of the core component of piezoelectric scanner as scanning probe microscopy, the control accuracy of its range of movement, directly
Have influence on the degree of accuracy of test result.The present invention is directed to shadow of the sweep speed to the actual scanning scope of piezoelectric scanner first
Ring, it is proposed that a kind of scanning range bearing calibration for improving scanning probe microscopy measurement accuracy, this method need not increase system
Hardware and cost, have simple and practical, the advantages of wide adaptability, be also applied for the transformation and upgrade of existing instrument, especially from
Line postprocessing correction method, be not related to any transformation to existing instrument system, only need to test result used in scanner
Characteristic is calibrated, the precision with regard to that can improve test result, suitable for any scanning probe microscopy.
Generally speaking, bearing calibration proposed by the present invention and system, effectively correct and pressed caused by sweep speed changes
The change of electrical scanner scanning range, the high accuracy of testing result is realized, meet scientific research and industry is applied to sweeping
Retouch the actual requirement of the high-resolution of probe microscope, high accuracy and low cost.
Above is the preferable implementation to the present invention is illustrated, but the present invention is not limited to the embodiment, ripe
A variety of equivalent variations or replacement can also be made on the premise of without prejudice to spirit of the invention by knowing those skilled in the art, this
Equivalent deformation or replacement are all contained in the application claim limited range a bit.
Claims (10)
- A kind of 1. piezoelectric scanner scanning range bearing calibration based on sweep speed, it is characterised in that：Comprise the following steps：Piezoelectric scanner is controlled to carry out actual scanning imagery, and root to standard sample with a series of different given sweep speeds Factually the scanning imagery result on border fits the relation of the actual scanning range of piezoelectric scanner and sweep speed；Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained, and combines the relation pair pressure fitted The actual scanning scope of electrical scanner is corrected.
- 2. a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed according to claim 1, its feature It is：The control piezoelectric scanner carries out reality to standard sample with a series of different given sweep speeds and is scanned into Picture, and it is related to this according to what the scanning imagery result of reality fitted the actual scanning range of piezoelectric scanner and sweep speed Step, specifically include：To piezoelectric scanner to be calibrated, standard sample is used to carry out actual scanning with a series of different given sweep speeds Imaging, obtain the actual scanning scope that piezoelectric scanner to be calibrated corresponds to each sweep speed；Correspond to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated, fitted using approximating method The relation curve or relation function of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed.
- 3. a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed according to claim 2, its feature It is：The approximating method is polynomial fitting method.
- 4. a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed according to claim 1,2 or 3, its It is characterised by：The actual scanning speed that piezoelectric scanner is obtained when being detected to sample, and combine and fit The actual scanning scope of relation pair piezoelectric scanner the step for being corrected, specifically include：A kind of calibration method as reality is selected from offline postprocessing correction method and on line emendation method；Actual scanning speed of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection, and tied The actual scanning scope for closing the relation pair piezoelectric scanner fitted is corrected.
- 5. a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed according to claim 4, its feature It is：It is described that actual scanning speed of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection The step for spending, and being corrected with reference to the actual scanning scope of the relation pair piezoelectric scanner fitted, specifically includes：After scanning probe microscopy obtains the testing result of sample, the detection of sample is obtained by the way of offline As a result the sweep speed in；According to the actual scanning range of piezoelectric scanner used in the sweep speed of acquisition and the scanning probe microscopy fitted with The relation of sweep speed, off-line calibration is carried out to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy, and then Testing result after sample calibration is obtained according to the actual scanning scope after off-line calibration.
- 6. a kind of piezoelectric scanner scanning range bearing calibration based on sweep speed according to claim 4, its feature It is：It is described that actual scanning speed of the piezoelectric scanner when being detected to sample is obtained according to the calibration method of selection The step for spending, and being corrected with reference to the actual scanning scope of the relation pair piezoelectric scanner fitted, specifically includes：It is online to obtain actual scanning of the piezoelectric scanner when being detected to sample used in scanning probe microscopy in real time Speed；It is actual according to piezoelectric scanner used in the actual scanning speed obtained in real time online and the scanning probe microscopy fitted Scanning range and sweep speed relation, the actual scanning scope of piezoelectric scanner used in scanning probe microscopy exist Line is calibrated, and then obtains the testing result of sample in real time according to the actual scanning scope after on-line calibration.
- A kind of 7. piezoelectric scanner scanning range correction system based on sweep speed, it is characterised in that：Including：Actual scanning is imaged and fitting module, for controlling piezoelectric scanner with a series of different given sweep speeds to standard Sample carries out actual scanning imagery, and fits the actual scanning range of piezoelectric scanner according to the scanning imagery result of reality With the relation of sweep speed；Actual scanning scope correction module, for obtaining actual scanning speed of the piezoelectric scanner when being detected to sample Degree, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
- 8. a kind of piezoelectric scanner scanning range correction system based on sweep speed according to claim 7, its feature It is：The actual scanning imaging includes with fitting module：Actual scanning imaging unit, for piezoelectric scanner to be calibrated, using standard sample to be given with a series of different Sweep speed carries out actual scanning imagery, obtains the actual scanning that piezoelectric scanner to be calibrated corresponds to each sweep speed Scope；Fitting unit, for corresponding to the actual scanning scope of each sweep speed according to piezoelectric scanner to be calibrated, use Approximating method fits the relation curve or relation function of the actual scanning range of piezoelectric scanner to be calibrated and sweep speed.
- 9. a kind of piezoelectric scanner scanning range correction system based on sweep speed according to claim 7 or 8, it is special Sign is：The actual scanning scope correction module includes：Selecting unit, for selecting a kind of calibration side as reality from offline postprocessing correction method and on line emendation method Method；Unit is corrected, for obtaining reality of the piezoelectric scanner when being detected to sample according to the calibration method of selection Sweep speed, and the actual scanning scope for combining the relation pair piezoelectric scanner fitted is corrected.
- 10. a kind of piezoelectric scanner scanning range correction system based on sweep speed according to claim 9, its feature It is：The correction unit includes：Off-line scan speed obtains subelement, for after scanning probe microscopy obtains the testing result of sample, using Offline mode obtains the sweep speed in the testing result of sample；Off-line calibration subelement, for piezoelectric scanning used in the sweep speed according to acquisition and the scanning probe microscopy fitted The relation of the actual scanning range of device and sweep speed, to the actual scanning scope of piezoelectric scanner used in scanning probe microscopy Off-line calibration is carried out, and then the testing result after sample calibration is obtained according to the actual scanning scope after off-line calibration.
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| CN111830288A (en) * | 2020-07-22 | 2020-10-27 | 合肥工业大学 | Path planning method for AFM low-drift large-range scanning measurement |
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